CN1092871A - A kind of method of manufacturing multifunctional integrated binary diffraction phase element - Google Patents

Abstract

The present invention relates to a kind of method for production of optical phase element, particularly relate to the method field of manufacturing multifunctional integrated binary diffraction phase element.The present invention is generalized in the arbitrary linear transformation system for the diffraction phase element that only limits to Fu Li leaf optical transform system and relevant iterative algorithm is manufactured, widen the combination ability and the associated optical system type of different optical element function, change traditional Fu Li blade profile lens, prism function integrated framework, thereby amplitude in any linear transform optical system of a kind of suitable solution-phase bit recovery theory problem and effective iterative algorithm are provided.

Description

A kind of method of manufacturing multifunctional integrated binary diffraction phase element

The present invention relates to a kind of method for production of optical phase element, particularly relate to the method field of manufacturing multifunctional integrated binary diffraction phase element.

Binary diffractive optical element is to be foundation with the theory of light diffraction, adopts optical wave-front design and microelectronic technique process technology comprehensively to develop, and is the novel optical technology of the nineties.It facilitates this ancient subject of optics by the dioptrics diffraction optics of marching toward, and optical element is by macroscopic view, and loose mail is to miniature, high integration development.Binary diffractive optical element mainly is divided into two kinds of phase-type and amplitude types, because optical imaging system is made every effort to low diffraction loss so that utilize light intensity as far as possible, so diffraction phase-type optical element has more the value in the practicality.

As list of references:

Masasu Kato and Kyohei Sakuda，“Compnter-generated holograms：application To lutensity Variable and wavelength demultiplexing holograms”

Appl.Opt.vol31 630-635（1992）

（2）Michael.Bernhardt，Frank Wyrowski and Olof Byngdahl，“Iterative technique to integrate different optical functions in a diffractive phase element”

Appl.opt.Vol 30 4629-4635（1991）

（3）Frank Wyrouski，“Diffractive Optical elements：iterative calculation，of vuantized，blazed phase structure”

J.Opt.SoC.Am.A vol7 961-908（1990）

（4）J.w.Goodman and A.M.Siluektri，

“Some effect of Fourier-domain phase quantization”

IBM.J，RES.DEV，vol14，478-484（1970）

The Computer Design of the existing binary diffraction phase part (DPE) of introducing mainly relies on the seventies to introduce traditional Fourier Tranform and the relevant iterative algorithm of digitlization holography, namely by the transformation relation between thing territory and the frequency domain, from the additional restrictive condition with thing territory and frequency domain space of physically consideration, thereby realize relevant iterative algorithm. Relate to coding and correlative value quantification technique in the design, coding be with input signal processing make its in the frequency domain space amplitude information approx major part change into phase information, quantize the Direct Uniforms that adopt more and quantize, namely agretope can only be got even graduate discrete value in [π, π] mutually.

Diffraction phase-type element design based on this kind algorithm is confined to Fu Li leaf optical transform space more, and the optical element combination of Fourier Tranform type has limited optical element design category in the practical application.Owing to relate to the conversion and the complicated cataloged procedure in thing territory and frequency domain space, thereby coding and quantization error have been introduced, though can make noise and Signal Separation by conditioning signal position deviation optical axis, but near optical axis, noise and signal are difficult to separate, make that adopting simple phase place directly to quantize the formality meeting brings bigger error, thereby require more complicated quantification technique.

What above-mentioned binary diffraction phase element method for production of the prior art was mainly manufactured is the diffraction phase element that only is applicable to Fu Li leaf linear transformation optical system, and can not be applied in the arbitrary linear transform optical system, therefore, significant limitation is arranged.In addition, existingly manufacture the principle of phase element and Fourier Tranform that technology mainly adopts and iterative algorithm and carry out Fu Li blade profile optical element combination, therefore the phase element kind that can manufacture few, the optical element integration capability is very low.Secondly the making of optical element will be referred to noise error that complicated transcoding, coding transform between frequency domain and the thing territory and quantizing process and cataloged procedure introduce and makes and be difficult near optical axis realize that signal and noise effectively separate in Fu Li blade profile optical system.

The objective of the invention is to overcome the shortcoming and defect of above-mentioned prior art, for the diffraction phase part method for production that only limited to Fu Li leaf optical transform system and relevant iterative algorithm is generalized in the arbitrary linear transformation system in the past, the combination ability and the associated optical system type of different optical element function have been widened, change traditional Fu Li blade profile lens, the framework that the prism function is integrated, thereby provide a kind of theory and effective iterative algorithm of handling amplitude one-phase bit recovery in any linear transform optical system that be applicable to, and work out universal program and utilize holography and photoetching, microelectric technique is manufactured multifunctional integrated binary diffraction phase element.

General conversion of optics and one of amplitude that the present invention utilizes poplar one to turn round and look at and proposes recover general theory and relevant iterative algorithm mutually, be applied in the linear optical system under the illumination of multi-wavelength mixed light, strictly derive one group of system of equations that phase place and distribution of amplitudes satisfied and effective iterative algorithm of finding the solution these equations theoretically, compile out simultaneously the executive program of manufacturing diffraction phase element, carry out Computer Design again.Make corresponding binary diffraction phase element with holography and photoetching technique then.

Below in conjunction with embodiment and accompanying drawing, table the present invention is specifically described:

Fig. 1 finally is implemented in the synoptic diagram that the light of different wave length on the same focal plane spatially separates fully by binary diffractive optical element modulation in the dual wavelength mixed light uniform illumination system.

Table 1 is the PHASE DISTRIBUTION of phase element during diffraction phase part that multi-wavelength mixed light uniform illumination system can be implemented in same focal plane apart focusing function is manufactured and relative production design data (locational space sample point be 8 and the mixed light illumination of 8 kind of wavelength).

φ i represents the initial PHASE DISTRIBUTION of choosing on the input plane in the iterative algorithm, φ in the table 1 ₁Be the PHASE DISTRIBUTION of the phase element of required making, ρ ₂Gathering is separated in order to actual fabrication in the distribution of amplitudes implementation space that is the predefined different wavelengths of light in the output face, calculates ρ ₂Table is listed in the amplitude announcement, and last lists, for contrast.By the table in as seen, the ρ distribution situation that calculates reaches the desired design target fully, is realizing in the output face that 8 kinds of different wavelength light focus on 8 different spatial point.The light of all wavelength separates the order that focuses on the same focal plane and can be provided with arbitrarily, can be different from the nature preface.

The concrete steps of the inventive method are as follows:

1, at first on the general phase place one amplitude reconstruct theoretical foundation of the optics that Yang Guozhen, Gu Benyuan propose at the linear optical system of multi-wavelength incoherent light illumination, carry out concrete theoretical derivation, the iterative algorithm that obtains determining the Simultaneous Equations of amplitude and PHASE DISTRIBUTION and find the solution them.

The transition function of linear transformation system is G

Complex wave function is on the input plane $U_{}$ ${}_1=\underset{a}{\mathrm{\Σ}}{U}_{1a}$

And wave function is on the output plane

Be expression GU ₁With U ₂Degree of closeness is introduced near distance D ²(ρ _{1 α}, φ _{1 α}; ρ _{2 α}, φ _{2 α})

With ρ _{1 γ}, φ _{1 γ}, ρ _{2 γ}, φ _{2 γ}As independent variable to D ²Carry out functional variation,

Be δ _{ρ 1 γ}D ²=0, δ _{φ 1 γ}D ²=0, δ _{ρ 2 γ}D ²=0, δ _{φ 2 γ}D ²=0,

And the different wavelengths of light wave function realized the time is averaged, obtain at last making near distance D, require relevant ρ when minimum _{1 γ}

φ _{1 γ}, ρ _{2 γ}, φ _{2 γ}The Simultaneous Equations that must satisfy:

This

The diffraction phase element design is summed up as the distribution ρ of amplitude wave on known input plane and the output plane ₁ρ ₂Seek to be close to the position phase distribution phi that gets position photo on the input plane back plane ₁, the main iterative formula in being applied to design is

2, utilize the formula of definite amplitude one PHASE DISTRIBUTION that is derived, and in conjunction with effective iterative algorithm, establishment general calculation machine executive routine is realized relevant design.

3, utilize existing holography and photoetching technique by the quantification of design after PHASE DISTRIBUTION make diffraction phase element, and it is arranged in the relevant system, obtain conforming to the design of requirement

With the multi-wavelength mixing light wave in the optical system of evenly throwing light on, the apart of the light wave of realization different wave length also focuses in the same output face, form all different focus points of color-separated, and the locus of the focus point of different wavelengths of light and intensity can be provided with arbitrarily.Be that multi-wavelength light incides in the system through diffraction phase element demodulation and can be implemented in and form each single track light focused spot that various wavelength light apart are arranged on the same focal plane in brief.

This phase element design essence is the combination that has substituted prism and various lens, and chromatic dispersion and focusing function are rolled into one.Outstanding advantage is that designed diffraction optics phase element does not rely on incident wavelength, at output terminal optical dispersion order serialization arbitrarily, can carry out the coding of various wavelength and arrange, so have the common design meaning.

The method of manufacturing multifunctional integrated binary diffraction phase element of the present invention can realize the manufacturing of binary diffraction phase element in any linear optical system, Fourier Tranform space and the integrated restriction of Fu Li blade profile optical element have in the past been broken through, improved the phase element functional integration, widened phase element design kind, the general-purpose computations program of being worked out is correctly practical, simultaneously can utilize existing holography, photoetching and microelectronic technique process technology are processed designed phase element, it can be inserted in the relevant linear transformation optical system neatly.Use method of the present invention, can produce various binary diffraction phase element in fields such as being applicable to integrated optics, optical fiber communication, optical computer and neural network and mathematics image processing.

Claims (1)

1, a kind of method of manufacturing multifunctional integrated binary diffraction phase element, it is characterized in that: general conversion of optics and one of amplitude are recovered theoretical and relevant iterative algorithm mutually, be applied in the linear optical system of multi-wavelength mixed light illumination, work out out the executive program of design diffraction phase element, and the realization Computer Design is finally made corresponding binary diffraction phase element with holography or photoetching technique.

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