CN109253800A - A kind of follow-on crystal Fourier transform spectrometer - Google Patents

A kind of follow-on crystal Fourier transform spectrometer Download PDF

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Publication number
CN109253800A
CN109253800A CN201710566191.1A CN201710566191A CN109253800A CN 109253800 A CN109253800 A CN 109253800A CN 201710566191 A CN201710566191 A CN 201710566191A CN 109253800 A CN109253800 A CN 109253800A
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CN
China
Prior art keywords
amici prism
wave plate
crystal
follow
fourier transform
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Granted
Application number
CN201710566191.1A
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Chinese (zh)
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CN109253800B (en
Inventor
吴砺
李俊梅
代会娜
汤吓雄
林磊
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Photop Technologies Inc
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Photop Technologies Inc
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Priority to CN201710566191.1A priority Critical patent/CN109253800B/en
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Publication of CN109253800B publication Critical patent/CN109253800B/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255Details, e.g. use of specially adapted sources, lighting or optical systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • G01J2003/28132D-array
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • G01J2003/2816Semiconductor laminate layer

Abstract

The invention discloses a kind of follow-on crystal Fourier transform spectrometers, it includes the etalon being sequentially arranged in spectrometer along paths direction, Amici prism, convergent mirror and imaging sensor, optical path sequentially passes through etalon, imaging sensor is projected to after Amici prism and convergent mirror, and optical image is generated by imaging sensor, it is mutually perpendicular to by the optical axis that N group crystal thickness wave plate and the N group crystal thickness wave plate that Amici prism two sides are arranged in respectively is arranged in the two sides on the light incident end face of Amici prism, wherein, be arranged in the N group crystal thickness wave plate of Amici prism two sides optical path difference be respectively Amici prism o light and 1 times of e light maximum optical path difference, 2 times, ..., N times and minus 1 times, minus 2 times, ..., negative N times, so that passing through etalon, Amici prism is matched with imaging sensor by point of spectrum Resolution improves 2N+1 times, so that the scanning better effect of spectrometer.

Description

A kind of follow-on crystal Fourier transform spectrometer
Technical field
The present invention relates to optical instrument device field, especially a kind of follow-on crystal Fourier transform spectrometer.
Background technique
Resolution ratio possessed by the image effect that the imaging sensor of traditional crystal Fourier transform spectrometer generates compared with To be undesirable, since optical instrument is in Scanning Detction, the detection image generated is finer in resolution ratio, then for inspection For survey personnel, carrying out result judgement also will be more accurate, thus to traditional crystal Fourier transform spectrometer at It is also become more and more important as resolution ratio is improved.
Summary of the invention
The purpose of the present invention is to provide a kind of implementations reliably, structure is simple and can effectively improve image detection resolution ratio Follow-on crystal Fourier transform spectrometer.
In order to realize above-mentioned technical purpose, the technical solution of the present invention is as follows:
A kind of follow-on crystal Fourier transform spectrometer comprising be sequentially arranged in spectrometer along paths direction Etalon, Amici prism, convergent mirror and imaging sensor, the two sides on the light incident end face of the Amici prism are each provided with N group crystal thickness wave plate, wherein N >=1, and the optical axis of the N group crystal thickness wave plate that Amici prism two sides are arranged in is mutually perpendicular to, The optical path is sequentially projected to imaging sensor after etalon, Amici prism and convergent mirror, and is given birth to by imaging sensor At optical image.
Further, the Amici prism is Wollaston prism or Rochon prism.
As one of embodiment of etalon of the present invention, the etalon is step etalon, the step The step of etalon is superimposed step by step along one side and is incremented to the opposite other side, and the step is M, wherein M >=1.
Further, the imaging sensor is two-dimensional CCD imaging sensor or cmos image sensor.
As one of embodiment of crystal thickness wave plate of the present invention, further, the crystal thickness wave plate is along light Two side positions on the light incident end face stacked on top of each other that Amici prism is set of road direction.
As the another embodiment of crystal thickness wave plate of the present invention, the crystal thickness wave plate is along the side of Amici prism Edge is bonded to each other two side positions for being placed on Amici prism to center position, wherein the crystal thickness wave plate for being bonded to each other placement is edge Successively decrease step by step to center position in step-like at Amici prism edge.
Further, the optical path difference of the N group crystal thickness wave plate that Amici prism two sides are arranged in is respectively the o of Amici prism 1 times of light and e light maximum optical path difference, 2 times ..., N times and it is 1 times minus, 2 times minus ..., it is N times negative.
Using above-mentioned technical solution, the invention has the benefit that by the light incident end face of Amici prism Two sides the optical axis of N group crystal thickness wave plate and the N group crystal thickness wave plate that Amici prism two sides are arranged in respectively be set mutually hang down Directly, wherein the optical path difference that the N group crystal thickness wave plate of Amici prism two sides is arranged in is respectively the o light and e light maximum of Amici prism 1 times of optical path difference, 2 times ..., N times and it is 1 times minus, 2 times minus ..., it is N times negative so that passing through etalon, Amici prism and figure The resolution ratio of spectrum is improved 2N+1 times as sensor matches, so that the scanning better effect of spectrometer.
Detailed description of the invention
The present invention is further elaborated with reference to the accompanying drawings and detailed description:
Fig. 1 is one of embodiment of apparatus of the present invention;
Fig. 2 is the another embodiment of apparatus of the present invention;
Fig. 3 is one of embodiment of the crystal thickness wave plate of the present invention on Amici prism;
Fig. 4 is another embodiment of the crystal thickness wave plate of the present invention on Amici prism.
Specific embodiment
As shown in Figure 1, the present invention includes the etalon 1 being sequentially arranged in spectrometer along paths direction, light splitting rib Mirror 2, convergent mirror 3 and imaging sensor 4, it is thick that the two sides on the light incident end face of the Amici prism 2 are each provided with N group crystal Wave plate (not shown), wherein N >=1, and the optical axis of the N group crystal thickness wave plate that 2 two sides of Amici prism are arranged in is mutually perpendicular to, The optical path is sequentially projected to imaging sensor 4 after etalon 1, Amici prism 2 and convergent mirror 3, and by image sensing Device 4 generates optical image.
Further, the Amici prism 2 can use Wollaston prism or Rochon prism.
Further, the imaging sensor 4 can be two-dimensional CCD imaging sensor or cmos image sensor.
Further, the optical path difference of the N group crystal thickness wave plate that 2 two sides of Amici prism are arranged in is respectively Amici prism 1 times of o light and e light maximum optical path difference, 2 times ..., N times and it is 1 times minus, 2 times minus ..., it is N times negative.
As shown in Fig. 2, one of embodiment as etalon 1 of the present invention, the etalon 1 is step standard Tool, the step of the step etalon is superimposed step by step along one side is incremented to the opposite other side, and the step is M, Middle M >=1, Amici prism 2 shown in Fig. 2, convergent mirror 3 and imaging sensor 4 are identical as structure shown in Fig. 1.
As shown in figure 3, one of embodiment as crystal thickness wave plate 21 of the present invention, further, the crystal Thick wave plate 21 is two side positions on the optical path direction light incident end face stacked on top of each other that Amici prism 2 is arranged in.
As shown in figure 4, the another embodiment as crystal thickness wave plate 21 of the present invention, the crystal thickness wave plate 21 are Two side positions for being placed on Amici prism 2 are bonded to each other to center position along the edge of Amici prism 2, wherein being bonded to each other placement Crystal thickness wave plate 21 be to successively decrease step by step to center position in step-like along 2 edge of Amici prism.
The present invention uses above-mentioned technical solution, and N is respectively arranged by the two sides on the light incident end face of Amici prism The optical axis of group crystal thickness wave plate and the N group crystal thickness wave plate that Amici prism two sides are arranged in is mutually perpendicular to, wherein setting exists The optical path difference of the N group crystal thickness wave plate of Amici prism two sides is respectively the o light and 1 times of e light maximum optical path difference, 2 of Amici prism Times ..., N times and it is 1 times minus, 2 times minus ..., it is N times negative so that being matched by etalon, Amici prism with imaging sensor The resolution ratio of spectrum is improved 2N+1 times, so that the scanning better effect of spectrometer.
The foregoing is merely of the invention for example, for a person skilled in the art, religion according to the present invention Lead, without departing from the principles and spirit of the present invention all equivalent changes done according to scope of the present invention patent, repair Change, replacement and variant, is all covered by the present invention.

Claims (7)

1. a kind of follow-on crystal Fourier transform spectrometer, it is characterised in that: it includes sequentially setting along paths direction Etalon, Amici prism, convergent mirror and imaging sensor in spectrometer are set, on the light incident end face of the Amici prism Two sides be each provided with N group crystal thickness wave plate, wherein N >=1, and the N group crystal thickness wave plate that Amici prism two sides are set Optical axis be mutually perpendicular to, the optical path is sequentially projected to imaging sensor after etalon, Amici prism and convergent mirror, and Optical image is generated by imaging sensor.
2. a kind of follow-on crystal Fourier transform spectrometer according to claim 1, it is characterised in that: point Light prism is Wollaston prism or Rochon prism.
3. a kind of follow-on crystal Fourier transform spectrometer according to claim 1, it is characterised in that: the mark Quasi- tool is step etalon, and the step of the step etalon is superimposed step by step along one side is incremented to the opposite other side, described Step be M, wherein M >=1.
4. a kind of follow-on crystal Fourier transform spectrometer according to claim 1, it is characterised in that: the figure As sensor is two-dimensional CCD imaging sensor or cmos image sensor.
5. a kind of follow-on crystal Fourier transform spectrometer according to claim 1, it is characterised in that: the crystalline substance Body thickness wave plate is two side positions on the optical path direction light incident end face stacked on top of each other that Amici prism is arranged in.
6. a kind of follow-on crystal Fourier transform spectrometer according to claim 1, it is characterised in that: the crystalline substance Body thickness wave plate is to be bonded to each other two side positions for being placed on Amici prism to center position along the edge of Amici prism, wherein mutually The crystal thickness wave plate that fitting is placed is to successively decrease step by step to center position in step-like along Amici prism edge.
7. a kind of follow-on crystal Fourier transform spectrometer according to claim 1, it is characterised in that: the setting The optical path difference of the N group crystal thickness wave plate of Amici prism two sides be respectively Amici prism o light and 1 times of e light maximum optical path difference, 2 times ..., N times and it is 1 times minus, 2 times minus ..., it is N times negative.
CN201710566191.1A 2017-07-12 2017-07-12 Improved crystal Fourier transform spectrometer Expired - Fee Related CN109253800B (en)

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CN109253800B CN109253800B (en) 2021-11-02

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101008685A (en) * 2007-01-19 2007-08-01 华东师范大学 Color-recombination glass prism
CN101251484A (en) * 2008-04-10 2008-08-27 中国科学院长春光学精密机械与物理研究所 Miniature fourier transform spectrometer based on modulation
CN102052902A (en) * 2010-12-10 2011-05-11 天津大学 High-precision wide-range low-coherent interference shift demodulation device and demodulation method thereof
US20120120231A1 (en) * 2010-11-15 2012-05-17 Fujitsu Limited Electromagnetic wave imaging apparatus
CN104729403A (en) * 2015-03-30 2015-06-24 北方民族大学 Multiple-beam step type plane reflecting mirror laser interferometer and measurement method thereof
CN106595858A (en) * 2015-10-20 2017-04-26 南京理工大学 Hyperspectral imaging device and method based on field-of-view gradient modulation interference

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101008685A (en) * 2007-01-19 2007-08-01 华东师范大学 Color-recombination glass prism
CN101251484A (en) * 2008-04-10 2008-08-27 中国科学院长春光学精密机械与物理研究所 Miniature fourier transform spectrometer based on modulation
US20120120231A1 (en) * 2010-11-15 2012-05-17 Fujitsu Limited Electromagnetic wave imaging apparatus
CN102052902A (en) * 2010-12-10 2011-05-11 天津大学 High-precision wide-range low-coherent interference shift demodulation device and demodulation method thereof
CN104729403A (en) * 2015-03-30 2015-06-24 北方民族大学 Multiple-beam step type plane reflecting mirror laser interferometer and measurement method thereof
CN106595858A (en) * 2015-10-20 2017-04-26 南京理工大学 Hyperspectral imaging device and method based on field-of-view gradient modulation interference

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Title
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