CN109193334A - The preparation method of disc waveguide laser crystal - Google Patents
The preparation method of disc waveguide laser crystal Download PDFInfo
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- CN109193334A CN109193334A CN201811166438.1A CN201811166438A CN109193334A CN 109193334 A CN109193334 A CN 109193334A CN 201811166438 A CN201811166438 A CN 201811166438A CN 109193334 A CN109193334 A CN 109193334A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/163—Solid materials characterised by a crystal matrix
- H01S3/164—Solid materials characterised by a crystal matrix garnet
- H01S3/1643—YAG
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
- C30B33/02—Heat treatment
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Abstract
The invention discloses a kind of preparation methods of disc waveguide laser crystal.It is an advantage of the current invention that solving waveguide laser crystal since bonding area is big, bonding face is easy to appear scattering air blister defect, prepares difficult problem.Using the method for the present invention, the disc waveguide laser crystal of high quality can be steadily prepared.
Description
Technical field
The present invention relates to a kind of preparation methods, the especially preparation method of disc waveguide laser crystal.
Background technique
High power Full solid-state solid laser has important application in fields such as industrial processes, national defence, scientific researches.With answering
Development, high power solid state laser is constantly towards higher power, higher efficiency, more high light beam quality, smaller volume, tighter
The structure direction that gathers development.But with increasing for output power, solid state laser gain media interior fuel factor seriously constrains conversion
The raising of efficiency destroys beam quality, it has to install huge and complicated cooling system additional so that laser it is bulky,
Structure tends to be complicated.In order to solve gain media fuel factor, laser device output power level, high power solid state laser are improved
Club-shaped solid laser device, slab solid-state laser, disc shaped solid state laser and optical fiber laser have successively been developed,
Club-shaped solid laser device and traditional plate solid laser, can not be complete since size is larger on three-dimensional for gain media
Full effective solution fuel factor problem, therefore output power level is still limited, monolithic lath maximum power output is 5kW left at present
It is right；Disc shaped solid state laser, gain media very thin thickness, the heat dissipation of very good solution and gain media temperature uniformity are asked
Topic, but complexity is encapsulated, heat sink welding is difficult, and monolithic disc size is limited, and single-deck piece peak power output is also the left side 5kW at present
It is right；Double-clad optical fiber laser, since with good heat-sinking capability, beam Propagation has been limited in gain media well
Portion possesses splendid beam quality, the high light beam quality laser output of higher power level may be implemented, but due to optical fiber core diameter
Smaller, host material is glass, and optic damage threshold value is low, and single fiber output power is limited, and there are bottlenecks for output power.
Technical staff develops a kind of two-dimensional surface waveguide lath high power solid state laser, i.e., will mix ytterbium yttrium-aluminium-garnet
(Yb:YAG) laser crystal, undope YAG crystal and sapphire crystal, but two-dimensional surface waveguide lath structure solid laser device
There is also serious technical bottlenecks: first is that lath gain media very thin thickness, width is very big, and light beam is typical wide aspect ratio
Light beam, the transmission and correction of light beam are difficult, and power density is high, and spontaneous radiation enlarge-effect is serious, and there is serious edge effects
It answers；Second is that complex manufacturing technology, double clad planar waveguiding structure lath is difficult to obtain.These technological deficiencies are solved, it can be from two
A aspect considers: being on the one hand to change existing structure, makes ring structure, eliminates edge effect；It on the other hand is solution
Certainly planar waveguiding structure lath preparation process problem reduces preparation process difficulty, realizes low cost, highly reliable preparation.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of preparation methods of disc waveguide laser crystal.
The present invention is achieved through the following technical solutions.
A kind of preparation method of disc waveguide laser crystal, step include:
(1) it is adopted with the YAG monocrystalline of Artificial Growth, doping Re:YAG monocrystalline and sapphire single-crystal for initial crystal boule
It is machined into method and is cut into three kinds of crystal blank materials from three kinds of crystal boules；
(2) using ultrasonic rotation processing method and mechanical optics abrasive polishing method, the crystal blank material that choosing is cut out is processed
At the cylinder for slightly having certain taper, inner layer cylinder outer surface taper and the inner surface taper of outer layer cylinder match；
(3) using classic mechanical polishing method, optical precision throwing is carried out to the outer or inner surface between each layer crystal body cylinder
Light processing；
(4) the crystal cylinder of completion of processing is impregnated by 12h or more using potassium bichromate washing lotion or concentrated sulfuric acid solution, then
It rinses well；
(5) by innermost layer crystal cylinder: YAG/ sapphire is inserted into adjacent secondary internal layer:, will in the inner hole of Re:YAG/YAG
The outer surface of internal layer crystal cylinder is together with the inner surface optical cement of outer layer crystal cylinder；
(6) the good composite crystal cylinder of optical cement is vertically loaded into the crucible or mold of vacuum bonding furnace along cylinder center's line
In, cylinder interior and the external ZrO for being packed into partial size and being less than 1mm2Ceramic Balls or aluminium oxide ceramic ball, until not crossing on crystal
Square 1cm or more covers the graphite to match with crucible internal diameter or mold outer diameter or ceramic platen in the upper surface of Ceramic Balls, and
The weight for applying 20~100kg above, then vacuumizes, is heat-treated to crystal；
(7) after the composite crystal cylinder after taking out heat treatment, grinding and polishing treatment are carried out to the outer surface of composite cylinder,
It is worked into design thickness, and surface polishing, then repeats (5) and (6), multilayer crystal is bonded together through Overheating Treatment.
(8) multilayer crystal bonding is successively constituted into MULTILAYER COMPOSITE crystal together；
(9) the MULTILAYER COMPOSITE crystal being bonded together is put in atmosphere high temperature furnace and is annealed；
(10) mechanical lapping and polishing method are used, MULTILAYER COMPOSITE crystal cylinder inner surface and the outer surface of annealing will be passed through
Optical precision polishing treatment is carried out, and is worked into design thickness, optical precision processing method is then used, to MULTILAYER COMPOSITE crystal
The both ends of cylinder carry out grinding and precise polished processing, and final disc waveguide laser crystal element can be obtained.
Further, the Re of (1) is one or more of Nd, Yb, Er, Tm, Ho ion.
Further, (1) is selected in terms of crystal diameter and cuts crystal element diameter than structure disc waveguide laser crystal respective sets
The big 1mm or more of the final outer diameter of part, length 5mm or more more than disc waveguide laser crystal final lengths.
Further, the initial wall thickness of (2) every layer of cylinder is no less than 2mm, and the taper of each layer cylinder is in 1:200~1:1000
Between.
Further, (3) it is horizontal not higher than 10-5 grades to be polished to surface roughness Ra≤0.7nm, finish.
Further, there cannot be bubble between two good surfaces of (5) optical cement, otherwise need optical cement again.
Further, the vacuum degree of (6) heat treatment is not higher than 10-2Pa, heat treatment temperature between 1000 DEG C~1600 DEG C,
Constant temperature time is not less than 10h.
Further, (7) are polished to the level that roughness is better than 10-5 grades lower than 0.7nm, finish.
Further, (9) annealing 1300~1500 DEG C at a temperature of, the time be for 24 hours.
Beneficial effects of the present invention:
Waveguide laser crystal is solved since bonding area is big, bonding face is easy to appear scattering air blister defect, and preparation is difficult
Problem.Using the method for the present invention, the disc waveguide laser crystal of high quality can be steadily prepared.
Specific embodiment
Below according to embodiment, invention is further described in detail.
1. disc waveguide laser crystal, by inside and outside two layers undope YAG crystal cylinder and one layer of doping YAG crystal circle
Cylinder composition, the length of three layer crystal body cylinders is identical, between 30~200mm.The internal diameter of internal layer YAG cylinder is 5~48mm, wall thickness
For 1~3mm；The outer diameter of the internal diameter and internal layer YAG crystal of the Re:YAG crystal cylinder of middle layer matches, and wall thickness 50~300 is micro-
Rice；The wall thickness of outer layer YAG cylinder is 1~3mm, and internal diameter matches with middle layer Re:YAG crystal outside diameter of cylinder.
Preparation method:
2. with the high-quality YAG monocrystalline of Artificial Growth, doping Re:YAG (Re be one of Nd, Yb, Er, Tm, Ho ion or
It is several) monocrystalline and sapphire single-crystal blank be initial feed, according to the annular of final processing preparation from the crystal boule of growth
Waveguide crystal component size chooses corresponding crystal element, it is contemplated that machining allowance, in terms of crystal diameter, crystal element is cut in choosing
Diameter outer diameter more final than composition disc waveguide crystal corresponding assembly is 1mm or more big, and length is finally longer than disc waveguide crystal element
Spend more 5mm or more.Then crystal element blank material is cut into from crystal boule using Conventional machining methods.
3. being added for the ease of realizing the thermal diffusion bonding between arbitrarily inside and outside two layers cylinder-shaped crystal using ultrasound rotation
Work method and machine optical grinding polishing method and, the crystal blank material that cuts out of choosing is processed into the circle for slightly having certain taper
Cylinder, in order to ensure the machining accuracy of crystal and the optical cement in later period, bonding, and ensure do not influence disc waveguide laser crystal use and
Waveguide transmission effect, the initial wall thickness of every layer of cylinder are no less than 2mm, and the taper of each layer cylinder wants as small as possible, in 1:200~1:
Between 1000, inner layer cylinder outer surface taper and the inner surface taper of outer layer cylinder match.
4. carrying out optical precision polishing to the outer or inner surface between each layer crystal body cylinder using classic mechanical polishing method
It is horizontal not higher than 10-5 grades to be polished to surface roughness Ra≤0.7nm, finish for processing.
6. the crystal cylinder of completion of processing is impregnated 12h or more using potassium bichromate washing lotion or concentrated sulfuric acid solution, then
It rinses well.
7. innermost layer crystal cylinder (YAG or sapphire) is inserted into adjacent secondary internal layer (Re:YAG or YAG) inner hole
In, by the outer surface of internal layer crystal cylinder together with the inner surface optical cement of outer layer crystal cylinder, there cannot be gas between two surfaces
Bubble, otherwise needs optical cement again.
8. the good composite crystal cylinder of optical cement to be vertically loaded into the crucible or mold of vacuum bonding furnace along cylinder center's line
In, cylinder interior and the external ZrO for being packed into partial size and being less than 1mm2Ceramic Balls or aluminium oxide ceramic ball, until not crossing on crystal
Square 1cm or more covers the graphite to match with crucible internal diameter or mold outer diameter or ceramic platen in the upper surface of Ceramic Balls, and
Apply the weight of 20~100kg above.Then it vacuumizes, crystal is heat-treated, vacuum degree is not higher than 10-2Pa, heat at
Temperature is managed between 1000 DEG C~1600 DEG C, constant temperature time is not less than 10h.
9. after taking out the composite crystal cylinder after heat treatment, grinding and polishing treatment are carried out to the outer surface of composite cylinder,
It is worked into design thickness, and surface polishing is better than 10-5 grades of level to roughness lower than 0.7nm, finish, then repeatedly 7 He
Multilayer crystal is bonded together by 8 the step of through Overheating Treatment.
10. step 9, successively together by multilayer crystal bonding.
11. the MULTILAYER COMPOSITE crystal being bonded together is put in atmosphere high temperature furnace, 1300~1500 DEG C at a temperature of,
Anneal for 24 hours
12. using mechanical lapping and polishing method, MULTILAYER COMPOSITE crystal cylinder inner surface and the outer surface of annealing will be passed through
Optical precision polishing treatment is carried out, and is worked into design thickness.Then optical precision processing method is used, to MULTILAYER COMPOSITE crystal
The both ends of cylinder carry out grinding and precise polished processing, and final disc waveguide laser crystal element can be obtained.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow be familiar with this field technology
Personage can understand the content of present invention and be implemented, and it is not intended to limit the scope of the present invention.It is all according to the present invention
Equivalent change or modification made by Spirit Essence, should be covered by the scope of protection of the present invention.
Claims (9)
1. a kind of preparation method of disc waveguide laser crystal, which is characterized in that step includes:
(1) with the YAG monocrystalline of Artificial Growth, doping Re:YAG monocrystalline and sapphire single-crystal for initial crystal boule, using machine
Three kinds of crystal blank materials are cut by tool processing method from three kinds of crystal boules；
(2) using ultrasonic rotation processing method and mechanical optics abrasive polishing method, the crystal blank material that choosing is cut out is processed into summary
Micro-strip has the cylinder of certain taper, and inner layer cylinder outer surface taper and the inner surface taper of outer layer cylinder match；
(3) using classic mechanical polishing method, the outer or inner surface between each layer crystal body cylinder is carried out at optical precision polishing
Reason；
(4) the crystal cylinder of completion of processing is impregnated by 12h or more using potassium bichromate washing lotion or concentrated sulfuric acid solution, then rinsed
Completely；
(5) by innermost layer crystal cylinder: YAG/ sapphire is inserted into adjacent secondary internal layer: in the inner hole of Re:YAG/YAG, by internal layer
The outer surface of crystal cylinder is together with the inner surface optical cement of outer layer crystal cylinder；
(6) by the good composite crystal cylinder of optical cement along the crucible or mold that cylinder center's line is vertically loaded into vacuum bonding furnace,
Cylinder interior and the external ZrO for being packed into partial size and being less than 1mm2Ceramic Balls or aluminium oxide ceramic ball, until not crossing above crystal
1cm or more covers the graphite to match with crucible internal diameter or mold outer diameter or ceramic platen in the upper surface of Ceramic Balls, and
Top applies the weight of 20~100kg, then vacuumizes, is heat-treated to crystal；
(7) after the composite crystal cylinder after taking out heat treatment, grinding and polishing treatment, processing are carried out to the outer surface of composite cylinder
To design thickness, and surface polishing, (5) and (6) are then repeated, multilayer crystal is bonded together through Overheating Treatment.
(8) multilayer crystal bonding is successively constituted into MULTILAYER COMPOSITE crystal together；
(9) the MULTILAYER COMPOSITE crystal being bonded together is put in atmosphere high temperature furnace and is annealed；
(10) mechanical lapping and polishing method are used, the MULTILAYER COMPOSITE crystal cylinder inner surface for passing through annealing and outer surface are carried out
Optical precision polishing treatment, and it is worked into design thickness, optical precision processing method is then used, to MULTILAYER COMPOSITE crystal cylinder
Both ends carry out grinding and precise polished processing, final disc waveguide laser crystal element can be obtained.
2. the preparation method of disc waveguide laser crystal according to claim 1, which is characterized in that (1) Re be Nd,
One or more of Yb, Er, Tm, Ho ion.
3. the preparation method of disc waveguide laser crystal according to claim 1, which is characterized in that (1) in crystal diameter
Aspect, it is 1mm or more big that crystal element diameter outer diameter more final than structure disc waveguide laser crystal corresponding assembly is cut in choosing, and length is than annular
The more 5mm or more of waveguide laser crystal final lengths.
4. the preparation method of disc waveguide laser crystal according to claim 1, which is characterized in that (2) every layer of cylinder
Initial wall thickness is no less than 2mm, and the taper of each layer cylinder is between 1:200~1:1000.
5. the preparation method of disc waveguide laser crystal according to claim 1, which is characterized in that (3) be polished to surface
Roughness Ra≤0.7nm, finish are horizontal not higher than 10-5 grades.
6. the preparation method of disc waveguide laser crystal according to claim 1, which is characterized in that (5) optical cement it is good two
There cannot be bubble between surface, otherwise need optical cement again.
7. the preparation method of disc waveguide laser crystal according to claim 1, which is characterized in that (6) heat treatment is true
Reciprocal of duty cycle is not higher than 10-2Pa, for heat treatment temperature between 1000 DEG C~1600 DEG C, constant temperature time is not less than 10h.
8. the preparation method of disc waveguide laser crystal according to claim 1, which is characterized in that (7) be polished to coarse
Degree is better than 10-5 grades of level lower than 0.7nm, finish.
9. the preparation method of disc waveguide laser crystal according to claim 1, which is characterized in that (9) annealing is 1300
At a temperature of~1500 DEG C, the time is for 24 hours.
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| CN201811166438.1A CN109193334A (en) | 2018-10-08 | 2018-10-08 | The preparation method of disc waveguide laser crystal |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110183972A (en) * | 2019-07-02 | 2019-08-30 | 成都东骏激光股份有限公司 | A kind of acid polishing slurry and its application in the YAG series material for obtaining super-smooth surface |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105655864A (en) * | 2016-03-01 | 2016-06-08 | 中国科学院上海光学精密机械研究所 | Rare earth ion doped yttrium aluminum garnet laser material with sandwich ceramic and single-crystal composite structure and preparation method thereof |
-
2018
- 2018-10-08 CN CN201811166438.1A patent/CN109193334A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105655864A (en) * | 2016-03-01 | 2016-06-08 | 中国科学院上海光学精密机械研究所 | Rare earth ion doped yttrium aluminum garnet laser material with sandwich ceramic and single-crystal composite structure and preparation method thereof |
Non-Patent Citations (1)
| Title |
|---|
| 周春林: "复合结构激光材料", 《中国优秀硕士学位论文全文数据库信息科技辑》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110183972A (en) * | 2019-07-02 | 2019-08-30 | 成都东骏激光股份有限公司 | A kind of acid polishing slurry and its application in the YAG series material for obtaining super-smooth surface |
| CN110183972B (en) * | 2019-07-02 | 2021-02-02 | 成都东骏激光股份有限公司 | Acidic polishing solution and application thereof in obtaining YAG series materials with ultra-smooth surfaces |
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Application publication date: 20190111 |