CN109243966B - Tripolar velocity imager for detecting electron, ion and neutral free radical - Google Patents
Tripolar velocity imager for detecting electron, ion and neutral free radical Download PDFInfo
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- CN109243966B CN109243966B CN201811056409.XA CN201811056409A CN109243966B CN 109243966 B CN109243966 B CN 109243966B CN 201811056409 A CN201811056409 A CN 201811056409A CN 109243966 B CN109243966 B CN 109243966B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/06—Electron- or ion-optical arrangements
- H01J49/067—Ion lenses, apertures, skimmers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/40—Time-of-flight spectrometers
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Abstract
The invention relates to a tripolar velocity imaging instrument for detecting electrons, ions and neutral free radicals, which is characterized in that: the device comprises a main cavity, a neutral free radical fragment velocity imaging flight tube, an ion velocity imaging flight tube, an electronic velocity imaging flight tube, a laser generator and a light path channel; the main cavity is internally provided with an annular electron gun sample injection device, and the neutral free radical fragment velocity imaging flight tube, the ion velocity imaging flight tube and the electron velocity imaging flight tube are internally provided with an electron lens and an imaging device. The device can separate ions, electrons and neutral radical fragment particles generated after light acts on a substance, collect the speed distribution of the ions, electrons and neutral radical fragment particles and provide complete data for researching the photodynamics of the ion, electrons and neutral radical fragment particles.
Description
Technical Field
The invention relates to the technical field of photoelectric detection, in particular to a tripolar velocity imager for detecting electrons, ions and neutral free radicals.
Background
The idea of studying the spatial distribution of chemical reactions or photolytic products using ion velocity imaging techniques can follow the method described by j. Solomon and r. Bersohn, university of columbia, more than thirty years ago, which are known as "photolytic imaging" (Photolysis mapping). The ion imaging technology developed in the later 80 s of the last century is to project a three-dimensional photolysis scattering process to a two-dimensional plane for imaging, reconstruct three-dimensional spatial intensity distribution of the three-dimensional plane by a mathematical transformation method, and realize the purpose of providing speed information in a three-dimensional space by using two-dimensional images. This technique is based on time of flight mass spectrometry (TOFMS) and is based on ion lens precision design improvement, with a position sensitive microchannel plate (Microchannel Plate, MCP) as detector, followed by a phosphor Screen (photosphere Screen) and CCD (Charge Coupled Device) camera to achieve image acquisition. 1997. The new technology makes a simple and meaningful improvement on the Ion accelerating electrode plate by using a three-stage electrode of Wiley-McLaren to replace a two-stage electrode of a traditional imaging device and using a polar plate with a round hole in the middle to replace a grid mesh, so that an electric field forms an electronic lens similar to optical focusing, namely an Ion lens (Ion lens), and ions with the same speed at different positions in the space distribution of a photolysis zone are focused on the same point. However, when light is applied to a substance, not only charged particles (ions and electrons) but also a large number of radical fragments neutral particles are generated, and the detection of the speeds of these neutral fragments cannot be achieved in the prior art.
Disclosure of Invention
Aiming at the defects in the prior art, the invention provides a tripolar velocity imager for detecting electrons, ions and neutral free radicals, which can simultaneously measure velocity distribution of ion, electrons and neutral free radical fragment particles generated after light and substances act, and provides complete data for researching the photodynamics of the ion, electron and neutral free radical fragment particles.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
tripolar velocity imaging appearance of detection electron, ion and neutral free radical, its characterized in that: the device comprises a main cavity, a neutral free radical fragment velocity imaging flight tube, an ion velocity imaging flight tube, an electronic velocity imaging flight tube, a laser generator and a light path channel;
the device comprises a main cavity, wherein one end of the main cavity is embedded with an annular electron gun sample injection device, the other end of the main cavity is provided with a neutral free radical fragment velocity imaging flight tube, a laser beam action area is arranged in the main cavity, a sample injection small hole is arranged between the annular electron gun sample injection device and the laser beam action area, an electron lens is arranged between the annular electron gun sample injection device and the sample injection small hole, the annular electron gun sample injection device, the electron lens and the sample injection small hole are coaxial, and the annular electron gun sample injection device comprises an electron gun and a sample injection device;
a neutral radical fragment lens group is arranged in one end, close to the laser beam action area, of the neutral radical fragment speed imaging flight tube, and a micro-channel plate detector and a neutral radical fragment speed imaging CCD detector for detecting the neutral radical fragment speed are sequentially arranged in one end, far away from the laser beam action area, of the neutral radical fragment speed imaging flight tube;
the ion velocity imaging flight tube and the electronic velocity imaging flight tube are respectively arranged at two sides of the laser beam action area, an ion lens group is arranged in one end, close to the laser beam action area, of the ion velocity imaging flight tube, and an ion velocity detector and an ion velocity imaging CCD detector are sequentially arranged in one end, far away from the laser beam action area, of the ion velocity imaging flight tube; an electronic lens group is arranged in one end, close to the laser beam action area, of the electronic speed imaging flight tube, and an electronic speed detector and an electronic speed imaging CCD detector are sequentially arranged in one end, far away from the laser beam action area, of the electronic speed imaging flight tube; the side walls of the ion velocity imaging flight tube and the electronic velocity imaging flight tube are connected with a vacuum molecular pump;
the laser generator is arranged outside the laser beam action area, and the light path of the laser generated by the laser generator passes through the laser beam action area.
The electron gun in the annular electron gun sample injection device is an annular electron gun, the sample injection device is an ultrasonic molecular beam injection device, and the injection port of the ultrasonic molecular beam injection device is arranged at the central position of the annular electron gun.
The laser generated by the laser generator passes through the light path channel, the laser beam action area is arranged in the light path channel, and the front quartz window and the rear quartz window are respectively arranged at the two ends of the light path channel.
The ion lens group constitute by electrode plate E1, E2, E3, E4, the adjacent distance between electrode plate E1, E2, E3 equals, the laser beam action zone set up between electrode plate E3, E4, electrode plate E1, E2, E3, E4 all open the electrode plate that has the round hole in the middle, electrode plate E1, E2, E3 and the distance between the laser beam action zone decrement in proper order, electrode plate E1, E2, E3 on all apply negative voltage, electrode plate E4 on all apply positive voltage, and electrode plate E1, E2, the voltage on the E3 increases in proper order, the inside of ion velocity imaging flight tube be provided with ion flight tube wall E7, the voltage that applys on the ion flight tube wall E7 is the same with E1.
The electron lens group comprises electrode plates E3, E4, E5 and E6, the adjacent distances of the electrode plates E4, E5 and E6 are equal, a laser beam action area is arranged between the electrode plates E3 and E4, the electrode plates E3, E4, E5 and E6 are all electrode plates with round holes in the middle, the distances between the electrode plates E4, E5 and E6 and the laser beam action area are sequentially increased, positive voltages are applied to the electrode plates E4, E5 and E6, negative voltages are applied to the electrode plates E4, E5 and E6, the voltages on the electrode plates E4, E5 and E6 are sequentially increased, an electron flight tube wall E8 is arranged in the electron velocity imaging flight tube, and the voltages applied to the ion flight tube wall E8 are the same as those of E6.
The neutral radical fragment lens group consists of electrode plates E9, E10, E11 and E12, the adjacent distances of the electrode plates E10, E11 and E12 are equal, the laser beam action area is arranged between the electrode plates E9 and E10, the electrode plates E9, E10, E11 and E12 are all electrode plates with round holes in the middle, the distances between the electrode plates E10, E11 and E12 and the laser beam action area are sequentially increased, negative voltages are applied to the electrode plates E9, E10 and E11, the electrode plate E12 is grounded, the voltages on the electrode plates E9, E10 and E11 are sequentially increased, and the electronic flight tube wall E13 and the ion flight tube wall E13 are grounded.
The ion velocity imaging flight tube, the electronic velocity imaging flight tube and the neutral free radical fragment velocity imaging flight tube are all grounded on the outer wall.
The ion velocity imaging flight tube is externally connected with a first vacuum molecular pump and a fourth vacuum molecular pump, the electronic velocity imaging flight tube is externally connected with a second vacuum molecular pump and a third vacuum molecular pump, and the ion velocity imaging flight tube, the electronic velocity imaging flight tube and the neutral free radical fragment velocity imaging flight tube are mutually communicated.
The tripolar velocity imager for detecting electrons, ions and neutral free radicals has the beneficial effects that: the method realizes the simultaneous measurement of the velocity distribution of ion, electron and neutral radical fragment particles generated after the light and the substance act, wherein charged ions and electrons are separated through an electron lens group and an ion lens group applying design voltage after the light and the substance act, and electrons and ions with different kinetic energy and different mass are imaged at two ends of the device through the action of the ion lens formed by a plurality of electrode plates applying different voltages, so that information on the kinetic energy distribution and angle distribution of photoelectrons and photoions is obtained, and is very important in the deep research of the action mechanism of the light and the substance. After the separation of electrons and ions, electron beams are emitted by an electron gun, the electron beams are beaten on the rest neutral fragments to lead the rest neutral fragments to be negatively charged, and as the electron beams are emitted by the electron gun, the mass of the electron beams is very small compared with that of neutral particles, the original speed of the neutral particles cannot be influenced, the negatively charged neutral radical fragments pass through a neutral radical fragment lens group, and finally, the kinetic energy distribution and the angle distribution of the neutral fragments during the generation can be obtained through imaging at the end part of the device.
Drawings
Fig. 1 is a left side view of a three-pole velocity imager of the present invention detecting electrons, ions and neutral radicals.
Fig. 2 is a front view of a three-pole velocity imager of the present invention detecting electrons, ions and neutral radicals.
FIG. 3 is a schematic diagram of the structural position of an electrode plate of the three-pole speed imager for detecting electrons, ions and neutral free radicals.
FIG. 4 is a simulation diagram of an electron and ion vacuum flight tube of a tripolar velocity imager for detecting electrons, ions and neutral radicals according to the present invention.
Fig. 5 is a simulation diagram of a neutral fragment vacuum flight tube of a three-pole velocity imager for detecting electrons, ions and neutral radicals according to the present invention.
FIG. 6 is a graph showing the effect of the potential energy distribution of the electron and ion flight tube of the three-pole speed imager for detecting electron, ion and neutral free radical.
FIG. 7 is a graph showing the effect of the potential energy distribution of a neutral fragment flight tube of the three-pole speed imager for detecting electrons, ions and neutral free radicals.
Reference numerals: 1. a ring-shaped electron gun sample injection device; 2. a focusing lens; 3. a sample injection small hole; 4. a laser beam application region; 5. an ion lens group; 6. an electron lens group; 7. neutral radical fragmentation lens group; 8. an ion velocity detector; 9. an electronic speed detector; 10. a neutral radical fragment velocity detector; 11. an ion velocity imaging flight tube; 12. an electronic velocity imaging flight tube; 13. neutral radical fragment velocity imaging flight tube; 14. an ion velocity imaging CCD detector; 15. an electronic speed imaging CCD detector; 16. a neutral radical fragment velocity imaging CCD detector; 17. a first vacuum molecular pump; 18. a second vacuum molecular pump; 19. a third vacuum molecular pump; 20. a fourth vacuum molecular pump; 21. a main cavity; 22. a laser generator; 23. front quartz window; 24. an optical path channel; 25. and a rear quartz window.
Detailed Description
The invention will now be described in further detail with reference to the accompanying drawings.
As shown in fig. 1, the tripolar velocity imager for detecting electrons, ions and neutral radicals is characterized in that: the device comprises a main cavity 21, a neutral free radical fragment velocity imaging flight tube 13, an ion velocity imaging flight tube 11, an electronic velocity imaging flight tube 12, a laser generator 22 and an optical path channel 24;
the device is characterized in that an annular electron gun sample injection device 1 is embedded at one end of a main cavity 21, a neutral free radical fragment velocity imaging flight tube 13 is arranged at the other end of the main cavity 21, a laser beam action area 4 is arranged in the main cavity 21, a sample injection small hole 3 is arranged between the annular electron gun sample injection device 1 and the laser beam action area 4, an electron lens 2 is arranged between the annular electron gun sample injection device 1 and the sample injection small hole 3, the annular electron gun sample injection device 1, the electron lens 2 and the sample injection small hole 3 are coaxial, and the annular electron gun sample injection device 1 comprises an electron gun and a sample injection device;
a neutral radical fragment lens group 7 is arranged in one end of the neutral radical fragment speed imaging flight tube 13, which is close to the laser beam action area 4, and a micro-channel plate detector 10 and a neutral radical fragment speed imaging CCD detector 16 for the neutral radical fragment speed are sequentially arranged in one end of the neutral radical fragment speed imaging flight tube 13, which is far from the laser beam action area 4;
the two sides of the laser beam action area 4 are respectively provided with an ion speed imaging flight tube 11 and an electronic speed imaging flight tube 12, an ion lens group 5 is arranged in one end of the ion speed imaging flight tube 11, which is close to the laser beam action area 4, and an ion speed detector 8 and an ion speed imaging CCD detector 14 are sequentially arranged in one end of the ion speed imaging flight tube 11, which is far away from the laser beam action area 4; an electronic lens group 6 is arranged in one end of the electronic speed imaging flight tube 12, which is close to the laser beam action area 4, and an electronic speed detector 9 and an electronic speed imaging CCD detector 15 are sequentially arranged in one end of the electronic speed imaging flight tube 12, which is far away from the laser beam action area 4; the side walls of the ion velocity imaging flight tube 11 and the electron velocity imaging flight tube 12 are connected with a vacuum molecular pump;
the laser generator 22 is arranged outside the laser beam action area 4, and the light path of the laser generated by the laser generator 22 passes through the laser beam action area 4.
In this embodiment, the ion velocity detector 8, the electron velocity detector 9, and the neutral radical fragment velocity detector 10 are all MCP detectors, and the ions, electrons, and neutral radical fragments generate fluorescence in the MCP detectors and are captured and imaged by the corresponding CCD detectors, so that the kinetic energy distribution and the angular distribution during the ion generation can be obtained during the imaging.
In this embodiment, the electron gun in the annular electron gun sample injection device 1 is an annular electron gun, the sample injection device is an ultrasonic molecular beam injection device, and the injection port of the ultrasonic molecular beam injection device is arranged at the central position of the annular electron gun.
The ultrasonic molecular beam injection device injects an atomic beam or a molecular beam source into the laser beam action area 4, and the laser beam and the atomic and molecular beams mutually cross in the laser beam action area 4 to act, so that the atoms or the molecules in the beam can be excited to a specific excited state.
As shown in fig. 2, the laser generated by the laser generator 22 passes through a light path channel 24, the laser beam application area 4 is arranged in the light path channel 24, and two ends of the light path channel 24 are respectively provided with a front quartz window 23 and a rear quartz window 25.
The arrangement of the optical path channel 24 ensures the integrity of the device, providing a basis for implementing a vacuum environment for the region of action. The laser generator 22 is a tunable laser.
As shown in fig. 3, the electron and ion accelerating electrode regions have 10 open loop charged plates and 2 flight tubes, wherein E1, E2, E3, E4 act on positively charged ions; e3, E4, E5 and E6 act on electrons, and E7 and E8 are flight tube walls.
The ion lens group 5 is composed of electrode plates E1, E2, E3 and E4, the adjacent distances of the electrode plates E1, E2 and E3 are equal, the laser beam action area 4 is arranged between the electrode plates E3 and E4, the electrode plates E1, E2, E3 and E4 are all electrode plates with round holes in the middle, the distances between the electrode plates E1, E2 and E3 and the laser beam action area 4 are sequentially decreased, negative voltages are applied to the electrode plates E1, E2 and E3, positive voltages are applied to the electrode plates E4, the voltages on the electrode plates E1, E2 and E3 are sequentially increased, the ion velocity imaging flight tube 11 is internally provided with an ion flight tube wall E7, and the voltages applied to the ion velocity imaging flight tube wall E7 are identical to those of E1.
The electron lens group 6 comprises electrode plates E3, E4, E5 and E6, the adjacent distances of the electrode plates E4, E5 and E6 are equal, the laser beam action area 4 is arranged between the electrode plates E3 and E4, the electrode plates E3, E4, E5 and E6 are all electrode plates with round holes in the middle, the distances between the electrode plates E4, E5 and E6 and the laser beam action area 4 are sequentially increased, positive voltages are applied to the electrode plates E4, E5 and E6, negative voltages are applied to the electrode plates E4, the voltages on the electrode plates E4, E5 and E6 are sequentially increased, the electron velocity imaging flight tube 12 is internally provided with an electron flight tube wall E8, and the voltages applied to the ion flight tube wall E8 are the same as those of E6.
In the embodiment, the whole lengths of the electronic and ionic flight tubes E7 and E8 are 2000mm,6 polar plates E1, E2, E3, E4, E5 and E6 are round polar plates with round holes, the thickness is 3mm, and the distance between the adjacent six polar plates is 60mm; the design voltage is E1-3000V, E2-1500V, E3-315V, E4 175V, E5-1500V, E6-3000V, E7 and E8 respectively take-3000V and 3000V, after the design voltage is applied, electrons and ions respectively enter the flight tubes of the two under the action of an electric field, fluorescence generated on the MCP detector is captured and imaged by the CCD.
As shown in fig. 3, the neutral radical fragment accelerating electrode zone has 4 open loop charged plates and 1 flight tube, wherein E9, E10, E11, E12 act on the neutral radical fragments and E13 is the flight tube wall.
The neutral radical fragment lens group 7 consists of electrode plates E9, E10, E11 and E12, the adjacent distances of the electrode plates E10, E11 and E12 are equal, the laser beam action area 4 is arranged between the electrode plates E9 and E10, the electrode plates E9, E10, E11 and E12 are all electrode plates with round holes in the middle, the distances between the electrode plates E10, E11 and E12 and the laser beam action area 4 are sequentially increased, negative voltages are applied to the electrode plates E9, E10 and E11, the electrode plate E12 is grounded, the voltages on the electrode plates E9, E10 and E11 are sequentially increased, and the electronic flight tube wall E13 is arranged in the neutral radical fragment velocity imaging flight tube 13 and is grounded.
In the embodiment, the whole length of the neutral fragment flying tube E13 is 800mm,4 electrode plates E9, E10, E11 and E12 are round electrode plates with round holes, the thickness is 3mm, the distance between the adjacent three electrode plates is 60mm, and the distance between the third electrode plate and the fourth electrode plate is 80mm. The design voltage is E9 to 2000V, E10 to 1500V, E11 to 1500V, E12 and E13 are grounded, neutral free radical fragments fly into E13 under the action of the neutral free radical fragment lens group 7, and fluorescence generated on the MCP detector is captured and imaged by the CCD.
In this embodiment, after electrons and ions enter the flight tubes of the two respectively under the action of an electric field and imaging is achieved, the voltage of the electrode plates E1-E6 and the flight tubes E7 and E8 is reduced to 0, voltages are applied to the electrode plates E9, E10, E11 and E12 acting on neutral free radical fragments, the annular electron gun emits electron beams, the electron beams are beaten on the rest neutral fragments through the electron lens 2 to enable the rest neutral fragments to be negatively charged, and the mass of the electron beams emitted by the electron gun is very small compared with that of neutral particles, so that the original speed of the neutral particles is not affected.
In this embodiment, the outer walls of the ion velocity imaging flight tube 11, the electron velocity imaging flight tube 12 and the neutral radical fragment velocity imaging flight tube 13 are all grounded.
In this embodiment, the side wall of the ion velocity imaging flight tube 11 is externally connected with a first vacuum molecular pump 17 and a fourth vacuum molecular pump 20, the side wall of the electronic velocity imaging flight tube 12 is externally connected with a second vacuum molecular pump 18 and a third vacuum molecular pump 19, and the ion velocity imaging flight tube 11, the electronic velocity imaging flight tube 12 and the neutral radical fragment velocity imaging flight tube 13 are mutually communicated.
As shown in fig. 6, the electric potential energy distribution diagram formed by the ion lens group 5 and the electron lens group 6 can intuitively show that the electric potential energy can realize a focusing effect on electrons or ions with different speeds and masses.
As shown in fig. 7, the electric potential energy distribution diagram formed by the neutral radical fragment lens group 7 can also affect negatively charged neutral radical fragments, separate neutral radical fragments with different speeds, and focus neutral radical fragments with the same speed.
As shown in fig. 4, through simulation, a substance to be tested passes through a sample inlet, 3 groups of electrons and 3 groups of charged positive ions are generated under the action of laser in a laser action area, the charged positive ions are respectively positioned at a 0 point and a positive and negative 20mm position in a y-axis direction, the ion speeds are respectively 0 eV and 3 eV, the flying directions are two groups of positive y-axis directions, the x-axis directions and negative y-axis directions, and under the combined action of the ion lens group 5 and the electron lens group 6, focusing is realized on all electrons and ions which are positioned at different positions and have the same speed.
As shown in fig. 5, through simulation, 3 groups of neutral particles are negatively charged after the action of the annular electron gun, and are respectively positioned at 0 point and plus or minus 20mm in the y-axis direction, the speeds of negatively charged neutral radical fragments are respectively 0 eV and 3 eV, the flying directions are two groups of y-axis positive directions, the x-axis direction and the y-axis negative directions, and under the action of the neutral radical fragment lens group 7, focusing is realized on all neutral radical fragments which are positioned at different positions and have the same speed.
It should be noted that the terms like "upper", "lower", "left", "right", "front", "rear", and the like are also used for descriptive purposes only and are not intended to limit the scope of the invention in which the invention may be practiced, but rather the relative relationship of the terms may be altered or modified without materially altering the teachings of the invention.
The above is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the invention without departing from the principles thereof are intended to be within the scope of the invention as set forth in the following claims.
Claims (6)
1. Tripolar velocity imaging appearance of detection electron, ion and neutral free radical, its characterized in that: the device comprises a main cavity (21), a neutral free radical fragment velocity imaging flight tube (13), an ion velocity imaging flight tube (11), an electronic velocity imaging flight tube (12), a laser generator (22) and an optical path channel (24);
an annular electron gun sample injection device (1) is inlaid at one end of the main cavity (21), a neutral free radical fragment velocity imaging flight tube (13) is arranged at the other end of the main cavity, a laser beam action area (4) is arranged in the main cavity (21), a sample injection small hole (3) is formed between the annular electron gun sample injection device (1) and the laser beam action area (4), an electron lens (2) is arranged between the annular electron gun sample injection device (1) and the sample injection small hole (3), the annular electron gun sample injection device (1), the electron lens (2) and the sample injection small hole (3) are coaxial, and the annular electron gun sample injection device (1) comprises an electron gun and a sample injection device;
a neutral free radical fragment speed imaging flight tube (13) is internally provided with a neutral free radical fragment lens group (7) at one end, close to the laser beam action area (4), of the neutral free radical fragment speed imaging flight tube (13), and a micro-channel plate detector (10) and a neutral free radical fragment speed imaging CCD detector (16) for neutral free radical fragment speed are sequentially arranged at one end, far from the laser beam action area (4);
the ion speed imaging flight tube (11) and the electron speed imaging flight tube (12) are respectively arranged at two sides of the laser beam action area (4), an ion lens group (5) is arranged in one end, close to the laser beam action area (4), of the ion speed imaging flight tube (11), and an ion speed microchannel plate detector (8) and an ion speed imaging CCD detector (14) are sequentially arranged in one end, far away from the laser beam action area (4), of the ion speed imaging flight tube (11); an electron lens group (6) is arranged in one end, close to the laser beam action area (4), of the electron velocity imaging flight tube (12), and an electron velocity microchannel plate detector (9) and an electron velocity imaging CCD detector (15) are sequentially arranged in one end, far away from the laser beam action area (4), of the electron velocity imaging flight tube (12); the side walls of the ion velocity imaging flight tube (11) and the electron velocity imaging flight tube (12) are connected with a vacuum molecular pump;
the outside of the laser beam action area (4) is provided with a laser generator (22), and the light path of the laser generated by the laser generator (22) passes through the laser beam action area (4);
the electron gun in the annular electron gun sample injection device (1) is an annular electron gun, the sample injection device is an ultrasonic molecular beam injection device, and an injection port of the ultrasonic molecular beam injection device is arranged at the central position of the annular electron gun;
the laser generated by the laser generator (22) passes through the light path channel (24), the laser beam action area (4) is arranged in the light path channel (24), and the front quartz window piece (23) and the rear quartz window piece (25) are respectively arranged at the two ends of the light path channel (24).
2. A tripolar velocity imager for detecting electrons, ions and neutral radicals according to claim 1, wherein: the ion lens group (5) is composed of electrode plates E1, E2, E3 and E4, the adjacent distances of the electrode plates E1, E2 and E3 are equal, the laser beam action area (4) is arranged between the electrode plates E3 and E4, the electrode plates E1, E2, E3 and E4 are all electrode plates with round holes in the middle, the distances between the electrode plates E1, E2 and E3 and the laser beam action area (4) are sequentially decreased, negative voltages are applied to the electrode plates E1, E2 and E3, positive voltages are applied to the electrode plate E4, the voltages on the electrode plates E1, E2 and E3 are sequentially increased, and the ion velocity imaging flight tube (11) is internally provided with an ion flight tube wall E7, wherein the voltages applied to the ion flight tube wall E7 are identical to the voltages applied to E1.
3. A tripolar velocity imager for detecting electrons, ions and neutral radicals according to claim 2, wherein: the electron lens group (6) is composed of electrode plates E3, E4, E5 and E6, the adjacent distances of the electrode plates E4, E5 and E6 are equal, the laser beam action area (4) is arranged between the electrode plates E3 and E4, the electrode plates E3, E4, E5 and E6 are all electrode plates with round holes in the middle, the distances between the electrode plates E4, E5 and E6 and the laser beam action area (4) are sequentially increased, positive voltages are applied to the electrode plates E4, E5 and E6, negative voltages are applied to the electrode plates E4, the voltages on the electrode plates E4, E5 and E6 are sequentially increased, and the electronic speed imaging flight tube (12) is internally provided with an electronic flight tube wall E8, and the voltages applied to the ion flight tube wall E8 are the same as those of E6.
4. A tripolar velocity imager for detecting electrons, ions and neutral radicals as claimed in claim 3, wherein: the neutral free radical fragment lens group (7) consists of electrode plates E9, E10, E11 and E12, the adjacent distances of the electrode plates E10, E11 and E12 are equal, the laser beam action area (4) is arranged between the electrode plates E9 and E10, the electrode plates E9, E10, E11 and E12 are all electrode plates with round holes in the middle, the distances between the electrode plates E10, E11 and E12 and the laser beam action area (4) are sequentially increased, negative voltages are applied to the electrode plates E9, E10 and E11, the electrode plate E12 is grounded, the voltages on the electrode plates E9, E10 and E11 are sequentially increased, and the neutral free radical fragment velocity imaging flight tube (13) is internally provided with an electronic flight tube wall E13 and an ion flight tube wall E13 is grounded.
5. A tripolar velocity imager for detecting electrons, ions and neutral radicals according to claim 4, wherein: the outer walls of the ion velocity imaging flight tube (11), the electron velocity imaging flight tube (12) and the neutral free radical fragment velocity imaging flight tube (13) are grounded.
6. A tripolar velocity imager for detecting electrons, ions and neutral radicals according to claim 5, wherein: the ion velocity imaging flight tube (11) is externally connected with a first vacuum molecular pump (17) and a fourth vacuum molecular pump (20), the side wall of the electron velocity imaging flight tube (12) is externally connected with a second vacuum molecular pump (18) and a third vacuum molecular pump (19), and the ion velocity imaging flight tube (11), the electron velocity imaging flight tube (12) and the neutral free radical fragment velocity imaging flight tube (13) are mutually communicated.
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| CN111739785B (en) * | 2020-06-30 | 2023-08-01 | 中国科学院上海应用物理研究所 | Dual ion source slow electron speed imaging device |
| CN112526585A (en) * | 2020-11-02 | 2021-03-19 | 中国科学院国家空间科学中心 | Detector and detection method for in-situ measurement of track neutral gas particle velocity |
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