CN109382700A - Rigidity adaptive fast tool servo and method based on magnetorheological body - Google Patents

Rigidity adaptive fast tool servo and method based on magnetorheological body Download PDF

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Publication number
CN109382700A
CN109382700A CN201811453645.5A CN201811453645A CN109382700A CN 109382700 A CN109382700 A CN 109382700A CN 201811453645 A CN201811453645 A CN 201811453645A CN 109382700 A CN109382700 A CN 109382700A
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China
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rigidity
magnetorheological body
piezoelectric ceramics
frame
actuator
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CN201811453645.5A
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CN109382700B (en
Inventor
王文
王健
卢科青
时光
杨贺
陈占锋
王瑞金
居冰峰
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Zhejiang University ZJU
Hangzhou Dianzi University
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Zhejiang University ZJU
Hangzhou Dianzi University
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/12Adaptive control, i.e. adjusting itself to have a performance which is optimum according to a preassigned criterion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/09Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
    • B23Q17/0952Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining
    • B23Q17/0966Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining by measuring a force on parts of the machine other than a motor

Abstract

The invention discloses rigidity adaptive fast tool servos and method based on magnetorheological body.The existing adjustable fast tool servo of rigidity cannot achieve adjusts rigidity in real time.The present invention includes knife rest fixing piece, diamond cutter, tool apron, coil, pressure sensor, displacement output, sensor fixture, capacitance displacement sensor, cylindricality piezoelectric ceramics actuator, frame, magnetorheological body installation part, adjusts bolt, magnetorheological body and screw.The present invention measures fast tool servo by pressure sensor and capacitance displacement sensor and is displaced in the cutting force size and reality output of process, calculate the electrical current size that cutting deformation error carrys out control coil, and then change magnetic field strength, to control the rigidity of magnetorheological body, the rigidity adaptive on-line control of whole device is realized.The present invention can effectively prevent tool apron in the offset deviation of vertical cylindricality piezoelectric ceramics actuator axis direction.

Description

Rigidity adaptive fast tool servo and method based on magnetorheological body
Technical field
The invention belongs to Ultra-precision Turning equipment technical fields, and in particular to a kind of rigidity based on magnetorheological body is adaptive Answer fast tool servo and its rigidity adaptive method.
Background technique
Recently as the development of photoelectronics, optical element is in a series of science and technology necks such as space flight, military affairs, medicine, communication Play the role of crucial or even conclusive in domain, non-rotational symmetric optical surface element has become irreplaceable for photoelectricity Key components and parts.Traditional processing is not able to satisfy process requirements increasingly, and there is also very big for many emerging processing methods Limitation, therefore, superiority of fast tool servo (FTS) technology in complicated asymmetric Free-form Surface Parts are more and more brighter It is aobvious.
Rigidity is to measure the size of device resistance capacity to deformation under external force, rigidity include static rigidity and dynamic just Degree.The variation of cutting depth is so that cutting force is also non-uniform in asymmetric Free-Form Surface Machining.Cutting force by static force and Dynamic force composition, static force only influences the size of workpiece, and dynamic force then directly affects the shape of workpiece.If fast tool is watched The rigidity that clothes are set is very low, and " error is rerun a movie " effect of cutting process is just very serious, will be greatly reduced machining accuracy, or even meeting Cutting-vibration is caused, the stability of entire cutting process is influenced.
The existing adjustable fast tool servo of rigidity is to realize that rigidity manually adjusts by holddown spring mostly, It is affected by human factors in adjustment process greatly, and cannot achieve and adjust rigidity in real time, be unable to satisfy modernization fast tool and watch The dynamic requirements that clothes are set.
Summary of the invention
It is an object of the invention in view of the defects existing in the prior art, propose a kind of rigidity based on magnetorheological body from Adapt to fast tool servo and its rigidity adaptive method.
The present invention is achieved by the following technical solutions:
The present invention is based on the rigidity adaptive fast tool servos of magnetorheological body, including knife rest fixing piece, Buddha's warrior attendant Stone cutter, tool apron, coil, pressure sensor, displacement output, sensor fixture, capacitance displacement sensor, cylindricality piezoelectricity pottery Porcelain actuator, magnetorheological body installation part, adjusts bolt, magnetorheological body and screw at frame.The frame include one at Frame front-axle beam, cruciform bracing, the frame back rest and the rounding straight beam type flexible hinge of type;Behind one end of two cruciform bracings and frame Beam both ends are separately connected, the two rounding straight beam type flexible hinges and frame that the other end of two cruciform bracings is arranged by spacing The connection of frame front-axle beam;Four rounding straight beam type flexible hinge array arrangements are in frame front-axle beam two sides;The rounding straight beam type is flexible Hinge includes straight beam and the two flexible connection beams for being integrally formed and being arranged in straight beam both ends;Two flexible connection beams are separately connected Frame front-axle beam and the corresponding cruciform bracing surveyed;There is circle in the junction of straight beam, cruciform bracing and frame front-axle beam and flexible connection beam Angle.The frame back rest, frame front-axle beam, two cruciform bracings and two rounding straight beam type flexible hinges close to the frame back rest are encircled into Actuator places chamber;The frame back rest offers screwed hole of centre and two connection screw threads for being symmetrically positioned in screwed hole of centre two sides Hole.The tool apron is fixed on frame front-axle beam front end, and diamond cutter is fixed on tool apron by knife rest fixing piece.The frame Frame front-axle beam offers coil and places mouth, and coil is fixed on coil by gluing and places in mouth.The pressure sensor is fixed on Frame front-axle beam rear end;The described cylindricality piezoelectric ceramics actuator setting placed in actuator it is intracavitary, and be located at pressure sensor with Between the frame back rest;Cylindricality piezoelectric ceramics actuator and frame front-axle beam are coaxially disposed;The magnetorheological body installation part opens up There is magnetorheological body mounting groove, and is placed in magnetorheological body and be equipped with integrally formed limited block at groove center;The limit Block offers central through hole;Magnetorheological body installation part is also provided with about the symmetrical two connections through-hole of central through hole;It is described Magnetorheological body be placed in the magnetorheological body mounting groove of magnetorheological body installation part, and be nested on limited block;Magnetic current The each connection through-hole connection screw thread hole corresponding with the frame back rest for becoming body installation part is connected by screw to;Adjust bolt It is connect across the central through hole of magnetorheological body installation part, and with the screwed hole of centre of the frame back rest;Cylindricality piezoelectric ceramics actuates Device both ends are limited by the tail portion of pressure sensor and adjusting bolt respectively;Sensor fixture is fixed on cruciform bracing, capacitor Displacement sensor is fixed on sensor fixture;Displacement output one end is fixed on frame front-axle beam, other end face capacitor The gauge head of displacement sensor.The signal output end of pressure sensor, capacitance displacement sensor and cylindricality piezoelectric ceramics actuator is equal It is connect with controller;The signal input part of the power supply source of coil is connect with controller.
The process of the frame is as follows: firstly, being cut into actuator placement on blocky stainless steel by wire cutting Chamber and four rounding straight beam type flexible hinges, to form frame front-axle beam, the frame back rest and two cruciform bracings;Then, in frame Tapping forms screwed hole of centre and two connection screw thread holes on the frame back rest.
The cylindricality piezoelectric ceramics actuator changes voice coil motor into.
The rigidity adaptive method of the rigidity adaptive fast tool servo based on magnetorheological body, specifically such as Under:
1) by the stiffness K of cylindricality piezoelectric ceramics actuatorPZTIt is prestored in controller, by adjusting bolt adjustable column The pretightning force of shape piezoelectric ceramics actuator.
2) cylindricality piezoelectric ceramics actuator input displacement, pressure sensor measure diamond cutter in process by Along cylindricality piezoelectric ceramics actuator shaft to cutting force Fy, capacitance displacement sensor measures diamond cutter along cylindricality piezoelectric ceramics The output displacement l of actuator axis directionmech;Controller reads Fy、lmechWith the input displacement of cylindricality piezoelectric ceramics actuator lPZT, and the entire rigidity adaptive fast tool servo based on magnetorheological body is calculated by (1) formula and (2) formula Stiffness KmechAnd diamond cutter along cylindricality piezoelectric ceramics actuator shaft to cutting deformation error delta y.
3) when cutting deformation error delta y is more than preset value, controller output control signal increases the electrical current of coil Size, increasing magnetic field, to increase the rigidity of magnetorheological body, the rigidity adaptive entirely based on magnetorheological body is quick The rigidity of cutter servo device becomes larger, when cutting deformation error delta y is equal to the 95% of preset value, the energization electricity of hold-in winding It flows constant;When cutting deformation error delta y is lower than the 80% of preset value, controller output control signal reduces the energization electricity of coil Size is flowed, when cutting deformation error delta y is equal to the 95% of preset value, the electrical current of hold-in winding is constant.
The invention has the benefit that
1, the present invention utilizes magnetorheological body this characteristic of stiffness variation under magnetic field excitation, passes through pressure sensor and electricity Hold displacement sensor and measure fast tool servo in cutting force size and the reality output displacement of process, calculates and cut The electrical current size that distortion inaccuracy carrys out control coil is cut, and then changes magnetic field strength, so that the rigidity of magnetorheological body is controlled, Realize the rigidity adaptive on-line control of whole device.
2, frame front-axle beam of the invention is the connector of double parallel four-bar mechanism, and cylindricality piezoelectric ceramics actuator and frame Front-axle beam coaxial arrangement, therefore, when adjusting the pretightning force of cylindricality piezoelectric ceramics actuator by adjusting bolt or cylindricality piezoelectricity is made pottery When porcelain actuator input displacement, the displacement that tool apron can be effectively prevented in vertical cylindricality piezoelectric ceramics actuator axis direction is inclined Difference improves diamond cutter along the linearity of cylindricality piezoelectric ceramics actuator axis direction output displacement, to improve entire dress The precision set.
Detailed description of the invention
Fig. 1 is the overall structure diagram of apparatus of the present invention;
Fig. 2 is the assembling schematic diagram of magnetorheological body and magnetorheological body installation part in the present invention;
Fig. 3 is the perspective view of magnetorheological body installation part in the present invention;
Fig. 4 is the structural schematic diagram of frame in the present invention.
Specific embodiment
It elaborates below in conjunction with attached drawing to the present invention.
As shown in figs. 1 and 4, it is fixed based on the rigidity adaptive fast tool servo of magnetorheological body, including knife rest Part 1, diamond cutter 2, tool apron 3, coil 5, pressure sensor 6, displacement output 7, sensor fixture 8, capacitive displacement pass Sensor 9, frame 11, magnetorheological body installation part 12, adjusts bolt 13, magnetorheological body 14 at cylindricality piezoelectric ceramics actuator 10 With screw 15.Frame 11 includes integrally formed frame front-axle beam 11-1, cruciform bracing 11-2, frame back rest 11-3 and rounding straight beam Type flexible hinge 4;One end of two cruciform bracing 11-2 is separately connected with the both ends frame back rest 11-3, two cruciform bracing 11-2 The other end by spacing be arranged two rounding straight beam type flexible hinges 4 connect with frame front-axle beam 11-1;Four roundings are straight 4 array arrangement of beam type flexible hinge is in the two sides frame front-axle beam 11-1;Rounding straight beam type flexible hinge 4 includes straight beam and integrated molding And two flexible connection beams at straight beam both ends are set;Two flexible connection beams are separately connected frame front-axle beam 11-1 and correspond to survey Cruciform bracing 11-2;Straight beam, cruciform bracing 11-2 and frame front-axle beam 11-1 and the junction of flexible connection beam are rounded down.Frame Back rest 11-3, frame front-axle beam 11-1, two cruciform bracing 11-2 and two rounding straight beam types flexibilities close to frame back rest 11-3 Hinge 4 is encircled into actuator and places chamber;Frame back rest 11-3 offers screwed hole of centre and is symmetrically positioned in screwed hole of centre two sides Two connection screw thread holes.The process of frame 11 is as follows: firstly, being cut on blocky 304 stainless steels by wire cutting Actuator places chamber and four rounding straight beam type flexible hinges 4, to form frame front-axle beam 11-1, frame back rest 11-3 and two Cruciform bracing 11-2;Then, tapping forms screwed hole of centre and two connection screw thread holes on frame back rest 11-3.Tool apron 3 is solid It is scheduled on the front end frame front-axle beam 11-1, diamond cutter 2 is fixed on tool apron 3 by knife rest fixing piece 1.Frame front-axle beam 11-1 is opened up There is coil to place mouth, coil 5 is fixed on coil by gluing and places in mouth.After pressure sensor 6 is fixed on frame front-axle beam 11-1 End;The setting of cylindricality piezoelectric ceramics actuator 10 placed in actuator it is intracavitary, and be located at pressure sensor 6 and frame back rest 11-3 it Between;Cylindricality piezoelectric ceramics actuator 10 and frame front-axle beam 11-1 are coaxially disposed;As shown in Figures 2 and 3, magnetorheological body installation part 12 Magnetorheological body mounting groove is offered, and is placed in magnetorheological body and is equipped with integrally formed limited block at groove center;Limited block Offer central through hole;Magnetorheological body installation part 12 is also provided with about the symmetrical two connections through-hole of central through hole;Magnetic current Become body 14 to be placed in the magnetorheological body mounting groove of magnetorheological body installation part 12, and is nested on limited block;It is magnetorheological Each connection through-hole of body installation part 12 connection screw thread hole corresponding with frame back rest 11-3 is connected by screw 15;It adjusts It saves bolt 13 and passes through the central through hole of magnetorheological body installation part 12, and connect with the screwed hole of centre of frame back rest 11-3;Column 10 both ends of shape piezoelectric ceramics actuator are limited by the tail portion of pressure sensor 6 and adjusting bolt 13 respectively;By adjusting bolt 13 The pretightning force of adjustable cylindricality piezoelectric ceramics actuator 10.Sensor fixture 8 is fixed on cruciform bracing 10-2, capacitor position Displacement sensor 9 is fixed on sensor fixture 8;Displacement 7 one end of output is fixed on frame front-axle beam 11-1, other end face The gauge head of capacitance displacement sensor 9.The signal of pressure sensor 6, capacitance displacement sensor 9 and cylindricality piezoelectric ceramics actuator is defeated Outlet is connect with controller;The power supply source signal input part of coil 5 is connect with controller.
Cylindricality piezoelectric ceramics actuator 10 can change voice coil motor into as driver.
The rigidity adaptive method of the rigidity adaptive fast tool servo based on magnetorheological body, specifically such as Under:
1) by the stiffness K of cylindricality piezoelectric ceramics actuatorPZTIt is prestored in controller, is adjusted by adjusting bolt 13 The pretightning force of cylindricality piezoelectric ceramics actuator 10.
2) 10 input displacement of cylindricality piezoelectric ceramics actuator, pressure sensor 6 measure diamond cutter 2 in process By along cylindricality piezoelectric ceramics actuator shaft to cutting force Fy, capacitance displacement sensor 9 measures diamond cutter 2 along cylindricality pressure The output displacement l of 10 axis direction of electroceramics actuatormech;Controller reads Fy、lmechIt is defeated with cylindricality piezoelectric ceramics actuator Enter to be displaced lPZT, and rigidity adaptive fast tool servo entirely based on magnetorheological body is calculated by (1) formula and (2) formula The stiffness K of devicemechAnd diamond cutter 2 along cylindricality piezoelectric ceramics actuator shaft to cutting deformation error delta y.
3) it when cutting deformation error delta y is more than preset value, i.e., when system stiffness is inadequate, reruns a movie to reduce error to adding The influence of work precision, controller output control signal increase the electrical current size of coil 5, increasing magnetic field, to increase The rigidity of magnetorheological body.The component of magnetorheological body and frame and magnetorheological body installation part 12 can be equivalent at two springs The rigidity of parallel connection, magnetorheological body becomes larger, and leads to rigidity adaptive fast tool servo entirely based on magnetorheological body Rigidity become larger, until cutting deformation error delta y be equal to preset value 95% when, the electrical current of hold-in winding 5 is constant;When cutting Cut distortion inaccuracy Δ y be lower than preset value 80% when, i.e., (by (1) formula it is found that l when system stiffness has very big surplusmechWith Kmech It is inversely proportional, i.e. KmechBecome larger, lmechBecome smaller, therefore, system stiffness surplus is excessive, only can reduce diamond cutter 2 along cylindricality piezoelectricity The range of ceramic 10 axis direction of actuator, it is seen then that KmechIt is not to be the bigger the better), controller output control signal subtracts The electrical current size of small coil 5, when cutting deformation error delta y is equal to the 95% of preset value, the energization electricity of hold-in winding 5 It flows constant.The rigidity adaptive that the above process realizes whole device is adjusted.
It is ipsilateral since four 4 array arrangements of rounding straight beam type flexible hinge are in the two sides frame front-axle beam 11-1 in the present invention Two rounding straight beam type flexible hinges 4 and frame front-axle beam 11-1 and respective side cruciform bracing 11-2 form a parallel four-bar machine Structure, thus connector of the frame front-axle beam 11-1 for double parallel four-bar mechanism, and cylindricality piezoelectric ceramics actuator 10 and frame front-axle beam 11-1 coaxial arrangement, therefore, by adjust bolt 13 adjust cylindricality piezoelectric ceramics actuator 10 pretightning force when or cylindricality pressure When electroceramics 10 input displacement of actuator, tool apron 3 can be effectively prevented in vertical 10 axis side of cylindricality piezoelectric ceramics actuator To offset deviation, improve diamond cutter 2 along 10 axis direction output displacement of cylindricality piezoelectric ceramics actuator the linearity, from And improve the precision of whole device.

Claims (4)

1. the rigidity adaptive fast tool servo based on magnetorheological body, including knife rest fixing piece, diamond cutter, knife Seat, cylindricality piezoelectric ceramics actuator, frame and adjust bolt, it is characterised in that: further include coil, pressure sensor, displacement it is defeated Part, sensor fixture, capacitance displacement sensor, magnetorheological body installation part, magnetorheological body and screw out;The frame Including integrally formed frame front-axle beam, cruciform bracing, the frame back rest and rounding straight beam type flexible hinge;The one of two cruciform bracings End is separately connected with frame back rest both ends, and two rounding straight beam types that the other end of two cruciform bracings is arranged by spacing are soft Property hinge is connect with frame front-axle beam;Four rounding straight beam type flexible hinge array arrangements are in frame front-axle beam two sides;The rounding Straight beam type flexible hinge includes straight beam and the two flexible connection beams for being integrally formed and being arranged in straight beam both ends;Two flexible connections Beam is separately connected frame front-axle beam and the corresponding cruciform bracing surveyed;The company of straight beam, cruciform bracing and frame front-axle beam and flexible connection beam The place of connecing is rounded down;The frame back rest, frame front-axle beam, two cruciform bracings and two rounding straight beam types flexibilities close to the frame back rest Hinge is encircled into actuator and places chamber;The frame back rest offers screwed hole of centre and is symmetrically positioned in two of screwed hole of centre two sides Connection screw thread hole;The tool apron is fixed on frame front-axle beam front end, and diamond cutter is fixed on tool apron by knife rest fixing piece; The frame front-axle beam offers coil and places mouth, and coil is fixed on coil by gluing and places in mouth;The pressure sensing Device is fixed on frame front-axle beam rear end;The cylindricality piezoelectric ceramics actuator setting is intracavitary in actuator placement, and is located at pressure Between sensor and the frame back rest;Cylindricality piezoelectric ceramics actuator and frame front-axle beam are coaxially disposed;The magnetorheological body peace Piece installing offers magnetorheological body mounting groove, and places in magnetorheological body and be equipped with integrally formed limited block at groove center;Institute The limited block stated offers central through hole;Magnetorheological body installation part is also provided with logical about symmetrical two connections of central through hole Hole;The magnetorheological body is placed in the magnetorheological body mounting groove of magnetorheological body installation part, and is nested in limited block On;Each connection through-hole of magnetorheological body installation part connection screw thread hole corresponding with the frame back rest is connected by screw to; It adjusts bolt and passes through the central through hole of magnetorheological body installation part, and connect with the screwed hole of centre of the frame back rest;Cylindricality piezoelectricity Ceramic actuator both ends are limited by the tail portion of pressure sensor and adjusting bolt respectively;Sensor fixture is fixed on cruciform bracing On, capacitance displacement sensor is fixed on sensor fixture;Displacement output one end is fixed on frame front-axle beam, another to rectify To the gauge head of capacitance displacement sensor;The signal of pressure sensor, capacitance displacement sensor and cylindricality piezoelectric ceramics actuator is defeated Outlet is connect with controller;The signal input part of the power supply source of coil is connect with controller.
2. the rigidity adaptive fast tool servo according to claim 1 based on magnetorheological body, feature exist In: the process of the frame is as follows: firstly, being cut into actuator on blocky stainless steel by wire cutting places chamber and four A rounding straight beam type flexible hinge, to form frame front-axle beam, the frame back rest and two cruciform bracings;Then, in the frame back rest Upper tapping forms screwed hole of centre and two connection screw thread holes.
3. the rigidity adaptive fast tool servo according to claim 1 or 2 based on magnetorheological body, feature Be: the cylindricality piezoelectric ceramics actuator changes voice coil motor into.
4. the rigidity of the rigidity adaptive fast tool servo according to claim 1 or claim 2 based on magnetorheological body is certainly Adaptive method, it is characterised in that: this is specific as follows:
1) by the stiffness K of cylindricality piezoelectric ceramics actuatorPZTIt is prestored in controller, adjusts cylindricality pressure by adjusting bolt The pretightning force of electroceramics actuator;
2) cylindricality piezoelectric ceramics actuator input displacement, pressure sensor measure diamond cutter in process by along column Shape piezoelectric ceramics actuator shaft to cutting force Fy, capacitance displacement sensor measures diamond cutter and actuates along cylindricality piezoelectric ceramics The output displacement l of device axis directionmech;Controller reads Fy、lmechWith the input displacement l of cylindricality piezoelectric ceramics actuatorPZT, and The rigidity of the entirely rigidity adaptive fast tool servo based on magnetorheological body is calculated by (1) formula and (2) formula KmechAnd diamond cutter along cylindricality piezoelectric ceramics actuator shaft to cutting deformation error delta y;
3) when cutting deformation error delta y is more than preset value, controller output control signal increases the electrical current size of coil, Increasing magnetic field, to increase the rigidity of magnetorheological body, entirely based on the rigidity adaptive fast tool of magnetorheological body The rigidity of servomechanism installation becomes larger, and when cutting deformation error delta y is equal to the 95% of preset value, the electrical current of hold-in winding is not Become;When cutting deformation error delta y is lower than the 80% of preset value, the electrical current that controller output control signal reduces coil is big Small, when cutting deformation error delta y is equal to the 95% of preset value, the electrical current of hold-in winding is constant.
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CN110605407A (en) * 2019-08-01 2019-12-24 杭州电子科技大学 Micro-disturbance-based air floatation main shaft axial dynamic stiffness self-adaption device and method
CN110605407B (en) * 2019-08-01 2024-04-05 杭州电子科技大学 Air floatation spindle axial dynamic stiffness self-adaptive device and method based on micro-disturbance
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CN110757250B (en) * 2019-11-26 2024-04-09 江苏集萃精凯高端装备技术有限公司 Ultra-high precision positioning and adjusting device
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JP7319741B2 (en) 2020-05-22 2023-08-02 浙江大学 Electromagnetic driven high-speed tool servo system with flexible hinge combination mechanism
CN111872746A (en) * 2020-08-01 2020-11-03 浙江大学 Mechanical flexible mechanism capable of realizing single-axis, double-axis and three-axis force detection functions
CN111872746B (en) * 2020-08-01 2022-02-08 浙江大学 Mechanical flexible mechanism capable of realizing single-axis, double-axis and three-axis force detection functions
CN112338623A (en) * 2020-10-30 2021-02-09 齐鲁工业大学 Rigidity self-adjusting fast cutter servo device
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