CN109366348A - A kind of removable ceramic sucker base - Google Patents
A kind of removable ceramic sucker base Download PDFInfo
- Publication number
- CN109366348A CN109366348A CN201811438532.8A CN201811438532A CN109366348A CN 109366348 A CN109366348 A CN 109366348A CN 201811438532 A CN201811438532 A CN 201811438532A CN 109366348 A CN109366348 A CN 109366348A
- Authority
- CN
- China
- Prior art keywords
- strip groove
- counter sink
- threaded hole
- stripe board
- hexagon socket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
Abstract
The present invention provides a kind of removable ceramic sucker base, including grinding pedestal, bottom plate is arranged in the grinding pedestal upper surface, the bottom plate upper surface ceramic sucker is installed by bolt, strip groove one is opened up on the right side of the bottom plate upper surface, the one interior lower end face of strip groove opens up counter sink one, strip groove two is opened up on the left of the bottom plate upper surface, the two interior lower end face of strip groove opens up counter sink two, hexagon socket head cap screw one is assigned in the counter sink one, one lower end of hexagon socket head cap screw is engaged in threaded hole one, hexagon socket head cap screw two is assigned in the counter sink two, two lower end of hexagon socket head cap screw is engaged in threaded hole two, one upper inside of strip groove assigns stripe board one, two upper inside of strip groove assigns stripe board two, compared with prior art, the present invention is with following the utility model has the advantages that realizing local replacing pottery The purpose of porcelain sucker reduces the difficulty of ceramic sucking disc cleaning.
Description
Technical field
The present invention is a kind of removable ceramic sucker base, belongs to chip manufacture apparatus field.
Background technique
As market is incremented by chip finger print identification function demand, chip package process also accordingly changes, wherein
One is just polished to substrate in the hope of reaching corresponding surface roughness, thickness and planarity requirements.Currently employed polishing type
Number be VG-500, its working principle is that by substrate with ceramic sucker suction on grinding pedestal, main shaft rotation and grinding pedestal from
Turn to realize polishing function, recycles clear water to take away abrasive dust, realize cleaning function.
Existing technical disadvantages at this stage: part abrasive dust can enter ceramic sucker and result in blockage, this will cause two influences,
First can not effectively be sucked substrate in polishing stage, ceramic sucker, and substrate may be due to main shaft high speed rotation in operational process
Winged by getting rid of, second in wash phase, and because ceramic sucker blocks, cleaning solution can not be successfully discharge, cause internal pressure excessive so that
Ceramic sucker is forcibly separated damage equipment with grinding pedestal and can not continue to produce, because ceramic sucker and grinding pedestal are one
Body, overall volume is excessive and is not available ultrasonic cleaning and disassembly inconvenience, can only polish off ceramic sucker surface layer, but the party
For method there are disadvantage, exactly ceramic sucker can be more and more thinner up to not being available, and can only replace entire grinding pedestal, increase is produced into
This.
Summary of the invention
In view of the deficienciess of the prior art, it is an object of the present invention to provide a kind of removable ceramic sucker bases, to solve
The problems mentioned above in the background art, present invention disassembly is convenient, has the oblique function of abrasionproof, long service life.
To achieve the goals above, the present invention is to realize by the following technical solutions: a kind of removable ceramic sucker
Bottom plate is arranged in pedestal, including grinding pedestal, the grinding pedestal upper surface, and the bottom plate upper surface is installed ceramics by bolt and inhaled
Disk, the bottom plate upper surface right side open up strip groove one, and the one interior lower end face of strip groove opens up counter sink one, the bottom plate
Strip groove two is opened up on the left of upper surface, the two interior lower end face of strip groove opens up counter sink two, the grinding pedestal upper surface
Threaded hole one and threaded hole two are opened up, the setting of threaded hole one is arranged in one downside of counter sink, the threaded hole two in countersunk head
On the downside of hole two, hexagon socket head cap screw one is assigned in the counter sink one, one lower end of hexagon socket head cap screw is engaged in threaded hole one,
Hexagon socket head cap screw two is assigned in the counter sink two, two lower end of hexagon socket head cap screw is engaged in threaded hole two, the bar shaped
One upper inside of slot assigns stripe board one, and two upper inside of strip groove assigns stripe board two.
Further, the counter sink one and counter sink two offer two groups, and counter sink one described in two groups symmetrically opens up
In one interior lower end face of strip groove, counter sink two described in two groups is symmetrically provided with two interior lower end face of strip groove.
Further, the fixed rectangular strip of the stripe board one and two upper surface middle position of stripe board, the stripe board
One is identical with two specification of stripe board.
Further, three groups of bottom plates are mounted equidistant in the grinding pedestal upper surface in a ring.
Beneficial effects of the present invention: the removable ceramic sucker base of one kind of the invention, because the present invention is added to stripe board
One, bottom plate, ceramic sucker, stripe board two, strip groove one, counter sink one, hexagon socket head cap screw one, threaded hole one, threaded hole two, interior
Hex bolts two, counter sink two and strip groove two, the design realize bottom plate using hexagon socket head cap screw one and hexagon socket head cap screw two
With the convenient dismounting of grinding pedestal, closure is carried out to strip groove one and strip groove two respectively using stripe board one and stripe board two and is reached
Enter in the hexagon ring on hexagon socket head cap screw one and hexagon socket head cap screw two to anti-abrasive dust, when cleaning ceramic sucker, is not required to
It reuses conventional method and polishes off ceramic sucker surface layer, it is only necessary to by ceramic sucker together with bottom plate or by ceramic sucker from bottom plate
On disassemble to be put into supersonic wave cleaning machine and cleaned, when replacing ceramic sucker, do not need entirely grind again
Pedestal dismounting and change, it is only necessary to be individually replaced the ceramic sucker to break down.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon:
Fig. 1 is a kind of structural schematic diagram of removable ceramic sucker base of the present invention；
Fig. 2 is A-A cross-sectional view in a kind of removable ceramic sucker base of the present invention；
Fig. 3 is a kind of perspective view of removable ceramic sucker base insole board of the present invention；
Fig. 4 is the perspective view of stripe board one in a kind of removable ceramic sucker base of the present invention；
In figure: 1- grinds pedestal, 2- stripe board one, 3- bottom plate, 4- ceramics sucker, 5- stripe board two, 6- strip groove one, 7-
Counter sink one, 8- hexagon socket head cap screw one, 9- threaded hole one, 10- threaded hole two, 11- hexagon socket head cap screw two, 12- counter sink two,
13- strip groove two.
Specific embodiment
To be easy to understand the technical means, the creative features, the aims and the efficiencies achieved by the present invention, below with reference to
Specific embodiment, the present invention is further explained.
Fig. 1-Fig. 4 is please referred to, the present invention provides a kind of technical solution: a kind of removable ceramic sucker base, including grinding
Bottom plate 3 is arranged in pedestal 1, grinding 1 upper surface of pedestal, and ceramic sucker 4 is installed by bolt in 3 upper surface of bottom plate, and ceramic sucker 4 passes through
Bolt is mounted on bottom plate 3, and bottom plate 3 is mounted on grinding pedestal 1, thus when needing to clean or replacing ceramic sucker 4, the bottom of by
Plate 3 separates with grinding pedestal 1 or separates ceramic sucker 4 with bottom plate 3, it is no longer necessary to be inhaled by polishing off mode to ceramics
Disk 4 is handled, and is conducive to extend the service life of ceramic sucker 4, while avoiding replacement from entirely grinding in the damage of ceramic sucker 4
Pedestal 1 is ground, opens up strip groove 1 on the right side of 3 upper surface of bottom plate, one 6 interior lower end face of strip groove opens up counter sink 1, on bottom plate 3
Strip groove 2 13 is opened up on the left of end face, 2 13 interior lower end face of strip groove opens up counter sink 2 12, and grinding 1 upper surface of pedestal opens up
Threaded hole 1 and threaded hole 2 10, the setting of threaded hole 1 are arranged in one 7 downside of counter sink, threaded hole 2 10 in counter sink 2 12
Hexagon socket head cap screw 1 is assigned in counter sink 1 in downside, and one 8 lower end of hexagon socket head cap screw is engaged in threaded hole 1, counter sink two
Hexagon socket head cap screw 2 11 is assigned in 12,2 11 lower end of hexagon socket head cap screw is engaged in threaded hole 2 10, one 6 upper inside of strip groove
Stripe board 1 is assigned, 2 13 upper inside of strip groove assigns stripe board 25, when hexagon socket head cap screw 1 is twisted across counter sink 1
Enter in threaded hole 1 and hexagon socket head cap screw 2 11 passes through counter sink 2 12 and is threaded into hole 2 10, realizes bottom plate 3 and grinding
Pedestal 1 is fixedly connected, and then assigns stripe board 1 and stripe board 25 to strip groove 1 and strip groove 2 13 respectively,
And then stripe board 1 and stripe board 25 play and abrasive dust are stopped to enter the hexagonal on hexagon socket head cap screw 1 and hexagon socket head cap screw 2 11
In hole, avoid frequently clearing up abrasive dust.
Counter sink 1 and counter sink 2 12 offer two groups, and two groups of counter sinks 1 are symmetrically provided in strip groove 1
Subordinate end face, two groups of counter sinks 2 12 are symmetrically provided with 2 13 interior lower end face of strip groove, in two groups of counter sinks 1 and counter sink
Two groups of hexagon socket head cap screws 1 are installed respectively in 2 12 and hexagon socket head cap screw 2 11 improves the stabilization that bottom plate 3 is connect with grinding pedestal 1
Property.
The fixed rectangular strip of stripe board 1 and 25 upper surface middle position of stripe board, stripe board 1 and stripe board 25 are advised
Lattice are identical, are convenient for stripe board 1 and stripe board 25 respectively out of strip groove 1 and strip groove 2 13 by lifting rectangular strip
It takes out.
Three groups of bottom plates 3 are mounted equidistant in grinding 1 upper surface of pedestal in a ring, and ceramic sucker 4 is respectively mounted on three groups of bottom plates 3,
Improve the adsorption effect for the substrate polished needs.
The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention, for this field skill
For art personnel, it is clear that invention is not limited to the details of the above exemplary embodiments, and without departing substantially from spirit of the invention or
In the case where essential characteristic, the present invention can be realized in other specific forms.Therefore, in all respects, should all incite somebody to action
Embodiment regards exemplary as, and is non-limiting, the scope of the present invention by appended claims rather than on state
Bright restriction, it is intended that including all changes that fall within the meaning and scope of the equivalent elements of the claims in the present invention
It is interior.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (4)
1. a kind of removable ceramic sucker base, including grinding pedestal, it is characterised in that: bottom is arranged in the grinding pedestal upper surface
Plate, the bottom plate upper surface install ceramic sucker by bolt, open up strip groove one, the bar shaped on the right side of the bottom plate upper surface
One interior lower end face of slot opens up counter sink one, opens up strip groove two, subordinate in the strip groove two on the left of the bottom plate upper surface
End face opens up counter sink two, and the grinding pedestal upper surface opens up threaded hole one and threaded hole two, and the setting of threaded hole one exists
One downside of counter sink, the setting of threaded hole two assign hexagon socket head cap screw one, institute in two downside of counter sink, the counter sink one
It states one lower end of hexagon socket head cap screw to be engaged in threaded hole one, hexagon socket head cap screw two, the interior hexagonal is assigned in the counter sink two
Two lower end of bolt is engaged in threaded hole two, and one upper inside of strip groove assigns stripe board one, inside the strip groove two
Assign stripe board two in upside.
2. the removable ceramic sucker base of one kind according to claim 1, it is characterised in that: the counter sink one and countersunk head
Kong Erjun offers two groups, and counter sink one described in two groups is symmetrically provided with one interior lower end face of strip groove, counter sink described in two groups
Two are symmetrically provided with two interior lower end face of strip groove.
3. the removable ceramic sucker base of one kind according to claim 1, it is characterised in that: the stripe board one and bar shaped
The fixed rectangular strip in two upper surface middle position of plate, the stripe board one are identical with two specification of stripe board.
4. the removable ceramic sucker base of one kind according to claim 1, it is characterised in that: the grinding pedestal upper surface
Three groups of bottom plates are mounted equidistant in a ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811438532.8A CN109366348A (en) | 2018-11-28 | 2018-11-28 | A kind of removable ceramic sucker base |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811438532.8A CN109366348A (en) | 2018-11-28 | 2018-11-28 | A kind of removable ceramic sucker base |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109366348A true CN109366348A (en) | 2019-02-22 |
Family
ID=65383379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811438532.8A Pending CN109366348A (en) | 2018-11-28 | 2018-11-28 | A kind of removable ceramic sucker base |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109366348A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1802735A (en) * | 2003-09-18 | 2006-07-12 | Nec机械股份有限公司 | Collet, chip bonder and chip pick-up method |
| CN204868514U (en) * | 2015-07-27 | 2015-12-16 | 扬州晶新微电子有限公司 | Machining tool is assisted to small -size silicon wafer attenuate based on 4 inch silicon wafer |
| CN105299023A (en) * | 2015-12-10 | 2016-02-03 | 北京中电科电子装备有限公司 | Vacuum ceramic suction disc |
| CN206742220U (en) * | 2017-05-22 | 2017-12-12 | 无锡芯坤电子科技有限公司 | A kind of ceramic sucker clamp |
-
2018
- 2018-11-28 CN CN201811438532.8A patent/CN109366348A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1802735A (en) * | 2003-09-18 | 2006-07-12 | Nec机械股份有限公司 | Collet, chip bonder and chip pick-up method |
| CN204868514U (en) * | 2015-07-27 | 2015-12-16 | 扬州晶新微电子有限公司 | Machining tool is assisted to small -size silicon wafer attenuate based on 4 inch silicon wafer |
| CN105299023A (en) * | 2015-12-10 | 2016-02-03 | 北京中电科电子装备有限公司 | Vacuum ceramic suction disc |
| CN206742220U (en) * | 2017-05-22 | 2017-12-12 | 无锡芯坤电子科技有限公司 | A kind of ceramic sucker clamp |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190222 |
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| RJ01 | Rejection of invention patent application after publication |