CN109300825A - The method that plug-in sheet machine loads the gaily decorated basket and reduces inserted sheet crack or fragment - Google Patents
The method that plug-in sheet machine loads the gaily decorated basket and reduces inserted sheet crack or fragment Download PDFInfo
- Publication number
- CN109300825A CN109300825A CN201811228901.0A CN201811228901A CN109300825A CN 109300825 A CN109300825 A CN 109300825A CN 201811228901 A CN201811228901 A CN 201811228901A CN 109300825 A CN109300825 A CN 109300825A
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- China
- Prior art keywords
- inserted sheet
- decorated basket
- gaily decorated
- side plate
- spray water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention discloses a kind of plug-in sheet machines to load the gaily decorated basket, it is made of bottom plate, backboard and both side plate, it is characterized by: there is the fillet of recess in the both side plate of the gaily decorated basket inlet on incline, the direct shock surface of side spray water column when the hollows of recess are as inserted sheet, silicon wafer is sprayed to after making side spray water column that deflecting occur, impact strength is reduced, silicon wafer crack or fragment are reduced.
Description
Technical field
The present invention relates to the loading gailys decorated basket used when polysilicon chip inserted sheet after a kind of slice applied to diamond wire.
Background technique
Plug-in sheet machine is by polysilicon chip before cleaning from the equipment for loading gaily decorated basket loading cleaning basket.As shown in Figure 1, existing insert
Piece machine loads the gaily decorated basket and is mainly made of bottom plate 1, backboard 2 and two sides side plate 3, and top is fixed with a frame 4, and centre, which is formed, to be loaded
The space of inserted sheet.Loading gaily decorated basket internal diameter is 159mm, die size 157mm, and loading space only has 2mm, and silicon wafer is being loaded into flower
It is easy to collide two side baffles when basket, causes crack or fragment.
During inserted sheet, it can be sprayed water using side spray water column alignment silicon wafer two sides, so that silicon chip side stress, in water
Under effect, silicon wafer be can be easily separated, and guaranteeing will not in flakes or biplate during inserted sheet.
But side spray water column is directly directed at silicon chip side, can be misaligned silicon because impact causes crack or fragment for a long time
Piece side cannot be such that silicon wafer separates well again.It, will also be from addition to needing to carry out side spray to silicon chip side moreover, when inserted sheet
Silicon wafer bottom surface is up sprayed, and to hold up silicon wafer, silicon wafer cannot be held up by having sprayed water small, therefore the amount of water sprayed of plug-in sheet machine is fixed.
Summary of the invention
It is an object of the invention to overcome the deficiencies of existing technologies, a kind of plug-in sheet machine is provided and loads the gaily decorated basket and method, is reduced
The crack or fragment of silicon wafer when inserted sheet.
The present invention specifically adopts the following technical scheme that
A kind of plug-in sheet machine loading gaily decorated basket, is mainly made of bottom plate, backboard and both side plate, it is characterised in that: the gaily decorated basket inlet
There is the fillet of recess in both side plate on incline, the direct shock surface of side spray water column, makes side when the hollows of recess are as inserted sheet
Water jet column sprays to silicon chip side after deflecting occurs.
Preferably, at least side plate is detachable in the both side plate.
Preferably, the hollows vertically spray to silicon chip side after making side spray water column that deflecting occur.
A method of inserted sheet crack or fragment when reducing inserted sheet, it is characterised in that: in the gaily decorated basket inlet for loading inserted sheet
The sunken fillet of undercut on incline in both side plate when inserted sheet, by the hollows of side spray water column alignment recess, makes side spray by hollows
Water column sprays to silicon chip side after deflecting occurs.
Preferably, at least side plate is detachable in the both side plate.
Preferably, silicon chip side is vertically sprayed to after making side spray water column that deflecting occur by hollows.
The present invention is by carrying out simple structure of modification to the existing loading gaily decorated basket, in the premise for not influencing inserted sheet separating effect
Under, the impact strength that side spray water column flings silicon chip side to silicon wafer is reduced, side spray water column can be efficiently solved and rushed for a long time
It hits, the problem of impact dynamics causes by force silicon wafer crack or fragment, improves yield rate.
In further technical solution of the invention, loads the gaily decorated basket at least side plate and use dismountable structure, loading
When silicon wafer, silicon wafer is placed into after side plate being dismantled, after waiting silicon wafers to place, then side plate is installed, it can be to avoid dress
Fashionable silicon wafer scratches side plate, reduces silicon wafer crack or fragment.
Detailed description of the invention
Fig. 1 is existing loading flower basket structure schematic diagram.
Fig. 2 is that the present invention loads flower basket structure schematic diagram and fillet partial enlarged view.
Fig. 3 is side plate disassembly schematic diagram.
Fig. 4 is side spray water column impact fillet surface schematic diagram (arrow indicates water column direction).
Specific embodiment
Embodiment one
It is mainly made of bottom plate 1, backboard 2 and both side plate 3 as shown in Fig. 2, loading the gaily decorated basket, top one frame 4 fixation, it can be with
It is integrated, can also assemble, assembling form carries out adaptability selection according to gaily decorated basket material.The present embodiment gaily decorated basket
Using metal material, bottom plate, backboard, side plate, top frame weld together or are fastened with modes such as screws, and centre, which is formed, to be loaded
The space of silicon wafer.It is there is the fillet of recess on the interior incline of gaily decorated basket inlet both side plate with existing loading gaily decorated basket difference
5.As shown in figure 4, direct shock surface of the hollows of recess as side spray water column, it is direct for making side spray water column not in inserted sheet
Silicon chip side is impacted, but impacts and sprays to silicon chip side after generation deflecting on hollows.Ideally, deflecting occurs for water column
Afterwards, the lateral effect for vertically spraying to silicon wafer is best.The form of the spray angle of side spray water column and the hollows that are recessed, can basis
Above-mentioned requirements match to adjust, and those skilled in the art are under the introduction of technical solution of the present invention, by simply testing
It realizes.As a result, under conditions of side spray water is certain, side spray water column can be reduced to the impact strength of silicon wafer two sides, reduced
The risk of crack or fragment.
Embodiment two
As shown in figure 3, the side plate of the gaily decorated basket is designed to dismountable structure.One is opened at the position connecting on bottom plate with side plate
A slot makes side plate that slot can be inserted or disassemble in slot.The width of slot and the thickness matching of side plate.When loading silicon wafer,
Silicon wafer is placed into after side plate being dismantled, after waiting silicon wafers to place, then side plate is installed and is fixed, it can be to avoid loading
When silicon wafer scratch side plate, reduce silicon wafer crack or fragment.
Gaily decorated basket two sides side plate may be designed to dismountable structure.It can be the form using bottom plate fluting, can also adopt
The modes such as assemble with other detaching structure, such as with screw.
Claims (6)
1. a kind of plug-in sheet machine loads the gaily decorated basket, mainly it is made of bottom plate, backboard and both side plate, it is characterised in that: the gaily decorated basket entrance
There is the fillet of recess in place's both side plate on incline, the direct shock surface of side spray water column, makes when the hollows of recess are as inserted sheet
Side spray water column sprays to silicon chip side after deflecting occurs.
2. plug-in sheet machine as described in claim 1 loads the gaily decorated basket, it is characterised in that: at least side plate is removable in the both side plate
It unloads.
3. plug-in sheet machine as described in claim 1 loads the gaily decorated basket, it is characterised in that: the hollows make side spray water column that deflecting occur
Silicon chip side is vertically sprayed to afterwards.
4. inserted sheet crack or the method for fragment when a kind of reduction inserted sheet, it is characterised in that: in the gaily decorated basket inlet two for loading inserted sheet
The sunken fillet of undercut on side plate interior sides rib when inserted sheet, by the hollows of side spray water column alignment recess, makes side spray water by hollows
Column sprays to silicon chip side after deflecting occurs.
5. reducing the method for inserted sheet crack or fragment as claimed in claim 4, it is characterised in that: at least one in the both side plate
Side plate is detachable.
6. reducing the method for inserted sheet crack or fragment as claimed in claim 4, it is characterised in that: make side spray water by hollows
Column vertically sprays to silicon chip side after deflecting occurs.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811228901.0A CN109300825A (en) | 2018-10-22 | 2018-10-22 | The method that plug-in sheet machine loads the gaily decorated basket and reduces inserted sheet crack or fragment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811228901.0A CN109300825A (en) | 2018-10-22 | 2018-10-22 | The method that plug-in sheet machine loads the gaily decorated basket and reduces inserted sheet crack or fragment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109300825A true CN109300825A (en) | 2019-02-01 |
Family
ID=65157576
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811228901.0A Pending CN109300825A (en) | 2018-10-22 | 2018-10-22 | The method that plug-in sheet machine loads the gaily decorated basket and reduces inserted sheet crack or fragment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109300825A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20000025959A (en) * | 1998-10-16 | 2000-05-06 | 윤종용 | Wafer carrier |
| KR20010035560A (en) * | 1999-10-01 | 2001-05-07 | 윤종용 | Wafer cassette |
| KR20010076472A (en) * | 2000-01-26 | 2001-08-16 | 윤종용 | Cassette for keeping wafer |
| CN201243010Y (en) * | 2008-07-25 | 2009-05-20 | 深圳市捷佳创精密设备有限公司 | Silicon chip flower basket |
| CN204905277U (en) * | 2015-07-30 | 2015-12-23 | 苏州阿特斯阳光电力科技有限公司 | Silicon chip carrier box |
| CN205752125U (en) * | 2016-07-19 | 2016-11-30 | 浙江金乐太阳能科技有限公司 | A kind of silicon chip tote box |
| CN208738202U (en) * | 2018-10-22 | 2019-04-12 | 镇江环太硅科技有限公司 | A kind of plug-in sheet machine loading gaily decorated basket |
-
2018
- 2018-10-22 CN CN201811228901.0A patent/CN109300825A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20000025959A (en) * | 1998-10-16 | 2000-05-06 | 윤종용 | Wafer carrier |
| KR20010035560A (en) * | 1999-10-01 | 2001-05-07 | 윤종용 | Wafer cassette |
| KR20010076472A (en) * | 2000-01-26 | 2001-08-16 | 윤종용 | Cassette for keeping wafer |
| CN201243010Y (en) * | 2008-07-25 | 2009-05-20 | 深圳市捷佳创精密设备有限公司 | Silicon chip flower basket |
| CN204905277U (en) * | 2015-07-30 | 2015-12-23 | 苏州阿特斯阳光电力科技有限公司 | Silicon chip carrier box |
| CN205752125U (en) * | 2016-07-19 | 2016-11-30 | 浙江金乐太阳能科技有限公司 | A kind of silicon chip tote box |
| CN208738202U (en) * | 2018-10-22 | 2019-04-12 | 镇江环太硅科技有限公司 | A kind of plug-in sheet machine loading gaily decorated basket |
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| Date | Code | Title | Description |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20201225 Address after: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Applicant after: Jiangsu Meike Solar Energy Technology Co.,Ltd. Address before: 212200 new materials Industrial Park, Yangzhong Youfang Town, Zhenjiang City, Jiangsu Province Applicant before: ZHENJIANG HUANTAI SILICON TECHNOLOGY Co.,Ltd. |
|
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Applicant after: Jiangsu Meike Solar Energy Technology Co., Ltd Address before: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Applicant before: Jiangsu Meike Solar Energy Technology Co., Ltd |