CN109154532A - Pressure-detecting device and the electric hydraulic pump for saving pressure-detecting device - Google Patents
Pressure-detecting device and the electric hydraulic pump for saving pressure-detecting device Download PDFInfo
- Publication number
- CN109154532A CN109154532A CN201780031944.7A CN201780031944A CN109154532A CN 109154532 A CN109154532 A CN 109154532A CN 201780031944 A CN201780031944 A CN 201780031944A CN 109154532 A CN109154532 A CN 109154532A
- Authority
- CN
- China
- Prior art keywords
- capacitor
- pressure
- detecting device
- lead terminal
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003990 capacitor Substances 0.000 claims abstract description 144
- 239000000758 substrate Substances 0.000 claims abstract description 72
- 239000012530 fluid Substances 0.000 claims abstract description 23
- 238000009413 insulation Methods 0.000 claims description 9
- UQMRAFJOBWOFNS-UHFFFAOYSA-N butyl 2-(2,4-dichlorophenoxy)acetate Chemical compound CCCCOC(=O)COC1=CC=C(Cl)C=C1Cl UQMRAFJOBWOFNS-UHFFFAOYSA-N 0.000 description 29
- 238000009434 installation Methods 0.000 description 9
- 239000002184 metal Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 238000000465 moulding Methods 0.000 description 7
- 238000007789 sealing Methods 0.000 description 7
- 230000005855 radiation Effects 0.000 description 5
- 239000004734 Polyphenylene sulfide Substances 0.000 description 4
- 229920000069 polyphenylene sulfide Polymers 0.000 description 4
- 238000004321 preservation Methods 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 238000003466 welding Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 229910000906 Bronze Inorganic materials 0.000 description 1
- 241000406668 Loxodonta cyclotis Species 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 239000010974 bronze Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60T—VEHICLE BRAKE CONTROL SYSTEMS OR PARTS THEREOF; BRAKE CONTROL SYSTEMS OR PARTS THEREOF, IN GENERAL; ARRANGEMENT OF BRAKING ELEMENTS ON VEHICLES IN GENERAL; PORTABLE DEVICES FOR PREVENTING UNWANTED MOVEMENT OF VEHICLES; VEHICLE MODIFICATIONS TO FACILITATE COOLING OF BRAKES
- B60T8/00—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force
- B60T8/32—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration
- B60T8/34—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition
- B60T8/36—Arrangements for adjusting wheel-braking force to meet varying vehicular or ground-surface conditions, e.g. limiting or varying distribution of braking force responsive to a speed condition, e.g. acceleration or deceleration having a fluid pressure regulator responsive to a speed condition including a pilot valve responding to an electromagnetic force
- B60T8/3615—Electromagnetic valves specially adapted for anti-lock brake and traction control systems
- B60T8/3675—Electromagnetic valves specially adapted for anti-lock brake and traction control systems integrated in modulator units
- B60T8/368—Electromagnetic valves specially adapted for anti-lock brake and traction control systems integrated in modulator units combined with other mechanical components, e.g. pump units, master cylinders
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Ceramic Engineering (AREA)
- Fluid Mechanics (AREA)
- Transportation (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Abstract
It provides and reduces number of components and realize the pressure-detecting device of miniaturization and save the electric hydraulic pump of pressure-detecting device.Pressure-detecting device (100) includes substrate (10), and the second face (12) with the first face and the vertical direction back side positioned at the first face, the substrate (10) has opening portion (13)；Pressure sensor covers opening portion (13) and configures in the first face, exports electric signal corresponding with the pressure of measured fluid in opening portion (13)；Lead terminal (30), is electrically connected with pressure sensor；Shell (40) keeps substrate (10) and lead terminal (30), has the exposed division (41) for exposing a part of lead terminal (30)；And capacitor (50); it protects pressure sensor; shell (40) includes capacitor incorporating section (42); it can be installed capacitor (50), and the capacitor (50) installed is electrically connected with the lead terminal (30) in exposed division (41)；And positioning region (60), the capacitor (50) for being installed on capacitor incorporating section (42) is positioned in capacitor incorporating section (42).
Description
Technical field
The present invention relates to pressure-detecting device and the electric hydraulic pumps of preservation pressure-detecting device.
Background technique
In order to measure the pressure of the fluids such as gas, liquid, using pressure-detecting device, which has used half
Conductor type pressure sensor.Patent Document 1 discloses following pressure-detecting devices: the pressure-detecting device includes gold
Belong to substrate, with pressure introducing port；Pressure sensor, via the pressure introducing port of substrate by Fluid pressure；Circuit
Plate is closed via knot and is connect with pressure sensor；And capacitor, ensure that semiconductor-type pressure on circuit boards is installed
Bearing capacity of the sensor to extraneous noise.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2002-257663 bulletin
Summary of the invention
Subject to be solved by the invention
Pressure-detecting device disclosed in patent document 1 has the following problems: due to the electrode terminal in power supply
Peace is connected separately between earthy electrode terminal and between the electrode terminal of output and earthy electrode terminal
The capacitor of dress on circuit boards, it is therefore desirable to which circuit board, correspondingly, storage space increases and number of components increases, and causes
Pressure-detecting device enlargement.
Nowadays, it has also carried out being stored in such pressure-detecting device by motor and by the shaft-driven pump of the rotation of motor
Body is accommodated in the research in the intracorporal electric hydraulic pump of shell, but if pressure-detecting device is enlarged, then electric hydraulic pump itself
Also enlarged, thus can also generate the problems such as being restricted on pumping setting place.
The present invention be in view of such actual situation complete, it is intended that provide can reduce number of components from
And it realizes the pressure-detecting device of miniaturization and saves the electric hydraulic pump of pressure-detecting device.
Means for solving the problems
In order to achieve the above objectives, pressure-detecting device of the invention is characterized in that, which includes base
Plate, the second face with the first face and the vertical direction back side positioned at first face, the substrate have opening portion；Pressure passes
Sensor covers the opening portion of the substrate and configures in first face, output and being measured in the opening portion
The corresponding electric signal of the pressure of fluid；Lead terminal is electrically connected with the pressure sensor；Shell, to the substrate and
The lead terminal is kept, and has the exposed division for exposing a part of the lead terminal；And capacitor, protection
The pressure sensor, the shell include capacitor incorporating section, can install the capacitor, and install described
Capacitor is electrically connected with the lead terminal in the exposed division；And positioning region, it is right in the capacitor incorporating section
The capacitor for being installed on the capacitor incorporating section is positioned.
The electric hydraulic pump of preservation pressure-detecting device of the invention is characterized in that the electric hydraulic pump includes motor,
It is with rotary shaft；The pump housing is driven by the motor；Pressure-detecting device connects with the sensor flow path of the pump housing
Lead to and is fixed；And shell, save the motor, the pump housing and the pressure-detecting device.
Invention effect
In accordance with the invention it is possible to reduce number of components to realize miniaturization.
Detailed description of the invention
Fig. 1 is the top view of an embodiment of pressure-detecting device of the invention.
Fig. 2 is the left side view of an embodiment of the invention.
Fig. 3 is the bottom view of an embodiment of the invention.
Fig. 4 is the cross-sectional view of the X-X in Fig. 3 of an embodiment of the invention.
Fig. 5 is the cross-sectional view of the Y-Y in Fig. 3 of an embodiment of the invention.
Fig. 6 is the approximate stereogram after the positive and negative reversion by an embodiment of the invention.
Fig. 7 is the bottom view of another embodiment of the invention.
Fig. 8 is the cross-sectional view of the Z-Z in Fig. 7 of an embodiment of the invention.
Fig. 9 is the partial sectional view for saving an embodiment of electric hydraulic pump for pressure-detecting device of the invention.
Specific embodiment
(embodiment)
Hereinafter, to the pressure-detecting device of mode for carrying out the present invention and saving pressure-detecting device referring to attached drawing
Electric hydraulic pump be illustrated.
Pressure-detecting device 100 of the invention includes substrate 10, has the first face 11 and positioned at the vertical of the first face 11
Second face 12 of direction back side, the substrate 10 have opening portion 13；Pressure sensor 20 covers the opening portion 13 of substrate 10 simultaneously
Configuration exports electric signal corresponding with the pressure of measured fluid in opening portion 13 in the first face 11；Lead terminal 30, with
Pressure sensor 20 is electrically connected；Shell 40 keeps substrate 10 and lead terminal 30, and having makes the one of lead terminal 30
The exposed division 41 that part is exposed；And capacitor 50, pressure sensor 20 is protected, shell 40 is configured to include capacitor receipts
It receives portion 42, capacitor 50 can be installed, and the capacitor 50 installed is electrically connected with the lead terminal 30 in exposed division 41；And
Positioning region 60 positions the capacitor 50 for being mounted on capacitor incorporating section 42 in capacitor incorporating section 42.
As shown in Fig. 1~Fig. 6, the pressure-detecting device 100 of present embodiment has substrate 10, pressure sensor 20, draws
Line terminals 30, shell 40, capacitor 50 and positioning region 60.
Shell 40 is configured to include housing main body 43, is shaped generally as cylindrical shape, centrally located portion；Substantially rectangular
Exposed division 41 and capacitor incorporating section 42, they tilt prominent and are located at outside from the central portion of housing main body 43 to two sides；With
And the fixed part 44 for mounting object, from the central portion of housing main body 43, two sides are prominent to the left and right and are located at outside, shell
Main body 43 has cover 45.
Shell 40 has electrical insulating property for example, by PPS (Poly Phenylene Sulfide: polyphenylene sulfide) resin etc.
Resin and integrally formed exposed division 41 and capacitor incorporating section 42, housing main body 43 and the fixed part for mounting object
44。
Housing main body 43 stores substrate 10, pressure sensor 20 and lead terminal 30.
Exposed division 41 is formed in the front end on the direction of the central part far from housing main body 43.Exposed division 41 is in shell master
The back side side opening of the central axial direction (from the first face 11 of substrate 10 towards the vertical direction in the second face 12) of body 43, makes to receive
The a part for being contained in the lead terminal 30 of housing main body 43 is exposed.
The capacitor main body 51 of capacitor 50 is stored in capacitor incorporating section 42, in the exposing being connected to capacitor incorporating section 42
Portion 41 exposes the leading part 52 of capacitor 50.
That is, a part of capacitor incorporating section 42 constitutes exposed division 41, it is accommodated in the capacitor 50 of capacitor incorporating section 42
Leading part 52 exposed division 41 expose.
Capacitor incorporating section 42 far from substrate 10 central part opening portion 13 direction front end side opening and become
The insert port 47 of capacitor 50, other than insert port 47 around three faces surrounded by wall surface.Capacitor incorporating section 42 and exposed division 41
Similarly in the central axial direction of housing main body 43 (from the first face 11 of substrate 10 towards the vertical direction in the second face 12)
Back side side opening.
That is, capacitor incorporating section 42 is on the both forward and reverse directions (such as vertical direction) of housing main body 43, back side side opening,
In the plane vertical with both forward and reverse directions (such as on horizontal plane), the front end side on the direction at the center far from substrate 10 is as insertion
Mouthfuls 47 and be open, become around other than insert port 47 by the space of wall surface encirclement.
Capacitor 50 can slide from insert port 47 to central side (inside) and be mounted on capacitor from side (outside) as a result,
Device incorporating section 42.
Shell 40 has the fixed part 44 for being fixed on mounting object.
It is disposed on the left and right sides of housing main body 43 for the fixed part 44 of mounting object, is respectively formed with mounting hole,
Part for being mounted on pressure-detecting device 100 on the mounting object as detected body.Fixed part 44 is on mounting hole
Made of metal lantern ring 46 is installed and is reinforced.By the two sides configuration pin in housing main body 43 to the fixed part 44 of mounting object,
Even if mounting object is disk-shaped detected body, also pressure-detecting device 100 can be installed along its outer peripheral edge portion.
In the present embodiment, insert-molding has substrate 10, lead terminal 30 on housing main body 43, for installation pair
44 insert-molding of fixed part of elephant has the made of metal lantern ring 46 such as brass.
Cover 45 is used to make side (first face 11 of substrate 10 opposite with measured fluid side of housing main body 43
Side) it is airtight conditions.Face of the pressure sensor 20 of 45 covering shell main body 43 of cover by the pressure of measured fluid
The back side forms closed space and becomes pressure reference room A.Cover 45 is such as the tree as material PPS identical with shell 40
Rouge is constituted, such as is fixed on housing main body 43 by laser welding with sealing state.
Substrate 10 is the metal component supported to pressure sensor 20, such as by the metal materials shape such as 42 alloys
At.Substrate 10 has second face 12 in the first face 11 and the vertical direction back side as the first face 11, and the substrate 10 is in central part
With the opening portion (pressure introducing port) 13 for the measured fluid circulation such as working oil.Substrate 10 is integrally molded so as having disk-shaped
Main part 10a and annulus 10b hat shape, main part 10a central part have opening portion 13, annulus 10b via
It is continuous around stage portion and main part 10a, and contacted with mounting object.The cricoid front end face of annulus 10b constitutes contact
Face 10c.
Substrate 10 is for example by insert-molding so as to be configured to the outer surface of hat shape by main part 10a and annulus 10b
It is embedded in the mode of housing main body 43 and is fixed on shell 40 with airtight conditions.
As a result, when pressure-detecting device 100 is mounted on the mounting object as detected body via fixed part 44, bury
The contact surface 10c for being located at the annulus 10b of housing main body 43 is fixed in a manner of contacting with mounting object.
In addition, since substrate 10 supports pressure sensor 20, it is ensured that substrate 10 will not be due to measured
The pressure of fluid and strain such intensity.
Pressure sensor 20 is made of the semiconductor-type pressure sensor after singualtion.Pressure sensor 20 is by silicon wafer
What anodic bonding was constituted on the pedestal (the first insulating layer) 21 of glass system.Pressure sensor 20 is constituted are as follows: by being formed in silicon
The strain resistor that bridgt circuit on chip is constituted is converted into voltage by the variation of pressure and is exported.Pressure sensor 20
Power supply offer and voltage output are carried out by aftermentioned lead terminal 30.The opening portion 13 of the covering substrate 10 of pressure sensor 20
And configure on the first face 11 of substrate 10, pedestal 21 is fixed by mounting with airtight conditions.
The pressure of the measured fluids such as working oil can be applied to pressure sensor 20 via opening portion 13 as a result,.
Airtightly for insert-molding on shell 40, one end passes through the pressure in line 31 and housing main body 43 to lead terminal 30
Sensor 20 is electrically connected, and the other end is projected into the exposed division of the two sides front end on the direction of the central part far from housing main body 43
41 and expose.Lead terminal 30 is configured to power supply lead terminal, earthy lead terminal and output lead terminal.
The line 31 of connection pressure sensor 20 and lead terminal 30 is for example made of aluminum line.Each lead terminal 30 is for example by plating nickel
(Ni) phosphor bronze etc. is constituted.
Expose two lead terminals 30, such as power supply lead terminal and earthy lead terminal in an exposed division 41
A part exposes two lead terminals 30, such as output lead terminal and earthy lead terminal in another exposed division 41
A part.Moreover, when the power supply to lead terminal 30 is with lead terminal application supply voltage and earthy lead terminal connects
When ground, constant current is provided, is equivalent to answering for the pressure sensor 20 as caused by the pressure of the measured fluid in opening portion 13
The output voltage of the bridgt circuit of change is exported from output with lead terminal.
Capacitor 50 is used to ensure bearing capacity of the pressure sensor 20 to extraneous noise of pressure-detecting device 100, the electricity
Container 50 is for example made of chip capacitor.Capacitor 50 is configured to capacitor main body 51 and leading part 52, such as such as Fig. 6
Shown, forming (molding) is to be extended to have two leading parts 52 and along the length side of capacitor main body 51 in capacitor main body 51
To prominent.As shown in Figure 5 and Figure 6, side of the capacitor 50 to be slided from the insert port 47 of front end side towards central side (inside)
Formula is installed as follows from side (outside) and is accommodated in the capacitor incorporating section 42 of shell 40: being with capacitor main body 51
First, after being with leading part 52.Capacitor 50 is accommodated in the exposing of exposed division 41 being connected to capacitor incorporating section 42 as a result,
A part and leading part 52 of lead terminal 30 are in backside contact.
Capacitor main body 51 is positioned in capacitor incorporating section 42 by positioning region 60.
As shown in Figure 3 and Figure 6, positioning region 60 has (parallel with the paper of Fig. 3 from the direction extended with lead terminal 30
Horizontal plane on and the substantially radiation direction from the center of substrate 10: the cartridge insertion direction of capacitor 50) vertical direction is (substantially
Circumferencial direction) clamp capacitance device 50 the first positioning region 61, determining for horizontal direction is carried out to the capacitor main body 51 of capacitor 50
Position, on the horizontal plane parallel with the paper of Fig. 3 from the capacitor main body 51 of the sandwich capacitor 50.
First positioning region 61 is formed in two positions in unilateral side at spaced intervals, so as to reliably Aligning Capacitor master
Body 51.In addition, being able to suppress by being molded with resin at spaced intervals in parallel with substantially radiation direction by the first positioning region
The influence that precision caused by contraction when 61 molding reduces is to be positioned.
Positioning region 60 has the second positioning region 62.Second positioning region 62 is perpendicular to the horizontal plane parallel with the paper of Fig. 3
Vertical direction (such as up and down direction) on be located on capacitor 50, and carry out the positioning in the vertical direction of capacitor 50, will
The front end of capacitor 50 positions in the paper vertically upward and downward directions with Fig. 3.
Second positioning region 62 is outstanding with the paper from the bottom of the face side of capacitor incorporating section 42 towards back side from Fig. 3
Mode is formed along vertical direction, and front end is formed as the outer lateral bending slightly towards the substantially radiation direction from the center of substrate 10
Bent key-like.
As a result, when capacitor 50 is inserted by the insert port 47 from capacitor incorporating section 42 from side towards inside, pass through
The front end of capacitor main body 51 contacts with the second positioning region 62 and positions direction of insertion, and front end will be hung down by limitation up and down
Histogram is to positioning.
For located two sides on horizontal plane and front end and Vertical Square by positioning region 60 in capacitor incorporating section 42
To upper and lower capacitor 50, leading part 52 and each lead terminal 30 are contacted in exposed division 41 and are electrically engaged by welding etc..
That is, in an exposed division 41, in power supply with being bonded to capacitor 50 between lead terminal 30 and earthy lead terminal 30
Two leading parts 52 are engaged in output between lead terminal 30 and earthy lead terminal 30 in another exposed division 41
There are two leading parts 52 of capacitor 50, ensures that the bearing capacity to extraneous noise.
In addition, the above-mentioned orientation that positioning region 60 positions capacitor 50 is the direction for explanation, it is not right
The installation direction of pressure-detecting device 100 makees any regulation.
In addition, in pressure-detecting device 100, the insulating properties between two leading parts 52 in order to improve capacitor 50,
Insulation division 63 between leading part 52 is formed as prominent from the face side of capacitor incorporating section 42 towards back side.
The insulation division 63 also protrudes outward between lead terminal 30, which thereby enhances insulating properties and electricity between lead terminal 30
The insulating properties of the leading part 52 of container 50.
In the pressure-detecting device 100 constituted in this way, make the lead terminal being arranged on shell 40 by insert-molding
30 a part is exposed to exposed division 41, stores in the configuration of lead terminal 30 of exposing from the insert port 47 of capacitor incorporating section 42
Capacitor 50 leading part 52 and engaged, therefore do not need for above circuit board to be accommodated in shell 40 and via electricity
Road plate engages capacitor 50, so that even if setting ensures also make shell 40 to the capacitor 50 of the bearing capacity of extraneous noise
It is compact, so as to minimize pressure-detecting device 100 itself.
Pressure-detecting device 100 with above structure is such as being stored in the electric hydraulic pump 200 as mounting object
It is used in the shell 230 of detected body.
Such as shown in figure 9, the electric hydraulic pump 200 for saving pressure-detecting device is configured to include motor 210, have
There is rotary shaft 211；The pump housing 220 is driven by motor 210；And shell 230, storage (preservation) motor 210, the pump housing 220 with
And pressure-detecting device 100.
In motor 210, rotary shaft is being linked on the rotor that the central axis of cricoid stator (not shown) rotates
211, rotary shaft 211 is configured to be projected into the pump housing 220 from the motor shell 231 for constituting shell 230.
The pump housing 220 has pump rotor 221, links with the rotary shaft 211 of motor 210 and is driven in rotation.The pump housing 220 is stored
(preservation) is in the pump case 232 for constituting shell 230.The pump housing 220 with pump out port 222 and be connected to and be provided with sensor flow path
223, sensor is arranged to be open in the opposed faces 232a opposed with motor 210 of pump case 232 with one end of flow path 223.
The pump housing 220 is provided with pump cover 240 in the opposite side of motor 210 and is capped.
Pressure-detecting device 100 is fixed on the opposed faces 232a opposed with motor 210 of the pump housing 220, so that tested constant current
The mode for the opening portion 13 that body is applied to substrate 10 via sensor flow path 223 is not schemed in the annulus 10b installation of substrate 10
The sealing material shown is contacted contact surface 10c with opposed faces 232a and is fixed with sealing state.Pressure-detecting device 100 is logical
It crosses the bolt (not shown) through the made of metal lantern ring 46 for the fixed part 44 for being inserted in installation and is fixed on the opposed of shell 230
Face 232a.
In pressure-detecting device 100, pressure sensor 20 is according to the pressure of the measured fluid for acting on opening portion 13
With the pressure (base pressure of the fluid (atmosphere) in the pressure reference room A that is sealed by the cover 45 of the back side of pressure sensor 20
Power) difference and occur strain (deformation), the resistance value of bridgt circuit changes according to the strain (deformation), thus output voltage
Variation.The variation of the output voltage is exported as measurement signal to output lead terminal 30.That is, pressure sensor 20 exports
Voltage signal corresponding with the pressure of measured fluid.
According to the electric hydraulic pump 200 for saving such pressure-detecting device 100, number of components can be reduced to realize
Miniaturization.
Next, in such pressure-detecting device 100, if substrate 10 is not with sealing state when carrying out pressure detecting
It is fixed on detected body, then can be led to the problem of on the measurement accuracy of pressure, it is therefore desirable to improve leakproofness.
Therefore, in pressure-detecting device 100A, as shown in Figure 7 and Figure 8, pressure-detecting device 100A includes substrate
10, the second face 12 with the first face 11 and the vertical direction back side positioned at the first face 11, the substrate 10 has opening portion 13；
Pressure sensor 20 covers the opening portion 13 of substrate 10 and configures in the first face 11, output and being measured in opening portion 13
The corresponding electric signal of the pressure of fluid；Lead terminal 30 is electrically connected with pressure sensor 20；And shell 40, to substrate
10 and lead terminal 30 kept, have make lead terminal 30 a part expose exposed division 41；And capacitor 50,
Pressure sensor 20 is protected, in pressure-detecting device 100A, substrate 10 includes contact surface 10c, examines with pressure is equipped with
Survey the mounting object B contact of device 100A；And seal member 70, be formed as the periphery for surrounding opening portion 13, in substrate 10
Contact surface 10c contacted with mounting object B in the state of, will be sealed between the contact surface 10c and mounting object B of substrate 10, outside
Shell 40 is configured to configure in a manner of reducing than contact surface 10c to 20 side of pressure sensor.
In addition, shell 40 has multiple lantern rings 46 in pressure-detecting device 100A, multiple lantern ring 46 is formed with for outer
Shell 40 is mounted on the mounting hole on mounting object B, and lantern ring 46 is configured to height identical as contact surface 10c or compares contact surface
10c is configured to the mode that 20 side of pressure sensor reduces.That is, being mounted on the seal member 70 of the annulus 10b of substrate 10 and making
Detected body for mounting object B is contacted and is fastened until the contact surface 10c of substrate 10 and being detected as mounting object B
Until surveying body contact, thus becomes and squeeze the compressive state of seal member 70 and seal.
In the case where ensuring the sealing state, if shell 40 first connects with detected body than the contact surface 10c of substrate 10
Touching or first contacted with detected body for the made of metal lantern ring 46 of the fixed part 44 of mounting object B, then can not from the state into
One step fastening base 10, so that seal member 70 can not be squeezed and become compressive state.
Therefore, in pressure-detecting device 100A, be configured to, the contact surface 10c of substrate 10 it is lower than shell 40 or for
The made of metal lantern ring 46 of fixed part 44 is also similarly lower than shell 40.
In this way, seal member 70 can ensure between the detected body as mounting object B and substrate 10 and keep pressing
Contracting state, so as to accurately detect sealing state pressure fluid pressure.
In addition, in pressure-detecting device 100,100A, such as shown in Fig. 2, being contacted with mounting object B in lantern ring 46
Contact surface 46a be formed as the opposed faces 42a opposed with mounting object B in specific capacitance device incorporating section 42 to the side mounting object B
It is prominent, it, can be in opposed faces 42a and installation pair when being fixed on the mounting object B being made of even surface using lantern ring 46
As clearance D is arranged between B.By the clearance D, the construction of mounting object B complexity will not be made, and following construction can be become:
Even if opposed faces 42a and mounting object B are not yet in the case where capacitor incorporating section 42 is vibrated because of traveling of vehicle etc.
Contact.Therefore, even if capacitor is arranged using in the outside of two lantern rings 46,46 as the fixed part for mounting object B
The construction of incorporating section 42, it may have prevent the function and effect of the generation of extraordinary noise etc..
In addition, in pressure-detecting device 100A, as shown in fig. 7, back side of the capacitor incorporating section 42 in shell 40
(from the first face 11 of substrate 10 towards the side in the second face 12 of the vertical direction in the first face 11) opening, a part of structure of opening
At the exposed division 41 of lead terminal 30.Exposed division 41 is configured to be connected to capacitor incorporating section 42, surrounds capacitor by wall surface and receives
Receive portion 42 it is entire around.In exposed division 41, a part for being embedded in the lead terminal 30 of housing main body 43 is exposed.Capacitor 50
It is installed from back side towards face side from the vertical direction in the first face 11 relative to substrate 10 and is accommodated in capacitor incorporating section
42.Capacitor 50 is configured with capacitor main body 51 than central side position in the outer part and leading part 52 is configured in central side
Mode is accommodated in capacitor incorporating section 42 from the vertical direction (up and down direction) in the first face 11 relative to substrate 10.
It is provided with positioning region 60 in capacitor incorporating section 42, the capacitor 50 of storage is positioned.As shown in fig. 7,
Positioning region 60 is configured to include the first positioning region 66, capacitor main body 51 is directed to, in the horizontal plane parallel with the paper of Fig. 7
On position left and right directions in a manner of clipping the substantially two sides of radiation direction from the center of substrate 10；Second positioning region 67,
Using in the wall surface in the outside of capacitor incorporating section 42 pressing capacitor main body 51 on the horizontal plane parallel with the paper of Fig. 7
The mode of heart side positions front-rear direction；And insulation division 68, it is located at the leading part 52 of capacitor 50 in slot, with Fig. 7's
It is insulated and is controlled in a manner of clipping the substantially two sides of radiation direction from the center of substrate 10 on the parallel horizontal plane of paper
The positioning in direction.Insulation division 68 is located between two leading parts 52, thus apart from the insulation, additionally aids determining for leading part 52
Position.
In addition, by installing pressure-detecting device 100A in the detected body as mounting object B, in capacitor incorporating section
The exposed division 41 of 42 backside openings ensures that the storage of capacitor 50 by the detected body closing as mounting object B
State.
In addition, the above-mentioned orientation that positioning region 60 positions capacitor 50 is the direction for explanation, it is not right
The installation direction of pressure-detecting device 100A makees any regulation.
By the leading part 52 for the capacitor 50 that positioning region 60 positions to reveal in exposed division 41 in capacitor incorporating section 42
The state that a part of lead terminal 30 contacts out is contained.
In exposed division 41, the leading part 52 of capacitor 50 is electrically connected with lead terminal 30 by welding etc..
In pressure-detecting device 100A, capacitor is stored from back side towards face side in capacitor incorporating section 42
50, but not limited to this, it can also be inserted into a manner of from side towards interior Slideslip as pressure-detecting device 100, as long as
The contact surface 10c of substrate 10 can be made to contact with mounting object B, be sealed 70 compressive state of seal member.
According to such pressure-detecting device 100A, pressure-detecting device 100A includes substrate 10, has the first face
11 and the vertical direction back side positioned at the first face 11 the second face 12, the substrate 10 have opening portion 13；Pressure sensor 20,
It covers the opening portion 13 of substrate 10 and configures in the first face 11, export corresponding with the pressure of measured fluid in opening portion 13
Electric signal；Lead terminal 30 is electrically connected with pressure sensor 20；Shell 40 protects substrate 10 and lead terminal 30
It holds, there is the exposed division 41 for exposing a part of lead terminal 30；And capacitor 50, pressure sensor 20 is protected,
In pressure-detecting device 100A, substrate 10 includes contact surface 10c, with the installation pair for being equipped with pressure-detecting device 100A
As B is contacted；And seal member 70, be formed as the periphery for surrounding opening portion 13, contact surface 10c and installation pair in substrate 10
As B contact in the state of, will be sealed between the contact surface 10c and mounting object B of substrate 10, shell 40 be configured to with contact surface
The identical height of 10c is configured than contact surface 10c to the mode that 20 side of pressure sensor reduces, therefore seal member 70 is being installed
It can ensure and keep compressive state between object B and substrate 10, so as to accurately detect the pressure current of sealing state
The pressure of body.
In addition, shell 40 has multiple lantern rings 46 according to pressure-detecting device 100A, multiple lantern ring 46 is formed with for outer
Shell 40 is mounted on the mounting hole on mounting object B, and lantern ring 46 is configured to height identical as contact surface 10c or compares contact surface
10c is configured to the mode that 20 side of pressure sensor reduces, therefore lantern ring 46 will not first be contacted with mounting object B than contact surface 10c,
To which seal member 70 can ensure between mounting object B and substrate 10 and keep compressive state, so as to accurately
Detect the pressure of the pressure fluid of sealing state.
Such as shown in figure 9, such pressure-detecting device 100A be stored in the same manner as pressure-detecting device 100 it is electronic
It is used in the shell 230 of hydraulic pump 200.The electric hydraulic pump 200 for preserving pressure-detecting device 100A as a result, can be reduced
Number of components is to realize miniaturization.
More than, as being specifically illustrated together with embodiment, pressure-detecting device according to the present invention
100, which includes substrate 10, with the first face 11 and positioned at the vertical direction back side in the first face 11
Second face 12, the substrate 10 have opening portion 13；Pressure sensor 20 covers the opening portion 13 of substrate 10 and configures first
Face 11 exports electric signal corresponding with the pressure of measured fluid in opening portion 13；Lead terminal 30, with pressure sensor
20 electrical connections；Shell 40 keeps substrate 10 and lead terminal 30, and there is a part for making lead terminal 30 to expose
Exposed division 41；And capacitor 50, pressure sensor 20 is protected, shell 40 includes capacitor incorporating section 42, can install
The capacitor 50 of capacitor 50, installation is electrically connected with the lead terminal 30 in exposed division 41；And positioning region 60, in capacitor
The capacitor 50 for being mounted on capacitor incorporating section 42 is positioned in incorporating section 42, therefore, it is not necessary to using circuit board, and can
Capacitor 50 is stored and positioned in capacitor incorporating section 42 using positioning region 60, so as to ensure to hold extraneous noise
Carry power.In addition, number of components can be reduced to realize miniaturization.Draw in addition, can be simply electrically connected using exposed division 41
Line terminals 30 and capacitor 50.
Pressure-detecting device 100 according to the present invention, lead terminal 30 are directed away from the side of the central axis of opening portion 13
Extend to and to the outside of substrate 10, positioning region 60 has direction clamping intersect from the direction extended with lead terminal 30 electric
First positioning region 61 of container 50, shell 40 have front end side opening from capacitor incorporating section 42 towards lead terminal 30 and
It can be entered and left for capacitor 50 from side towards inside, therefore capacitor 50 can be made to slide from insert port 47, and utilize first
The two sides of 61 clamp capacitance device 50 of positioning region are positioned simultaneously thus, it is possible to be inserted into capacitor incorporating section 42 towards inside from side
Storage.
Pressure-detecting device 100 according to the present invention, positioning region 60 have the second positioning region 62, which exists
It is located on capacitor 50 on the direction vertical with the direction of 61 clamp capacitance device 50 of the first positioning region, determines the position of capacitor 50
It sets, therefore is not only the direction of clamp capacitance device 50, for the direction vertical with the direction, can also utilize the second positioning region 62
It is positioned, so as to further reliably be positioned capacitor 50 and the capacitor 50 is accommodated in capacitor incorporating section 42
It is interior.
Pressure-detecting device 100 according to the present invention, since capacitor 50 has capacitor main body 51 and a pair of lead wires portion
52, capacitor incorporating section 42 has the insulation division 63 between a pair of lead wires portion 52 and to insulate, therefore can be using absolutely
Edge 63 is physically prevented from the mutual contact in a pair of lead wires portion 52, so as to improve insulating properties.
Pressure-detecting device 100 according to the present invention, since shell 40 has cover 45, which covers pressure
The back side in the face of the pressure by measured fluid of sensor 20 and form closed pressure reference room A, therefore can pass through
Pressure reference room A detects the pressure change relative to reference pressure.
According to the electric hydraulic pump for saving pressure-detecting device 100 of the invention, 100A, which includes horse
Up to 210, with rotary shaft 211；The pump housing 220 is driven by motor 210；Described in any one in claim 1 to 5
Pressure-detecting device 100,100A are connected to and are fixed with the sensor flow path 223 of the pump housing 220；And shell 230,
Motor 210, the pump housing 220 and pressure-detecting device 100,100A are saved, therefore number of components can be reduced to realize miniaturization.
In addition, in the above-described embodiment, as pressure sensor, by taking the pressure sensor of monolithic semiconductor formula as an example into
Explanation is gone, but the structure of pressure sensor can be the arbitrary forms such as other forms.
In addition, the present invention is not by any restriction of above embodiment.
Label declaration
100: pressure-detecting device；10: substrate；10a: main part；10b: annulus；10c: contact surface；11: the first faces；
12: the second faces；13: opening portion；20: pressure sensor；21: pedestal；30: lead terminal；31: line；40: shell；41: exposing
Portion；42: capacitor incorporating section；42a: opposed faces；43: housing main body；44: fixed part；45: cover；46: made of metal lantern ring；
46a: contact surface；47: insert port；50: capacitor；51: capacitor main body；52: leading part；60: positioning region；61: the first positioning
Portion；62: the second positioning regions；63: insulation division；66: the first positioning regions；67: the second positioning regions；68: insulation division；70: seal member；
100A: pressure-detecting device；200: saving the electric hydraulic pump of pressure-detecting device；210: motor；211: rotary shaft；220: pump
Body；221: pump rotor；222: pumping out port；223: sensor flow path；230: shell；231: motor shell；232: pump case；
232a: opposed faces；240: pump cover；A: pressure reference room；B: mounting object；D: gap.
Claims (6)
1. a kind of pressure-detecting device, which is characterized in that
The pressure-detecting device includes
Substrate, the second face with the first face and the vertical direction back side positioned at first face, the substrate have opening portion；
Pressure sensor covers the opening portion of the substrate and configures in first face, output and the opening portion
The corresponding electric signal of pressure of interior measured fluid；
Lead terminal is electrically connected with the pressure sensor；
Shell keeps the substrate and the lead terminal, and there is a part for making the lead terminal to expose
Exposed division；And
Capacitor protects the pressure sensor,
The shell includes
The institute in the capacitor and the exposed division that capacitor incorporating section can install the capacitor, and install
State lead terminal electrical connection；And
The capacitor for being installed on the capacitor incorporating section is determined in the capacitor incorporating section in positioning region
Position.
2. pressure-detecting device according to claim 1, which is characterized in that
The lead terminal is directed away from the direction of the central axis of the opening portion and extends to the outside of the substrate,
The positioning region, which has from the direction that the direction extended with the lead terminal is intersected, clamps the first of the capacitor
Positioning region,
The shell has insert port, which opens from the front end side of capacitor incorporating section towards the lead terminal
Mouthful, it can be entered and left for the capacitor from side towards inside.
3. pressure-detecting device according to claim 2, which is characterized in that
The positioning region has the second positioning region, and second positioning region is in the side for clamping the capacitor with first positioning region
It is located on the capacitor on vertical direction, determines the position of the capacitor.
4. according to claim 1 to pressure-detecting device described in any one in 3, which is characterized in that
The capacitor has capacitor main body and a pair of lead wires portion,
The capacitor incorporating section has the insulation division between the pair of leading part and to insulate.
5. according to claim 1 to pressure-detecting device described in any one in 4, which is characterized in that
The shell has cover, which covers the pressure by the measured fluid of the pressure sensor
The back side in face and form closed pressure reference room.
6. a kind of electric hydraulic pump for saving pressure-detecting device, which is characterized in that
The electric hydraulic pump includes
Motor, with rotary shaft；
The pump housing is driven by the motor；
Pressure-detecting device described in any one in claim 1 to 5, the sensor fluid communication with the pump housing
And it is fixed；And
Shell saves the motor, the pump housing and the pressure-detecting device.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-103562 | 2016-05-24 | ||
| JP2016103562A JP6471118B2 (en) | 2016-05-24 | 2016-05-24 | Pressure detecting device and electric hydraulic pump storing pressure detecting device |
| PCT/JP2017/019420 WO2017204261A1 (en) | 2016-05-24 | 2017-05-24 | Pressure detection device, and electromotive hydraulic pump in which pressure detection device is stored |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109154532A true CN109154532A (en) | 2019-01-04 |
| CN109154532B CN109154532B (en) | 2020-12-25 |
Family
ID=60412419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780031944.7A Expired - Fee Related CN109154532B (en) | 2016-05-24 | 2017-05-24 | Pressure detection device and electric hydraulic pump for storing pressure detection device |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US11035747B2 (en) |
| JP (1) | JP6471118B2 (en) |
| CN (1) | CN109154532B (en) |
| DE (1) | DE112017002647T5 (en) |
| WO (1) | WO2017204261A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6754959B2 (en) * | 2016-07-27 | 2020-09-16 | 日本電産トーソク株式会社 | Pressure sensor device and electric pump |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10107814A1 (en) * | 2000-11-21 | 2002-05-23 | Continental Teves Ag & Co Ohg | Pressure sensor assembly for an automotive brake pressure regulation device used in a hydraulic anti-slip brake system, designed to mount in the pump housing without any modification to the housing |
| JP2002257663A (en) * | 2001-02-28 | 2002-09-11 | Nippon Seiki Co Ltd | Pressure detecting device |
| CN1448705A (en) * | 2002-03-29 | 2003-10-15 | 株式会社电装 | Pressure sensor and its manufacturing method |
| JP2005265667A (en) * | 2004-03-19 | 2005-09-29 | Denso Corp | Pressure sensor and method for manufacturing the same |
| CN1831504A (en) * | 2005-01-26 | 2006-09-13 | 得州仪器公司 | Hermetic pressure sensing device |
| US20080034877A1 (en) * | 2004-03-12 | 2008-02-14 | Thomas Fessele | Sensor Module |
| CN201242484Y (en) * | 2008-07-29 | 2009-05-20 | 重庆市伟岸测器制造有限公司 | Whole closed type capacitance pressure differential pressure transmitter |
| CN101981425A (en) * | 2008-04-03 | 2011-02-23 | 罗斯蒙德公司 | Industrial pressure sensor having enhanced dielectric fill fluid |
| CN203616050U (en) * | 2013-08-27 | 2014-05-28 | 北京中科泛华测控技术有限公司 | Hydraulic reinforcing system |
| CN104126107A (en) * | 2012-02-09 | 2014-10-29 | 富士电机株式会社 | Physical quantity sensor and method for manufacturing physical quantity sensor |
| JP2014211391A (en) * | 2013-04-19 | 2014-11-13 | 日本精機株式会社 | Pressure detector |
| CN104246465A (en) * | 2012-04-25 | 2014-12-24 | 日本精机株式会社 | Pressure detection device and method for producing same |
| CN104395722A (en) * | 2012-05-31 | 2015-03-04 | 日本精机株式会社 | Pressure detection device |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4875135A (en) * | 1988-12-02 | 1989-10-17 | Texas Instruments Incorporated | Pressure sensor |
| JP4090395B2 (en) * | 2003-06-30 | 2008-05-28 | 株式会社日立製作所 | Pressure detection device |
| DE102008005153A1 (en) * | 2008-01-18 | 2009-07-23 | Robert Bosch Gmbh | Pressure measurement module |
| DE102010039599A1 (en) * | 2010-08-20 | 2012-02-23 | Robert Bosch Gmbh | Sensor module for receiving a pressure sensor chip and for mounting in a sensor housing |
| US8969978B2 (en) * | 2012-04-27 | 2015-03-03 | Melexis Technologies Nv | TMAP sensor systems and methods for manufacturing those |
| JP2016061661A (en) * | 2014-09-17 | 2016-04-25 | 富士電機株式会社 | Pressure sensor device and pressure sensor device manufacturing method |
| US10247629B2 (en) * | 2017-04-27 | 2019-04-02 | Continental Automotive Systems, Inc. | Stacked or unstacked MEMS pressure sensor with through-hole cap and plurality of chip capacitors |
-
2016
- 2016-05-24 JP JP2016103562A patent/JP6471118B2/en not_active Expired - Fee Related
-
2017
- 2017-05-24 WO PCT/JP2017/019420 patent/WO2017204261A1/en active Application Filing
- 2017-05-24 CN CN201780031944.7A patent/CN109154532B/en not_active Expired - Fee Related
- 2017-05-24 DE DE112017002647.4T patent/DE112017002647T5/en not_active Withdrawn
- 2017-05-24 US US16/303,679 patent/US11035747B2/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10107814A1 (en) * | 2000-11-21 | 2002-05-23 | Continental Teves Ag & Co Ohg | Pressure sensor assembly for an automotive brake pressure regulation device used in a hydraulic anti-slip brake system, designed to mount in the pump housing without any modification to the housing |
| JP2002257663A (en) * | 2001-02-28 | 2002-09-11 | Nippon Seiki Co Ltd | Pressure detecting device |
| CN1448705A (en) * | 2002-03-29 | 2003-10-15 | 株式会社电装 | Pressure sensor and its manufacturing method |
| US20080034877A1 (en) * | 2004-03-12 | 2008-02-14 | Thomas Fessele | Sensor Module |
| JP2005265667A (en) * | 2004-03-19 | 2005-09-29 | Denso Corp | Pressure sensor and method for manufacturing the same |
| CN1831504A (en) * | 2005-01-26 | 2006-09-13 | 得州仪器公司 | Hermetic pressure sensing device |
| CN101981425A (en) * | 2008-04-03 | 2011-02-23 | 罗斯蒙德公司 | Industrial pressure sensor having enhanced dielectric fill fluid |
| CN201242484Y (en) * | 2008-07-29 | 2009-05-20 | 重庆市伟岸测器制造有限公司 | Whole closed type capacitance pressure differential pressure transmitter |
| CN104126107A (en) * | 2012-02-09 | 2014-10-29 | 富士电机株式会社 | Physical quantity sensor and method for manufacturing physical quantity sensor |
| CN104246465A (en) * | 2012-04-25 | 2014-12-24 | 日本精机株式会社 | Pressure detection device and method for producing same |
| CN104395722A (en) * | 2012-05-31 | 2015-03-04 | 日本精机株式会社 | Pressure detection device |
| JP2014211391A (en) * | 2013-04-19 | 2014-11-13 | 日本精機株式会社 | Pressure detector |
| CN203616050U (en) * | 2013-08-27 | 2014-05-28 | 北京中科泛华测控技术有限公司 | Hydraulic reinforcing system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109154532B (en) | 2020-12-25 |
| US20200319048A1 (en) | 2020-10-08 |
| JP2017211244A (en) | 2017-11-30 |
| JP6471118B2 (en) | 2019-02-13 |
| US11035747B2 (en) | 2021-06-15 |
| DE112017002647T5 (en) | 2019-03-07 |
| WO2017204261A1 (en) | 2017-11-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| RU2279650C2 (en) | Module with pressure gage | |
| CN101796302B (en) | Current leadthrough for a vacuum pump | |
| KR20130087431A (en) | Small form factor microfused silicon strain gage (msg) pressure sensor packaging | |
| KR101965927B1 (en) | Pressure detection device | |
| US9006847B2 (en) | Sensor module for accommodating a pressure sensor chip and for installation into a sensor housing | |
| EP1312907A1 (en) | Pressure detecting apparatus | |
| JPH1194668A (en) | Combination type fluid pressure and temperature sensor device | |
| KR20190051806A (en) | Gas sensor packages | |
| CN102460101A (en) | Pressure sensor | |
| CN108414030B (en) | Temperature-pressure integrated sensor | |
| CN209459816U (en) | Pressure sensor apparatus and electrodynamic pump | |
| CN208635961U (en) | Pressure-detecting device | |
| CN109154532A (en) | Pressure-detecting device and the electric hydraulic pump for saving pressure-detecting device | |
| JP2009545693A (en) | Vacuum pump | |
| CN209459815U (en) | Pressure sensor apparatus and electrodynamic pump | |
| CN110173435B (en) | Pump assembly | |
| JP2014211391A (en) | Pressure detector | |
| CN212718345U (en) | Sensor assembly and valve device | |
| CN113389722A (en) | Liquid pump | |
| US20150059470A1 (en) | Measuring device | |
| CN103575451A (en) | Sensor means and method for determining pressure of medium, and method of manufacturing sensor means | |
| JPWO2015072430A1 (en) | Gas sensor | |
| CN215865623U (en) | Pressure sensor | |
| CN109768034A (en) | Pressure sensor module and pressure sensor apparatus with pressure sensor module | |
| CN216717404U (en) | Sensor with a sensor element |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20201225 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |