CN109301311A - A method of improving full solid thin film secondary lithium battery anode and electrolyte layers film interface - Google Patents

A method of improving full solid thin film secondary lithium battery anode and electrolyte layers film interface Download PDF

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Publication number
CN109301311A
CN109301311A CN201811180741.7A CN201811180741A CN109301311A CN 109301311 A CN109301311 A CN 109301311A CN 201811180741 A CN201811180741 A CN 201811180741A CN 109301311 A CN109301311 A CN 109301311A
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CN
China
Prior art keywords
positive electrode
lithium battery
substrate
secondary lithium
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201811180741.7A
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Chinese (zh)
Inventor
李晓干
薛文东
奚伊
刘炜
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Dalian University of Technology
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Dalian University of Technology
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Priority to CN201811180741.7A priority Critical patent/CN109301311A/en
Publication of CN109301311A publication Critical patent/CN109301311A/en
Withdrawn legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/052—Li-accumulators
    • H01M10/0525—Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/05—Accumulators with non-aqueous electrolyte
    • H01M10/058—Construction or manufacture
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/02—Electrodes composed of, or comprising, active material
    • H01M4/13—Electrodes for accumulators with non-aqueous electrolyte, e.g. for lithium-accumulators; Processes of manufacture thereof
    • H01M4/139—Processes of manufacture
    • H01M4/1391—Processes of manufacture of electrodes based on mixed oxides or hydroxides, or on mixtures of oxides or hydroxides, e.g. LiCoOx
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Secondary Cells (AREA)
  • Battery Electrode And Active Subsutance (AREA)

Abstract

The present invention provides a kind of method for improving full solid thin film secondary lithium battery anode and electrolyte layers film interface, the positive electrode of secondary lithium battery is first prepared into fine and close substrate and then using plasma technology or cmp method to handle a surface of substrate, then using the method for magnetron sputtering in the redeposited one layer of congruent positive electrode in processed surface, then using plasma is etched surface again, to obtain the substrate surface of ideal surface low defect density.Method of the invention can further improve electrolytic membrane in the uniformity of positive electrode substrate, to further decrease electrolytic thin-membrane deposition thickness, improve the output current density and fast charging and discharging characteristic of full solid thin film secondary lithium battery.

Description

A kind of raising full solid thin film secondary lithium battery anode and electrolyte layers film interface Method
Technical field
The present invention relates to a kind of methods for improving full solid thin film secondary lithium battery anode and electrolyte layers film interface.
Background technique
Full solid thin film secondary lithium battery replaces traditional liquid electrolyte due to using solid electrolyte, thus Its safety has obtained complete guarantee.But the ionic conductivity of solid electrolyte is poor, especially with positive oxide material Expect that contact interface is very poor, so that the output performance of solid-state secondary lithium battery such as electric current and capacity is poor.In order to further change The contact performance of kind positive electrode and thin-film electrolyte, people also such as use polymer ions conduction material feed collet using a variety of methods Layer is used as transition zone.On the other hand, for the limitation that ion passes to when overcoming solid electrolyte lower, in manufacture solid film Cell process requires to do electrolytic thin-membrane thin as far as possible.Therefore, in order to guarantee that electrolytic thin-membrane is uniform on positive electrode surface Deposition, just necessarily requires the face to be deposited of previously prepared positive electrode to have good finish.
Summary of the invention
The method that the present invention first uses tape casting or compression moulding to be sintered, prepared by the positive electrode of lithium ion battery At with certain thickness fine and close substrate, substrate thickness range is 10~200um, then using plasma technology or chemistry The method of mechanical polishing (CMP) handles a surface of positive electrode substrate, is then existed using the method for magnetron sputtering The congruent positive electrode of the redeposited one layer of 3~10um thickness in processed surface, then using plasma carries out surface again Etching process, to obtain the substrate surface of ideal surface low defect density, the technological invention is to further in positive electrode Surface prepares the solid electrolyte of ultra-thin homogeneous and has to the output characteristics for promoting full solid thin film secondary lithium battery very big Help.
Technical solution of the present invention:
A method of full solid thin film secondary lithium battery anode and electrolyte layers film interface being improved, steps are as follows:
(1) positive electrode of secondary lithium battery is prepared into fine and close positive material under the conditions of 400~850 DEG C of temperature Substrate is expected, with a thickness of 10~200um；
(2) the positive electrode substrate of above-mentioned preparation is put into plasma-generating source chamber, using Ar, H2Or O2In It is a kind of close the plasma source that combines of object with the generation containing F, the power for controlling plasma is 90~150KW, to positive electrode Substrate is scanned bombardment etching on one side, and etching period is 0.5~3 hour；Or use the method for CMP to positive electrode base The finish of piece surface treatment, surface is determined by processing time and polishing agent type；
The polishing agent is diamond, silicon nitride or aluminium oxide suspension；
(3) one layer of positive electrode congruent with positive electrode substrate of growth in situ on above-mentioned processed smooth surface Film, the micropore exposed to fill positive electrode substrate by polishing；
(4) using plasma in situ carries out surface etching process again, or is surface-treated using CMP, to obtain Surface with good finish provides good substrate surface for the uniform solid electrolyte layer of next step depositing ultrathin.
Beneficial effects of the present invention: method of the invention can further improve electrolytic membrane in the equal of positive electrode substrate Even property improves the output electric current of full solid thin film secondary lithium battery to further decrease electrolytic thin-membrane deposition thickness Density and fast charging and discharging characteristic.
Detailed description of the invention
Fig. 1 is the positive electrode substrate SEM figure before polishing treatment.
Fig. 2 is the positive electrode substrate SEM figure after polishing treatment.
Specific embodiment
Below in conjunction with technical solution, a specific embodiment of the invention is further illustrated.
Embodiment 1
Using LiNi1/3Co1/3Al1/3O2For positive electrode, by LiCoO2After being prepared into slurry, using curtain coating pole by LiCoO2 Slurry is cast into 10 microns of substrate, and fine and close positive electrode substrate is formed after being then heat-treated at 400 DEG C.It will be prepared Positive electrode substrate be put into plasma processing chamber, the power of used plasma is 90KW, using O2With contain F In generation, closes the plasma source that object combines, to LiCoO2Substrate is scanned bombardment etching on one side, and etching period is 0.5 small When.Then the method in situ using magnetic controlled plasma sputtering is in the positive electrode substrate deposition being etched again, with positive electrode The same film of composition, sputtering power 110KW are carried out.Sputtering 1 hour.After the completion of sputtering, then using plasma etches surface, Etching 0.5 hour, obtains flat and smooth positive electrode surface.
Embodiment 2
Using LiNi1/3Co1/3Al1/3O2For positive electrode, by LiCoO2After being prepared into slurry, using curtain coating pole by LiCoO2 Slurry is cast into 200 microns of substrate, and fine and close positive electrode substrate is formed after being then heat-treated between 850 DEG C.It will Prepared positive electrode substrate is put into plasma processing chamber, and the power of used plasma is 150KW, uses Ar closes the plasma source that object combines with the generation containing F, to LiCoO2Substrate is scanned bombardment etching on one side, etches 3 hours. Then the method in situ using magnetic controlled plasma sputtering is formed in the positive electrode substrate deposition being etched with positive electrode again The same film, sputtering power 150KW are carried out.Sputtering 3 hours.After the completion of sputtering, then using plasma etches surface, etching 1 hour, obtain flat and smooth positive electrode surface.
Embodiment 3
Using LiNi0.6Co0.2Mn0.2O2(LNCM) positive electrode, used method preparation causes in embodiment 1 for use Positive electrode substrate is then fixed on the polishing that CMP is carried out on chemical-mechanical polishing mathing by close positive electrode substrate.Polishing agent Using diamond, CMP planarization 1 hour, technique is then splashed in the polished surface deposition one using the magnetic control in embodiment 1 again Layer LNCM, then using plasma etches surface again, etches 0.5 hour, obtains smooth positive electrode surface.
Embodiment 4
Using LiNi0.6Co0.2Mn0.2O2(LNCM) positive electrode, used method preparation causes in example 2 for use Positive electrode substrate is then fixed on the polishing that CMP is carried out on chemical-mechanical polishing mathing by close positive electrode substrate.Polishing agent Using aluminium oxide suspension, CMP planarization 2 hours, technique is then splashed on the polished surface using the magnetic control in embodiment 1 again One layer of LNCM is deposited, then using plasma etches surface again, etches 3 hours, obtains smooth positive electrode surface.

Claims (3)

1. a kind of method for improving full solid thin film secondary lithium battery anode and electrolyte layers film interface, which is characterized in that Steps are as follows:
(1) positive electrode of secondary lithium battery is prepared into fine and close positive electrode base under the conditions of 400~850 DEG C of temperature Piece, with a thickness of 10~200um；
(2) the positive electrode substrate of above-mentioned preparation is put into plasma-generating source chamber, using Ar, H2Or O2In one Kind closes the plasma source that object combines with the generation containing F, and the power for controlling plasma is 90~150KW, to positive electrode substrate Be scanned on one side bombardment etching, etching period be 0.5~3 hour；Or use the method for CMP to positive electrode substrate table The finish of surface treatment, surface is determined by processing time and polishing agent type；
(3) one layer of positive electrode congruent with positive electrode substrate of growth in situ is thin on above-mentioned processed smooth surface Film, the micropore exposed to fill positive electrode substrate by polishing；
(4) using plasma in situ carries out surface etching process again, or is surface-treated using CMP, to be had The surface of good finish, provides good substrate surface for the uniform solid electrolyte layer of next step depositing ultrathin.
2. the method according to claim 1, wherein the polishing agent is diamond, silicon nitride or aluminium oxide Suspension.
3. according to the method described in claim 2, it is characterized in that, the CMP planarization processing time is 1~2 hour.
CN201811180741.7A 2018-10-09 2018-10-09 A method of improving full solid thin film secondary lithium battery anode and electrolyte layers film interface Withdrawn CN109301311A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2613376A (en) * 2021-12-02 2023-06-07 Dyson Technology Ltd Method of providing a laminate

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101682075A (en) * 2007-06-04 2010-03-24 皇家飞利浦电子股份有限公司 Solid-state battery and method for manufacturing of such a solid-state battery
CN105900212A (en) * 2014-01-24 2016-08-24 应用材料公司 Deposition of solid state electrolyte on electrode layers in electrochemical devices
CN106159314A (en) * 2015-04-15 2016-11-23 微宏动力系统（湖州）有限公司 All-solid lithium-ion battery and preparation method thereof
JP2017191750A (en) * 2016-04-15 2017-10-19 国立研究開発法人産業技術総合研究所 All-solid type lithium secondary battery and method for manufacturing the same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101682075A (en) * 2007-06-04 2010-03-24 皇家飞利浦电子股份有限公司 Solid-state battery and method for manufacturing of such a solid-state battery
CN105900212A (en) * 2014-01-24 2016-08-24 应用材料公司 Deposition of solid state electrolyte on electrode layers in electrochemical devices
CN106159314A (en) * 2015-04-15 2016-11-23 微宏动力系统（湖州）有限公司 All-solid lithium-ion battery and preparation method thereof
JP2017191750A (en) * 2016-04-15 2017-10-19 国立研究開発法人産業技術総合研究所 All-solid type lithium secondary battery and method for manufacturing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2613376A (en) * 2021-12-02 2023-06-07 Dyson Technology Ltd Method of providing a laminate
WO2023099885A1 (en) * 2021-12-02 2023-06-08 Dyson Technology Limited Method of providing a laminate comprising an electrode and an electrolyte

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