CN109065671A - Technical papers generation method, process control system, control device and storage medium - Google Patents

Technical papers generation method, process control system, control device and storage medium Download PDF

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Publication number
CN109065671A
CN109065671A CN201810907584.9A CN201810907584A CN109065671A CN 109065671 A CN109065671 A CN 109065671A CN 201810907584 A CN201810907584 A CN 201810907584A CN 109065671 A CN109065671 A CN 109065671A
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reference process
process equipment
file
equipment
configuration parameters
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杨斌
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Beijing Juntai Innovation Technology Co Ltd
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Beijing Juntai Innovation Technology Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Programmable Controllers (AREA)

Abstract

This application discloses a kind of technical papers generation method, process control system, control devices, storage medium, it include: that the control device of non-referenced process equipment obtains the basic process file of a basic process equipment, basic process file includes the configuration parameter of basic process equipment；The control device of non-referenced process equipment determines the configuration parameter of non-referenced process equipment according to the configuration parameter in the Process configuration and basic process file of non-referenced process equipment, generate the technical papers of non-referenced process equipment, the Process configuration of non-referenced process equipment includes the different information between the configuration parameter of non-referenced process equipment and the configuration parameter of basic process equipment, and the technical papers of non-referenced process equipment include the configuration parameter of non-referenced process equipment.The application automatically generates the technical papers of the non-referenced process equipment by each process equipment and the different information of the configuration parameter of basic process equipment, improves efficiency and reliability that each process equipment generates technical papers.

Description

Process file generation method, process control system, control device and storage medium
Technical Field
The invention relates to the technical field of photovoltaic cell preparation, in particular to a process file generation method, a process control system, a control device and a storage medium.
Background
In a photovoltaic cell production line, core process equipment for executing an off-line process recipe includes Chemical Vapor Deposition (CVD) equipment, Physical Vapor Deposition (PVD) equipment, and the like. In order to protect the data security of the core equipment process and manage the process data more conveniently and safely, the core process equipment of the photovoltaic cell production line adopts an off-line writing process and encryption, and then the process is executed in a way of decryption and operation on an equipment machine. As shown in fig. 1, a developer writes a process using process editor software on a development computer, generates an encrypted process file, and transmits the encrypted process file to an equipment computer; and a process decoder on the equipment computer analyzes the process file and imports equipment software to execute the process.
In the above manner, because the hardware of each process equipment is slightly different, the result of the standard process executed on each equipment is also slightly different. As shown in fig. 2, in order to achieve the optimal process result, a process file needs to be generated for each process equipment, and the content of each process file is slightly different. When the capacity is increased to increase the process equipment or the process is modified or upgraded, a lot of time is also needed to regenerate the process file for each process equipment. Thus, a great amount of time is required for the research and development personnel to write a process for each device and perform a test, and errors are easily generated in the execution process.
Similar problems exist for the generation of process files for other process equipment on the production line.
Disclosure of Invention
In order to solve the above technical problems, embodiments of the present invention provide a process file generation method, a process control system, a control device, and a storage medium, which can improve the efficiency of executing an offline process recipe by a process device.
In order to achieve the purpose of the invention, the technical scheme of the embodiment of the invention is realized as follows:
the embodiment of the invention provides a process file generation method, which comprises the following steps: the method comprises the steps that a control device of non-reference process equipment obtains a reference process file of reference process equipment, wherein the reference process file comprises configuration parameters of the reference process equipment; the control device of the non-reference process equipment determines the configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment and the configuration parameters in the reference process file, and generates the process file of the non-reference process equipment, wherein the process configuration of the non-reference process equipment comprises difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment comprises the configuration parameters of the non-reference process equipment.
The embodiment of the invention also provides a process file generation method, which comprises the following steps: the method comprises the steps that a control device of non-reference process equipment acquires a process file and a process configuration saved on the control device of non-reference process equipment to be detected, wherein the process file of the non-reference process equipment to be detected comprises configuration parameters of the non-reference process equipment to be detected, and the process configuration of the non-reference process equipment to be detected comprises difference information between the configuration parameters of the non-reference process equipment to be detected and the configuration parameters of reference process equipment; the control device of the non-reference process equipment determines configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment to be detected, the process configuration of the non-reference process equipment and configuration parameters in the process file of the non-reference process equipment to be detected, and generates the process file of the non-reference process equipment, wherein the process configuration of the non-reference process equipment comprises difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment comprises the configuration parameters of the non-reference process equipment.
An embodiment of the present invention further provides a storage medium, where one or more programs are stored on the storage medium, and the one or more programs may be executed by one or more processors to implement the steps of the process file generation method as described above:
the embodiment of the invention also provides a control device of non-reference process equipment, which comprises a processor and a memory, wherein the processor is used for executing the process file generation program stored in the memory so as to realize the steps of the process file generation method.
The embodiment of the invention also provides a control device of non-reference process equipment, which comprises a first reference parameter acquisition unit and a first non-reference parameter generation unit, wherein: the system comprises a first reference parameter acquisition unit, a second reference parameter acquisition unit and a third reference parameter acquisition unit, wherein the first reference parameter acquisition unit is used for acquiring a reference process file of reference process equipment, and the reference process file comprises configuration parameters of the reference process equipment; the first non-reference parameter generating unit is configured to determine configuration parameters of the non-reference process equipment according to a process configuration of the non-reference process equipment and the configuration parameters in the reference process file, and generate a process file of the non-reference process equipment, where the process configuration of the non-reference process equipment includes difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment includes the configuration parameters of the non-reference process equipment.
The embodiment of the invention also provides a control device of non-reference process equipment, which comprises a second reference parameter acquisition unit and a second non-reference parameter generation unit, wherein: the second reference parameter acquiring unit is used for acquiring a process file and a process configuration saved on a control device of non-reference process equipment to be detected, wherein the process file of the non-reference process equipment to be detected comprises configuration parameters of the non-reference process equipment to be detected, and the process configuration of the non-reference process equipment to be detected comprises difference information between the configuration parameters of the non-reference process equipment to be detected and the configuration parameters of reference process equipment; the second non-reference parameter generating unit is configured to determine configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment to be detected, the process configuration of the non-reference process equipment and configuration parameters in the process file of the non-reference process equipment to be detected, and generate the process file of the non-reference process equipment, where the process configuration of the non-reference process equipment includes difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment includes the configuration parameters of the non-reference process equipment.
The embodiment of the invention also provides a process control system, which comprises a process editor, a control device of reference process equipment and at least one control device of non-reference process equipment, wherein: the process editor is used for writing and generating a reference process file according to reference process equipment in an off-line manner, encrypting the reference process file and then sending the encrypted reference process file to the control device of the reference process equipment and the control device of non-reference process equipment, wherein the reference process file comprises configuration parameters of the reference process equipment; the control device of the reference process equipment is used for decrypting to obtain the reference process file and executing the process according to the reference process file; the control device of the non-reference process equipment is used for decrypting to obtain the reference process file, determining the configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment and the configuration parameters in the reference process file, generating the process file of the non-reference process equipment and executing the process according to the generated process file, wherein the process configuration of the non-reference process equipment comprises the difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment comprises the configuration parameters of the non-reference process equipment.
The technical scheme of the embodiment of the invention has the following beneficial effects:
the process file generation method, the process control system, the control device and the storage medium provided by the embodiment of the invention only need to generate one reference process file for the selected reference process equipment, and automatically generate the process files suitable for the non-reference process equipment for other non-reference process equipment through the process configuration of the non-reference process equipment. When the capacity is expanded and the process equipment is increased or the process is modified and upgraded, the process file does not need to be rewritten and the test does not need to be executed for the non-reference process equipment, so that the efficiency and the reliability of generating the process file by each process equipment are greatly improved, and the efficiency of upgrading the process and improving the process is improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is a schematic diagram of a process file generation and usage method of a process equipment in the related art;
FIG. 2 is a schematic diagram of a process file generation and usage method for a plurality of process apparatuses in the related art;
FIG. 3 is a schematic flow chart illustrating a process file generation method according to a first embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a control device of a non-reference processing apparatus according to a first embodiment of the present invention;
fig. 5 is a schematic structural diagram of a control device of non-reference process equipment to be tested according to a first embodiment of the present invention;
FIG. 6 is a schematic flow chart illustrating a process file generation method according to a third embodiment of the present invention;
FIG. 7 is a schematic structural diagram of a control device of a non-reference processing apparatus according to a third embodiment of the present invention;
FIG. 8 is a schematic structural diagram of a process control system according to a fourth embodiment of the present invention;
fig. 9 is a schematic structural diagram of a process control system to be tested according to a fourth embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be noted that the embodiments and features of the embodiments in the present application may be arbitrarily combined with each other without conflict.
Example one
As shown in fig. 3, a method for generating a process file according to an embodiment of the present invention includes:
step 301: the method comprises the steps that a control device of non-reference process equipment obtains a reference process file of reference process equipment, wherein the reference process file comprises configuration parameters of the reference process equipment;
in this embodiment, one process apparatus with the best process execution effect may be selected as the reference process apparatus, and the other process apparatuses may be selected as the non-reference process apparatuses, but it should be noted that the method of selecting the reference process apparatus in the present invention is not limited thereto, for example, any one process apparatus may be selected as the reference process apparatus, and the other process apparatuses may be selected as the non-reference process apparatuses. The non-reference processing tool may be a Chemical Vapor Deposition tool or a physical Vapor Deposition tool, and the reference processing tool may be a Chemical Vapor Deposition tool or a physical Vapor Deposition tool, such as a Plasma Enhanced Chemical Vapor Deposition (PECVD) tool on a photovoltaic production line. The control device may be a device computer or a device platform, and the control device may be embedded inside the process device, or may be disposed outside the process device.
In this embodiment, the obtaining, by the control device of the non-reference process equipment, a reference process file of reference process equipment includes:
receiving a reference process file issued by a process editor; or,
receiving an encrypted file which is sent by a process editor and obtained by encrypting the reference process file, and decrypting the encrypted file to obtain the reference process file;
wherein the reference process file is an off-line process file written by the process editor according to the reference process equipment.
It should be noted that the Encryption Algorithm used by the encrypted file includes information-Digest Algorithm 5(Message-Digest Algorithm 5, MD5), Advanced Encryption Standard (AES), and other Encryption algorithms. The reference process file of the reference process equipment can be issued to the control device of the non-reference process equipment by using the existing network communication protocol.
In this embodiment, the configuration parameter includes a configuration value of at least one of the following parameters: gas flow, process pressure, power supply, process temperature, process time.
Step 302: the control device of the non-reference process equipment determines the configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment and the configuration parameters in the reference process file, and generates the process file of the non-reference process equipment, wherein the process configuration of the non-reference process equipment comprises difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment comprises the configuration parameters of the non-reference process equipment.
In this embodiment, after the control device of the non-reference process equipment generates the process file of the non-reference process equipment, the generated process file is saved.
In this embodiment, the difference information is an offset, and the offset is represented by a relative difference or an offset percentage.
It should be noted that the difference between the configuration parameters of each non-reference process tool and the reference process tool can be configured by a relative difference or a percentage offset. The specific values of the relative difference or the percentage of the deviation are obtained by the test of the technicians. The inventor of the present invention finds that when the process of the process equipment changes, the offset between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment is basically kept unchanged, so that when the reference process file changes, the process file of the non-reference process equipment can be generated according to the process file of the reference process equipment and the process configuration of the non-reference process equipment.
In one example of this embodiment, a complete reference process file or non-reference process file contains the following data: in an example, the selective configurations of the respective pieces of equipment are substantially the same, and the process files of each piece of process equipment are different in values of the gas flow, the process pressure, the power supply power, the process temperature and the process time, so that the process configuration is mainly performed with respect to the five parameters of the process files. However, in other examples of the present application, the selective configuration may also have a difference, and the difference information of the selective configuration is further included in the process configuration, for example, the selective configuration of the non-reference process equipment is listed in the process configuration and is different from the reference process equipment, and the selective configuration of the non-reference process equipment is ignored.
In this embodiment, the process configuration of the non-reference process equipment may configure the difference between the configuration parameters of each non-reference process equipment and the configuration parameters of the reference process equipment by using a relative difference value or an offset percentage. The specific values of the relative difference or the percentage of deviation are obtained by process personnel testing and then configured in the control device of the non-reference process equipment, wherein the process configuration of an exemplary non-reference process equipment is shown in table 1 below:
relative differenceValue of Percent offset (%)
Flow rate of gas 1 2
Flow rate of gas 2 -5
Flow rate of gas 3 3
4 flow of gas 10
5 flow of gas -25
6 flow of gas 0
Flow rate of gas 7 2
Flow rate of gas 8 0
Process pressure -5
Power of power supply 5
Temperature of the process 3
Time of the process 3
TABLE 1
Assuming in this example that the reference process file for the reference process tool is obtained as shown in table 2 below, where the relevant selectively configured parts have been omitted, sccm is a volume flow unit representing Standard milliliter Per Minute (Standard cubic center meter Per Minute):
TABLE 2
In this case, the control device of the non-reference process equipment calculates the configuration parameters of the non-reference process equipment according to table 1 and table 2 as follows:
gas 1 flow rate 50+2 52 (sccm);
gas 2 flow rate 45-5-40 (sccm);
gas 3 flow rate 30+3 33 (sccm);
gas 4 flow rate 10+ 10-20 (sccm);
gas 5 flow 80-25-55 (sccm);
the gas 6 flow rate is 0+0 is 0 (sccm);
gas 7 flow rate 20+2 22 (sccm);
the gas 8 flow rate is 0+0 is 0 (sccm);
process pressure 105 x (1-5%) -99.75 (Pa)
Power supply 25 × 25 (1+ 5%) -26.25 (kW)
Process temperature 600 x (1+ 3%) -618 (deg.c)
The processing time is 10 x (1+ 3%) -10.3 (min)
Thus, the process files for the non-reference process tool generated by the control means for the non-reference process tool are shown in table 3 (where the relevant selectively configurable parts have been omitted):
configuring parameters
Flow rate of gas 1 52sccm
Flow rate of gas 2 40sccm
Flow rate of gas 3 33sccm
4 flow of gas 20sccm
5 flow of gas 55sccm
6 flow of gas 0
Flow rate of gas 7 22sccm
Flow rate of gas 8 0
Process pressure 99.75Pa
Power of power supply 26.25kW
Temperature of the process 618℃
Time of the process 10.3min
TABLE 3
Embodiments of the present invention also provide a storage medium, on which one or more programs are stored, where the one or more programs are executable by one or more processors to implement the steps of the process file generation method as described in any one of the above.
As shown in fig. 4, an embodiment of the present invention further provides a control device for non-reference process equipment, which includes a processor 40 and a memory 41, where the processor 40 is configured to execute a process file generation program stored in the memory 41 to implement the steps of the process file generation method according to any one of the above.
As shown in fig. 5, an embodiment of the present invention further provides a control apparatus for non-reference process equipment, including a first reference parameter obtaining unit 501 and a first non-reference parameter generating unit 502, where:
a first reference parameter obtaining unit 501, configured to obtain a reference process file of a reference process device, where the reference process file includes configuration parameters of the reference process device;
a first non-reference parameter generating unit 502, configured to determine configuration parameters of the non-reference process equipment according to a process configuration of the non-reference process equipment and the configuration parameters in the reference process file, and generate a process file of the non-reference process equipment, where the process configuration of the non-reference process equipment includes difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment includes the configuration parameters of the non-reference process equipment.
In this embodiment, the obtaining, by the first reference parameter obtaining unit 501, a reference process file of a reference process device includes:
receiving a reference process file issued by a process editor; or,
receiving an encrypted file which is sent by a process editor and obtained by encrypting the reference process file, and decrypting the encrypted file to obtain the reference process file;
wherein the reference process file is an off-line process file written by the process editor according to the reference process equipment.
It should be noted that the encryption algorithm used for encrypting the file includes an encryption algorithm such as MD5 or AES. The reference process file of the reference process equipment can be issued to the control device of the non-reference process equipment by using the existing network communication protocol.
In this embodiment, the configuration parameter includes a configuration value of at least one of the following parameters: gas flow, process pressure, power supply, process temperature, process time.
In this embodiment, after the first non-reference parameter generating unit 502 generates a process file of the non-reference process equipment, the generated process file is saved.
In this embodiment, the difference information is an offset, and the offset is represented by a relative difference or an offset percentage.
It should be noted that the difference between the configuration parameters of each non-reference process tool and the reference process tool can be configured by a relative difference or a percentage offset. The specific values of the relative difference or the percentage of the deviation are obtained by the test of the technicians. The inventor of the present invention finds that when the process of the process equipment changes, the offset between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment is basically kept unchanged, so that when the reference process file changes, the process file of the non-reference process equipment can be generated according to the process file of the reference process equipment and the process configuration of the non-reference process equipment.
In one example of this embodiment, a complete reference process file or non-reference process file contains the following data: in an example, the selective configurations of the respective pieces of equipment are substantially the same, and the process files of each piece of process equipment are different in values of the gas flow, the process pressure, the power supply power, the process temperature and the process time, so that the process configuration is mainly performed with respect to the five parameters of the process files. However, in other examples of the present application, the selective configuration may also have a difference, and the difference information of the selective configuration is further included in the process configuration, for example, the selective configuration of the non-reference process equipment is listed in the process configuration and is different from the reference process equipment, and the selective configuration of the non-reference process equipment is ignored.
In this embodiment, the process configuration of the non-reference process equipment may configure the difference between the configuration parameters of each non-reference process equipment and the configuration parameters of the reference process equipment by using a relative difference value or an offset percentage. The specific values of the relative difference or the offset percentage are obtained by the test of the process personnel and then configured in the control device of the non-reference process equipment, and the specific process configuration example of the non-reference process equipment, the obtained reference process file example and the generated process file example of the non-reference process equipment are referred to the foregoing description and are not repeated herein.
The process file generation method, the control device and the storage medium provided by the embodiment of the invention only need to generate one reference process file for the selected reference process equipment, and automatically generate the process files suitable for the non-reference process equipment for other non-reference process equipment through the process configuration of the non-reference process equipment. When the capacity is expanded and the process equipment is increased or the process is modified and upgraded, the process file does not need to be rewritten and the test does not need to be executed for the non-reference process equipment, so that the efficiency and the reliability of generating the process file by each process equipment are greatly improved, and the efficiency of upgrading the process and improving the process is improved.
Example two
For some production lines, the process editor is used to generate a reference process file for the reference process equipment and send the reference process file to the control devices of the reference process equipment and the non-reference process equipment, and the reference process file may be only the service provided by the equipment provider during equipment debugging. After the process files of the non-reference process equipment are automatically generated on the control device of the non-reference process equipment, general equipment maintenance cannot use the process editor. Or the process editor may be disabled for other reasons, such as a process editor failure. At this time, the non-reference process equipment cannot adopt a mode of acquiring the reference process file from the process editor and generating the process file of the non-reference process equipment by combining the process configuration of the non-reference process equipment. Thus, the present embodiment provides a method for generating a process file of the non-reference process equipment to be tested.
In this embodiment, the control device of the non-reference process equipment acquires a reference process file stored on the reference process equipment, where the reference process file includes configuration parameters of the reference process equipment. Specifically, the control device of the non-reference process equipment may communicate with the control device of the reference process equipment through the local area network, and export and transmit the reference process file stored in the control device of the reference process equipment to the control device of the non-reference process equipment, or the maintenance personnel may copy the reference process file stored in the control device of the reference process file to the storage medium and import the reference process file from the storage medium to the control device of the non-reference process equipment.
In this embodiment, the processing after the reference process file is obtained may be the same as that in the first embodiment, that is, the control device of the non-reference process equipment determines the configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment and the configuration parameters in the reference process file, and generates the process file of the non-reference process equipment, where the process configuration of the non-reference process equipment includes difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment. The configuration parameters of the present embodiment may also include at least one of gas flow, process pressure, power supply, process temperature, and process time. The non-reference process equipment and the reference process equipment may be chemical vapor deposition equipment or physical vapor deposition equipment.
The embodiment can also automatically generate the process files suitable for the non-reference process equipment through the process configuration of the non-reference process equipment. When the capacity is expanded and the process equipment is increased or the process is modified and upgraded, the process file does not need to be rewritten and the test does not need to be executed for the non-reference process equipment, so that the efficiency and the reliability of generating the process file by each process equipment are improved, and the efficiency of upgrading the process and improving the process is improved.
EXAMPLE III
The second embodiment is to acquire a reference process file stored in the control device of the reference process equipment, and if the reference process file cannot be acquired from the control device of the reference process equipment due to reasons such as damage of the reference process file, the method of the second embodiment may be used to automatically generate a process file of non-reference process equipment. Of course, the method of the present embodiment may also be used in other scenarios.
As shown in fig. 6, a method for generating a process file according to an embodiment of the present invention includes:
step 601: the method comprises the steps that a control device of non-reference process equipment acquires a process file and a process configuration saved on the control device of non-reference process equipment to be detected, wherein the process file of the non-reference process equipment to be detected comprises configuration parameters of the non-reference process equipment to be detected, and the process configuration of the non-reference process equipment to be detected comprises difference information between the configuration parameters of the non-reference process equipment to be detected and the configuration parameters of the reference process equipment;
in this embodiment, one process apparatus with the best process execution effect may be selected as a reference process apparatus, and other process apparatuses may be selected as non-reference process apparatuses, but it should be noted that the method of selecting a reference process apparatus in the present invention is not limited thereto, for example, any one process apparatus may be selected as a reference process apparatus, and other process apparatuses may be selected as non-reference process apparatuses, for example, PECVD apparatuses on a photovoltaic production line. The non-reference process equipment and the reference process equipment are chemical vapor deposition equipment or physical vapor deposition equipment. The control device can be an equipment computer or an equipment machine.
In this embodiment, the control device of the non-reference process equipment may obtain the process file and the process configuration stored in the control device of the non-reference process equipment to be detected by using the existing network communication protocol; or copying the process file and the process configuration from the control device of the non-reference process equipment to be detected through the storage medium and then importing the process file and the process configuration into the control device of the non-reference process equipment.
In this embodiment, the configuration parameter includes a configuration value of at least one of the following parameters: gas flow, process pressure, power supply, process temperature, process time.
In this embodiment, the difference information is an offset, and the offset is represented by a relative difference or an offset percentage.
In this embodiment, the acquired process file and/or process configuration saved on the control device of the non-reference process equipment to be detected may be an encrypted file obtained by encrypting the process file and/or process configuration of the non-reference process equipment, and the process file and/or process configuration of the non-reference process equipment is obtained by decrypting the encrypted file.
It should be noted that the encryption algorithm used for encrypting the file includes an encryption algorithm such as MD5 or AES. The process files and the process configuration saved on the control device of the non-reference process equipment to be detected can be obtained by using the existing network communication protocol.
Step 602: the control device of the non-reference process equipment determines configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment to be detected, the process configuration of the non-reference process equipment and configuration parameters in the process file of the non-reference process equipment to be detected, and generates the process file of the non-reference process equipment, wherein the process configuration of the non-reference process equipment comprises difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment comprises the configuration parameters of the non-reference process equipment.
In this embodiment, after the control device of the non-reference process equipment generates the process file of the non-reference process equipment, the method further includes:
and the control device of the non-reference process equipment saves the generated process file.
In one example of this embodiment, it is assumed that the process configuration of the non-reference process tool is still as shown in table 1 above;
assuming that the process configuration of the non-reference process equipment to be detected, which is obtained by the control device of the non-reference process equipment, is as shown in table 4 below:
relative difference value Percent offset (%)
Flow rate of gas 1 4
Flow rate of gas 2 -3
Flow rate of gas 3 5
4 flow of gas 8
5 flow of gas -15
6 flow of gas 5
Flow rate of gas 7 6
Flow rate of gas 8 5
Process pressure -8
Power of power supply 10
Temperature of the process 6
Time of the process 2
TABLE 4
It is assumed in this example that the process files of the non-reference process equipment to be detected, which are acquired by the control device of the non-reference process equipment, are as shown in table 5 below, where the relevant selectively configured parts have been omitted:
configuring parameters
Flow rate of gas 1 48sccm
Flow rate of gas 2 43sccm
Flow rate of gas 3 35sccm
4 flow of gas 25sccm
5 flow of gas 70sccm
6 flow of gas 10
Flow rate of gas 7 25sccm
Flow rate of gas 8 5
Process pressure 103 Pascal (Pa)
Power of power supply 30 kilowatt (kW)
Process temperatureDegree of rotation 610 deg.C (. degree. C.)
Time of the process 15 minutes (min)
TABLE 5
In this case, the control device of the non-reference process equipment calculates the configuration parameters of the non-reference process equipment according to table 1, table 4 and table 5 as follows:
gas 1 flow rate 48-4+2 46 (sccm);
gas 2 flow rate 43+3-5 41 (sccm);
gas 3 flow 35-5+ 3-33 (sccm);
gas 4 flow 25-8+ 10-22 (sccm);
gas 5 flow rate 70+15-25 60 (sccm);
gas 6 flow rate 10-5+ 05 (sccm);
gas 7 flow 25-6+ 2-21 (sccm);
gas 8 flow rate 5-5+0 (sccm);
process pressure 103/(1-8%) (1-5%) ═ 106.36(Pa)
Power supply power 30/(1+ 10%) (1+ 5%) -28.64 (kW)
Process temperature 610/(1+ 6%) (1+ 3%) ═ 592.74 (deg.c)
Process time 15/(1+ 2%) (1+ 3%) ═ 15.15(min)
Thus, the process files for the non-reference process tool generated by the control means for the non-reference process tool are shown in table 6 (where the relevant selectively configured parts have been omitted):
configuring parameters
Flow rate of gas 1 46sccm
Flow rate of gas 2 41sccm
Flow rate of gas 3 33sccm
4 flow of gas 22sccm
5 flow of gas 60sccm
6 flow of gas 5
Flow rate of gas 7 21sccm
Flow rate of gas 8 0
Process pressure 106.36Pa
Power of power supply 28.64kW
Temperature of the process 592.74℃
Time of the process 15.15min
TABLE 6
Embodiments of the present invention also provide a storage medium, on which one or more programs are stored, where the one or more programs are executable by one or more processors to implement the steps of the process file generation method as described in any one of the above.
The embodiment of the present invention further provides a control device of non-reference process equipment, which includes a processor and a memory, wherein the processor is configured to execute a process file generation program stored in the memory, so as to implement the steps of the process file generation method according to any one of the above descriptions.
As shown in fig. 7, an embodiment of the present invention further provides a control apparatus for non-reference process equipment, including a second reference parameter acquiring unit 701 and a second non-reference parameter generating unit 702, where:
a second reference parameter obtaining unit 701, configured to obtain a process file and a process configuration saved on a control device of a to-be-detected non-reference process device, where the process file of the to-be-detected non-reference process device includes a configuration parameter of the to-be-detected non-reference process device, and the process configuration of the to-be-detected non-reference process device includes difference information between the configuration parameter of the to-be-detected non-reference process device and a configuration parameter of a reference process device;
a second non-reference parameter generating unit 702, configured to determine configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment to be detected, the process configuration of the non-reference process equipment, and configuration parameters in the process file of the non-reference process equipment to be detected, and generate the process file of the non-reference process equipment, where the process configuration of the non-reference process equipment includes difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment includes the configuration parameters of the non-reference process equipment.
In this embodiment, the non-reference process equipment may be chemical vapor deposition equipment or physical vapor deposition equipment, and the reference process equipment may be chemical vapor deposition equipment or physical vapor deposition equipment. The control device can be an equipment computer or an equipment machine.
In this embodiment, the second reference parameter obtaining unit 701 may obtain, by using an existing network communication protocol, a process file and a process configuration stored in a control device of the non-reference process equipment to be detected; or the process file and the process configuration are copied from the control device of the non-reference process equipment to be detected through the storage medium and then are imported.
In this embodiment, the configuration parameter includes a configuration value of at least one of the following parameters: gas flow, process pressure, power supply, process temperature, process time.
In this embodiment, the difference information is an offset, and the offset is represented by a relative difference or an offset percentage.
In this embodiment, the acquired process file and/or process configuration saved on the control device of the non-reference process equipment to be detected may be an encrypted file obtained by encrypting the process file and/or process configuration of the non-reference process equipment, and the process file and/or process configuration of the non-reference process equipment is obtained by decrypting the encrypted file.
It should be noted that the encryption algorithm used for encrypting the file includes an encryption algorithm such as MD5 or AES. The process files and the process configuration saved on the control device of the non-reference process equipment to be detected can be obtained by using the existing network communication protocol.
In this embodiment, after the second non-reference parameter generating unit 702 generates the process file of the non-reference process equipment, the second non-reference parameter generating unit 702 stores the generated process file.
The specific process configuration example of the non-reference process equipment, the acquired process file example and process configuration example of the non-reference process equipment to be detected, and the generated process file example of the non-reference process equipment are referred to the foregoing, and are not described herein again.
According to the process file generation method, the control device and the storage medium provided by the embodiment of the invention, when the capacity is expanded and the process equipment is increased or the process is modified and upgraded, and when the control device of the non-reference process equipment cannot acquire the reference process file from the process editor, the process file of the non-reference process equipment can be generated by using the method of the embodiment without rewriting the process file and executing the test for the non-reference process equipment, so that the process file generation efficiency and reliability of each process equipment are greatly improved, and the process upgrading and process improving efficiency are improved.
Example four
The embodiment of the invention also provides a process control system of the photovoltaic cell production line, but the process control system can also be used for other production lines.
The process control system of the present embodiment includes a process editor, a control device of a reference process equipment and at least a control device of a non-reference process equipment, wherein:
the process editor is used for writing and generating a reference process file according to reference process equipment in an off-line manner, encrypting the reference process file and then sending the encrypted reference process file to the control device of the reference process equipment and the control device of non-reference process equipment, wherein the reference process file comprises configuration parameters of the reference process equipment;
the control device of the reference process equipment is used for decrypting to obtain the reference process file and executing the process according to the reference process file;
the control device of the non-reference process equipment is used for decrypting to obtain the reference process file, determining the configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment and the configuration parameters in the reference process file, generating the process file of the non-reference process equipment and executing the process according to the generated process file, wherein the process configuration of the non-reference process equipment comprises the difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment comprises the configuration parameters of the non-reference process equipment.
In this embodiment, the control device of the non-reference process equipment includes:
the process decoding module is used for decrypting the received encrypted reference process file to obtain the reference process file;
the process file generation module is used for determining the configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment and the configuration parameters in the reference process file, and generating the process file of the non-reference process equipment, wherein the process configuration of the non-reference process equipment comprises difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment;
a process control module for using the process file of the non-reference process equipment to perform a process.
It should be noted that, in order to unify the software processing, in addition to the possible change of the selected reference process equipment, the control device of the reference process equipment may also store the corresponding process configuration information (where the difference information is 0), so that the control device of the reference process equipment may generate the process file by using the same method as the control device of the non-reference process equipment, and thus, as shown in fig. 8, the process equipment in the process control system does not distinguish the reference process equipment from the non-reference process equipment. The process editor of fig. 8 is located within a development computer, which may be, for example, a software application provided on the development computer.
The function of generating the process file may be implemented by process decoder software, and at this time, the information of the process configuration may be written in the code of the process decoder software, or the information of the process configuration may be written in a file, and the process decoder software reads the file and then generates the process file. In a process control system as shown in fig. 9, the control device of the process equipment is an equipment computer of the process equipment. The process decoder can realize the functions of a process decoding module and a process file generation module, namely, decrypt an encrypted file to obtain a reference process file, determine the configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment and the configuration parameters in the reference process file, and generate the process file of the non-reference process equipment; the plant software in FIG. 9 is used to implement the functionality of the process control module, i.e., the process files of the non-reference process plant are used to perform the process. Like the process editor of fig. 8, the process editor of fig. 9 is also located within a development computer, which may be, for example, a software application provided on the development computer.
The function of generating the process file may also be implemented in a separate piece of software or may be added to the device software used by the process control module.
In order to realize process control, the following steps are carried out: research personnel select one piece of equipment with better process execution effect as reference process equipment; writing a reference process file according to the reference process equipment and generating an encrypted reference process file; transmitting the encrypted reference process file to other process equipment computers; the process decoders of other process equipment computers analyze the reference process file, read the process configuration, automatically generate the process file suitable for the non-reference process equipment machine and import the process file into the equipment software; the tool software executes a process file appropriate for the non-reference process tool machine.
The process control system of the embodiment of the invention establishes the reference process equipment and the reference process file, and other equipment rapidly generates and executes the off-line process file based on the reference process file and the process configuration, thereby greatly improving the efficiency and the reliability of executing the off-line process formula by the equipment of the photovoltaic cell production line on the premise of not influencing the process result and the data safety, and improving the efficiency of process upgrading and process improvement.
It will be understood by those of ordinary skill in the art that all or some of the steps of the methods, systems, functional modules/units in the devices disclosed above may be implemented as software, firmware, hardware, and suitable combinations thereof. In a hardware implementation, the division between functional modules/units mentioned in the above description does not necessarily correspond to the division of physical components; for example, one physical component may have multiple functions, or one function or step may be performed by several physical components in cooperation. Some or all of the physical components may be implemented as software executed by a processor, such as a central processing unit, digital signal processor, or microprocessor, or as hardware, or as an integrated circuit, such as an application specific integrated circuit. Such software may be distributed on computer readable media, which may include computer storage media (or non-transitory media) and communication media (or transitory media). The term computer storage media includes volatile and nonvolatile, removable and non-removable media implemented in any method or technology for storage of information such as computer readable instructions, data structures, program modules or other data, as is well known to those of ordinary skill in the art. Computer storage media includes, but is not limited to, RAM, ROM, EEPROM, flash memory or other memory technology, CD-ROM, Digital Versatile Disks (DVD) or other optical disk storage, magnetic cassettes, magnetic tape, magnetic disk storage or other magnetic storage devices, or any other medium which can be used to store the desired information and which can accessed by a computer. In addition, communication media typically embodies computer readable instructions, data structures, program modules or other data in a modulated data signal such as a carrier wave or other transport mechanism and includes any information delivery media as known to those skilled in the art.

Claims (15)

1. A process file generation method comprises the following steps:
the method comprises the steps that a control device of non-reference process equipment obtains a reference process file of reference process equipment, wherein the reference process file comprises configuration parameters of the reference process equipment;
the control device of the non-reference process equipment determines the configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment and the configuration parameters in the reference process file, and generates the process file of the non-reference process equipment, wherein the process configuration of the non-reference process equipment comprises difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment comprises the configuration parameters of the non-reference process equipment.
2. The method of claim 1, wherein: the control device of the non-reference process equipment acquires a reference process file of reference process equipment, and the method comprises the following steps:
receiving the reference process file issued by a process editor; or,
receiving an encrypted file which is sent by a process editor and obtained by encrypting the reference process file, and decrypting the encrypted file to obtain the reference process file;
wherein the reference process file is an off-line process file written by the process editor according to the reference process equipment.
3. The method of claim 1, wherein: the control device of the non-reference process equipment acquires a reference process file of reference process equipment, and the method comprises the following steps:
and acquiring the reference process file stored on a control device of the reference process equipment.
4. The method of claim 1, wherein: the configuration parameters comprise configuration values of at least one of the following parameters:
gas flow, process pressure, power supply, process temperature, process time.
5. The method of claim 1, wherein: the non-reference process equipment is chemical vapor deposition equipment or physical vapor deposition equipment;
the reference process equipment is chemical vapor deposition equipment or physical vapor deposition equipment.
6. The method of claim 1, wherein: the difference information is an offset, which is represented by a relative difference or offset percentage.
7. The method of claim 1, wherein: after the control device of the non-reference process equipment generates the process file of the non-reference process equipment, the method further comprises:
and the control device of the non-reference process equipment saves the generated process file.
8. A process file generation method comprises the following steps:
the method comprises the steps that a control device of non-reference process equipment acquires a process file and a process configuration saved on the control device of non-reference process equipment to be detected, wherein the process file of the non-reference process equipment to be detected comprises configuration parameters of the non-reference process equipment to be detected, and the process configuration of the non-reference process equipment to be detected comprises difference information between the configuration parameters of the non-reference process equipment to be detected and the configuration parameters of reference process equipment;
the control device of the non-reference process equipment determines configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment to be detected, the process configuration of the non-reference process equipment and configuration parameters in the process file of the non-reference process equipment to be detected, and generates the process file of the non-reference process equipment, wherein the process configuration of the non-reference process equipment comprises difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment comprises the configuration parameters of the non-reference process equipment.
9. The method of claim 8, wherein: the configuration parameters comprise configuration values of at least one of the following parameters: gas flow, process pressure, power supply, process temperature, process time; the difference information is an offset, which is represented by a relative difference or offset percentage.
10. A storage medium having one or more programs stored thereon, the one or more programs being executable by one or more processors to perform the steps of the process file generation method of any one of claims 1 to 9.
11. A control apparatus for non-reference process equipment, comprising a processor and a memory, wherein the processor is configured to execute a process file generation program stored in the memory to implement the steps of the process file generation method according to any one of claims 1 to 9.
12. A control apparatus for a non-reference process tool, comprising:
the system comprises a first reference parameter acquisition unit, a second reference parameter acquisition unit and a third reference parameter acquisition unit, wherein the first reference parameter acquisition unit is used for acquiring a reference process file of reference process equipment, and the reference process file comprises configuration parameters of the reference process equipment;
the first non-reference parameter generating unit is configured to determine configuration parameters of the non-reference process equipment according to a process configuration of the non-reference process equipment and the configuration parameters in the reference process file, and generate a process file of the non-reference process equipment, where the process configuration of the non-reference process equipment includes difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment includes the configuration parameters of the non-reference process equipment.
13. A control apparatus for a non-reference process tool, comprising:
the second reference parameter acquiring unit is used for acquiring a process file and a process configuration saved on a control device of non-reference process equipment to be detected, wherein the process file of the non-reference process equipment to be detected comprises configuration parameters of the non-reference process equipment to be detected, and the process configuration of the non-reference process equipment to be detected comprises difference information between the configuration parameters of the non-reference process equipment to be detected and the configuration parameters of reference process equipment;
the second non-reference parameter generating unit is configured to determine configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment to be detected, the process configuration of the non-reference process equipment and configuration parameters in the process file of the non-reference process equipment to be detected, and generate the process file of the non-reference process equipment, where the process configuration of the non-reference process equipment includes difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment includes the configuration parameters of the non-reference process equipment.
14. A process control system, comprising a process editor, a control device for a reference process tool, and at least one control device for a non-reference process tool, wherein:
the process editor is used for off-line writing and generating a reference process file according to reference process equipment, encrypting the reference process file and then issuing the encrypted reference process file to a control device of the reference process equipment and a control device of non-reference process equipment, wherein the reference process file comprises configuration parameters of the reference process equipment;
the control device of the reference process equipment is used for decrypting to obtain the reference process file and executing the process according to the reference process file;
the control device of the non-reference process equipment is used for decrypting to obtain the reference process file, determining the configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment and the configuration parameters in the reference process file, generating the process file of the non-reference process equipment and executing the process according to the generated process file, wherein the process configuration of the non-reference process equipment comprises the difference information between the configuration parameters of the non-reference process equipment and the configuration parameters of the reference process equipment, and the process file of the non-reference process equipment comprises the configuration parameters of the non-reference process equipment.
15. The system of claim 14, wherein: the control device of the non-reference process equipment comprises:
the process decoding module is used for decrypting the received encrypted reference process file to obtain the reference process file;
the process file generation module is used for determining the configuration parameters of the non-reference process equipment according to the process configuration of the non-reference process equipment and the configuration parameters in the reference process file and generating the process file of the non-reference process equipment;
a process control module for using the process file of the non-reference process equipment to perform a process.
CN201810907584.9A 2018-08-10 2018-08-10 Technical papers generation method, process control system, control device and storage medium Pending CN109065671A (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008242524A (en) * 2007-03-23 2008-10-09 Nec Software Chubu Ltd File management device, file management method, program and computer-readable recording medium
KR20150071849A (en) * 2013-12-19 2015-06-29 세메스 주식회사 Method of controlling operations of semiconductor inspecting apparatus
CN105335807A (en) * 2014-08-15 2016-02-17 荆弘明 Standardized intelligent information management system
CN107871698A (en) * 2017-11-07 2018-04-03 君泰创新（北京）科技有限公司 Process establishment, acquisition, guard method and the device of manufacture of solar cells equipment

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008242524A (en) * 2007-03-23 2008-10-09 Nec Software Chubu Ltd File management device, file management method, program and computer-readable recording medium
KR20150071849A (en) * 2013-12-19 2015-06-29 세메스 주식회사 Method of controlling operations of semiconductor inspecting apparatus
CN105335807A (en) * 2014-08-15 2016-02-17 荆弘明 Standardized intelligent information management system
CN107871698A (en) * 2017-11-07 2018-04-03 君泰创新（北京）科技有限公司 Process establishment, acquisition, guard method and the device of manufacture of solar cells equipment

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