CN109340082A - A kind of pumping unit suitable for large-scale vacuum component - Google Patents

A kind of pumping unit suitable for large-scale vacuum component Download PDF

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Publication number
CN109340082A
CN109340082A CN201811200751.2A CN201811200751A CN109340082A CN 109340082 A CN109340082 A CN 109340082A CN 201811200751 A CN201811200751 A CN 201811200751A CN 109340082 A CN109340082 A CN 109340082A
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CN
China
Prior art keywords
bellows
vacuum
cylinder
filter
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811200751.2A
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Chinese (zh)
Inventor
不公告发明人
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Zheng Wangwang
Original Assignee
Zheng Wangwang
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Filing date
Publication date
Application filed by Zheng Wangwang filed Critical Zheng Wangwang
Priority to CN201811200751.2A priority Critical patent/CN109340082A/en
Publication of CN109340082A publication Critical patent/CN109340082A/en
Pending legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/06Cooling; Heating; Prevention of freezing
    • F04B39/066Cooling by ventilation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/16Filtration; Moisture separation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06Combinations of two or more pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/10Other safety measures

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The invention discloses a kind of pumping units suitable for large-scale vacuum component, including air extractor, electric control part and support;Air extractor includes annulus line, the first bellows, condensate filter, cold-trap, the second bellows, Hand-operated butterfly valve, sliding vane rotary pump, lobe pump, exhaust tube;The main air entry of annulus line is connect with the first bellows, air inlet above the other end connection condensate filter of first bellows, the middle part of condensate filter connects Air cooler, cold-trap lower part admission line is connected below condensate filter, one end above cold-trap is sequentially connected butterfly valve and the second bellows, second bellows is connected by elbow and flange with sliding vane rotary pump, and by piping connection Roots pump steam inlet below sliding vane rotary pump, the exhaust outlet of lobe pump is connect with bleeding point below exhaust tube.Structure of the invention is compact, novel in design, using multi-filtering technology and two stage pump exhaust technique, can rapidly and efficiently reach the vacuum level requirements of large-scale vacuum component.

Description

A kind of pumping unit suitable for large-scale vacuum component
Technical field
The present invention relates to Vacuum Fields, and in particular to a kind of pumping unit suitable for large-scale vacuum component.
Background technique
With the development of vacuum technique, vacuum technique is applied in every field, but large-scale vacuum component extracts true air speed Degree is slower, and stability is poor;For vacuum insulation impregnation technology, when the macromolecular substances including hot glue molecule vacuumize Vacuum pump group can be entered, meanwhile, the oil molecule that vacuum pump group carries when working can also enter large-scale vacuum components interior, influence true The operation of empty component.
Summary of the invention
The purpose of the present invention is developing a kind of pumping unit suitable for large-scale vacuum component, it can extraction rapidly and efficiently Vacuum, to reach the requirement of large-scale vacuum components interior vacuum degree.
The technical solution adopted by the present invention is that:
A kind of pumping unit suitable for large-scale vacuum component, including air extractor, electric control part and support;Air extractor Including annulus line, the first bellows, condensate filter, cold-trap, the second bellows, Hand-operated butterfly valve, sliding vane rotary pump, lobe pump, row Inflator;The main air entry of annulus line is connect with the first bellows, above the other end of the first bellows connection condensate filter into Port, the middle part of condensate filter connect Air cooler, connection cold-trap lower part admission line below condensate filter, above cold-trap One end is sequentially connected butterfly valve and the second bellows, and the second bellows is connected by elbow and flange with sliding vane rotary pump, below sliding vane rotary pump By piping connection Roots's pump steam inlet, the exhaust outlet of lobe pump is connect with bleeding point below exhaust tube.
The electric control part includes power control cabinet, vacuum gauge component and Air cooler;Power control cabinet respectively with vacuum gauge component and Air cooler connection.
The support includes pipe-support and mobile support, pipe-support upper support annulus line;In mobile support Air extractor and electric control part is fixedly mounted in side, and mobile support includes castor, support pallet, jack, castor and jack peace Lower section loaded on support pallet surrounding.
The condensate filter includes cylinder, annulus cylinder, flange, filter device composition, and flange is bolted on Above cylinder, cylinder outer middle side part welding ring shape annulus cylinder leads to cooling circulating water, cylinder medial center setting filtering dress in cylinder It sets, filter device and annulus cylinder position are contour, and taper is arranged in cylinder bottom plate;Wherein filter device is by upper filter plate, filter cylinder, lower filter plate Mesh is arranged in composition, upper filter plate, filter cylinder, lower filter plate.
The annulus line is formed by outer diameter Φ 116mm steel pipe by flanged joint, and 10 pumpings are arranged in the top of pipeline Port.
Above-mentioned pumping unit application method is used the present invention provides a kind of, it is characterised in that the following steps are included:
Before being evacuated unit assembling, condensate filter, cold-trap, exhaust tube, annulus line are required to individually hunt leak, leak rate of hunting leak Lower than 1x10-9Pa.m3/s;Turn after movement is evacuated unit in place before use, annulus line is first mounted on the middle part of large mold Dynamic jack is liftoff to support entire air extractor to castor, connects air extractor and ring pipe using the first bellows Road, air extractor and the leak detection of annulus line overall vacuum after assembling, leak detection leak rate are lower than 1x10-9Pa.m3/s;System is in vacuum In debugging process, air-cooled electromechanical source is first opened, and adjust in the enterprising trip temperature of Air cooler panel, guarantee the operation temperature of whole system Degree, is then turned on sliding vane rotary pump and is vacuumized, the vacuum degree of current vacuum pipeline can be monitored in real time in vacuum meter, by about 30min or so vacuum degree reaches 1000Pa hereinafter, being then turned on lobe pump control button, continues to vacuumize to system, passes through The vacuum degree of about 40min or so system is evacuated to≤1.5Pa.
The invention has the following advantages that
The present invention can keep vacuum degree and extension using condensation filtering, cold-trap multi-filtering technology with filtering numerous substances The service life of vacuum pump group;Concatenated vacuum pump group can be worked with the completion vacuum suction of efficient quick.Structure of the invention is tight It gathers, is convenient to disassembly, the extraction vacuum of the fast and stable suitable for large-scale vacuum component.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention.
Fig. 2 is side structure schematic diagram of the invention.
Fig. 3 is condensate filter structural schematic diagram of the invention.
Specific embodiment
Referring to attached drawing:
A kind of pumping unit suitable for large-scale vacuum component, including air extractor, electric control part and support;Air extractor Including annulus line 1, the first bellows 2, condensate filter 3, cold-trap 4, the second bellows 5, Hand-operated butterfly valve 6, sliding vane rotary pump 7, sieve Thatch pumps 8, exhaust tube 9;The main air entry of annulus line is connect with the first bellows 2, and the other end connection of the first bellows 2 condensed 3 top air inlet of filter, the middle part of condensate filter 3 connect Air cooler 12, below condensate filter 3 connection 4 lower part of cold-trap into Feed channel, one end of the top of cold-trap 4 are sequentially connected butterfly valve 6 and the second bellows 5, the second bellows 5 by elbow and flange with Sliding vane rotary pump 7 is connected, and passes through 8 air inlet of piping connection lobe pump, 9 lower section of exhaust outlet and exhaust tube of lobe pump 8 below sliding vane rotary pump 7 Bleeding point connection.
The electric control part includes power control cabinet 10, vacuum gauge component 11 and Air cooler 12;Power control cabinet 10 respectively with vacuum It advises component 11 and Air cooler 12 connects.
The support includes pipe-support 13 and mobile support, 13 upper support annulus line 1 of pipe-support;Mobile branch Air extractor and electric control part is fixedly mounted in support top, and mobile support includes castor 14, support pallet 15, jack 16, castor 14 and jack 16 be installed on support 15 surrounding of pallet lower section.
The condensate filter 3 includes cylinder 31, annulus cylinder 32, flange 33, filter device composition, and flange 33 passes through spiral shell Bolt is fixed on above cylinder 31, the outer middle side part welding ring shape annulus cylinder 32 of cylinder 31, and cooling circulating water, 31 inside of cylinder are led in cylinder Filter device is arranged in center, and filter device and annulus cylinder position 32 are contour, and taper is arranged in 31 bottom plate of cylinder;Wherein filter device by Upper filter plate 34, filter cylinder 35, lower filter plate 36 form, and mesh is arranged in upper filter plate 34, filter cylinder 35, lower filter plate 36.
The annulus line 1 is formed by outer diameter Φ 116mm steel pipe by flanged joint, and 10 pumpings are arranged in the top of pipeline Port.
Specifically used method:
Before being evacuated unit assembling, condensate filter 3, cold-trap 4, exhaust tube 9, annulus line 1 are required to individually hunt leak, leak detection Leak rate is lower than 1x10-9Pa.m3/s;Before use, annulus line 1 is first mounted on the middle part of large mold, mobile pumping unit is in place Afterwards, rotation jack 16 is liftoff to support entire air extractor to castor 14, connects air extractor using the first bellows 2 With annulus line 1, air extractor and the leak detection of 1 overall vacuum of annulus line after assembling, leak detection leak rate is lower than 1x10-9Pa.m3/s; System first opens 12 power supply of Air cooler in vacuum debugging process, and adjusts in the enterprising trip temperature of 12 panel of Air cooler, guarantees whole The running temperature of a system is then turned on sliding vane rotary pump 7 and is vacuumized, and the true of current vacuum pipeline can be monitored in real time in vacuum meter Reciprocal of duty cycle reaches 1000Pa by about 30min or so vacuum degree hereinafter, being then turned on 8 control button of lobe pump, continues to system It vacuumizes, the vacuum degree by about 40min or so system is evacuated to≤1.5Pa.
Various components illustrate:
A. condensate filter, cold-trap: the power device of the system is vacuum pump group, and design has condensation filtering and cold-trap second level Filtering.Gas first passes around condensate filter, can filter out the biggish particle of particle.Wherein the lateral surface of condensate filter is set In respect of annulus cylinder, the inside is connected with cooling circulating water, and the temperature of recirculated water can be set by Air cooler, and cooling circulating barrel can incite somebody to action Vapor liquefaction in gas, hot glue particle can also be solidified, prevent from causing to damage to vacuum pump set.Then gas is through being subcooled Trap, cold-trap can not only capture hot glue molecule, and can prevent the oil molecule in vacuum pump group from entering in mold.
B. Hand-operated butterfly valve, metal bellows: the front end of vacuum pump group air intake is equipped with Hand-operated butterfly valve, not only can be to encapsulating After convenient for beating barotropic gas, the vacuum degree of different pipe sections can also be monitored, but also conducive to closing butterfly in daily maintenance Valve protects vacuum pump group.The side of butterfly valve is all equipped with bellows, can not only compensate the displacement difference of connection, but also can reduce Vacuum pump set acts on the vibration on exhaust pipe.
C. exhaust tube: the exhaust port side of vacuum pump group is equipped with exhaust tube, and molecular sieve is housed in exhaust tube, can absorb water and steams Gas and the gas being harmful to the human body.Vapor liquefaction reflux is prevented, vacuum pump group is damaged.
D. cart, jack: vacuum pump group, condensate filter, cold-trap, Air cooler are all installed in a mobile support, Mobile support bottom is equipped with 4 castors (2 universal caster wheels, 2 rigid castors, convenient for the movement of entire unit), and 4 very heavy 4 very heavy entire carts of top support (when the work of entire unit, can be prevented mobile support from moving because of vibration) by top.
E. pipeline, bleeding point, support: uniformly, pipeline circularizes structure to 10 bleeding point arrangements of pipeline, is arranged in mold Side, the connection that pipeline takes out mouth uses KF40 interface flange, convenient for handling.
F.MS-301 high-performance sliding vane rotary pump, lobe pump: pumping unit main pump is import oilless roots pump, and fore pump is blade Mechanical pump, unit ultimate pressure≤1.5Pa, unit are equipped with cooling water circulation machine group, cold for oil gas cooling and Roots's pump assembly But.Wherein mechanical pump selects MS-301 high-performance sliding vane rotary pump, and MS-301 mechanical pump can reach :≤8 × 10-2mbar (partial pressure) ,≤ 0.7mbar (limit gross pressure), pumping speed 80L/s.It is calculated according to pipeline conductance, MS-301 blade mechanical pump can satisfy completely to be wanted It asks, in order to improve the vacuum degree of system and reduce pumpdown time, has used lobe pump.
G. electric cabinet: electric-control system, main to control blade mechanical pump, lobe pump, the unlatching of air-cooled unit controls vacuum meter Monitoring, wherein Air cooler itself carries temperature and controls template.When start-up operation, air-cooled unit power supply is first opened, and in Air cooler The running temperature of whole system is adjusted on panel, is then turned on mechanical pump and is vacuumized, vacuum meter can be monitored in real time The vacuum degree of current vacuum pipeline.

Claims (6)

1. a kind of pumping unit suitable for large-scale vacuum component, it is characterised in that: including air extractor, electric control part and branch Support;Air extractor includes annulus line, the first bellows, condensate filter, cold-trap, the second bellows, Hand-operated butterfly valve, blade Pump, lobe pump, exhaust tube;The main air entry of annulus line is connect with the first bellows, and the other end of the first bellows connects condensation Air inlet above filter, the middle part of condensate filter connect Air cooler, connect cold-trap lower part air inlet pipe below condensate filter Road, one end above cold-trap are sequentially connected butterfly valve and the second bellows, and the second bellows passes through elbow and flange and sliding vane rotary pump phase Even, by piping connection Roots pump steam inlet below sliding vane rotary pump, the exhaust outlet of lobe pump is connect with bleeding point below exhaust tube.
2. a kind of pumping unit suitable for large-scale vacuum component according to claim 1, it is characterised in that: electric control part Including power control cabinet, vacuum gauge component and Air cooler;Power control cabinet is connect with vacuum gauge component and Air cooler respectively.
3. a kind of pumping unit suitable for large-scale vacuum component according to claim 1, it is characterised in that: support includes Pipe-support and mobile support, pipe-support upper support annulus line;Air extractor and electricity is fixedly mounted in mobile support top Part is controlled, mobile support includes castor, support pallet, jack, and castor and jack are installed on the lower section of support pallet surrounding.
4. a kind of pumping unit suitable for large-scale vacuum component according to claim 1, it is characterised in that: condensation filtering Device includes cylinder, annulus cylinder, flange, filter device composition, and flange is bolted on above cylinder, the outer middle side part weldering of cylinder Annular circular ring cylinder is connect, cooling circulating water is led in cylinder, filter device, filter device and annulus cylinder position etc. is arranged in cylinder medial center Taper is arranged in height, cylinder bottom plate;Wherein filter device is made of upper filter plate, filter cylinder, lower filter plate, and upper filter plate, filter cylinder, lower filter plate are set Set mesh.
5. a kind of pumping unit suitable for large-scale vacuum component according to claim 1, it is characterised in that: annulus line It is formed by outer diameter Φ 116mm steel pipe by flanged joint, 10 bleeding points are arranged in the top of pipeline.
6. being evacuated the application method of unit described in a kind of claim 1-5, it is characterised in that the following steps are included:
Before being evacuated unit assembling, condensate filter, cold-trap, exhaust tube, annulus line are required to individually hunt leak, and leak detection leak rate is lower than 1x10-9Pa.m3/s;Before use, annulus line 1 is first mounted on the middle part of large mold, and after movement is evacuated unit in place, rotation thousand Jin top is liftoff to support entire air extractor to castor, connects air extractor and annulus line 1, group using the first bellows Air extractor and the leak detection of annulus line overall vacuum after dress, leak detection leak rate are lower than 1x10-9Pa.m3/s;System is debugged in vacuum In the process, air-cooled electromechanical source is first opened, and is adjusted in the enterprising trip temperature of Air cooler panel, guarantees the running temperature of whole system, It is then turned on sliding vane rotary pump to be vacuumized, the vacuum degree of current vacuum pipeline can be monitored in real time in vacuum meter, by the left side about 30min Right vacuum degree reaches 1000Pa hereinafter, being then turned on lobe pump control button, continues to vacuumize to system, by about 40min The vacuum degree of left and right system is evacuated to≤1.5Pa.
CN201811200751.2A 2018-09-28 2018-09-28 A kind of pumping unit suitable for large-scale vacuum component Pending CN109340082A (en)

Priority Applications (1)

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CN201811200751.2A CN109340082A (en) 2018-09-28 2018-09-28 A kind of pumping unit suitable for large-scale vacuum component

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Application Number Priority Date Filing Date Title
CN201811200751.2A CN109340082A (en) 2018-09-28 2018-09-28 A kind of pumping unit suitable for large-scale vacuum component

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111946591A (en) * 2020-07-30 2020-11-17 浙江凯立特真空科技有限公司 Booster pump/slide valve vacuum unit

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01216092A (en) * 1988-02-24 1989-08-30 Shimadzu Corp Vacuum pump device
CN202381299U (en) * 2011-12-22 2012-08-15 北京华诚浩达真空空压设备有限公司 Interlayer vacuum pumping system of multi-bottle Dewar tank
CN203053202U (en) * 2013-01-30 2013-07-10 沈阳拓达真空设备有限公司 Condensing device of vacuum drying tank
CN203875340U (en) * 2014-06-16 2014-10-15 四川盛马粉末冶金科技有限公司 Metal powder vacuum sintering furnace
CN204493123U (en) * 2015-01-31 2015-07-22 西安海联石化科技有限公司 A kind of high vacuum unit
CN205055478U (en) * 2015-10-26 2016-03-02 中国科学院金属研究所 Gaseous condensate filter of ammonium chloride that HVPE reaction produced
CN205805912U (en) * 2016-07-11 2016-12-14 常州金纬化工成套设备有限公司 There is band and automatically detect the sheet material pumped vacuum systems of vacuum
CN207024859U (en) * 2017-06-28 2018-02-23 中山凯旋真空技术工程有限公司 Condensate filter for vacuum casting apparatus
CN207195189U (en) * 2017-08-19 2018-04-06 浙江力鑫真空设备有限公司 A kind of portable Roots's guiding valve vacuum pump set
CN207278513U (en) * 2017-09-01 2018-04-27 东莞市雅之雷德机电科技有限公司 A kind of automation vacuum system applied to artificial marble auxiliary production

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01216092A (en) * 1988-02-24 1989-08-30 Shimadzu Corp Vacuum pump device
CN202381299U (en) * 2011-12-22 2012-08-15 北京华诚浩达真空空压设备有限公司 Interlayer vacuum pumping system of multi-bottle Dewar tank
CN203053202U (en) * 2013-01-30 2013-07-10 沈阳拓达真空设备有限公司 Condensing device of vacuum drying tank
CN203875340U (en) * 2014-06-16 2014-10-15 四川盛马粉末冶金科技有限公司 Metal powder vacuum sintering furnace
CN204493123U (en) * 2015-01-31 2015-07-22 西安海联石化科技有限公司 A kind of high vacuum unit
CN205055478U (en) * 2015-10-26 2016-03-02 中国科学院金属研究所 Gaseous condensate filter of ammonium chloride that HVPE reaction produced
CN205805912U (en) * 2016-07-11 2016-12-14 常州金纬化工成套设备有限公司 There is band and automatically detect the sheet material pumped vacuum systems of vacuum
CN207024859U (en) * 2017-06-28 2018-02-23 中山凯旋真空技术工程有限公司 Condensate filter for vacuum casting apparatus
CN207195189U (en) * 2017-08-19 2018-04-06 浙江力鑫真空设备有限公司 A kind of portable Roots's guiding valve vacuum pump set
CN207278513U (en) * 2017-09-01 2018-04-27 东莞市雅之雷德机电科技有限公司 A kind of automation vacuum system applied to artificial marble auxiliary production

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111946591A (en) * 2020-07-30 2020-11-17 浙江凯立特真空科技有限公司 Booster pump/slide valve vacuum unit

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