CN109153480A - Breakage-proof chemical reactor packaging - Google Patents
Breakage-proof chemical reactor packaging Download PDFInfo
- Publication number
- CN109153480A CN109153480A CN201780027769.4A CN201780027769A CN109153480A CN 109153480 A CN109153480 A CN 109153480A CN 201780027769 A CN201780027769 A CN 201780027769A CN 109153480 A CN109153480 A CN 109153480A
- Authority
- CN
- China
- Prior art keywords
- breakage
- cover
- container
- proof
- machanical fastener
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D45/00—Clamping or other pressure-applying devices for securing or retaining closure members
- B65D45/02—Clamping or other pressure-applying devices for securing or retaining closure members for applying axial pressure to engage closure with sealing surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D45/00—Clamping or other pressure-applying devices for securing or retaining closure members
- B65D45/02—Clamping or other pressure-applying devices for securing or retaining closure members for applying axial pressure to engage closure with sealing surface
- B65D45/16—Clips, hooks, or clamps which are removable, or which remain connected either with the closure or with the container when the container is open, e.g. C-shaped
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D50/00—Closures with means for discouraging unauthorised opening or removal thereof, with or without indicating means, e.g. child-proof closures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D53/00—Sealing or packing elements; Sealings formed by liquid or plastics material
- B65D53/02—Collars or rings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D55/00—Accessories for container closures not otherwise provided for
- B65D55/02—Locking devices; Means for discouraging or indicating unauthorised opening or removal of closure
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Packages (AREA)
- Closures For Containers (AREA)
- Packging For Living Organisms, Food Or Medicinal Products That Are Sensitive To Environmental Conditiond (AREA)
Abstract
The present invention describes a kind of breakage-proof airtight package, it includes: container；The cover is configured to engage with the container, so that the container and the cover formation seal volume；And at least one breakage-proof machanical fastener, it cooperates with the cover and container when so that described seal when the sealing state that volume is isolated with the ambient enviroment around the airtight package engages the container and the cover causes the airtight package breakage-proof.Such airtight package is usefully used for storing and transporting the chemical reactor that will cause health, safety and/or environmental risk in the case where being discharged into the external environment of the airtight package.
Description
Related application
Advocate that No. 62/324,342 U.S. filed on April 19th, 2016 is temporarily special according to 35 U.S.C. § 119 accordingly
The senior interest of sharp application case.The full text of the disclosure of No. 62/324,342 U.S. provisional patent application cases is for all mesh
And it is incorporated herein by reference.
Technical field
The present invention relates generally to the closed packaging for material, article, sub-assembly etc., the material, article, groups
Component etc. expectation is protected from being exposed to the ambient enviroment of the packaging, and the packaging is, for example, to be used to accommodate chemical reaction
The chemical reactor of agent is packed, and the chemical reactor especially may in the case where being discharged into the local environment of the packaging
It will cause the chemical reactor with toxicity or other hazard properties of health, safety or environmental risk.More particularly, this hair
Bright to be related to packing, the packaging has breakage-proof security feature to protect the content of the packaging from being undesirably exposed to
The ambient enviroment of the packaging or ambient enviroment around the packaging.
Background technique
In the transport of solid and aqueous chemical reactant, storage, installation and in use, various packagings have been developed for closed
Chemical reactor.If chemical reactor breakage of packing and the chemical reactor accommodated exposure and the local ring for being discharged into packaging
Border, then many such chemical reactors will cause health, safety and environmental risk.
For example, in the semiconductor manufacturing industry, various chemical hydrides, acids and organometallic reaction agent are for making
Make integrated circuit and microelectronic product.Many such reactants have extremely low threshold limit value (TLV), are that worker can answer day in day
On the basis of the level of chemical substance that is exposed without being adversely affected to body.This is equally applicable to flat-panel monitor
And many solids and liquid reactant used in the manufacture of solar panel.In addition to about the change for accommodating such reactant
Except the health and security consideration of learning the rupture of reactant packaging, there is also accompanying disadvantages: if reactant is exposed to container
Ambient enviroment and being disclosed by ambient enviroment deteriorates, so that it becomes insufficient or is even not useable for its expected purpose, then
The purity (it requires tool high-purity or even ultra-high purity in many cases) of chemical reactor may be damaged.
Therefore, fields continue to look for having the chemical reactor of enhanced security feature to be packed, anti-to assist
Only chemical reactor to be discharged from the non-of the ambient enviroment for being packaged into packaging, and protects chemical reactor such from being exposed to
Ambient enviroment.
Summary of the invention
The present invention relates to packagings, and wherein container and the cover fasten mechanically to each otherly, and the wherein content phase of the packaging
Hope the external environment for being protected from being exposed to the packaging.
In an aspect, the present invention relates to a kind of breakage-proof airtight packages comprising: container；The cover is configured to
It is engaged with the container, so that the container and the cover formation seal volume；And at least one breakage-proof machanical fastener, with
The cover and container cooperation with when so that the ambient enviroment for sealing volume and the airtight package or surround it is described closed
The sealing state of the ambient enviroment isolation of packaging causes the airtight package breakage-proof when engaging the container and the cover.
In another aspect, the present invention relates to a kind of breakage-proof airtight packages comprising: container；The cover is configured to
It is engaged with the part of the container, so that the container and the cover formation seal volume；The array of machanical fastener, is configured
To interconnect the cover with the part for the container for engaging the cover, such array includes: the mechanical fasteners
First subarray of part comprising seal the sealing machine securing member of the engaged container and the cover together；And the machinery
Second subarray of fastener comprising breakage-proof machanical fastener, the breakage-proof machanical fastener by the cover with connect
The part interconnection of the container of the cover is closed, but (i) together in first son for lacking the machanical fastener
Engaged container and the cover described in blow-by in the case where array, and (ii) prevent the cover and institute by its breakage-proof characteristic
Container disengaging is stated, but through it except the damaged removal of the engaged container and the cover.
In another aspect, the present invention relates to a kind of breakage-proof packagings comprising: container；The cover, is configured to and institute
The part engagement of chemical reaction agent container is stated, so that the container and the cover formation seal volume；At least one sealing element,
Among the engaged container and the cover；And the array of machanical fastener, be configured to by the cover with engage described in
The part of the container of the cover interconnects, and such array includes: the first subarray of the machanical fastener comprising one
Play the sealing machine securing member that the engaged container and the cover are sealed using at least one sealing element anti-leak；And
Second subarray of the machanical fastener comprising breakage-proof machanical fastener, the breakage-proof machanical fastener will be described
The cover is interconnected with the part for the container for engaging the cover, but (i) together in the institute for lacking the machanical fastener
The engaged container and the cover are not sealed in the case where stating the first subarray anti-leak, and (ii) passes through its breakage-proof characteristic
The cover and the container is prevented to be detached from, but through it except the damaged removal of the engaged container and the cover.
In another aspect, the present invention relates to a kind of breakage-proof airtight packages comprising: container；The cover is configured to
It is engaged with the part of the container, so that the container and the cover formation seal volume；The array of machanical fastener, is configured
To interconnect the cover with the part for the container for engaging the cover, the array includes: the mechanical fasteners
First subarray of part comprising seal the sealing machine securing member of the engaged container and the cover together；And the machinery
Second subarray of fastener comprising breakage-proof machanical fastener, the breakage-proof machanical fastener by the cover with connect
The part interconnection of the container of the cover is closed, but (i) together in first son for lacking the machanical fastener
Engaged container and the cover described in blow-by in the case where array, and (ii) prevent the cover and institute by its breakage-proof characteristic
Container disengaging is stated, but through it except the damaged removal of the engaged container and the cover.In some embodiments, described anti-
Damaged airtight package can have the second subarray of the machanical fastener, and second subarray includes breakage-proof mechanical fasteners
Part, the breakage-proof machanical fastener is at least one of the following: (i) is less than the machanical fastener in size
The sealing machine securing member of first subarray；It (ii) can not be by being adapted to remove the machine of the sealing machine securing member
Tool fastener tool removes；(iii) prominent in the sealing machine securing member of first subarray of the machanical fastener
The lower face for being higher than it out is immersed oneself in the cover；And (iv) feature is locking torque, the locking torque is the machine
10% to the 60% of the locking torque of the sealing machine securing member of first subarray of tool fastener.In this breakage-proof
In some embodiments of airtight package, at least the two of feature (i) in (iv) is present in the packaging.The breakage-proof is close
Closure dress can further comprise at least one sealing element among the engaged container and the cover, and wherein described in engagement
The part of the container of the cover optionally include the peripheral part of the cover is presented engagement surface to extension
Stretch flange.The breakage-proof airtight package seals in volume or accommodates solid described in being contained in aqueous chemical reactant material
Agent material is chemically reacted, the solid chemical reaction agent material can be in particle or fouling form, be contained in the institute of the packaging
It states and seals in volume.The breakage-proof airtight package container is configured to be heated to transfer thermal energy to described seal in volume
The material to generate the steam of the material.The breakage-proof airtight package can further include at least one support knot
Structure seals in volume in the pallet sealed in volume, or described for accommodating the liquid or solid chemical reactor
The array of the pallet of material.In the embodiment of the breakage-proof airtight package, second submatrix of the machanical fastener
Column may include breakage-proof machanical fastener, and the breakage-proof machanical fastener can not be by being adapted to remove the sealing machine fastening
The machanical fastener tool of part removes, and optionally, and second subarray of the machanical fastener includes that feature is locking
The breakage-proof machanical fastener of torque, the locking torque are the sealings of first subarray of the machanical fastener
10% to the 60% of the locking torque of machanical fastener.
In another aspect, the present invention relates to a kind of breakage-proof airtight packages comprising: container；The cover is configured to
It is engaged with the container, so that the container and the cover formation seal volume；And at least one breakage-proof machanical fastener, with
The cover and container cooperation are when so that the sealing state for sealing volume and being isolated with the ambient enviroment of the airtight package
Cause the airtight package breakage-proof when engaging the container and the cover.In some embodiments, the breakage-proof airtight package
It may include the array of the breakage-proof machanical fastener, and in additional embodiment, at least one breakage-proof machanical fastener can
It is effective to making the container and the cover be maintained at the sealing state.In some embodiments of the breakage-proof airtight package,
At least one described engageable seal bracket of breakage-proof machanical fastener, so that the seal bracket is on the container and the cover
Apply compression for so that sealing the sealing state that volume is isolated with ambient enviroment described in the container seals the container
And the cover.In some embodiments, at least one breakage-proof machanical fastener threadably engages the cover and container.
In other aspects, the present invention relates to a kind of breakage-proof packagings comprising or comprising: container；And the cover, through matching
It sets to be engaged with the part of the chemical reaction agent container, so that the container and the cover formation seal volume.The breakage-proof
Packaging includes: at least one sealing element, among the engaged container and the cover；The array of machanical fastener, warp
To interconnect the cover with the part for the container for engaging the cover, the array includes: the machinery for configuration
First subarray of fastener comprising seal the engaged appearance with being used together at least one sealing element anti-leak
The sealing machine securing member of device and the cover；And the second subarray of the machanical fastener comprising breakage-proof machanical fastener,
The breakage-proof machanical fastener interconnects the part of the cover and the container for engaging the cover, but (i) one
Rise do not sealed anti-leak in the case where lacking first subarray of the machanical fastener the engaged container and
The cover, and (ii) prevent the cover and the container to be detached from by its breakage-proof characteristic, but pass through it from the engaged appearance
Except the damaged removal of device and the cover.The cover that can have exterior face generally flat is packed in the breakage-proof, and described anti-broken
Damage machanical fastener can immerse oneself in the plane external face of the cover to enhance its breakage-proof.For the breakage-proof
The breakage-proof machanical fastener of packaging can have locking torque, and the locking torque is the lock of the sealing machine securing member
Determine 10% to the 60% of torque.The container for engaging the cover of the breakage-proof packaging may include to the outer of the cover
Enclose the flange that extends outwardly that engagement surface is presented in part.
In another aspect, the present invention relates to a kind of external members comprising: as described in herein differently according to the present invention
Breakage-proof packaging；And breakage-proof machanical fastener removing tool, it is distinguishingly adapted to from the cover and the non-breakage of container
Ground removes the breakage-proof machanical fastener, and invalid to the sealing machine securing member is removed from the cover and container.
It will become more fully apparent from other aspects of the invention, feature and implementation from subsequent description and appended claim
Example.
Detailed description of the invention
Fig. 1 (prior art) is can be packed by the chemical reactor of the usefully type of application breakage-proof feature of the invention
Perspective view.
Fig. 2 is the perspective view packed by the chemical reactor of application breakage-proof feature of the invention.
Fig. 3 is the enlarged perspective of the part of the chemical reactor packaging of Fig. 2, shows the first submatrix of machanical fastener
The details of the breakage-proof machanical fastener of second subarray of sealing machine securing member and machanical fastener in column.
Fig. 4 is according to another embodiment of the present invention by the chemical reactor packet of application breakage-proof feature of the invention
The perspective view of dress.
Fig. 5 is the enlarged perspective of the part of the chemical reactor packaging of Fig. 2, shows the first submatrix of machanical fastener
The details of the breakage-proof machanical fastener of second subarray of sealing machine securing member and machanical fastener in column.
Fig. 6 is the perspective of the chemical reactor packaging comprising breakage-proof containment member according to another embodiment of the present invention
Figure.
Specific embodiment
The present invention relates to the packaging for combining breakage-proof security feature, the breakage-proof security feature protects the interior of the packaging
The tolerant ambient enviroment from being exposed to the packaging.
In an aspect, the present invention relates to a kind of breakage-proof airtight packages comprising: container；The cover is configured to
It is engaged with the container, so that the container and the cover formation seal volume；And at least one breakage-proof machanical fastener, with
The cover and container cooperation are when so that the sealing state for sealing volume and being isolated with the ambient enviroment of the airtight package
Cause the airtight package breakage-proof when engaging the container and the cover.
In the various embodiments of such breakage-proof airtight package, the array of the breakage-proof machanical fastener can be used.
In various embodiments, the breakage-proof machanical fastener threadably engages the cover and container.In various embodiments,
It is described close to the container and the cover is maintained at that the breakage-proof machanical fastener can belong to the breakage-proof machanical fastener
The effective form of envelope state.
In various embodiments, the breakage-proof airtight package can be constituted so that at least one described breakage-proof is mechanical tight
Each of firmware joint seal bracket so that the seal bracket apply on the container and the cover compression with for
Make the sealing state sealing appearance for sealing volume and being isolated with the ambient enviroment of the airtight package of the packaging
Device and the cover.
Therefore, in various embodiments, the breakage-proof machanical fastener can be used as dual purpose: be used to breakage-proof spy
Property be imparted to the packaging including the container and the cover, and to sealing or assist to seal the container and the cover is effective,
So that it is in that the described of the packaging is made to seal the sealing state that volume is isolated with the ambient enviroment of the packaging.
For the breakage-proof machanical fastener in packaging of the invention be configured to prevent the cover with it is described
Container is detached from effectively, but through the cover except the damaged removal of the engaged the cover and container assembly, for example,
After the packaging is loaded the chemical reactor and time for being sealed, and reloading, again in the packaging
Before adjusting or other final disposals.
In various embodiments, the present invention relates to a kind of breakage-proof airtight packages comprising: container；The cover is configured
To be engaged with the part of the container, so that the container and the cover formation seal volume；The array of machanical fastener, through matching
It sets to interconnect the cover with the part for the container for engaging the cover, such array includes: described mechanical tight
First subarray of firmware comprising seal the sealing machine securing member of the engaged container and the cover together；And the machine
Second subarray of tool fastener comprising breakage-proof machanical fastener, the breakage-proof machanical fastener by the cover with
The part interconnection of the container of the cover is engaged, but (i) is lacking described the first of the machanical fastener together
Engaged container and the cover described in blow-by in the case where subarray, and (ii) by its breakage-proof characteristic prevent the cover with
The container is detached from, but through it except the damaged removal of the engaged container and the cover.
In other embodiments, the present invention relates to a kind of breakage-proof packagings comprising: container；The cover, be configured to
The part engagement of the chemical reaction agent container, so that the container and the cover formation seal volume；At least one sealing element,
It is among the engaged container and the cover；And the array of machanical fastener, be configured to by the cover with engage institute
The part interconnection of the container of the cover is stated, such array includes: the first subarray of the machanical fastener comprising
Seal the sealing machine securing member of the engaged container and the cover with being used together at least one sealing element anti-leak；
And the second subarray of the machanical fastener comprising breakage-proof machanical fastener, the breakage-proof machanical fastener is by institute
It states the cover to interconnect with the part for the container for engaging the cover, but (i) is lacking the machanical fastener together
The engaged container and the cover are not sealed in the case where first subarray anti-leak, and (ii) passes through its breakage-proof spy
Property prevent the cover and the container to be detached from, but by its from the engaged container and the cover it is damaged remove except.
In the various embodiments of breakage-proof airtight package as described above, second son of the machanical fastener
Array may include breakage-proof machanical fastener, and the breakage-proof machanical fastener is at least one of the following: (i) is big
The sealing machine securing member of small upper first subarray less than the machanical fastener；It (ii) can not be by being adapted to move
Except the machanical fastener tool of the sealing machine securing member removes；(iii) in first submatrix of the machanical fastener
The lower face that the sealing machine securing member of column projects above it is immersed oneself in the cover；And (iv) feature is that locking is turned round
Square, the locking torque are the locking torques of the sealing machine securing member of first subarray of the machanical fastener
10% to 60%.
In various embodiments, the breakage-proof airtight package as described above can be through constituting so that the mechanical fasteners
The engaged container and the cover are sealed to the sealing machine securing member anti-leak of first subarray of part, and is made
The machanical fastener of second subarray of the machanical fastener is lacking described in the machanical fastener together
The engaged container and the cover are not sealed in the case where first subarray anti-leak.
In a particular embodiment, the breakage-proof airtight package as described above can further comprise described engaged
At least one sealing element among container and the cover, such as washer, for example, metal washer, elastomeric material annulus or its
Its sealing element or several other sealing elements.
In various embodiments, the breakage-proof airtight package can be configured such that the container for engaging the cover
The part includes the flange that extends outwardly that engagement surface is presented to the peripheral part of the cover.
The breakage-proof airtight package of the invention can be formed by any or several suitable constructions materials.For example, institute
Stating container and the cover can be formed by metal, wherein the container and the cover are formed by same metal, or alternatively by difference
Metal is formed.In various embodiments, the container and the cover are formed by stainless steel.
In the breakage-proof airtight package in use, one or more of the chemical reactor source material mutually may be housed in
The described of the packaging seals in volume.In various embodiments, the chemical reactor source material may include be contained in it is described
The solid material in volume, such as the solid material with vapour pressure are sealed, the vapour pressure is generated in described seal in volume
The steam of the solid material.In other embodiments, the source material may include the liquid with significant vapour pressure, so that institute
The liquid and steam for stating chemical reactor are present in the packaging.
In some embodiments, the packaging can be constructed and be arranged for use as vaporizer packaging, wherein the container passes through
Configuration is to be heated to transfer thermal energy to be contained in the solid chemical reaction agent material sealed in volume.In such implementation
In example, the breakage-proof airtight package can be arranged to and be adapted to transfer thermal energy to the described of the packaging to seal in volume
The solid material heater combination so that the solid chemical reaction agent can be volatilized by the heating of the container,
Matched with generating steam for applying from the packaging.
In general, the breakage-proof airtight package can accommodate any appropriate chemical reactant material in described seal in volume
Material, such as manufacturing semiconductor product, flat-panel monitor or the chemical reactor of solar panel.Institute in the packaging
Stating solid chemical reaction agent can be in any suitable form, for example, being in particle, particle, powder or other discontinuous forms, or substitution
Ground is in the form of monolithic object, such as block, block or crystal block form, or is in alternatively layer of scale form, wherein the layer of scale
Fusing foulant including covering the solid chemical reaction agent of the solid chemical reaction agent in particulate form.
In various embodiments, the breakage-proof airtight package accommodates at least one support knot in the internal capacity
Structure provides support surface for holding solid chemical reaction agent on the support surface.The support construction can belong to
Any suitable type.For example, the support construction in the breakage-proof airtight package may include being mounted on described seal
At least one pallet in volume.In various embodiments, the support construction may include in the pallet sealed in volume
Array, such as example as herein in the array of the pallet of type demonstrated in Figure 1.
In various embodiments, the breakage-proof airtight package can be fabricated so that the machanical fastener described second
Subarray includes breakage-proof machanical fastener, and the breakage-proof machanical fastener is less than the institute of the machanical fastener in size
State the sealing machine securing member of the first subarray.In other embodiments, second submatrix of the machanical fastener
Column include breakage-proof machanical fastener, and the breakage-proof machanical fastener can not be by being adapted to remove the sealing machine securing member
Machanical fastener tool remove.In other embodiments again, second subarray of the machanical fastener includes anti-broken
Damage machanical fastener, the sealer of the breakage-proof machanical fastener in first subarray of the machanical fastener
The lower face that tool fastener projects above it is immersed oneself in the cover.In other embodiments again, the machanical fastener
Second subarray include feature be the breakage-proof machanical fastener for locking torque, the locking torque be it is described it is mechanical tightly
10% to the 60% of the locking torque of the sealing machine securing member of first subarray of firmware.In other embodiments again
In, can with any two or more various combinations in this category feature using the breakage-proof machanical fastener it is such before
Any one of feature is stated, to provide the breakage-proof packaging for the desired characteristic for giving breakage-proof.
In a particular embodiment, the breakage-proof packaging can include: container；The cover is configured to anti-with the chemistry
The part of agent container is answered to engage, so that the container and the cover formation seal volume；At least one sealing element, in the warp
Among engagement container and the cover；And the array of machanical fastener, it is configured to the cover and the institute for engaging the cover
The part interconnection of container is stated, such array includes: the first subarray of the machanical fastener comprising is used together institute
Seal the sealing machine securing member of the engaged container and the cover with stating at least one sealing element anti-leak；And the machinery
Second subarray of fastener comprising breakage-proof machanical fastener, the breakage-proof machanical fastener by the cover with connect
The part interconnection of the container of the cover is closed, but (i) together in first son for lacking the machanical fastener
Do not seal the engaged container and the cover in the case where array anti-leak, and (ii) prevented by its breakage-proof characteristic it is described
The cover and the container are detached from, but through it except the damaged removal of the engaged container and the cover.
Such specific embodiment can be constituted so that the cover has generally flat exterior face, wherein the breakage-proof
Machanical fastener is immersed oneself in such face to enhance its breakage-proof.Alternatively or additionally, the breakage-proof machanical fastener can
With locking torque, the locking torque is 10% to the 60% of the locking torque of the sealing machine securing member.Previously retouched
The packaging in any one of such embodiment stated can be fabricated so that engaging the described of the container of the cover
Part includes the flange that extends outwardly that engagement surface is presented to the peripheral part of the cover.
In another aspect, the present invention relates to a kind of external members comprising: as described in herein differently according to the present invention
Breakage-proof packaging；And breakage-proof machanical fastener removing tool, it is distinguishingly adapted to from the cover and the non-breakage of container
Ground removes the breakage-proof machanical fastener, and invalid to the sealing machine securing member is removed from the cover and container.
Referring now to the drawings, Fig. 1 (prior art) is the type that can be usefully applied breakage-proof feature of the invention
The perspective view of chemical reactor packaging.
Although subsequent description is related to solid chemical reaction agent vaporizer packaging, it is to be understood that such particular envelope only has
Being described property characteristic, and breakage-proof feature of the invention can be generally suitable for the packaging comprising container, the cover passes through mechanical tight
Firmware is attached to container, to form the internal capacity sealed by container and the cover, wherein chemical reaction agent material is accommodated, so as to change
It learns reactant material to be isolated with the external environment of packaging, in the external environment, such chemical reaction agent material will cause phase
For its closed and increased risk in the packaging.
Therefore, reference solid chemical reaction agent vaporizer is packed to state the present invention, in solid chemical reaction
In agent vaporizer packaging, volatilizable solid chemical reaction agent can be heated and thermal energy is applied to container, so that will by container
Thermal energy is transferred to solid chemical reaction agent so that reactant volatilizees and forms corresponding chemical reactor steam, to be fitted on benefit for applying
It is anti-with the facility of steam, such as semiconductor manufacturing facility, or for manufacturing flat-panel monitor, solar panel or in which chemistry
Answer agent steam for the facility of any proper product of manufacturing process.
The vaporizer packaging of this Class Type is painted in Fig. 1.Vaporizer packaging 10 includes the appearance manufactured by suitable Heat Conduction Material
Device 12, suitable Heat Conduction Material is for example for example silver, silver alloy, copper, copper alloy, aluminium, aluminium alloy, lead, nickel clad, stainless
Steel, graphite, the graphite of coating silicon carbide, boron nitride, ceramic material etc. or the two in the building material of this Class Type or more
Any one of appropriate combination, mixture and alloy of more persons.
Container includes the bottom plate 14 and limited side wall 16 for being formed together the internal capacity of container.Container can have promotion to carry
Gas equably flows through any shape of the internal capacity of container.In various embodiments, container, which can have, is machined into pole
Close tolerance (for example, one inch 1/1000thTo 3/1000thIn the range of) cylindrical.
Container includes the cover 18, and carrier gas inlet valve 20 is mounted in the cover 18, and carrier gas inlet valve 20 is arranged to when described
Carrier gas is selectively introduced into the internal capacity of container by valve when opening.
Multiple vertical stacking pallets 22 are located in the internal capacity of container.Heap tray can be separated from each other and can move from container
Except so as to easy cleaning and refilling.Internal, carrier gas down tube 23 is located in container, and the connection of internal, carrier gas down tube 23 is (for example, weldering
Connect) it will below gas access associated with inlet valve 20 and minimum pallet in the array of vertical stacking pallet into the cover
Carrier gas is transmitted to the bottom of internal capacity.In Fig. 1, down tube 23 passes through the cylindrical collar 27 of each pallet, extends through
The bottom plate 24 of pallet.It will be appreciated that the leak-tight seal of the seam crossing to ensure the bottom plate 24 in down tube and pallet, seals O-ring
38 can be between successive pallet, especially in the case where source material is liquid.Additional external O-ring also can be used every
It is sealed between pallet on the top surface of one pallet side wall.
When chemical source reactant is in solid form, various structural details can be used to inhibit or minimize in carrier gas
Solid entrainment.Such anti-entrainment feature can belong to any suitable type, and can for example comprising frit element, and in addition to
Particle inhibitory character or device except frit.In various embodiments, the particle inhibitory character other than frit can
Comprising tortuous flow, upper solid detaching structure, as the tangential gas of particle buildup or collecting function flowing effluent etc.
Deng.As particular instance, high-purity stainless steel frit is (for example, have hole in the range of 1 micron to 100 microns big
It is small) and at least one particle inhibitory character other than frit can add at any suitable position to control carrier gas
Rate.Frit can be for example mounted at " entrance " of each siphunculus 30 associated with pallet or great circle glass sheet material can add
It is added to top pallet and is sealed in top pallet by from pressure of the lid in the installation on container, or in other ways
It is placed in exit gas flow path.
As Figure 1 shows, positioning of the siphunculus in each pallet slightly deviates with position of the siphunculus in neighbouring pallet, by
This forces carrier gas to recycle in pallet before gained admixture of gas is transported in next neighbouring pallet area by siphunculus
Contact carrier gas with vaporization source material.By such arrangement, multiple exposure levels of carrier gas and source reactant material permit carrier gas
Become to be saturated in a manner of highly effective.
Vaporizer packaging 10 size may depend on to be supplied to downstream using fluid equipment (such as CVD equipment or from
Sub- implant system) steam amount and be extensively varied.In one embodiment, vaporizer has internal diameter at about 3 inches to 6 English
The cylindrical structure of (for example, about 3.75 inches) in very little range.The number of pallet in the internal capacity of vaporizer vessel will
It is determined by the size that vaporizer is packed.In various embodiments, three to five pallets seal in vaporizer vessel.
The vaporizer for accommodating a large amount of pallets can be heated and be held in desired temperature suitable for specific source materials to be vaporized
Degree is delivered to downstream from vaporizer using the desired concentration of the source reactant in carrier gas mixture of the facility of fluid, and
For specific one group of operating condition in the vaporization operation of source reactant.
It can be vaporized the heating of device container in any way as suitable.In one embodiment, ribbon heater is wound on vaporization
Around device.In another embodiment, there is the blocky heating of the shape of at least major part of the outer surface of covering vaporizer
Device is used to heated vaporizer container.In another embodiment, the heat-tranfer fluid of high temperature and the external table of vaporizer vessel can be made
Face contact, to realize its heating.Another embodiment is related to adding on vaporizer vessel by infrared or other radiant energy exposures
Heat.
In another embodiment, the present invention is contemplated by and recycles hot gas in a reservoir to take heating source reactant, to realize
The Convective Heating of solid source reactant.
The heating means of vaporizer vessel are not especially limited, if thus make vaporizer reach desired temperature levels and with
Mode accurately and securely is maintained at such temperature levels.
It is expected that with hot non-uniform manner heated vaporizer container, so that minimizing the temperature deviation in the internal capacity of container.
In the specific embodiment that pallet is directly thermally contacted with wall, such pallet can be provided via the heating of the heat transfer from wall
Convenience and effective mode for vaporizing the source reactant on pallet.
In some applications, it may be desirable to utilize additional surface area structure, in the internal capacity of vaporizer vessel with enhancing
The degree of heat and rate of source reactant material are for vaporizing source reactant material.
As another makeshift of the high-efficient gasification for realizing source material, carrier gas can be introduced into vaporizer vessel
Internal capacity before heat carrier gas, with the heating and its vaporization of assistant chemical reaction agent.For example, by carrier gas be supplied into
The flowline of mouth valve 20 can be tracked heating or other means and be subjected to heating, to realize that carrier gas is delivered with desired temperature levels
To vaporizer vessel.
From can be in the specific arrangements that deliver of steam of sublimation solid source chemical reactor, vaporizer packaging be using comprising more
A series of heated pallets of a heated siphunculus, the heated siphunculus increase heated surface area, thus make since heat distribution increases
The distillation of solid source chemical reaction agent material can be realized in a manner of highly effective.
Vaporizer according to the present invention packaging in use, can before securing the cover to vessel (referring to Fig. 1,
Middle the cover 18 is fixed to vessel by bolt machanical fastener) source reactant material is introduced into vaporizer vessel, it is contained in
In pallet, or it is placed in the internal capacity of vaporizer vessel in other ways.Source reactant material can be in any suitable form,
Comprising solid form, liquid form, semi-solid form, or to accommodate the source reactant being dissolved or dispersed in suitable solvent medium
The solution of material.
In one embodiment, source reactant material is provided as in the form of deposit, as suitable thickness film or
Coating is coated on the surface of the intracavitary pallet and siphunculus of pallet.Such film or coating can pass through any in various appropriate methods
Person is formed, and the method includes to make the melting of source reactant by heating source reactant, be coated to molten source reactant material
The surface of pallet and siphunculus and the method for then cooling down coated material.
In source, chemical reactor includes that can be dissolved in metal complex in another embodiment of metal complex and be coated to
In the solvent and acquired solution on the surface of pallet and siphunculus, solvent then is removed from coated material under reduced pressure.
Therefore, vaporizer packaging may include multiple perpendicular in the central down tube being mounted in the internal capacity of vaporizer vessel
Straight heap tray.Source chemically reacts agent material can be by the source chemical reactor with predetermined amount (for example, the particle of metered amount is solid
Body) it fills pallet and is loaded into the internal capacity of vessel.After such loading of the source reactant in vaporizer vessel, make
The cover 18 of packaging is located at the top of vessel, and for example by the O-ring element by polytetrafluoroethylene (PTFE) or elastomer and leads to
The machanical fastener for crossing such as bolt fastener is sealed to the top of vessel.
In assembling vaporizer packaging and connection vaporizer packaging and process production line carrier gas is delivered to packing container
Seal volume and from accommodate source chemical reactor steam carrier gas mixture vessel discharge after, vaporizer heater is actuated
To realize the heating of vaporizer vessel.It is heated so that the internal temperature in vaporizer and contact pallet is increased sufficiently to make source
Chemically react the temperature of agent material vaporization.
Fig. 2 is by the perspective view of the chemical reactor packaging 50 of application breakage-proof feature of the invention.
Chemical reactor packaging 50 as illustrated includes container 52, and container 52 has outward at end on it and circumference prolongs
Stretch flange 54.Flange can be engaged matingly with the cover 56 with flat top surface 60, as demonstrated.Valve array 64 is connected to
The cover, valve array 64 include inlet valve associated with entry component and it is associated with the exit passageway component of packaging go out
Mouth valve.
The cover 56 of the packaging of Fig. 2 is mutual with flange 54 by the array of machanical fastener at the upper part of container 52
Even.The array of machanical fastener includes: the first subarray of machanical fastener comprising seal engaged container and the cover together
Sealing machine securing member 58；And the second subarray of machanical fastener comprising breakage-proof machanical fastener 72, breakage-proof machine
Tool fastener 72 interconnects the cover with the part for the container for engaging the cover, but (i) together in the first son for lacking machanical fastener
The engaged container of blow-by and the cover in the case where array, and (ii) prevent the cover and container to be detached from by its breakage-proof characteristic,
But through it except the damaged removal of engaged container and the cover.
Fig. 3 is the enlarged perspective of the part of the chemical reactor packaging of Fig. 2, shows the first submatrix of machanical fastener
The details of the breakage-proof machanical fastener 72 of second subarray of sealing machine securing member 58 and machanical fastener in column.
Therefore, the packaging of Fig. 2 to 3 includes the breakage-proof bolt of the Non-Sealing Feature as packaging, and sole purpose is anti-
The user only packed removes completely the cover from container.Breakage-proof bolt is special bolt, can only pass through the non-breakage of special key
Ground removes.Such special key can sell while be supplied to the buyer of packaging together with packaging, be only used for will not causing because
It is exposed to pack content and in the environment of risk that injures or destroy.As shown in Fig. 3, breakage-proof bolt can have tack special
Property, the tack characteristic is slightly depressed below the surface of packaging the cover, to prevent the tool of such as pliers or vice to be used to remove
Such breakage-proof bolt.
Fig. 4 is according to another embodiment of the present invention by the chemical reactor packet of application breakage-proof feature of the invention
Fill 80 perspective view.
Chemical reactor packaging 80 as illustrated includes container 82, and container 82 has outward at end on it and circumference prolongs
Stretch flange 84.Flange can be engaged matingly with the cover 86 with flat top surface 88, as demonstrated.Valve array 92 is connected to
The cover, valve array 92 include inlet valve associated with entry component and it is associated with the exit passageway component of packaging go out
Mouth valve.
The cover 86 of the packaging of Fig. 4 is mutual with flange 84 by the array of machanical fastener at the upper part of container 82
Even.The array of machanical fastener includes: the first subarray of machanical fastener comprising seal engaged container and the cover together
Sealing machine securing member 90；And the second subarray of machanical fastener comprising breakage-proof machanical fastener 98, breakage-proof machine
Tool fastener 98 interconnects the cover with the part for the container for engaging the cover, but (i) together in the first son for lacking machanical fastener
The engaged container of blow-by and the cover in the case where array, and (ii) prevent the cover and container to be detached from by its breakage-proof characteristic,
But through it except the damaged removal of engaged container and the cover.Although in the perspective view of Fig. 4 only visible three it is anti-broken
Damage fastener 98, it should be appreciated that the 4th breakage-proof fastener is located at 92 rear of valve cluster being placed in the cover 86 of packaging.It answers
It further understands, the number of breakage-proof machanical fastener can change according to the structure and requirement of particular envelope, and any suitable
Number can be used for particular envelope application in, the second subarray comprising machanical fastener include 2,3,4,5,6 or
The packaging of more breakage-proof machanical fasteners.
Fig. 5 is the enlarged perspective of the part of the chemical reactor packaging of Fig. 2, shows the first submatrix of machanical fastener
The details of the breakage-proof machanical fastener 98 of second subarray of sealing machine securing member 90 and machanical fastener in column.
Fig. 6 is the chemical reactor packaging 110 comprising breakage-proof containment member according to another embodiment of the present invention
Perspective view.
Breakage-proof packaging 110 includes the container 112 with limited cylindrical wall 114 and bottom plate (invisible in Fig. 6),
The bottom plate defines the internal capacity that seals for accommodating chemical reactor, and the chemical reactor is exposed to the week of the container
Collarette border will will lead to health and/or safety problem, and/or can damage the chemical reactor, for example, the chemical reactor
It will do it the mediated decomposition of air.
Container 112 include by the top that can matingly engage of outer peripheral part 126 of the cover 124 of packaging it is radial to
Outer stretch flange formability 116.Inlet/outlet sub-assembly 118 is mounted in the cover 124, and inlet/outlet sub-assembly 118 includes into openning
Sub-assembly 120 and outlet sub-assemblies 140, carrier gas can introduce the internal capacity of container by inlet/outlet sub-assembly 118
In, to be contacted with the steam of chemical reactor therein.Such chemical reactor (can not be shown by container 112 in Fig. 6
Heating component) heating and the solid chemical reaction agent volatilized.Carrier gas and the contact of the steam of chemical reactor can generate carrier gas/
Chemical reactor vapour mixture is discharged from the container and flowing through outlet sub-assemblies 140.For such purpose,
Outlet sub-assemblies 140 can be connected to appropriate flow circuits, and carrier gas/chemical reactor vapour mixture is transported utilizationization
Learn the downstream process of reactant steam.
Fig. 6 include illustrative breakage-proof feature, it includes seal brackets 160, as demonstrated, seal bracket 160 be in comprising
By way of two parallel flanges sections that intermediate yoke section is coupled, so that seal bracket is substantially c-shaped.Seal bracket
Being formed such that upper flange wherein has threaded hole 164 and lower flange has threaded hole 162 wherein.In this embodiment
In, the outer peripheral part 126 and top of the cover 124 of packaging extend radially outwardly flange 116 have across its screw thread it is logical
Road 152, threaded pathway 152 terminate at the top surface of the cover 124 at opening 150.Therefore, seal bracket 160 can be placed
It extends radially outwardly above flange 116 in external peripheral part 126 and top, so that threaded hole 162 and threaded hole 164 and screw thread
Access 152 is registrated, and wherein covers opening 150 on threaded hole 164.Then, threaded mechanical fasteners 166 can be with threaded hole 164, opening
150, access 152 and threaded hole 162 threadably engage so that gained sub-assembly apply the cover outer peripheral part 126 with
The top of container extends radially outwardly the compression bonding of flange 116, to realize sealing therebetween.To assist such compression bonding
Sealing function, washer, sealing ring etc. can be deployed in the outer peripheral part 126 of the cover and the top of container and extend radially outwardly
Between flange 116.
For such purpose, threaded mechanical fasteners 166 have breakage-proof head, the breakage-proof head need special tool(s) with
For being rotatably driven threaded mechanical fasteners by threaded hole 164, opening 150, access 152 and threaded hole 162.Although figure
6 embodiment is shown as only with single breakage-proof feature, that is, engagement C-shaped plier group component can be screwed togather, it is to be understood that
In other embodiments, multiple such plier group components can be provided along the periphery of flange and cover assembly, so that pressing from both sides using breakage-proof
It clamps sub-assembly and entirely circumferentially fixes container and the cover.
It should also be clear that replacing being threadedly engaged by the cover and container flange and access 152 as illustrated, sealing support
Frame can be configured such that it engages the cover and container flange at its peripheral region, wherein the spiral shell in the respective flanges of seal bracket
Line opening 162 and 164 is radially shifted from the flange 116 of the cover and the edge of outer peripheral part 126, so that screw thread is mechanical tight
Firmware 166 itself does not contact flange 116 or the outer peripheral part 126 of the cover.
It should be further appreciated that being matched flange 116 and outer peripheral part of the force-fitting in the cover instead of seal bracket 160
The single piece component of 126 tops, seal bracket may be formed at the respective upper part and lower part slidably engaged vertically each other
In part, so that threaded mechanical fasteners effectively pull upper part and the lower part portion of the vertical slidable engagement of seal bracket
Divide toward each other thus to apply increased compression in the cover and container flange, to realize sealing function, is formed simultaneously
Breakage-proof feature.Such two-piece type seal bracket can be with the machanical fastener of the opening in joint flange and the peripheral part of the cover
It is used together, or alternatively, the two-piece type seal bracket can be arranged such that threaded mechanical fasteners are convex from the cover and container
The vertical outer peripheral surface of edge shifts radially outward.
It should also be clear that the seal assembly of other forms can be used, will also prevent simultaneously other than assigning sealing function
Destructive is imparted to the chemical reactor packaging disposed together with seal assembly.
Finally, from foregoing teachings it will be appreciated that breakage-proof feature of the invention can effectively be used to protective packaging (for example, changing
Learn reactant packaging) content from neglecting or being opened accidentally, content may be exposed to the outer of packaging by the opening
Portion's environment, and may relate to injury or dead risk in the case where toxicity or other hazardous chemical reactants, or destroy packet
The ambient enviroment of dress.
Although having referred to particular aspects, feature and illustrative embodiments elaborates the present invention herein, it is to be understood that this hair
Bright practicability is not thereby limited, but expands to and cover numerous other variations, modification and alternate embodiment, will be such as based on
Description herein and suggested to one of ordinary skill in the art.Accordingly, as advocated in claims
It includes all such variations in spirit and scope of the present invention that the present invention, which wishes to be interpreted broadly and be interpreted as, modifies and replaces
For embodiment.
Claims (18)
1. a kind of breakage-proof airtight package comprising:
Container；
The cover is configured to engage with the part of the container, so that the container and the cover formation seal volume；
The array of machanical fastener is configured to the cover and the part for the container for engaging the cover is mutual
Even, the array includes:
First subarray of the machanical fastener comprising the sealing machine for sealing the engaged container and the cover together is tight
Firmware；And
Second subarray of the machanical fastener comprising breakage-proof machanical fastener, the breakage-proof machanical fastener will
The cover is interconnected with the part for the container for engaging the cover, but (i) is lacking the machanical fastener together
First subarray in the case where engaged container and the cover described in blow-by, and (ii) prevented by its breakage-proof characteristic
The cover and the container are detached from, but through it except the damaged removal of the engaged container and the cover.
2. breakage-proof airtight package according to claim 1, wherein the second subarray packet of the machanical fastener
Breakage-proof machanical fastener is included, the breakage-proof machanical fastener is at least one of the following: (i) is less than in size
The sealing machine securing member of first subarray of the machanical fastener；It (ii) can not be described close by being adapted to remove
The machanical fastener tool for sealing machanical fastener removes；(iii) described in first subarray of the machanical fastener
The lower face that sealing machine securing member projects above it is immersed oneself in the cover；And (iv) feature is locking torque, it is described
Locking torque is the 10% of the locking torque of the sealing machine securing member of first subarray of the machanical fastener
To 60%.
3. breakage-proof airtight package according to claim 2 comprising at least the two in feature (i) to (iv).
4. breakage-proof airtight package according to claim 1 further comprises in the engaged container and the cover
Between at least one sealing element.
5. breakage-proof airtight package according to claim 4, wherein at least one described sealing element includes washer.
6. breakage-proof airtight package according to claim 1, wherein the container is configured to be heated to pass thermal energy
It is defeated to the solid material sealed in volume.
7. breakage-proof airtight package according to claim 6, described appearance is sealed with being adapted to for the thermal energy to be transferred to
The heater of the solid material in product combines.
8. breakage-proof airtight package according to claim 6, wherein at least one support construction seals volume including described
In at least one pallet.
9. breakage-proof airtight package according to claim 1, wherein the second subarray packet of the machanical fastener
Breakage-proof machanical fastener is included, the breakage-proof machanical fastener can not be by being adapted to remove the machine of the sealing machine securing member
Tool fastener tool removes.
10. breakage-proof airtight package according to claim 1, wherein the second subarray packet of the machanical fastener
Including feature is the breakage-proof machanical fastener for locking torque, and the locking torque is first submatrix of the machanical fastener
10% to the 60% of the locking torque of the sealing machine securing member of column.
11. a kind of breakage-proof airtight package comprising:
Container；
The cover is configured to engage with the container, so that the container and the cover formation seal volume；And
At least one breakage-proof machanical fastener, cooperate with the cover and container with when so that it is described seal volume with it is described
The sealing state of the ambient enviroment isolation of airtight package causes the airtight package breakage-proof when engaging the container and the cover.
12. breakage-proof airtight package according to claim 11 comprising the array of the breakage-proof machanical fastener.
13. breakage-proof airtight package according to claim 11, wherein at least one described breakage-proof machanical fastener pair
The container and the cover is set to be maintained at the sealing state effective.
14. breakage-proof airtight package according to claim 11, wherein at least one described breakage-proof machanical fastener
Each joint seal bracket so that the seal bracket applies compression on the container and the cover with for so that described
It seals the sealing state that volume is isolated with ambient enviroment and seals the container and the cover.
15. breakage-proof airtight package according to claim 11, wherein at least one described breakage-proof machanical fastener
Each threadably engage the cover and container.
16. a kind of breakage-proof packaging comprising:
Container；
The cover is configured to engage with the part of the chemical reaction agent container, so that the container and the cover formation seal
Volume；
At least one sealing element, among the engaged container and the cover；
The array of machanical fastener is configured to the cover and the part for the container for engaging the cover is mutual
Even, the array includes:
First subarray of the machanical fastener comprising seal with being used together at least one sealing element anti-leak
The sealing machine securing member of the engaged container and the cover；And
Second subarray of the machanical fastener comprising breakage-proof machanical fastener, the breakage-proof machanical fastener will
The cover is interconnected with the part for the container for engaging the cover, but (i) is lacking the machanical fastener together
First subarray in the case where do not seal the engaged container and the cover anti-leak, and (ii) passes through its breakage-proof
Characteristic prevents the cover and the container to be detached from, but through it except the damaged removal of the engaged container and the cover.
17. breakage-proof packaging according to claim 16, wherein the breakage-proof machanical fastener has locking torque, institute
State locking torque is the locking torque of the sealing machine securing member 10% to 60%.
18. breakage-proof packaging according to claim 16, wherein engaging the part packet of the container of the cover
Include the flange that extends outwardly that engagement surface is presented to the peripheral part of the cover.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662324342P | 2016-04-19 | 2016-04-19 | |
| US62/324,342 | 2016-04-19 | ||
| PCT/US2017/026816 WO2017184368A1 (en) | 2016-04-19 | 2017-04-10 | Tamper-resistant chemical reagent package |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109153480A true CN109153480A (en) | 2019-01-04 |
| CN109153480B CN109153480B (en) | 2021-04-27 |
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|---|---|---|---|
| CN201780027769.4A Active CN109153480B (en) | 2016-04-19 | 2017-04-10 | Anti-misopening chemical reactant package |
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| US (1) | US11136169B2 (en) |
| JP (1) | JP6946340B2 (en) |
| KR (1) | KR102207307B1 (en) |
| CN (1) | CN109153480B (en) |
| TW (1) | TWI683769B (en) |
| WO (1) | WO2017184368A1 (en) |
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| CN112888641B (en) * | 2018-10-12 | 2023-02-17 | 中央硝子株式会社 | Method for preserving liquid composition and product |
| JP6887688B2 (en) * | 2019-02-07 | 2021-06-16 | 株式会社高純度化学研究所 | A container for evaporative raw materials and a solid vaporization supply system using the container for evaporative raw materials |
| JP6901153B2 (en) * | 2019-02-07 | 2021-07-14 | 株式会社高純度化学研究所 | Solid vaporization supply system for metal halogen compounds for thin film formation. |
| US11834740B2 (en) * | 2020-11-10 | 2023-12-05 | Applied Materials, Inc. | Apparatus, system, and method for generating gas for use in a process chamber |
| US20220411924A1 (en) * | 2021-06-28 | 2022-12-29 | Applied Materials, Inc. | Ampoule for a semiconductor manufacturing precursor |
| US11584990B2 (en) | 2021-07-02 | 2023-02-21 | Applied Materials, Inc. | Bottom fed sublimation bed for high saturation efficiency in semiconductor applications |
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| FR1433822A (en) | 1964-05-06 | 1966-04-01 | Wohlgroth H & Co | Leaded safety device attached to a screw |
| JPH07145808A (en) * | 1993-11-22 | 1995-06-06 | Yokogawa Denshi Kiki Kk | Sealing device |
| US5697743A (en) * | 1996-10-04 | 1997-12-16 | Parker; Stanley F. | Tamper proof threaded fastener |
| US7464917B2 (en) * | 2005-10-07 | 2008-12-16 | Appiled Materials, Inc. | Ampoule splash guard apparatus |
| US8602245B2 (en) * | 2010-01-05 | 2013-12-10 | Cooper Technologies Company | Enclosure clamps and clamp systems |
| CN202400417U (en) * | 2011-09-29 | 2012-08-29 | 通用电气公司 | System for locking container component |
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2017
- 2017-04-10 KR KR1020187032960A patent/KR102207307B1/en active IP Right Grant
- 2017-04-10 WO PCT/US2017/026816 patent/WO2017184368A1/en active Application Filing
- 2017-04-10 JP JP2018554521A patent/JP6946340B2/en active Active
- 2017-04-10 US US16/091,845 patent/US11136169B2/en active Active
- 2017-04-10 CN CN201780027769.4A patent/CN109153480B/en active Active
- 2017-04-18 TW TW106112978A patent/TWI683769B/en active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1116442A (en) * | 1993-01-20 | 1996-02-07 | 高转矩紧固件有限公司 | Fastener and screw means therefor |
| CN1352734A (en) * | 1999-06-22 | 2002-06-05 | 永久技术股份有限公司 | Locking nut, bolt and clip systems and assembles |
| WO2004010463A2 (en) * | 2002-07-23 | 2004-01-29 | Advanced Technology Materials, Inc. | Vaporizer delivery ampoule |
| US20110214461A1 (en) * | 2010-03-04 | 2011-09-08 | Camisasca Automotive Manufacturing, Inc. | Anti-theft threaded cap |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201739665A (en) | 2017-11-16 |
| TWI683769B (en) | 2020-02-01 |
| CN109153480B (en) | 2021-04-27 |
| US11136169B2 (en) | 2021-10-05 |
| JP6946340B2 (en) | 2021-10-06 |
| US20190084733A1 (en) | 2019-03-21 |
| KR20180129947A (en) | 2018-12-05 |
| JP2019513646A (en) | 2019-05-30 |
| WO2017184368A1 (en) | 2017-10-26 |
| KR102207307B1 (en) | 2021-01-22 |
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