CN109343305A - A kind of cleaning equipment - Google Patents
A kind of cleaning equipment Download PDFInfo
- Publication number
- CN109343305A CN109343305A CN201811169865.5A CN201811169865A CN109343305A CN 109343305 A CN109343305 A CN 109343305A CN 201811169865 A CN201811169865 A CN 201811169865A CN 109343305 A CN109343305 A CN 109343305A
- Authority
- CN
- China
- Prior art keywords
- shell
- column
- water
- columns
- cleaning equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
Abstract
The invention discloses a kind of cleaning equipments, including pedestal and shell, shell is set on the base, clamping and fixing body is equipped in shell, clamping and fixing body includes bottom plate, first column, second column and slot, first column and the setting of the second column are multiple, and multiple second columns are between multiple first columns, bottom plate is equipped with multiple slots, and multiple slots are respectively between multiple first columns between multiple second columns, partition is equipped in shell, fixed block is equipped on the inner wall of two sides in shell, and it is fixedly connected between two fixed blocks by link block, and the bottom of link block is equipped with sliding rail, sliding rail is equipped with sliding block, clamping and fixing body is located at the lower end of sliding block, a kind of cleaning equipment of the present invention, the conductor disk of the mask plate and different-thickness of different size and thickness can be subjected to cleaning operation simultaneously, meet 3 00mm conductor disk, different size of mask plate etc. clean demand.
Description
Technical field
The present invention relates to circuit boards to clean field, specifically a kind of cleaning equipment.
Background technique
Currently, the cleaning equipment of mask plate and conductor disk is varied.But it requires mask plate and leads in cleaning
Body disk rotates under main shaft drive on clamping device, while each cleaning system successively cleans it；Due to fifty-fifty
The mask board size that the cleaning machine equipment of conductor factory is cleaned is different (seeing size difference size), and clamping device also has difference
Not, it results in existing cleaning equipment mask plate to different sizes while cleaning operation can not be carried out in this way, is cleaning
Room needs replacing the clamping device of cleaning equipment, can waste a large amount of time with changing clamping device, can not accelerate the clear of mask plate
Wash efficiency.
Summary of the invention
The purpose of the present invention is to provide a kind of cleaning equipments, to solve existing cleaning mentioned above in the background art
Equipment can not mask plate to different sizes carry out cleaning operation simultaneously, need replacing the clamping of cleaning equipment in purge chamber
Mechanism, with changing the problem of clamping device can waste a large amount of time.
To achieve the above object, the invention provides the following technical scheme:
A kind of cleaning equipment, including pedestal and shell, the shell are set on the base, and are equipped with and are clamped admittedly in the shell
Determine mechanism, the clamping and fixing body includes bottom plate, the first column, the second column and slot, and first column and second stand
Column setting is multiple, and multiple second columns, between multiple first columns, the bottom plate is equipped with multiple slots, and institute
Multiple slots are stated respectively between multiple first columns between multiple second columns.
It is further: to be equipped with partition in the shell, be equipped with fixed block in the shell on the inner wall of two sides, and two solid
Determine to be fixedly connected between block by link block, and the bottom of the link block is equipped with sliding rail, the sliding rail is equipped with sliding block, described
Clamping and fixing body is located at the lower end of sliding block, and the bottom of the sliding block passes through the bottom of telescopic rod and clamping and fixing body insole board
Portion's connection.
It is further: rinse bath, water tank and effluent treatment plant to be equipped in the pedestal, the rinse bath is located at water storage
Between case and effluent treatment plant, and the top of the rinse bath and the bottom of shell interconnect, the side of the water tank
Equipped with water injection pipe, and the other end of the water injection pipe is interconnected with the two sides of rinse bath respectively by two the first water service pipes,
And water spout is equipped on the other end of two first water service pipes.
Further: the bottom of the rinse bath is connected to by drainpipe with the top of effluent treatment plant, and the dirt
The side of water purification installation is connected to by the second water service pipe with the top of water tank, the water injection pipe, drainpipe and the second water flowing
Valve is equipped on pipe.
Further: the top of the shell is equipped with support plate, and the support plate is equipped with air blower, the air blower
One end be equipped with ventilation duct, and the ventilation duct the other end be arranged in shell, on the surface of the ventilation duct other end
Equipped with multiple air outlets.
Compared with prior art, the beneficial effects of the present invention are:
It is stayed according to the thickness and size of mask plate and conductor disk between multiple first columns and multiple second columns
Some gaps are adjusted, thus can by the conductor disk of the mask plate and different-thickness of different size and thickness simultaneously into
Row cleaning operation meets the cleanings demands such as 300mm conductor disk, different size of mask plate, saves the plenty of time, improves
The efficiency of cleaning.
Detailed description of the invention
Fig. 1 is perspective view of the invention.
Fig. 2 is front section view of the invention.
Fig. 3 is the perspective view of clamping and fixing body of the invention.
Fig. 4 is the side sectional view of shell of the invention.
In figure: 1, pedestal；2, shell；3, support plate；4, air blower；5, ventilation duct；6, partition；7, fixed block；8, it connects
Block；9, sliding rail；10, sliding block；11, telescopic rod；12, clamping and fixing body；13, rinse bath；14, water tank；15, sewage purification fills
It sets；16, water injection pipe；17, the first water service pipe；18, water spout；19, drainpipe；20, the second water service pipe；21, valve；22, bottom plate；
23, the first column；24, the second column；25, slot；26, air outlet.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Please refer to Fig. 1~4, in the embodiment of the present invention, a kind of cleaning equipment, including pedestal 1 and shell 2, the shell 2 are set
It sets on pedestal 1, clamping and fixing body 12 is equipped in the shell 2, the clamping and fixing body 12 is vertical including bottom plate 22, first
Multiple, and multiple second columns are arranged in column 23, the second column 24 and slot 25, first column 23 and the second column 24
24 between multiple first columns 23, and the bottom plate 22 is equipped with multiple slots 25, and the multiple slot 25 is respectively more
Between a first column 23 between multiple second columns 24.
It is equipped with partition 6 in the shell 2, is equipped with fixed block 7, and two fixed blocks 7 on the inner wall of two sides in the shell 2
Between be fixedly connected by link block 8, and the bottom of the link block 8 is equipped with sliding rail 9, and the sliding rail 9 is equipped with sliding block 10, institute
The lower end that clamping and fixing body 12 is located at sliding block 10 is stated, and the bottom of the sliding block 10 passes through telescopic rod 11 and clamping and fixing body
The bottom of 12 insole boards 22 connects, and rinse bath 13, water tank 14 and effluent treatment plant 15 are equipped in the pedestal 1, described clear
Washing trough 13 is between water tank 14 and effluent treatment plant 15, and the top of the rinse bath 13 and the bottom of shell 2 are mutual
Connection, the side of the water tank 14 is equipped with water injection pipe 16, and the other end of the water injection pipe 16 passes through two the first water service pipes
17 two sides respectively with rinse bath 13 interconnect, and are equipped with water spout on the other end of two first water service pipes 17
18, the bottom of the rinse bath 13 is connected to by drainpipe 19 with the top of effluent treatment plant 15, and the sewage purification fills
It sets 15 side to be connected to by the second water service pipe 20 with the top of water tank 14, the water injection pipe 16, drainpipe 19 and second are led to
Valve 21 is equipped on water pipe 20, the top of the shell 2 is equipped with support plate 3, and the support plate 3 is equipped with air blower 4, institute
The one end for stating air blower 4 is equipped with ventilation duct 5, and the other end of the ventilation duct 5 is arranged in shell 2, and the ventilation duct 5 is another
The surface of one end is equipped with multiple air outlets 26.
A kind of cleaning equipment of the present invention, according to the thickness and size of mask plate and conductor disk come to multiple first columns and
Between multiple second columns there are gap be adjusted, thus can be by the mask plate and different thickness of different size and thickness
The conductor disk of degree carries out cleaning operation simultaneously, meets the cleanings demands such as 300mm conductor disk, different size of mask plate,
The plenty of time is saved, the efficiency of cleaning is improved.
The working principle of the invention is: the mask plate cleaned and conductor disk will be needed to be individually positioned in multiple first columns
Between 23 and multiple second columns 24, one end of mask plate and one end of conductor disk are inserted between multiple first columns 23 and
Between multiple second columns 24, then mask plate and conductor disk are continued to continue into the slot 25 on bottom plate 22, be led to
It crosses slot 25 and one end of mask plate one end and conductor disk is clamped fixation, then by multiple first columns 23 and multiple
Second column 24 by mask plate and conductor disk carry out it is secondary be fixedly clamped, between multiple first columns 23 there are gap respectively not
It is identical, it is stayed according to the thickness and size of mask plate and conductor disk between multiple first columns 23 and multiple second columns 24
Some gaps are adjusted, thus can by the conductor disk of the mask plate and different-thickness of different size and thickness simultaneously into
Row cleaning operation meets the cleanings demands such as 300mm conductor disk, different size of mask plate, saves the plenty of time, improves
The efficiency of cleaning, by mask plate and conductor disk it is fixed after, by movement of the sliding block 10 on sliding rail 9, by mask plate and lead
Body disk is moved to the upper end of rinse bath 13, and mask plate and conductor disk are then extend into cleaning by the flexible of telescopic rod 11
In slot 13, cleaning operation is carried out to it, the sewage after cleaning is sent in effluent treatment plant 15 by drainpipe 19 by it
Purification, in being transmitted back to water tank 14, then the use of cleaning next time opens air blower 4, external air is pumped into
In ventilation duct 5, mask plate and conductor disk after being cleaned by 26 Duis of multiple air outlets of 5 other end of ventilation duct carry out drying behaviour
Make.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art
The other embodiments being understood that.
Claims (5)
1. a kind of cleaning equipment, which is characterized in that including pedestal (1) and shell (2), the shell (2) is arranged in pedestal (1)
On, clamping and fixing body (12) are equipped in the shell (2), and the clamping and fixing body (12) includes bottom plate (22), first vertical
Column (23), the second column (24) and slot (25), first column (23) and the second column (24) setting are multiple, and multiple institutes
The second column (24) are stated between multiple first columns (23), the bottom plate (22) is equipped with multiple slots (25), and described
Multiple slots (25) are respectively between multiple first columns (23) between multiple second columns (24).
2. a kind of cleaning equipment according to claim 1, which is characterized in that partition (6) are equipped in the shell (2),
It is equipped with fixed block (7) on the interior two sides inner wall of shell (2), and connects between two fixed blocks (7) by the way that link block (8) are fixed
It connects, and the bottom of the link block (8) is equipped with sliding rail (9), the sliding rail (9) is equipped with sliding block (10), the machine that is fixedly clamped
Structure (12) is located at the lower end of sliding block (10), and the bottom of the sliding block (10) passes through telescopic rod (11) and clamping and fixing body (12)
The bottom of insole board (22) connects.
3. a kind of cleaning equipment according to claim 1, which is characterized in that be equipped with rinse bath in the pedestal (1)
(13), water tank (14) and effluent treatment plant (15), the rinse bath (13) are located at water tank (14) and effluent treatment plant
(15) between, and the top of the rinse bath (13) and the bottom of shell (2) interconnect, and the side of the water tank (14) is set
Have water injection pipe (16), and the other end of the water injection pipe (16) by two the first water service pipes (17) respectively with rinse bath (13)
Two sides interconnect, and are equipped with water spout (18) on the other end of two first water service pipes (17).
4. a kind of cleaning equipment according to claim 3, which is characterized in that the bottom of the rinse bath (13) passes through row
Water pipe (19) is connected to the top of effluent treatment plant (15), and the side of the effluent treatment plant (15) passes through the second water flowing
Pipe (20) is connected to the top of water tank (14), is all provided on the water injection pipe (16), drainpipe (19) and the second water service pipe (20)
There are valve (21).
5. a kind of cleaning equipment according to claim 1, which is characterized in that the top of the shell (2) is equipped with support
Plate (3), and the support plate (3) is equipped with air blower (4), one end of the air blower (4) is equipped with ventilation duct (5), and institute
The other end setting of ventilation duct (5) is stated in shell (2), the surface of ventilation duct (5) other end is equipped with multiple air outlets
(26)。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811169865.5A CN109343305A (en) | 2018-10-08 | 2018-10-08 | A kind of cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811169865.5A CN109343305A (en) | 2018-10-08 | 2018-10-08 | A kind of cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109343305A true CN109343305A (en) | 2019-02-15 |
Family
ID=65308488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811169865.5A Pending CN109343305A (en) | 2018-10-08 | 2018-10-08 | A kind of cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109343305A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080184935A1 (en) * | 2007-02-07 | 2008-08-07 | Applied Materials,Inc. | Clamping device for holding a substrate |
| CN105500052A (en) * | 2014-09-25 | 2016-04-20 | 安徽池州项赛机械制造有限公司 | Supporting seat slot clamp |
| CN106216290A (en) * | 2016-09-25 | 2016-12-14 | 东莞市联洲知识产权运营管理有限公司 | A kind of high cleaning BGA base plate cleaning device |
| CN206779109U (en) * | 2017-03-03 | 2017-12-22 | 青岛东方兄弟新能源科技有限公司 | A kind of mirror production cleaning equipment |
| CN206842089U (en) * | 2017-04-28 | 2018-01-05 | 江苏创力电梯部件有限公司 | A kind of sheet material transfer carriage of convenient regulation |
| CN107706144A (en) * | 2017-09-14 | 2018-02-16 | 德淮半导体有限公司 | Wafer cleaning fixing device and cleaning equipment |
| CN107756164A (en) * | 2017-12-08 | 2018-03-06 | 曾董科 | A kind of surface of steel plate sanding apparatus |
| CN108356039A (en) * | 2018-01-05 | 2018-08-03 | 佛山杰致信息科技有限公司 | A kind of medical instrument circulation cleaning device |
-
2018
- 2018-10-08 CN CN201811169865.5A patent/CN109343305A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080184935A1 (en) * | 2007-02-07 | 2008-08-07 | Applied Materials,Inc. | Clamping device for holding a substrate |
| CN105500052A (en) * | 2014-09-25 | 2016-04-20 | 安徽池州项赛机械制造有限公司 | Supporting seat slot clamp |
| CN106216290A (en) * | 2016-09-25 | 2016-12-14 | 东莞市联洲知识产权运营管理有限公司 | A kind of high cleaning BGA base plate cleaning device |
| CN206779109U (en) * | 2017-03-03 | 2017-12-22 | 青岛东方兄弟新能源科技有限公司 | A kind of mirror production cleaning equipment |
| CN206842089U (en) * | 2017-04-28 | 2018-01-05 | 江苏创力电梯部件有限公司 | A kind of sheet material transfer carriage of convenient regulation |
| CN107706144A (en) * | 2017-09-14 | 2018-02-16 | 德淮半导体有限公司 | Wafer cleaning fixing device and cleaning equipment |
| CN107756164A (en) * | 2017-12-08 | 2018-03-06 | 曾董科 | A kind of surface of steel plate sanding apparatus |
| CN108356039A (en) * | 2018-01-05 | 2018-08-03 | 佛山杰致信息科技有限公司 | A kind of medical instrument circulation cleaning device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190215 |