CN109341973A - A kind of triple valve and inside and outside leak detection conversion equipment - Google Patents
A kind of triple valve and inside and outside leak detection conversion equipment Download PDFInfo
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- CN109341973A CN109341973A CN201811453569.8A CN201811453569A CN109341973A CN 109341973 A CN109341973 A CN 109341973A CN 201811453569 A CN201811453569 A CN 201811453569A CN 109341973 A CN109341973 A CN 109341973A
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- 238000001514 detection method Methods 0.000 title claims abstract description 100
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 19
- 239000007789 gas Substances 0.000 claims description 152
- 239000001307 helium Substances 0.000 claims description 120
- 229910052734 helium Inorganic materials 0.000 claims description 120
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 120
- 238000007789 sealing Methods 0.000 claims description 15
- 230000008878 coupling Effects 0.000 claims description 8
- 238000010168 coupling process Methods 0.000 claims description 8
- 238000005859 coupling reaction Methods 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 230000008901 benefit Effects 0.000 abstract description 2
- 238000012360 testing method Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 9
- 238000005259 measurement Methods 0.000 description 9
- 208000002925 dental caries Diseases 0.000 description 5
- 238000002955 isolation Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/224—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
- F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
- F16K11/07—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members with cylindrical slides
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/04—Construction of housing; Use of materials therefor of sliding valves
- F16K27/041—Construction of housing; Use of materials therefor of sliding valves cylindrical slide valves
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
The present invention relates to a kind of triple valve and inside and outside leak detection conversion equipments.Triple valve of the present invention includes: valve body, columnar spool and elastic component, and a columnar limit cavity is formed in the valve body, and one end of the limit cavity is provided with elastic component, and the other end penetrates through the valve body and is formed with air through hole；The spool is set in the limit chamber body, and one end of the elastic component is connected on the spool, and the other end is connected on the limit cavity；The side wall of the spool is formed with connectivity slot, the first gas circuit through-hole, the second gas circuit through-hole and third gas circuit through-hole are respectively formed on the valve body, the connector of this three gas circuit through-holes and the limit cavity, successively arranges on the central axes for limiting cavity.Triple valve of the present invention has the advantages that the intracorporal cavity of valve is lesser.
Description
Technical field
The present invention relates to valve and detection devices, more particularly to a kind of triple valve and inside and outside leak detection conversion equipment.
Background technique
Triple valve, as the term suggests tool passes through switching three-way valve there are three the valve in channel, including import two outlets
Spool realize runner switching, triple valve commonly used in fluid passage selection and switching in.Existing triple valve is mainly used for liquid
When conveying runner switching, therefore, in order to enable circulation material it is enough, runner is arranged bigger, and valve body also compared with
Greatly, on the one hand the circulation of material can be guaranteed by doing so, on the other hand can also prevent material because at valve body flow velocity it is slack-off and
Blocking accumulation.But common threeway valve core is plate, realizes the closing of runner by the rotation of spool or gets through, from
And switch runner, therefore, a biggish cavity is had in the radius of gyration and valve body of spool, this cavity is for high-precision helium
For gas detection, detection accuracy is influenced whether.
This is because in leak detection, if carrying out calibrated leakage amount with helium it is necessary to by helium in detection gas
Content come complete leakage rate detection, that is, leak detection or missing inspection.And these existing triple valves, since there are this skies
Chamber, the helium of leakage has part and remains in cavity, so that the amount of helium that detector test arrives is just fewer than actual leakage amount, especially
It is in high-precision detection device, this residual quantity can bring strong influence to detection accuracy.Therefore, in high-precision gas
In the detection of body leakage rate, existing triple valve has that valve internal cavity is larger and influences detection accuracy.
Summary of the invention
Based on this, the object of the present invention is to provide a kind of triple valve and inside and outside leak detection conversion equipments, with valve
The intracorporal lesser advantage of cavity.
A kind of triple valve, including valve body, columnar spool and elastic component are formed with a columnar limit in the valve body
Cavity, one end of the limit cavity are provided with elastic component, and the other end penetrates through the valve body and is formed with air through hole；The spool
It is set in the limit chamber body, and the elastic component that the limit cavity one end is arranged in is connected on the spool；
The side wall of the spool is formed with connectivity slot, and the first gas circuit through-hole, the second gas circuit are respectively formed on the valve body
Through-hole and third gas circuit through-hole, the connector of this three gas circuit through-holes and the limit cavity, along the limit cavity
Central axes on successively arrange；The connectivity slot is connected to the first gas circuit through-hole and the second gas circuit through-hole or described
Connectivity slot is connected to the third gas circuit through-hole and the second gas circuit through-hole.
Triple valve of the present invention, spool can move in the limit chamber body of valve body, and under normal condition, by into
Vent hole pressurising and pushes spool to squeeze elastic component into limit chamber body, promotes spool far from air through hole, at this point, connectivity slot connects
Logical second gas circuit through-hole and third gas circuit through-hole；And when stopping into limit chamber body pressurising and when pressure release, spool is in elastic component
Elastic force driving it is lower close to air through hole, at this point, connectivity slot is connected to the first gas circuit through-hole and the second gas circuit through-hole, to realize three
It is logical.
Therefore, the runner of triple valve of the invention include the first gas circuit through-hole, the second gas circuit through-hole, third gas circuit through-hole with
And connectivity slot, and the material that do not circulate in limit chamber body, so, the size for limiting cavity has no effect on the circulation area of material.
And three gas circuit through-holes and connectivity slot can do it is small as far as possible, to ensure that residual quantity of the material in this triple valve
Sufficiently small, for the triple valve of the prior art, the residual quantity of the material in this triple valve has been lacked very much, for high-precision
It is used in leakage detection apparatus, can be improved detection accuracy, effectively reduce material in the intracorporal residual quantity of valve.Moreover, of the invention three
Port valve can be connected directly between connecing for workpiece to reduce the volume of entire valve body by reducing the volume of spool and valve body
On head, occupied space is dramatically saved.
Further, the central axes of the limit cavity are benchmark axis, the endpoint of the first gas circuit through-hole to described the
The length that the distance between the endpoint of three gas circuit through-holes projects on the reference axis, projects to the base not less than the connectivity slot
The length of fiducial axis；And the second gas circuit through-hole to other any gas circuit through-holes projection of the distance on the reference axis length
Degree, less than the length that the connectivity slot projects to the reference axis.The connector of second gas circuit through-hole and limit cavity is located at the
Between one gas circuit through-hole and third gas circuit through-hole and the connector for limiting cavity；Connectivity slot has certain volume space, due to
Spool is completely embedded with limit cavity, and material can only be circulated by connectivity slot.And in order to guarantee the switching of realization threeway,
Rather than three gas circuit through-holes circulate simultaneously, the first gas circuit through-hole is as far as possible far from third gas circuit through-hole, but the first gas circuit
Through-hole and third gas circuit through-hole meet again to be connected to by connectivity slot with the second gas circuit through-hole.
Further, the connectivity slot is the annular groove for being provided with the spool face, when the spool is close to described
When air through hole, the first gas circuit through-hole is connected to by the annular groove with the second gas circuit through-hole；When the spool is remote
When from the air through hole, the third gas circuit through-hole is connected to by the annular groove with the second gas circuit through-hole.Annular is recessed
Slot is provided with the surface of spool, and annular groove provides the channel of gas circulation, and the width of annular groove is exactly two adjacent
Maximum spacing between the connector of gas circuit through-hole.
Further, the connectivity slot is the slot for penetrating through the spool.The slot runs through spool, is different from a technology
Scheme, air-flow are passed through and are circulated from spool.
Further, the side wall of the spool offers the limiting slot of annular, is socketed with sealing ring on the limiting slot.Herein
Sealing ring is set, be in order to reinforce limiting the sealing and isolation effect between cavity and connectivity slot, further prevent connectivity slot with
Gas between limit cavity is mutually altered.
Further, inlet suction port and quick coupling, the inlet suction port and first gas are provided on the valve body
The connection of road through-hole, the quick coupling are connected to the second gas circuit through-hole.Inlet suction port is set, it is convenient to connect with admission line
It connects, quick coupling is set, easy to exhaust pipeline is quickly connected and disconnected from.
A kind of inside and outside leak detection conversion equipment of the invention, it is described true including vacuum tank and triple valve described above
Gas circuit pipeline is provided on empty van, the triple valve is arranged in the vacuum tank, and the gas circuit pipeline and the triple valve
Connection；
The gas circuit pipeline includes evacuating helium tube line and driving source gas line, the evacuation helium tube line and described first
The connection of gas circuit through-hole, the driving source gas line are connected to the air through hole.
Inside and outside leak detection conversion equipment of the invention, will evacuate helium tube line be connected to the first gas circuit through-hole and as into
Gas pipeline, and drive source gas line be connected at air through hole and as driving pipeline, and third gas circuit through-hole by pipeline with
It is connected to outside vacuum tank, workpiece for measurement is connected to the second gas circuit through-hole.When detection, stuffiness in source gas line is driven, in elastic component
Under the action of spool be located at reset condition, at this point, the first gas circuit through-hole and the second gas circuit through-hole are connected to by connectivity slot, detection gas
It can be inflated in previous workpiece, and theoretically, triple valve and workpiece for measurement are the structure of good seal, and there is no leakage feelings
Condition.If workpiece has leakage, there will be detection gas in vacuum tank, in general, using helium as detection gas.So, helium
Gas detector can detect the presence of helium, and the content of helium is exactly the leakage rate of workpiece.And after completing detection, it can open
The air inlet of source gas line is driven, at this time under air pressure driving, for spool far from the first gas circuit through-hole, it is logical that connectivity slot is connected to the second gas circuit
Hole and third gas circuit through-hole；Gas in workpiece is flowed out in vacuum tank by triple valve, carries out pressure release to the gas in workpiece.
Even, it after completing detection, is made full use of for resource, the helium in vacuum tank is recycled.
Further, further include at least two triple valves, at least gas circuit described in three groups is provided on the vacuum tank
Pipeline, gas circuit pipeline described in two groups connects one to one with two triple valves at least within.Be arranged two triple valves or
Three triple valves, can carry out the detection of three cavity work-pieces simultaneously, and so-called three cavity work-piece is exactly that there are three individual cavities for band
Workpiece, and since this workpiece cannot be dismantled, and cannot be detected with common valve, common valve detection cannot be by three chambers
Body individually carries out, and connects therefore, it is necessary at least two triple valves and is detected simultaneously respectively, moreover, in high-precision detection,
Triple valve of the invention is needed, could preferably be completed.
It further, further include controller and multiple air source control valves, multiple air source control valves are separately positioned on phase
In the driving source gas line answered, and it is electrically connected with the controller.By the automatic control of controller, three threeways are realized
The automatic switchover of valve and air source control valve and auto switching.
It further, further include detection device, which is connected to space in the case of the vacuum tank.
In order to better understand and implement, the invention will now be described in detail with reference to the accompanying drawings.
Detailed description of the invention
Fig. 1 is a kind of broken section structural schematic diagram of use state of triple valve of the invention；
Fig. 2 is the broken section structural schematic diagram of triple valve another kind use state of the invention；
Fig. 3 is the working principle diagram of inside and outside leak detection conversion equipment of the invention；
Fig. 4 is the working principle diagram of the variant embodiment of inside and outside leak detection conversion equipment of the invention.
Specific embodiment
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", "upper", "lower",
The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of description of the present invention and simplification of the description, rather than instruction or dark
Show that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as pair
Limitation of the invention.In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or more.
Such as a kind of triple valve of Fig. 1 and Fig. 2, including valve body 10, columnar spool 20 and elastic component 21, the valve body 10
It is inside formed with a columnar limit cavity (not identifying), one end of the limit cavity is provided with elastic component 21, and the other end penetrates through institute
It states valve body 10 and is formed with air through hole 40；The spool 20 is set in the limit chamber body, and is arranged in the limit cavity
The elastic component 21 of one end is connected on the spool 20；
The side wall of the spool 20 is formed with connectivity slot 50, be respectively formed on the valve body 10 first gas circuit through-hole 31,
The connector that second gas circuit through-hole 32 and third gas circuit through-hole 33, this three gas circuit through-holes and the limit chamber body are formed,
It successively arranges on central axes along the limit cavity；The connectivity slot 50 is connected to the first gas circuit through-hole 31 and described the
Two gas circuit through-holes 32 or the connectivity slot 50 are connected to the third gas circuit through-hole 33 and the second gas circuit through-hole 32.
In the present embodiment, the elastic component 21 is preferably spring, offers guide groove (not identifying) on the spool 20, leads
Slot is socketed in outside spring, for guidance and limit spring；When spring is squeezed by spool 20, spring one end is connected in guide groove
Wall, the other end are connected to the inner wall of limit cavity；When spool 20 is far from spring, spring one end is connected to the interior of limit cavity
Wall, the other end extend naturally.
Further, the central axes of the limit cavity are benchmark axis, and the endpoint of the first gas circuit through-hole 31 is to described
The length that the distance between the endpoint of third gas circuit through-hole 33 projects on the reference axis, projects to not less than the connectivity slot 50
The length of the reference axis；And the second gas circuit through-hole 32 to other any gas circuit through-holes distance on the reference axis
The length of projection, less than the length that the connectivity slot 50 projects to the reference axis.
A kind of preferred embodiment of connectivity slot 50, the connectivity slot 50 are the annular groove for being provided with 20 surface of spool,
When the spool 20 is close to the air through hole, the first gas circuit through-hole 31 passes through the annular groove and second gas circuit
Through-hole 32 is connected to；When the spool 20 is far from the air through hole, the third gas circuit through-hole 33 by the annular groove with
The second gas circuit through-hole 32 is connected to.
Another preferred embodiment of connectivity slot 50, the connectivity slot 50 are the slot for penetrating through the spool 20.
Further, the side wall of the spool 20 offers the limiting slot of annular, is socketed with sealing ring 61 on the limiting slot.
Further, inlet suction port 71 and quick coupling 72, the inlet suction port 71 and institute are provided on the valve body 10
The connection of the first gas circuit through-hole 31 is stated, the quick coupling 72 is connected to the second gas circuit through-hole 32.
Further, multiple sealing shrouds 62 are additionally provided in the limit chamber body, and sealing shroud 62 is socketed in the spool
On 20, runner is reserved between the adjacent sealing shroud 62 of any two, which can provide airflow.In order to guarantee gas most
Good circulation, the spacing between sealing shroud 62 are equal with the gas circuit through-hole spacing of corresponding position；Such as the first gas circuit through-hole 31 and
Gap between the connector of two gas circuit through-holes 32, the spacing between corresponding sealing shroud 62 are equal.Further, it seals
Set 62 is primarily to reinforcement limits the sealing between cavity and spool 20, and this triple valve is arranged there are three gas circuit through-hole,
Also just there are three connector, three connectors are shifted to install, it is necessary to four sealing shrouds 62 be arranged.This four sealing shrouds 62 are distinguished
It is arranged between three connectors and the two sides of connector, ensure that spool 20 and limits the sealing performance between cavity.This
Sample, under test gas can only circulate from three gas circuit through-holes and connectivity slot 50, without entering in limit chamber body.
The working principle of triple valve of the invention:
Inlet suction port 71 is connected on admission line, quick coupling 72 is connected on workpiece for measurement, by air through hole
40 connect with driving gas source.Such as Fig. 1, under normal condition, the air inlet of driving gas source, under tension force of spring, spool 20 are closed
In right side, the first gas circuit through-hole 31 is connected to by connectivity slot 50 with the second gas circuit through-hole 32 at this time, and third gas circuit through-hole 33 disconnects, into
Under test gas in gas pipeline is filled into workpiece.When needing to disconnect air inlet, the air inlet of driving gas source is opened, driving gas source pushes
Spool 20 is moved to far from the air through hole, and such as Fig. 2, thrust is greater than tension force of spring, and spool 20 is extruded to left side, at this point,
Second gas circuit through-hole 32 is connected to by connectivity slot 50 with third gas circuit through-hole 33, and the gas in workpiece passes through in third gas circuit through-hole 33
It flows out to outside triple valve.It when being filled under test gas in workpiece, needs to detect the environment on the outside of workpiece with detector, examine
The content for surveying under test gas indicates that Work piece sealing is functional, No leakage if under test gas content is zero.If not zero, then table
It is shown with leak source.The side leakage of workpiece is completed as a result,.
Further, it is also possible to carry out automatically controlling by controller to the air inlet of driving gas source, entire side leakage process is realized
It automatically controls.
Referring to Fig. 3, a kind of inside and outside leak detection conversion equipment of the invention, including vacuum tank 80 and threeway described above
Valve is provided with gas circuit pipeline on the vacuum tank 80, and the triple valve is arranged in the vacuum tank 80, and the gas circuit pipeline
It is connect with the triple valve；
The gas circuit pipeline includes evacuating helium tube line (not shown) and driving source gas line (not shown), and the evacuation is filled
Helium tube line is connected to the first gas circuit through-hole 31, and the driving source gas line is connected to the air through hole 40.
Preferred embodiment further includes at least two triple valves, at least gas described in three groups is provided on the vacuum tank 80
Road pipeline, wherein gas circuit pipeline described in two groups connects one to one with two triple valves.
It further, further include controller (not shown) and multiple air source control valve (not shown), multiple gas source controls
Valve processed is separately positioned in the corresponding driving source gas line, and is electrically connected with the controller.In the present embodiment, described
Controller is preferably PLC.
It further, further include detection device 84, which is connected to space in the case of the vacuum tank 80.Inspection
Measurement equipment is used to detect the content of under test gas, and in the present embodiment, under test gas is preferably helium, and detection device is helium inspection
Survey instrument.
A kind of working principle of inside and outside leak detection conversion equipment of the invention:
Such as Fig. 3, the working principle of inside and outside leak detection conversion equipment of the invention is illustrated by taking three cavity work-pieces as an example.In conjunction with
The working principle of the triple valve of aforementioned present invention, workpiece for measurement are three cavity work-pieces, and three triple valves is selected to be corresponding to it.Threeway
Valve 11 is connect with the cavity A of workpiece for measurement, and triple valve 12 is connect with the cavity B of workpiece for measurement, triple valve 13 and workpiece for measurement
Cavity C connection；Also, triple valve 11 is connect with helium tube line 81 is evacuated, and triple valve 12 is connect with helium tube line 82 is evacuated, threeway
Valve 13 is connect with helium tube line 83 is evacuated.Vacuum tank 80 is connected on detection device 84, it is true that pumping is provided in detection device 84
Empty device.It evacuates and is provided with helium control valve on helium tube line, for controlling the helium on-off for evacuating helium tube line.
Under the control of PLC, need to complete following detection:
1), cavity A is tested: including between cavity A and cavity B, between cavity A and cavity C, cavity A and vacuum tank 80 it
Between detection；
2), cavity B is tested: including the detection between cavity B and cavity C, between cavity B and vacuum tank 80；
3), cavity C is tested: including the detection between cavity C and vacuum tank 80.
One, cavity A is tested.Under the control of PLC, the air source control valve of triple valve 11,12,13 is turned off, at this point, threeway
The evacuation helium tube line 81 of valve 11 is connected, and the evacuation helium tube line 82 of triple valve 12 is connected, the evacuation helium tube line of triple valve 13
83 conductings still close the helium control valve for evacuating helium tube line 82,83, only open the helium control for evacuating helium tube line 81
Valve.Workpiece for measurement is isolated with vacuum tank.Helium is filled in cavity A by evacuating helium tube line 81, and the helium in cavity A can
To be escaped in vacuum tank 80 by the wall surface leakage point of cavity, can also by the leak source between cavity A and other cavitys into
Enter in other cavitys, then is flowed into vacuum tank 80 from cavity B or cavity C.Detection device 84 is opened, in vacuum tank 80
Helium content is detected, and the detection to cavity A can be completed.
Specifically, the detection of cavity A includes inner hexagon and outer leak detection.
When the outer leak detection of cavity A, the air source control valve of triple valve 11,12,13 is closed, and by evacuating helium tube line
81 fill helium in cavity A, simultaneously close off the corresponding helium control valve of cavity B, C, at this time the three of workpiece cavity and vacuum tank
It is isolation.If the detection device 84 in vacuum tank detects the presence of helium, illustrate that cavity A leaks outside；If detection device 84 is examined
The presence for not detecting helium illustrates that cavity A does not leak outside.
When cavity A inner hexagon, need to carry out respectively between cavity A, B, between cavity A, C.1), to cavity A and B it
Between inner hexagon when, open triple valve 12 air source control valve, close triple valve 11,13 air source control valve so that cavity B
It is connected to vacuum tank, and cavity A, C are isolated with vacuum tank, also, fill helium in cavity A by evacuating helium tube line 81.If
There is interior leakage between cavity A, B, the detection device of vacuum tank can detect helium；If detection device can't detect helium, say
There is no interior leakage between bright cavity A, B.2) when, to the inner hexagon between cavity A and C, the air source control valve of triple valve 13 is opened,
The air source control valve of triple valve 11,12 is closed, so that cavity C is connected to vacuum tank, and cavity A, B are isolated with vacuum tank, also,
Helium is filled in cavity A by evacuating helium tube line 81.If there is interior leakage between cavity A, C, the detection device of vacuum tank can be examined
Measure helium；If detection device can't detect helium, illustrate there is no interior leakage between cavity A, C.
Two, cavity B is tested.Under the control of PLC, the air source control valve of triple valve 11,12,13 is closed, at this point, triple valve
11 evacuation helium tube line 81 is connected, and the evacuation helium tube line 82 of triple valve 12 is connected, and the evacuation helium tube line of triple valve 13
83 conductings, but the helium control valve evacuated on helium tube line 82 is only opened, close the helium control for evacuating helium tube line 81,83
Valve, only cavity B have helium entrance.Three cavitys of workpiece and vacuum tank are isolations at this time.By evacuating helium tube line 82
It is filled with helium in cavity B, opens detection device 84, the helium content in vacuum tank 80 is detected, can be completed to chamber
The test of body B.
Specifically, the detection of cavity B includes inner hexagon and outer leak detection.
When the outer leak detection of cavity B, the air source control valve of triple valve 11,12,13 is closed, and is only opened and evacuated helium tube
Helium control valve on line 82, is filled with helium into cavity B.If the detection device in vacuum tank detects that helium exists, explanation
Cavity B has leakage；If can't detect helium in vacuum tank, illustrate that cavity B does not leak outside.
When the inner hexagon of cavity B, it is only necessary to carry out the detection between cavity B, C.Open the gas source control of triple valve 13
Valve closes the air source control valve of triple valve 11,12 so that cavity C is connected to vacuum tank, and cavity A, B are isolated with vacuum tank, and
Helium is filled in cavity B by evacuating helium tube line 82.If detection device detects helium, illustrate there is interior leakage between cavity B, C；
If detection device does not detect helium, illustrate there is no interior leakage between cavity B, C.
Three, cavity C is tested.Under the control of PLC, the air source control valve of triple valve 11,12,13 is closed, at this point, triple valve
11 evacuation helium tube line 81 is connected, and the evacuation helium tube line 82 of triple valve 12 is connected, and the evacuation helium tube line of triple valve 13
83 conductings fill helium in cavity C by evacuating helium tube line 83.Three cavitys of workpiece and vacuum tank are isolations at this time.
It is filled with helium in cavity C by evacuating helium tube line 83, opens detection device 84, the helium content in vacuum tank 80 is carried out
Detection, can be completed the test to cavity C.
The detection of cavity C only needs to carry out outer leak detection.
Specifically, the air source control valve of triple valve 11,12,13 is closed, and only opens the helium evacuated on helium tube line 83
Gas control valve is filled with helium into cavity C.If the detection device in vacuum tank detects that helium exists, it is outer to illustrate that cavity C has
Leakage；If can't detect helium in vacuum tank, illustrate that cavity C does not leak outside.
Preferably, the leakage of first test chamber, then the interior leakage of test chamber when discovery leaks outside, dismantle work
Interior leakage is detected again after part and reparation, guarantees the complete and comprehensive of detection.
The working principle of the variant embodiment of inside and outside leak detection conversion equipment of the invention:
As the variant embodiment of above-described embodiment, the quantity of triple valve one fewer than number of cavities.With three cavity works
For the detection of part, the working principle of the variant embodiment is illustrated.
Such as Fig. 4, triple valve 11 is set on the evacuation helium tube line 81 of cavity A, is arranged on the evacuation helium tube line 82 of cavity B
Triple valve 12 is not provided with triple valve on the evacuation helium tube line 83 of cavity C, directly by the helium control valve of evacuation helium tube line 83
Control evacuates the on-off road of helium tube line 83.
It one, include inner hexagon and outer leak detection to the detection of cavity A.
Specifically, when the outer leak detection of cavity A, the air source control valve of triple valve 11,12 is closed, and evacuate by opening
The helium control valve of helium tube line 81 fills helium in cavity A, simultaneously closes off the corresponding helium control valve of cavity B, C, at this time work
Three cavitys and vacuum tank of part are isolations.If cavity A has leakage, the detection device 84 in vacuum tank can detect helium
Presence, illustrate cavity A leak outside；If detection device 84 can't detect the presence of helium, illustrate that cavity A does not leak outside.
When cavity A inner hexagon, need to carry out respectively between cavity A, B, between cavity A, C.1), to cavity A and B it
Between inner hexagon when, open triple valve 12 air source control valve, close triple valve 11 air source control valve so that cavity B with
Vacuum tank connection, and cavity A, C are isolated with vacuum tank, also, fill helium in cavity A by evacuating helium tube line 81.If chamber
There is interior leakage between body A, B, the detection device of vacuum tank can detect helium；If detection device can't detect helium, illustrate
There is no interior leakage between cavity A, B.2) it when, to the inner hexagon between cavity A and C, disconnects and evacuates helium tube line 83 and cavity C's
The air source control valve of triple valve 11,12 is closed in connection, so that cavity C is connected to vacuum tank, and cavity A, B are isolated with vacuum tank,
Also, helium is filled in cavity A by evacuating helium tube line 81.If there is interior leakage between cavity A, C, the detection device of vacuum tank is just
It can detect helium；If detection device can't detect helium, illustrate there is no interior leakage between cavity A, C.
Two, the detection of cavity B includes inner hexagon and outer leak detection.
Specifically, when the outer leak detection of cavity B, the air source control valve of triple valve 11,12 is closed, and is only opened to evacuate and be filled
Helium control valve on helium tube line 82, is filled with helium into cavity B.If the detection device in vacuum tank detects that helium exists,
Illustrate that cavity B has leakage；If can't detect helium in vacuum tank, illustrate that cavity B does not leak outside.
When the inner hexagon of cavity B, it is only necessary to carry out the detection between cavity B, C.It disconnects and evacuates helium tube line 83 and chamber
The connection of body C, so that cavity C is connected to vacuum tank, close the air source control valve of triple valve 11,12, cavity A, B and vacuum tank every
From, and helium is filled in cavity B by evacuating helium tube line 82.If detection device detects helium, illustrate between cavity B, C
There is interior leakage；If detection device does not detect helium, illustrate there is no interior leakage between cavity B, C.
Three, the detection of cavity C only needs to carry out outer leak detection.
Specifically, the air source control valve of triple valve 11,12 is closed, and only opens the helium control evacuated on helium tube line 83
Valve processed is filled with helium into cavity C.If the detection device in vacuum tank detects that helium exists, illustrate that cavity C has leakage；If
It can't detect helium in vacuum tank, illustrate that cavity C does not leak outside.
Since the structure of Multicarity workpiece cannot once be completed to detect, and there are interior leakage and leakage the case where, situation is multiple
It is miscellaneous, it is therefore desirable to using triple valve and repeatedly to carry out step by step.And in high-precision detection, it is also necessary to threeway of the invention
Valve is completed, and to guarantee that helium residual quantity in triple valve is small as far as possible, is more accurately detected leakage rate, just be can guarantee detection
Precision.
Inside and outside leak detection conversion equipment of the invention is applicable not only to three cavity work-pieces, applies also for the inspection of Multicarity workpiece
It surveys, it is only necessary to which the workpiece of respective chamber is set, and a point multiple steps are successively detected each cavity.
Both inside and outside leak detection conversion device structure is simple for triple valve of the invention, and manufacturing cost is low, and detection accuracy is high, and
Testing process is simple.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to protection of the invention
Range.
Claims (10)
1. a kind of triple valve, it is characterised in that: including valve body, columnar spool and elastic component, be formed with one in the valve body
Columnar limit cavity, one end of the limit cavity are provided with elastic component, and the other end, which penetrates through the valve body and is formed with air inlet, to be led to
Hole；The spool is set in the limit chamber body, and the elastic component that the limit cavity one end is set be connected to it is described
On spool；
The side wall of the spool is formed with connectivity slot, and the first gas circuit through-hole, the second gas circuit through-hole are respectively formed on the valve body
With third gas circuit through-hole, the connector of this three gas circuit through-holes and the limit cavity, along in the limit cavity
It successively arranges on axis；The connectivity slot is connected to the first gas circuit through-hole and the second gas circuit through-hole or the connection
Slot is connected to the third gas circuit through-hole and the second gas circuit through-hole.
2. triple valve according to claim 1, it is characterised in that: the central axes of the limit cavity are benchmark axis, described
The length that the distance between the endpoint of the endpoint of first gas circuit through-hole to the third gas circuit through-hole projects on the reference axis, no
Less than the length that the connectivity slot projects to the reference axis；And the second gas circuit through-hole to other any gas circuit through-holes away from
Length from the projection on the reference axis, less than the length that the connectivity slot projects to the reference axis.
3. triple valve according to claim 1 or 2, it is characterised in that: the connectivity slot is to be provided with the spool table
The annular groove in face, when the spool is close to the air through hole, the first gas circuit through-hole passes through the annular groove and institute
State the connection of the second gas circuit through-hole；When the spool is far from the air through hole, the third gas circuit through-hole is recessed by the annular
Slot is connected to the second gas circuit through-hole.
4. triple valve according to claim 1 or 2, it is characterised in that: the connectivity slot is the slot for penetrating through the spool
Hole.
5. according to claim 1 or 2 described in any item triple valves, it is characterised in that: the side wall of the spool offers ring
The limiting slot of shape is socketed with sealing ring on the limiting slot.
6. triple valve according to claim 1 or 2, feature with: inlet suction port and fast is provided on the valve body
Quick coupling, the inlet suction port are connected to the first gas circuit through-hole, and the quick coupling is connected to the second gas circuit through-hole.
7. a kind of inside and outside leak detection conversion equipment, it is characterised in that: including vacuum tank and described in any one of claims 1-6
Triple valve is provided with gas circuit pipeline on the vacuum tank, and the triple valve is arranged in the vacuum tank, and the gas circuit pipeline
It is connect with the triple valve；
The gas circuit pipeline includes evacuating helium tube line and driving source gas line, the evacuation helium tube line and first gas circuit
Through-hole connection, the driving source gas line are connected to the air through hole.
8. inside and outside leak detection conversion equipment according to claim 7, it is characterised in that: including at least two threeways
Valve is provided at least gas circuit pipeline described in three groups, gas circuit pipeline described at least two groups and two threeways on the vacuum tank
Valve connects one to one.
9. inside and outside leak detection conversion equipment according to claim 8, it is characterised in that: further include controller and multiple gas sources
Control valve, multiple air source control valves are separately positioned in the corresponding driving source gas line, and electric with the controller
Connection.
10. the inside and outside leak detection conversion equipment according to claim 7 to 9 any one, it is characterised in that: further include detection
Equipment, the detection device are connected to space in the case of the vacuum tank.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811453569.8A CN109341973B (en) | 2018-11-30 | 2018-11-30 | Three-way valve and internal and external leakage detection conversion device |
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|---|---|---|---|
| CN201811453569.8A CN109341973B (en) | 2018-11-30 | 2018-11-30 | Three-way valve and internal and external leakage detection conversion device |
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| CN109341973A true CN109341973A (en) | 2019-02-15 |
| CN109341973B CN109341973B (en) | 2024-05-17 |
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