CN109187622A - A kind of measurement method that high-resolution display is shunk with electronics glass heat - Google Patents
A kind of measurement method that high-resolution display is shunk with electronics glass heat Download PDFInfo
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- CN109187622A CN109187622A CN201810821232.1A CN201810821232A CN109187622A CN 109187622 A CN109187622 A CN 109187622A CN 201810821232 A CN201810821232 A CN 201810821232A CN 109187622 A CN109187622 A CN 109187622A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/16—Investigating or analyzing materials by the use of thermal means by investigating thermal coefficient of expansion
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Abstract
The measurement method that a kind of high-resolution display provided by the invention is shunk with electronics glass heat, comprising the following steps: step 1, take glass sample to be measured, carve two shape tags on the glass sample to be measured and along its length, be denoted as A and B respectively；Step 2, the distance between measurement markers A and label B, the distance L0 before being heat-treated；Step 3, it will be put into heating device and be heat-treated with markd glass sample to be measured in step 1；Step 4, the distance between label A after measurement heat treatment and label B, obtains distance L；Step 5, the percent thermal shrinkage a of glass sample to be measured is calculated according to above-mentioned resulting distance L0 and distance L；Influence of the load to length in the scribing line depth difference or use dilatometer measurement process that the present invention solves sand paper or glass cutter scribing line is introduced into, to cause very big measurement error, precision, the favorable reproducibility of measurement are also improved simultaneously, preferably can provide data reference for the manufacturing process of display device.
Description
Technical field
The invention belongs to glass field of measuring technique, and in particular to a kind of survey that high-resolution display is shunk with electronics glass heat
Amount method.
Background technique
With the continuous development of display technology, people pursue high-resolution and high grade picture increasingly, big to the size of TFT
There is higher requirement in the small and response time.LTPS technology is (higher than amorphous silicon technology by 1 due to its electron mobility with higher
Thousand times), and allow to manufacture driving IC and other electronic devices on the glass substrate, device cost is reduced, the mould group in later period is simplified
Technique improves yields, to become the TFT manufacturing technology of current mainstream.
LTPS technique generallys use laser annealing techniques to make amorphous silicon layer, most efficient polysilicon (p-Si) processing
Method be 600 DEG C or more at a temperature of operate, this method can form over a large area and (be used to high electron mobility
Be quickly converted) and fabulous TFT uniformity polycrystalline-Si film.This manufacturing method is generally included using the method for increasing temperature
It is sequentially depositing film and forms pattern, the temperature that these methods cause substrate to be heated to 500 DEG C or more.Such high temperature
Under, base plate glass is easy to produce contraction and deforms, and raising and the product yield of pixel is hindered, to prevent substrate electronic glass from existing
Contraction distortion in hot procedure later, glass need lower shrinking percentage.The shrinking percentage of general base plate glass is lower than
40ppm, in order to further solve the problems, such as to shrink, shrinking percentage is preferably up to 10ppm hereinafter, this requires be heat-shrinked with very high
Measurement accuracy.
Dilatometer is currently mainly used to test the thermal contraction of glass, but this method can be to sample in measurement
Apply the power of certain load, which can make the size of sample change, especially in holding stage, to the lesser glass of thickness
Glass influence is bigger, so measurement result cannot really reflect the thermal contraction performance of glass, while different thermal contraction test conditions
It needs to make standard curve corresponding with the test condition in advance using dilatometer before testing, increases measurement period.
It is crossed using glass cutter or sand paper at the both ends of sample there are also a kind of, sample is divided into reference plate and measurement piece
Two parts, measurement piece are put into Equipment for Heating Processing and are heat-treated according to test condition, then under an optical microscope with benchmark
Piece is compared, and reference plate and measurement on piece scribing line spacing is measured, to calculate sample thermal shrinking quantity.This method is being drawn
The deep mixed sample that can lead to scribing line in line process due to the variation of extraneous strength, can make scribing line generate chipping phenomenon when serious,
It is fuzzy to will cause scribing edge image in the observation of optical microscopy high power in this way, and after reference plate and measurement piece split, spells
Fuzzy image can be also presented under optical microscopy high power by closing region, and the scribing line of scribing line and measurement on piece on reference plate is always
It is difficult on same focal plane, observation multiple is bigger, and this phenomenon is more obvious, and will lead to measure when crossing spacing in this way
Error increases, and for the electronic glass of high-resolution display, Heat Shrinkage value generally all very little, this error is to measurement result
Influencing can be bigger.Furthermore when being crossed using sand paper generally can in the ipsilateral line marked at least more than 2, in this way later observation,
It will increase the probability of route selection mistake when measurement, it is therefore desirable to it is a kind of easy to operate, and accurately, quickly can reflect electronic glass under
Swim thermal contraction measurement method experienced in manufacturing process.
Summary of the invention
The purpose of the present invention is to provide the measurement method that a kind of high-resolution display is shunk with electronics glass heat, solve existing
The measurement method that some electronic glasses are heat-shrinked, the defect that measurement error is larger, precision is not high.
In order to achieve the above object, the technical solution adopted by the present invention is that:
The measurement method that a kind of high-resolution display provided by the invention is shunk with electronics glass heat, comprising the following steps:
Step 1, glass sample to be measured is taken, on the glass sample to be measured and along its length two shape marks of label
Note, is denoted as A and B respectively；
Step 2, it is obtained in measuring process 1 with the distance between the label A and label B on markd glass sample to be measured
Distance L0 before to heat treatment；
Step 3, it will be put into heating device and be heat-treated with markd glass sample to be measured in step 1, later will
Glass sample to be measured after heat treatment is placed in constant room temperature environment；
Step 4, the distance between the label A in measuring process 3 on glass sample to be measured after cooling and label B, obtain
Distance L after heat treatment；
Step 5, the percent thermal shrinkage a of glass sample to be measured, i.e. a=(L- are calculated according to above-mentioned resulting distance L0 and distance L
L0)/L0。
Preferably, in step 1, two shape tags are carved on glass sample to be measured using Vickers, meanwhile, mark
Remember that A and label B are coaxially arranged.
Preferably, the distance between optical microscopy measurement markers A and label B are utilized in step 2 and step 4, wherein light
Learn microscopical model Zeiss Axio Scope A1.
Preferably, in step 3, glass sample to be measured is heated from room temperature first, in accordance with the heating rate of 5~10 DEG C/min
To its Ts~Tg, 10~120min is kept the temperature later, is finally down to room temperature according to the rate of temperature fall of 10~600 DEG C/min.
Preferably, the model of heating device is RTP-1600 vacuum quick anneal oven.
Compared with prior art, the beneficial effects of the present invention are:
The measurement method that a kind of high-resolution display provided by the invention is shunk with electronics glass heat, by using Vickers hardness
Meter is marked on sample, and the scribing line depth difference for solving sand paper or glass cutter scribing line introducing causes under an optical microscope
The scribing line image for observing edge blurry is compared without the scribing line of reference plate and measurement on piece is carried out splicing, to cause
Very big measurement error, while avoiding influence of the load to sample size in dilatometer test process, the survey being finally heat-shrinked
It is higher to measure result accuracy, while also improving the precision of measurement, favorable reproducibility, can preferably be the manufacturing process of display device
Data reference is provided.
Detailed description of the invention
Fig. 1 is glass plate schematic diagram；
Fig. 2 is the schematic diagram of microscope lower glass plate after being marked using Vickers；
Fig. 3 is the schematic diagram of microscope lower glass plate after marking and being heat-treated.
Specific embodiment
With reference to the accompanying drawing, the present invention is described in more detail.
The measurement method that a kind of high-resolution display provided by the invention is shunk with electronics glass heat, includes the following steps:
Step (1): taking glass sample to be measured 1 as shown in Figure 1, uses dimension in the most two sides of 1 length direction of sample to be tested
Family name's hardometer does two shape tags, is denoted as A, B；
Step (2): using the distance between optical microscopy measurement A, B L0, as shown in Figure 2；
Step (3): sample being put into pallet, then pallet is put into heating device, will according to certain heating rate
Sample is heated within the scope of its Ts~Tg (within the scope of Annealing Temperature of Glass and knee pointy temperature), after keeping the temperature a period of time, according to
Certain rate of temperature fall is down to room temperature, then, pallet is taken out out of heating device, is placed in constant room temperature environment；
Step (4): using the distance between optical microscopy measurement A, B L, as shown in Figure 3；
Step (5): percent thermal shrinkage a=(L-L0)/L0 of sample is calculated.
Under preferable case, in step (1), hardometer can be used Vickers, model HVT-1000, can be with
Diamond indicia is done on sample.
Under preferable case, in step (1), two labels of A, B are parallel to each other.
Under preferable case, in step (2), optical microscopy is furnished with automatic sample sample platform, can be to sample according to setting path
It is automatically moved；Wherein, microscope model Zeiss Axio Scope A1, automatically moving is to quickly and accurately carry out
The thermal shrinking quantity at sample both ends measures；
Under preferable case, in step (2), optical microscopy has jigsaw puzzle function, can be right under the amplification factor of setting
The optical imagery of entire sample is scanned, takes pictures, picture mosaic.
Under preferable case, in step (3), pallet has mesh shape, it is ensured that upper and lower when sample levels are placed
Surface heating, cooling rate having the same.
Under preferable case, in step (3), the model RTP-1600 vacuum quick anneal oven of used heating device；
There is relative closure space inside heating device, further preferably there is flat sub-box space, it is small to guarantee that sample is put into
In lattice space, surrounding uniform temperature fields.
Under preferable case, in step (3), heating device has the rate of temperature fall of 1~900 DEG C/min.
Under preferable case, in step (3), heating rate is 5~10 DEG C/min, and soaking time is 10~120min, cooling
Rate is 10~600 DEG C/min.
The present invention measures the method being heat-shrinked, and is marked on sample by using Vickers, solves sand paper
Or the scribing line depth difference that glass cutter scribing line introduces causes the scribing line image for observing edge blurry under an optical microscope, also not
It is compared with the scribing line of reference plate and measurement on piece is carried out splicing, to cause very big measurement error, while avoiding expansion
Influence of the load to sample size in instrument test process, the measurement result accuracy being finally heat-shrinked is higher, also improves simultaneously
Precision, the favorable reproducibility of measurement preferably can provide data reference for the manufacturing process of display device.
Embodiment
The present invention provides a kind of high-resolution display measurement method of electronics glass heat shrinking percentage, this method includes as follows
Step:
Step (1): taking glass sample to be measured, does two using Vickers in the most two sides of sample to be tested length direction
Diamond indicia is denoted as A, B；
Step (2): the distance between optical microscopy measurement A, B L0 is used；
Step (3): sample is put into grid tray, then pallet is put into the sub-box space of heating device, according to 5
The heating rate of~10 DEG C/min heats the sample to its 550 DEG C, 600 DEG C, after 10~120 DEG C of heat preservation, according to 10~600 DEG C/
Min rate of temperature fall is down to room temperature, then, pallet is taken out out of heating device, is placed in constant room temperature environment；
Step (4): the distance between optical microscopy measurement A, B L is used；
Step (5): percent thermal shrinkage a=(L-L0)/L0 of sample is calculated.
Distance L0 (μm), L (μm) in sample between A, B, heating rate (DEG C/min), holding temperature (DEG C), soaking time
(DEG C), rate of temperature fall (DEG C/min) and final percent thermal shrinkage measurement result (ppm) are shown in Table 1.
Table 1
As can be seen from the data in table 1, the measurement method that the present invention is heat-shrinked, precision is high, favorable reproducibility, standard deviation very little,
Result credibility is high, is able to satisfy research and development completely and manufacture requires.
The preferred embodiment of the present invention has been described above in detail, but the present invention is not limited in above-mentioned implementation method
Detail sees within the scope of the technical concept of the present invention, can be with various simple variants of the technical solution of the present invention are made, this
A little simple variants all belong to the scope of protection of the present invention.
Claims (5)
1. the measurement method that a kind of high-resolution display is shunk with electronics glass heat, which comprises the following steps:
Step 1, glass sample to be measured is taken, carves two shape tags on the glass sample to be measured and along its length, respectively
It is denoted as A and B；
Step 2, heat is obtained with the distance between the label A and label B on markd glass sample to be measured in measuring process 1
Distance L0 before processing；
Step 3, it will be put into heating device and be heat-treated with markd glass sample to be measured in step 1, it later will be at heat
Glass sample to be measured after reason is placed in constant room temperature environment；
Step 4, the distance between the label A in measuring process 3 on glass sample to be measured after cooling and label B, obtain hot place
Distance L after reason；
Step 5, calculate the percent thermal shrinkage a of glass sample to be measured according to above-mentioned resulting distance L0 and distance L, i.e. a=(L-L0)/
L0。
2. the measurement method that a kind of high-resolution display according to claim 1 is shunk with electronics glass heat, which is characterized in that
In step 1, using Vickers on glass sample to be measured two shape tags of label, meanwhile, label A and label B it is coaxial
Arrangement.
3. the measurement method that a kind of high-resolution display according to claim 1 is shunk with electronics glass heat, which is characterized in that
The distance between optical microscopy measurement markers A and label B are utilized in step 2 and step 4, wherein the model of optical microscopy
Zeiss Axio Scope A1.
4. the measurement method that a kind of high-resolution display according to claim 1 is shunk with electronics glass heat, which is characterized in that
Heat treatment process parameter in step 3, in heating device are as follows:
Glass sample to be measured is heated within the scope of its Ts~Tg from room temperature first, in accordance with the heating rate of 5~10 DEG C/min, it
10~120min is kept the temperature afterwards, is finally down to room temperature according to the rate of temperature fall of 10~600 DEG C/min.
5. the measurement method that a kind of high-resolution display according to claim 1 is shunk with electronics glass heat, which is characterized in that
The model of heating device is RTP-1600 vacuum quick anneal oven.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810821232.1A CN109187622A (en) | 2018-07-24 | 2018-07-24 | A kind of measurement method that high-resolution display is shunk with electronics glass heat |
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| CN201810821232.1A CN109187622A (en) | 2018-07-24 | 2018-07-24 | A kind of measurement method that high-resolution display is shunk with electronics glass heat |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112557435A (en) * | 2020-12-08 | 2021-03-26 | 河北光兴半导体技术有限公司 | Glass thermal shrinkage rate measuring system, method, storage medium and electronic device |
| CN112649465A (en) * | 2020-11-20 | 2021-04-13 | 吉林大学 | Method for testing low-temperature thermal shrinkage coefficient of material by utilizing residual indentation morphology |
| CN113075255A (en) * | 2021-03-24 | 2021-07-06 | 湖北亿纬动力有限公司 | Lithium battery diaphragm thermal shrinkage test method and test equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113075255A (en) * | 2021-03-24 | 2021-07-06 | 湖北亿纬动力有限公司 | Lithium battery diaphragm thermal shrinkage test method and test equipment |
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