CN109268355A - A kind of multi output Hydraulic Position Control System of micron level precision - Google Patents
A kind of multi output Hydraulic Position Control System of micron level precision Download PDFInfo
- Publication number
- CN109268355A CN109268355A CN201811338473.7A CN201811338473A CN109268355A CN 109268355 A CN109268355 A CN 109268355A CN 201811338473 A CN201811338473 A CN 201811338473A CN 109268355 A CN109268355 A CN 109268355A
- Authority
- CN
- China
- Prior art keywords
- output hydraulic
- pressure cylinder
- hydraulic pressure
- short stroke
- flow valves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
- F15B21/08—Servomotor systems incorporating electrically operated control means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B21/00—Common features of fluid actuator systems; Fluid-pressure actuator systems or details thereof, not covered by any other group of this subclass
- F15B21/08—Servomotor systems incorporating electrically operated control means
- F15B21/087—Control strategy, e.g. with block diagram
Abstract
The embodiment of the invention discloses a kind of multi output Hydraulic Position Control Systems of micron level precision, its Position Sensor detects the position of each short stroke position output hydraulic pressure cylinder, and central controller requires to change the output signal of motor servo driver and digital flow valves driving plate according to position control；Servo motor changes output position according to the signal of motor servo driver, changes the total flow for being transported to the hydraulic oil of short stroke displacement output hydraulic pressure cylinder；Digital flow valves change the area of each restriction of flow valve, to change the hydraulic fluid flow rate for being transported to short stroke displacement output hydraulic pressure cylinder, realize the micron level Accurate Position Control of short stroke displacement output hydraulic pressure cylinder.The invention has the benefit that passing through the control action of displacement sensor, central controller, motor servo driver and digital flow valves driving plate, accurate control is transported to the hydraulic fluid flow rate of each short stroke displacement output hydraulic pressure cylinder, realizes the micron level Accurate Position Control of locating platform.
Description
Technical field
The present invention relates to a kind of controls of the multi output hydraulic position of hydraulic drive field more particularly to micron level precision to be
System.
Background technique
Hydraulic system structure is simple, power to volume ratio is big, load compliance is good, obtains in the fields such as industry, agricultural, manufacturing industry
To being widely applied.Conventional hydraulic position control system mostly use valve control or pump control mode, to the oil liquid in circuit into
Row pressure controls or flow control, due to valve and pump nonlinear influence in itself in such hydraulic system, in practice
The complicated controller of design is generally required to guarantee positioning accuracy and speed.
In positioning accuracy, conventional hydraulic position control system can only generally guarantee the position error of 0.1mm, even if using
The positioning accuracy of high-precision electrohydraulic servo system, it is also difficult to reach the positioning requirements of micron level.
In the micron level Hydraulic Position Control System that the prior art does not have one kind that can control multiple output positions simultaneously.
Summary of the invention
The technical problem to be solved by the embodiment of the invention is that providing a kind of hydraulic position of multi output of micron level precision
Set control system.The Hydraulic Position Control System micron level that multiposition output can be achieved is accurately positioned.
In order to solve the above-mentioned technical problem, the embodiment of the invention provides a kind of hydraulic positions of multi output of micron level precision
Set control system, including central controller (1), motor servo driver (2), servo motor (3), digital flow valves driving plate
(5), primary big stroke hydraulic cylinder (6), hydraulic pipeline (8), at least one digital flow valves, the output of at least one short stroke position
Hydraulic cylinder, at least one position sensor, pedestal (12), locating platform (13)；
The short stroke position output hydraulic pressure cylinder is set on the pedestal, and the locating platform is fixedly installed on described short
On the driving end of travel position output hydraulic pressure cylinder, the position sensor is for detecting the short stroke position output hydraulic pressure cylinder
Delivery stroke, the short stroke position output hydraulic pressure cylinder successively pass through institute with the digital flow valves, primary big stroke hydraulic cylinder
Hydraulic pipeline connection is stated, the digital flow valves driving plate is electrically connected with the digital flow valves, central controller, the servo
Motor driver is electrically connected with the central controller, servo motor, and the servo motor drives the big stroke hydraulic of primary
Cylinder；
The central controller detects the data of the position sensor, and export electric signal control the servo motor and
The digital flow valves driving plate, changes the output of the digital flow valves.
Further, the digital flow valves, short stroke position output hydraulic pressure cylinder, number of position sensors are 3 or 3
More than.
It further, further include ball screw (4), the servo motor drives the primary by the ball screw
Big stroke hydraulic cylinder.
It further, further include accumulator (7), the accumulator (7) and the short stroke position output hydraulic pressure cylinder are logical
Cross piping connection.
The implementation of the embodiments of the present invention has the following beneficial effects: the present invention passes through displacement sensor, central controller, watches
The control action of motor driver and digital flow valves driving plate is taken, accurate control is transported to each short stroke displacement output liquid
The hydraulic fluid flow rate of cylinder pressure, to realize the micron level Accurate Position Control of locating platform.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, the present invention is made into one below in conjunction with attached drawing
Step ground detailed description.
Structural schematic diagram shown in referring to Fig.1.
A kind of multi output Hydraulic Position Control System of micron level precision of the embodiment of the present invention, including central controller
(1), motor servo driver (2), servo motor (3), ball screw (4), digital flow valves driving plate (5), primary big stroke
Hydraulic cylinder (6), accumulator (7), hydraulic pipeline (8), digital flow valves (91,92,93), short stroke position output hydraulic pressure cylinder
(101,102,103), position sensor (111,112,113), pedestal (12), locating platform (13).
Digital flow valves, short stroke position output hydraulic pressure cylinder, number of position sensors are 3 or 3 or more, can basis
Actual needs increases.
Primary big stroke hydraulic cylinder (6) has an oil inlet and outlet 6A, and accumulator (7) has an oil inlet and outlet 7A, digital flow valves (91,
92,93) there are an oil inlet (91A, 92A, 93A) and oil outlet (91B, 92B, 93B), short stroke position output hydraulic pressure cylinder (101,
102,103) there are upper oil outlet (101A, 102A, 103A) and lower oil inlet (101B, 102B, 103B), 6A and 91A, 92A, 93A
It is connected, 91B, 92B, 93B are connected with 101B, 102B, 103B, and 101B, 102B, 103B are connected with 7A.
Position sensor (11x) detects each short stroke position output hydraulic pressure cylinder (10) driving locating platform (13) and pedestal
(12) relative displacement generated, central controller (1) require to change motor servo driver (2) and digital stream according to position control
Measure the output signal of valve driving plate (5)；Servo motor (3) changes output position according to the signal of motor servo driver (2), drags
Dynamic primary big stroke hydraulic cylinder (6), changes the total flow for being transported to the hydraulic oil of short stroke displacement output hydraulic pressure cylinder (10x)；Respectively
A digital flow valves (9x) change flow valve (9) each restriction according to the output signal of corresponding digital flow valves driving plate (5)
Area, to change the hydraulic fluid flow rate for being transported to each short stroke displacement output hydraulic pressure cylinder (10x), to realize each short row
The micron level Accurate Position Control of journey displacement location platform (13).
Working principle of the present invention is as follows: position sensor (111,112,113) detects each short stroke position of locating platform
Set the physical location of output hydraulic pressure cylinder (101,102,103), central controller (1) compares the big of physical location and target position
It is small, change the output signal of motor servo driver (2) and digital flow valves driving plate (5).
When total physical location of multiple position sensors (111,112,113) is lower than catalogue cursor position, servo motor is driven
Dynamic device (2) issue the positive rotaring signal of motor, drag primary big stroke hydraulic cylinder (6) right lateral, and oil liquid is from primary big stroke hydraulic cylinder (6)
It is transported to short stroke position output hydraulic pressure cylinder (101,102,103), realizes that locating platform (13) integrally move up.It is more during being somebody's turn to do
When the position change amount of a short stroke position output hydraulic pressure cylinder is consistent, the choke area of each digital flow valves (91,92,93)
It is consistent；When position change amount is inconsistent, the choke area of each digital flow valves (91,92,93) should be proportional to position
Set knots modification.
When total physical location of multiple position sensors (111,112,113) is higher than catalogue cursor position, servo motor is driven
Dynamic device (2) issue motor reversal signal, drag primary big stroke hydraulic cylinder (6) left lateral, and oil liquid is from short stroke position output hydraulic pressure
Cylinder (101,102,103) is transported to primary big stroke hydraulic cylinder (6), realizes that locating platform (13) integrally move down.It is more during being somebody's turn to do
When the position change amount of a short stroke position output hydraulic pressure cylinder is consistent, the choke area of each digital flow valves (91,92,93)
It is consistent；When position change amount is inconsistent, the choke area of each digital flow valves (91,92,93) should be proportional to position
Set knots modification.
Above disclosed is only a preferred embodiment of the present invention, cannot limit the power of the present invention with this certainly
Sharp range, therefore equivalent changes made in accordance with the claims of the present invention, are still within the scope of the present invention.
Claims (4)
1. a kind of multi output Hydraulic Position Control System of micron level precision, which is characterized in that including central controller (1),
Motor servo driver (2), servo motor (3), digital flow valves driving plate (5), primary big stroke hydraulic cylinder (6), hydraulic tube
Road (8), at least one digital flow valves, at least one short stroke position output hydraulic pressure cylinder, at least one position sensor, pedestal
(12), locating platform (13)；
The short stroke position output hydraulic pressure cylinder is set on the pedestal, and the locating platform is fixedly installed on the short stroke
On the driving end of position output hydraulic pressure cylinder, the position sensor is used to detect the output of the short stroke position output hydraulic pressure cylinder
Stroke, the short stroke position output hydraulic pressure cylinder successively pass through the liquid with the digital flow valves, primary big stroke hydraulic cylinder
Pressure pipeline connection, the digital flow valves driving plate are electrically connected with the digital flow valves, central controller, the servo motor
Driver is electrically connected with the central controller, servo motor, and the servo motor drives the big stroke hydraulic cylinder of primary；
The central controller detects the data of the position sensor, and exports electric signal and control the servo motor and described
Digital flow valves driving plate changes the output of the digital flow valves.
2. the multi output Hydraulic Position Control System of micron level precision according to claim 1, which is characterized in that described
Digital flow valves, short stroke position output hydraulic pressure cylinder, number of position sensors are 3 or 3 or more.
3. the multi output Hydraulic Position Control System of micron level precision according to claim 2, which is characterized in that also wrap
It includes ball screw (4), the servo motor drives the big stroke hydraulic cylinder of primary by the ball screw.
4. the multi output Hydraulic Position Control System of micron level precision according to claim 2 or 3, which is characterized in that
It further include accumulator (7), the accumulator (7) and the short stroke position output hydraulic pressure cylinder pass through piping connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811338473.7A CN109268355A (en) | 2018-11-09 | 2018-11-09 | A kind of multi output Hydraulic Position Control System of micron level precision |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811338473.7A CN109268355A (en) | 2018-11-09 | 2018-11-09 | A kind of multi output Hydraulic Position Control System of micron level precision |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109268355A true CN109268355A (en) | 2019-01-25 |
Family
ID=65192093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811338473.7A Pending CN109268355A (en) | 2018-11-09 | 2018-11-09 | A kind of multi output Hydraulic Position Control System of micron level precision |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60220208A (en) * | 1984-04-16 | 1985-11-02 | Komatsu Ltd | Digital servo valve |
| CN86208387U (en) * | 1986-12-10 | 1987-12-12 | 西安交通大学 | Binary digital valve for flow control |
| WO1999034100A1 (en) * | 1997-12-24 | 1999-07-08 | T. Potma Beheer B.V. | Device for digital hydraulic pressure transformation (dhpt) |
| CN201228806Y (en) * | 2008-07-02 | 2009-04-29 | 浙江工业大学 | Rotating plate type pneumatic digital valve |
| CN101907109A (en) * | 2010-08-11 | 2010-12-08 | 马鞍山钢铁股份有限公司 | Synchronous control device for hydraulic cylinder and control method thereof |
| CN103869354A (en) * | 2012-12-18 | 2014-06-18 | 通用电气公司 | Environmental radiation monitor and operation method thereof |
| CN104879335A (en) * | 2015-06-11 | 2015-09-02 | 上海工程技术大学 | Synchronous control system and control method for multiple hydraulic cylinders |
| CN209041231U (en) * | 2018-11-09 | 2019-06-28 | 汕头大学 | A kind of multi output Hydraulic Position Control System of micron level precision |
-
2018
- 2018-11-09 CN CN201811338473.7A patent/CN109268355A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60220208A (en) * | 1984-04-16 | 1985-11-02 | Komatsu Ltd | Digital servo valve |
| CN86208387U (en) * | 1986-12-10 | 1987-12-12 | 西安交通大学 | Binary digital valve for flow control |
| WO1999034100A1 (en) * | 1997-12-24 | 1999-07-08 | T. Potma Beheer B.V. | Device for digital hydraulic pressure transformation (dhpt) |
| CN201228806Y (en) * | 2008-07-02 | 2009-04-29 | 浙江工业大学 | Rotating plate type pneumatic digital valve |
| CN101907109A (en) * | 2010-08-11 | 2010-12-08 | 马鞍山钢铁股份有限公司 | Synchronous control device for hydraulic cylinder and control method thereof |
| CN103869354A (en) * | 2012-12-18 | 2014-06-18 | 通用电气公司 | Environmental radiation monitor and operation method thereof |
| CN104879335A (en) * | 2015-06-11 | 2015-09-02 | 上海工程技术大学 | Synchronous control system and control method for multiple hydraulic cylinders |
| CN209041231U (en) * | 2018-11-09 | 2019-06-28 | 汕头大学 | A kind of multi output Hydraulic Position Control System of micron level precision |
Non-Patent Citations (1)
| Title |
|---|
| 彭雄斌等: "《微位移控制液压系统建模与模型辨识》", 《机械工程学报》, vol. 53, no. 22, pages 206 - 211 * |
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