CN109060462A - A kind of calibration chamber with small cavity - Google Patents
A kind of calibration chamber with small cavity Download PDFInfo
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- CN109060462A CN109060462A CN201811054285.1A CN201811054285A CN109060462A CN 109060462 A CN109060462 A CN 109060462A CN 201811054285 A CN201811054285 A CN 201811054285A CN 109060462 A CN109060462 A CN 109060462A
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- Prior art keywords
- piston
- calibration chamber
- piston rod
- calibration
- slide plate
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/24—Suction devices
Abstract
The invention discloses a kind of calibration chambers with small cavity, including calibration chamber ontology, piston rod, piston cylinder and pendulum stick, calibration cavity is equipped in the calibration chamber ontology, the two sides of the calibration chamber ontology are respectively equipped with the equal thieff hatch and piston hole being connected to the calibration cavity, the upper surface of the thieff hatch is for placing corrector strip, the piston cylinder is installed on the upper surface of the piston hole, the piston rod is sheathed in the piston hole and the piston cylinder, the piston end of the piston rod is located in the piston hole, the pull rod traction end of the piston rod connects the pendulum stick, the pendulum stick is for pulling the piston rod to move back and forth along the piston hole.The calibration chamber can reduce absorption and desorption of the material to component in sample gas in calibration chamber body, effectively keep micro atmosphere value.
Description
Technical field
The present invention relates to gas sampling device technical field more particularly to a kind of calibration chambers with small cavity.
Background technique
It the sustainable development of electronic information technology and micro-nano device and deepens constantly and not only brings new opportunities and challenges,
To the long-term reliability of electronic component, more stringent requirements are proposed simultaneously, especially aerospace, satellite communication and its
His highly reliable application field does not require nothing more than the quality that electronic component has high-quality, it is also desirable to have long storage life and
Service life.
In the component for constituting the critical electronics system or equipments such as aerospace, because of reliability requirement height, difficulty is reprocessed,
So that the electronic component of hermetically sealed (packing forms with internal small cavity) is because obvious excellent in terms of long-term reliability
Gesture and be widely applied, and the reliability of hermetically sealed component, especially long-term reliability are largely by it
What small inside cavity moisture content determined.Hermetically sealed component internal moisture diffusion is excessively high, can make chip and electrical connection system
Various physical-chemical reactions occur, to cause device parameters unstable or even fail, in order to guarantee hermetically sealed component
Reliability need to effectively control hermetically sealed component internal moisture diffusion.
Internal steam mass spectrometer is a kind of for the intracorporal moisture content of analysis detection electronic component seal chamber
Analytical high resolution instrument is to detect only available high-resolution point to hermetically sealed electron-like component internal steam at present
Analyzer device.The quasi-instrument is a kind of relation analysis instrument, and reference sample known to magnitude is needed to calibrate instrument, and instrument is surveyed
When measuring certain concentration of component in sample to be tested, the characteristic signal of certain component of survey need to be compared with reference sample, by certain
Functional relation calculates the concentration of certain component in sample to be tested.It can be seen that reference sample known to magnitude is to such analysis instrument
It is very crucial.
But the internal steam mass spectrometer for testing electronic component internal atmosphere has its particularity, firstly, it is tested
Object is the small cavity of sealing, considerably less (up to 10 μ L) for the gas flow of analysis, and in gas fractions tested it is dense
It spends extremely low (some are even up to ppb grades), the adsorption and desorption of material influences greatly, and magnitude is not easy to keep stablizing；Secondly, such instrument
Device uses special sampling system, sampling needle can shell directly to component puncture；Again, instrument internal vacuum degree is very
Height, sample face must be smooth, can be fitted close with sampling platform, guarantee air tight.
Existing sampler is sampled to the fluid of certain flow, and sampling quantity can be from (1mL/min-100L/
Min), gas can be stored in sampler bag, and not specifically for micro atmosphere, concentration of component is extremely low, it is small to form one
The sampler of seal cavity sample.At present due to not meeting the sampler of above three particular/special requirement, magnitude can not be provided
The reference sample known calibrates small inside cavity steam mass spectrometer, can not ensure that the magnitude of vapour analysis accurately may be used
It leans on.
Existing gas sampling device is mostly using static sampling, and sample is not that real-time preparation uses in real time, and material is to sample
Component has absorption and desorption in product gas, can change sample gas constituent content, and for micro atmosphere, a small amount of absorption is de-
It is attached all can very big influence on its magnitude.
Therefore, when acquiring sample gas, how to reduce material in calibration chamber body to the absorption of component in sample gas and
Desorption effectively keeps micro atmosphere value, becomes those skilled in the art's technical problem urgently to be resolved.
Summary of the invention
The object of the present invention is to provide a kind of calibration chamber with small cavity, which can be reduced in calibration chamber body
Absorption and desorption of the material to component in sample gas, effectively keep micro atmosphere value.
To achieve the goals above, one aspect of the present invention provides a kind of calibration chamber with small cavity, including school
Quasi- chamber ontology, piston rod, piston cylinder and pendulum stick, interior be equipped with of the calibration chamber ontology calibrate cavity, and the two of the calibration chamber ontology
Side is respectively equipped with the equal thieff hatch and piston hole being connected to the calibration cavity, and the upper surface of the thieff hatch is for placing calibration
Piece, the piston cylinder are installed on the upper surface of the piston hole, and the piston rod is sheathed on the piston hole and the piston cylinder
Interior, the piston end of the piston rod is located in the piston hole, and the pull rod traction end of the piston rod connects the pendulum stick, described
Pendulum stick is for pulling the piston rod to move back and forth along the piston hole.
The calibration chamber provided according to the present invention, in calibration chamber ontology with the piston hole that is connected to of calibration cavity, in piston hole
Equipped with piston rod, piston rod is driven to move back and forth in the piston hole by pendulum stick, piston rod is lifted up, the piston of piston rod
End moves up a certain distance, and the gas in gas piping flows in ontology in calibration chamber, displaces in calibration cavity
Gas, when sampling, piston end, which moves down, blocks calibration cavity upper end opening, and a part of sample gas is sealed in calibration cavity and is formed
One small cavity sample completes sampling.It is real-time preparation, real time sample detection that sample gas, which may be implemented, is calibrated one in cavity
Directly there are a large amount of under test gas to flow, the influence atmosphere that material adsorption and desorption generates will not increase at any time and accumulate, thus
Material for gaseous components influence can be substantially reduced, solves the problems, such as that micro atmosphere magnitude is unstable vulnerable to Effect of Materials,
To guarantee that measurement result is more accurate and reliable.
Detailed description of the invention
Fig. 1 is the positive structure diagram for the calibration chamber that an embodiment of the present invention provides；
Fig. 2 is the overlooking structure diagram for the calibration chamber that an embodiment of the present invention provides；
Fig. 3 is the structural schematic diagram of the piston rod in the calibration chamber that an embodiment of the present invention provides；
Fig. 4 is the positive structure diagram of the piston cylinder in the calibration chamber that an embodiment of the present invention provides；
Fig. 5 is the overlooking structure diagram of piston cylinder in Fig. 4；
Fig. 6 is the schematic view of the front view of the pendulum stick in the calibration chamber that an embodiment of the present invention provides；
Fig. 7 is the overlooking structure diagram that stick is put in Fig. 6；
Fig. 8 is the left view structural representation that stick is put in Fig. 6；
Fig. 9 is the overlooking structure diagram of the first slide plate in Fig. 2；
Figure 10 is the horizontal cross-section structure diagram of the first slide plate in Fig. 9；
Figure 11 is the longitudinal profile structure schematic of the first slide plate in Fig. 9；
Figure 12 is the overlooking structure diagram of the second slide plate in Fig. 2；
Figure 13 is the horizontal cross-section structure diagram of the second slide plate in Figure 12；
Figure 14 is the longitudinal profile structure schematic of the second slide plate in Figure 12.
Wherein, in Fig. 1-Figure 14:
Calibration chamber ontology 1, piston hole 11, thieff hatch 12, calibration cavity 13, external gas pipe interface 14, the first screw thread
Interface 15, the second hickey 16, circular open 17, slide plate guide groove 18, circular groove 19, lead angle 110；
Detent 23 under piston rod 2, piston plug 21, the first sealed groove 22, groove, detent 24, towing pad 25 on groove；
First slide plate 3, the first slide plate lead angle 31, the first corrector strip detent protrusion 32, the first U-lag 33, slide plate screw thread connect
Mouth 34；
Second slide plate 4, the second slide plate lead angle 41, the second corrector strip detent protrusion 42, the second U-lag 43, hoodle opening 44,
Antiskid groove 45；
Piston cylinder 5, piston rod sets of holes 51, the second sealed groove 52, fixed screw interface 53, metal platform 54；
Put stick 6, turntable 61, handle 62, piston rod opening 63, pin hole 64.
Specific embodiment
In order to make those skilled in the art more fully understand technical solution of the present invention, below in conjunction with attached drawing to this hair
It is bright to be further detailed.
As Figure 1-Figure 8, the calibration chamber with small cavity that an embodiment of the present invention provides includes calibration chamber sheet
Body 1, piston rod 2, piston cylinder 5, pendulum stick 6, interior be equipped with of the calibration chamber ontology 1 calibrates cavity 13, in specific embodiment, calibration
The volume of cavity 13 can be 10 μ L-100mL, and calibration chamber ontology 1 can be made of stainless steel, calibration chamber ontology 1
Inner wall can do polishing treatment, keep its surface smooth, if sample gas is non-inert gas, the inner wall of calibration chamber ontology 1 can
To be passivated processing, to prevent from reacting with sample gas.
The two sides of the calibration chamber ontology 1 are respectively equipped with the thieff hatch 12 and piston hole being connected in the calibration cavity 13
11, in the present embodiment, thieff hatch 12 and piston hole 11 are respectively arranged on the opposite sides of calibration chamber ontology 1, thieff hatch 12, piston hole
11 and thieff hatch 12 can be coaxially disposed.
For placing corrector strip, the piston cylinder 5 is installed on the upper of the piston hole 11 for the upper surface of the thieff hatch 12
End face, the piston rod 2 are placed in piston hole 11 and piston cylinder 5, and the piston end of the piston rod 2 is located at the piston hole 11
Interior, the pull rod traction end of the piston rod 2 connects the pendulum stick 6, and the pendulum stick 6 is for pulling the piston rod 2 along the work
Consent 11 moves back and forth.
Calibration chamber provided by the invention, the piston hole 11 being connected in calibration chamber ontology 1 with calibration cavity 13, piston hole 11
It is interior to be equipped with piston rod 2, drive piston rod 2 to move back and forth in the piston hole 11 by pendulum stick 6, piston rod 2 is lifted up, piston
The piston end of bar 2 moves up a certain distance, and the gas in gas piping flows in ontology in calibration chamber, displaces calibration
Gas in cavity 13, when sampling, piston end, which moves down, blocks calibration 13 upper end opening of cavity, and a part of sample gas is sealed in school
One small cavity sample is formed in quasi- cavity 13, completes sampling.It is real-time preparation, real time sample inspection that sample gas, which may be implemented,
It surveys, calibrating has always a large amount of under test gas to flow in cavity 13, influence atmosphere that material adsorption and desorption generates will not at any time
Increase and accumulate, can thus substantially reduce material for gaseous components influence, solve micro atmosphere magnitude vulnerable to material shadow
Loud and unstable problem, to guarantee that measurement result is more accurate and reliable.
In preferred scheme, the diameter of the piston hole 11 is greater than the diameter of the calibration cavity 13, and this structure can be with
The piston end of piston rod 2 is limited, so that piston rod 2 will not move in calibration cavity 13.
In preferred scheme, as shown in figure 3, the piston end of the piston rod 2 is equipped with piston plug 21, the piston plug
21 inside is equipped with detent 23 under groove, detent 24 on groove side by side, detent 23 and detent 24 on the groove under the groove
Between form the first sealed groove 22, be equipped with the first sealing ring in first sealed groove 22.First sealing ring can use O
Type sealing ring, the internal diameter of the first sealing ring is consistent with the outer diameter of the first sealed groove 22, can just cover in the first sealed groove 22
It is interior and intimate contact with it, the outer diameter of the first sealing ring more bigger than the outer diameter of detent 24 on detent 23 under groove and groove 0.3~
0.5mm can be inserted in Hua Sheng with the first sealing ring and seal air tight be advisable with the close contact of its inner wall.
The upper part of piston rod 2 penetrates piston cylinder 5, and lower part is penetrated from piston hole 11, and the entire length of piston rod 2 is equal to
6 pin hole 64 of stick is put to the length, 5 height of piston cylinder, 1 upper surface of calibration chamber ontology at 61 edge of turntable to using cavity upper end
The sum of length.
In preferred scheme, as shown in fig. 4-5, the piston cylinder 5 is fixed by screws in the calibration chamber ontology 1
On.The piston cylinder 5 is equipped with fixed screw interface 53, and piston cylinder 5 can be fixed on calibration chamber ontology 1 by fixed screw
On.
In preferred scheme, coaxial piston rod sets of holes 51 and the second o-ring groove are equipped in the piston cylinder 5 side by side
52, second sealed groove 52 is axially aligned with the piston hole 11, and the second sealing is equipped in second sealed groove 52
Circle.Second sealing ring can be O-ring seal, and the second sealing ring has certain plasticity, tightens for fixed piston cylinder 5
Fixed screw, the second sealing ring are pressurized between piston cylinder 5 and calibration chamber ontology 1, with the two be in close contact, can prevent gas from
Clearance leakage between piston cylinder 5 and calibration chamber ontology 1.
In preferred scheme, as Figure 6-Figure 8, the both ends of the pendulum stick 6 are respectively equipped with turntable 61, handle 62, institute
It states and is equipped with piston rod opening 63 in turntable 61, the side of the piston rod opening 63 is equipped with pin hole 64, the piston rod 2
Traction end is equipped with towing pad 25, and the traction end is inserted into the piston rod opening 63, bolt sequentially pass through the pin hole 64,
The piston rod 2 is connect by towing pad 25 with the pendulum stick 6.
In preferred scheme, the lower end of the piston rod opening 63 can be using cylindrical circular hole, and upper end is hemispherical, pendulum
Stick 6 can rotate 90 degree to 61 open end of turntable around bolt, and piston rod 2 can upwards, downwards under the action of putting stick 6 and rotating
Movement.
In preferred scheme, stick 6 is put for ease of operation, and shown handle 62 can use the handle 62 of T-type structure.
In preferred scheme, gasket seal is equipped between the pendulum stick 6 and the piston cylinder 5.Gasket seal is for sealing
Put the gap between stick 6 and piston cylinder 5.
It further include reset spring, the groove of the piston rod 2 is fixed in one end of the reset spring in preferred scheme
Upper detent 24, the other end are fixed on the gasket seal.
Reset spring is pressurized between detent 24 on pendulum stick 6 and groove, and piston rod 2 is by downward power, when piston rod 2 is upward
When moving to a certain fixed position, reset spring is applied to the downward power of piston rod 2 and just puts down with the upward power that stick 6 applies is put
Weighing apparatus, piston rod 2 can keep stable.Piston rod 2 moves downward, reset spring tension between detent 24 on pendulum stick 6 and groove
Power effect, piston rod 2 is by upward power, and when piston rod 2 is moved downwardly to a certain fixed position, reset spring is applied to piston
The downward power that the upward pulling force of bar 2 applies with pendulum stick 6 just balances, and piston rod 2 keeps stablizing.
In preferred scheme, the upper surface of the piston cylinder 5 is additionally provided with the metal being moved forward and backward for limiting the pendulum stick 6
Platform 54.
64 center of pin hole to 5 upper surface of piston cylinder distance in the height and pendulum stick 6 of metal platform 54 is consistent, metal platform 54
Distance away from 5 upper piston rod sets of holes of piston cylinder, 51 center is inserted at a distance from pendulum 6 interface center of stick with pendulum 6 edge of stick far from piston rod 2
Equal, metal platform 54 can play the role of limitation pendulum stick 6 and be moved forward and backward.
In specific embodiment, when putting T-type 62 horizontal of handle of stick 6, the piston plug 21 of 2 lower end of piston rod is placed exactly in
13 top of cavity is calibrated, the outer diameter of piston plug 21 is (1~2) mm about bigger than the internal diameter for calibrating cavity 13, is open than piston cylinder 5 interior
About small (1~3) mm of diameter, at this moment piston plug 21 just blocks calibration 13 upper gas entrance of cavity, and calibration 13 lower part of cavity is adopted
It is close to corrector strip on sample hole 12, can thus forms the small cavity of a sealing in calibration cavity 13, piston cylinder 5 is open interior
Diameter is all about bigger than the outer diameter of 2 plug of internal diameter and piston rod of sampling cavity, and when piston plug 21 is below, gas can be stifled from piston
First 21 flow through with 5 inner wall gap of piston cylinder, so no matter before and after sampling or in sampling process, do not affect gas in pipeline
Flowing, therefore, there is no need to increase gas bypass line.
90 ° of the T-type handle of pendulum rotating stick 6, piston rod 2 is lifted up, and piston plug 21 moves up a certain distance, gas
Gas in body pipeline can flow in calibration cavity 13, displace the gas in calibration cavity 13, when sampling, will put stick 6
62 horizontal of T-type handle, piston plug 21 move down blocks calibration 13 upper end opening of cavity, a part of sample gas is sealed in calibration
Cavity 13 forms one small cavity sample, completes sampling.
In preferred scheme, thieff hatch 12 can be round hole, or square hole, in the present embodiment, and thieff hatch 12
Using round hole, for placing corrector strip, the two sides of 12 upper surface of thieff hatch are set respectively for the upper surface of the thieff hatch 12
There are the first slide plate 3 and the second slide plate 4, the front end of the front end of first slide plate 3 and second slide plate 4 is for compressing the school
The two sides of quasi- piece.
In specific embodiment, it is additionally provided with external gas pipe interface 14 on calibration chamber ontology, passes through external gas piping
Interface 14 connects air inlet pipeline, is filled with sample gas into the calibration cavity by air inlet pipeline.
The material of corrector strip is hard metal, and hard metal is suitble to the sampling of sampling needle Direct perforantes.Corrector strip can be not
Easily absorption steam metal, as stainless steel, the stainless steel of plating nickel on surface, the stainless steel of electroplate, surface gold-plating stainless steel
Deng, it is not possible to use copper or its alloy.
In preferred scheme, the calibration chamber ontology 11 is equipped with slide plate guide groove 18, the side of the slide plate guide groove 18
Wall and the angle on bottom edge are acute angle, and first slide plate 3 and the second slide plate 4 are set in the slide plate guide groove 18.This knot
In structure, after the first slide plate 3 and the second slide plate 4 are placed in slide plate guide groove 18, the first slide plate 3 and the second slide plate 4 can be along cunnings
Piece guide groove 18 is slided, can since the side wall of slide plate guide groove 18 and the angle on bottom edge are acute angle namely the two in ∠ type
To limit the first slide plate 3 and the second slide plate 4 in horizontal and vertical both direction, so that the first slide plate 3 and the second slide plate 4 are only capable of edge
The direction sliding that slide plate guide groove 18 extends, to guarantee that the first slide plate 3 and the second slide plate 4 can compress corrector strip.
In further embodiment, the two sides of first slide plate 3 and second slide plate 4 are equipped with the slide plate in ramped shaped
Lead angle.As shown in Fig. 9-Figure 14, the two sides of first slide plate 3 are equipped with the first slide plate lead angle 31 of ramped shaped, the second slide plate 4
Two sides be equipped with the second slide plate lead angle 41 in ramped shaped, the first slide plate lead angle 31 and the second slide plate lead angle 41 are oriented to slide plate
Cooperation is formed between the side wall of slot 18.
In preferred scheme, the front end of first slide plate 3 and second slide plate 4 is equipped with for compressing corrector strip
Corrector strip detent protrusion.As shown in Figure 9, Figure 10, the front end of the first slide plate 3 is equipped with the first corrector strip detent protrusion 32, the first school
The width of quasi- piece detent protrusion 32 is suitable with the width of corrector strip, and the first corrector strip detent protrusion 32 can be against the side of corrector strip
And compress the upper surface of corrector strip.As shown in Figure 12 and Figure 13, the front end of the second slide plate 4 is equipped with the second corrector strip detent protrusion 42,
The width of second corrector strip detent protrusion 42 is suitable with the width of corrector strip, and the second corrector strip detent protrusion 42 can be against corrector strip
Side and compress the upper surface of corrector strip.First corrector strip detent protrusion 32 and the second corrector strip detent protrusion 42 can both rise
Locating plate can be compressed again to positioning action.
It in preferred scheme, slides, can be equipped in the upper side of the second slide plate 4 more in order to facilitate the operation of the second slide plate 4
A antiskid groove 45 or anti-skid bulge, as shown in figure 12, the second slide plate 4 are equipped with 3 antiskid grooves 45.
In preferred scheme, the rear end of first slide plate 3 and second slide plate 4 is equipped with U-lag, such as Fig. 9, Figure 12
Shown, the rear end of the first slide plate 3 is equipped with the first U-lag 33.The rear end of second slide plate 4 is equipped with the second U-lag 43, in this way can be with
Convenient for the first slide plate 3 of operation and the second slide plate 4.
In preferred scheme, it is located in slide plate guide groove 14 on the calibration chamber ontology 1 and is equipped with the second hickey 16, even
It connects screw and is connected to second hickey 16 after the slide plate hickey 34 on first slide plate 3.First slide plate 3
It can be fixed on by the way of being fixedly connected in slide plate guide groove 14.
It is located in the slide plate guide groove 14 in preferred scheme, on the calibration chamber ontology 1 and is equipped with circular open 17, institute
It states and is sequentially installed with elastic component and hoodle in circular open 17 from bottom to top, elastic component can have telescopic bullet for spring etc.
Property part, the bottom side of second slide plate 4 is equipped with hoodle opening 44, when the hoodle opening 44 slides into the hoodle position, institute
Hoodle is stated to be stuck in the hoodle opening 44.Second slide plate 4 is fixed in slide plate guide groove 14 by the way of being slidably connected.
The position of circular open 17 is corresponding with the position of 4 bottom hoodle of the second slide plate opening 44 on calibration chamber ontology 1, circle
Spring is installed in 17 the inside of shape opening, and hoodle is placed above in spring, and gap is packed into sizeable O between hoodle and circular open 17
Type washer when needing to slide the second slide plate 4, firmly pins the second slide plate 4, and diaphragm flexures are pressurized under hoodle, shrinks inwards, hoodle
And then it is retracted in cavity, can thus horizontally slip the second slide plate 4, when the second slide plate 4, which slides into middle card, lives corrector strip,
Just against hoodle, the second slide plate 4 is withstood the hoodle opening 44 of second slide plate, 4 bottom by hoodle.First slide plate 3 and the second slide plate
4 when all sliding into the middle position of calibration chamber ontology 1, and putting for a square (or round) is just reserved among calibration chamber ontology 1
Set the position of corrector strip, the second corrector strip of the first corrector strip detent protrusion 32 and 4 front end of the second slide plate of 3 front end of the first slide plate
Detent protrusion 42 can just block corrector strip, and corrector strip smooth surface is installed on the sampling fixture of analysis instrument, can
To be in close contact with sampling fixture.
In preferred scheme, the upper surface of the thieff hatch 12 is equipped with circular groove 19, setting in the circular groove 19
There is third sealing ring, third sealing ring can be O-ring seal, and the corrector strip is placed in the upper end of the third sealing ring
Face, the first slide plate 3 and the second slide plate 4 compress corrector strip, and corrector strip is not leaked with third sealing ring, the close contact of calibration chamber ontology 1
Gas forms a sealing cavity.
In preferred scheme, the seamed edge of the calibration chamber ontology 1 is equipped with lead angle 110.Since calibration chamber ontology 1 is using stainless
Its seamed edge is arranged lead angle 110, can prevent from hurting, in preferred scheme, the angle of lead angle 110 can be 40- by the metal of steel
50°。
It is above that certain exemplary embodiments of the invention are only described by way of explanation, undoubtedly, for ability
The those of ordinary skill in domain without departing from the spirit and scope of the present invention can be with a variety of different modes to institute
The embodiment of description is modified.Therefore, above-mentioned attached drawing and description are regarded as illustrative in nature, and should not be construed as to the present invention
The limitation of claims.
Claims (10)
1. a kind of calibration chamber with small cavity, which is characterized in that including calibration chamber ontology, piston rod, piston cylinder and stick is put,
It is equipped with calibration cavity in the calibration chamber ontology, the two sides of the calibration chamber ontology are respectively equipped with equal to be connected to the calibration cavity
Thieff hatch and piston hole, for placing corrector strip, the piston cylinder is installed on the piston hole for the upper surface of the thieff hatch
Upper surface, the piston rod is sheathed in the piston hole and the piston cylinder, and the piston end of the piston rod is located at described
In piston hole, the pull rod traction end of the piston rod connects the pendulum stick, and the pendulum stick is for pulling the piston rod described in
Piston hole moves back and forth.
2. calibration chamber according to claim 1, which is characterized in that the diameter of the piston hole is greater than the calibration cavity
Diameter.
3. calibration chamber according to claim 1 or 2, which is characterized in that the piston end of the piston rod is equipped with piston plug,
The inside of the piston plug is equipped with detent under groove, detent on groove side by side, blocks on detent and the groove under the groove
The first sealed groove is formed between position, is equipped with the first sealing ring in the sealed groove.
4. calibration chamber according to any one of claim 1-3, which is characterized in that be equipped with side by side in the piston cylinder coaxial
Piston rod sets of holes and the second o-ring groove, second sealed groove axially aligned with the piston hole, described second is close
It seals and is equipped with the second sealing ring in groove.
5. calibration chamber described in any one of -4 according to claim 1, which is characterized in that the piston cylinder is fixed by screws in
On the calibration chamber ontology.
6. calibration chamber according to any one of claims 1-5, which is characterized in that one end of the pendulum stick is equipped with rotation
Platform, the interior piston rod that is equipped with of the turntable are open, and the side of the piston rod opening is equipped with pin hole, the traction of the piston rod
End is equipped with towing pad, and the piston rod sequentially passes through the pin hole and the towing pad company by bolt with the pendulum stick
It connects.
7. calibration chamber according to claim 1 to 6, which is characterized in that between the pendulum stick and the piston cylinder
Equipped with gasket seal.
8. the calibration chamber according to any one of claim 3-7, which is characterized in that it further include reset spring, the reset
Detent on the groove is fixed in one end of spring, and the other end is fixed on the gasket seal.
9. calibration chamber according to claim 1 to 8, which is characterized in that the upper surface of the piston cylinder is additionally provided with
The metal platform being moved forward and backward for limiting the pendulum stick.
10. calibration chamber according to claim 1 to 9, which is characterized in that the two sides of the thieff hatch upper surface
It is respectively equipped with the first slide plate and the second slide plate, the front end of the front end of first slide plate and second slide plate is described for compressing
The two sides of corrector strip.
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| CN201811054285.1A CN109060462A (en) | 2018-09-10 | 2018-09-10 | A kind of calibration chamber with small cavity |
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| CN201811054285.1A CN109060462A (en) | 2018-09-10 | 2018-09-10 | A kind of calibration chamber with small cavity |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114034524A (en) * | 2021-10-21 | 2022-02-11 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Sample gas sampling device and gas-tight seal component internal atmosphere analysis equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114034524A (en) * | 2021-10-21 | 2022-02-11 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Sample gas sampling device and gas-tight seal component internal atmosphere analysis equipment |
| CN114034524B (en) * | 2021-10-21 | 2023-09-01 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Sample gas sampling device and gas-tight seal component internal atmosphere analysis equipment |
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