CN109297840A - Pulse voltage induces thin-film material mechanical fatigue test method and device - Google Patents
Pulse voltage induces thin-film material mechanical fatigue test method and device Download PDFInfo
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- 239000000463 material Substances 0.000 title claims abstract description 146
- 239000010409 thin film Substances 0.000 title claims abstract description 124
- 238000009661 fatigue test Methods 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims abstract description 42
- 239000010408 film Substances 0.000 claims abstract description 113
- 239000011159 matrix material Substances 0.000 claims abstract description 85
- 238000006073 displacement reaction Methods 0.000 claims abstract description 37
- 230000000694 effects Effects 0.000 claims abstract description 14
- 238000012360 testing method Methods 0.000 claims abstract description 11
- 238000010586 diagram Methods 0.000 claims description 8
- 238000005259 measurement Methods 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 7
- 238000012546 transfer Methods 0.000 claims description 7
- 230000008602 contraction Effects 0.000 claims description 6
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 5
- 238000005240 physical vapour deposition Methods 0.000 claims description 4
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims description 2
- 238000000313 electron-beam-induced deposition Methods 0.000 claims description 2
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims 1
- 238000007747 plating Methods 0.000 claims 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 abstract description 26
- 230000005684 electric field Effects 0.000 abstract description 3
- 238000012544 monitoring process Methods 0.000 abstract description 3
- 230000006698 induction Effects 0.000 description 6
- 238000011160 research Methods 0.000 description 4
- 239000007769 metal material Substances 0.000 description 3
- 125000004122 cyclic group Chemical group 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 229910003327 LiNbO3 Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 210000001367 artery Anatomy 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000005616 pyroelectricity Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 210000003462 vein Anatomy 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/32—Investigating strength properties of solid materials by application of mechanical stress by applying repeated or pulsating forces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
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- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
A kind of pulse voltage induces thin-film material mechanical fatigue test method and device, belongs to mechanical fatigue testing field.It is that thin-film material is attached to lithium niobate (LN) matrix that the pulse voltage, which induces thin-film material mechanical fatigue test method, LN matrix is individually irradiated with laser beam, and apply pulse voltage, LN matrix drives film to carry out stretching-contraction cycle variation, it is displaced by testing film, obtains mechanical fatigue life.The device uses laser beam equipment, electric system and mechanical fatigue test macro；The device induces thin-film material mechanical fatigue by the change of pulse, by carrying out displacement monitoring to thin-film material, obtain its mechanical fatigue life, this method is only pulling force caused by LiNbO_3 film matrix deforms to the effect of film, it is influenced without other electric fields, magnetic field, thermal field etc., the influence of multi- scenarios method is avoided, the precision of experimental result improves a lot, and this method can study the basic deformation mechanism for disclosing thin-film material under small scale.
Description
Technical field
The present invention relates to mechanical fatigue the field of test technology, and in particular to a kind of pulse voltage induction thin-film material machinery is tired
Labor test method and device.
Background technique
Thin-film material is widely used in micro-electromechanical system (MEMS, Micro Electro as construction package
Mechanical Systems) in.It is to design and manufacture characteristic size in sub-micron to millimeter on the basis of microelectric technique
Micromachine, be collection sensing, information processing and be implemented in integrated integrated micro-system.MEMS be a little its high-volume,
Low cost, high reliability etc., due to these characteristics so being widely used in the fields such as electronics, medical treatment, aerospace and automobile.Often
The MEMS device seen has: brake, chemical reactor, microsensor power generator and biological devices etc..Under minute yardstick
Some mechanical performances and physical property in device etc. will appear under microcosmic different from tradition machinery and peculiar rule, this existing
As the dimensional effect being just known as.High-frequency vibration occurs at work for the device under micro-meter scale, causes thin
Film fatigue, to influence the stability of its work.The scantling of MEMS is generally all in micron dimension, the method for common equipment
The research of the mechanical property of micro structures can hardly be directly used in, thus find and invention micro-structure components in thin-film material it is tired
The research method of labor performance is most important.
Lithium niobate (LiNbO3, LN) and it is a kind of with excellent electric light, acousto-optic, bullet light, piezoelectricity, pyroelectricity and nonlinear characteristic
Piezoelectric ceramics.In piezoceramic material, material of the LN as one such property with piezoelectric ceramics, it may be assumed that pressure
Electroceramics applies pulse voltage, and material can deform (1%~10%).
Under normal circumstances, piezoceramic material needs sufficiently high voltage (4KV or more) could normal use, so height electricity
Under the conditions of pressure, film breakdown can fail to impaired, but the special nature of LN material, individually be irradiated to LN using laser beam,
It need to only provide low-voltage (20V or less), it can normal use.
With the continuous development of MEMS device and micro-/ nano system, to widely used without constraint micron meter in micro element
The mechanical property of metal material is spent, especially long service performance proposes increasingly higher demands.It is worth noting that, when micro-
When the geometric scale of metrical scale metal moves closer to the microstructure scale of material internal, often show with block materials not
Same mechanical behavior.This is because the scale in other 2 directions of a direction scale ratio of film is small as two-dimensional structure material
Much (to when young 20 times or more, generally want small hundred times or more), therefore, the mechanical fatigue of thin-film material is tested due to by sample
Product preparation, method of clamping and load displacement measurement accuracy limit and compare and be difficult to implement, the experimental facilities of conventional blocks material
It is not applicable in method.The fatigue behaviour and its dimensional effect for furtheing investigate micro-meter scale metal material, not only to micro-/ nano machine
The reliability design of tool system and device has actual directive significance, and the basic deformation machine to announcement material under small scale
Fixture has important scientific meaning.
Summary of the invention
The object of the present invention is to provide a kind of pulse voltages to induce thin-film material mechanical fatigue test method and device,
The device is the special device of a kind of fatigue behaviour for studying micro-meter scale metal material and its dimensional effect, which passes through arteries and veins
The change of punching induces thin-film material mechanical fatigue, by carrying out displacement monitoring to thin-film material, obtains its mechanical fatigue life,
This method is only pulling force caused by LiNbO_3 film matrix deforms to the effect of film, without other electric fields, magnetic field, thermal field etc.
It influences, avoids the influence of multi- scenarios method, the precision of experimental result improves a lot, and this method, which can be studied, discloses film material
Expect the basic deformation mechanism under small scale.
A kind of pulse voltage of the invention induces thin-film material mechanical fatigue test method, comprising the following steps:
Step 1:
Thin-film material to be tested is adhered into LiNbO_3 film matrix surface, obtains being attached to LiNbO_3 film matrix surface
Thin-film material；
Step 2:
LiNbO_3 film matrix is individually irradiated with laser beam, and applies pulse voltage, makes the voltage of LiNbO_3 film matrix
Generate mechanical periodicity；Wherein, the laser power of laser beam is 50~100mW, and the voltage of LiNbO_3 film matrix is from 0V to 5V
~30V carries out mechanical periodicity, and mechanical periodicity frequency is to be determined according to the recoverable force period of the thin-film material of test；
When voltage is definite value UV, voltage is applied on LiNbO_3 film matrix, and stretcher strain occurs for LN, and displacement transfer is given
Film, film tension；Wherein, the UV is a fixed value in 5V~30V range；
When voltage is 0V, LN both end voltage is 0V, and LN is shunk, and contraction passes to film, film shrunk, by a week
Phase variation, thin-film material restore to original state；
It moves in circles, LN occurs to stretch and shrink, thin-film material is promoted to be under the state effect for having no-voltage
" draw --- zero " fatigue state；
Step 3:
It is monitored by the displacement to thin-film material, obtains fatigue S-N diagram, S-N curve, so that the machinery for obtaining thin-film material is tired
The labor service life.
In the step 1, the method for the thin-film material attachment LiNbO_3 film matrix surface use to be tested
Are as follows: one of magnetron sputtering, ion plating, electron beam deposition, ion beam depositing, physical vapour deposition (PVD), chemical vapor deposition.
In the step 2, the mechanical periodicity frequency is 10~40s.
In the step 2,0V duration is that thin-film material restored to the time of original state, and thin-film material is in
" zero " state.
In the step 2, when voltage is definite value UV, on a cycle change frequency, LiNbO_3 film matrix tool
There is piezoelectric ceramics property.
A kind of above-mentioned pulse voltage induces thin-film material mechanical fatigue test method, can be induced using following pulse voltage
Thin-film material mechanical fatigue test device, it includes LiNbO_3 film which, which induces thin-film material mechanical fatigue test device,
Matrix (LN film matrix), laser beam equipment, electric system and mechanical fatigue test macro；
The electric system includes the pulse power；
The opposite position of the LiNbO_3 film matrix side of not set thin-film material is arranged in the laser beam equipment,
Laser beam equipment can individually be radiated at laser beam on LiNbO_3 film matrix for providing；The pulse power and lithium niobate
Film matrix both ends are connected；Thin-film material opposite position to be tested is arranged in the mechanical fatigue test macro.
The electric system further includes compensation resistance, ammeter, voltmeter and conducting wire.
In the electric system, voltmeter is connected by conducting wire with LiNbO_3 film matrix both ends, the pulse power, compensation
Resistance and ammeter are sequentially connected in series, and are connected to LiNbO_3 film matrix both ends.
The pulse voltage that the pulse power provides is 0V~30V.
The mechanical fatigue test macro includes displacement measurement equipment and data receiving area reason display computer, and displacement is surveyed
Examination equipment manages display computer with data receiving area and is connected, and the change in displacement data that displacement measurement equipment measures are transmitted to data and connect
Processing display computer is received to output test result by processing.
The displacement measurement equipment is preferably laser displacement distance measuring sensor.
A kind of pulse voltage of the invention induces in thin-film material mechanical fatigue test method, using lithium niobate (LN) conduct
Thin-film material matrix, film are attached to lithium niobate surface, are irradiated by using laser beam to LN, it is made to have piezoelectric ceramics
Characteristic, laser beam are not generated any effect to thin-film material, apply pulse voltage while being irradiated using laser beam to LN,
So that the voltage of LN at mechanical periodicity, to realize the deformation of LN, by displacement transfer to thin-film material, induces thin-film material
Stretcher strain, to test out the mechanical fatigue life of thin-film material.
A kind of pulse voltage of the invention induces thin-film material mechanical fatigue test method and device, it has the advantage that:
Method of the invention researchs and analyses thin-film material, due to the particularity of film, if external factor is direct
It acts in film itself, causes film is impaired even to fail.The present invention is made by the matrix by a kind of material as film
Film allows basis material to become a kind of medium, thus can directly handle matrix, observe indirectly together with substrate adhesive
The variation of film.With it is conventional directly film handle it is different, present invention ensure that the performance that film is intact.Secondly, this
The mechanical fatigue for inventing single research film, only individually applies voltage to LN matrix, and the effect to film is also only matrix deformation
Generated pulling force influences without other electric fields, magnetic field, thermal field etc., also avoids the influence of multi- scenarios method, the essence of experimental result
Degree improves a lot.
Detailed description of the invention
Fig. 1 is that pulse voltage of the invention induces thin-film material mechanical fatigue schematic structural diagram of testing device.
In figure, 1 is thin-film material, and 2 be LN film matrix, and 3 be laser beam equipment, and 4 be the pulse power, and 5 be compensation resistance,
6 be ammeter, and 7 be voltmeter, and 8 be laser displacement distance measuring sensor, and 9 be data receiver processing display computer.
Fig. 2 is that the pulse voltage of the embodiment of the present invention 1 induces in the test of thin-film material mechanical fatigue, the mechanical periodicity time
With the relational graph of voltage U.
Specific embodiment
Below with reference to embodiment, the present invention is described in further detail.
Embodiment 1
A kind of pulse voltage induction thin-film material mechanical fatigue test method, comprising the following steps:
Step 1:
By thin-film material to be tested in the method for magnetron sputtering, LiNbO_3 film matrix surface is sputtered at, is adhered to
In the thin-film material of LiNbO_3 film matrix surface；
Step 2:
LiNbO_3 film matrix is individually irradiated with laser beam, and applies pulse voltage, makes the voltage of LiNbO_3 film matrix
Generate mechanical periodicity；Wherein, the laser power of laser beam is 70mW, and the voltage of LiNbO_3 film matrix is to carry out from 0V to 10V
Mechanical periodicity, mechanical periodicity frequency are 30s；
In the present embodiment, the voltage of LiNbO_3 film matrix and the relational graph of cycle time are shown in Fig. 2.
When voltage is definite value 10V, voltage is applied on LiNbO_3 film matrix, and LiNbO_3 film matrix occurs to stretch and become
Shape, displacement transfer is to thin-film material, thin-film material tension；
When voltage is 0V, LiNbO_3 film matrix both end voltage is 0V, and LiNbO_3 film base shrinks, contraction passes to
Thin-film material, thin-film material are shunk, and change 30s by a cycle, thin-film material restores to original state；
It moves in circles, LiNbO_3 film matrix occurs to stretch and shrink, promote film material under the state effect for having no-voltage
Material is in " draw --- zero " fatigue state；
Step 3:
It is monitored by the displacement to thin-film material, obtains fatigue S-N diagram, S-N curve, so that the machinery for obtaining thin-film material is tired
The labor service life.
Wherein, the effect of laser displacement distance measuring sensor 8 is the change in displacement of monitoring film material, to calculate difference
The cyclic strain width of pulse voltage induction mechanical film fatigue.
Δ ε=(l-l0)/l0, wherein l is the length after variation, l0For initial length, Δ ε is cyclic strain width.Laser position
Moving the displacement that distance measuring sensor 8 measures is l-l0
The pulse voltage induces the mechanical fatigue that thin-film material mechanical fatigue test device is strain controlling, is followed
Ring strain amplitude and fatigue life complete test.
The surface damage behavior of thin-film material uses micro- sem observation.
A kind of pulse voltage of the present embodiment induces thin-film material mechanical fatigue test method, is lured using following pulse voltage
Thin-film material mechanical fatigue test device is sent out, the structural schematic diagram of the device is shown in Fig. 1.It is mechanical that the pulse voltage induces thin-film material
Fatigue test device includes that LiNbO_3 film matrix 2 (LN film matrix 2), laser beam equipment 3, electric system and mechanical fatigue are surveyed
Test system；
The electric system includes the pulse power, compensation resistance, ammeter, voltmeter and conducting wire.
The thin-film material 1 to be tested that the present embodiment is selected is Au, and thin-film material is sputtered at the one of LN film matrix 2
Side.
The corresponding position of 2 side of LiNbO_3 film matrix of not set thin-film material is arranged in the laser beam equipment 3
It sets, laser beam equipment 3 can individually be radiated at laser beam on LiNbO_3 film matrix 2 for providing；4 He of the pulse power
2 both ends of LiNbO_3 film matrix are connected；The mechanical fatigue test macro includes that laser displacement distance measuring sensor 8 and data connect
Processing display computer 9 is received, laser displacement distance measuring sensor 8 manages display computer 9 with data receiving area and is connected, and laser displacement is surveyed
It is transmitted to data receiver processing display computer 9 away from the change in displacement data that sensor 8 measures, by processing, output test knot
Fruit.
Laser displacement distance measuring sensor 8 in the mechanical fatigue test macro is for measuring thin-film material to be tested
The top of thin-film material 1 to be tested is arranged in 1 displacement, laser displacement distance measuring sensor 8.
In the electric system, voltmeter 7 is connected by conducting wire with LiNbO_3 film matrix both ends, and the pulse power 4 is mended
It repays resistance 5 and ammeter 6 is sequentially connected in series, and be connected to LiNbO_3 film matrix both ends.
Embodiment 2
A kind of pulse voltage induction thin-film material mechanical fatigue test method, comprising the following steps:
Step 1:
By thin-film material to be tested in the method for magnetron sputtering, LiNbO_3 film matrix surface is sputtered at, is adhered to
In the thin-film material of LiNbO_3 film matrix surface；
Step 2:
LiNbO_3 film matrix is individually irradiated with laser beam, and applies pulse voltage, makes the voltage of LiNbO_3 film matrix
Generate mechanical periodicity；Wherein, the laser power of laser beam is 100mW, and the voltage of LiNbO_3 film matrix is to carry out from 0V to 20V
Mechanical periodicity, mechanical periodicity frequency are 10s；
When voltage is definite value 20V, voltage is applied on LiNbO_3 film matrix, and LiNbO_3 film matrix occurs to stretch and become
Shape, displacement transfer is to thin-film material, thin-film material tension；
When voltage is 0V, LiNbO_3 film matrix both end voltage is 0V, and LiNbO_3 film base shrinks, contraction passes to
Thin-film material, thin-film material are shunk, and change 10s by a cycle, thin-film material restores to original state；
It moves in circles, LiNbO_3 film matrix occurs to stretch and shrink, promote film material under the state effect for having no-voltage
Material is in " draw --- zero " fatigue state；
Step 3:
It is monitored by the displacement to thin-film material, obtains fatigue S-N diagram, S-N curve, so that the machinery for obtaining thin-film material is tired
The labor service life.
The surface damage behavior of thin-film material uses micro- sem observation.
A kind of pulse voltage of the present embodiment induces thin-film material mechanical fatigue test method, and the pulse voltage of use induces
Thin-film material mechanical fatigue test device, with embodiment 1.
Embodiment 3
A kind of pulse voltage induction thin-film material mechanical fatigue test method, comprising the following steps:
Step 1:
By thin-film material to be tested in the method for magnetron sputtering, LiNbO_3 film matrix surface is sputtered at, is adhered to
In the thin-film material of LiNbO_3 film matrix surface；
Step 2:
LiNbO_3 film matrix is individually irradiated with laser beam, and applies pulse voltage, makes the voltage of LiNbO_3 film matrix
Generate mechanical periodicity；Wherein, the laser power of laser beam is 50mW, and the voltage of LiNbO_3 film matrix is to carry out from 0V to 30V
Mechanical periodicity, mechanical periodicity frequency are 40s；
When voltage is definite value 30V, voltage is applied on LiNbO_3 film matrix, and LiNbO_3 film matrix occurs to stretch and become
Shape, displacement transfer is to thin-film material, thin-film material tension；
When voltage is 0V, LiNbO_3 film matrix both end voltage is 0V, and LiNbO_3 film base shrinks, contraction passes to
Thin-film material, thin-film material are shunk, and change 40s by a cycle, thin-film material restores to original state；
It moves in circles, LiNbO_3 film matrix occurs to stretch and shrink, promote film material under the state effect for having no-voltage
Material is in " draw --- zero " fatigue state；
Step 3:
It is monitored by the displacement to thin-film material, obtains fatigue S-N diagram, S-N curve, so that the machinery for obtaining thin-film material is tired
The labor service life.
The surface damage behavior of thin-film material uses micro- sem observation.
A kind of pulse voltage of the present embodiment induces thin-film material mechanical fatigue test method, and the pulse voltage of use induces
Thin-film material mechanical fatigue test device, with embodiment 1.
Embodiment 4
A kind of pulse voltage induction thin-film material mechanical fatigue test method, comprising the following steps:
Step 1:
By thin-film material to be tested in the method for magnetron sputtering, LiNbO_3 film matrix surface is sputtered at, is adhered to
In the thin-film material of LiNbO_3 film matrix surface；
Step 2:
LiNbO_3 film matrix is individually irradiated with laser beam, and applies pulse voltage, makes the voltage of LiNbO_3 film matrix
Generate mechanical periodicity；Wherein, the laser power of laser beam is 80mW, and the voltage of LiNbO_3 film matrix is that week is carried out from 0V to 5V
Phase variation, mechanical periodicity frequency are 20s；
When voltage is definite value 5V, voltage is applied on LiNbO_3 film matrix, and LiNbO_3 film matrix occurs to stretch and become
Shape, displacement transfer is to thin-film material, thin-film material tension；
When voltage is 0V, LiNbO_3 film matrix both end voltage is 0V, and LiNbO_3 film base shrinks, contraction passes to
Thin-film material, thin-film material are shunk, and change 20s by a cycle, thin-film material restores to original state；
It moves in circles, LiNbO_3 film matrix occurs to stretch and shrink, promote film material under the state effect for having no-voltage
Material is in " draw --- zero " fatigue state；
Step 3:
It is monitored by the displacement to thin-film material, obtains fatigue S-N diagram, S-N curve, so that the machinery for obtaining thin-film material is tired
The labor service life.
The surface damage behavior of thin-film material uses micro- sem observation.
A kind of pulse voltage of the present embodiment induces thin-film material mechanical fatigue test method, and the pulse voltage of use induces
Thin-film material mechanical fatigue test device, with embodiment 1.
Claims (10)
1. a kind of pulse voltage induces thin-film material mechanical fatigue test method, which comprises the following steps:
Step 1:
Thin-film material to be tested is adhered into LiNbO_3 film matrix surface, obtains being attached to the thin of LiNbO_3 film matrix surface
Membrane material；
Step 2:
LiNbO_3 film matrix is individually irradiated with laser beam, and applies pulse voltage, generates the voltage of LiNbO_3 film matrix
Mechanical periodicity；Wherein, the laser power of laser beam is 50~100mW, the voltage of LiNbO_3 film matrix be from 0V to 5V~30V
Mechanical periodicity is carried out, mechanical periodicity frequency is to determine according to the recoverable force period of the thin-film material of test；
When voltage is definite value UV, voltage is applied on LiNbO_3 film matrix, and stretcher strain occurs for LN, and displacement transfer is to thin
Film, film tension；Wherein, the UV is a fixed value in 5V~30V range；
When voltage is 0V, LN both end voltage is 0V, and LN is shunk, and contraction passes to film, and film shrunk becomes by a cycle
Change, thin-film material restores to original state；
It moves in circles, LN occurs to stretch and shrink, thin-film material is promoted to be in " draw --- zero " under the state effect for having no-voltage
Fatigue state；
Step 3:
It is monitored by the displacement to thin-film material, obtains fatigue S-N diagram, S-N curve, to obtain the mechanical fatigue longevity of thin-film material
Life.
2. pulse voltage as described in claim 1 induces thin-film material mechanical fatigue test method, which is characterized in that described
In step 1, method that the described thin-film material attachment LiNbO_3 film matrix surface to be tested uses are as follows: magnetron sputtering, from
One of sub- plating, electron beam deposition, ion beam depositing, physical vapour deposition (PVD), chemical vapor deposition.
3. pulse voltage as described in claim 1 induces thin-film material mechanical fatigue test method, which is characterized in that described
In step 2, the mechanical periodicity frequency is 10~40s.
4. pulse voltage as described in claim 1 induces thin-film material mechanical fatigue test method, which is characterized in that described
In step 2,0V duration is that thin-film material restored to the time of original state, and thin-film material is in " zero " state.
5. pulse voltage as described in claim 1 induces thin-film material mechanical fatigue test method, which is characterized in that described
In step 2, when voltage is definite value UV, on a cycle change frequency, LiNbO_3 film matrix has piezoelectric ceramics property.
6. a kind of pulse voltage induces thin-film material mechanical fatigue test device, which is characterized in that the pulse voltage induces film
Material mechanical fatigue test device includes LiNbO_3 film matrix, laser beam equipment, electric system and mechanical fatigue test macro；
The electric system includes the pulse power；
The opposite position of the LiNbO_3 film matrix side of not set thin-film material, laser is arranged in the laser beam equipment
Beam device can individually be radiated at laser beam on LiNbO_3 film matrix for providing；The pulse power and LiNbO_3 film
Matrix both ends are connected；Thin-film material opposite position to be tested is arranged in the mechanical fatigue test macro.
7. pulse voltage as claimed in claim 6 induces thin-film material mechanical fatigue test device, which is characterized in that described
Electric system further includes compensation resistance, ammeter, voltmeter and conducting wire；
In the electric system, voltmeter is connected by conducting wire with LiNbO_3 film matrix both ends, the pulse power, compensation resistance
It is sequentially connected in series with ammeter, and is connected to LiNbO_3 film matrix both ends.
8. pulse voltage as claimed in claim 6 induces thin-film material mechanical fatigue test device, which is characterized in that described
The pulse voltage that the pulse power provides is 0V~30V.
9. pulse voltage as claimed in claim 6 induces thin-film material mechanical fatigue test device, which is characterized in that described
Mechanical fatigue test macro includes displacement measurement equipment and data receiving area reason display computer, and displacement measurement equipment and data connect
Processing display computer is received to be connected.
10. pulse voltage as claimed in claim 9 induces thin-film material mechanical fatigue test device, which is characterized in that described
Displacement measurement equipment be laser displacement distance measuring sensor.
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| CN201811407261.XA CN109297840B (en) | 2018-11-23 | 2018-11-23 | Method and device for testing mechanical fatigue of pulse voltage induced thin film material |
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|---|---|---|---|
| CN201811407261.XA CN109297840B (en) | 2018-11-23 | 2018-11-23 | Method and device for testing mechanical fatigue of pulse voltage induced thin film material |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109781533A (en) * | 2019-03-19 | 2019-05-21 | 青岛大学 | Anisotropic membrane electrostrictive device for evaluating performance and evaluation method |
| CN112763359A (en) * | 2020-12-30 | 2021-05-07 | 松山湖材料实验室 | Nano-film electrostatic fatigue testing method |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1046420A (en) * | 1989-04-14 | 1990-10-24 | 株式会社村田制作所 | Surface acoustic wave apparatus |
| CN1239603A (en) * | 1997-09-22 | 1999-12-22 | Tdk株式会社 | Surface acoustic wave appts. and method of prodn. thereof |
| CN1578131A (en) * | 2003-07-17 | 2005-02-09 | Tdk株式会社 | Surface acoustic wave element, surface acoustic wave device, surface acoustic wave duplexer, and method of manufacturing surface acoustic wave element |
| CN1963443A (en) * | 2006-12-01 | 2007-05-16 | 北京工业大学 | Endurance testing apparatus of micro-structure crankle based on telescopic theory induced by ultra-magnetism |
| CN101226163A (en) * | 2008-01-22 | 2008-07-23 | 西安交通大学 | Method for measuring metallic film fatigue life on a flexible substrate |
| US20090308172A1 (en) * | 2008-06-17 | 2009-12-17 | Utah State University | Mechanical Properties Testing Device and Method |
| JP2010085139A (en) * | 2008-09-30 | 2010-04-15 | Hitachi Ltd | Thin-film testing device |
| KR20110001476A (en) * | 2009-06-30 | 2011-01-06 | 한국과학기술원 | Apparatus and method for measurement of transverse piezoelectric coefficient of piezoelectric thin films by measurement of quantity of electric charge |
| CN102426192A (en) * | 2011-09-16 | 2012-04-25 | 北京交通大学 | Method of applying Rayleigh waves in non-linear ultrasonic evaluation of surface damage of metal material |
| CN102507362A (en) * | 2011-11-02 | 2012-06-20 | 上海交通大学 | Piezoelectric matrix micro solid mode resonant type explosive detector |
| CN103026607A (en) * | 2010-06-29 | 2013-04-03 | 惠普发展公司，有限责任合伙企业 | Piezoelectric actuator with coplanar electrodes |
| CN104181231A (en) * | 2014-07-07 | 2014-12-03 | 西安交通大学 | Device and method for measuring yield behavior of thin film material |
| CN107024509A (en) * | 2017-05-15 | 2017-08-08 | 中国科学院苏州生物医学工程技术研究所 | A kind of preparation method of blood coagulation test paper and its piezoelectric transducer chip |
| CN107063860A (en) * | 2017-03-31 | 2017-08-18 | 华进半导体封装先导技术研发中心有限公司 | The test system of thin-film material, method of testing, test structure and preparation method thereof |
| CN108299728A (en) * | 2017-01-13 | 2018-07-20 | 中国人民大学 | A kind of flexible piezoelectric sensors and its special piezo-electricity composite material |
-
2018
- 2018-11-23 CN CN201811407261.XA patent/CN109297840B/en active Active
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1046420A (en) * | 1989-04-14 | 1990-10-24 | 株式会社村田制作所 | Surface acoustic wave apparatus |
| CN1239603A (en) * | 1997-09-22 | 1999-12-22 | Tdk株式会社 | Surface acoustic wave appts. and method of prodn. thereof |
| CN1578131A (en) * | 2003-07-17 | 2005-02-09 | Tdk株式会社 | Surface acoustic wave element, surface acoustic wave device, surface acoustic wave duplexer, and method of manufacturing surface acoustic wave element |
| CN1963443A (en) * | 2006-12-01 | 2007-05-16 | 北京工业大学 | Endurance testing apparatus of micro-structure crankle based on telescopic theory induced by ultra-magnetism |
| CN101226163A (en) * | 2008-01-22 | 2008-07-23 | 西安交通大学 | Method for measuring metallic film fatigue life on a flexible substrate |
| US20090308172A1 (en) * | 2008-06-17 | 2009-12-17 | Utah State University | Mechanical Properties Testing Device and Method |
| JP2010085139A (en) * | 2008-09-30 | 2010-04-15 | Hitachi Ltd | Thin-film testing device |
| KR20110001476A (en) * | 2009-06-30 | 2011-01-06 | 한국과학기술원 | Apparatus and method for measurement of transverse piezoelectric coefficient of piezoelectric thin films by measurement of quantity of electric charge |
| CN103026607A (en) * | 2010-06-29 | 2013-04-03 | 惠普发展公司，有限责任合伙企业 | Piezoelectric actuator with coplanar electrodes |
| CN102426192A (en) * | 2011-09-16 | 2012-04-25 | 北京交通大学 | Method of applying Rayleigh waves in non-linear ultrasonic evaluation of surface damage of metal material |
| CN102507362A (en) * | 2011-11-02 | 2012-06-20 | 上海交通大学 | Piezoelectric matrix micro solid mode resonant type explosive detector |
| CN104181231A (en) * | 2014-07-07 | 2014-12-03 | 西安交通大学 | Device and method for measuring yield behavior of thin film material |
| CN108299728A (en) * | 2017-01-13 | 2018-07-20 | 中国人民大学 | A kind of flexible piezoelectric sensors and its special piezo-electricity composite material |
| CN107063860A (en) * | 2017-03-31 | 2017-08-18 | 华进半导体封装先导技术研发中心有限公司 | The test system of thin-film material, method of testing, test structure and preparation method thereof |
| CN107024509A (en) * | 2017-05-15 | 2017-08-08 | 中国科学院苏州生物医学工程技术研究所 | A kind of preparation method of blood coagulation test paper and its piezoelectric transducer chip |
Non-Patent Citations (1)
| Title |
|---|
| 陈友华 等: "基于铌酸锂压电弹光双效应的单晶体弹光调制器", 《光学学报》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109781533A (en) * | 2019-03-19 | 2019-05-21 | 青岛大学 | Anisotropic membrane electrostrictive device for evaluating performance and evaluation method |
| CN112763359A (en) * | 2020-12-30 | 2021-05-07 | 松山湖材料实验室 | Nano-film electrostatic fatigue testing method |
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