CN109286809A - A kind of full pixelated array receptance function measurement method of imaging sensor - Google Patents
A kind of full pixelated array receptance function measurement method of imaging sensor Download PDFInfo
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Abstract
The invention discloses a kind of methods of the full pixelated array receptance function measurement of imaging sensor, which comprises step 1) obtains the difference of amplitude and argument of the pixel response spectrum of function of each pixel of the full array of imaging sensor in the frequency range of setting at each frequency；Step 2) measures the pixel response function of first, the full array upper left corner of imaging sensor pixel with the direct method of measurement；Discrete Fourier transform is carried out to the pixel response function, obtains the phase frequency spectrum of the pixel response function；The amplitude of the pixel response frequency spectrum of each pixel obtained in phase frequency spectrum and step 1) of the step 3) using first, the upper left corner pixel in step 2) and the difference of argument, are calculated the pixel response function of each pixel of the full array of imaging sensor.Method of the invention has the advantages that calibration is fireballing, can be applied to Practical Project, and can demarcate simultaneously to the receptance function of all pixels of multiple detector arrays, quickly obtains the pixel response function in spatial domain.
Description
Technical field
The present invention relates to astronomy and fields of space technology more particularly to a kind of full pixelated array of imaging sensor to respond letter
The method of number measurement.
Background technique
Imaging sensor (CCD, CMOS etc.) due to its convenient for digitlization storage, transmission and processing the advantages of, optics at
Dominant position is occupied as field has been substituted film.With the development of super large-scale integration technique, imaging sensor
The technical indicators such as resolution ratio, sensitivity, quantum efficiency, which have, to be substantially improved, and astronomical imaging, spectrum, celestial body have been widely used in
The fields such as measurement, space technology.
It is many that imaging sensor is inputted between light distribution and output distribution in order to improve the precision of respective measurement system
The methods and techniques that relationship is demarcated are proposed out.But the minimum unit that these methods consider is 1 pixel, also
Assume that different location is identical to the response of light inside a pixel.But in fact, due to photoetching process and adjacent pixel
Interference the problems such as, the quantum efficiency (i.e. pixel response function) of different location is different in pixel, in many cases not
This problem can be ignored.Especially in the application such as uranometry and astronomical photometric measurement, institute at image be mostly it is down-sampled or
Threshold sampling image, measurement result can be produced a very large impact by ignoring pixel internal response inhomogeneities.
The method of traditional measurement pixel response function is mainly the direct method of measurement.This method generates one with optical system
The focal beam spot of a very little is scanned the different location of each pixel, so that it may obtain the pixel response letter of each pixel
Number.The advantages of this method is that comparison is direct, largely effective to the property for understanding single pixel response；The disadvantage is that this method needs
Point by point scanning is carried out to each pixel, heavy workload is quite time-consuming, may not apply to Practical Project.In recent years, some in frequency domain
The method of space calibration pixel response function is suggested, and such methods are generated using heterodyne laser interference device has frequency difference
Two beam laser, so that dynamic interference fringe is formed in detector surface, it can be to detector by the processing to stripe pattern
Pixel response frequency domain characteristic carries out inverting, as shown in Figure 1.The advantages of such methods is to all pixels while can to mark
Fixed, speed is fast, the disadvantage is that obtained calibration result cannot be transformed into spatial domain, using there is significant limitations.
Summary of the invention
It is an object of the invention to overcome the limitation of conventional pixel receptance function scaling method, provide it is a kind of high-efficient,
It can be applied to Practical Project, the method demarcated to the pixel response function of the full array of imaging sensor.
To achieve the goals above, the present invention, which provides, has carried out a kind of full pixelated array receptance function measurement of imaging sensor
Method, which comprises
Step 1) obtains the pixel response function frequency of each pixel of the full array of imaging sensor on several setpoint frequencies
The amplitude of spectrum and the difference of argument；
Step 2) measures the full array upper left of imaging sensor on setpoint frequency identical with step 1), with the direct method of measurement
The pixel response function of first, angle pixel；Discrete Fourier transform is carried out to the pixel response function, obtains the pixel response
The phase frequency spectrum of function；
Step 3) using each pixel obtained in step 1) the amplitude of pixel response frequency spectrum and the difference of argument and step
It is rapid 2) in first pixel in the upper left corner phase frequency spectrum, the pixel response of each pixel of the full array of imaging sensor is calculated
Function.
As a kind of improvement of the above method, the cross stream component k of the setpoint frequencyxWith longitudinal component kyValue are as follows:M is the resolution ratio of pixel respective function, the value model of M
Enclose is 15~30.
As a kind of improvement of the above method, the step 1) is specifically included:
Step 1-1) it is demarcated using flat field Non-uniform responsivity of the integrating sphere to imaging sensor, calibration result is denoted as
qmn, indicate the flat field Non-uniform responsivity of (m, n) pixel；
Step 1-2) utilize the method for difference frequency laser beam interference to generate dynamic interference fringe in image sensor surface, then
Two fiber exit ports for generating difference frequency laser beam are individually blocked, the multiple image of imaging sensor acquisition are carried out flat
Obtain two width optical field distribution image I when two optical fiber are emitted respectively in image sensor planeMn, 1And IMn, 2；To light field point
Cloth image is pre-processed, and is subtracted darkfield image and is deducted dark noise and background noise, the light field point after finally being pre-processed
Then cloth image blocks two fiber exit port processings, one group of image simultaneously and carries out multi-frame mean one width darkfield image of acquisition；
Step 1-3) under step 1-2) the same terms, imaging sensor is exposed whithin a period of time with fixing frame frequency
Then one group of dynamic interference fringe image of light collection is pre-processed with the darkfield image that step 1-2) is obtained, secretly made an uproar with deducting
Sound and background noise obtain the dynamic interference fringe image after one group of pretreatment；
Step 1-4) utilize step 1-1) in obtain flat field Non-uniform responsivity, step 1-2) in obtain pretreatment it
Two width optical field distribution images and step 1-3 afterwards) in obtain pretreated dynamic interference fringe image, obtain a setting
The amplitude of the pixel response spectrum of function of each pixel of imaging sensor in frequency, and the package in each pixel of synchronization
Phase；
Step 1-5) using the wrapped phase of the obtained each pixel of synchronization in step 1-4), in conjunction with dynamic interference
The moving direction of striped and the fringe spacing of dynamic interference fringe carry out unpacking to phase, obtain the unpacking of each pixel
Wrap up in phase；
Step 1-6) using the Phase Unwrapping Algorithm of each pixel obtained in step 1-5), calculate the upper figure of the setpoint frequency
As the difference of the argument of the pixel response spectrum of function of each pixel of sensor
Step 1-7) dynamic interference fringe tendency is adjusted by changing the relative positional relationship between two optical fiber and is moved
State interference fringe spacing repeats step 1-2) arrive 1-6), until covering all setpoint frequencies；It finally obtains every on setpoint frequency
The amplitude of the pixel response spectrum of function of a pixel and the difference of argument.
As a kind of improvement of the above method, the step 1-2) dynamic interference fringe contrast be greater than 0.7；It is described
Dynamic interference fringe meets following relationship in the rate travel v, frame frequency f and Pixel Dimensions a of image sensor surface:
As a kind of improvement of the above method, the step 1-4) one setpoint frequency of acquisition on imaging sensor it is each
The calculating process of the amplitude of the pixel response spectrum of function of pixel are as follows:
Utilize the flat field Non-uniform responsivity q obtained in step 1-1)mn, step 1-2) in obtain pretreatment after acquire
Two width optical field distribution image IMn, 1、IMn, 2And pixel exports sinusoidal amplitude Vmn, calculate the response letter of each pixel
Several frequency spectrums is in setpoint frequency (kx, ky) at amplitude
As a kind of improvement of the above method, the step 1-5) it specifically includes:
Step 1-5-1) according to the distance between two optical fiber baselines and the distance between optical fiber and imaging sensor, it calculates
The estimated value of the transverse component and longitudinal component of interference fringe wave vectorWith
Wherein, dx、dyFor the lateral distance and fore-and-aft distance of two fiber exit ports, λ is optical maser wavelength, L be optical fiber with
The distance between sensor；
Step 1-5-2) to the wrapped phase of step 1-4)Unpacking is carried out, Phase Unwrapping Algorithm is calculated
The Phase Unwrapping Algorithm of (if 1,1) pixelIt is equal with wrapped phase, i.e.,For (1,1) pixel
Adjacent pixel (1,2) pixel, according to the difference of the striped direction of propagation,WithMeet OrIn conjunction with wrapped phase and Phase Unwrapping Algorithm
RelationshipWherein m, n are integer, find out the Phase Unwrapping Algorithm of (1,2) pixelPass through above-mentioned side
Formula finds out the Phase Unwrapping Algorithm of all pixels.
As a kind of improvement of the above method, the step 1-6) it specifically includes:
Step 1-6-1) according to the Phase Unwrapping Algorithm of the obtained each pixel of step 1-5)It is carried out most according to formula (6)
Small two multiply fitting, obtain the actual value of the transverse component and longitudinal component of dynamic interference fringe wave vector
Wherein,It is phase initial value；
Step 1-6-2) calculate pixel response spectrum of function argument difference
As a kind of improvement of the above method, the step 3) is specifically included:
Step 3-1) the pixel response spectrum of function of each pixel of image sensor array is calculated in (kx, ky) at frequency
Argument
Wherein,For the picture of first pixel in the upper left corner of the full array of imaging sensor of step 2)
The phase frequency spectrum of plain receptance function；
Step 3-2) combine step 1-4) obtained in each pixel receptance function frequency spectrum amplitude
Obtain the receptance function frequency spectrum of each pixel
Step 3-3) to the receptance function frequency spectrum of each pixelDiscrete inverse Fourier transform is carried out, is obtained every
The pixel response function Q of a pixelmn(x, y).
The present invention has the advantages that
Method of the invention has the advantages that calibration is fireballing, can be applied to Practical Project, and can be simultaneously to multiple spies
The receptance function for surveying all pixels of device array is demarcated, and the pixel response function in spatial domain is quickly obtained.
Detailed description of the invention
Fig. 1 is heterodyne laser interference device calibration schematic diagram；
Fig. 2 is the flow chart of the full pixelated array receptance function measurement method of imaging sensor of the invention.
Specific embodiment
Now in conjunction with attached drawing, the invention will be further described.
The direct method of measurement in the prior art carries out point by point scanning to each pixel, and heavy workload is quite time-consuming, Bu Nengying
For Practical Project.
The present invention fully considers the direct method of measurement in the prior art and frequency domain scaling method measurement image sensor pixel
The limitation of receptance function connects the direct method of measurement and frequency domain scaling method, proposes that one kind can be to imaging sensor
The method that the pixel response function of full array measures.
With reference to Fig. 2, a kind of full pixelated array receptance function measurement method of imaging sensor provided by the invention includes following
Step:
Step 1) is demarcated using flat field Non-uniform responsivity of the integrating sphere to imaging sensor.
Step 2) generates dynamic interference fringe in image sensor surface using the method for difference frequency laser beam interference, then
Two fiber exit ports for generating difference frequency laser beam are individually blocked, it is flat that imaging sensor acquires multiple image progress multiframe
Obtain optical field distribution image when two optical fiber are emitted respectively in image sensor plane.Then two optical fiber are blocked simultaneously to go out
It penetrates one group of image of port processing and carries out multi-frame mean one width darkfield image of acquisition.Optical field distribution image is pre-processed, is subtracted
Darkfield image deducts dark noise and background noise, the optical field distribution image after finally being pre-processed.
Step 3), under step 2) the same terms, imaging sensor is exposed whithin a period of time with fixing frame frequency
Acquire one group of dynamic interference fringe image, then with step 2) obtain darkfield image pre-processed, with deduct dark noise and
Background noise obtains the dynamic interference fringe image after one group of pretreatment.
It is adopted after step 4), the pretreatment using the flat field Non-uniform responsivity, the middle acquisition of step 2) that are obtained in step 1)
The dynamic interference fringe image acquired in the optical field distribution image and step 3) of collection, can obtain imaging sensor after treatment
The package phase of amplitude of all pixels receptance function frequency spectrum at the spatial frequency and all pixels output valve in synchronization
Position.
Step 5), using the wrapped phase of synchronization all pixels obtained in step 4), in conjunction with dynamic interference item
The moving direction of line and the fringe spacing of interference fringe carry out unpacking to phase, obtain the unpacking of all pixels output
Phase.
Step 6), using Phase Unwrapping Algorithm obtained in step 5), the pixel of each pixel of imaging sensor can be found out
The difference of argument of the receptance function frequency spectrum at the spatial frequency.
Step 7) adjusts striped tendency and fringe spacing, weight by changing the relative positional relationship between two optical fiber
Multiple step 2) is to 6), until the frequency range of covering setting.The pixel response spectrum of function that may finally obtain each pixel exists
The difference of amplitude and argument in the frequency range of setting at each frequency.
Step 8), the pixel response function that first, upper left corner pixel is measured with the direct method of measurement.
Step 9) carries out discrete fourier to the pixel response function of first, the upper left corner measured in step 8) pixel
Transformation, obtains the phase frequency spectrum of the pixel response function.
It is each obtained in step 10), phase frequency spectrum and step 7 using first, the upper left corner pixel in step 9)
The amplitude of the pixel response frequency spectrum of pixel and the difference of argument, acquire the pixel response function of each pixel.
Each step in the method for the present invention is described further below.
In step 1), calibration result is denoted as qmn, i.e. the flat field Non-uniform responsivity of (m, n) pixel.
In step 2), the contrast of the dynamic interference fringe should be greater than 0.7；The dynamic interference fringe is passed in image
Rate travel v, frame frequency f and the Pixel Dimensions a of sensor surfaces, should meet following relationship:
In step 2), the optical field distribution image after the two width pretreatment of acquisition is denoted as I respectivelyMn, 1And IMn, 2, IMn, 1It is
The output valve of (m, n) pixel, I in the case where first optical fiber individually irradiatesMn, 2It is in the case where second optical fiber individually irradiates (m, n)
The output valve of pixel.
In step 3), under dynamic interference fringe irradiation, shown in the expression formula such as following formula (2) of sensor pixel output:
Wherein gmn(t) be t moment (m, n) pixel output valve, kx、kyThe respectively transverse direction of interference fringe wave vector and vertical
To component,For the pixel response function Q of (m, n) pixelmnThe Fourier transformation of (x, y), that is, pixel response
The frequency domain representation of function, Δ ω are the frequency difference of two optical fiber outputs.
In step 4), according to formula (2), the output of any pixel changes with time in sine on imaging sensor
Curve distribution, therefore it is sinusoidal to acquire any pixel (m, n) output with least square fitting method to dynamic interference fringe image
The amplitude V of curvemnAnd wrapped phase
In step 4), according to formula (2), the flat field Non-uniform responsivity q obtained in step 1) is utilizedmn, in step 2)
The optical field distribution image I acquired after the pretreatment of acquisitionMn, 1、IMn, 2And pixel exports sinusoidal amplitude Vmn, can be with
The frequency spectrum of the receptance function of each pixel is acquired in (kx, ky) amplitude at frequencyCalculation formula is as follows:
In step 5), according to the distance between two optical fiber baselines and the distance between optical fiber and sensor, to dynamic
Interference fringe wave vector estimated, specific calculation formula such as following formula (4) (5):
Wherein,The respectively estimated value of the horizontal and vertical component of dynamic interference fringe wave vector, dx、dyIt is two
The lateral distance and fore-and-aft distance of root fiber exit port, λ are optical maser wavelength, and L is the distance between optical fiber and sensor.
In step 5), to wrapped phaseIt carries out unpacking and solves wrapped phasePrinciple it is as follows.
The Phase Unwrapping Algorithm of (1,1) pixel might as well be setIt is equal with wrapped phase, i.e.,For (1,1) as
Adjacent pixel (1,2) pixel of element, according to the difference of the striped direction of propagation,WithMeet OrIn conjunction with wrapped phase and unpacking
The relationship of phaseWherein n is integer, can be found outBy the above-mentioned means, institute can be found out
There is the Phase Unwrapping Algorithm of pixel.
In step 6), due to different pixelsIt is smaller, and variation be it is relatively independent random,
Therefore we can temporarily ignore their influences to phase, then the Phase Unwrapping Algorithm of pixel is by following according to formula (2)
Formula determines:
WhereinIt is phase initial value,The respectively cross stream component of dynamic interference fringe wave vector and longitudinal direction point
The actual value of amount.
Least square fitting is carried out according to formula (6) using the Phase Unwrapping Algorithm that step 5) obtains, obtains dynamic interference item
The actual value of the transverse component and longitudinal component of ripple vector
Utilize (6) can obtain:
WhereinIt is the pixel response spectrum of function of (m, n) pixel and (1,1) pixel in (kx,
ky) argument at frequency difference.
In step 7), the frequency range of setting influences the measurement accuracy of final pixel receptance function, and wants
With later step 8) in be consistent.In view of actual conditions, kx, kyValue range can be The selection of M determines the resolution ratio of gained pixel response function, generally takes 15~30.
In step 7), the amplitude of the receptance function frequency spectrum of each pixel is finally obtainedWith the difference of argumentIn the frequency range of setting
The value at place.
In step 8), the specific practice of the receptance function of the direct method of measurement measurement single pixel is: using optical system
System forms the other focal beam spot of submicron order, allows focal beam spot in image sensor surface centainly to walk using high precision position moving stage
The long pixel response for carrying out each position of scanning survey, scanning range cover 3 × 3 pixels around selected pixel.Each side
To scanning step number be 2M, step-length 1.5a/M, then obtain the pixel response of 2M × 2M position altogether.
In step 9), carry out the phase frequency spectrum that acquires of discrete Fourier transform be also it is discrete, be
?The argument value at place.
In step 10), the pixel response function phase frequency spectrum and step 7) of (1, the 1) pixel obtained using step 9) are obtained
The difference of the argument of the pixel response spectrum of function of each pixel arrived, the pixel response spectrum of function of available each pixel
Argument, i.e.,Calculation method sees below formula (8):
In conjunction with the amplitude of the receptance function frequency spectrum of each pixel obtained in step 7)It obtains each
The receptance function frequency spectrum of pixel? Place
Value, calculation method sees below formula (9).
Discrete inverse Fourier transform finally is carried out to the receptance function frequency spectrum of each pixel, so that it may obtain each pixel
Pixel response function Qmn(x, y).
It should be noted last that the above examples are only used to illustrate the technical scheme of the present invention and are not limiting.Although ginseng
It is described the invention in detail according to embodiment, those skilled in the art should understand that, to technical side of the invention
Case is modified or replaced equivalently, and without departure from the spirit and scope of technical solution of the present invention, should all be covered in the present invention
Scope of the claims in.
Claims (8)
1. a kind of method of the full pixelated array receptance function measurement of imaging sensor, which comprises
Step 1) obtains the pixel response spectrum of function of each pixel of the full array of imaging sensor on several setpoint frequencies
The difference of amplitude and argument；
Step 2) measures the full array upper left corner of imaging sensor on setpoint frequency identical with step 1), with the direct method of measurement
The pixel response function of one pixel；Discrete Fourier transform is carried out to the pixel response function, obtains the pixel response function
Phase frequency spectrum；
Step 3) utilizes the amplitude of the pixel response frequency spectrum of each pixel obtained in step 1) and the difference and step 2) of argument
In first pixel in the upper left corner phase frequency spectrum, the pixel response letter of each pixel of the full array of imaging sensor is calculated
Number.
2. the method for the full pixelated array receptance function measurement of imaging sensor according to claim 1, which is characterized in that described
The cross stream component k of setpoint frequencyxWith longitudinal component kyValue are as follows:
M is the resolution ratio of pixel respective function, and the value range of M is 15~30.
3. the method for the full pixelated array receptance function measurement of imaging sensor according to claim 2, which is characterized in that institute
Step 1) is stated to specifically include:
Step 1-1) it is demarcated using flat field Non-uniform responsivity of the integrating sphere to imaging sensor, calibration result is denoted as qmn,
Indicate the flat field Non-uniform responsivity of (m, n) pixel；
Step 1-2) utilize the method for difference frequency laser beam interference to generate dynamic interference fringe in image sensor surface, then distinguish
Two fiber exit ports for generating difference frequency laser beam are individually blocked, the multiple image of imaging sensor acquisition is averagely obtained
Obtain two width optical field distribution image I when two optical fiber are emitted respectively in image sensor planemn,1And Imn,2；To optical field distribution figure
As being pre-processed, subtracts darkfield image and deduct dark noise and background noise, the optical field distribution figure after finally being pre-processed
Then picture blocks two fiber exit port processings, one group of image simultaneously and carries out multi-frame mean one width darkfield image of acquisition；
Step 1-3) under step 1-2) the same terms, imaging sensor is exposed with to fix frame frequency adopts whithin a period of time
Collect one group of dynamic interference fringe image, then with step 1-2) obtain darkfield image pre-processed, with deduct dark noise and
Background noise obtains the dynamic interference fringe image after one group of pretreatment；
Step 1-4) utilize step 1-1) in obtain flat field Non-uniform responsivity, step 1-2) in obtain pretreatment after
Two width optical field distribution images and step 1-3) in obtain pretreated dynamic interference fringe image, obtain a setpoint frequency
The amplitude of the pixel response spectrum of function of the upper each pixel of imaging sensor, and the package phase in each pixel of synchronization
Position；
Step 1-5) using the wrapped phase of the obtained each pixel of synchronization in step 1-4), in conjunction with dynamic interference fringe
Moving direction and dynamic interference fringe fringe spacing, to phase carry out unpacking, obtain the unpacking phase of each pixel
Position；
Step 1-6) using the Phase Unwrapping Algorithm of each pixel obtained in step 1-5), it calculates image on the setpoint frequency and passes
The difference of the argument of the pixel response spectrum of function of each pixel of sensor
Step 1-7) dynamic interference fringe tendency is adjusted by changing the relative positional relationship between two optical fiber and is dynamically done
Fringe spacing is related to, step 1-2 is repeated) arrive 1-6), until covering all setpoint frequencies；Finally obtain each picture on setpoint frequency
The amplitude of the pixel response spectrum of function of element and the difference of argument.
4. the method for the full pixelated array receptance function measurement of imaging sensor according to claim 3, which is characterized in that institute
State step 1-2) dynamic interference fringe contrast be greater than 0.7；Shifting of the dynamic interference fringe in image sensor surface
Dynamic rate v, frame frequency f and Pixel Dimensions a, meet following relationship:
5. the method for the full pixelated array receptance function measurement of imaging sensor according to claim 4, which is characterized in that institute
State step 1-4) one setpoint frequency of acquisition on each pixel of imaging sensor pixel response spectrum of function amplitude meter
Calculation process are as follows:
Utilize the flat field Non-uniform responsivity q obtained in step 1-1)mn, step 1-2) in obtain pretreatment after acquire two
Width optical field distribution image Imn,1、Imn,2And pixel exports sinusoidal amplitude Vmn, calculate the receptance function of each pixel
Frequency spectrum is in setpoint frequency (kx,ky) at amplitude
6. the method for the full pixelated array receptance function measurement of imaging sensor according to claim 5, which is characterized in that institute
State step 1-5) it specifically includes:
Step 1-5-1) according to the distance between two optical fiber baselines and the distance between optical fiber and imaging sensor, calculate interference
The estimated value of the transverse component and longitudinal component of striped wave vectorWith
Wherein, dx、dyFor the lateral distance and fore-and-aft distance of two fiber exit ports, λ is optical maser wavelength, and L is optical fiber and sensing
The distance between device；
Step 1-5-2) to the wrapped phase of step 1-4)Unpacking is carried out, Phase Unwrapping Algorithm is calculated
If (1,1) Phase Unwrapping Algorithm of pixelIt is equal with wrapped phase, i.e.,For the adjacent pixel of (1,1) pixel
(1,2) pixel, according to the difference of the striped direction of propagation,WithMeet
OrIn conjunction with the relationship of wrapped phase and Phase Unwrapping Algorithm
Wherein m, n are integer, find out the Phase Unwrapping Algorithm of (1,2) pixelBy the above-mentioned means, finding out the unpacking of all pixels
Phase.
7. the method for the full pixelated array receptance function measurement of imaging sensor according to claim 6, which is characterized in that institute
State step 1-6) it specifically includes:
Step 1-6-1) according to the Phase Unwrapping Algorithm of the obtained each pixel of step 1-5)Minimum two is carried out according to formula (6)
Multiply fitting, obtains the actual value of the transverse component and longitudinal component of dynamic interference fringe wave vector
Wherein,It is phase initial value；
Step 1-6-2) calculate pixel response spectrum of function argument difference
8. the method for the full pixelated array receptance function measurement of imaging sensor according to claim 7, which is characterized in that institute
Step 3) is stated to specifically include:
Step 3-1) the pixel response spectrum of function of each pixel of image sensor array is calculated in (kx,ky) argument at frequency
Wherein,Pixel for first, the upper left corner pixel of the full array of imaging sensor of step 2) is rung
Answer the phase frequency spectrum of function；
Step 3-2) combine step 1-4) obtained in each pixel receptance function frequency spectrum amplitudeIt obtains
The receptance function frequency spectrum of each pixel
Step 3-3) to the receptance function frequency spectrum of each pixelDiscrete inverse Fourier transform is carried out, each picture is obtained
The pixel response function Q of elementmn(x,y)。
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| CN106770020A (en) * | 2016-11-24 | 2017-05-31 | 中国科学院国家空间科学中心 | A kind of system for the measurement of image sensor pixel internal quantum efficiency |
| CN106644107A (en) * | 2016-12-22 | 2017-05-10 | 中国科学院光电研究院 | Device and method for measuring spatial coherence length of laser beams |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112504631A (en) * | 2020-10-29 | 2021-03-16 | 北京控制工程研究所 | Method and system for measuring response change in detector pixel |
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