CN109161848A - A kind of CrAlBCN coating, the nano combined CrAlBCN coating of low friction seawater corrosion resistance and preparation method thereof - Google Patents
A kind of CrAlBCN coating, the nano combined CrAlBCN coating of low friction seawater corrosion resistance and preparation method thereof Download PDFInfo
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0664—Carbonitrides
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/067—Borides
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3485—Sputtering using pulsed power to the target
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Abstract
The present invention relates to a kind of CrAlBCN coatings, the nano combined CrAlBCN coating of low friction seawater corrosion resistance and preparation method thereof.The CrAlBCN coating has nc- (Al, Cr) N/a-BN-a-C structure.CrAlBCN coating provided by the invention has high rigidity and binding force, low-friction coefficient in briny environment, superior sea water corrosion resistant；When in the seawater with SiC ball opposite grinding, the lubricating action of the hydrated oxide layer and graphitic carbon that are generated based on friction chemical reaction, its coefficient of friction is relatively lower than 0.3, binding force is greater than 60 N, hardness is greater than 20 GPa, in deep-sea detection equipment, marine resources winning apparatus, the marine environment surfaces such as sea transport equipment protect field to have great application prospect.
Description
Technical field
The invention belongs to thin film materials arts, and in particular to a kind of CrAlBCN coating, low friction seawater corrosion resistance nanometer are multiple
Close CrAlBCN coating and preparation method thereof.
Background technique
China's ocean development constantly extends both in depth and in breadth, the strategic objective for developing into power of ocean science.But
It is that the key of marine resources development is advanced technology and superior equipment.Such as deep-sea detection equipment, marine resources exploitation is set
It is standby, the key of sea transport equipment etc. and the relevant technologies as ocean development.However harsh marine environment is to marine settings
Fretting wear, lubrication sealing and corrosion more stringent requirements are proposed.Have in the key position deposition of marine settings and well rubs
The ganoine thin film for wiping performance and corrosion resistance, by the effective service life for improving equipment.In process of friction and wear, lubricating oil
Use improve frictional behaviour and elongated component service life play the role of it is key.However, the fraction as petroleum, largely
The use of lubricating oil leads to the exhaustive exploitation of petroleum, proposes huge challenge to energy saving and protection environment.And use petroleum
Product is also on the rise to the pollution of environment, wherein to the pollution of water resource mainly from the leakage of lubricating oil.Relative to can not
For renewable sources of energy petroleum, water resource relative abundance, and have many advantages, such as it is pollution-free and cheap, and water as work be situated between
Matter is widely applied to industrial circle.In recent years, the great interest of scholars is caused about the research of water lubrication.But water
As lubricant medium, there is unfavorable factor, that is, strong corrosive and viscosity are low.So the research for water lubrication occurs two greatly
Direction, one is Xiang Shuizhong to add pollution-free lubricant component, such as adds water-soluble polyethylene glycol phosphate, forms water based lubrication
Agent.Another kind is to develop the material for being applicable in water lubrication, improves the effect of water lubrication.Ceramic material friction and wear behavior is preferable, but
It is the hardness height and Resisting fractre poor toughness due to ceramic material, so difficulty of processing is big and at high cost.In contrast, ganoine thin film
Because having excellent comprehensive performance to be concerned in material science, nano compound film conduct is deposited on stainless steel substrate
Water lubrication material, be not only easily worked in this way molding again have film performance, have been applied in machine-building, auto industry and
21st century of the fields such as mould industry are the new era that the whole world large-scale develops and utilizes marine resources, Development of Marine economy.
Diamond, Diamond-like carbon, a-CN and Graphite-like carbon film and ceramic material and
Steel ball when opposite grinding, can obtain lower coefficient of friction and wear rate under water environment, thus become potential water lubrication material；But
It is the maximum defect of carbon-base film is that film-substrate cohesion is poor and internal stress is larger, to limit its extensive use.Compared to it
Under, transition metal nitride (CrN) is since it is with high-intensitive and preferable anti-oxidant and corrosion resistance, as water lubrication material
Material will have biggish potentiality.Research shows that can be further improved chromium nitride base film by element doping (C, Al or B)
Mechanics and tribological property.After carbon adulterates CrN base film, since the amorphous carbon of formation can be played in frictional interface
Lubricating action, to obtain lower coefficient of friction；And after B element doping, the BC or CBN of formation have high hardness,
Rub resistance and thermal stability.
Therefore, the nano-composite coating of multi-element doping has a good application prospect in the corrosion-resistant field in ocean.
Summary of the invention
It is an object of the invention to overcome, the film-substrate cohesion of carbon-base film in the prior art is poor and internal stress is biggish
Defect and deficiency provide a kind of CrAlBCN coating.CrAlBCN coating provided by the invention has high rigidity and binding force, seawater
Low-friction coefficient in environment, superior sea water corrosion resistant, in deep-sea detection equipment, marine resources winning apparatus, ocean fortune
The marine environment surfaces such as transfer device protect field to have great application prospect.
Another object of the present invention is to provide a kind of nano combined CrAlBCN coatings of low friction seawater corrosion resistance.
Another object of the present invention is to provide the preparations of the nano combined CrAlBCN coating of above-mentioned low friction seawater corrosion resistance
Method.
Another object of the present invention is to provide the nano combined CrAlBCN coatings of above-mentioned low friction seawater corrosion resistance in ocean
Application in environmental surfaces protection.
For achieving the above object, the present invention adopts the following technical scheme:
A kind of CrAlBCN coating, the CrAlBCN coating have nc- (Al, Cr) N/a-BN-a-C structure.
Signified nc- (Al, Cr) N/a-BN-a-C structure of the invention refers to that nanometer (Al, Cr) N crystal grain is embedded in amorphous BN
And among amorphous C matrix.Under normal circumstances, (Al, Cr) N crystallite dimension is between 5 ~ 15 nm.
The present inventor is by repeatedly the study found that the CrAlBCN coating with the specific structure has high rigidity
And binding force, low-friction coefficient in briny environment, superior sea water corrosion resistant.When in the seawater with SiC ball opposite grinding, base
In the lubricating action of hydrated oxide layer and graphitic carbon that friction chemical reaction generates, coefficient of friction is relatively lower than 0.3, and binding force is big
In 60 N, hardness is greater than 20 GPa.
Preferably, the atomic percentage of Cr element is 20 ~ 30 %, the atomic percent of Al element in the CrAlBCN coating
Number is 10 ~ 15 %, and the atomic percentage of B element is 10 ~ 15 %, and the atomic percentage of C element is 21 ~ 25 %, the original of N element
Sub- percentage is 20 ~ 26 %.
It is further preferable that the atomic percentage of Cr element is 21 %, the atomic percent of Al element in the CrAlBCN coating
Number is 15 %, and the atomic percentage of B element is 15 %, and the atomic percentage of C element is 24 %, and the atomic percentage of N element is
25 %。
Preferably, the hardness of the CrAlBCN coating is greater than 20 GPa, and low-friction coefficient is lower than 0.3, and binding force is greater than
60N。
A kind of nano combined CrAlBCN coating of low friction seawater corrosion resistance, the nano combined CrAlBCN coating are included in
Al metal bonding layer, AlCN transition zone and the CrAlBCN coating being sequentially depositing in substrate.
Preferably, the Al metal bonding layer with a thickness of 50 ~ 200nm.
Preferably, the AlCN transition zone with a thickness of 100 ~ 300nm.
Preferably, the CrAlBCN coating with a thickness of 2 ~ 6 μm.
The preparation method of above-mentioned nano combined CrAlBCN coating, including following preparation step:
S1: the depositing Al metal bonding layer in substrate；CrB is made2For use；
S2: Ar, C are passed through to Al metal bonding layer2H2And N2, AlCN transition zone is prepared on Al metal bonding layer；It is described
C2H2And N2The sum of with the volume ratio of Ar be 1 ~ 5:1；The C2H2And N2Volume ratio be 1:3 ~ 4；
S3: to the resulting AlCN transition zone of S2 and CrB2In be passed through Ar, C2H2And N2, deposit and obtain CrAlBCN coating to get receiving
Meter Fu He CrAlBCN coating；The C2H2And N2The sum of with the volume ratio of Ar be 1 ~ 4:1；The C2H2And N2Volume ratio be 1:2
~5。
In the preparation process of coating, the ratio of gas is had very important effect, and influences the ionization of plasma
Rate, the sputtering yield of metal targets and the atomic ratio of final coating.Preparation method provided by the invention passes through strict control
C2H2、N2It is multiple that the high performance CrAlBCN coating with nano composite structure is prepared in volumetric usage relationship between Ar
Coating is closed, there is high rigidity and binding force, low-friction coefficient in briny environment, superior sea water corrosion resistant is visited at deep-sea
Measurement equipment, marine resources winning apparatus, the marine environment surfaces such as sea transport equipment protect field to have great application prospect.
Preferably, medium frequency magnetron sputtering technology depositing Al metal bonding layer in substrate is utilized in S1；Utilize high power arteries and veins
It rushes magnetron sputtering technique and CrB is made2；In S2 and S3 using anode layer ion source technology be prepared respectively AlCN transition zone and
CrAlBCN coating.
DC pulse magnetron sputtering have low temperature depositing, surface it is smooth, without grain defect, film-substrate cohesion is strong, coating causes
Close advantage obtains excellent film-substrate cohesion and adjustable coating internal stress while controlling coating microstructure.
Preferably, further include the steps that before S1 to substrate cleaning, drying and aura cleaning.
Application of the above-mentioned nano combined CrAlBCN coating in marine environment surface protection is also in protection scope of the present invention
It is interior.
Compared with prior art, the invention has the following beneficial effects:
The present invention is for the Cl in seawater with high concentration-、SO4 2-、HCO3 -Equal acid ions, it is mechanical to the ocean of metal material
There is stronger corrosion failure to act on, the lubricating action of the hydrated oxide layer and graphitic carbon that generate based on friction chemical reaction is organic
The advantages of combining the bombardment of high-power impulse magnetron sputtering agent anode layer ion source is prepared high performance with nano combined knot
The CrAlBCN coating composite coating of structure, the nano combined CrAlBCN coating have high rigidity and binding force, low in briny environment
Coefficient of friction, superior sea water corrosion resistant, in deep-sea detection equipment, marine resources winning apparatus, sea transport equipment etc.
Marine environment surface protects field to have great application prospect.
Detailed description of the invention
Fig. 1 is the TEM image of nano combined CrAlBCN coating.(a) TEM image of coating.(b) selective electron diffraction
Image；
Fig. 2 is the briny environment fretting wear curve of nano combined CrAlBCN coating.
Specific embodiment
Below with reference to embodiment, the present invention is further explained.These embodiments are merely to illustrate the present invention rather than limitation
The scope of the present invention.Test method without specific conditions in lower example embodiment usually according to this field normal condition or is pressed
The condition suggested according to manufacturer；Used raw material, reagent etc., unless otherwise specified, being can be from the business such as conventional market
The raw materials and reagents that approach obtains.The variation for any unsubstantiality that those skilled in the art is done on the basis of the present invention
And replacement belongs to scope of the present invention.
Embodiment 1
The present embodiment provides a kind of nano combined CrAlBCN coatings (being named as sample 1), including the Al being sequentially depositing in substrate
Metal bonding layer, AlCN transition zone and CrAlBCN coating, CrAlBCN coating have nc- (Al, Cr) N/a-BN-a-C structure；
It is prepared via a method which to obtain.
Matrix alcohol and acetone are cleaned and use N2Drying is placed on the intracorporal work rest of chamber, when base vacuum reaches
3×10-3It after Pa, is passed through argon gas to air pressure and reaches 0.3 Pa, adjust underlayer temperature 400oC, -600 V of bias, to by surface
The substrate of processing carries out aura cleaning；After aura cleans, Ar air pressure is reconciled in 0.9 Pa, -400V is biased in, opens in Al
Frequency magnetic controlled sputtering target controls 3 A of target current, 300 V of target voltage, while opening anode layer ion source, controls 3 A of target current, target
300 V of voltage deposits the Al metal bonding layer of about 50 nanometer thickness；It is passed through N2 And C2H2, C2H2Gas is logical by anode layer ion source
Enter, Ar/ (C2H2+N2) ratio is in 1:1, C2H2: N2Ratio reconciles air pressure in 0.5 Pa, -50 V of bias, preparation 100 in 1:3
The AlCN transition zone of nm thickness.Open high-power impulse magnetron sputtering target CrB2With medium frequency magnetron sputtering Al target, function is controlled respectively
Rate is in 0.2 and 0.4 kW, underlayer temperature 400oC, bias -100 V, Ar/ (C2H2+N2) ratio is in 1:1, C2H2: N2Ratio is 1:
2,2 rpm of substrate frame revolving speed, deposit nano-composite coating CrAlBCN, and adjustment preparation time makes the thickness of coating micro- 2.0
Rice.The coating of preparation is sample 1, and coating each element atom content percentage formula is as follows:
26 at% of Cr:26 at%, Al:15 at%, B:12 at.%, C:21 at%, N.
Fig. 1 gives the images of transmissive electron microscope of CrAlBCN coating, including selective electron diffraction and full resolution pricture.From figure
1a resolved transmittance sem image can significantly find out the structure of Nanocrystals Embedded, it can be seen that there is amorphous knots in coating
Structure.It can be seen that nanocrystalline micro-structure is (Cr, Al) N from the selective electron diffraction image of Fig. 1 b, can be inferred that
CrAlBCN is the structure that nanocrystalline (Al, the Cr) N of one kind is embedded in amorphous BN and amorphous C matrix.
Embodiment 2
The present embodiment provides a kind of nano combined CrAlBCN coatings (being named as sample 2), including the Al being sequentially depositing in substrate
Metal bonding layer, AlCN transition zone and CrAlBCN coating, CrAlBCN coating have nc- (Al, Cr) N/a-BN-a-C structure；
It is prepared via a method which to obtain.
Matrix alcohol and acetone are cleaned and use N2Drying is placed on the intracorporal work rest of chamber, when base vacuum reaches
2×10-3It after Pa, is passed through argon gas to air pressure and reaches 0.8 Pa, adjust underlayer temperature 500oC, -1000 V of bias, to by table
The substrate of surface treatment carries out aura cleaning；After aura cleans, Ar air pressure is reconciled in 0.9 Pa, is biased in -400 V, is opened
Al medium frequency magnetron sputtering target controls 6 A of target current, 600 V of target voltage, while opening anode layer ion source, controls target current 4
A, 300 V of target voltage deposit the Al metal bonding layer of about 100 nanometer thickness；It is passed through N2 And C2H2, C2H2Gas passes through anode leafing
Component is passed through,Ar/(C2H2+N2) ratio is in 2:1, C2H2: N2Ratio reconciles air pressure in 1.0 Pa, -80 V of bias, system in 1:4
The AlCN transition zone of standby 300nm thickness.Open high-power impulse magnetron sputtering target CrB2With medium frequency magnetron sputtering Al target, control respectively
Power processed is in 1 and 0.8 kW, underlayer temperature 200oC, bias -100 V, Ar/ (C2H2+N2) ratio is in 2:1, C2H2: N2Ratio exists
4 rpm of 1:3 substrate frame revolving speed, deposits nano-composite coating CrAlBCN, and adjustment preparation time makes the thickness of coating at 6 microns.
The coating of preparation is sample 2, and coating each element atom content percentage formula is as follows:
20 at% of Cr:29 at%, Al:15 at%, B:14 at.%, C:22 at%, N.
Embodiment 3
The present embodiment provides a kind of nano combined CrAlBCN coatings (being named as sample 3), including the Al being sequentially depositing in substrate
Metal bonding layer, AlCN transition zone and CrAlBCN coating, CrAlBCN coating have nc- (Al, Cr) N/a-BN-a-C structure；
It is prepared via a method which to obtain.
Matrix alcohol and acetone are cleaned and use N2Drying is placed on the intracorporal work rest of chamber, when base vacuum reaches
1×10-4It after Pa, is passed through argon gas to air pressure and reaches 1.2 Pa, adjust underlayer temperature 500oC, bias -1200V, to by surface
The substrate of processing carries out aura cleaning；After aura cleans, Ar air pressure is reconciled in 0.9 Pa, -300V is biased in, opens in Al
Frequency magnetic controlled sputtering target controls 6 A of target current, 300 V of target voltage, while opening anode layer ion source, controls 15 A of target current, target
800 V of voltage deposits the Al metal bonding layer of about 200 nanometer thickness；It is passed through N2 And C2H2, C2H2Gas passes through anode layer ion source
It is passed through,Ar/(C2H2+N2) ratio is in 2:1, C2H2: N2Ratio reconciles air pressure in 0.5 Pa, -50 V of bias, preparation in 1:3
The AlCN transition zone of 200nm thickness.Open high-power impulse magnetron sputtering target CrB2With medium frequency magnetron sputtering Al target, control respectively
Power is in 0.8 and 0.7 kW, underlayer temperature 150oC, bias -100 V, Ar/ (C2H2+N2) ratio is in 1:1, C2H2: N2Ratio exists
2 rpm of 1:3 substrate frame revolving speed, deposits nano-composite coating CrAlBCN, and adjustment preparation time makes the thickness of coating micro- 2.8
Rice.The coating of preparation is sample 3, and coating each element atom content percentage formula is as follows:
25 at% of Cr:20 at%, Al:15 at%, B:15 at.%, C:25 at%, N.
Fig. 2 is friction coefficient curve of the nano combined CrAlBCN coating manufactured in the present embodiment under marine environment.It can be with
Find out coating coefficient of friction between 0.1 to 0.2.
Embodiment 4
The present embodiment provides a kind of nano combined CrAlBCN coatings (being named as sample 4), including the Al being sequentially depositing in substrate
Metal bonding layer, AlCN transition zone and CrAlBCN coating, CrAlBCN coating have nc- (Al, Cr) N/a-BN-a-C structure；
It is prepared via a method which to obtain.
Matrix alcohol and acetone are cleaned and use N2Drying is placed on the intracorporal work rest of chamber, when base vacuum reaches
3×10-3It after Pa, is passed through argon gas to air pressure and reaches 0.9 Pa, adjust underlayer temperature 400oC, -800 V of bias, to by surface
The substrate of processing carries out aura cleaning；After aura cleans, Ar air pressure is reconciled in 0.3 Pa, -100 V is biased in, opens Al
Medium frequency magnetron sputtering target controls 5 A of target current, 300 V of target voltage, while opening anode layer ion source, controls 6 A of target current,
700 V of target voltage deposits the Al metal bonding layer of about 100 nanometer thickness；It is passed through N2 And C2H2, C2H2Gas passes through anode layer ion
Source is passed through,Ar/(C2H2+N2) ratio is in 5:1, C2H2: N2Ratio reconciles air pressure in 1.0 Pa, -100 V of bias, preparation in 1:3
The AlCN transition zone of 100 nm thickness.Open high-power impulse magnetron sputtering target CrB2With medium frequency magnetron sputtering Al target, control respectively
Power processed is in 1 and 0.4 kW, underlayer temperature 400oC, bias -200 V, Ar/ (C2H2+N2) ratio is in 4:1, C2H2: N2Ratio exists
1:5 substrate frame revolving speed 5rpm, deposits nano-composite coating CrAlBCN, and adjustment preparation time makes the thickness of coating at 4 microns.
The CrAlBCN coating of preparation is sample 4, and coating each element atom content percentage formula is as follows:
25 at% of Cr:21 at%, Al:15 at%, B:15 at.%, C:24 at%, N.
It should be understood that the coating of condition available other atomic percents and thickness by control deposition,
This is repeated no more.
Comparative example 1
TiN coating is prepared using high-power impulse magnetron sputtering technology in this comparative example.
Comparative example 2
CrN coating is prepared using high-power impulse magnetron sputtering technology in this comparative example.
Comparative example 3
AlCN coating is prepared using magnetron sputtering technique in this comparative example.
The coating in sample 1 ~ 4 and comparative example provided each embodiment carries out hardness, binding force, marine environment friction system
Several and electrochemical corrosion characteristic test, as a result such as table 1.
Hardness, binding force, marine environment coefficient of friction and the electrochemical corrosion characteristic of 1 each sample of table.
From table 1 compared with comparative example data it is found that nano combined CrAlBCN coating provided by the invention hardness, knot
With joint efforts, excellent performance is all had in terms of marine environment coefficient of friction and electrochemical corrosion characteristic.
Claims (10)
1. a kind of CrAlBCN coating, which is characterized in that the CrAlBCN coating is tied with nc- (Al, Cr) N/a-BN-a-C
Structure.
2. CrAlBCN coating according to claim 1, which is characterized in that the atom hundred of Cr element in the CrAlBCN coating
Score is 20 ~ 30 %, and the atomic percentage of Al element is 10 ~ 15 %, and the atomic percentage of B element is 10 ~ 15 %, C element
Atomic percentage be 21 ~ 25 %, the atomic percentage of N element is 20 ~ 26 %.
3. CrAlBCN coating according to claim 1, which is characterized in that the hardness of the CrAlBCN coating is greater than 20
GPa, low-friction coefficient are lower than 0.3, and binding force is greater than 60N.
4. a kind of nano combined CrAlBCN coating of low friction seawater corrosion resistance, which is characterized in that the nano combined CrAlBCN
Coating includes the Al metal bonding layer, AlCN transition zone and CrAlBCN coating being sequentially depositing in substrate.
5. nano combined CrAlBCN coating according to claim 4, which is characterized in that the thickness of the Al metal bonding layer
For 50 ~ 200nm.
6. nano combined CrAlBCN coating according to claim 4, which is characterized in that the AlCN transition zone with a thickness of
100~300nm。
7. nano combined CrAlBCN coating according to claim 4, which is characterized in that the CrAlBCN coating with a thickness of
2~6μm。
8. the preparation method of any nano combined CrAlBCN coating of claim 4 ~ 7, which is characterized in that including making as follows
Standby step:
S1: the depositing Al metal bonding layer in substrate；CrB is made2For use；
S2: Ar, C are passed through to Al metal bonding layer2H2And N2, AlCN transition zone is prepared on Al metal bonding layer；It is described
C2H2And N2The sum of with the volume ratio of Ar be 1 ~ 5:1；The C2H2And N2Volume ratio be 1:3 ~ 4；
S3: to the resulting AlCN transition zone of S2 and CrB2In be passed through Ar, C2H2And N2, deposit and obtain CrAlBCN coating to get nanometer
Compound CrAlBCN coating；The C2H2And N2The sum of with the volume ratio of Ar be 1 ~ 4:1；The C2H2And N2Volume ratio be 1:2 ~
5。
9. to go 8 preparation methods according to right, which is characterized in that sunk in substrate in S1 using medium frequency magnetron sputtering technology
Product Al metal bonding layer；CrB is made using high-power impulse magnetron sputtering technology2；Anode layer ion source skill is utilized in S2 and S3
AlCN transition zone and CrAlBCN coating is prepared in art respectively.
10. application of any nano combined CrAlBCN coating of claim 4 ~ 7 in marine environment surface protection.
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| CN114959571A (en) * | 2022-05-09 | 2022-08-30 | 岭南师范学院 | Nano composite corrosion-resistant coating and preparation method and application thereof |
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| CN109161848B (en) | 2021-07-13 |
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