CN109333335A - Mobile arm, chemical mechanical grinding trimmer and milling apparatus - Google Patents
Mobile arm, chemical mechanical grinding trimmer and milling apparatus Download PDFInfo
- Publication number
- CN109333335A CN109333335A CN201811432480.3A CN201811432480A CN109333335A CN 109333335 A CN109333335 A CN 109333335A CN 201811432480 A CN201811432480 A CN 201811432480A CN 109333335 A CN109333335 A CN 109333335A
- Authority
- CN
- China
- Prior art keywords
- drop
- arm
- mobile arm
- containing cavities
- drainage pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
A kind of mobile arm, chemical mechanical grinding trimmer and milling apparatus, the wherein mobile arm, it include: the shell for coating arm main body and the liquid accommodating device positioned at case surface, the liquid accommodating device is used to store the drop of accumulation on the shell, and the drop of storage is discharged in lower comb.Mobile arm of the invention can prevent on the drips to the grinding pad of lower section on arm.
Description
Technical field
The present invention relates to field of semiconductor fabrication more particularly to a kind of mobile arm, chemical mechanical grinding trimmer and grind
Grind equipment.
Background technique
In semiconductor fabrication process, chemical mechanical grinding (Chemical Mechanical Polishing, CMP) is
A very important procedure is sometimes referred to as chemically-mechanicapolish polished or is planarized.So-called chemical mechanical grinding, it is to use
It is chemical that excess stock is removed from semi-conductor silicon chip with mechanical integrated effect, and it is made to obtain the technical process of flat surfaces.
Chemical mechanical grinding is carried out by chemical-mechanical grinding device, and existing chemical-mechanical grinding device generally wraps
Include: grinding table, grinding pad, lapping liquid supply side, grinding mat trimmer and grinding head, wherein grinding pad is set on grinding table；
Grinding head contacts the wafer to be ground with grinding pad for fixing wafer to be ground；Lapping liquid supply side is ground for supplying
Grinding fluid (Slurry) is to grinding pad surface；Conditioner discs (Disk) is equipped on grinding mat trimmer, for the table to grinding pad
Face is modified, while improving the uniformity that lapping liquid is distributed on the grinding pad.When being ground, lapping liquid is with certain
Rate flow to the surface of grinding pad, grinding head applies certain pressure to wafer to be ground so that wafer to be ground wait grind
Flour milling and grinding pad generate Mechanical Contact, and during the grinding process, grinding head, grinding table, conditioner discs are revolved respectively with certain speed
Turn, the film of crystal column surface to be ground is removed by mechanically and chemically acting on, to reach flattening wafer surface to be ground
Purpose, and the surface of grinding pad is modified.
But existing grinding mat trimmer falls to the possibility on grinding pad there are drop when modifying to grinding pad.
Summary of the invention
The technical problem to be solved by the present invention is to how prevent from modifying grinding pad when, drop falls to grinding pad
On.
To solve the above-mentioned problems, the present invention provides a kind of mobile arms, comprising: arm main body, cladding arm main body
Shell and liquid accommodating device positioned at case surface, the liquid accommodating device be used to store the liquid accumulated on the shell
Drop, and the drop of storage is discharged in lower comb.
Optionally, the liquid accommodating device includes the row for being located at the containing cavities on cover top portion surface and connecting with containing cavities
Liquid portion, the containing cavities are used to store the drop of accumulation on the shell, and the drain portion is used for the drop that will be stored in containing cavities
It is discharged in lower comb.
Optionally, the containing cavities include the side plate of bottom plate and the annular on bottom plate, between the bottom plate and side plate
The space of composition is for accommodating drop.
Optionally, it is additionally provided with cover board above the bottom plate, there is several holes, the cover board both ends and side plate on cover board
Contact, and the surface of cover board is lower than the top surface of side plate.
Optionally, the bottom plate has inclined surface, and the inclined surface is tilted to the direction in drain portion.
Optionally, the drain portion includes Drainage pipe and vacuum generator, and described Drainage pipe one end and containing cavities connect
It connects, the outlet end connection of the Drainage pipe other end and vacuum generator, when vacuum generator generates negative pressure, in Drainage pipe
Also negative pressure is generated, Drainage pipe will be drawn through in the drop accumulated in containing cavities and outlet end is discharged in lower comb.
Optionally, the vacuum generator includes arrival end and the outlet end of connection, and arrival end connects compressed air and feeds
End, outlet end connect with Drainage pipe and lower comb respectively, and compressed air is fed after end feeds from air, from arrival end inflow from
Outlet end can generate a negative pressure to Drainage pipe when flowing out.
Optionally, the movement of the mobile arm includes one or more of vertically moving, moving horizontally and rotate.
The present invention also provides a kind of chemical mechanical grinding trimmers, including the aforementioned mobile arm.
The present invention also provides a kind of chemical-mechanical grinding devices, including the aforementioned chemical mechanical grinding trimmer.
Compared with prior art, technical solution of the present invention has the advantage that
Mobile arm of the invention coats the shell of arm main body and the liquid accommodating device positioned at case surface, described
Liquid accommodating device is used to store the drop of accumulation on the shell, and the drop of storage is discharged in lower comb, thus the application
Mobile arm the drop accumulated on shell can be collected, and the drop of collection is discharged in lower comb, when mobile arm moves
When dynamic, it can prevent the drop accumulated on arm from falling, prevent to the component in processing chamber and processing chamber and wait locate
Manage the contamination of wafer.
Further, it is additionally provided with cover board above the bottom plate, there is several holes, the cover board both ends and side plate on cover board
Contact, and the surface of cover board is lower than the top surface of side plate, the presence of cover board, so that negative pressure easy to form between bottom plate and cover board
Chamber, the discharge of the drop more conducively accumulated in containing cavities, when on the other hand, on cover board several holes are set, not only lid surface
Drop can be flowed on bottom plate by hole, and the presence of hole, the rate of setting of drop can be accelerated by increasing surface area.
Further, the drain portion includes Drainage pipe and vacuum generator, and described Drainage pipe one end and containing cavities connect
It connects, the outlet end connection of the Drainage pipe other end and vacuum generator, when vacuum generator generates negative pressure, in Drainage pipe
Also negative pressure is generated, Drainage pipe will be drawn through in the drop accumulated in containing cavities and outlet end is discharged in lower comb.The present invention
Such drain portion structure, drop residual is few in accommodating chamber, and drain efficiency is higher, and the small volume occupied.
Further, the bottom plate has inclined surface, and the inclined surface is tilted to the direction in drain portion, so that from
Cover board, which flows to the drop on bottom plate, easily to be flowed to the direction of Drainage pipe, convenient to be discharged from Drainage pipe, make
The residual of drop will not be generated on bottom plate by obtaining drop, keep the drying of bottom plate.
Chemical mechanical grinding trimmer of the invention and chemical-mechanical grinding device, when being modified to grinding pad, energy
It prevents on the drips to grinding pad on arm.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the mobile arm of first embodiment of the invention；
Fig. 2 is the structural schematic diagram of the mobile arm of second embodiment of the invention；
Fig. 3 is the structural schematic diagram of third embodiment of the invention chemical-mechanical grinding device.
Specific embodiment
As described in the background art, there are drops to fall to grinding when existing grinding mat trimmer modifies grinding pad
Possibility on pad.
The study found that existing grinding mat trimmer generally comprises arm and the conditioner discs on arm, the arm
In there is components, the arm surface such as support member, transmission parts, driving part, liquid line and interlock circuit to be coated with
Shell, the shell are used to protect the component in arm.Although the shell being arranged on arm can stop drop (including pure water) into
Enter inside arm, but the steam in milling chamber can still condense on the shell of mobile arm, drop be formed, with arm
Mobile, the drop may drop out on grinding pad, the surface of contamination grinding pad.
For this purpose, the present invention provides a kind of mobile arm, chemical mechanical grinding trimmer and milling apparatus, wherein the shifting
Start arm cladding arm main body shell and liquid accommodating device positioned at case surface, the liquid accommodating device is for receiving
It receives accumulation drop on the shell, and the drop of storage is discharged in lower comb, thus the mobile arm of the application can will be outer
The drop accumulated on shell is collected, and the drop of collection is discharged in lower comb, when mobile arm is mobile, can be prevented on arm
The drop of accumulation is fallen, and prevents the contamination to component and wafer to be processed in processing chamber and processing chamber.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing to the present invention
Specific embodiment be described in detail.When describing the embodiments of the present invention, for purposes of illustration only, schematic diagram can disobey general ratio
Example makees partial enlargement, and the schematic diagram is example, should not be limited the scope of the invention herein.In addition, in reality
It should include the three-dimensional space of length, width and depth in the production of border.
First embodiment
With reference to Fig. 1, the mobile arm 21 includes: arm main body, coats the shell 200 of arm main body and be located at shell
The liquid accommodating device 202 on 200 surfaces, the liquid accommodating device 202 is used to store the drop of accumulation on the shell, and will receive
The drop received is discharged in lower comb 209.
The arm main body of the mobile arm 21 includes support member, installs transmission parts on the supporting member, driving
The components such as component, liquid line and/or interlock circuit, so that arm has movement, the functions such as aid or absorption.The movement
Including moving horizontally, vertically moving, rotate or flexible, the aid or absorption include accommodating or absorption conditioner discs, liquid shoot out
Head.
In one embodiment, the transmission parts include shaft drive, gear assembly or belt drive unit.Institute
Stating driving device includes motor driver or cylinder driver.For the liquid line for supplying solution, the liquid can
Think lapping liquid, pure water, cleaning solution, solvent or other liquid.The interlock circuit is relevant control circuit, for transmission
Component, driving device and/liquid line provide control signal.
The arm main body of the mobile arm 21 is coated by shell 200, and the shell 200 is for preventing drop from entering shifting
It starts inside arm.The shell 200 can be made of metal material or plastics.
In the present embodiment, the liquid accommodating device 202 include positioned at 200 top surface of shell containing cavities 201 and with
The drain portion 206 that containing cavities 201 connect, the containing cavities 201 are used to store the drop of accumulation on the shell, the drain portion
206 for the drop stored in containing cavities 201 to be discharged in lower comb 209.
In one embodiment, the containing cavities 201 cover the entire top surface of the shell 200, the bottom of containing cavities 201
Portion at least with the top edge surface airtight connection of shell so that the drop of all accumulation of 200 top surface of shell is all located at
In containing cavities 201.
In one embodiment, the containing cavities 201 include the side plate of bottom plate 201a and the annular on bottom plate 201a
201b, the space constituted between the bottom plate 201a and side plate 201b is for accommodating drop.The bottom plate 201a of the containing cavities 201
It is formed with the side plate 201b of annular by integral forming process or the bottom plate 201a and side plate 201b passes through welding or bonding
Form the containing cavities 201.
In the present embodiment, the bottom plate 201a have flat surface, in favor of collection direction from drop to drain portion
Flowing.
It is additionally provided with cover board 203 above the bottom plate 201a, there is several holes 204, the cover board 203 on cover board 203
Both ends are contacted with side plate 201b, and the surface of cover board 203 is lower than the top surface of side plate 201b.The presence of the cover board 203, makes
Negative pressure cavity easy to form between bottom plate 201a and cover board, ambient atmos enter cavity from hole under negative pressure, when there is liquid to exist
When on hole, gas is inhaled into residual liquid under negative pressure in interior containing cavities 201, and the drop more conducively accumulated is contained.
In one embodiment, the top the side plate 201b is provided with engaging groove, and the edge of the cover board 203 is fastened on card
It closes in groove, so that cover board 203 is fixed.In another embodiment, several support columns are made in the inner wall of the side plate 201b,
The support column is lower than the top surface of side plate 201b, and cover board is set on support column.In another embodiment, in the lid
Several support columns are arranged in the bottom of plate, and when by cover board as on bottom plate 201, support column is by cover plate support.In another embodiment,
At the edge of the cover board, several hooks are set, it is described when hanging on side plate 201a, cover board is fixed on bottom plate 201a.
The drain portion 206 includes Drainage pipe 210 and vacuum generator 205, described 210 one end of Drainage pipe and storage
Chamber 201 connects, and 210 other end of Drainage pipe is connect with the outlet end 208 of vacuum generator 205, and vacuum generator 205 produces
When raw negative pressure, negative pressure is also generated in Drainage pipe 210, Drainage pipe 210 will be drawn through in the drop accumulated in containing cavities 201
It is discharged in lower comb 209 with outlet end 208.Drain portion structure as the present invention, drop residual is few in accommodating chamber 201, drain
Efficiency is higher, and the small volume occupied.
When the Drainage pipe 210 is connect with containing cavities 201, the nozzle of the Drainage pipe 210 is set to side plate 201b
The region contacted with the surface bottom plate 201a or be set in bottom plate 201a so that drop in containing cavities 201 is easy quilt
Extraction.
In one embodiment, the vacuum generator 206 includes arrival end 207 and the outlet end 208 of connection, arrival end
207 connection compressed airs feed end (not shown), and outlet end 208 is connect with Drainage pipe 210 and lower comb 209 respectively,
It, can be to Drainage pipe 210 when flowing into and flowed out from outlet end 208 from arrival end 207 after compressed air 22 is fed from air infeed end
A negative pressure is generated, negative pressure is extracted the drop accumulated in accommodating chamber 201, to pass through Drainage pipe 210 and outlet end
208 are discharged in lower comb 209.In the present embodiment, the vacuum generator 20 generates always negative pressure to Drainage pipe 210.
It in another embodiment, can also include control valve in the vacuum generator 205, the control valve is set to pressure
Contracting air is fed between end and arrival end 207, and for controlling the generation of negative pressure, when control valve is opened, compressed air 22 is from entering
Mouth end 207 flow to outlet end 208, generates negative pressure, and when control valve is closed, compressed air 22 cannot be flowed from arrival end 207
To outlet end 208, negative pressure disappears.The opening and closing of the control valve are controlled by electric signal, and the mobile arm can be with
Including control unit, described control unit sends the control signal opened and closed to control valve, and control valve is receiving opening
With carried out when the control signal of closing it is corresponding open and close operation so that the discharge process of drop can be in accommodating chamber 201
Timing carries out as needed, energy saving.
Second embodiment
With reference to Fig. 2, the difference of the present embodiment and previous embodiment is: bottom plate 201a described in the present embodiment has inclination
Surface, and the inclined surface to the direction in drain portion 206 tilt so that flowing to the drop on bottom plate 201a from cover board 203
It can easily be flowed to the direction of Drainage pipe 210, it is convenient to be discharged from Drainage pipe 210, so that drop will not be the bottom of at
The residual that drop is generated on plate 201a, keeps the drying of bottom plate 201a.
In one embodiment, the tilt angle on the surface the bottom plate 201a is 30~80 °.
It should be noted that restriction or description in the present embodiment with structure same or similar in previous embodiment, at this
It is repeated no more in embodiment, specifically please refers to the restriction or description of corresponding portion in previous embodiment.
3rd embodiment
With reference to Fig. 3, the present invention also provides a kind of chemical mechanical grinding trimmers, including shifting described in previous embodiment
It starts arm 21；The head of the mobile arm 21 is equipped with conditioner discs 31.
In the present embodiment, one of the mobile arm 21 can be vertically moved, be moved horizontally and be rotated or several
Kind movement.It is described vertically move and move horizontally be linear movement.
The conditioner discs 31 can rotate.
When being modified using the trimmer of the embodiment of the present invention, drips on arm can be prevented to beneath to be trimmed
Grinding pad on.
It should be noted that restriction or description in the present embodiment with structure same or similar in previous embodiment, at this
It is repeated no more in embodiment, specifically please refers to the restriction or description of corresponding portion in previous embodiment.
Fourth embodiment
Referring to FIG. 3, a kind of chemical-mechanical grinding device, is modified including chemical mechanical grinding described in previous embodiment
Device.
When being modified, conditioner discs 31 are contacted with 41 surface of grinding pad, the rotation of conditioner discs 31 and the rotation of mobile arm or
Linear movement.
When being modified using the chemical-mechanical grinding device of the embodiment of the present invention to grinding pad 41, it can prevent on arm
On drips to grinding pad 41.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
Member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (10)
1. a kind of mobile arm characterized by comprising arm main body coats the shell of arm main body and is located at shell table
The liquid accommodating device in face, the liquid accommodating device is used to store the drop of accumulation on the shell, and the drop of storage is arranged
Into lower comb.
2. mobile arm as described in claim 1, which is characterized in that the liquid accommodating device includes being located at cover top portion table
The containing cavities in face and the drain portion connecting with containing cavities, the containing cavities are used to store the drop of accumulation on the shell, the row
Liquid portion is for the drop stored in containing cavities to be discharged in lower comb.
3. mobile arm as claimed in claim 2, which is characterized in that the containing cavities include bottom plate and the ring on bottom plate
The side plate of shape, the space constituted between the bottom plate and side plate is for accommodating drop.
4. mobile arm as claimed in claim 3, which is characterized in that be additionally provided with cover board above the bottom plate, have on cover board
There are several holes, the cover board both ends and side plane contact, and the surface of cover board is lower than the top surface of side plate.
5. mobile arm as claimed in claim 3, which is characterized in that the bottom plate has inclined surface, and the inclination
Surface is tilted to the direction in drain portion.
6. mobile arm as claimed in claim 3, which is characterized in that the drain portion includes that Drainage pipe and negative pressure generate
Device, described Drainage pipe one end are connect with containing cavities, and the outlet end connection of the Drainage pipe other end and vacuum generator is born
When generator being pressed to generate negative pressure, negative pressure is also generated in Drainage pipe, drain pipe will be drawn through in the drop accumulated in containing cavities
Road and outlet end are discharged in lower comb.
7. mobile arm as claimed in claim 6, which is characterized in that the vacuum generator includes the arrival end of connection and goes out
Mouthful end, arrival end connect compressed air and feed end, and outlet end is connect with Drainage pipe and lower comb respectively, and compressed air is from air
After feeding end infeed, a negative pressure can be generated to Drainage pipe when flowing out from outlet end by flowing into from arrival end.
8. mobile arm as claimed in claim 3, which is characterized in that the movement of the mobile arm include vertically move, water
Translate one or more of dynamic and rotation.
9. a kind of chemical mechanical grinding trimmer, which is characterized in that including the described in any item mobile hands of such as claim 1-8
Arm.
10. a kind of chemical-mechanical grinding device, which is characterized in that modified including chemical mechanical grinding as claimed in claim 9
Device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811432480.3A CN109333335A (en) | 2018-11-28 | 2018-11-28 | Mobile arm, chemical mechanical grinding trimmer and milling apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811432480.3A CN109333335A (en) | 2018-11-28 | 2018-11-28 | Mobile arm, chemical mechanical grinding trimmer and milling apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109333335A true CN109333335A (en) | 2019-02-15 |
Family
ID=65318804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811432480.3A Pending CN109333335A (en) | 2018-11-28 | 2018-11-28 | Mobile arm, chemical mechanical grinding trimmer and milling apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109333335A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111203800A (en) * | 2020-02-20 | 2020-05-29 | 长江存储科技有限责任公司 | Grinding pad dresser and chemical mechanical grinding equipment |
| CN113263448A (en) * | 2020-02-14 | 2021-08-17 | 南亚科技股份有限公司 | Grinding and conveying equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111203800B (en) * | 2020-02-20 | 2021-11-05 | 长江存储科技有限责任公司 | Grinding pad dresser and chemical mechanical grinding equipment |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190215 |
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