CN109297965B - Optical imaging system, method, apparatus and storage medium - Google Patents
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- 238000012634 optical imaging Methods 0.000 title claims abstract description 65
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
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Abstract
The invention relates to an optical imaging system, a method, a device and a storage medium, wherein the optical imaging system comprises: the device comprises a polymer elastic probe array, an optical lens, an image pickup device and a processing device; controlling the polymer elastic probe array to scan the surface of the sample to be detected in a constant height contact mode through the control device; the optical lens receives a light intensity signal reflected by the polymer elastic probe array due to compression deformation when the surface of a sample to be detected is scanned, and an object image corresponding to the light intensity signal is presented; the camera device is used for acquiring a light intensity image control device corresponding to the object image; and the control device processes the light intensity image to obtain a surface topography image of the sample to be detected. According to the technical scheme, the technical problems that the traditional optical imaging lens is low in resolution and the atomic force microscope scanning characterization efficiency is low are solved, the resolution and the characterization efficiency of the surface topography image of the sample to be detected are improved, and the polymer elastic probe array has the advantages of being low in preparation cost, free of damage to the surface of the sample, capable of preparing the array in a large area and capable of being used repeatedly.
Description
Technical Field
The present invention relates to the field of optical imaging, and more particularly, to optical imaging systems, methods, apparatuses, and storage media.
Background
In recent years, rapid development of nanotechnology has increased the demand for high-resolution microscopic imaging technology, and in particular, higher demands have been made on high-resolution images of nanometer size in the field of electronic image applications. The conventional optical microscope is composed of an optical lens, and magnifies an object to be observed using a change in refractive index and a change in curvature of the lens to obtain detailed information thereof. However, in the optical microscope technology, optical imaging has a diffraction limit phenomenon, and the diffraction limit of light limits further improvement of the resolution of the optical microscope, so that the resolution is difficult to break through 200 nanometers.
The traditional technology adopts an atomic force microscope to obtain high-resolution images, but the scanning mode of the atomic force microscope limits the scanning size and the scanning speed, so that the characterization speed is low, and a probe in the atomic force microscope is expensive due to precision and is easy to damage.
Disclosure of Invention
In view of the above, it is necessary to provide an optical imaging system, method, apparatus and storage medium for solving the technical problems of low resolution of the optical microscope, low characterization speed of the atomic force microscope and expensive probe price in the conventional technology.
An embodiment of the present invention provides an optical imaging system, including: a polymer elastic probe array, an optical lens, an image pickup device and a control device;
the control device is used for controlling the polymer elastic probe array to scan the surface of a sample to be detected in a constant height contact mode;
the optical lens is used for receiving a light intensity signal reflected by the polymer elastic probe array due to compression deformation when the surface of a sample to be detected is scanned, and presenting an object image corresponding to the light intensity signal;
the camera device is used for acquiring a light intensity image corresponding to the object image and sending the light intensity image to the control device;
the control device is connected with the camera device and used for processing the light intensity image to obtain a surface topography image of the sample to be detected.
In one embodiment, the device further comprises a light source;
the light source is used for providing light for the polymer elastic probe array in the scanning process.
In one embodiment, the device further comprises a driving device;
the driving device is electrically connected with the control device and used for driving the polymer elastic probe array to contact and scan the surface of the sample to be measured at a constant height after receiving the control command output by the control device.
In one embodiment, the array of polymeric elastic probes is an array of transparent polymeric elastic probes.
In a second aspect, an embodiment of the present invention further provides an optical imaging method, including:
controlling the polymer elastic probe array to scan the surface of the sample to be detected in a constant height contact mode;
acquiring a light intensity image, wherein the light intensity image is an image acquired by acquiring an object image, and the object image is an object image presented by a light intensity signal reflected by compression deformation when the polymer elastic probe array scans the surface of a sample to be detected in a constant height contact manner;
and processing the light intensity image to obtain a surface topography image of the sample to be detected.
In one embodiment, the method for controlling the polymer elastic probe array to scan the surface of the sample to be measured in a constant height contact mode comprises the following steps:
adjusting the height of the polymer elastic probe array to determine the contact state of the polymer elastic probe array and the sample to be detected;
setting the scanning speed of the polymer elastic probe array;
and controlling the polymer elastic probe array to scan the surface of the sample to be detected at the constant height and the constant scanning speed.
Further, processing the light intensity image to obtain a surface topography image of the sample to be measured, including:
acquiring a relative gray value of the light intensity image and a corresponding scanning coordinate, wherein the scanning coordinate is a position coordinate of the polymer elastic probe array scanning the surface of the sample to be detected;
obtaining the surface structure height corresponding to the light intensity image according to the quantitative corresponding relation between the relative gray value and the surface structure height;
and obtaining a surface topography image of the sample to be detected according to the scanning coordinate and the surface structure height.
In one embodiment, the method further comprises the following steps:
obtaining a background height image obtained when a polymer elastic probe array scans the smooth surface of a standard sample in a constant height contact mode;
and calibrating the surface appearance image according to the background height map.
In a third aspect, an embodiment of the present invention further provides an optical imaging apparatus, including:
the scanning control module is used for controlling the polymer elastic probe array to scan the surface of the sample to be detected in a constant height contact mode;
the light intensity image acquisition module is used for acquiring a light intensity image, wherein the light intensity image is an image acquired by acquiring an object image, and the object image is an object image presented by a light intensity signal reflected by the polymer elastic probe array due to compression deformation when the surface of a sample to be detected is scanned in a constant height contact manner;
and the surface appearance acquisition module is used for processing the light intensity image to obtain a surface appearance image of the sample to be detected.
In a fourth aspect, embodiments of the present invention also provide a storage medium containing computer-executable instructions for performing any of the above-described optical imaging methods when executed by a computer processor.
The optical imaging system, the optical imaging method, the optical imaging device and the storage medium provided by the embodiments control the polymer elastic probe array to scan the surface of the sample to be detected in a constant height contact manner through the control device, the probe array has the characteristics of easy deformation of elasticity and the like, when the surface of the sample to be detected is scanned, the polymer elastic probe array deforms to different degrees due to different structural heights of the surface of the sample to be detected, so that the strength of the reflected light intensity signal is different, the object image presented by the light intensity signal is different, the light intensity image is processed to obtain the surface topography characteristic of the sample to be detected, and the surface topography image of the sample to be detected is drawn Low preparation cost, no damage to the surface of the sample, large-area array preparation and repeated use.
Drawings
FIG. 1 is a schematic diagram of a first configuration of an optical imaging system according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the operation of an optical imaging system provided by an embodiment of the present invention;
FIG. 3 is a schematic diagram of a second configuration of an optical imaging system according to an embodiment of the present invention;
FIG. 4 is a first flowchart of an optical imaging method according to an embodiment of the present invention;
FIG. 5 is a second flowchart of a method of optical imaging according to an embodiment of the present invention;
FIG. 6 is a third flowchart of an optical imaging method provided by the embodiments of the present invention;
fig. 7 is a schematic structural diagram of an optical imaging apparatus according to an embodiment of the present invention.
Detailed Description
In order that the invention may be more fully understood, reference will now be made to the following description. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "disposed on" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or be indirectly connected to the other element.
It should be noted that the terms "first \ second \ third" in the embodiments are only used for distinguishing similar objects and do not represent specific ordering of the objects, and it should be understood that "first \ second \ third" may be interchanged under specific order or sequence if allowed. It should be understood that the terms first, second, and third, as used herein, are interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in other sequences than those illustrated or otherwise described herein.
It should be noted that the terms of orientation such as left, right, up and down in the embodiments are only mutually conceptions or reference to the normal use state of the product, and should not be considered as being particularly limiting.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
Fig. 1 is a schematic diagram of a first structure of an optical imaging system according to an embodiment of the present invention, and as shown in fig. 1, the optical imaging system includes a polymer elastic probe array 110, an optical lens 120, an image capturing device 130, and a control device 140.
The control device 140 is used for controlling the polymer elastic probe array 110 to scan the surface of the sample 150 to be measured in a constant height contact manner; the optical lens 120 is configured to receive a light intensity signal reflected by the polymer elastic probe array 110 due to compression deformation when scanning the surface of the sample 150 to be detected, and present an object image corresponding to the light intensity signal; the camera device 130 is configured to collect a light intensity image corresponding to the object image and send the light intensity image to the control device 140; the control device 140 is connected to the camera device 130, and is configured to process the light intensity image to obtain a surface topography image of the sample 150 to be measured.
The polymer elastic probe array 110 includes a plurality of polymer elastic probes 111 arranged in an array, for example, the polymer elastic probe array may include 15000 probes, which are formed by curing a polymer and have good elasticity. Alternatively, the shape of the polymer elastic probe 111 may be an inverted pyramid shape, a cylindrical shape, a prism shape, or the like. In the embodiment, the polymer elastic probe array 110 has an inverted pyramid structure, and has the advantage of easy deformation. The polymer material in the examples is PDMS (Polydimethylsiloxane). The control device 140 is a device having a control function, such as an upper computer, a controller, and the like. The control device 140 is used for controlling the scanning state of the polymer elastic probe array, such as the scanning height, the scanning speed, the scanning time, and the like. The control device 140 controls the polymer elastic probe array 110 to scan the surface of the sample to be tested in a constant height contact manner, and the degree of compression deformation of the polymer elastic probe array 110 is different due to the difference in the height of the surface structure of the sample to be tested.
Specifically, the preparation of the polymer elastic probe array 110 will be described by taking the preparation of the PDMS elastic probe array using a silicon mold as an example.
Step S1, coating photoresist on a crystal face (100) of the silicon wafer, placing a mask on the photoresist for exposure treatment, forming a pattern on silicon dioxide on the surface of the silicon wafer, and then placing the silicon wafer in potassium hydroxide etching solution for anisotropic etching. Because the etching speed of the crystal face (100) of the silicon wafer is far higher than that of the crystal face (111), patterns with inverted pyramid structures can be formed in the vertical direction. Optionally, the length-diameter ratio of the inverted pyramid structure is as large as possible, so that the probe can perform more precise scanning imaging, and the polymer elastic probe array of the inverted pyramid structure is easier to generate compression deformation in the scanning process. The preparation of the pattern of the inverted pyramid structure on the silicon wafer belongs to the prior art, and those skilled in the art can specifically select the preparation method provided in this embodiment or others to obtain the silicon mold of the inverted pyramid structure or the silicon mold of other structures according to the actual situation. It should be noted that the arrangement of atoms in a crystal constitutes many crystal planes with different orientations, and these crystal planes are generally expressed by plane indices (hkl), such as (110), (111), (112), and the like.
And step S2, performing surface fluorination treatment on the silicon mold to facilitate demolding of the PDMS probe.
And step S3, fully and uniformly mixing the monomers of the PDMS and the cross-linking agent, degassing, and pouring into a silicon mold. A clean piece of glass was covered on top of the PDMS mixture liquid. And separating the PDMS probe array from the silicon template after the system is kept warm for a plurality of hours.
Alternatively, an AAO (Anodic aluminum Oxide) Template having different shapes of the polymer elastic probe array 110 may be used, and the length, width, or height of the polymer elastic probe array 110 may be determined by the selected Template.
The optical lens 120 is configured to receive the light intensity signal reflected by the polymer elastic probe array due to compression deformation, and converge the light intensity signal to present a corresponding object image, and may include one or more lens combinations, and optionally, the optical lens may include a convex lens, and the convex lens has a magnifying effect. Further, the optical lens 130 may be an objective lens, and an object image corresponding to the reflected light intensity signal may be magnified and presented through the objective lens. The optical lens 120 is disposed at a first position of the polymer elastic probe array, the first position being a set distance away from the polymer elastic probe array so as to receive the light intensity signal reflected by the polymer elastic probe array, and optionally, the optical lens 120 is disposed directly above the polymer elastic probe array 110, and the observation range of the optical lens 120 covers the polymer elastic probe array 110. At this time, when light is vertically irradiated on the polymer elastic probe array 110, the light is vertically reflected upward to perform the optical lens 120. The light may be provided by an external light source or provided by an internal light source of the optical imaging system.
When the surface of a sample to be detected is scanned in a constant height contact manner, the polymer elastic probe array 110 is compressed and deformed in different degrees due to the rough structure of the surface of the sample to be detected, and along with the compression and deformation of the polymer elastic probe array 110 in different degrees, the degree of reflection of light irradiating the polymer elastic probe array 110 is different, and the intensity of reflected light intensity signals is different. The optical lens 120 receives the light intensity signal reflected by the polymer elastic probe array 110 and presents a corresponding object image according to the light intensity signal. Further, the presented objective lens is processed by the optical lens 120, and if the optical lens 120 includes a convex lens, the presented object image is amplified.
The camera device 130 includes a CCD camera, and is disposed at a second position of the optical lens 120, wherein the second position is located in the optical axis direction so that the CCD camera aligns an object image presented by the optical lens 120. Optionally, in the embodiment, the light vertically irradiates the polymer elastic probe array 110, the optical lens 120 is vertically disposed right above the polymer elastic probe 110, and the camera device 130 is disposed right above the optical lens 120, so as to facilitate collecting an objective lens presented by the optical lens 120. Because the optical system has a high requirement on resolution, optionally, a high-resolution high-definition camera is used for recording the change condition of the objective lens presented by the optical lens 120 in the scanning process, and further, a high-resolution camera with a speed of more than 100 frames per second can be used for recording videos. Because the object image changes in real time along with the scanning area of the surface of the sample to be measured in the scanning process, the camera device 130 collects continuous multi-frame light intensity images corresponding to the dynamically changed object image and sends the continuous multi-frame light intensity images to the control device 140, wherein the light intensity images contain information of the surface topography of the sample to be measured.
The control device 140 is a device having functions such as image processing, and optionally, the control device 140 includes an upper computer. The control device 140 receives one or more frames of light intensity images sent by the camera device 130, processes the light intensity images to extract surface topography feature information contained in the light intensity images, and obtains surface topography images of the sample to be measured. Optionally, the relative gray value information of the light intensity image is extracted, and the surface structure height included in the light intensity image is obtained according to the known qualitative relationship between the relative gray value and the surface structure height. Optionally, a model of the light intensity image and the surface structure height is obtained by a machine learning method, and the surface structure height contained in the light intensity image is obtained according to the collected light intensity image of the surface of the sample to be measured.
Fig. 2 is a schematic diagram of an optical imaging system according to an embodiment of the present invention. Referring to fig. 2, the sample to be measured has different surface structure heights, specifically, a first surface structure height area 11, a second surface structure height area 12, and a third surface structure height area 13, and the working process of the optical imaging system provided in this embodiment is described by taking the scanning process of one of the polymer elastic probes 111 of the polymer elastic probe array as an example: the polymer elastic probe 111 scans different surface structure heights of a sample to be measured in a constant height contact manner, and in the scanning process, due to the difference of the surface structure heights, the polymer elastic probe 111 has different degrees of compression deformation when scanning the first surface structure height area 11, the second surface structure height area 12 and the third surface structure height area 13, so that the first object image 21, the second object image 22 and the third object image 23 which are represented by corresponding reflected light intensities are different and respectively correspond to the first light spot 31, the second light spot 32 and the third light spot 33. The greater the degree of compressive deformation of the polymeric elastic probe 111, the larger the spot of light exhibited by the object image. For example, with continued reference to FIG. 2, the greater the degree of compressive deformation of the polymeric elastic probe 111 in the second surface structure height area 12, the larger the light spot 32 in the second object 22. And acquiring an optical image corresponding to the object image through the camera device, and processing the optical image so as to obtain the surface structure height corresponding to the optical image.
The optical imaging system provided by this embodiment controls the polymer elastic probe array to scan the surface of the sample to be measured in a constant height contact manner through the control device, the probe array has the characteristics of easy deformation due to elasticity and the like, when the surface of a sample to be detected is scanned, the polymer elastic probe array generates deformation with different degrees due to different structural heights of the surface of the sample to be detected, so that the reflected light intensity signals have different intensities and different object images presented by the light intensity signals, and further, the light intensity images corresponding to the object images are collected, the light intensity image is processed to obtain the surface appearance characteristic of the sample to be detected, the surface appearance image of the sample to be detected is drawn, the problem that the traditional optical microscopy technology has low resolution ratio due to diffraction limit is solved, and the technical problem of low representation efficiency of a single probe in the atomic force microscopy technology is solved, and the resolution and the representation efficiency of the surface topography representation image of the sample to be detected are improved. Meanwhile, different from the probe with a silicon or silicon nitride structure used by the traditional atomic force microscope, the polymer elastic probe array has the advantages of low preparation cost, no damage to the surface of a sample, large-area array preparation and repeated use.
Fig. 3 is a second structural schematic diagram of an optical imaging system according to an embodiment of the present invention, as shown in fig. 3, in which the optical imaging system further includes a light source 160 for providing light to the polymer elastic probe array 110 during a scanning process.
The light source 160 may be white light, or other light, such as red light. A large area of continuously stabilized white light is provided to illuminate the polymer elastic probe array 110. Optionally, the light source 160 is disposed right above the polymer elastic probe array 110 so as to receive light vertically reflected by the polymer elastic probe array 110. In other embodiments, the light source 160 can be placed at other positions, so that the light emitted from the light source 160 can cover the polymer elastic probe array 110, and the reflected light can be received by the optical lens 120. In an embodiment, the light source 160 provides stable light so that the light intensity signal of the incident light irradiated on the polymer elastic probe array 110 is kept uniform during the scanning process.
With continued reference to fig. 3, in one embodiment, the optical imaging system further includes a driving device 170, and the driving device 170 is electrically connected to the control device 140 and is configured to drive the polymer elastic probe array 110 to contact-scan the surface of the sample 150 to be measured at a constant height after receiving the control command output by the control device 140.
Specifically, the control device 140 is further configured to control the scanning state of the polymer elastic probe array, such as the scanning height, the scanning speed, the scanning time, and the like. The driving device 170 is electrically connected to the control device 140, and receives a control command output by the control device 140, where the control command optionally includes control commands of a scanning height, a scanning speed, a scanning time, a scanning distance, and the like. Optionally, in an embodiment, the driving device 170 includes a piezoelectric scanning head, a driving motor, and the like, the polymer elastic probe array 110 is fixed on the piezoelectric scanning head, the piezoelectric scanning head is electrically connected to a control component such as the motor, and the motor controls the piezoelectric scanning head to perform a motion state, so as to control the scanning height, the scanning speed, the scanning time, and the like of the polymer elastic probe array 110 by controlling the height, the moving speed, and the moving time of the piezoelectric scanning head. In an embodiment, the polymer elastic probe array 110 is driven by the driving device to contact and scan the surface of the sample 150 to be measured at a constant height.
In any of the above embodiments, the polymer elastic probe array 110 is a transparent polymer elastic probe array. Specifically, the polymer elastic probe array 110 has transparency, so that incident light passes through the back of the polymer elastic probe array 110 and irradiates the tip of the polymer elastic probe array 110, during a scanning process, the tip is compressed and deformed to reflect the incident light to form reflected light, and the reflected light passes through the back of the polymer elastic probe array and enters the optical lens. Alternatively, the array of polymeric elastic probes 110 may be fully transparent, translucent, or otherwise configured to provide light transmission to the polymeric elastic probes. Preferably, the array of polymer elastic probes is fully transparent to reduce the loss of incident and reflected light through the array of polymer elastic probes.
An optical imaging method is further provided in the embodiments of the present invention, and fig. 4 is a first flowchart of the optical imaging method provided in the embodiments of the present invention. The optical imaging method may be executed by a control device in the optical imaging system, and specifically, as shown in fig. 4, the optical imaging method includes the steps of:
and S310, controlling the polymer elastic probe array to scan the surface of the sample to be detected in a constant height contact mode.
In the constant height contact scanning, the degree of the compression deformation of the polymer elastic probe array depends on the surface structure height of the sample to be detected, so that the surface structure height of the sample to be detected can be observed by detecting the degree of the compression deformation of the polymer elastic probe array.
And S320, acquiring a light intensity image.
The light intensity image is an image obtained by collecting an object image, and the object image is an object image presented by a light intensity signal reflected by the polymer elastic probe array due to compression deformation when the surface of a sample to be detected is scanned in a constant height contact mode.
When the polymer elastic probe array scans the surface of a sample to be detected, the structural height of the surface appearance of the sample to be detected can enable the polymer elastic probe to generate compression deformation, the compression deformation causes the reflected light intensity signal to change, and the object image correspondingly presented by the light intensity signal also changes. And acquiring a light intensity image corresponding to the object image. The light intensity image can be a continuous multi-frame image or a multi-frame image arranged at intervals so as to reflect the strength change of the light intensity signal caused by different structure heights when the polymer elastic probe array scans the surface of a sample to be detected.
S330, processing the light intensity image to obtain a surface topography image of the sample to be detected.
And acquiring one or more frames of light intensity images, processing the light intensity images to extract surface topography characteristic information contained in the light intensity images, and acquiring the surface topography images of the sample to be detected. Optionally, the relative gray value information of the light intensity image is extracted, and the surface structure height included in the light intensity image is obtained according to the known qualitative relationship between the relative gray value and the surface structure height. Optionally, a model of the light intensity image and the surface structure height is obtained by a machine learning method, and the surface structure height contained in the light intensity image is obtained according to the collected light intensity image of the surface of the sample to be measured.
The optical imaging method provided by this embodiment obtains a light intensity image corresponding to an object image represented by a light intensity signal reflected by a compressive deformation of a polymer elastic probe array when the surface of a sample to be detected is scanned in a contact manner at a constant height, processes the light intensity image to obtain a surface topography image of the sample to be detected, processes the optical image to obtain a high-resolution surface topography by processing the optical image of the object image represented by the reflected light intensity signal in a contact scanning manner, rather than directly observing the surface topography of the sample to be detected, and provides a novel super-resolution imaging method based on the polymer elastic probe array.
FIG. 5 is a second flowchart of an optical imaging method according to an embodiment of the present invention, wherein in one embodiment, step S310: the controlling the polymer elastic probe array to contact-scan the surface of the sample to be measured at a constant height may include the steps of:
s311, adjusting the height of the polymer elastic probe array to determine the contact state of the polymer elastic probe array and the sample to be detected.
The contact state refers to whether the polymer elastic probe array is in contact with the surface of a sample to be tested and the contact degree. Specifically, the height of the polymer elastic probe array is adjusted to enable the polymer elastic probe array to be in contact with the surface of a sample to be detected, so that the polymer elastic probe array can be compressed and deformed in the scanning process. Under the same other conditions, the deeper the contact degree of the polymer elastic probe array and the surface of the sample to be detected is, the greater the degree of compression deformation generated in the scanning process is, and conversely, the shallower the contact degree of the polymer elastic probe array and the surface of the sample to be detected is, the smaller the degree of compression deformation generated in the scanning process is. In this embodiment, the height is a constant height.
Before scanning a sample to be detected, the polymer elastic probe array and the surface of the sample to be detected are optically leveled, so that the plane of the polymer elastic probe array is parallel to the substrate of the sample to be detected. Thus, all the probes can be approximately simultaneously contacted with the surface of the sample to be measured during the scanning process, and the scanning height of the probes is kept constant relative to the substrate of the sample to be measured.
And S312, setting the scanning speed of the polymer elastic probe array.
In order to obtain a surface topography image with higher resolution and ensure the topography characterization efficiency, the scanning speed should be within a reasonable range. If the scanning speed is too high, the resolution of the obtained optical image is lower, and the resolution of the surface appearance image is lower, so that the polymer elastic probe array cannot accurately detect the surface appearance of the sample to be detected, and the accuracy of scanning test is reduced; and if the scanning speed is too low, the appearance characterization efficiency of the surface of the sample to be detected is reduced.
S313, controlling the polymer elastic probe array to scan the surface of the sample to be detected at the constant height and the constant scanning speed.
After the height of the polymer elastic probe array is adjusted, the height is kept unchanged in the scanning process, and the surface of a sample to be detected is scanned at a set scanning speed at a constant speed.
Fig. 6 is a third flowchart of an optical imaging method according to an embodiment of the present invention, in which in one embodiment, step S330: processing the light intensity image to obtain the surface topography image of the sample to be detected may comprise the steps of:
and S331, acquiring the relative gray value of the light intensity image and the corresponding scanning coordinate.
And the scanning coordinate is the position coordinate of the surface of the sample to be detected scanned by the polymer elastic probe array. When the polymer elastic probe array is contacted with the surface of a sample to be detected, the contact position coordinates of the probe tip and the surface of the sample to be detected, namely the position coordinates of the polymer elastic probe which is subjected to compression deformation, namely the position coordinates of the reflected light intensity signal. In an embodiment, the variation of intensity of the reflected light intensity signal is characterized by a relative gray value. The relative gray value is a relative variation of the gray value, i.e. a ratio of the gray value variation to an original gray value, wherein the gray value variation is a difference between an actual gray value detected in the optical image and the original gray value, and the original gray value may be a gray value obtained when the polymer elastic probe array scans a smooth surface, or a gray value preset according to an actual situation.
S332, obtaining the surface structure height corresponding to the light intensity image according to the quantitative corresponding relation between the relative gray value and the surface structure height.
The surface structure height, also called surface roughness, refers to the roughness of the surface with small pitch and tiny peaks and valleys. The smaller the relative gray value is, the weaker the corresponding light intensity signal is, the smaller the surface structure height is, the smaller the compression deformation of the polymer elastic probe is, and the flatter the surface of the sample to be detected is, on the contrary, the larger the relative gray value is, the stronger the corresponding light intensity signal is, the larger the surface structure height is, the larger the compression deformation of the polymer elastic probe is, and the rougher the surface of the sample to be detected is. Specifically, a quantitative correspondence between the relative gray-scale value and the surface structure height may be established according to a known relationship between the surface structure height and the relative gray-scale value, and if the relative gray-scale value is 0.5, the corresponding surface structure height is 250 nanometers, etc. Wherein the relation between the known surface structure height and the relative grey value can be obtained from tests. And acquiring a light intensity image of the sample to be detected, acquiring a relative gray value from the light intensity image, and acquiring the surface structure height corresponding to the relative gray value according to the quantitative corresponding relation between the relative gray value and the surface structure height.
And S333, obtaining a surface topography image of the sample to be detected according to the scanning coordinate and the surface structure height.
For one of the elastic polymer probes in the elastic polymer probe array, one probe in each optical image during scanning includes its scanning coordinate and the height of the surface structure corresponding to the scanned coordinate. Acquiring multiple frames of optical images in the scanning process of the polymer elastic probe according to a time sequence, acquiring scanning coordinates and surface structure heights in each frame of optical images, sequentially arranging the scanning coordinates acquired by each frame of optical images according to the sequence of scanning time to obtain the scanning distance of the polymer elastic probe, and sequentially drawing the surface structure height corresponding to each scanning coordinate according to the position corresponding to the scanning coordinate to obtain a line profile of a scanning area of the polymer elastic probe. And similarly, acquiring a line section of the scanning area of each probe of the polymer elastic probe array, and drawing the line section line by line to obtain a surface topography image of the sample to be detected.
Before obtaining the surface structure height of the sample to be measured, the method may further include the following steps: and scanning the surface of the test sample with a given structure height by using the polymer elastic probe array to obtain a test light intensity image corresponding to an object image presented by a light intensity signal reflected by the surface of the test sample scanned by the polymer elastic probe array due to compression deformation. And obtaining the relative gray value of the test light intensity image, and fitting a quantitative corresponding relation between the relative gray value and the given structure height to provide reference for the surface structure height corresponding to the relative gray value measured by the subsequent sample to be measured.
The optical imaging method provided by the embodiment obtains the light intensity image corresponding to the object image presented by the light intensity signal reflected by the compression deformation when the polymer elastic probe array scans the surface of the sample to be detected in a constant height contact manner, and obtains the relative gray value of the light intensity image, so as to obtain the surface structure height of the scanned area of the polymer elastic probe array, and further obtain the surface topography image of the sample to be detected.
On the basis of the above embodiment, the optical imaging method may further include:
and S410, acquiring a background height map obtained when the polymer elastic probe array scans the smooth surface of the standard sample in a constant height contact mode.
Before scanning a sample to be detected, a smooth surface of a standard sample is scanned in a constant height contact mode by using a polymer elastic probe array, a light intensity image of an object image presented by a reflected light intensity signal when the smooth surface of the standard sample is scanned is obtained, and a morphology image of the smooth surface of the standard sample, namely a background height image of the polymer elastic probe array, is obtained according to a quantitative corresponding relation between a relative gray value in the light intensity image and the height of a surface structure, so that the height difference among probes of the polymer elastic probe array is calibrated.
And S420, calibrating the surface appearance image according to the background height map.
And subtracting the background height map from the obtained surface topography image to calibrate, and eliminating the noise error of each probe in the polymer elastic probe array due to the self height difference.
Fig. 7 is a schematic structural diagram of an optical imaging apparatus according to an embodiment of the present invention. The imaging device provided by the embodiment can be integrated in an optical imaging device, the optical imaging device can be formed by one or more physical entities, and the optical imaging device can be a microscope, a computer, an upper computer and the like. Referring to fig. 5, the imaging apparatus provided in this embodiment specifically includes: a scan control module 510, a light intensity image acquisition module 520, and a surface topography acquisition module 530.
The scanning control module 510 is configured to control the polymer elastic probe array to scan the surface of the sample to be detected in a constant height contact manner; a light intensity image obtaining module 520, configured to obtain a light intensity image, where the light intensity image is an image obtained by collecting an object image, and the object image is an object image presented by a light intensity signal reflected by the polymer elastic probe array due to compression deformation when the polymer elastic probe array scans the surface of the sample to be measured in a constant height contact manner; and the surface topography acquisition module 530 is configured to process the light intensity image to obtain a surface topography image of the sample to be detected.
In the technical scheme provided by this embodiment, the polymer elastic probe array is controlled to scan the surface of the sample to be tested in a constant height contact manner, a light intensity image corresponding to an object image represented by a light intensity signal reflected by the polymer elastic probe array due to compression deformation when the surface of the sample to be tested is scanned in a constant height contact manner is obtained, the light intensity image is subjected to surface topography image obtaining of the sample to be tested, the optical image is processed by processing the optical image of the object image represented by the reflected light intensity signal in a contact type near field scanning manner to obtain high-resolution surface topography instead of directly observing the surface topography of the sample to be tested, so that a novel super-resolution imaging method based on the polymer elastic probe array is provided, the polymer elastic probe array is low in cost, can be prepared and tested in a large area, and compared with an atomic force microscope with a single probe, the characterization efficiency of the surface morphology of the sample to be detected is improved.
In one embodiment, the scan control module 510 comprises: the height adjusting unit is used for adjusting the height of the polymer elastic probe array so as to determine the contact state of the polymer elastic probe array and the sample to be detected; a speed setting unit for setting a scanning speed of the polymer elastic probe array; and the scanning control unit is used for controlling the polymer elastic probe array to scan the surface of the sample to be detected at constant height and constant scanning speed.
In one embodiment, the light intensity image obtaining module 520 includes: the device comprises a gray value and coordinate acquisition unit, a surface structure height acquisition unit and a surface topography image acquisition unit. The device comprises a gray value and coordinate acquisition unit, a light intensity image acquisition unit and a scanning coordinate acquisition unit, wherein the gray value and coordinate acquisition unit is used for acquiring a relative gray value of a light intensity image and a corresponding scanning coordinate, and the scanning coordinate is a position coordinate of the polymer elastic probe array scanning the surface of a sample to be detected; the surface structure height acquisition unit is used for acquiring the surface structure height corresponding to the light intensity image according to the quantitative corresponding relation between the relative gray value and the surface structure height; and the surface appearance image acquisition unit is used for acquiring a surface appearance image of the sample to be detected according to the scanning coordinate and the surface structure height.
In one embodiment, the optical imaging apparatus further comprises: a background height map acquisition module and a calibration module. The device comprises a background height image acquisition module, a background height image acquisition module and a standard sample acquisition module, wherein the background height image acquisition module is used for acquiring a background height image obtained when a polymer elastic probe array scans the smooth surface of a standard sample in a constant height contact mode; and the calibration module is used for calibrating the surface appearance image according to the background height map.
The optical imaging device provided by the embodiment can be used for executing the optical imaging method provided by any embodiment, and has corresponding functions and beneficial effects.
The embodiment of the present invention further provides an optical imaging apparatus, which includes a memory, a processor, and a computer program stored in the memory and capable of running on the processor, and when the processor executes the computer program, the optical imaging method provided in any of the above embodiments is implemented.
Embodiments of the present invention also provide a storage medium containing computer-executable instructions, which when executed by a computer processor, perform a method of optical imaging, comprising:
controlling the polymer elastic probe array to scan the surface of the sample to be detected in a constant height contact mode;
acquiring a light intensity image, wherein the light intensity image is an image acquired by acquiring an object image, and the object image is an object image presented by a light intensity signal reflected by compression deformation when the polymer elastic probe array scans the surface of a sample to be detected in a constant height contact manner;
and processing the light intensity image to obtain a surface topography image of the sample to be detected.
Of course, the storage medium provided by the embodiment of the present invention contains computer-executable instructions, and the computer-executable instructions are not limited to the operations of the optical imaging method described above, and may also perform related operations in the optical imaging method provided by any embodiment of the present invention, and have corresponding functions and advantages.
From the above description of the embodiments, it is obvious for those skilled in the art that the present invention can be implemented by software and necessary general hardware, and certainly, can also be implemented by hardware, but the former is a better embodiment in many cases. Based on such understanding, the technical solutions of the present invention may be embodied in the form of a software product, which may be stored in a computer-readable storage medium, such as a floppy disk, a Read-Only Memory (ROM), a Random Access Memory (RAM), a FLASH Memory (FLASH), a hard disk or an optical disk of a computer, and includes instructions for enabling a computer device (which may be a smart microscope, a personal computer, a server, or a network device) to execute the optical imaging method according to any embodiment of the present invention.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. An optical imaging system, comprising: a polymer elastic probe array, an optical lens, an image pickup device and a control device;
the control device is used for controlling the polymer elastic probe array to scan the surface of a sample to be detected in a constant height contact mode; the constant height is used for representing that the scanning height of the polymer elastic probe array is kept unchanged relative to the substrate of the sample to be detected;
the optical lens is used for receiving a light intensity signal reflected by the polymer elastic probe array due to compression deformation when the surface of the sample to be detected is scanned, and presenting an object image corresponding to the light intensity signal;
the camera device is used for collecting a light intensity image corresponding to the object image and sending the light intensity image to the control device;
the control device is connected with the camera device and used for processing the light intensity image to obtain a surface appearance image of the sample to be detected.
2. The optical imaging system of claim 1, further comprising a light source;
the light source is used for providing light for the polymer elastic probe array in the scanning process.
3. The optical imaging system of claim 1, further comprising a drive device;
the driving device is electrically connected with the control device and used for driving the polymer elastic probe array to scan the surface of the sample to be detected in a constant height contact mode after receiving the control command output by the control device.
4. The optical imaging system of any of claims 1-3, wherein the array of polymeric elastic probes is an array of transparent polymeric elastic probes.
5. An optical imaging method, comprising:
controlling the polymer elastic probe array to scan the surface of a sample to be detected in a constant height contact mode;
acquiring a light intensity image, wherein the light intensity image is an image acquired by acquiring an object image, and the object image is an object image presented by a light intensity signal reflected by a polymer elastic probe array due to compression deformation when the surface of a sample to be detected is scanned in a contact manner at a constant height; the constant height is used for representing that the scanning height of the polymer elastic probe array is kept unchanged relative to the substrate of the sample to be detected;
and processing the light intensity image to obtain a surface topography image of the sample to be detected.
6. The optical imaging method according to claim 5, wherein the controlling the polymer elastic probe array to scan the surface of the sample to be measured in a constant height contact manner comprises:
adjusting the height of the polymer elastic probe array to determine the contact state of the polymer elastic probe array and the sample to be detected;
setting the scanning speed of the polymer elastic probe array;
and controlling the polymer elastic probe array to scan the surface of the sample to be detected at the constant height and the constant scanning speed.
7. The optical imaging method as claimed in claim 5, wherein the processing the light intensity image to obtain the surface topography image of the sample to be measured comprises:
acquiring a relative gray value of the light intensity image and a corresponding scanning coordinate, wherein the scanning coordinate is a position coordinate of the polymer elastic probe array scanning the surface of the sample to be detected;
obtaining the surface structure height corresponding to the light intensity image according to the quantitative corresponding relation between the relative gray value and the surface structure height;
and obtaining a surface topography image of the sample to be detected according to the scanning coordinate and the surface structure height.
8. The optical imaging method of claim 5, further comprising:
acquiring a background height map obtained when the polymer elastic probe array scans the smooth surface of a standard sample in a constant height contact manner;
and calibrating the surface topography image according to the background height map.
9. An optical imaging apparatus, comprising:
the scanning control module is used for controlling the polymer elastic probe array to scan the surface of a sample to be detected in a constant height contact mode; the constant height is used for representing that the scanning height of the polymer elastic probe array is kept unchanged relative to the substrate of the sample to be detected;
the device comprises a light intensity image acquisition module, a light intensity image acquisition module and a light intensity image acquisition module, wherein the light intensity image is an image obtained by acquiring an object image, and the object image is an object image presented by a light intensity signal reflected by a polymer elastic probe array due to compression deformation when the surface of a sample to be detected is scanned in a constant height contact manner;
and the surface appearance acquisition module is used for processing the light intensity image to obtain a surface appearance image of the sample to be detected.
10. A storage medium containing computer-executable instructions for performing the optical imaging method of any one of claims 5-8 when executed by a computer processor.
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Effective date of registration: 20240705 Address after: 230000 B-1015, wo Yuan Garden, 81 Ganquan Road, Shushan District, Hefei, Anhui. Patentee after: HEFEI MINGLONG ELECTRONIC TECHNOLOGY Co.,Ltd. Country or region after: China Address before: 510275 No. 135 West Xingang Road, Guangzhou, Guangdong, Haizhuqu District Patentee before: SUN YAT-SEN University Country or region before: China |