CN109079321A - A kind of gas nozzle and air blowing method suitable for the laser processing of big aspect ratio hole - Google Patents
A kind of gas nozzle and air blowing method suitable for the laser processing of big aspect ratio hole Download PDFInfo
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- CN109079321A CN109079321A CN201811130750.5A CN201811130750A CN109079321A CN 109079321 A CN109079321 A CN 109079321A CN 201811130750 A CN201811130750 A CN 201811130750A CN 109079321 A CN109079321 A CN 109079321A
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- 238000007664 blowing Methods 0.000 title claims abstract description 32
- 238000000034 method Methods 0.000 title claims abstract description 22
- 239000005357 flat glass Substances 0.000 claims abstract description 23
- 238000003754 machining Methods 0.000 claims description 12
- 230000008602 contraction Effects 0.000 claims description 10
- 239000007921 spray Substances 0.000 claims description 2
- 238000009825 accumulation Methods 0.000 abstract description 4
- 238000003756 stirring Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 85
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 239000011148 porous material Substances 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 239000002893 slag Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
- B23K26/1462—Nozzles; Features related to nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The invention belongs to field of laser processing, providing a kind of gas nozzle suitable for the laser processing of big aspect ratio hole and air blowing method, the gas nozzle includes: gas nozzle main body, small depth Blow off module, middle depth Blow off module and big depth Blow off module.Gas nozzle main body is hollow taper structure；Small depth Blow off module is installed on gas nozzle lower body part, carries out air blowing deslagging for the micropore to small aspect ratio；Big depth Blow off module includes plate glass, third air inlet, third solenoid valve, air blowing deslagging is carried out with the micropore to big aspect ratio, and then according to the variation of aspect ratio during capillary processing, it is blown using suitable Blow off module, it stirs residue inside micropore by sufficient air-flow, and there is the channel discharged, guarantee the smooth discharge of residue, reduce accumulation of heat, improves processing efficiency and quality.
Description
Technical field
The invention belongs to technical field of laser processing, more particularly to suitable for big aspect ratio hole laser processing gas nozzle and blow
Gas method.
Background technique
In the parts such as aeroengine combustor liner, blade, purpose is cooled down based on ventilating, there is a large amount of micropores on part
Process requirements generally use rotary-cut scanning laser processing unit (plant) at present to realize capillary processing, which mainly passes through rotation light
Beam forms helical scanning to realize the material removal in specified region, has the advantages that processing taper is controllable, machining accuracy is high.
However using which when the micropore to some big aspect ratios is processed, processing efficiency is difficult to meet index
It is required that and micropore deep place be easy to appear big re cast layer.To find out its cause, the working ability deficiency is blown with big aspect ratio micropore
There are much relations for gas deslagging effect, generally use the mode coaxially blown at present and carry out deslagging, in such a mode, micropore
Bore is smaller, generally φ 0.5-1mm or so, and gas nozzle be usually simple tapers structure design, by guarantee processing hole depth
Degree and gas nozzle mouth be not light-blocking, and exit caliber design size is typically larger than processed micro-pore diameter, therefore air-flow often " is pressed "
Above micropore, especially working depth increase when, it is difficult to micropore bottom formed flow perturbation so that in hole molten melt drop and
Plasma can not quickly be discharged, and these removers hinder laser and continue to propagate downwards, and by absorbing laser energy, make
Low so as to cause processing efficiency at accumulation of heat, ablation and serious re cast layer, processing quality and processing taper are deteriorated.
Summary of the invention
The purpose of the present invention is to provide the gas nozzles and air blowing method that are suitable for the laser processing of big aspect ratio hole, it is intended to solve
It can not effectively be arranged when to big aspect ratio capillary processing due to being suitable for the gas nozzle of laser processing and air blowing method in the prior art
The technical issues of slag.
In a first aspect, the present invention provides a kind of gas nozzles suitable for the laser processing of big aspect ratio hole, comprising:
Gas nozzle main body, the gas nozzle main body are hollow taper structure；
Small depth Blow off module, the small depth Blow off module are installed on the gas nozzle lower body part, for small deep diameter
The micropore of ratio carries out air blowing deslagging；
Big depth Blow off module, the big depth Blow off module include plate glass, third air inlet, third solenoid valve,
The plate glass is placed in the gas nozzle body interior, and the plate glass is provided centrally with microchannel using as inside
Gas outlet, the third air inlet are located on the barrel of the gas nozzle main body, and big depth described in the third solenoid valve control is blown
The air pressure of gas module carries out air blowing deslagging with the micropore to big aspect ratio.
Second aspect, the present invention also provides a kind of air blowing methods of gas nozzle as described in relation to the first aspect, comprising:
In laser processing procedure, different Blow off module is selected according to the variation of the aspect ratio in actual processing hole；
When the aspect ratio in actual processing hole is less than 4:1, the first solenoid valve is opened, using small depth Blow off module to processing
It blows in region；
When the aspect ratio of processing reaches 3:1 to 7:1, closes the first solenoid valve and open second solenoid valve, it is deep in use
Degree Blow off module blows to machining area；
When the aspect ratio in actual processing hole reaches greater than 6:1, closes second solenoid valve and open third solenoid valve, use
Big depth Blow off module blows to machining area, causes air flow through the upper lumen of the gas nozzle main body and by big depth
The gas outlet of Blow off module sprays.
The gas nozzle that the present invention is suitable for the laser processing of big aspect ratio hole includes gas nozzle main body, small depth Blow off module and big depth
Blow off module is spent, gas nozzle main body is hollow taper structure, and small depth Blow off module is installed on gas nozzle lower body part, for small depth
The micropore of diameter ratio carries out air blowing deslagging；Big depth Blow off module includes plate glass, third air inlet, third solenoid valve, plate
Glass is placed in gas nozzle body interior, and plate glass is provided centrally with microchannel using as internal air exhaust ports, third air inlet
Mouth is located on the barrel of the gas nozzle main body, the air pressure of big depth Blow off module described in third solenoid valve control, to big deep diameter
The micropore of ratio carries out air blowing deslagging；And then according to the aspect ratio of processing, blown using suitable Blow off module, so as to
Residue is stirred by sufficient air-flow inside micropore, while having the channel discharged, guarantees the smooth discharge of residue, is reduced
Heat accumulation, it is final to realize the purpose for improving processing efficiency and quality.
Detailed description of the invention
Fig. 1 shows the structural representation of the gas nozzle for being suitable for the laser processing of big aspect ratio hole of the offer of the embodiment of the present invention one
Figure；
Fig. 2 is the air-flow microchannel structure schematic diagram of optimization；
Fig. 3 shows the air blowing method flow provided by Embodiment 2 of the present invention suitable for the laser processing of big aspect ratio hole
Figure；
Fig. 4 shows the air blowing schematic diagram of the first stage processing when carrying out big aspect ratio hole and laser machining；
Fig. 5 shows the air blowing schematic diagram of the second stage processing when carrying out big aspect ratio hole and laser machining；
Fig. 6 shows the air blowing schematic diagram of the phase III processing when carrying out big aspect ratio hole and laser machining.
Description of symbols:
Depth Blow off module in the small depth Blow off module of 1- gas nozzle main body, 2-, 3-, the big depth Blow off module of 4-, 5- laser,
The outlet of 6- gas nozzle, the first air inlet of 71-, 73- third air inlet, the first solenoid valve of 81-, 82- second solenoid valve, 83- third electricity
Magnet valve, 9- air-flow microchannel, the gas outlet of 10- air-flow microchannel, the air inlet of 11- air-flow microchannel, 12- air-flow microchannel are received
Aperture, 13- microchannel, the 14- plate glass of contracting.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
Specific implementation of the invention is described in detail below in conjunction with specific embodiment:
Embodiment one:
Fig. 1 shows the structural representation of the gas nozzle for being suitable for the laser processing of big aspect ratio hole of the offer of the embodiment of the present invention one
Figure, for ease of description, only parts related to embodiments of the present invention are shown, and details are as follows:
The gas nozzle for being suitable for the laser processing of big aspect ratio hole shown in the embodiment of the present invention includes gas nozzle main body 1, small depth
Blow off module 2, middle depth Blow off module 3 and big depth Blow off module 4.
By the way that the single gas nozzle of common gas nozzle to be improved to have three kinds of different Blow off module, i.e., small depth Blow off module
2, middle depth Blow off module 3, big depth Blow off module 4, to adapt to air blowing when aspect ratio changes in process respectively, thus
Flexibility when gas nozzle is applicable in the laser processing of big aspect ratio hole is greatly improved, makes to be changed according to the aspect ratio of processing, using suitable
Blow off module blow, so as to stir residue inside micropore by sufficient air-flow, while having to outlet
Channel out guarantees the smooth discharge of residue, reduces accumulation of heat, final to realize the purpose for improving processing efficiency and quality.
Gas nozzle main body 1 is hollow taper structure, and carrying is suitable for the Blow off module of different working depths above, and laser is in gas
Mouth body interior carries out rotary-cut campaign, and is pierced by from center.
Small depth Blow off module 2 is located at 1 lower part of gas nozzle main body, and air-flow conveying outlet is the gas nozzle outlet 6 of gas nozzle main body；
Middle depth Blow off module 3 is installed on the middle part of gas nozzle main body 1, and air-flow microchannel can be installed in the mounting groove of wall inner portion
Or may be mounted on the outside of barrel, middle depth Blow off module 3 oblique into processing micropore can be blown into fine air-flow, and can lead to
The sequential control for crossing multiple air-flow microchannels solenoid valve makes to form disturbance in micropore, in order to deslagging and heat dissipation；Big depth is blown
Module 5 includes the plate glass that 1 center of inside of gas nozzle main body is arranged in, and is entered in gas nozzle main body 1 via big depth Blow off module 5
Air-flow, blown by the machining area in 13 device to hole of microchannel that is opened up in plate glass 14.
Small depth Blow off module 2 is installed on the lower part of the gas nozzle main body 1, for the micropore for being in the small aspect ratio stage
Carry out air blowing deslagging.Small depth Blow off module 2 includes that gas nozzle exports the 6, first air inlet 71, connection tracheae and control pressure switch
The first solenoid valve 81, the first air inlet 71 is set to 1 lower part of gas nozzle main body, and connection tracheae is by the first air inlet 71 and gas source
(not shown) is connected, and the first solenoid valve 81, which is set between the first air inlet 71 and gas source, connects endotracheal gas for controlling
Body pressure and flow.The diameter of gas nozzle outlet 6 scans size according to light beam, tilt angle determines, usually 0.8-2mm.It is preferred that
, the diameter of gas nozzle outlet 6 is 1.5mm.
Middle depth Blow off module 3 is installed on the middle part of the gas nozzle main body 1, for the micropore to the aspect ratio stage in entrance
Carry out air blowing deslagging.Middle depth Blow off module 2 includes air-flow microchannel 9, connection tracheae and second solenoid valve 82, second electricity
Magnet valve 82 is used to control air pressure and the flow of the air-flow microchannel 9.The quantity of air-flow microchannel 9 is 3 or more, and air-flow is micro-
Channel 9 can be evenly distributed in the mounting groove of 1 barrel of gas nozzle main body or be distributed on the outside of the barrel of gas nozzle main body 1.Air-flow
The horizontal position of the gas outlet 10 of microchannel 9 flushes with the bottom end face of gas nozzle main body 1 or slightly beyond air-flow microchannel 9
Air inlet 11 is connected by connecting tracheae with gas source (not shown), and second solenoid valve 82 is set between connection tracheae and gas source.
The tilt angle of air-flow microchannel 9 is 0.04rad-0.08rad, and is directed toward gas nozzle central axis, and outlet diameter can be
0.3-0.8mm.Preferably, the tilt angle of air-flow microchannel 9 is 0.062rad.
A kind of more preferably structure type can be used in air-flow microchannel 9, and Fig. 2 is the air-flow microchannel structure schematic diagram of optimization,
As shown in Fig. 2, the entrance (including air inlet 11) and outlet section (including gas outlet 10) of air-flow microchannel 9 they are cylindrical hole,
The interlude of the air-flow microchannel gradually tapers up into aperture 12, i.e., is formed in the middle section region of air-flow microchannel 9 opposite
Lug boss forms contraction flow region in entrance and forms wide diameter portion, the length and the diameter phase of aperture of aperture 12 in outlet section
Deng the length of contraction flow region is preferably equal to the cosine value of contraction section semi-cone angle multiplied by 9 inlet radius of air-flow microchannel and aperture radius
Difference, the length of wide diameter portion is preferably equal to the cosine value of contraction section semi-cone angle multiplied by 9 inlet radius of air-flow microchannel and aperture half
The difference of diameter, wherein the semi-cone angle of contraction flow region is preferably 20 °~30 °, and the semi-cone angle of wide diameter portion is preferably 5 °~10 °.In use
When depth Blow off module 3 is blown, air-flow is converged after narrow aperture 12, and flow velocity can sharply increase, and form the micro- of high speed
Thin air-flow reinforces the ability that air-flow takes residue out of so as to allow the flow to go deep into processing bottom section.
Big depth Blow off module 4 is for carrying out air blowing deslagging to the micropore for entering the big aspect ratio stage.Big depth air blowing mould
Block 4 includes plate glass 14, third air inlet 73, third solenoid valve 83.Plate glass 14 can be with bonding or the side of buckle
Formula is placed in 1 lower part of gas nozzle main body, is provided centrally with microchannel 13, and the mounting height of plate glass 14 is arranged so as to revolve
The light beam for cutting scanning will not be by microchannel 13.The third air inlet 73 is located on the barrel of the gas nozzle main body 1, described
Third solenoid valve 83 controls the air pressure of the big depth Blow off module 4.
During the capillary processing of big aspect ratio, plate glass 14 thick about 0.3-1mm, micro-pore diameter 0.2-0.6mm,
Its vertical range for fixing positional distance gas nozzle outlet 6 can be 3-8mm, be used for different depths to form two inside gas nozzle
The Blow off module of degree, and laser can be penetrated directly from plate glass 14 at this time, and will not be passed through from the microchannel of plate glass 14
It crosses, therefore does not influence optic path.
Preferably, the diameter of microchannel 13 is 0.3mm, 14 center of plate glass inside gas nozzle main body 1.Plate
Glass 14 fixes the vertical range 5mm of positional distance gas nozzle outlet 6 with a thickness of 0.6mm.
Embodiment two:
Fig. 3 shows the air blowing method flow provided by Embodiment 2 of the present invention suitable for the laser processing of big aspect ratio hole
Figure, for ease of description, only parts related to embodiments of the present invention are shown, including:
Step 31, in laser processing procedure, different air blowings is selected according to the aspect ratio changes phase in actual processing hole
Module.
Step 32, when the aspect ratio in actual processing hole is less than 4:1, the first solenoid valve is opened, the small depth of gas nozzle is used
Blow off module blows to machining area；
Step 33, it when the aspect ratio in actual processing hole reaches 3:1 to the section 7:1, closes the first solenoid valve and opens the
Two solenoid valves, depth Blow off module blows to machining area in use；
Step 34, when aspect ratio reaches greater than 6:1, big depth Blow off module is switched to, uses big depth Blow off module
It blows, cause air flow through the upper lumen of the gas nozzle main body and is sprayed by the gas outlet of big depth Blow off module.
According to the variation for processing aspect ratio in process, it is divided into three phases and carries out various forms of air blowing rows respectively
Slag.
First stage is blown when aspect ratio is less than 4:1 using small depth Blow off module, and gas source is that Ordinary Compression is empty
Gas, air pressure size 0.3-0.6MPa, although flow diameter is greater than micro-pore diameter, because depth is small, air-flow reaches micropore bottom,
And vortex disturbance is formed, quickly drive outside residue to hole and is drained.
Second stage, when aspect ratio is 3:1 to 7:1, since aspect ratio is larger, distance is discharged upwards and becomes larger for bottom hole residue,
And causes residue discharge difficult also by the compacting of upper air in aperture, close small depth Blow off module, depth in unlatching at this time
Spend Blow off module.
At this stage in process, each solenoid valve that can control middle depth Blow off module is successively closed and is opened, and is made
It obtains gas successively to project from each air-flow microchannel, it is preferable that the sequence switch direction of each solenoid valve and the rotary-cut of light beam scan
It is contrary.Since channel diameter is less than micro-pore diameter, air-flow oblique can be blown into inside micropore, while rotation is formed in hole
Transhipment is dynamic to reinforce flow perturbation effect, drives residue discharge.The gas source in this stage can use argon gas or oxygen, and air pressure can
Think 0.4-0.6MPa.Argon gas relative molecular mass is 40, is greater than air relative molecular mass 29, can enhance the gas under small flow
Body agitation capability；When having the active elements such as high level carbon, iron in workpiece material, may be selected to carry out using oxygen at this time auxiliary
Air blowing deslagging is helped, residue char is facilitated or is oxidized to the molten drop of smaller volume, to be easier to be entrained by the flow of air.
Phase III, when it is 6:1 that aspect ratio, which is greater than, the air-flow of middle depth Blow off module is gradually stopped by hole wall, nothing
Method is blown into bottom hole, and depth Blow off module in closing, opens big depth Blow off module at this time.
By opening third solenoid valve, so that air-flow is sprayed by upper lumen and by microchannel in plate glass,
Its diameter is less than micro-pore diameter, so that air-flow can directly blow to micropore, and reserves deslagging space to take away residue.Gas source
Argon gas or oxygen can be used, air pressure can be 0.4-0.6MPa.
Optionally, when using rotary-cut scanning means processing diameter for 0.8mm micropore, material thickness 8mm is suitable for rotation
The air blowing method of scanning type laser processing is cut by according to the difference of working depth or aspect ratio, is divided into three phases and carries out respectively not
With the air blowing deslagging of form.
First stage, when working depth is less than 3mm, as shown in figure 4, being blown at this time using small depth Blow off module 2
Gas, gas source are Ordinary Compression air, and air pressure size 0.4MPa, flow diameter is 1.5mm at this time, is greater than micro-pore diameter, but because of depth
Spend small, air-flow reaches micropore bottom, and forms vortex disturbance, quickly drives outside residue to hole and drains.
Second stage, when working depth is 3-6mm, as shown in figure 5, bottom hole residue is arranged upwards since aspect ratio is larger
Distance becomes larger out, and causes residue discharge difficult also by the compacting of upper air in aperture, close small depth air blowing mould at this time
Block 2, depth Blow off module 3 in unlatching.
Gas is successively projected from air-flow microchannel, and since channel diameter is less than micro-pore diameter, air-flow is oblique to be blown into
It inside micropore, while controlling solenoid valve and successively closing and open, so that rotation disturbance is formed in hole, so that residue be driven to arrange
Out.Gas source uses argon gas, air pressure 0.4MPa.
Phase III, when working depth is 6-8mm, with the increase of working depth, the air-flow of middle depth Blow off module
Stopped by hole wall, bottom hole can not be blown into, depth Blow off module in closing as shown in Figure 6, opens big depth Blow off module at this time
4, using which until micropore is punched.
By opens solenoid valve, so that air-flow is sprayed by upper lumen and by plate glass center stomata, air-flow is straight
It connects and is blown into micropore, to take away residue.Gas source uses argon gas, air pressure 0.5MPa.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. a kind of gas nozzle suitable for the laser processing of big aspect ratio hole, which is characterized in that the gas nozzle includes:
Gas nozzle main body, the gas nozzle main body are hollow taper structure；
Small depth Blow off module, the small depth Blow off module is set to the gas nozzle lower body part, for small aspect ratio
Micropore carries out air blowing deslagging；
Big depth Blow off module, the big depth Blow off module include plate glass, third air inlet, third solenoid valve, described
Plate glass is placed in the gas nozzle lower body part, and the plate glass is provided centrally with microchannel using as internal outlet
Mouthful, the third air inlet is located on the barrel of the gas nozzle main body, big depth air blowing mould described in the third solenoid valve control
The air pressure of block carries out air blowing deslagging with the micropore to big aspect ratio.
2. gas nozzle as described in claim 1, which is characterized in that the gas nozzle further includes the middle depth Blow off module, described
Middle depth Blow off module includes air-flow microchannel, connection tracheae and second solenoid valve, the air-flow microchannel and the connection gas
Pipe is connected, and the second solenoid valve is used to control the air pressure for flowing into air-flow microchannel gas and flow；The small depth is blown
Gas module includes that gas nozzle outlet, the first air inlet and the first solenoid valve, first air inlet are set under the gas nozzle main body
Portion, first solenoid valve are set between the first air inlet and gas source, for controlling the gas for flowing into first air inlet
Flow.
3. gas nozzle as claimed in claim 2, which is characterized in that the quantity of the air-flow microchannel is at least 3, the air-flow
Microchannel is evenly distributed in the mounting groove of the barrel of the gas nozzle main body or is distributed on the outside of the barrel of the gas nozzle main body.
4. gas nozzle as claimed in claim 3, which is characterized in that the air-flow microchannel is evenly distributed on the gas nozzle main body cylinder
In wall, tilt angle 0.04rad-0.08rad, and it is directed toward gas nozzle central axis, outlet diameter is 0.3 millimeter -0.8 millimeter；
The entrance and outlet section of the air-flow microchannel are cylindrical hole, are gradually tapered up into the middle section region of the air-flow microchannel small
The length in hole, the aperture is equal with diameter, forms contraction flow region in entrance and forms wide diameter portion in outlet section.
5. gas nozzle as claimed in claim 4, which is characterized in that the length of the contraction flow region is equal to contraction section half cone cosine of an angle
Value is equal to the remaining of contraction section semi-cone angle multiplied by the inlet radius of the air-flow microchannel and the difference of aperture radius, the length of wide diameter portion
String value is multiplied by the inlet radius of the air-flow microchannel and the difference of aperture radius.
6. gas nozzle as claimed in claim 5, which is characterized in that the semi-cone angle of the contraction flow region is set as 20 degree to 30 degree, expands
The semi-cone angle in diameter portion is set as 5 degree~10 degree.
7. gas nozzle as claimed in claim 2, which is characterized in that the air-flow gas outlet of the air-flow microchannel is located at the gas nozzle
The bottom end face of main body, the air inlet of the air-flow microchannel receive the inflow of gas by the connection tracheae.
8. gas nozzle as described in claim 1, which is characterized in that the plate glass of the big depth Blow off module to bond or
The mode of buckle is placed in the gas nozzle body interior, and the mounting height of the plate glass is arranged so that the light of rotary-cut scanning
Shu Buhui passes through the microchannel.
9. a kind of air blowing method of such as gas nozzle of any of claims 1-8, which is characterized in that the described method includes:
In laser processing procedure, different Blow off module is selected according to the variation of the aspect ratio in actual processing hole；
When the aspect ratio in actual processing hole is less than 4:1, the first solenoid valve is opened, using small depth Blow off module to machining area
It blows；
When the aspect ratio of processing reaches 3:1 to 7:1, closes the first solenoid valve and open second solenoid valve, depth is blown in use
Gas module blows to machining area；
When the aspect ratio in actual processing hole reaches greater than 6:1, closes second solenoid valve and open third solenoid valve, use big depth
Degree Blow off module blows to machining area, causes air flow through the upper lumen of the gas nozzle main body and is blown by big depth
The gas outlet of module sprays.
10. method as claimed in claim 9, which is characterized in that when the aspect ratio of processing reaches 3:1 to 7:1, described in control
The air-flow of depth Blow off module is sprayed in the second solenoid valve control of air-flow microchannel with the direction opposite with beam motion.
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| CN201811130750.5A CN109079321A (en) | 2018-09-27 | 2018-09-27 | A kind of gas nozzle and air blowing method suitable for the laser processing of big aspect ratio hole |
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| CN201811130750.5A CN109079321A (en) | 2018-09-27 | 2018-09-27 | A kind of gas nozzle and air blowing method suitable for the laser processing of big aspect ratio hole |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111716023A (en) * | 2020-06-24 | 2020-09-29 | 中国科学院西安光学精密机械研究所 | Machining device and machining method for high depth-diameter ratio micropores |
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| CN111716023B (en) * | 2020-06-24 | 2021-12-21 | 中国科学院西安光学精密机械研究所 | Machining device and machining method for high depth-diameter ratio micropores |
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