CN109244114A - A kind of array substrate and preparation method thereof and display panel - Google Patents

A kind of array substrate and preparation method thereof and display panel Download PDF

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Publication number
CN109244114A
CN109244114A CN201811088504.8A CN201811088504A CN109244114A CN 109244114 A CN109244114 A CN 109244114A CN 201811088504 A CN201811088504 A CN 201811088504A CN 109244114 A CN109244114 A CN 109244114A
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electrode
layer
gas
array substrate
transistor
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卜倩倩
胡伟频
贾凡
贾一凡
姜明宵
魏从从
孙晓
王丹
邱云
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BOE Technology Group Co Ltd
Beijing BOE Display Technology Co Ltd
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BOE Technology Group Co Ltd
Beijing BOE Display Technology Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/88Dummy elements, i.e. elements having non-functional features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
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  • Crystallography & Structural Chemistry (AREA)
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  • General Health & Medical Sciences (AREA)
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  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

The present invention provides a kind of array substrate and preparation method thereof and display panel.The array substrate includes the transistor that viewing area is arranged in, it further include the gas detector that non-display area is set, gas detector includes heating layer, first electrode, second electrode and gas sensitive layer, heating layer material identical as the setting of the grid same layer of transistor and use, is used for heat gas sensitive layer;First electrode and second electrode material identical as the setting of the source-drain electrode same layer of transistor and use.The array substrate, which can be realized, is integrated in gas detector inside portable display apparatus, so that it is more convenient to carry gas detector;The array substrate can also enable the part-structure of gas detector and certain film layers of transistor prepare simultaneously using same process, to make gas detector without being directly installed on inside portable display apparatus, installation cost is not only reduced, and reduces the preparation cost for being integrated with the display device of gas detector.

Description

A kind of array substrate and preparation method thereof and display panel
Technical field
The present invention relates to field of display technology, and in particular, to a kind of array substrate and preparation method thereof and display panel.
Background technique
The detection of pernicious gas is necessary, if with the detection function to pernicious gas on the portable equipment of people Can, self-protection will be greatlyd improve.
But carrying portable gas detecting instrument has inconvenience, if loading gas detector in portable equipment such as hand Inside machine, and it can additionally increase the cost of manufacture of portable equipment.
Therefore, gas detecting instrument can have been carried by portable equipment again by how neither additionally increasing portable equipment cost of manufacture As current urgent problem to be solved.
Summary of the invention
The present invention is directed to the above-mentioned technical problems in the prior art, provide a kind of array substrate and preparation method thereof and Display panel.The array substrate, which can be realized, is integrated in gas detector inside portable display apparatus, so that gas be made to visit Survey device is carried more convenient;The array substrate can also enable certain film layers of the part-structure of gas detector with transistor It is prepared using same process, to make gas detector without being directly installed on inside portable display apparatus, is not only dropped simultaneously Low installation cost, and reduce the preparation cost for being integrated with the display device of gas detector.
The present invention provides a kind of array substrate, the transistor including viewing area is arranged in, and further includes being arranged in non-display area Gas detector, the gas detector includes heating layer, first electrode, second electrode and gas sensitive layer, the heating Layer material identical as the setting of the grid same layer of the transistor and use, for heating the gas sensitization layer;First electricity Pole and second electrode material identical as the setting of the source-drain electrode same layer of the transistor and use.
Preferably, the array substrate further includes substrate, and the gate insulation layer of the transistor extends to the non-display area;
The first electrode, the gate insulation layer, the second electrode and the gas sensitization layer are far from the substrate Direction on set gradually.
Preferably, the first electrode and the second electrode constitute interdigital electrode.
Preferably, the interdigital electrode it is adjacent it is interdigital between clearance distance range be 3-10 μm, the interdigital electrode Interdigital width range is 5-20 μm, and the thickness range of the interdigital electrode is 100-350nm.
Preferably, the material of the heating layer includes silver, copper, aluminium, molybdenum, tungsten, any one in magnesium;The gas sensitization The material of layer includes any one being added in the tin oxide, iron oxide, zinc oxide of platinum or palladium.
Preferably, the gas detector is multiple, and multiple gas detectors are arranged in array.
The present invention also provides a kind of display panels, including above-mentioned array substrate.
The present invention also provides a kind of preparation methods of above-mentioned array substrate, comprising: prepares to form transistor in viewing area;Also It include: to prepare to form gas detector in non-display area;The heating layer of the gas detector and the grid of the transistor are adopted It is formed simultaneously with same patterning processes;The first electrode and second electrode of the gas detector and the source-drain electrode of the transistor It is formed simultaneously using same patterning processes.
Preferably, preparation forms the transistor and preparation forms the gas detector and includes:
The figure including the heating layer and the grid is formed on the substrate;
Form the figure of the gate insulation layer of the transistor;The gate insulation layer extends to the non-display area;
Form the figure of the active layer including the transistor;
Form the figure including the first electrode, the second electrode and the source-drain electrode;
Form the figure of the passivation layer of the transistor;The passivation layer is removed in the non-display area, so that described the One electrode and the second electrode are contacted with the gas sensitization layer of the gas detector;
Form the figure of the gas sensitization layer.
Preferably, the figure of the gas sensitization layer for forming the gas detector includes:
The figure of the gas sensitization layer is formed using physical vaporous deposition.
Beneficial effects of the present invention: array substrate provided by the present invention, by being arranged gas detector in array base The non-display area of plate can be realized gas detector being integrated in portable display apparatus (such as mobile phone) inside, to make gas Detector is carried more convenient;By making the grid same layer setting of the heating layer of gas detector and transistor and using phase Same material, and make the first electrode of gas detector and second electrode material identical as the setting of the source-drain electrode same layer of transistor and use Material enables the part-structure of gas detector and certain film layers of transistor to prepare simultaneously using same process, to make gas Detector not only reduces installation cost, and reduce and be integrated with gas without being directly installed on inside portable display apparatus The preparation cost of the display device of bulk detector.
Display panel provided by the present invention can be realized the display panel by gas by using above-mentioned array substrate Bulk detector is integrated inside it, so that it is more convenient to carry gas detector;Also it is not necessarily to gas detector simultaneously Be directly installed on inside the display panel, not only reduce installation cost, and reduce be integrated with gas detector this is aobvious Show the preparation cost of panel.
Detailed description of the invention
Fig. 1 is the partial structure sectional view of array substrate in the embodiment of the present invention 2;
Fig. 2 is the top view of array substrate in the embodiment of the present invention 2;
Fig. 3 is the measuring circuit figure of gas detector in the embodiment of the present invention 2;
Fig. 4 is the structure top view for the interdigital electrode being made of in the embodiment of the present invention 2 first electrode and second electrode;
Fig. 5 is the array base-plate structure cross-sectional view that heating layer and grid are formed in the embodiment of the present invention 2;
Fig. 6 is the array base-plate structure cross-sectional view that gate insulation layer is formed in the embodiment of the present invention 2;
Fig. 7 is the array base-plate structure cross-sectional view that active layer is formed in the embodiment of the present invention 2;
Fig. 8 is that first electrode, the array base-plate structure section view of second electrode and source-drain electrode are formed in the embodiment of the present invention 2 Figure;
Fig. 9 is the array base-plate structure cross-sectional view that passivation layer is formed in the embodiment of the present invention 2;
Figure 10 is the array base-plate structure cross-sectional view that gas sensitization layer is formed in the embodiment of the present invention 2.
Description of symbols therein:
1. viewing area;2. transistor;21. grid;22. source-drain electrode;23. gate insulation layer;24. active layer;25. passivation layer; 3. non-display area;4. gas detector;41. heating layer;42. first electrode;43. second electrode;44. gas sensitization layer;5. base Bottom.
Specific embodiment
To make those skilled in the art more fully understand technical solution of the present invention, with reference to the accompanying drawing and it is embodied Mode is described in further detail a kind of array substrate provided by the present invention and preparation method thereof and display panel.
Embodiment 1:
The present embodiment provides a kind of array substrates, the transistor including viewing area is arranged in, and further include being arranged non-display The gas detector in area, gas detector include heating layer, first electrode, second electrode and gas sensitive layer, heating layer and brilliant The grid same layer of body pipe is arranged and uses identical material, is used for heat gas sensitive layer;First electrode and second electrode and crystal The source-drain electrode same layer of pipe is arranged and uses identical material.
By the way that gas detector to be arranged in the non-display area of array substrate, it can be realized and be integrated in gas detector just It is internal to take formula display device (such as mobile phone), so that it is more convenient to carry gas detector;By making gas detector Heating layer material identical as the setting of the grid same layer of transistor and use, and make the first electrode and second electrode of gas detector Material identical as the setting of the source-drain electrode same layer of transistor and use enables the certain of the part-structure of gas detector and transistor Film layer is prepared simultaneously using same process, to make gas detector without being directly installed on inside portable display apparatus, no It reduced by only installation cost, and reduce the preparation cost for being integrated with the display device of gas detector.
Embodiment 2:
The present embodiment provides a kind of array substrates, as depicted in figs. 1 and 2, the transistor 2 including viewing area 1 is arranged in, and also Gas detector 4 including non-display area 3 is arranged in, gas detector 4 include heating layer 41, first electrode 42, second electrode 43 and gas sensitive layer 44, the material identical as the setting of 21 same layer of grid of transistor 2 and use of heating layer 41, for heat gas Sensitive layer 44;First electrode 42 and the material identical as the setting of 22 same layer of source-drain electrode of transistor 2 and use of second electrode 43.
Wherein, array substrate further includes substrate 5, and the gate insulation layer 23 of transistor 2 extends to non-display area 3;It extends to non- The gate insulation layer 23 of viewing area 3 can separate the heating layer 41 of gas detector 4 and its first electrode 42 and second electrode 43 simultaneously Mutually insulated, to realize the structure setting of gas detector 4.First electrode 42, gate insulation layer 23, second electrode 43 and gas Sensitive layer 44 is set gradually on the direction far from substrate 5.
Above structure based on gas detector, for measuring circuit as shown in figure 3, R1 is heating layer 41, R2 is that gas is quick Feel layer 44, R0 is made of first electrode 42 and second electrode 43;The both ends of R1 are for connecing heating power supply, and R1 is for heating R2;String The both ends R2 and R0 of connection connection are used to measure the resistance variations of R2 for meeting measurement power supply, R0;Both ends, that is, first electrode 42 of R0 The output voltage signal between second electrode 43;The variation of 44 resistance value of gas sensitization layer can cause the variation of electric current in circuit, The voltage signal of output calculates the resistance variations of R2 according to the voltage signal taken out on R0, to detect by taking out on resistance R0 The ingredient and concentration of gas.
In the present embodiment, the material of heating layer 41 includes silver, copper, aluminium, molybdenum, tungsten, any one in magnesium;Form heating layer 41 these materials have good thermal conductivity and electric conductivity, can carry out very well in the case where power-up to gas sensitization layer 44 Heating.The material of gas sensitization layer 44 includes any one being added in the tin oxide, iron oxide, zinc oxide of platinum or palladium. Wherein, platinum and palladium are sensitizer, add the tin oxide, iron oxide or zinc oxide of platinum to oxidizing gas such as propane, iso-butane Etc. sensitivity with higher, it can be used for detecting the concentration of oxidizing gas;Add tin oxide, iron oxide or the zinc oxide of palladium To reducibility gas such as CO, H2Deng more sensitive, it can be used for detecting the concentration of reducibility gas.
Wherein, gas detector be mainly used for the parts such as industrial natural gas, coal gas, petrochemical industry it is inflammable, explosive, have The monitoring of poison, pernicious gas, gas sensitization layer is using the ingredient of chemical substance and concentration as the chemical sensitive layer of detection parameters.
The principle of gas detector the detection of gas compositions and concentration are as follows: when usual gas sensitization layer 44 is worked in air, Electronics compatible big gas such as oxygen and NO in air2, receive the electronics from metal oxide semiconductor material and adsorb Negative electrical charge, the conduction electronics for oxidizing metal the surface space-charge layer region of object semiconductor material are reduced, and make surface conductivity Reduce, so that gas sensitization layer 44 be made to be in high-impedance state;When gas sensitization layer 44 and tested gas (such as reducibility gas CO, H2Deng) contact, it will react with the oxygen of absorption, the electronics fettered by oxygen is released, 44 surface conductance of gas sensitization layer Rate increases, and reduces its resistance.For reducibility gas, the resistance value of gas sensitization layer 44 reduces;For oxidizing gas, gas The resistance value of body sensitive layer 44 increases, in this way, can detect the ingredient of tested gas according to the variation of resistance value.Tested gas Concentration is different, and the resistance change of gas sensitization layer 44 also can be different, in this way, according to the variation energy detection gas of resistance value Concentration.The heating of heating layer 41 can make the detection of 44 pairs of tested gas of gas sensitization layer sensitiveer, because metal oxide Once heating, the oxygen in air will seize gas sensitization layer 44 from the donor level of metal-oxide-semiconductor crystal grain Electronics, and negative electron is adsorbed on crystal surface, increase crystal surface current potential, so that the movement of conduction electrons is hindered, according to The principle of 44 the detection of gas compositions of above-mentioned gas sensitive layer and concentration, heating can make the sensitivity of 44 probe gas of gas sensitization layer It is higher.For example, after adsorbing certain gas at normal temperature, conductivity variations are not using the gas sensitization layer 44 of stannic oxide materials Greatly, if keeping this gas concentration constant, the conductivity of the gas sensitization layer 44 increases with the raising of itself temperature, especially Its conductivity variations is very big when within the scope of 100-300 DEG C.
Preferably, in the present embodiment, as shown in figure 4, first electrode 42 and second electrode 43 constitute interdigital electrode.Interdigital electricity Extremely it is adjacent it is interdigital between clearance distance d range be 3-10 μm, the interdigital width w range of interdigital electrode is 5-20 μm, interdigital electricity The thickness range of pole is 100-350nm.In addition, the size of the long * wide of outer edge of interdigital electrode entirety is 50*50 μm2、100* 100μm2Or 150*150 μm2.Since the interdigital length-width ratio of interdigital electrode is bigger, interdigital density is bigger, at the beginning of interdigital electrode Beginning resistance is smaller, and the sensitivity of gas detector and response speed are higher;The electric field strength of interdigital electrode and the thickness of interdigital electrode Approximate inverse relation is spent into, interdigital electrode is thicker, and electric field strength is smaller;Therefore, by carrying out above structure ginseng to interdigital electrode Several settings, can be improved the detectivity and response speed of gas detector, so that the gas for improving gas detector is visited Survey performance.
In the present embodiment, gas detector be it is multiple, multiple gas detectors are arranged in array.Multiple gas detectors Setting can be improved the accuracy of tested gas componant and concentration detection.
It should be noted that the detection window of gas detector can establish the trade mark in portable display apparatus such as mobile phone Region or other non-display areas, so that it is guaranteed that the overall aesthetics of display screen is unaffected.
Above structure based on array substrate, the present embodiment also provide a kind of preparation method of array substrate, comprising: Viewing area prepares to form transistor;Further include: it prepares to form gas detector in non-display area;The heating layer of gas detector with The grid of transistor is formed simultaneously using same patterning processes;The first electrode and second electrode of gas detector and transistor Source-drain electrode is formed simultaneously using same patterning processes.
The preparation method of the array substrate can make gas detector without being directly installed on inside portable display apparatus, no It reduced by only installation cost, and reduce the preparation cost for being integrated with the display device of gas detector.
Preparation forms the transistor and preparation formed the gas detector include: as shown in fig. 5-10,
S101: the figure including heating layer 41 and grid 21 is formed on substrate 5, as shown in Figure 5.
In the step, the figure to form grid 21 and heating layer 41, conventional patterning processes are prepared using conventional patterning processes Include the steps that film deposition, photoresist coating, exposure, development, etching, is the fabricating technology of comparative maturity, specifically not It repeats again.
S102: the figure of the gate insulation layer 23 of transistor is formed;Gate insulation layer 23 extends to non-display area 3, such as Fig. 6 institute Show.
In the step, gate insulation layer 23 prepares to be formed using SiO or AlO material, conventional patterning processes, specifically no longer superfluous It states.
S103: the figure of the active layer 24 including transistor is formed, as shown in Figure 7.
In the step, active layer 24 prepares to be formed using conventional patterning processes, specifically repeats no more.
S104: the figure including first electrode 42, second electrode 43 and source-drain electrode 22 is formed, as shown in Figure 8.
In the step, prepare to form first electrode 42, second electrode 43 and source-drain electrode 22 using conventional patterning processes, specifically It repeats no more.
S105: the figure of the passivation layer 25 of transistor is formed;Passivation layer is removed in non-display area 3, so that first electrode 42 It is contacted with second electrode 43 with the gas sensitization layer 44 of gas detector, as shown in Figure 9.
In the step, passivation layer 25 is formed using conventional patterning processes, and details are not described herein again.First electrode 42 and the second electricity Pole 43 is in contact with gas sensitization layer 44, can the resistance variations to gas sensitization layer 44 accurately sensed, to realize Detection of the gas detector to tested gas.
S106: the figure of gas sensitization layer 44 is formed, as shown in Figure 10.
In the step, the figure of gas sensitization layer 44 is formed using physical vaporous deposition.Such as deposited using magnetron sputtering Method prepare to form gas sensitization layer 44, in magnetron sputtering deposition process, by the target and tin oxide of platinum or palladium, iron oxide Or the target of zinc oxide is all set on target base station, when sputtering, base station rotation makes the target of platinum or palladium and tin oxide, oxidation The target alternating sputtering of iron or zinc oxide deposition, to form 44 film of gas sensitization layer, to realize tin oxide, iron oxide or oxidation The addition of platinum or palladium in Zinc material.Physical vaporous deposition is the technology of comparative maturity, is specifically repeated no more.
Embodiment 1-2's the utility model has the advantages that array substrate provided by embodiment 1-2, by the way that gas detector setting exists The non-display area of array substrate can be realized gas detector being integrated in portable display apparatus (such as mobile phone) inside, thus Carry gas detector more convenient;By make gas detector heating layer and transistor grid same layer setting and Using identical material, and make gas detector first electrode and second electrode and the source-drain electrode same layer of transistor setting and use Identical material enables the part-structure of gas detector and certain film layers of transistor to prepare simultaneously using same process, thus Make gas detector without being directly installed on inside portable display apparatus, not only reduces installation cost, and reduce collection At the preparation cost for the display device for having gas detector.
Embodiment 3:
The present embodiment provides a kind of display panels, including the array substrate in embodiment 1 or 2.
By using the array substrate in embodiment 1 or 2, it can be realized the display panel and be integrated in gas detector Inside it, so that it is more convenient to carry gas detector;Also make gas detector aobvious without being directly installed on this simultaneously Show panel itself, not only reduce installation cost, and reduces being prepared into for the display panel for being integrated with gas detector This.
Display device provided by the present invention can for oled panel, OLED TV, LCD panel, LCD TV, display, Any products or components having a display function such as mobile phone, navigator.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses Mode, however the present invention is not limited thereto.For those skilled in the art, essence of the invention is not being departed from In the case where mind and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.

Claims (10)

1. a kind of array substrate, the transistor including viewing area is arranged in, which is characterized in that further include that non-display area is arranged in Gas detector, the gas detector include heating layer, first electrode, second electrode and gas sensitive layer, the heating layer Material identical as the setting of the grid same layer of the transistor and use, for heating the gas sensitization layer;The first electrode Material identical as the setting of the source-drain electrode same layer of the transistor and use with the second electrode.
2. array substrate according to claim 1, which is characterized in that the array substrate further includes substrate, the crystal The gate insulation layer of pipe extends to the non-display area;
The first electrode, the gate insulation layer, the second electrode and the gas sensitization layer are in the side far from the substrate It sets gradually upwards.
3. array substrate according to claim 1, which is characterized in that the first electrode and the second electrode constitute fork Refer to electrode.
4. array substrate according to claim 3, which is characterized in that the interdigital electrode it is adjacent it is interdigital between clearance gap It is 3-10 μm from range, the interdigital width range of the interdigital electrode is 5-20 μm, and the thickness range of the interdigital electrode is 100-350nm。
5. array substrate according to claim 1, which is characterized in that the material of the heating layer include silver, copper, aluminium, molybdenum, Any one in tungsten, magnesium;The material of the gas sensitization layer includes tin oxide, iron oxide, zinc oxide added with platinum or palladium In any one.
6. array substrate described in -5 any one according to claim 1, which is characterized in that the gas detector be it is multiple, Multiple gas detectors are arranged in array.
7. a kind of display panel, which is characterized in that including array substrate as claimed in any one of claims 1 to 6.
8. a kind of preparation method of array substrate as claimed in any one of claims 1 to 6, comprising: prepare to be formed in viewing area Transistor;It is characterized by further comprising: preparing to form gas detector in non-display area;The heating layer of the gas detector It is formed simultaneously with the grid of the transistor using same patterning processes;The first electrode and second electrode of the gas detector It is formed simultaneously with the source-drain electrode of the transistor using same patterning processes.
9. the preparation method of array substrate according to claim 7, which is characterized in that the array substrate is claim Array substrate described in 1-2 any one, preparation forms the transistor and preparation forms the gas detector and includes:
The figure including the heating layer and the grid is formed on the substrate;
Form the figure of the gate insulation layer of the transistor;The gate insulation layer extends to the non-display area;
Form the figure of the active layer including the transistor;
Form the figure including the first electrode, the second electrode and the source-drain electrode;
Form the figure of the passivation layer of the transistor;The passivation layer is removed in the non-display area, so that first electricity Pole and the second electrode are contacted with the gas sensitization layer of the gas detector;
Form the figure of the gas sensitization layer.
10. preparation method according to claim 9, which is characterized in that the gas for forming the gas detector is quick Sense layer figure include:
The figure of the gas sensitization layer is formed using physical vaporous deposition.
CN201811088504.8A 2018-09-18 2018-09-18 A kind of array substrate and preparation method thereof and display panel Pending CN109244114A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113206124A (en) * 2020-02-03 2021-08-03 京东方科技集团股份有限公司 Display panel and display device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030049856A1 (en) * 2000-08-31 2003-03-13 Micron Technology, Inc. Detection devices, methods and systems for gas phase materials
CN102778479A (en) * 2011-05-09 2012-11-14 中国科学院微电子研究所 Integratable amorphous metal oxide semiconductor gas sensor
CN104122320A (en) * 2014-07-11 2014-10-29 京东方科技集团股份有限公司 A gas detection sensing device, a display panel and a display device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030049856A1 (en) * 2000-08-31 2003-03-13 Micron Technology, Inc. Detection devices, methods and systems for gas phase materials
CN102778479A (en) * 2011-05-09 2012-11-14 中国科学院微电子研究所 Integratable amorphous metal oxide semiconductor gas sensor
CN104122320A (en) * 2014-07-11 2014-10-29 京东方科技集团股份有限公司 A gas detection sensing device, a display panel and a display device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113206124A (en) * 2020-02-03 2021-08-03 京东方科技集团股份有限公司 Display panel and display device

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