CN109270126A - A kind of high sensor and preparation method thereof - Google Patents
A kind of high sensor and preparation method thereof Download PDFInfo
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- CN109270126A CN109270126A CN201810986430.3A CN201810986430A CN109270126A CN 109270126 A CN109270126 A CN 109270126A CN 201810986430 A CN201810986430 A CN 201810986430A CN 109270126 A CN109270126 A CN 109270126A
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- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
- G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles
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Abstract
The present invention discloses a kind of high sensor and preparation method thereof, wherein the method includes the steps: columnar arrays carbon nano-tube film is prepared in sintered body substrate surface；Gas sensitive, which is coated in surface growth, to be had on the sintered body substrate of columnar arrays carbon nano-tube film, is sintered, is obtained air-sensitive sintered body；Heater strip is put into the air-sensitive sintered body, welded, encapsulated, voltage ageing according to heater-type device common process, high sensor is made.The present invention not only increases the specific surface area of sintered body substrate, to increase gas sensitive coated in the amount on sintered body substrate unit area by preparing columnar arrays carbon nano-tube film on sintered body substrate surface；Further, the carbon nanotube itself with preferable air-sensitive performance can also act synergistically with the gas sensitive for being coated in its surface, to effectively promote the sensitivity of sensor.
Description
Technical field
The present invention relates to gas sensor fields more particularly to a kind of high sensor and preparation method thereof.
Background technique
Gas sensor technology has broad application prospects, and can be used for the various inflammable of family, factory, workshop and mine
Explosive or pernicious gas detection.
In recent years, as the development of silicon processing technique, especially micromachining technology bring manufacture processing technology
Fundamental change.It uses microelectronics, usually have for the Micro Gas Sensor of machining and thin film processing techniques preparation
The advantages that micromation, low-power consumption.
The prior art usually improves the sensitivity of gas sensor by improving to gas sensitive, but can not
Obtain significant effect.
Therefore, the existing technology needs to be improved and developed.
Summary of the invention
In view of above-mentioned deficiencies of the prior art, the purpose of the present invention is to provide a kind of high sensor and its preparations
Method, it is intended to solve the problems, such as that existing gas sensor sensitivity is poor.
Technical scheme is as follows:
A kind of preparation method of high sensor, wherein comprising steps of
Sintered body substrate is put into quartz ampoule, using FePC as carbon source and catalyst, in the flowing atmosphere of argon gas and hydrogen
In heated, obtaining surface growth has the sintered body substrate of columnar arrays carbon nano-tube film；
The gas sensitive prepared in advance, which is coated in surface growth, to be had on the sintered body substrate of columnar arrays carbon nano-tube film,
It is sintered, obtains air-sensitive sintered body；
Heater strip is put into the air-sensitive sintered body, welded, encapsulated, voltage ageing according to heater-type device common process,
High sensor is made.
The preparation method of the high sensor, wherein the volume ratio of the argon gas and hydrogen is 1:1.
The preparation method of the high sensor, wherein the temperature of the heat treatment is 800-1000 DEG C, heating
Time is 10-20min.
The preparation method of the high sensor, wherein the columnar arrays carbon of the sintered body substrate surface growth
In nanotube films, the diameter of every carbon nanotube is 30-50nm.
The preparation method of the high sensor, wherein the columnar arrays carbon of the sintered body substrate surface growth
In nanotube films, several carbon nanotube fasciculation accumulations, the diameter of every beam carbon pipe is 3-6 μm, the interbank distance of adjacent carbons
It is 2-35 μm.
The preparation method of the high sensor, wherein the columnar arrays carbon of the sintered body substrate surface growth
In nanotube films, the height of every beam carbon pipe is 14-18 μm.
The preparation method of the high sensor, wherein the gas sensitive is SnO2、ZnO、Fe2O3Or ZrO2In
One kind.
The preparation method of the high sensor, wherein doped with one of Pt or Pd in the gas sensitive
Or two kinds.
The preparation method of the high sensor, wherein the temperature of the sintering processes is 500-700 DEG C.
A kind of high sensor, wherein be prepared using the method.
The utility model has the advantages that the present invention provides a kind of preparation method of high sensor, by sintered body substrate surface
Upper preparation columnar arrays carbon nano-tube film, not only increases the specific surface area of sintered body substrate, to increase gas sensitive coating
Amount on sintered body substrate unit area；Further, the carbon nanotube itself with preferable air-sensitive performance can also
It acts synergistically with the gas sensitive for being coated in its surface, to effectively promote the sensitivity of sensor.It is provided by the invention
Preparation method is simple and efficient, and can fundamentally promote the sensitivity of various kinds of sensors.
Detailed description of the invention
Fig. 1 is a kind of flow chart of the preparation method preferred embodiment of high sensor of the present invention.
Fig. 2 is the surface topography map for the columnar arrays carbon nano-tube film that scanning electron microscope is observed.Fig. 3 is scanning electricity
Sub- microscope observes the side view of columnar arrays carbon nano-tube film.
Fig. 4 is the perspective view of Single Carbon Nanotubes beam in columnar arrays carbon nano-tube film.
Fig. 5 is a kind of structural schematic diagram of high sensor preferred embodiment of the present invention.
Specific embodiment
The present invention provides a kind of high sensor and preparation method thereof, for make the purpose of the present invention, technical solution and
Effect is clearer, clear, and the present invention is described in more detail below.It should be appreciated that specific embodiment described herein
It is only used to explain the present invention, be not intended to limit the present invention.
Referring to Fig. 1, Fig. 1 is a kind of flow chart of the preparation method preferred embodiment of high sensor of the present invention,
As shown, comprising steps of
S10, sintered body substrate is put into quartz ampoule, using FePC as carbon source and catalyst, in the flowing of argon gas and hydrogen
Heated in atmosphere, obtains the sintered body substrate that surface growth has columnar arrays carbon nano-tube film；
S20, the gas sensitive prepared in advance is coated in the sintered body base that surface growth has columnar arrays carbon nano-tube film
On piece is sintered, and obtains air-sensitive sintered body；
S30, heater strip is put into the air-sensitive sintered body, is welded, encapsulated according to heater-type device common process, is electric old
Change, high sensor is made.
Carbon nanotube is that a kind of quasi- one-dimensional hollow tubulose with high conductivity, high mechanical strength and good thermal stability is received
Rice material, special microstructure makes it have huge specific surface area, thus has very high gas absorption activity.Moreover,
Carbon nanotube itself is at room temperature to NOx、CH4、CO、H2、O2And NH3There is good air-sensitive performance Deng more middle gases, be one
The very promising room temperature gas sensitive of kind.The present embodiment by sintered body substrate surface prepare columnar arrays carbon nano-tube film,
The specific surface area of sintered body substrate is not only increased, to increase gas sensitive coated on sintered body substrate unit area
Amount；Further, the carbon nanotube itself with preferable air-sensitive performance can also be with the gas sensitive coated in its surface
It acts synergistically, to effectively promote the sensitivity of sensor.
The preparation method of high sensor provided by the invention is simple and efficient, and can fundamentally promote all kinds of biographies
The sensitivity of sensor.
In a preferred embodiment, sintered body substrate is put into quartz ampoule, using FePC as carbon source and is urged
Agent heats the sintered body substrate in the flowing atmosphere that the volume ratio of argon gas and hydrogen is 1:1, obtains table
It looks unfamiliar the sintered body substrate with columnar arrays carbon nano-tube film.
Preferably, cracking reaction occurs under conditions of 800-1000 DEG C for the FePC, after 10-20min is reacted in heating,
Just equably growth has one layer of columnar arrays carbon nano-tube film to the sintered body substrate surface.It is furthermore preferred that the FePC exists
Under conditions of 900 DEG C react 15min after, sintered body substrate surface growth column carbon nano-tube film as shown in figs 2-4.
Fig. 2 is the surface topography for the columnar arrays carbon nano-tube film that scanning electron microscope is observed, as shown, described
In the columnar arrays carbon nano-tube film of sintered body substrate surface growth, several carbon nanotube fasciculation accumulations, every beam carbon pipe
Diameter is 3-6 μm, and the interbank distance of adjacent carbons is 2-35 μm.Fig. 3 is that scanning electron microscope observes that columnar arrays carbon is received
The side view of mitron film, as shown, the height of every beam carbon pipe in the columnar arrays carbon nano-tube film is 14-18 μm.Fig. 4
For the perspective view of Single Carbon Nanotubes beam, as shown, carbon nanotube close-packed arrays form pencil, bottom is loose, slightly
Roomy, the microstructure discovery of the close in top transmission electron microscope observation carbon nanotube, carbon nanotube is hollow more
Wall tubular structure, the diameter of carbon pipe are about 30-55 nm.
Preferably, the sintered body substrate is the porcelain tube with electrode.
In a preferred embodiment, gas sensitive is tuned into paste with deionized water in advance, then by the gas
Quick material, which is coated in surface growth, to be had on the sintered body substrate of columnar arrays carbon nano-tube film, in 500-700 DEG C of condition
Under be sintered, obtain air-sensitive sintered body.
Preferably, the gas sensitive is SnO2、ZnO、Fe2O3Or ZrO2One of, but not limited to this.
It is furthermore preferred that during the gas sensitive is tuned into paste again also Pt can be adulterated into the gas sensitive
Or one or both of Pd, but not limited to this；The elements such as described Pt, Pd can further promote the spirit of sensor as catalyst
Sensitivity and gas identify popularity.
In a preferred embodiment, heater strip is put into the air-sensitive sintered body, it is normal according to heater-type device
Rule technique welded, encapsulated, voltage ageing 10 days, and high sensor is made.
Further, it the present invention also provides a kind of high sensor, is prepared using the above method.Such as Fig. 5 institute
Show, the high sensor includes plastic feet 10, four pins 20 being uniformly arranged on the plastic feet, is had
The sintered body substrate 30 of electrode, the electrode of the sintered body are connect with four pins respectively, outside the sintered body substrate
It encloses and is coated with a stainless (steel) wire 40, wherein the sintered body substrate surface growth has columnar arrays carbon nano-tube film, the column
Shape array carbon nano tube film surface is coated with gas sensitive.
In conclusion the present invention provides a kind of preparation method of high sensor, by sintered body substrate surface
Upper preparation columnar arrays carbon nano-tube film, not only increases the specific surface area of sintered body substrate, to increase gas sensitive coating
Amount on sintered body substrate unit area；Further, the carbon nanotube itself with preferable air-sensitive performance can also
It acts synergistically with the gas sensitive for being coated in its surface, to effectively promote the sensitivity of sensor.It is provided by the invention
Preparation method is simple and efficient, and can fundamentally promote the sensitivity of various kinds of sensors.
It should be understood that the application of the present invention is not limited to the above for those of ordinary skills can
With improvement or transformation based on the above description, all these modifications and variations all should belong to the guarantor of appended claims of the present invention
Protect range.
Claims (10)
1. a kind of preparation method of high sensor, which is characterized in that comprising steps of
Sintered body substrate is put into quartz ampoule, using FePC as carbon source and catalyst, in the flowing atmosphere of argon gas and hydrogen
In heated, obtaining surface growth has the sintered body substrate of columnar arrays carbon nano-tube film；
The gas sensitive prepared in advance, which is coated in surface growth, to be had on the sintered body substrate of columnar arrays carbon nano-tube film,
It is sintered, obtains air-sensitive sintered body；
Heater strip is put into the air-sensitive sintered body, welded, encapsulated, voltage ageing according to heater-type device common process,
High sensor is made.
2. the preparation method of high sensor according to claim 1, which is characterized in that the body of the argon gas and hydrogen
Product is than being 1:1.
3. the preparation method of high sensor according to claim 1, which is characterized in that the temperature of the heat treatment
It is 800-1000 DEG C, heating time 10-20min.
4. the preparation method of high sensor according to claim 1, which is characterized in that the sintered body substrate surface
In the columnar arrays carbon nano-tube film of growth, the diameter of every carbon nanotube is 30-50nm.
5. the preparation method of high sensor according to claim 1, which is characterized in that the sintered body substrate surface
In the columnar arrays carbon nano-tube film of growth, several carbon nanotube fasciculation accumulations, the diameter of every beam carbon pipe is 3-6 μm, phase
The interbank distance of adjacent carbon is 2-35 μm.
6. the preparation method of high sensor according to claim 5, which is characterized in that the sintered body substrate surface
In the columnar arrays carbon nano-tube film of growth, the height of every beam carbon pipe is 14-18 μm.
7. the preparation method of high sensor according to claim 1, which is characterized in that the gas sensitive is SnO2、
ZnO、Fe2O3And ZrO2One of.
8. the preparation method of high sensor according to claim 7, which is characterized in that adulterated in the gas sensitive
There are one or both of Pt or Pd.
9. the preparation method of high sensor according to claim 1, which is characterized in that the temperature of the sintering processes
It is 500-700 DEG C.
10. a kind of high sensor, which is characterized in that be prepared using any method of claim 1-9.
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101281159A (en) * | 2008-05-16 | 2008-10-08 | 曲阜师范大学 | Nanometer zinc oxide multifunctional gas-sensitive sensor device and making method thereof |
| CN101544348A (en) * | 2009-04-24 | 2009-09-30 | 中国科学院上海微系统与信息技术研究所 | Composite micro-nano structure array on high light-transmission substrate and method and application thereof |
| CN102262122A (en) * | 2011-06-21 | 2011-11-30 | 温州大学 | Single-wall carbon nano tube-based ultrasensitive deoxyribonucleic acid (DNA) biosensor and preparation method and application thereof |
| CN102583504A (en) * | 2012-01-18 | 2012-07-18 | 山东大学 | Method for preparation and regulation of surface-roughness ZnO nano-cone or nanorod array |
| CN103868818A (en) * | 2014-03-28 | 2014-06-18 | 中国电子科技集团公司第二十六研究所 | Three-dimensional nano-structure surface acoustic wave gas sensor |
| JP2015055521A (en) * | 2013-09-11 | 2015-03-23 | アズビル株式会社 | Atmosphere sensor and production method thereof |
| CN105424759A (en) * | 2015-10-22 | 2016-03-23 | 上海纳米技术及应用国家工程研究中心有限公司 | Preparation method of zinc oxide nanotube array gas sensitive sensor |
| CN105699426A (en) * | 2014-11-26 | 2016-06-22 | 中航商用航空发动机有限责任公司 | Method and apparatus for preparing gas sensor |
| CN108195914A (en) * | 2017-12-27 | 2018-06-22 | 温州大学 | A kind of preparation method that can utilize its single-walled carbon nanotube from growth conditions electric signal transition detection biomolecule |
-
2018
- 2018-08-28 CN CN201810986430.3A patent/CN109270126A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101281159A (en) * | 2008-05-16 | 2008-10-08 | 曲阜师范大学 | Nanometer zinc oxide multifunctional gas-sensitive sensor device and making method thereof |
| CN101544348A (en) * | 2009-04-24 | 2009-09-30 | 中国科学院上海微系统与信息技术研究所 | Composite micro-nano structure array on high light-transmission substrate and method and application thereof |
| CN102262122A (en) * | 2011-06-21 | 2011-11-30 | 温州大学 | Single-wall carbon nano tube-based ultrasensitive deoxyribonucleic acid (DNA) biosensor and preparation method and application thereof |
| CN102583504A (en) * | 2012-01-18 | 2012-07-18 | 山东大学 | Method for preparation and regulation of surface-roughness ZnO nano-cone or nanorod array |
| JP2015055521A (en) * | 2013-09-11 | 2015-03-23 | アズビル株式会社 | Atmosphere sensor and production method thereof |
| CN103868818A (en) * | 2014-03-28 | 2014-06-18 | 中国电子科技集团公司第二十六研究所 | Three-dimensional nano-structure surface acoustic wave gas sensor |
| CN105699426A (en) * | 2014-11-26 | 2016-06-22 | 中航商用航空发动机有限责任公司 | Method and apparatus for preparing gas sensor |
| CN105424759A (en) * | 2015-10-22 | 2016-03-23 | 上海纳米技术及应用国家工程研究中心有限公司 | Preparation method of zinc oxide nanotube array gas sensitive sensor |
| CN108195914A (en) * | 2017-12-27 | 2018-06-22 | 温州大学 | A kind of preparation method that can utilize its single-walled carbon nanotube from growth conditions electric signal transition detection biomolecule |
Non-Patent Citations (4)
| Title |
|---|
| QI NIE ET.AL.: "Sensitivity enhanced, stability improved ethanol gas sensor based on multi-wall carbon nanotubes functionalized with Pt-Pd nanoparticles", 《SENSORS AND ACTUATORS B 》 * |
| 李书宏 等: "柱状结构阵列碳纳米管膜的超疏水性研究", 《高等学校化学学报》 * |
| 李俊寿主编: "《新材料概论》", 31 August 2004, 国防工业出版社 * |
| 黄英，王永红主编: "《传感器原理及应用》", 30 April 2016, 合肥工业大学出版 * |
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