CN109212315A - A kind of semiconductor crystal wafer convex block resistance testing device - Google Patents

A kind of semiconductor crystal wafer convex block resistance testing device Download PDF

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Publication number
CN109212315A
CN109212315A CN201710529226.4A CN201710529226A CN109212315A CN 109212315 A CN109212315 A CN 109212315A CN 201710529226 A CN201710529226 A CN 201710529226A CN 109212315 A CN109212315 A CN 109212315A
Authority
CN
China
Prior art keywords
workbench
cabinet
convex block
display screen
semiconductor crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710529226.4A
Other languages
Chinese (zh)
Inventor
黄涛
袁泉
孙健
张慧
朱威莉
韩伟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Nepes Semiconductor Co Ltd
Original Assignee
Jiangsu Nepes Semiconductor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu Nepes Semiconductor Co Ltd filed Critical Jiangsu Nepes Semiconductor Co Ltd
Priority to CN201710529226.4A priority Critical patent/CN109212315A/en
Publication of CN109212315A publication Critical patent/CN109212315A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0425Test clips, e.g. for IC's
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

The invention discloses a kind of semiconductor crystal wafer convex block resistance testing devices, including case lid and cabinet, the upper end of the cabinet is provided with workbench, the upper end of the workbench is arranged symmetrically, and there are two the sliding rails being arranged in parallel, the ruler being arranged in parallel there are two being arranged between the sliding rail, the workbench is internally provided with LED light, the upper end of the LED light is provided with light-transmitting plate, the one end side insertion of the workbench is provided with display screen, the side of the display screen is provided with operation interface, and the cabinet upper end is provided with the back side panel arranged vertically far from the side of display screen.The present invention uses movable measurement bay structure, and detection cylinder is accommodated in cabinet convenient for rotation, less occupied space, convenient for operating and carrying, the conductive terminal provided with fixture type, the elastic construction of the conductive terminal crystal circle structure different convenient for measurement, the accurate fixed of measurement is improved, working efficiency is improved.

Description

A kind of semiconductor crystal wafer convex block resistance testing device
Technical field
The present invention relates to resistance test technical field, specially a kind of semiconductor crystal wafer convex block resistance testing device.
Background technique
Resistance meter, is a kind of instrument for measuring object electric conductivity, and resistance meter is widely used in electrical peace Total inspection and earth work completion such as test at the occasions.The type of resistance meter is relatively more, including earth resistance tester, insulated electro Hinder tester, earth resistance tester, direct current resistance measurer, sheet resistance tester and circuit resistance tester.Direct current Resistance meter is the test equipment of DCR of Transformer of new generation, it can be selected automatically according to the power transformer of different model Test electric current is selected, test result is shown with most fast speed.Instrument for measuring DC resistance and have storage, printing, electric discharge instruction Etc. functions, built-in not power down memory, can long-term preservation measurement data, liquid crystal display use so that the instrument man-machine interface Well, it is preferred unit in D.C. resistance test job.
But resistance meter in the prior art, especially for measuring the resistance meter of semiconductor crystal wafer convex block, Its structure is single, is not easy to fixed to the test of wafer bumps and measures, resistance meter volume inconvenient for use and traditional Larger, not readily portable, more difficult using operation, working efficiency is low.
Summary of the invention
The purpose of the present invention is to provide a kind of semiconductor crystal wafer convex block resistance testing devices, to solve above-mentioned background technique The structure of middle proposition is single, is not easy to fixed to the test of wafer bumps and measures, resistance test inconvenient for use and traditional Instrument volume is larger, not readily portable, more difficult using operation, the low problem of working efficiency.
To achieve the above object, the invention provides the following technical scheme: a kind of semiconductor crystal wafer convex block resistance testing device, Including case lid and cabinet, the upper end of the cabinet is provided with workbench, and the upper end of the workbench is arranged symmetrically, and there are two parallel The sliding rail of arrangement, there are two the rulers being arranged in parallel, the workbench to be internally provided with LED light for setting between the sliding rail, institute The upper end for stating LED light is provided with light-transmitting plate, and the one end side of the workbench, which is embedded in, is provided with display screen, and the one of the display screen Side is provided with operation interface, and the cabinet upper end is provided with the back side panel arranged vertically, the rear side far from the side of display screen Plate is rotatably connected to case lid by hinge, and the case lid, which is internally located at hinge upper end position, is provided with fixed plate, the fixation The center position of plate is provided with column, and the upper end of the column is cased with sleeve, and the sleeve upper end is provided with bracket, and on sleeve The side that end is located at bracket is provided with tightening knob, and the other end of the bracket is provided with detection cylinder, the lower end of the detection cylinder Fixture is connected with by drum rotation, and there are two the fixture is symmetrical arranged, and two fixtures pass through spring respectively and symmetrically connect There are two conductive terminal, the fixed plate is connected with fixed link, the inside of the cabinet by shaft close to the side of workbench It is provided with constant-current supply, the side of the constant-current supply is provided with STC89C52RC single-chip microcontroller, the STC89C52RC single-chip microcontroller Side be provided with AD9200 converter, the side of the AD9200 converter is provided with reservoir, the LED light, STC89C52RC single-chip microcontroller, AD9200 converter, conductive terminal, display screen are electrically connected with constant-current supply.
Further, the detection cylinder is arranged perpendicular to bracket, and the support vertical is arranged in column, the uprights vertical It is arranged in fixed plate.
Further, there are two the fixed link is symmetrical arranged, and the length of fixed link and fixed plate are between cabinet It is equidistant.
Further, it is vertically arranged between the ruler and sliding rail.
Further, the length of the bracket is less than the half of case lid length value.
Compared with prior art, the beneficial effects of the present invention are:
(1) present invention uses movable measurement bay structure, and detection cylinder is accommodated in cabinet convenient for rotation, it is less occupy it is empty Between, it is easy to carry, while convenient for operation.
(2) present invention is provided with the conductive terminal of fixture type, the elastic construction of the conductive terminal wafer different convenient for measurement Structure improves the accurate fixed of measurement, improves working efficiency.
(3) workbench of the present invention is provided with measurement structure, convenient for measuring the appearance data of wafer bumps, instead of measuring machine Effect, it is vdiverse in function, it is practical.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention;
Fig. 2 is front view of the invention;
Fig. 3 is outside drawing of the invention;
Fig. 4 is workbench top view of the invention.
In appended drawing reference: 1- detects cylinder;2- bracket;3- case lid;4- column;5- sleeve;6- tightening knob;7- fixed plate; 8- hinge;9- shaft;10- back side panel;11- fixed link;12- cabinet;13- constant-current supply;14-LED lamp;15-STC89C52RC Single-chip microcontroller;16- light-transmitting plate;17-AD9200 converter;18- reservoir;19- workbench;20- sliding rail;21- ruler;22- is conductive Terminal;23- spring;24- fixture;25- rotating cylinder;26- operation interface;27- display screen.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
Fig. 1-4 is please referred to, the present invention provides a kind of technical solution: a kind of semiconductor crystal wafer convex block resistance testing device, packet Case lid 3 and cabinet 12 are included, the upper end of cabinet 12 is provided with workbench 19, and the upper end of workbench 19 is arranged symmetrically, and there are two parallel cloth The sliding rail 20 set, there are two the rulers 21 being arranged in parallel to enhance function convenient for measuring the appearance data of wafer for setting between sliding rail 20 Energy diversity, workbench 19 are internally provided with LED light 14, and the upper end of LED light 14 is provided with light-transmitting plate 16, increase workbench 19 Light, convenient for observation, guarantee is easy-to-use, and the one end side of workbench 19, which is embedded in, is provided with display screen 27, and the one of display screen 27 Side is provided with operation interface 26, and 12 upper end of cabinet is provided with the back side panel 10 arranged vertically far from the side of display screen 27, is used for Fixed box cover 3, back side panel 10 are rotatably connected to case lid 3 by hinge 8, and case lid 3 is internally located at 8 upper end position of hinge and is provided with Fixed plate 7 is used for vertical columns 4, and the center position of fixed plate 7 is provided with column 4, and 4 upper end of column is cased with sleeve 5, guarantees The rotation of bracket 2,5 upper end of sleeve are provided with bracket 2, and 5 upper end of sleeve is located at the side of bracket 2 and is provided with tightening knob 6, uses In fastening sleeve 5, guarantee the fixation when rotation storage or work of bracket 2, the other end of bracket 2 is provided with detection cylinder 1, detection The lower end of cylinder 1 is rotatably connected to fixture 24 by rotating cylinder 25, and there are two fixture 24 is symmetrical arranged, and two fixtures 24 pass through respectively Spring 23 is symmetrically connected with two conductive terminals 22, and fixed plate 7 is connected with fixed link by shaft 9 close to the side of workbench 19 11, it is used to support case lid 3, guarantees the vertical state of case lid 3, cabinet 12 is internally provided with constant-current supply 13, constant-current supply 13 Side be provided with STC89C52RC single-chip microcontroller 15, the side of STC89C52RC single-chip microcontroller 15 is provided with AD9200 converter 17, The side of AD9200 converter 17 is provided with reservoir 18, LED light 14, STC89C52RC single-chip microcontroller 15, AD9200 converter 17, Conductive terminal 22, display screen 27 are electrically connected with constant-current supply 13.
Further, detection cylinder 1 is arranged perpendicular to bracket 2, and bracket 2 is arranged perpendicular to column 4, and column 4 is perpendicular to fixation Plate 7 is arranged, and guarantees detection cylinder 1 perpendicular to workbench 19, convenient for detection operation.
Further, there are two fixed link 11 is symmetrical arranged, and the length of fixed link 11 and fixed plate 7 are between cabinet 12 Be equidistant, supporting box cover 3, guarantee case lid 3 vertical state, guarantee detection cylinder 1 perpendicular to workbench 19.
Further, it is vertically arranged between ruler 21 and sliding rail 20, convenient for the opposite sliding of ruler 21, convenient for measurement.
Further, the length of bracket 2 is less than the half of 3 length value of case lid, guarantees that bracket 2 and detection cylinder 1 are accommodated in case In lid 3, occupied space is reduced, it is easy to carry.
Working principle: in use, case lid 3 is raised, rotating fixing rod 11,11 lower end of fixed link is supported on 12 table of cabinet Face guarantees that perpendicular to cabinet 12, semiconductor crystal wafer convex block is placed at 19 upper end center position of workbench for case lid 3, rotation branch Frame 2 will test the surface that cylinder 1 turns to workbench 19, while sliding sleeve 5 will test cylinder 1 and be moved to height appropriate, lead to It crosses tightening knob 6 sleeve 5 is fixed, two conductive terminals 22 is clipped in the two poles of the earth of semiconductor crystal wafer convex block, startup power supply carries out Measurement, data are shown in 27 upper end of display screen, and LED light 14 ensure that the good light of workbench 19, can after the completion of resistance test To carry out length diameter etc. to semiconductor crystal wafer convex block and measure, on sliding rail 20 and ruler 21 by two rulers 21 of opposite sliding End can effectively be measured by scale value with semiconductor crystal wafer convex block, and after measurement, detecting cylinder 1 and bracket 2 can rotate To the inside of case lid 3, guarantee that normally lid closes case lid 3, device is integrally in body structure, easy to carry.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding And modification, the scope of the present invention is defined by the appended.

Claims (5)

1. a kind of semiconductor crystal wafer convex block resistance testing device, including case lid (3) and cabinet (12), it is characterised in that: the case The upper end of body (12) is provided with workbench (19), and the upper end of the workbench (19) is arranged symmetrically, and there are two the sliding rails being arranged in parallel (20), it is arranged between the sliding rail (20) there are two the ruler (21) being arranged in parallel, the workbench (19) is internally provided with LED The upper end of lamp (14), the LED light (14) is provided with light-transmitting plate (16), and the one end side insertion of the workbench (19) is provided with The side of display screen (27), the display screen (27) is provided with operation interface (26), and cabinet (12) upper end is far from display screen (27) side is provided with the back side panel (10) arranged vertically, and the back side panel (10) is rotatably connected to case lid by hinge (8) (3), the case lid (3) is internally located at hinge (8) upper end position and is provided with fixed plate (7), the centre bit of the fixed plate (7) The place of setting is provided with column (4), and column (4) upper end is cased with sleeve (5), and sleeve (5) upper end is provided with bracket (2), and The side that sleeve (5) upper end is located at bracket (2) is provided with tightening knob (6), and the other end of the bracket (2) is provided with detection cylinder (1), the lower end of detection cylinder (1) is rotatably connected to fixture (24) by rotating cylinder (25), and the fixture (24) is symmetrically arranged with Two, and two fixtures (24) are symmetrically connected with two conductive terminals (22) by spring (23) respectively, the fixed plate (7) is leaned on The side of nearly workbench (19) is connected with fixed link (11) by shaft (9), and the cabinet (12) is internally provided with Constant Electric Current The side in source (13), the constant-current supply (13) is provided with STC89C52RC single-chip microcontroller (15), the STC89C52RC single-chip microcontroller (15) side is provided with AD9200 converter (17), and the side of the AD9200 converter (17) is provided with reservoir (18), The LED light (14), STC89C52RC single-chip microcontroller (15), AD9200 converter (17), conductive terminal (22), display screen (27) are equal It is electrically connected with constant-current supply (13).
2. a kind of semiconductor crystal wafer convex block resistance testing device according to claim 1, it is characterised in that: the detection cylinder (1) it is arranged perpendicular to bracket (2), the bracket (2) is arranged perpendicular to column (4), and the column (4) is perpendicular to fixed plate (7) Setting.
3. a kind of semiconductor crystal wafer convex block resistance testing device according to claim 1, it is characterised in that: the fixed link (11) there are two being symmetrical arranged, and the length of fixed link (11) is equal with the distance between fixed plate (7) to cabinet (12).
4. a kind of semiconductor crystal wafer convex block resistance testing device according to claim 1, it is characterised in that: the ruler (21) it is vertically arranged between sliding rail (20).
5. a kind of semiconductor crystal wafer convex block resistance testing device according to claim 1, it is characterised in that: the bracket (2) length is less than the half of case lid (3) length value.
CN201710529226.4A 2017-07-01 2017-07-01 A kind of semiconductor crystal wafer convex block resistance testing device Pending CN109212315A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710529226.4A CN109212315A (en) 2017-07-01 2017-07-01 A kind of semiconductor crystal wafer convex block resistance testing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710529226.4A CN109212315A (en) 2017-07-01 2017-07-01 A kind of semiconductor crystal wafer convex block resistance testing device

Publications (1)

Publication Number Publication Date
CN109212315A true CN109212315A (en) 2019-01-15

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ID=64992363

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710529226.4A Pending CN109212315A (en) 2017-07-01 2017-07-01 A kind of semiconductor crystal wafer convex block resistance testing device

Country Status (1)

Country Link
CN (1) CN109212315A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111968464A (en) * 2020-09-02 2020-11-20 湖北理工学院 Probability mathematics bar statistical chart presentation device
CN113484562A (en) * 2021-07-20 2021-10-08 江苏纳沛斯半导体有限公司 Semiconductor wafer bump resistance testing device and using method
CN113884716A (en) * 2021-10-26 2022-01-04 江西龙芯微科技有限公司 Integrated circuit wafer testing device and method
CN117148016A (en) * 2023-10-26 2023-12-01 山东合盛铜业有限公司 Substrate copper foil conductive performance test equipment

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111968464A (en) * 2020-09-02 2020-11-20 湖北理工学院 Probability mathematics bar statistical chart presentation device
CN113484562A (en) * 2021-07-20 2021-10-08 江苏纳沛斯半导体有限公司 Semiconductor wafer bump resistance testing device and using method
CN113884716A (en) * 2021-10-26 2022-01-04 江西龙芯微科技有限公司 Integrated circuit wafer testing device and method
CN113884716B (en) * 2021-10-26 2024-05-10 江西龙芯微科技有限公司 Integrated circuit wafer testing device and method
CN117148016A (en) * 2023-10-26 2023-12-01 山东合盛铜业有限公司 Substrate copper foil conductive performance test equipment
CN117148016B (en) * 2023-10-26 2024-02-02 山东合盛铜业有限公司 Substrate copper foil conductive performance test equipment

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Application publication date: 20190115