CN109239993A - A kind of liquid crystal optical switch for optical phased array scanning - Google Patents

A kind of liquid crystal optical switch for optical phased array scanning Download PDF

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Publication number
CN109239993A
CN109239993A CN201811214884.5A CN201811214884A CN109239993A CN 109239993 A CN109239993 A CN 109239993A CN 201811214884 A CN201811214884 A CN 201811214884A CN 109239993 A CN109239993 A CN 109239993A
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liquid crystal
electrode
row
column
layer
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CN109239993B (en
Inventor
陈建明
王成凤
白磊
郭香静
赵明明
王为术
陈嘉琦
郏方
郏一方
袁瑞
李琛
时铭慧
张盼盼
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North China University of Water Resources and Electric Power
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North China University of Water Resources and Electric Power
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1313Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133528Polarisers
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/133711Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by organic films, e.g. polymeric films
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • G02F1/13378Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
    • G02F1/133784Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by rubbing
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1347Arrangement of liquid crystal layers or cells in which the final condition of one light beam is achieved by the addition of the effects of two or more layers or cells

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mathematical Physics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Geometry (AREA)
  • Liquid Crystal (AREA)

Abstract

The invention discloses a kind of liquid crystal optical switches and assembly production method for optical phased array scanning, it is made of the first layer liquid crystal board and second layer liquid crystal board being arranged above and below, the upper surface of first layer liquid crystal board is successively arranged in parallel with the first orientation film of row, row scan electrode, upper glass plate and upper polarizer, and the second orientation film, row signal electrode and intermediate glass plates are successively arranged in parallel with below first layer liquid crystal board;Third orientation film and column scan electrode is successively arranged in parallel in the upper surface of second layer liquid crystal board, and the 4th orientation film, column signal electrode, lower glass plates and lower polarizing film are successively arranged in parallel with below second layer liquid crystal board.The photoswitch face array individually controllable with unit is made in double-layer structure of the present invention, phase-modulation is carried out to by the light beam of unit switch by " logical " of unit switch, " disconnected " control, match with grating array and scan drive circuit and is combined into the laser array scanning means with optical phased array function, it can be achieved that orientation, pitching scanning and deep focus.

Description

A kind of liquid crystal optical switch for optical phased array scanning
Technical field
The present invention relates to optical phased array technical field more particularly to a kind of liquid crystal for optical phased array scan control Photoswitch and assembly production method.
Background technique
Currently, artificial intelligence technology is fast-developing, the application neck such as target acquisition, weapon guidance, unmanned, automatic obstacle avoiding There is an urgent need to a kind of quick, accurate, comprehensive target detection techniques in domain.Radar is most common detection means, with traditional machine The radar of tool scanning technique is compared, and phase-array scanning technology is arranged in antenna array using the small size antenna unit of a large amount of independent controls Face, each antenna element are controlled by independent phase switcher, by controlling the phase of each antenna element transmitting, can be synthesized not Same-phase wave beam.Based on the inspiration of phase controlling Electronically Scanned Array radar, swashed using the solid-state of optical phased array scanning technique Optical radar becomes research hotspot due to its broad application prospect.It is different from mechanical scanning laser radar, due to not needing to rotate Component can greatly reduce the structure snd size of radar, improve service life, and reduce cost;Without being limited by mechanical rotation Speed and precision, the scanning speed of optical phased array depends on the electronics property of material therefor, can generally reach MHz Magnitude;The scanning accuracy of optical phased array depends on the precision of control electric signal, can achieve one thousandth measurement level or more;Light The light beam direction for learning phased array is controlled by electric signal completely, can accomplish any direction, Ke Yi in the angular range of permission Key area carries out highdensity scanning;One phased front can be divided into multiple little modules, and each module is separately controlled i.e. The multiple targets of monitoring can be locked simultaneously.But solid-state laser radar also has the shortcomings that it is corresponding, and optical grating diffraction is other than central bright fringe It also will form other bright lines, this problem can allow laser to form secondary lobe, the energy of dispersion laser other than maximum power direction;It is special It is not that optical phased array requirement array cell sizes must be no more than half wavelength, the operation wavelength of general current laser radar is equal In 1 microns, therefore the size of array element must be not more than 500nm.And array density is higher, and energy is also more concentrated, this The requirement to machining accuracy is all improved, certain technological break-through is needed.Therefore, there is an urgent need to one kind independent of limited manufacture The phase modulator of material, technique, structure, low cost, enable using flexible, it is simple, reliably realize beam phase Modulation, with grating array cooperate realize laser irradiation automatically controlled scanning and deep focus control, this product will have non- Normal vast market prospect.
When the liquid crystal optical switch array of existing common single layer structure is applied to picture display, pass through row, column signal gating Several column (or row) units in a line (or column), be then powered off this scan line (or column) and scan adjacent next line (or Column), until completing the scan operation of whole rows (or column), this is a scan period, moves in circles, is prolonged using the vision of human eye When characteristic realize whole picture array display, obviously cannot be used for realize beam phase modulation, can not be used for and grating battle array Column cooperation realizes that the automatically controlled scanning of laser irradiation and deep focus control.
Summary of the invention
The object of the present invention is to provide a kind of liquid crystal optical switch and assembly production method for optical phased array scanning, energy Enough with the individually controllable photoswitch face array of unit, by " logical " of unit switch, " disconnected " control to passing through unit switch Light beam carries out phase-modulation, matches with grating array and scan drive circuit and is combined into the laser array with optical phased array function Scanning means is applied to the occasions such as laser radar, laser ranging, it can be achieved that orientation, pitching scanning, deep focus.
The technical solution adopted by the present invention are as follows:
A kind of liquid crystal optical switch for optical phased array scanning, by the first layer liquid crystal board and second layer liquid crystal being arranged above and below Plate constitute, the upper surface of first layer liquid crystal board be successively arranged in parallel with the first orientation film of row, row scan electrode, upper glass plate and Upper polarizer is successively arranged in parallel with the second orientation film, row signal electrode and intermediate glass plates below first layer liquid crystal board;
The upper surface of second layer liquid crystal board is successively arranged in parallel third orientation film and column scan electrode, below second layer liquid crystal board Successively it is arranged in parallel with the 4th orientation film, column signal electrode, lower glass plates and lower polarizing film;And row scan electrode and row Signal electrode is mutually perpendicular to and covers up and down alignment, and column signal electrode is mutually perpendicular to and covers up and down be aligned with row signal electrode, Column scan electrode is mutually perpendicular to and covers up and down be aligned with column signal electrode;
First orientation film, the second orientation film, third orientation film and the 4th orientation film is by a thin layer height Molecular organic, oriented friction treatment, makes rod shaped liquid crystal molecule be parallel to glass surface, arranges along the direction of directional process, Molecularly oriented and the molecularly oriented of crystal lower surface for making the crystal upper surface of each layer of liquid crystal board are mutually perpendicular to;
The row scan electrode has n, and n row scan electrode is uniformly divided into n1 group, and each group of expert's scan electrode has n2, Then n=n1*n2;Electrode width and interval are distributed in equidimension in group, and every group of width and interval are distributed in equidimension;
The column scan electrode has m, and m column scan electrode is uniformly divided into m1 group, and column scan electrode has m2 in each group, Then m=m1*m2;Electrode width and interval are distributed in equidimension in group, and every group of width and interval are distributed in equidimension;
The n1 group row scan electrode corresponds to n3 row signal electrode, and m1 group column scan electrode corresponds to m3 column signal electrode, Wherein n, n1, n2, m, m1, m2, n3, m3 are positive integer.
The row signal electrode and column signal electrode is connected separately with electrode outlet line, and the electrode outlet line is used for Make row signal electrode and column signal electrode respectively with row scan electrode and column scan electrode connection in the same horizontal plane, convenient for Drive control circuit, which is connected, controls row signal electrode and the energization of column signal electrode.
Each layer structure gabarit is hermetically sealed using epoxy resin between upper polarizer and lower polarizing film.
The polarization direction of upper polarizer is identical as the upper surface molecularly oriented of first layer liquid crystal board crystal, second layer liquid crystal board The upper surface molecularly oriented and first layer liquid crystal board crystal upper surface molecularly oriented keeping parallelism of crystal, the polarization side of lower polarizing film It is consistent to the polarization direction with upper polarizer.
The upper glass plate, middle layer glass plate, lower glass plates are used in transparent glass bottom liner, row scan electrode, Column scan electrode, row signal electrode and column signal electrode are to be made using photoetching and etching technics in glass bottom lining.
It is mutually perpendicular to by driving circuit control first layer liquid crystal board with second layer LC panel surface molecularly oriented or parallel Configuration, the polarization direction in conjunction with upper and lower layer polarizing film is parallel or arranged perpendicular, so as to make liquid crystal optical switch realize normal open respectively Type photoswitch, closed type photoswitch, array working method by member, " logical "/" disconnected " scan pattern or array are complete line by line, by column " logical " and complete " disconnected " operating mode.
Be expert at scanning or column scan operating mode when, setting row signal or all electrodes of column signal is for low level, simultaneously It is in the conductive state to set all units of another layer comprising column scan or row scan electrode, then according to certain time interval sequence It gradually sets row scanning or column scan electrode is high level, so that the first layer liquid crystal board of corresponding unit, second layer liquid crystal board are in electricity Optical transport is no longer distorted and light transmission along axial direction under field action, is gradually opened effect similar to curtain opening and closing process to realize Fruit.
Electrode is attached on glass plate, and row scan electrode, column signal electrode, row signal electrode and column scan electrode belong to respectively In upper and lower, middle layer glass plate, it is made respectively by photoetching and etching manufacture craft integrated molding.
A kind of assembly production method of the liquid crystal optical switch for optical phased array scanning according to claim 1, packet Include following steps:
A: by upper polarizer pressure viscosity in upper glass plate non-electrical pole surface, guarantee that polarizing film polarization direction and row scan electrode are flat Row;
B: being covered with the orientation film of oriented friction treatment in electrode surface, is allowed to clamp down on first layer liquid crystal board upper surface liquid crystal molecule It is parallel to the polarization direction of upper polarizer;
C: the row signal electrode of middle layer glass plate is faced upward and applies the orientation film of oriented friction treatment, column signal electrode surface Downwards and apply the orientation film of oriented friction treatment, it is upper in, between lower glass plate it is mutually vertical full of molecularly oriented Straight twisted-nematic facies pattern liquid crystal;
D: by lower polarizing film pressure viscosity in lower glass plates non-electrical pole surface, guaranteeing that polarizing film polarization direction is parallel with upper polarizer, Be covered with the orientation film of oriented friction treatment in electrode surface, be allowed to clamp down on second layer liquid crystal board lower surface liquid crystal molecule perpendicular to The polarization direction of lower polarizing film;
E: finally, being sealed encapsulation with epoxy resin.
The present invention mainly utilizes the electrooptic effect principle of liquid crystal, and using the double-layer structure of special designing, one layer is gone by laying Scan electrode and row signal electrode control all row on-off, and another layer controls Zhu Lietong by laying column scan electrode and column signal electrode It is disconnected, so that the photoswitch face array individually controllable with unit be made, by " logical " of unit switch, " disconnected " control to passing through list The light beam of member switch carries out phase-modulation, matches with grating array and scan drive circuit and is combined into optical phased array function Laser array scanning means is applied to the fields such as laser radar, laser ranging, it can be achieved that orientation, pitching scanning, deep focus It closes.
Detailed description of the invention
Fig. 1 is application principle schematic diagram of the invention;
Fig. 2 is cross section structure schematic diagram of the invention;
Fig. 3 is the structural schematic diagram of TN type photoswitch of the present invention;
Fig. 4 is 4 × 4 liquid crystal optical switch array schematic diagram of the present invention;
Fig. 5 is conventional monolayers liquid crystal driving schematic diagram of the present invention.
Specific embodiment
As shown in Fig. 1,2,3 and 4, the present invention is by 19 structure of first layer liquid crystal board 18 and second layer liquid crystal board that is arranged above and below At the upper surface of first layer liquid crystal board 18 is successively arranged in parallel with the first orientation film of row 7, row scan electrode 12, upper glass plate 11 and upper polarizer 17, the second orientation film 6,14 and of row signal electrode are successively arranged in parallel with below first layer liquid crystal board 18 Intermediate glass plates 20;Third orientation film 8 and column scan electrode 13 is successively arranged in parallel in the upper surface of second layer liquid crystal board 19, the Successively be arranged in parallel with below two layers of liquid crystal board 19 the 4th orientation film 9, column signal electrode 15, lower glass plates 10 and it is lower partially Shake piece 21;The row signal electrode 14 and column signal electrode 15 is connected separately with electrode outlet line 16, and the electrode is drawn Line 16 for make draw pin lay rationally, facilitate row signal electrode 14 and column signal electrode 15 respectively with row scan electrode 12 and 13 wiring of column scan electrode controls row signal electrode 14 and column letter in the same horizontal plane, convenient for being connected with drive control circuit Number electrode 15 is powered;The row scan electrode 12 has n, and n row scan electrode is uniformly divided into n1 group, each group of expert's scanning Electrode has n2, then n=n1*n2;Electrode width and interval are distributed in equidimension in group, and every group of width and interval are in equidimension point Cloth;
Intermediate glass plates 20 in the present invention are double-face electrode pole plate, i.e. first layer liquid crystal board 18 and 19 plate of second layer liquid crystal shares Glass plate, corresponding electrode can also be processed respectively using two glass plates in actual use and realized, but be obviously not so good as It shares a glass plate and saves cost, corresponding electricity can be arranged simultaneously in two end faces up and down of glass plate in shared glass plate Pole is integrally machined.
The column scan electrode 13 has m, and m column scan electrode is uniformly divided into m1 group, column scan electrode in each group There are m2, then m=m1*m2;Electrode width and interval are distributed in equidimension in group, and every group of width and interval are distributed in equidimension;
N1 group row scan electrode corresponds to n3 row signal electrode, and m1 group column scan electrode corresponds to m3 column signal electrode, wherein n, N1, n2, m, m1, m2, n3, m3 are positive integer.
Row scan electrode 12 is mutually perpendicular to and covers up and down be aligned with row signal electrode 14, column signal electrode 15 and row signal Electrode 14 is mutually perpendicular to and covers up and down alignment, and column scan electrode 13 and column signal electrode 15 are mutually perpendicular to and cover up and down pair Together;I.e. due to for vertical relation, so must will mutually correspond to, i.e., cannot have below the part of row scan electrode 12 not with The part of its corresponding row signal electrode 14, on the contrary there cannot be row not corresponding above the part of row signal electrode 14 to sweep Retouch the part of electrode 12;There are same relationships for column scan electrode 13 and column signal electrode 15, thus constitute double-layer structure photoswitch The Biodiversity Characteristics of control method.
First orientation film 7, the second orientation film 6, third orientation film 8 and the 4th orientation film 9 be by A thin layer macromolecule organic, oriented friction treatment, makes rod shaped liquid crystal molecule be parallel to glass surface, along the side of directional process To arrangement, for making the molecularly oriented of crystal upper surface of each layer of liquid crystal board and the molecularly oriented of crystal lower surface mutually hang down Directly.The orientation of the liquid crystal molecule gradually distorts, and 90 ° have been distorted from liquid crystal upper surface to lower surface, so referred to as twisted-nematic Facies pattern liquid crystal board.The polarization direction of upper polarizer 17 is identical as the upper surface molecularly oriented of 18 crystal of first layer liquid crystal board, and second The upper surface molecularly oriented and 18 crystal upper surface molecularly oriented keeping parallelism of first layer liquid crystal board of layer 19 crystal of liquid crystal board, it is lower inclined The polarization direction of vibration piece 21 and the polarization direction of upper polarizer 17 are consistent.
When all electrodes are in low level, after light beam incidence upper polarizer 17, formed and first by upper polarizer 17 The equally oriented linearly polarized light of layer 18 surface molecular of liquid crystal board, incident first layer liquid crystal board 18, polarization direction is long with liquid crystal molecule Axis is rotated by 90 °, and to project perpendicular to the linearly polarized light of 19 upper surface molecularly oriented of second layer liquid crystal board, therefore light can not be by the Two layers 19 layers of liquid crystal board, i.e. array element is in " disconnected " state;Row scanning and column scan electrode is powered and current potential higher than specific threshold, When corresponding pickup electrode is grounded, after light beam incidence upper polarizer, formed and 18 surface molecular of first layer liquid crystal board by polarizing film Equally oriented linearly polarized light, incident first layer liquid crystal board 18, since the polarization direction of electric field action light is in first layer liquid crystal board It no longer rotates and remains unchanged when being propagated in 18, to be parallel to the linear polarization light emission of 19 upper surface molecularly oriented of second layer liquid crystal board Out, same principle, emergent ray polarization direction original polarization direction is parallel after light passes through 19 layers of second layer liquid crystal board, under can passing through Polarizing film 21 realizes light outgoing, i.e., array element is in " logical " state.
As shown in Figure 1, with optical phase modulator part to be bonded two-dimensional array of optical phased for the double structure grating device Battle array component, after realizing that laser array light source 1 is incident on optical phased array component, by each list for controlling phase modulator 2 Beam phase in member between the phase difference and unit of adjacent beams is poor, so that the phase that light beam exports light wave through device 3 is referring to It is identical on fixed direction, to realize the constructive interference of the direction, that is, the on off delay of liquid crystal optical switch 2 is controlled, to make double The phase of each unit output light of structure fringe device 3 generates destructive interference in other directions, thus by making light after lens 4 Corresponding position of the line focus at targeted scans position 5, and the present invention realizes basic on-off by the structure of TN type photoswitch Control.
The structure of specific TN type photoswitch can refer to Fig. 3.Twisted nematic liquid crystal, liquid are accompanied between two pieces of glass plates The shape of brilliant molecule is cylindrical.Length about 0.1~0.2nm, diameter are 0.4~0.6nm, and thickness of liquid crystal layer is generally 5~8 μ m.By taking single layer structure as an example, the inner surface of glass plate is coated with transparent electrode, and directional process (glass base has been made on the surface of electrode in advance One layer of oriented layer, usually a thin layer macromolecule organic are covered on the inside of plate, oriented friction treatment can make rod shaped liquid crystal point Son is parallel to glass surface, arranges along the direction of directional process).In this way, liquid crystal molecule will lie down on transparent electrode surface Friction is formed by very low power, arranges the liquid crystal molecule of electrode surface in certain direction, and the orientation side on upper/lower electrode To being mutually perpendicular to.Liquid crystal molecule is intended to arranged in parallel because of the effect of Van der Waals for those of between upper/lower electrode.However Since the orientation direction of liquid crystal on upper/lower electrode is mutually perpendicular to, so in terms of overlook direction, the arrangement of liquid crystal molecule is from top electrode Edge -45 spend direction arrangement step by step, equably twist into lower electrode edge+45 spend direction arrange, entirely distorted 90 degree.
Theoretical and experiment all proves that the structure that above-mentioned uniform aligned twisted is got up has the property of optical waveguide, i.e. polarised light When traveling to lower electrode surface through the liquid crystal that aligned twisted is got up from upper electrode surface, polarization direction can be rotated by 90 °.
Two polarizing films are taken to be attached to the two sides of glass, the light transmission shaft of P1 and the orientation direction of top electrode are identical, the light transmission of P2 Axis is identical as the orientation direction of lower electrode, and then the light transmission shaft of P1 and P2 is mutually orthogonal.
In the case where not adding driving voltage, the natural light from light source is only remaining after polarizing film P1 to be parallel to light transmission The linearly polarized light of axis, when which reaches output face, plane of polarization has rotated 90 °.The plane of polarization in this time and P2's is saturating Optical axis is parallel, thus has light to pass through.
In the case where applying enough voltage conditions (generally 1~2 volt), under the attraction of electrostatic field, in addition to the liquid near substrate By other than substrate " anchoring ", other liquid crystal molecules tend to be parallel to direction of an electric field arrangement brilliant molecule.Then original distorted-structure It is destroyed, at homogeneous texture.It no longer rotates, keeps when the polarization direction of the polarised light transmitted from P1 is propagated in liquid crystal Polarization direction originally reaches lower electrode.The polarization direction in this time is orthogonal with P2, thus light is turned off.
Since above-mentioned photoswitch allows light to penetrate in the absence of an electric field, in addition light is turned off when electric field, therefore It is called normal open type photoswitch, is called and does normal white mode.If the light transmission shaft of P1 and P2 is parallel to each other, as shown in figure 3, constituting normally-black Mode, application examples of the present invention use normally black mode.
Each layer structure gabarit is hermetically sealed using epoxy resin 22 between upper polarizer 17 and lower polarizing film 21, makes on the whole Sealing structure.
The upper glass plate 11, middle layer glass plate 20, lower glass plates 10 are using in transparent glass bottom liner, row scanning Electrode 12, column scan electrode 13, row signal electrode 14 and column signal electrode 15 are using photoetching and etching technics in glass bottom lining It is made.Electrode is attached on glass plate, row scan electrode 12, column signal electrode 15, row signal electrode 14 and column scan electricity Pole 13 is belonging respectively to upper and lower, middle layer glass plate, three process links of manufacturing process point, comprising: (1) electrode structure size is set Meter;(2) electrode bottom liner pre-processes;(3) photoetching and etching manufacture craft.Since above-mentioned steps are not inventive points of the invention, such as What be produced on related other technologies content have it is open, so details are not described herein its specific process.
The present invention controls first layer liquid crystal board 18 by driving circuit and 19 surface molecular of second layer liquid crystal board is orientated mutually Perpendicular or parallel configuration, the polarization direction in conjunction with upper and lower layer polarizing film is parallel or arranged perpendicular, so as to make liquid crystal optical switch point Not Shi Xian normal open type photoswitch, closed type photoswitch, array working method by member, line by line, " logical "/" disconnected " scanning mould by column Formula or array complete " logical " and complete " disconnected " operating mode.
Full when disconnected state, upper and lower all electrodes of layer are in low level, and whole array elements are in light blocking state, scanning of being expert at When (or column scan) operating mode, row signal (or column signal) electrode A is set, B, C, D, E ... are waited as low level while being set comprising column All units of another layer of scanning (or row scanning) electrode are in the conductive state, then (corresponding according to certain time interval sequence In phase) gradually set row scanning (or column scan) electrode a, b, c, d, e, f ... wait as high level, so that the first of corresponding unit Layer liquid crystal board 18, the optical transport under electric field action of second layer liquid crystal board 19 are no longer distorted and light transmission along axial direction, realize similar In being gradually opened for curtain opening and closing process.
The double-layer structure is characterized in that first layer liquid crystal board 18,19 surface molecular of second layer liquid crystal board orientation are mutually perpendicular to Or configured in parallel, the polarization direction in conjunction with upper and lower synusia vibration piece is parallel or arranged perpendicular, can form normal open type photoswitch or often Disconnected type photoswitch.
Core devices of the device of the present invention as optical phased array scanning means, gating control mode and common liquid crystals light Switch application matrix display mode is different, below by the scan control mode of both comparisons to show difference.
First by taking common single layer structure liquid crystal optical switch as an example, in order to which picture is succinct, by horizontal stripe shape row electrode and vertical bar Shape column electrode is abstracted as horizontal line and vertical line, respectively represents scan electrode and signal electrode.As shown in figure 5, being intended to show that those are black The operational process of the pixel of color square, traditional photoswitch is to add high level in line a first, remaining row adds low level, together Low level is added on counter electrode c, d of Shi Lie electrode, then those of A row is just revealed with the pixel of square ?;Then line b adds high level, remaining row adds low level, while low electricity is added on counter electrode b, e of column electrode It is flat, thus those of B row is revealed with the pixel of square;It is remaining such followed by line c, line D ... It pushes away, finally shows the image of a whole field, then repeat the above process, move in circles, the mode of this every a line of Time share scanning It is that the common addressing system of flat-panel monitor according to this mode can allow each liquid crystal optical switch according to voltage thereon Amplitude allow ambient light turn off or pass through, to show any text, figure and image.And it is of the present invention a kind of for light The liquid crystal optical switch for learning phase-array scanning is double-layer structure, and when normally off state, upper and lower all electrodes of layer be in low level, whole Array element be in light blocking state, be expert at scanning (or column scan) operating mode when, set row signal (or column signal) electrode A, B, C, D, E ... waits as low level while to set all units of another layer comprising column scan (or row scanning) electrode in the conductive state, so Afterwards according to certain time interval sequence (correspond to phase) gradually set row scanning (or column scan) electrode a, b, c, d, e, f ... etc. For high level so that the first layer liquid crystal board 18 of corresponding unit, second layer liquid crystal board 19 under electric field action optical transport along axial It is no longer distorted and light transmission, realizes and be similar to being gradually opened for curtain opening and closing process.
Basic functional principle of the invention is as follows:
Liquid crystal molecule is the substance in shape, dielectric constant, refractive index and conductivity with anisotropic properties, if to this The substance of sample applies electric field (electric current), and as liquid crystal molecular orientation structure changes, its optical characteristics also changes therewith, this It is exactly the electrooptic effect for the liquid crystal usually said.The electrooptic effect of liquid crystal is many kinds of, mainly have dynamic scattering mode (DS), distort to Column facies pattern (TN), super twisted nematic facies pattern (STN), active matrix liquid crystal show (TFT), electrically conerolled birefringence (ECB) etc..The present invention A kind of liquid crystal optical switch for optical phased array scanning is made using twisted-nematic facies pattern (TN) liquid crystal.
Preferred embodiments of the invention will be described in detail below;Preferred embodiments be should be appreciated that only for saying The bright present invention, rather than limiting the scope of protection of the present invention.
Embodiment is as shown in figure 4, by taking 4 × 4 arrays as an example, and array element is having a size of 2mm × 2mm, array element interval 2mm, this law tool Body implements production method, and steps are as follows:
(1) vitreous electricity pole plate designs and produces
1. electrode structure and size design.
Row scan electrode shape and size: rectangle strip shaped electric poles, totally 4 groups (n1=4), interblock space 2mm.Every group 10 Electrode (n2=10), 100 μm of electric pole spacing.40 (n=40) total, every strip electrode size length × width x thickness is the μ of 14mm × 100 m×150nm。
Row signal electrode shape and size: rectangle strip shaped electric poles 4 (n3=4), 2mm, every strip electrode size are spaced between item Length × width x thickness is 14mm × 2mm × 150nm.
Column scan electrode shape and size: rectangle strip shaped electric poles, totally 4 groups (m1=4), interblock space 2mm.Every group 10 Electrode (m2=10), 100 μm of electric pole spacing.40 (m=40) total, every strip electrode size length × width x thickness is the μ of 14mm × 100 m×150nm。
Column signal electrode shape and size: rectangle strip shaped electric poles 4 (m3=4), 2mm, every strip electrode size are spaced between item Length × width x thickness is 14mm × 2mm × 150nm.
Electrode outlet line design: electrode outlet line is as shown in Figure 4.
Glass plate shape and size: square, shape and size length × width x thickness are 18.5mm × 18.5mm × 0.5mm.
2. electrode bottom liner pre-processes.
It is cut using optics K9 glass, polishing treatment, single or double applies indium tin oxide transparent conductive layer, thickness 150nm。
3. photoetching and etching manufacture craft.
Vitreous electricity pole plate is made using photoetching and lithography means referring to IC chip fabrication processing.
(2) device assembly and encapsulation, a kind of assembly method of the liquid crystal optical switch for optical phased array scanning, including such as Lower step:
A: by upper polarizer pressure viscosity in upper glass plate non-electrical pole surface, guarantee that polarizing film polarization direction and row scan electrode are flat Row;
B: being covered with the orientation film of oriented friction treatment in electrode surface, is allowed to clamp down on 18 upper surface liquid crystal of first layer liquid crystal board point Son is parallel to the polarization direction of upper polarizer;
C: the row signal electrode of middle layer glass plate is faced upward and applies the orientation film of oriented friction treatment, column signal electrode surface Downwards and apply the orientation film of oriented friction treatment, it is upper in, between lower glass plate it is mutually vertical full of molecularly oriented Straight twisted-nematic facies pattern liquid crystal;
D: by lower polarizing film pressure viscosity in lower glass plates non-electrical pole surface, guaranteeing that polarizing film polarization direction is parallel with upper polarizer, It is covered with the orientation film of oriented friction treatment in electrode surface, is allowed to clamp down on 19 lower surface liquid crystal molecule of second layer liquid crystal board vertical In the polarization direction of lower polarizing film;
E: finally, being sealed encapsulation with epoxy resin.
(3) testing performance index and calibration
Function, parameter index, the calibration etc. for testing device propose the specific requirement etc. of application, including dynamic response characteristic, frequency spectrum The parameters such as characteristic, precision index, minimum resolution.

Claims (9)

1. a kind of liquid crystal optical switch for optical phased array scanning, it is characterised in that: by the first layer liquid crystal board being arranged above and below With second layer liquid crystal board constitute, the upper surface of first layer liquid crystal board be successively arranged in parallel with the first orientation film of row, row scan electrode, Upper glass plate and upper polarizer are successively arranged in parallel with the second orientation film, row signal electrode below first layer liquid crystal board And intermediate glass plates;
The upper surface of second layer liquid crystal board is successively arranged in parallel third orientation film and column scan electrode, below second layer liquid crystal board Successively it is arranged in parallel with the 4th orientation film, column signal electrode, lower glass plates and lower polarizing film;And row scan electrode and row Signal electrode is mutually perpendicular to and covers up and down alignment, and column signal electrode is mutually perpendicular to and covers up and down be aligned with row signal electrode, Column scan electrode is mutually perpendicular to and covers up and down be aligned with column signal electrode;
First orientation film, the second orientation film, third orientation film and the 4th orientation film is by a thin layer height Molecular organic, oriented friction treatment, makes rod shaped liquid crystal molecule be parallel to glass surface, arranges along the direction of directional process, Molecularly oriented and the molecularly oriented of crystal lower surface for making the crystal upper surface of each layer of liquid crystal board are mutually perpendicular to;
Liquid crystal optical switch according to claim 1 for optical phased array scanning, it is characterised in that: the row scanning Electrode has n, and n row scan electrode is uniformly divided into n1 group, and each group of expert's scan electrode has n2, then n=n1*n2;Electricity in group Pole width and interval are distributed in equidimension, and every group of width and interval are distributed in equidimension;
The column scan electrode has m, and m column scan electrode is uniformly divided into m1 group, and column scan electrode has m2 in each group, Then m=m1*m2;Electrode width and interval are distributed in equidimension in group, and every group of width and interval are distributed in equidimension;
The n1 group row scan electrode corresponds to n3 row signal electrode, and m1 group column scan electrode corresponds to m3 column signal electrode, Wherein n, n1, n2, m, m1, m2, n3, m3 are positive integer.
2. a kind of liquid crystal optical switch for optical phased array scanning according to claim 2, it is characterized in that: the row letter Number electrode and column signal electrode are connected separately with electrode outlet line, and the electrode outlet line is for making row signal electrode and column letter Number electrode is respectively with row scan electrode and column scan electrode connection in the same horizontal plane, convenient for being connected with drive control circuit It controls row signal electrode and column signal electrode is powered.
3. according to claim 3 it is a kind of for optical phased array scanning liquid crystal optical switch, it is characterized in that: upper polarizer with Each layer structure gabarit is hermetically sealed using epoxy resin between lower polarizing film.
4. a kind of liquid crystal optical switch for optical phased array scanning according to claim 4, it is characterized in that: upper polarizer Polarization direction is identical as the upper surface molecularly oriented of first layer liquid crystal board crystal, and the upper surface molecule of second layer liquid crystal board crystal takes To with first layer liquid crystal board crystal upper surface molecularly oriented keeping parallelism, the polarization direction of lower polarizing film and the polarization of upper polarizer Direction is consistent.
5. a kind of liquid crystal optical switch for optical phased array scanning according to claim 5, it is characterized in that: the upper layer Glass plate, middle layer glass plate, lower glass plates are used in transparent glass bottom liner, row scan electrode, column scan electrode, row signal electricity Pole and column signal electrode are to be made using photoetching and etching technics in glass bottom lining.
6. a kind of liquid crystal optical switch for optical phased array scanning according to claim 6, it is characterized in that: passing through driving electricity Road controls first layer liquid crystal board and second layer LC panel surface molecularly oriented is mutually perpendicular to or configured in parallel, inclined in conjunction with upper and lower layer Shake piece polarization direction is parallel or arranged perpendicular, so as to make liquid crystal optical switch realize normal open type photoswitch, closed type light respectively Switch, array working method by member, line by line, " logical "/" disconnected " scan pattern or array complete " logical " and " disconnected " Working mould entirely by column Formula.
7. according to claim 7 it is a kind of for optical phased array scanning liquid crystal optical switch, it is characterized in that: be expert at scanning or When column scan operating mode, set row signal or all electrodes of column signal be for low level and meanwhile set comprising column scan or row sweep All units of another layer for retouching electrode are in the conductive state, and row scanning is then gradually set according to certain time interval sequence or column are swept Retouch electrode be high level so that the first layer liquid crystal board of corresponding unit, second layer liquid crystal board under electric field action optical transport along axis To being no longer distorted and light transmission, effect is gradually opened similar to curtain opening and closing process to realize.
8. a kind of liquid crystal optical switch for optical phased array scanning according to claim 1, it is characterized in that: electrode is attached to On glass plate, row scan electrode, column signal electrode, row signal electrode and column scan electrode are belonging respectively to upper and lower, middle layer glass Plate is made by photoetching and etching manufacture craft integrated molding respectively.
9. a kind of assembly production method of the liquid crystal optical switch for optical phased array scanning according to claim 1, special Sign is: including the following steps:
A: by upper polarizer pressure viscosity in upper glass plate non-electrical pole surface, guarantee that polarizing film polarization direction and row scan electrode are flat Row;
B: being covered with the orientation film of oriented friction treatment in electrode surface, is allowed to clamp down on first layer liquid crystal board upper surface liquid crystal molecule It is parallel to the polarization direction of upper polarizer;
C: the row signal electrode of middle layer glass plate is faced upward and applies the orientation film of oriented friction treatment, column signal electrode surface Downwards and apply the orientation film of oriented friction treatment, it is upper in, between lower glass plate it is mutually vertical full of molecularly oriented Straight twisted-nematic facies pattern liquid crystal;
D: by lower polarizing film pressure viscosity in lower glass plates non-electrical pole surface, guaranteeing that polarizing film polarization direction is parallel with upper polarizer, Be covered with the orientation film of oriented friction treatment in electrode surface, be allowed to clamp down on second layer liquid crystal board lower surface liquid crystal molecule perpendicular to The polarization direction of lower polarizing film;
E: finally, being sealed encapsulation with epoxy resin.
CN201811214884.5A 2018-10-18 2018-10-18 Liquid crystal optical switch for optical phased array scanning Expired - Fee Related CN109239993B (en)

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