CN109297931A - The three direction speckle-shearing interferometry system and methods based on spatial carrier - Google Patents
The three direction speckle-shearing interferometry system and methods based on spatial carrier Download PDFInfo
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- CN109297931A CN109297931A CN201811405017.XA CN201811405017A CN109297931A CN 109297931 A CN109297931 A CN 109297931A CN 201811405017 A CN201811405017 A CN 201811405017A CN 109297931 A CN109297931 A CN 109297931A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
Abstract
The embodiment of the present invention discloses a kind of three direction speckle-shearing interferometry systems based on spatial carrier, comprising: laser, the first lens, three beam combination device groups, image device；First lens are arranged between the laser and measured object, and through first lens lighting on measured object, the measured object reflected light is imaged on the image device light beam that the laser issues after the three beam combinations device group；Wherein, each beam combination device group includes beam splitter, bundling device, the second lens and aperture diaphragm in the three beam combinations device group, and second lens and the aperture diaphragm are arranged between the beam splitter and the bundling device in optical path.Measured object is divided into three beams optical path and is imaged onto image planes by the embodiment of the present invention, and mutually mutually does Wataru, to carry out three direction synchronous shear Speckle measurements to measured object by single camera.
Description
Technical field
The present invention relates to optical field more particularly to a kind of three direction speckle-shearing interferometry systems based on spatial carrier and
Method.
Background technique
Speckle-shearing interferometry technology is a kind of whole audience, non-contact, highly sensitive optical measuring technique, since it can be direct
The derivative of object deformation is measured, the rigid displacement of testee in measurement process is eliminated, the simple, anti-seismic performance with light path device
The advantages that good and lower to measurement environmental requirement, it is widely used in industrial nondestructive testing field.
However speckle-shearing interferometry technology is only sensitive to the deformation on its shear direction.Due to the load shape of measured object defect
Change be likely to be multidirectional, such as strip defect on perpendicular to bar shaped direction have apparent load deflection, but
It is unobvious to be parallel to load deflection on bar shaped direction.If using traditional one direction speckle-shearing interferometry system detection defect, only
The defect for having load deformation on shear direction can be detected；If the defects of measured object only generates vertical with shear direction add
Deformation is carried, then can not detect these defects.For different defects a variety of in complete detection measured object, cut with traditional one direction
Cutting speckle interference technology can only repeated detection.But the mode of repeated detection does not ensure that one before and after the deformation quantity of measured object
It causes, the subsequent unified quantization processing for a variety of different defects brings difficulty.
Summary of the invention
The embodiment of the present invention provides a kind of three direction speckle-shearing interferometry system and methods based on spatial carrier, Neng Goutong
It crosses single camera and three direction synchronous shear Speckle measurements is carried out to measured object.
The embodiment of the present invention adopts the following technical scheme that
A kind of three direction speckle-shearing interferometry systems based on spatial carrier, comprising: laser, the first lens, three beam combinations
Device group, image device；
First lens are arranged between the laser and measured object, and the light beam that the laser issues is through described the
On measured object, the measured object reflected light is imaged on the image device one lens lighting after the three beam combinations device group；
Wherein, each beam combination device group includes beam splitter, bundling device, the second lens and aperture light in the three beam combinations device group
Door screen, second lens and the aperture diaphragm are arranged between the beam splitter and the bundling device in optical path.
A kind of method that application is imaged based on three direction speckle-shearing interferometry systems of spatial carrier, it is described based on sky
Between three direction speckle-shearing interferometry systems of carrier wave include: laser, the first lens, three beam combination device groups, image device；Described
One lens are arranged between the laser and measured object, and the light beam that the laser issues is through first lens lighting in quilt
It surveys on object, the measured object reflected light is imaged on the image device after the three beam combinations device group；Wherein, three beam combination
Each beam combination device group includes beam splitter, bundling device, the second lens and aperture diaphragm in device group, second lens and the aperture
Diaphragm is arranged between the beam splitter and the bundling device in optical path；
The described method includes: rotation adjusts each group of the beam splitter and/or the conjunction in the three beam combinations device group
Beam device, so that the imaging of each beam combination device group is adjusted with rotation and translated, to adjust the three of the three beam combinations device group formation
Shear direction and shearing displacement between a picture；
The mutual alignment of the aperture diaphragm in each beam combination device group is adjusted, it is big with the spatial carrier for adjusting mutual
It is small.
The three direction speckle-shearing interferometry system and methods provided in an embodiment of the present invention based on spatial carrier, by measured object
It is divided into three beams optical path to be imaged onto image planes, and mutually mutually does Wataru, so that it is synchronous to carry out three directions to measured object by single camera
Cutting speckle detection.
It should be understood that above general description and following detailed description be only it is exemplary and explanatory, not
The disclosure can be limited.
Detailed description of the invention
The drawings herein are incorporated into the specification and forms part of this specification, and shows and meets implementation of the invention
Example, and be used to explain the principle of the present invention together with specification.
Fig. 1 is the schematic diagram of the three direction speckle-shearing interferometry systems based on spatial carrier shown in the embodiment of the present invention.
Fig. 2 is the position view of the aperture diaphragm shown in the embodiment of the present invention.
Fig. 3 be the embodiment of the present invention shown in Fourier transform after frequency spectrum schematic diagram.
Specific embodiment
Example embodiments are described in detail here, and the example is illustrated in the accompanying drawings.Following description is related to
When attached drawing, unless otherwise indicated, the same numbers in different drawings indicate the same or similar elements.Following exemplary embodiment
Described in embodiment do not represent all embodiments consistented with the present invention.On the contrary, they be only with it is such as appended
The example of device and method being described in detail in claims, some aspects of the invention are consistent.
The prior art needs to use the laser of two different wave lengths, increases cost and optical path debugging complexity, space
Carrier wave size can not be separately adjustable with shearing displacement, and generally for frequency spectrum separation is realized, spatial carrier needs are larger, will lead to shearing
Amount is also larger, influences measurement accuracy.The embodiment of the present invention uses single camera, it is only necessary to one width figure of each acquisition after before being deformed
Picture can calculate the phase diagram of three different shear directions.And shearing displacement and shear direction are independently adjustable.The present invention
Measured object is divided into three beams optical path and is imaged onto image planes by embodiment, and mutually mutually does Wataru.By adjusting point in each beam optical path
Beam device or bundling device adjust the shear direction between three pictures；By adjusting the position of the aperture diaphragm in each beam optical path, adjust
Save mutual spatial carrier size.In interference pattern, the frequency spectrum of three mutual shear interferences of light beam is extracted, to obtain
The speckle-shearing interferometry phase diagram in three directions.
As shown in Figure 1, the embodiment of the present invention provides a kind of three direction speckle-shearing interferometry systems based on spatial carrier, packet
Include: laser 11, the first lens 12, three beam combination device groups 13, image device 14 (such as CCD (Charge Coupled Device,
Charge-coupled device) target surface, CMOS (Complementary Metal Oxide Semiconductor, complementary metal oxide
Semiconductor))；First lens 12 are arranged between the laser 11 and measured object 15, the light that the laser 11 issues
First lens 12 described in Shu Jing are radiated on measured object 15, the measured object reflected light after the three beam combinations device group it is described at
As being imaged on device；Wherein, each beam combination device group 13 includes beam splitter 131, bundling device 132, second in the three beam combinations device group
Lens 133 and aperture diaphragm 134, second lens and the aperture diaphragm are arranged in 131 device of beam splitting and the conjunction beam
Between device 132 in optical path.
Wherein, the beam splitter 131 in the three beam combinations device group in every beam combination device group 13 and bundling device 132 are adjustable.
According to different application scenarios, any one adjustable beam splitter 131, any one bundling device 132, or can also be together
Adjust multiple beam splitters 131 and bundling device 132.
The three direction speckle-shearing interferometry systems based on spatial carrier of the embodiment of the present invention, are divided into three-beam for measured object
Road is imaged onto image planes, and mutually mutually does Wataru, to carry out the inspection of three direction synchronous shear speckles to measured object by single camera
It surveys.
In one embodiment, the beam splitter 131 in each beam combination device group 13 and the bundling device 132 can revolve
Modulation section, so that the imaging of each beam combination device group 13 is adjusted with rotation and translated, to adjust three beam combinations device group, 13 shape
At three pictures between shear direction and shearing displacement.
In one embodiment, the aperture diaphragm 134 in each beam combination device group 13 is adjustable, so that by institute
The virtual image that three beam combination device groups 13 are reflected into is stated on the image device 13, to adjust mutual spatial carrier size.
Measured object is divided into three beams optical path and is imaged onto image planes by the embodiment of the present invention, and mutually mutually does Wataru.It is every by adjusting
Beam splitter or bundling device in a branch of optical path, adjust the shear direction between three pictures；By adjusting the hole in each beam optical path
The position of diameter diaphragm adjusts mutual spatial carrier size, mentions the frequency spectrum of three mutual shear interferences of light beam in interference pattern
It takes out, the speckle-shearing interferometry phase diagram in three directions can be obtained.
In one embodiment, it is irradiated on measured object after laser beam expanding, the light reflected from measured object passes through three beam splitters
131 are divided into 3 optical paths, and 3 optical paths are imaged after lens 133 and aperture diaphragm 134 in respective optical path, by respective conjunction
Three optical paths after beam device 132 are imaged on image device 14.By the rotation for adjusting 3 beam splitters, 131,3 bundling devices 132
Turn, three pictures in 3 optical paths can be made to have arbitrary translation, the translational movement point for three pictures that the three beam combinations device group 13 is formed
It Wei not (Δ xj,Δyj), j=1,2,3；
The size of three aperture diaphragms 134 and relative position be all it is adjustable, three aperture diaphragms 134 are respectively by respective
The virtual image that is reflected into of bundling device 132, in one plane.As shown in Fig. 2, three aperture diaphragms in the three beam combinations device group
134 position is respectively (ξ1,η1),(ξ2,η2),(ξ3,η3)；
The light wave that the measured object 15 is imaged is u (x, y) exp [i φ (x, y)], then the three beam combinations device group 13 is formed
The picture of three light beams indicates are as follows:
Wherein, j=1,2,3, λ be optical maser wavelength, and d is distance of the aperture diaphragm to CCD.
In one embodiment, the light intensity according to interference theory, on the image device 14 are as follows:
It is as follows that Fourier transformation is done to the intensity image of the image device 14 acquisition:
The schematic diagram of frequency spectrum is as shown in figure 3, wherein FT () indicates Fourier transformation, U after Fourier transformj=FT [uj]；j
=1,2,3,Indicate convolution；ParameterComprising background information, it is located at the center of frequency spectrum；
ParameterWithShearogram information comprising the first orientation shearing, center is located at
WithParameterWithShearogram information comprising second direction shearing, center point
It is not located atWithParameterWithIt is sheared comprising third direction
Shearogram information, center is located atWith
In one embodiment, pass through selectionInverse Fourier transform is done, it is availableIt is same availableWithPhase term can be calculated by following relationship:
Wherein, IM and RE respectively indicates the imaginary part part and real part part of plural number, ψ1,2=φ (x+ Δ x1,y+Δy1)-φ
(x+Δx2,y+Δy2)、ψ2,3=φ (x+ Δ x2,y+Δy2)-φ(x+Δx3,y+Δy3)、ψ3,1=φ (x+ Δ x3,y+Δy3)-
φ(x+Δx1,y+Δy1) it is phase difference between three lateral shear light beams, shear direction and shearing displacement are as follows:
Wherein norm () indicates vector field homoemorphism value；
After deformation, the second width image is recorded, evaluates phase corresponding with deforming by subtracting the phase distribution of deformation front and back
Bitmap, it is assumed that illumination direction is parallel with imaging direction, then optical phase difference caused by being calculated by following equation due to deformation；
Wherein w is plane outer displacement, by judging that the exception in phase diagram distribution can detecte out lacking for the measured object
It falls into.
Measured object is divided into three beams optical path and is imaged onto image planes by the embodiment of the present invention, and mutually mutually does Wataru.It is every by adjusting
Beam splitter or bundling device in a branch of optical path adjust shear direction and shearing displacement between three pictures；By adjusting every light beam
The position of aperture diaphragm in road adjusts mutual spatial carrier size.In interference pattern, by three mutual shear interferences of light beam
Frequency spectrum extract, to obtain the speckle-shearing interferometry phase diagram in three directions.
The embodiment of the present invention provides a kind of three direction speckle-shearing interferometry systems progress using above-mentioned based on spatial carrier
The method of imaging, which comprises rotation adjust each group of the beam splitter 131 in the three beam combinations device group and/or
The bundling device 132, so that the imaging of each beam combination device group 13 is adjusted with rotation and translated, to adjust the three beam combinations device
The shear direction and shearing displacement between three pictures that group 13 is formed；
The mutual alignment of the aperture diaphragm 134 in each beam combination device group is adjusted, is carried with adjusting mutual space
Wave size.
Wherein, the beam splitter 131 in the three beam combinations device group in every beam combination device group 13 and bundling device 132 are adjustable.
According to different application scenarios, any one adjustable beam splitter 131, any one bundling device 132, or can also be together
Adjust multiple beam splitters 131 and bundling device 132.
In one embodiment, it is irradiated to after laser beam expanding on measured object 15, the light reflected from measured object, by beam splitter
131 are divided into 3 optical paths, are then imaged after lens 133 and aperture diaphragm 134 in respective optical path, by respective conjunction beam
134 3 optical paths of device are imaged on CCD.By adjusting the rotation of three beam splitters 131 and three bundling devices 134, can make
Obtaining three pictures that three beam combination devices are formed has arbitrary translation, and the translational movement for three pictures that the three beam combinations device group is formed is respectively
(Δxj,Δyj), j=1,2,3；
The size of three aperture diaphragms 134 and relative position are all adjustable, and three aperture diaphragms 134 pass through respective conjunction respectively
The virtual image that beam device 134 is reflected into, in one plane, as shown in Fig. 2, in the three beam combinations device group three aperture diaphragms position
Set respectively (ξ1,η1),(ξ2,η2),(ξ3,η3)；
The light wave that the measured object 15 is imaged is u (x, y) exp [i φ (x, y)], then the three beam combinations device group 13 is formed
The picture of three light beams indicates are as follows:
Wherein, j=1,2,3, λ be optical maser wavelength, and d is distance of the aperture diaphragm to the image device.
In one embodiment, the light intensity on the image device 14 are as follows:
It is as follows that Fourier transformation is done to the intensity image of the image device 14 acquisition:
The schematic diagram of frequency spectrum is as shown in figure 3, wherein FT () indicates Fourier transformation, U after Fourier transformj=FT [uj]；j
=1,2,3,Indicate convolution；ParameterComprising background information, it is located at the center of frequency spectrum；
ParameterWithShearogram information comprising first direction shearing, center is located at
WithParameterWithShearogram information comprising second direction shearing, center point
It is not located atWithParameterWithIt is sheared comprising third direction
Shearogram information, center is located atWith
In one embodiment, pass through selectionInverse Fourier transform is done, it is availableIt is same availableWithPhase term can be calculated by following relationship:
Wherein IM and RE respectively indicates the imaginary part part and real part part of plural number, ψ1,2=φ (x+ Δ x1,y+Δy1)-φ(x
+Δx2,y+Δy2)、ψ2,3=φ (x+ Δ x2,y+Δy2)-φ(x+Δx3,y+Δy3)、ψ3,1=φ (x+ Δ x3,y+Δy3)-φ
(x+Δx1,y+Δy1) it is phase difference between three lateral shear light beams, shear direction and shearing displacement are as follows:
Wherein norm () indicates vector field homoemorphism value；
After deformation, the second width image is recorded, evaluates phase corresponding with deforming by subtracting the phase distribution of deformation front and back
Bitmap, if illumination direction is parallel with imaging direction, then optical phase difference caused by being calculated by following equation due to deformation；
Wherein w is plane outer displacement, by judging that the exception in phase diagram distribution can detecte out lacking for the measured object
It falls into.
Measured object is divided into three beams optical path and is imaged onto image planes by the embodiment of the present invention, and mutually mutually does Wataru.It is every by adjusting
Beam splitter or bundling device in a branch of optical path, adjust the shear direction between three pictures；By adjusting the hole in each beam optical path
The position of diameter diaphragm adjusts mutual spatial carrier size.In interference pattern, the frequency spectrum of three mutual shear interferences of light beam is mentioned
It takes out, to obtain the speckle-shearing interferometry phase diagram in three directions.
Various embodiments of the present invention are described above, above description is exemplary, and non-exclusive, and
It is not limited to disclosed each embodiment.Without departing from the scope and spirit of illustrated each embodiment, for this skill
Many modifications and changes are obvious for the those of ordinary skill in art field.The selection of term used herein, purport
In the principle, practical application or improvement to the technology in market for best explaining each embodiment, or make the art
Other those of ordinary skill can understand each embodiment disclosed herein.
Those skilled in the art will readily occur to its of the disclosure after considering specification and practicing disclosure disclosed herein
Its embodiment.This application is intended to cover any variations, uses, or adaptations of the disclosure, these modifications, purposes or
Person's adaptive change follows the general principles of this disclosure and including the undocumented common knowledge in the art of the disclosure
Or conventional techniques.
Claims (10)
1. a kind of method that application is imaged based on three direction speckle-shearing interferometry systems of spatial carrier, which is characterized in that
The three direction speckle-shearing interferometry systems based on spatial carrier include: laser, the first lens, three beam combination device groups, imaging
Device；First lens are arranged between the laser and measured object, and the light beam that the laser issues is through described first
On measured object, the measured object reflected light is imaged on the image device lens lighting after the three beam combinations device group；Its
In, each beam combination device group includes beam splitter, bundling device, the second lens and aperture diaphragm in the three beam combinations device group, and described second
Lens and the aperture diaphragm are arranged between the beam splitter and the bundling device in optical path；
The described method includes: rotation adjusts each group of the beam splitter and/or the bundling device in the three beam combinations device group,
So that the imaging of each beam combination device group is adjusted with rotation and translated, with adjust that the three beam combinations device group formed three as it
Between shear direction and shearing displacement；
The mutual alignment of the aperture diaphragm in the three beam combinations device group is adjusted, to adjust mutual spatial carrier size.
2. the method according to claim 1, wherein the translational movement point for three pictures that the three beam combinations device group is formed
It Wei not (Δ xj,Δyj), j=1,2,3；
The position of aperture diaphragm in the three beam combinations device group is respectively (ξ1,η1),(ξ2,η2),(ξ3,η3)；
The light wave of the measured object imaging is u (x, y) exp [i φ (x, y)], then three light beams that the three beam combinations device group is formed
Picture indicate are as follows:
Wherein, j=1,2,3, λ be optical maser wavelength, and d is distance of the aperture diaphragm to the image device.
3. according to the method described in claim 2, it is characterized in that, light intensity on the image device are as follows:
It is as follows that Fourier transformation is done to the intensity image of image device acquisition:
Wherein FT () indicates Fourier transformation, Uj=FT [uj]；J=1,2,3,Indicate convolution；ParameterComprising background information, it is located at the center of frequency spectrum；ParameterWithInclude
The shearogram information of first direction shearing, center is located atWithParameterWithShearogram information comprising second direction shearing, center is located atWithParameterWithShearogram information comprising third direction shearing, center difference
It is located atWith
4. according to the method described in claim 3, it is characterized in that, passing through selectionInverse Fourier transform is done, can be obtained
It arrivesIt is same availableWithPhase term can be calculated by following relationship:
Wherein IM and RE respectively indicates the imaginary part part and real part part of plural number, ψ1,2=φ (x+ Δ x1,y+Δy1)-φ(x+Δ
x2,y+Δy2)、ψ2,3=φ (x+ Δ x2,y+Δy2)-φ(x+Δx3,y+Δy3)、ψ3,1=φ (x+ Δ x3,y+Δy3)-φ(x+
Δx1,y+Δy1) it is phase difference between three lateral shear light beams, shear direction and shearing displacement are as follows:
Wherein norm () indicates vector field homoemorphism value；
After deformation, the second width image is recorded, evaluates phase diagram corresponding with deforming by subtracting the phase distribution of deformation front and back,
It is assumed that illumination direction is parallel with imaging direction, then optical phase difference caused by being calculated by following equation due to deformation；
Wherein w is plane outer displacement, by judging that the exception in phase diagram distribution can detecte out the defect of the measured object.
5. a kind of three direction speckle-shearing interferometry systems based on spatial carrier characterized by comprising laser, first are thoroughly
Mirror, three beam combination device groups, image device；
First lens are arranged between the laser and measured object, and the light beam that the laser issues is saturating through described first
Mirror is radiated on measured object, and the measured object reflected light is imaged on the image device after the three beam combinations device group；
Wherein, each beam combination device group includes beam splitter, bundling device, the second lens and aperture diaphragm, institute in the three beam combinations device group
It states the second lens and the aperture diaphragm is arranged between the beam splitter and the bundling device in optical path.
6. system according to claim 5, which is characterized in that the beam splitter in each beam combination device group and described
Bundling device is adjusted by rotation, so that the imaging of each beam combination device group is adjusted with rotation and translated, to adjust three beam combination
The shear direction and shearing displacement between three pictures that device group is formed.
7. system according to claim 6, which is characterized in that the aperture diaphragm in each beam combination device group is adjustable
Section, so that by the virtual image formed by the three beam combinations device group on the image device, to adjust mutual spatial carrier size.
8. system according to claim 7, which is characterized in that the translational movement point for three pictures that the three beam combinations device group is formed
It Wei not (Δ xj,Δyj), j=1,2,3；
The position of aperture diaphragm in the three beam combinations device group is respectively (ξ1,η1),(ξ2,η2),(ξ3,η3)；
The light wave of the measured object imaging is u (x, y) exp [i φ (x, y)], then three light beams that the three beam combinations device group is formed
Picture indicate are as follows:
Wherein, j=1,2,3, λ be optical maser wavelength, and d is distance of the aperture diaphragm to CCD.
9. system according to claim 8, which is characterized in that the light intensity on the image device are as follows:
It is as follows that Fourier transformation is done to the intensity image of image device acquisition:
Wherein FT () indicates Fourier transformation, Uj=FT [uj]；J=1,2,3,Indicate convolution；ParameterComprising background information, it is located at the center of frequency spectrum；ParameterWithInclude
The shearogram information of first orientation shearing, center is located atWithParameterWithShearogram information comprising second direction shearing, center is located atWithParameterWithShearogram information comprising third direction shearing, center difference
It is located atWith
10. system according to claim 9, which is characterized in that pass through selectionInverse Fourier transform is done, can be obtained
It arrivesIt is same availableWithPhase term can be calculated by following relationship:
Wherein IM and RE respectively indicates the imaginary part part and real part part of plural number, ψ1,2=φ (x+ Δ x1,y+Δy1)-φ(x+Δ
x2,y+Δy2)、ψ2,3=φ (x+ Δ x2,y+Δy2)-φ(x+Δx3,y+Δy3)、ψ3,1=φ (x+ Δ x3,y+Δy3)-φ(x+
Δx1,y+Δy1) it is phase difference between three lateral shear light beams, shear direction and shearing displacement are as follows:
Wherein norm () indicates vector field homoemorphism value；
After deformation, the second width image is recorded, evaluates phase diagram corresponding with deforming by subtracting the phase distribution of deformation front and back,
It is assumed that illumination direction is parallel with imaging direction, then optical phase difference caused by being calculated by following equation due to deformation；
Wherein w is plane outer displacement, by judging that the exception in phase diagram distribution can detecte out the defect of the measured object.
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| CN110132846A (en) * | 2019-06-27 | 2019-08-16 | 合肥工业大学 | Multi-direction speckle-shearing interferometry system and measurement method based on Mach once moral optical path |
| CN113358324A (en) * | 2021-06-11 | 2021-09-07 | 中国空气动力研究与发展中心超高速空气动力研究所 | Speckle interference ablation measurement system and method based on spatial phase shift |
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| CN113358324A (en) * | 2021-06-11 | 2021-09-07 | 中国空气动力研究与发展中心超高速空气动力研究所 | Speckle interference ablation measurement system and method based on spatial phase shift |
| CN113358324B (en) * | 2021-06-11 | 2022-09-02 | 中国空气动力研究与发展中心超高速空气动力研究所 | Speckle interference ablation measurement system and method based on spatial phase shift |
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