CN109202694A - A kind of multi-layer nano fiber chemi-mechanical polishing pad - Google Patents
A kind of multi-layer nano fiber chemi-mechanical polishing pad Download PDFInfo
- Publication number
- CN109202694A CN109202694A CN201811129667.6A CN201811129667A CN109202694A CN 109202694 A CN109202694 A CN 109202694A CN 201811129667 A CN201811129667 A CN 201811129667A CN 109202694 A CN109202694 A CN 109202694A
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- Prior art keywords
- gear
- fixed
- polishing pad
- fixed frame
- transmission
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
Abstract
The invention discloses a kind of multi-layer nano fiber chemi-mechanical polishing pads, its structure includes automatic fixer, link block, through-hole, fixing bolt, multi-layer nano fibrous polishing pad, anti-skid chequer, automatic fixer is mounted on inside link block, link block rear end is fixedly connected with multi-layer nano fibrous polishing pad front end, through-hole is set to link block center, link block side is equipped with anti-skid chequer, and fixing bolt is arranged successively inside link block according to equal angular；Automatic fixer is made of damping device, transmission control device, left fixed device, buffer unit, driving device, left fixed device, positioner, contraction fixation can be carried out inside the device automatically, polishing pad can be quickly fixed in the rotary head of polishing machine by the device, the fixed degree of the device is more stable simultaneously, it is also easier to be dismantled, the convenience that staff uses can be increased in this way.
Description
Technical field
The present invention relates to polishing pad processing technology field, specifically a kind of multi-layer nano fiber chemi-mechanical polishing
Pad.
Background technique
Chemically mechanical polishing is in many different industry to polish the common process of substrate surface.In semiconductor
In industry, as element characteristics size is smaller and smaller, the uniformity for polishing and polishing has become more and more important.
Multi-layer nano fiber chemi-mechanical polishing pad needs that polishing pad can be fixed on to throwing by exterior object at present
On ray machine, not only increase the work difficulty of staff in this way, while polishing pad fixation is unstable, is easy to fall off, reduction makes
Convenience.
Summary of the invention
It is a primary object of the present invention to overcome the deficiencies of the prior art and provide a kind of multi-layer nano fiber chemi-mechanical throwing
Light pad.
The present invention adopts the following technical scheme that realize: a kind of multi-layer nano fiber chemi-mechanical polishing pad, structure packet
Include automatic fixer, link block, through-hole, fixing bolt, multi-layer nano fibrous polishing pad, anti-skid chequer, the automatic fixed dress
It sets and is mounted on inside link block, the link block rear end is fixedly connected with multi-layer nano fibrous polishing pad front end, the through-hole
Set on link block center, the link block side is equipped with anti-skid chequer, and the fixing bolt is arranged successively according to equal angular in connection
Inside block；The automatic fixer by damping device, transmission control device, left fixed device, buffer unit, driving device,
Left fixed device, positioner composition；The damping device bottom is vertical at the top of left fixed device to be connect, the left fixed dress
It sets top left and is connected to transmission control device right end lower front, be bonded at the top of the left fixed bottom of device and buffer unit
Connection is meshed on front side of the driving device left end with left fixed device right end trailing flank, inside the positioner top and
Left fixed device left end bottom side is flexibly connected.
As optimization, the automatic fixer is made of bottom plate, spring, L shape fixed frame, fixed chamber, adjustable shelf, described
It is vertical with adjustable shelf bottom at the top of bottom plate to connect, using excessively cooperation, the L inside adjustable shelf top two sides and fixed chamber
Shape fixed frame top is vertical with fixed chamber right end bottom to be connect, living with end side surface in adjustable shelf inside the L shape fixed frame left end
Dynamic connection, the spring one end are connected at the top of bottom plate right end, and the other end is fixed on L shape fixed frame bottom, the bottom base plate
It is fitted and connected at the top of left fixed device.
As optimization, the transmission control device is by motor, transmission belt, drive rod, toothed disc, transmission belt, gear, linkage
Gear, comprehensive stayed mast, runner, the first quarter butt, the second runner, the second quarter butt, comprehensive pull strap, pulling force wheel composition, the electricity
Machine bottom end side is sequentially connected by transmission belt and drive rod bottom end side, drive rod top trailing flank and toothed disc
It is meshed on front side of bottom end, the transmission belt both ends are connected respectively to toothed disc and gear front end side, the gear bottom side and connection
Moving gear top side is meshed, and first quarter butt one end is connected on front side of roller centre, and it is right that the other end is fixed on comprehensive stayed mast
Trailing flank is held, second quarter butt one end is connected on front side of the second roller centre, after the other end is fixed on comprehensive stayed mast right end
Side, the comprehensive stayed mast left end are connected to linkage gear outer ring trailing flank, and the runner, the second runner side pass through synthesis
Pull strap is sequentially connected with pulling force wheel front end side, and pulling force wheel front end side is fixed with left fixed device top left
Connection.
As optimization, the left fixed device is by left gripper, upper frame, right gripper, connecting spring, transmission gear, cross
To transmission belt, translation fixed frame, interior bar composition, the left gripper top is fixedly connected with upper frame bottom left end, the right machine
Machinery claw top is fixedly connected with upper frame bottom right end, and the connecting spring both ends are connected respectively in left gripper and right gripper
End is internal, and the left gripper is flexibly connected with right gripper medial surface with transmission gear side, the transmission gear front end side
Face is sequentially connected by lateral transmission belt with pulling force wheel front end side, the transmission gear bottom side and translation fixed frame top side
It is meshed, is slidably connected inside the translation fixed frame with interior bar side.
As optimization, the buffer unit is made of pedestal, the first transposition arm, buffer bar, the second transposition arm, footstock, institute
State that the first transposition arm bottom end is vertical with chassis interior to be connect, both ends and the second transposition arm bottom both ends at the top of first transposition arm
It is fixedly connected, the buffer bar both ends are connected respectively to both ends at the top of the first transposition arm and connect with the second transposition arm bottom both ends
Place, second transposition arm top is vertical with footstock bottom inner portion to be connect.
As optimization, the driving device is drawn by driving motor, the second transmission belt, positioning transmission bar, driven gear, bottom
Power band, bottom gears disk composition, the driving motor left end side by the second transmission belt and positioning transmission bar left end side into
It is meshed on the right side of row transmission connection, the positioning transmission bar left end side and driven gear, bottom pull strap both ends difference
It is connected to driven gear and bottom gears disk front end side, the bottom gears are faced left on rear side of end front side and left fixed device right end
Face is meshed.
As optimization, the left fixed device by connection drive rod, guiding tooth wheel disc, the comprehensive pull strap in bottom, fixed frame,
Bolt, locating wheel, pulling force gear, left inside bar, left fixed frame composition, the connection drive rod left end trailing flank and guiding tooth
It is meshed on front side of wheel disc right end, guiding tooth wheel disc front end side face passes through the comprehensive pull strap in bottom and positioning wheel side, pulling force
Gear front end side is sequentially connected, and the locating wheel rear end is connect with fixed frame left end internal vertical, the bolt left end
It is connected to inside locating wheel rear end through fixed frame, pulling force gear top side is meshed with left fixed frame bottom side, described
It is flexibly connected inside left fixed frame with left inside bar side face.
As optimization, the positioner is made of right detent pawl, chassis, tension spring, left detent pawl, the right detent
Pawl bottom end is fixedly connected with right end at the top of chassis, and the chassis top left is fixedly connected with left detent pawl bottom end, the pulling force
Both ends of the spring is connected respectively to inside right detent pawl and left detent pawl middle-end, the right detent pawl, left detent pawl top inner side with
Pulling force gear bottom end side is flexibly connected.
Beneficial effect
A kind of multi-layer nano fiber chemi-mechanical polishing pad of the present invention is carrying out in use, we need through driving electricity
Machine generates driving torque and drives the rotation of positioning transmission bar by the second transmission belt, so that driven gear is driven to rotate, driven gear
The rotation of bottom gears disk is pulled by bottom pull strap, bottom gears disk drives the rotation of guiding tooth wheel disc by connection drive rod,
Guiding tooth wheel disc pulls the rotation of pulling force gear by the comprehensive pull strap in bottom, and pulling force gear can control left fixed frame and turn right
It moves, motor generates driving torque and pulls drive rod rotation by transmission belt, so that toothed disc be driven to rotate, toothed disc passes through transmission
Band pulls gear rotation, so that linkage gear be driven to rotate, linkage gear passes through comprehensive stayed mast, the first quarter butt, the second quarter butt
Between transmission pull runner and the second runner to rotate, runner and the second runner pass through comprehensive pull strap pulling pulling force wheel and rotate,
Pulling force wheel passes through lateral transmission belt band nutating gear and rotates, and transmission gear can control moving left and right for translation fixed frame, when
Translation fixed frame is turned left extruding, and left fixed frame is turned right when squeezing, which is just capable of fixing in the rotary head of polishing machine, right card
Position pawl and left detent pawl can increase the power that the rotation of pulling force gear needs by the pulling force of tension spring, this sampling device is carrying out work
Just it is not easy to unclamp when making, damping device can reduce the impact force that left fixed frame is subject to, and transmission control device can be
Left fixed device provides power, and buffer unit can reduce the impact force that translation fixed frame is subject to, and driving device can be left solid
Determine device and power is provided, positioner can increase the steady shape stability of pulling force gear rotation.
Compared with prior art, the beneficial effects of the present invention are: contraction fixation can be carried out inside the device automatically, polishing
Pad can be quickly fixed in the rotary head of polishing machine by the device, while the degree that the device is fixed is more stable, also more
It is easy to be dismantled, the convenience that staff uses can be increased in this way.
Detailed description of the invention
Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other feature of the invention,
Objects and advantages will become more apparent upon:
Fig. 1 is a kind of structural schematic diagram of multi-layer nano fiber chemi-mechanical polishing pad of the present invention.
Fig. 2 is the structural schematic diagram of automatic fixer of the present invention.
Fig. 3 is the structural schematic diagram of automatic fixer of the present invention refinement.
Fig. 4 is the structural schematic diagram of automatic fixer working condition of the present invention.
In figure: automatic fixer 1, link block 2, through-hole 3, fixing bolt 4, multi-layer nano fibrous polishing pad 5, anti-skid chequer
6, damping device 11, transmission control device 12, left fixed device 13, buffer unit 14, driving device 15, left fixed device 16,
Positioner 17, bottom plate 111, spring 112, L shape fixed frame 113, fixed chamber 114, adjustable shelf 115, motor 121, transmission belt
122, drive rod 123, toothed disc 124, transmission belt 125, gear 126, linkage gear 127, comprehensive stayed mast 128, runner 129,
First quarter butt 1210, the second runner 1211, the second quarter butt 1212, comprehensive pull strap 1213, pulling force wheel 1214, left gripper 131,
Upper frame 132, right gripper 133, connecting spring 134, transmission gear 135, lateral transmission belt 136, translation fixed frame 137, interior bar
138, pedestal 141, the first transposition arm 142, buffer bar 143, the second transposition arm 144, footstock 145, driving motor 151, second pass
Defeated band 152, positioning transmission bar 153, driven gear 154, bottom pull strap 155, bottom gears disk 156, connection drive rod 161,
It is guiding tooth wheel disc 162, the comprehensive pull strap 163 in bottom, fixed frame 164, bolt 165, locating wheel 166, pulling force gear 167, left inside
Bar 168, left fixed frame 169, right detent pawl 171, chassis 172, tension spring 173, left detent pawl 174.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Fig. 1-4 is please referred to, the present invention provides a kind of multi-layer nano fiber chemi-mechanical polishing pad technical solution: its structure packet
Automatic fixer 1, link block 2, through-hole 3, fixing bolt 4, multi-layer nano fibrous polishing pad 5, anti-skid chequer 6 are included, it is described automatic
Fixed device 1 is mounted on inside link block 2, the fixed company in 2 rear end of link block and 5 front end of multi-layer nano fibrous polishing pad
It connects, the through-hole 3 is set to 2 center of link block, and 2 side of link block is equipped with anti-skid chequer 6, and the fixing bolt 4 is according to same angular
Degree is arranged successively inside link block 2；The automatic fixer 1 is by damping device 11, transmission control device 12, left fixed dress
13, buffer unit 14, driving device 15, left fixed device 16, positioner 17 is set to form；11 bottom of damping device and a left side
Fixed 16 top of device is vertical to be connected, before left fixed 13 top left of device is connected to 12 right end bottom of transmission control device
Side is fitted and connected at the top of left fixed 13 bottom of device and buffer unit 14, solid with a left side on front side of 15 left end of driving device
Determine 16 right end trailing flank of device to be meshed, connect inside 17 top of positioner with left fixed 16 left end bottom side activity of device
It connects, the automatic fixer 1 is made of bottom plate 111, spring 112, L shape fixed frame 113, fixed chamber 114, adjustable shelf 115, institute
It states that the top of bottom plate 111 is vertical with 115 bottom of adjustable shelf to be connect, is used inside the 115 top two sides of adjustable shelf and fixed chamber 114
Excessively cooperation, 113 top of L shape fixed frame is vertical with 114 right end bottom of fixed chamber to be connect, 113 left end of L shape fixed frame
Inside is flexibly connected with end side surface in adjustable shelf 115, and described 112 one end of spring is connected at the top of 111 right end of bottom plate, and the other end is solid
It due to 113 bottom of L shape fixed frame, is fitted and connected at the top of 111 bottom of bottom plate and left fixed device 16, the transmission control dress
12 are set by motor 121, transmission belt 122, drive rod 123, toothed disc 124, transmission belt 125, gear 126, linkage gear 127, comprehensive
It closes stayed mast 128, runner 129, the first quarter butt 1210, the second runner 1211, the second quarter butt 1212, comprehensive pull strap 1213, draw
Wheels 1214 forms, and the 121 bottom end side of motor is sequentially connected by transmission belt 122 and 123 bottom end side of drive rod,
It is meshed on front side of the 123 top trailing flank of drive rod and 124 bottom end of toothed disc, 125 both ends of transmission belt are connected respectively to
Toothed disc 124 and 126 front end side of gear, 126 bottom side of gear are meshed with 127 top side of linkage gear, and described first is short
1210 one end of bar is connected on front side of 129 center of runner, and the other end is fixed on comprehensive 128 right end trailing flank of stayed mast, and described second
1212 one end of quarter butt is connected on front side of 1211 center of the second runner, and the other end is fixed on comprehensive 128 right end trailing flank of stayed mast, institute
It states comprehensive 128 left end of stayed mast and is connected to 127 outer ring trailing flank of linkage gear, the runner 129,1211 side of the second runner are logical
It crosses comprehensive pull strap 1213 to be sequentially connected with 1214 front end side of pulling force wheel, the 1214 front end side of pulling force wheel and a left side are solid
Determine 13 top left of device to be fixedly connected, the left fixed device 13 is by left gripper 131, upper frame 132, right gripper 133, company
It connects spring 134, transmission gear 135, lateral transmission belt 136, translation fixed frame 137, interior bar 138 to form, the left gripper 131
Top is fixedly connected with 132 bottom left end of upper frame, and right 133 top of gripper is fixedly connected with 132 bottom right end of upper frame, institute
State 134 both ends of connecting spring be connected respectively to left gripper 131 with inside right 133 middle-end of gripper, the left gripper 131 with
Right 133 medial surface of gripper is flexibly connected with 135 side of transmission gear, and the 135 front end side of transmission gear is by laterally passing
Dynamic band 136 is sequentially connected with 1214 front end side of pulling force wheel, and 135 bottom side of transmission gear and translation fixed frame 137 push up
Side is meshed, and 137 inside of the translation fixed frame is slidably connected with 138 side of interior bar, the buffer unit 14 by pedestal 141,
First transposition arm 142, buffer bar 143, the second transposition arm 144, footstock 145 form, 142 bottom end of the first transposition arm and pedestal
The connection of 141 internal verticals, the 142 top both ends of the first transposition arm are fixedly connected with 144 bottom both ends of the second transposition arm, described
143 both ends of buffer bar are connected respectively to 142 top both ends of the first transposition arm and 144 bottom both ends junction of the second transposition arm, institute
State that 144 top of the second transposition arm is vertical with 145 bottom inner portion of footstock to be connect, the driving device 15 is by driving motor 151, second
Transmission belt 152, positioning transmission bar 153, driven gear 154, bottom pull strap 155, bottom gears disk 156 form, the driving
151 left end side of motor is sequentially connected by the second transmission belt 152 and 153 left end side of positioning transmission bar, the positioning
It is meshed on the right side of 153 left end side of drive rod and driven gear 154,155 both ends of bottom pull strap are connected respectively to passively
Gear 154 and 156 front end side of bottom gears disk, on front side of 156 left end of bottom gears disk and after left fixed 16 right end of device
Side is meshed, and the left fixed device 16 integrates pull strap 163 by connection drive rod 161, guiding tooth wheel disc 162, bottom, consolidates
Determine frame 164, bolt 165, locating wheel 166, pulling force gear 167, left inside bar 168, left fixed frame 169 to form, the connection
It is meshed on front side of 161 left end trailing flank of drive rod and 162 right end of guiding tooth wheel disc, the 162 front end side of guiding tooth wheel disc is logical
It crosses the comprehensive pull strap 163 in bottom to be sequentially connected with 166 side of locating wheel, 167 front end side of pulling force gear, the locating wheel
166 rear ends are connect with 164 left end internal vertical of fixed frame, and 165 left end of bolt is connected to locating wheel through fixed frame 164
Inside 166 rear ends, 167 top side of pulling force gear is meshed with 169 bottom side of left fixed frame, the left fixed frame
169 inside are flexibly connected with left inside 168 side of bar, and the positioner 17 is by right detent pawl 171, chassis 172, tension spring
173, left detent pawl 174 forms, and right 171 bottom end of detent pawl is fixedly connected with 172 top right end of chassis, the chassis 172
Top left is fixedly connected with left 174 bottom end of detent pawl, 173 both ends of tension spring be connected respectively to right detent pawl 171 with
Inside left 174 middle-end of detent pawl, 167 bottom end side of the right detent pawl 171, left 174 top inner side of detent pawl and pulling force gear
It is flexibly connected.
It is carrying out in use, we, which need to generate driving torque by driving motor 151, passes through the drive of the second transmission belt 152
Positioning transmission bar 153 rotates, so that driven gear 154 be driven to rotate, driven gear 154 pulls bottom by bottom pull strap 155
Portion's toothed disc 156 rotates, and bottom gears disk 156 drives guiding tooth wheel disc 162 to rotate by connection drive rod 161, guide gear
Disk 162 pulls pulling force gear 167 to rotate by the comprehensive pull strap 163 in bottom, and pulling force gear 167 can control left fixed frame
169 toward moving to right, and motor 121 generates driving torque and pulls drive rod 123 to rotate by transmission belt 122, to drive toothed disc 124
Rotation, toothed disc 124 pull gear 126 to rotate by transmission belt 125, so that linkage gear 127 is driven to rotate, linkage gear
127 pull runner 129 and the second runner by the transmission between comprehensive stayed mast 128, the first quarter butt 1210, the second quarter butt 1212
1211 rotations, runner 129 and the second runner 1211 pass through comprehensive pull strap 1213 and pulling force wheel 1214 are pulled to rotate, pulling force wheel 1214
It is rotated by lateral transmission belt 136 with nutating gear 135, the left and right that transmission gear 135 can control translation fixed frame 137 is moved
Dynamic, when translation fixed frame 137 is turned left extruding, left fixed frame 169 is turned right when squeezing, which is just capable of fixing in polishing machine
In rotary head, right detent pawl 171, which can increase the rotation of pulling force gear 167 by the pulling force of tension spring 173 with left detent pawl 174, to be needed
The power wanted, this sampling device are just not easy to unclamp when being worked, damping device 11 can reduce left fixed frame 169 by
Impact force, transmission control device 12 can provide power for left fixed device 13, and buffer unit 14 can reduce translation and fix
The impact force that frame 137 is subject to, driving device 15 can provide power for left fixed device 16, and positioner 17 can increase pulling force
The steady shape stability that gear 167 rotates.
The technological progress that the present invention obtains compared with the prior art is: can carry out contraction fixation inside the device automatically, throw
Light pad can be quickly fixed in the rotary head of polishing machine by the device, while the degree that the device is fixed is more stable,
It is easier to carry out dismantling, the convenience that staff uses can be increased in this way.
Although the present invention is described in detail referring to the foregoing embodiments, for those skilled in the art,
It is still possible to modify the technical solutions described in the foregoing embodiments, or part of technical characteristic is carried out etc.
With replacement, all within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in this
Within the protection scope of invention.
Claims (8)
1. a kind of multi-layer nano fiber chemi-mechanical polishing pad, structure includes automatic fixer, link block, through-hole, fixation
Bolt, multi-layer nano fibrous polishing pad, anti-skid chequer, it is characterised in that:
The automatic fixer is mounted on inside link block, the link block rear end and multi-layer nano fibrous polishing pad front end
It is fixedly connected, the through-hole is set to link block center, and the link block side is equipped with anti-skid chequer, and the fixing bolt is according to same angular
Degree is arranged successively inside link block；
The automatic fixer is by damping device, transmission control device, left fixed device, buffer unit, driving device, Zuo Gu
Determine device, positioner composition；
The damping device bottom is vertical at the top of left fixed device to be connect, and the left fixed device top left is connected to transmission
It is fitted and connected at the top of control device right end lower front, the left fixed bottom of device and buffer unit, the driving device is left
End front side is meshed with left fixed device right end trailing flank, living with left fixed device left end bottom side inside the positioner top
Dynamic connection.
2. a kind of multi-layer nano fiber chemi-mechanical polishing pad according to claim 1, it is characterised in that: described automatic solid
Determine device to be made of bottom plate, spring, L shape fixed frame, fixed chamber, adjustable shelf, it is vertical with adjustable shelf bottom at the top of the bottom plate to connect
It connects, using excessively cooperation, the L shape fixed frame top and fixed chamber right end bottom inside adjustable shelf top two sides and fixed chamber
Portion vertically connects, and is flexibly connected inside the L shape fixed frame left end with end side surface in adjustable shelf, the spring one end is connected to bottom
At the top of plate right end, the other end is fixed on L shape fixed frame bottom, is fitted and connected at the top of the bottom base plate and left fixed device.
3. a kind of multi-layer nano fiber chemi-mechanical polishing pad according to claim 1, it is characterised in that: the transmission control
Device processed is by motor, transmission belt, drive rod, toothed disc, transmission belt, gear, linkage gear, comprehensive stayed mast, runner, first short
Bar, the second runner, the second quarter butt, comprehensive pull strap, pulling force wheel composition, the motor bottom end side surface pass through transmission belt and drive rod
Bottom end side is sequentially connected, and is meshed on front side of drive rod top trailing flank and toothed disc bottom end, the transmission belt two
End is connected respectively to toothed disc and gear front end side, and the gear bottom side is meshed with linkage gear top side, and described first is short
Bar one end is connected on front side of roller centre, and the other end is fixed on comprehensive stayed mast right end trailing flank, and second quarter butt one end connects
It is connected on front side of the second roller centre, the other end is fixed on comprehensive stayed mast right end trailing flank, the comprehensive stayed mast left end connection
To linkage gear outer ring trailing flank, the runner, the second runner side pass through comprehensive pull strap and pulling force wheel front end side carries out
Transmission connection, pulling force wheel front end side is fixedly connected with left fixed device top left.
4. a kind of multi-layer nano fiber chemi-mechanical polishing pad according to claim 1 or 3, it is characterised in that: the left side
Fixed device is by left gripper, upper frame, right gripper, connecting spring, transmission gear, lateral transmission belt, translation fixed frame, interior bar
Composition, the left gripper top are fixedly connected with upper frame bottom left end, and the right gripper top and upper frame bottom right end are solid
Fixed connection, the connecting spring both ends are connected respectively to inside left gripper and right gripper middle-end, the left gripper and the right side
Gripper medial surface is flexibly connected with transmission gear side, and transmission gear front end side passes through lateral transmission belt and pulling force wheel
Front end side is sequentially connected, and the transmission gear bottom side is meshed with translation fixed frame top side, in the translation fixed frame
Portion is slidably connected with interior bar side.
5. a kind of multi-layer nano fiber chemi-mechanical polishing pad according to claim 1, it is characterised in that: the buffering dress
It sets and is made of pedestal, the first transposition arm, buffer bar, the second transposition arm, footstock, first transposition arm bottom end and chassis interior hang down
Direct-connected to connect, both ends are fixedly connected with the second transposition arm bottom both ends at the top of first transposition arm, the buffer bar both ends difference
It is connected to both ends and the second transposition arm bottom both ends junction at the top of the first transposition arm, second transposition arm top and footstock bottom
Hold internal vertical connection.
6. a kind of multi-layer nano fiber chemi-mechanical polishing pad according to claim 1, it is characterised in that: the driving dress
It sets and is made of driving motor, the second transmission belt, positioning transmission bar, driven gear, bottom pull strap, bottom gears disk, the drive
Dynamic motor left end side is sequentially connected by the second transmission belt and positioning transmission bar left end side, and the positioning transmission bar is left
It is meshed on the right side of end side surface and driven gear, before bottom pull strap both ends are connected respectively to driven gear and bottom gears disk
End side surface, the bottom gears, which are faced left, holds front side to be meshed with left fixed device right end trailing flank.
7. a kind of multi-layer nano fiber chemi-mechanical polishing pad described according to claim 1 or 2 or 6, it is characterised in that: described
Left fixed device by connection drive rod, guiding tooth wheel disc, the comprehensive pull strap in bottom, fixed frame, bolt, locating wheel, pulling force gear,
It is meshed on front side of left inside bar, left fixed frame composition, the connection drive rod left end trailing flank and guiding tooth wheel disc right end, institute
It states guiding tooth wheel disc front end side face and transmission company is carried out by the comprehensive pull strap in bottom and positioning wheel side, pulling force gear front end side
It connects, the locating wheel rear end is connect with fixed frame left end internal vertical, and the bolt left end is connected to locating wheel through fixed frame
Inside rear end, pulling force gear top side is meshed with left fixed frame bottom side, inside the left fixed frame with it is left inside
Bar side face is flexibly connected.
8. a kind of multi-layer nano fiber chemi-mechanical polishing pad according to claim 1, it is characterised in that: the detent dress
It sets and is made of right detent pawl, chassis, tension spring, left detent pawl, right end is fixed at the top of the right detent pawl bottom end and chassis connects
It connects, the chassis top left is fixedly connected with left detent pawl bottom end, and the tension spring both ends are connected respectively to right detent pawl
Inside left detent pawl middle-end, the right detent pawl, left detent pawl top inner side are flexibly connected with pulling force gear bottom end side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811129667.6A CN109202694B (en) | 2018-09-27 | 2018-09-27 | Multi-layer nanofiber chemical mechanical polishing pad |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811129667.6A CN109202694B (en) | 2018-09-27 | 2018-09-27 | Multi-layer nanofiber chemical mechanical polishing pad |
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| Publication Number | Publication Date |
|---|---|
| CN109202694A true CN109202694A (en) | 2019-01-15 |
| CN109202694B CN109202694B (en) | 2020-07-24 |
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| CN201811129667.6A Active CN109202694B (en) | 2018-09-27 | 2018-09-27 | Multi-layer nanofiber chemical mechanical polishing pad |
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| CN101443157A (en) * | 2006-05-17 | 2009-05-27 | 东洋橡胶工业株式会社 | Polishing pad |
| CN207577929U (en) * | 2017-11-29 | 2018-07-06 | 石家庄奥佳塑业有限公司 | Plastic wrapping machine tripping protection device |
| CN108515355A (en) * | 2018-03-29 | 2018-09-11 | 重庆驰明汽车配件厂 | A kind of suspension type fixed-length cutting device |
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| JPS58126063A (en) * | 1982-03-03 | 1983-07-27 | Fujikoshi Kikai Kogyo Kk | Workpiece loading device for grinding machine |
| CN1524030A (en) * | 2001-04-04 | 2004-08-25 | 圣戈本磨料股份有限公司 | Polishing pad and system |
| CN101443157A (en) * | 2006-05-17 | 2009-05-27 | 东洋橡胶工业株式会社 | Polishing pad |
| CN101130238A (en) * | 2007-09-21 | 2008-02-27 | 南京航空航天大学 | Laminated freezing abrasive material polishing pad used for chemico-mechanical polishing and method of producing the same |
| CN207577929U (en) * | 2017-11-29 | 2018-07-06 | 石家庄奥佳塑业有限公司 | Plastic wrapping machine tripping protection device |
| CN108515355A (en) * | 2018-03-29 | 2018-09-11 | 重庆驰明汽车配件厂 | A kind of suspension type fixed-length cutting device |
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| CN109202694B (en) | 2020-07-24 |
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