CN109059743A - A kind of workbench flatness detecting device - Google Patents
A kind of workbench flatness detecting device Download PDFInfo
- Publication number
- CN109059743A CN109059743A CN201811225309.5A CN201811225309A CN109059743A CN 109059743 A CN109059743 A CN 109059743A CN 201811225309 A CN201811225309 A CN 201811225309A CN 109059743 A CN109059743 A CN 109059743A
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- plate
- screw rod
- fixed
- movable plate
- sliding rail
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention discloses a kind of workbench flatness detecting devices, including plate, plate upper center is equipped with mutually perpendicular horizontal tube one and horizontal tube two, four corners of plate lower end and the midpoint of long side are equipped with the screw rod being threadedly coupled, the two sides lower end of plate is fixed with decelerating motor one and bearing block one, the output end of decelerating motor one is equipped with screw rod one, screw rod one is overlapped with the axis of symmetry in slab length direction, one two sides of screw rod are equipped with sliding rail one in parallel, one upper end of sliding rail is equipped with pillar, pillar is fixed on the lower end surface of plate, screw rod one, which is equipped with, is threadedly coupled movable plate one, the both ends of movable plate one are respectively fixed with decelerating motor two and bearing block two, the output end of decelerating motor two is equipped with screw rod two, screw rod two is equipped with the movable plate two being threadedly coupled, two lower end of movable plate is equipped with detection device, the present apparatus utilizes one He of decelerating motor The horizontal direction that decelerating motor two controls detection device is mobile, and by centimeter check flatness, operating method is simple, and detection accuracy is high.
Description
Technical field
The invention belongs to numer centre technical fields, and in particular to a kind of workbench flatness detecting device.
Background technique
The flatness of workbench working face is to measure the main precision index of workbench quality, existing numer centre workbench
The detection of flatness, usually artificial to be detected using level meter or the adjustable bridge plate of straightness detection, detection accuracy is lower, grasps
Make that cumbersome, working efficiency is low, has not adapted to the batch production demand of the numer centre workbench compared with high-flatness requirement.
Summary of the invention
According to the above-mentioned deficiencies of the prior art, the technical problem to be solved by the present invention is to propose a kind of work table flatness
Detection device, to solve the above-mentioned many defects caused by the prior art.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention are as follows: a kind of workbench flatness detecting device,
Including plate, the plate upper center be equipped with mutually perpendicular horizontal tube one and horizontal tube two, four of the plate lower end
The midpoint of corner and long side is equipped with the screw rod being threadedly coupled, and the screw rod lower end is equipped with supporting pad, the two sides of the plate
Lower end is fixed with decelerating motor one and bearing block one, and the output end of the decelerating motor one is equipped with screw rod one, and the screw rod is one by one
End is fixed in the inner ring of bearing block one, and the screw rod one is overlapped with the axis of symmetry in slab length direction, one liang of the screw rod
Side is equipped with sliding rail one in parallel, and one upper end of sliding rail is equipped with pillar, and the pillar is fixed on the lower end surface of plate, the screw rod one
It is equipped with and is threadedly coupled movable plate one, both ends and the sliding rail one of the movable plate one are slidably connected, the both ends of the movable plate one
Be respectively fixed with decelerating motor two and bearing block two, the output end of the decelerating motor two is equipped with screw rod two, the screw rod two with
One direction of screw rod is vertical, and described two one end of screw rod is fixed in the inner ring of bearing block two, and two two sides of screw rod are equipped with cunning in parallel
Rail two, the sliding rail two are fixed on the lower end surface of movable plate two, and the screw rod two is equipped with the movable plate two being threadedly coupled, described
Movable plate two is slidably connected with sliding rail two, and two lower end of movable plate is equipped with detection device.
Preferably, the detection device includes push-rod electric machine, guide rod, supporting plate, limited block, clamp arm, bolt two, bolt three
And dial gauge, the push-rod electric machine and guide rod are fixed on two lower end surface of movable plate side by side, the supporting plate is fixed on push-rod electric machine
Push rod front end, the supporting plate is slidably connected with guide rod, and the limited block is located at supporting plate lower end and socket on the guide bar, institute
It is fixed on the guide bar by bolt two to state limited block, the clamp arm is fixed on supporting plate lower end surface, and the head of the dial gauge is logical
Bolt three is crossed to be fixed at clamp arm lower ending opening.
Preferably, the struts number of one upper end of sliding rail is at least 4 and is equally spaced along one length direction of sliding rail.
Preferably, the plate upper end is equipped with multiple reinforcing ribs, and the reinforcing rib is fixed on plate upper end by bolt one
Face, the reinforcing rib is parallel with slab length direction, and the length of the reinforcing rib is greater than the half length of plate, the reinforcing rib
Pass through the central axes in slab length direction, the reinforcing rib is alternately distributed in plate upper surface.
Preferably, the screw rod is equipped with the bolt four being threadedly coupled.
Preferably, the lower end of the movable plate two is fixed with spring, and the other end and the supporting plate of the spring are fixed.
Preferably, plate upper end two sides are equipped with hanging ring.
Preferably, the supporting pad is made of rubber material.
The medicine have the advantages that
1. controlling the movement of detection device by decelerating motor one and decelerating motor two, detection efficiency is high, by by plate
The level of being first adjusted to controls detection device again and is moved, the horizontality for keeping detection device mobile, when table surface is not flat,
The registration that detection device detects when mobile is different, and testing principle is simple, and precision is high.
2. avoiding the bending in the middle part of plate by setting reinforcing rib, plate is made to keep good flatness, by using
Multiple pillar fixed racks one make sliding rail one and platen parallel and keep good straightness, improve detection device along sliding rail one
Levelness when mobile improves the detection accuracy to workbench.
3. screw rod will not be because of decelerating motor one and deceleration after so that plate is adjusted to level by setting bolt four come standing screw
The work of motor two and loosen, ensure that detection accuracy, make that dial gauge is gentle to be fallen on work top by the way that spring is arranged,
The service life of effective protection dial gauge comes the surface of effective protection workbench by using supporting pad made of rubber material.
Detailed description of the invention
Content expressed by this specification attached drawing and the label in figure are briefly described below:
Fig. 1 is specific structure front view of the invention.
Fig. 2 is structure of the detecting device schematic diagram of the invention.
Fig. 3 is specific structure top view of the invention.
Fig. 4 is specific structure bottom view of the invention.
Fig. 5 is one schematic diagram of movable plate one and sliding rail of the invention.
Fig. 6 is detection device motion track schematic diagram of the invention.
Wherein 1- plate, 2- hanging ring, 3- reinforcing rib, 4- bolt one, 5- horizontal tube one, 6- horizontal tube two, 7- bearing block one,
8- screw rod one, 9- sliding rail one, 10- supporting pad, 11- decelerating motor two, 12- movable plate one, 13- decelerating motor one, 14- sliding rail
Two, 15- screw rod two, 16- bearing block two, 17- bolt two, 18- limited block, 19- guide rod, 20- push-rod electric machine, 21- clamp arm,
22- dial gauge, 23- supporting plate, 24- movable plate two, 25- spring, 26- bolt three, 27- screw rod, 28- pillar, 29- detection device,
30- bolt four.
Specific embodiment
Below by the description to embodiment, the shape of for example related each component of a specific embodiment of the invention, structure
It makes, the mutual alignment between each section and connection relationship, the effect of each section and working principle, manufacturing process and the side of operating with
Method etc., is described in further detail, completeer to help those skilled in the art to have inventive concept of the invention, technical solution
Whole, accurate and deep understanding, the direction and position term that the present invention is previously mentioned, such as "upper", " in ", "lower", " preceding ", "
Afterwards ", "left", "right", "inner", "outside", " side " etc. are only direction and position with reference to annexed drawings, therefore, the direction used
It is to illustrate and understand the present invention, rather than to limit the present invention with position term.
Fig. 1-6 illustrates a kind of workbench flatness detecting device, including plate 1, and 1 upper center of plate is equipped with mutual
Perpendicular horizontal tube 1 and horizontal tube 26, four corners of 1 lower end of plate and the midpoint of long side are equipped with screw thread
The screw rod 27 of connection, 27 lower end of screw rod are equipped with supporting pad 10, and the two sides lower end of the plate 1 is fixed with decelerating motor 1
It is equipped with screw rod 1 with the output end of bearing block 1, the decelerating motor 1, described one 8 one end of screw rod is fixed on bearing block one
In 7 inner ring, the screw rod 1 is overlapped with the axis of symmetry of 1 length direction of plate, and one 8 two sides of screw rod are equipped with cunning in parallel
Rail 1, one 9 upper end of sliding rail are equipped with pillar 28, and the pillar 28 is fixed on the lower end surface of plate 1, sets on the screw rod 1
Having and is threadedly coupled movable plate 1, both ends and the sliding rail 1 of the movable plate 1 are slidably connected, and the two of the movable plate 1
End is respectively fixed with decelerating motor 2 11 and bearing block 2 16, and the output end of the decelerating motor 2 11 is equipped with screw rod 2 15, institute
State that screw rod 2 15 is vertical with one 8 direction of screw rod, described 2 15 one end of screw rod is fixed in the inner ring of bearing block 2 16, the screw rod
2 15 two sides are equipped with sliding rail 2 14 in parallel, and the sliding rail 2 14 is fixed on the lower end surface of movable plate 2 24, on the screw rod 2 15
Movable plate 2 24 equipped with threaded connection, the movable plate 2 24 are slidably connected with sliding rail 2 14,2 24 lower end of movable plate
Equipped with detection device 29.
In the present embodiment, the detection device 29 includes push-rod electric machine 20, guide rod 19, supporting plate 23, limited block 18, clamp arm
21, bolt 2 17, bolt 3 26 and dial gauge 22, the push-rod electric machine 20 and guide rod 19 are fixed on side by side under movable plate 2 24
End face, the supporting plate 23 are fixed on the push rod front end of push-rod electric machine 20, and the supporting plate 23 is slidably connected with guide rod 19, the limit
Position block 18 is located at 23 lower end of supporting plate and is socketed on guide rod 19, and the limited block 18 is fixed on guide rod 19 by bolt 2 17
On, the clamp arm 21 is fixed on 23 lower end surface of supporting plate, and the head of the dial gauge 22 is fixed under clamp arm 21 by bolt 3 26
At end opening.
In the present embodiment, 28 quantity of pillar of one 9 upper end of sliding rail is at least 4 and along one 9 length direction of sliding rail
It is equally spaced, one 9 length of sliding rail is longer, to avoid middle bent from influencing the mobile and horizontal degree of detection device 29, using multiple vertical
Column is fixedly connected with plate 1, keeps the good straightness of sliding rail 1, movable plate 1 is made to keep water when moving along sliding rail 1
Flat line is mobile, improves the detection accuracy of detection device 29.
In the present embodiment, 1 upper end of plate is equipped with multiple reinforcing ribs 3, and the reinforcing rib 3 is fixed on by bolt 1
1 upper surface of plate, the reinforcing rib 3 is parallel with 1 length direction of plate, and the half that the length of the reinforcing rib 3 is greater than plate 1 is long
Degree, the reinforcing rib 3 pass through the central axes of 1 length direction of plate, and the reinforcing rib 3 is alternately distributed in 1 upper surface of plate, puts down
The levelness of plate 1 is the key that guarantee that detection device 29 moves horizontally, and the middle part of plate 1 is easy to be bent downwardly, detection device 29
It is integrally moved down when being moved to 1 middle part of plate, 1 middle part of plate is fixedly connected by reinforcing rib 3 with both ends, reduces 1 middle part of plate
Downward bending degree guarantees the higher detection accuracy of detection device 29.
In the present embodiment, the screw rod 27 is equipped with the bolt 4 30 being threadedly coupled, and after 1 horizontal adjustment of plate, turns
Dynamic bolt 4 30 pushes against bolt 4 30 and 1 lower end surface of plate, when decelerating motor 1 and decelerating motor 2 11 work, uses spiral shell
4 30 standing screw 27 of bolt avoids screw rod 27 that the levelness that nature loosens and changes plate 1 occurs, and detection is made to generate error.
In the present embodiment, the lower end of the movable plate 2 24 is fixed with spring 25, the other end and supporting plate of the spring 25
23 is fixed, and spring 25 reduces the speed that supporting plate 23 declines, make dial gauge 22 it is gentle with table face contact, avoid speed mistake
Fastly 22 pointer of dial gauge is caused to damage.
In the present embodiment, the 1 upper end two sides of plate are equipped with hanging ring 2, and the present apparatus is hung work by hanging ring 2 with driving
It is time saving and energy saving on platform.
In the present embodiment, the supporting pad 10 is made of rubber material, and the surface of workbench is protected not to be scratched.
Based on a kind of above-mentioned, of the invention workbench flatness detecting device, the application method of the present apparatus are as follows: lathe is placed
After level, the hanging ring 2 at 1 both ends of plate is hung with the suspension hook of driving, the present apparatus is hung on the workbench of lathe, is made under plate 1
It holds the supporting pad 10 at four turnings to be located at four turnings of workbench upper surface, makes screw rod 1 and workbench length direction
It is substantially parallel, the horizontal tube 1 of 1 upper surface of plate and the registration of horizontal tube 26 are observed, horizontal tube 1 is for detecting 1 liang of plate
The difference in height at end, horizontal tube 26 are used to detect the difference in height of the front and back of plate 1, rotate the screw rod 27 of higher side, make screw rod 27 to
The mobile height to reduce the side in 1 direction of plate, when the registration of horizontal tube 1 and horizontal tube 26 is in a horizontal position, rotation
The bolt 4 30 of 1 four corners in lower end of plate is raised above bolt 4 30 and pushes against with 1 lower end surface of plate, and 4 30 pairs of bolt
Screw rod 27 plays fixed function, and when preventing detection device 29 from being moved, the level that nature rotates and leads to plate 1 occurs for screw rod 27
After degree change, the leveling of plate 1 and screw rod 27 are fixed, the screw rod 27 at 1 middle part of pivotal plate makes the branch of 27 lower end of screw rod at middle part
Stake pad 10 is slightly pushed against with work top, and the screw rod 27 at middle part plays a supportive role, and the screw rod 27 of four corners plays Level tune
Effect, the screw rod 27 at middle part avoid middle bent and influence detection accuracy to being supported in the middle part of plate 1, and plate 1 completes leveling
Afterwards, control decelerating motor 2 11 rotates, and decelerating motor 2 11 drives screw rod 2 15 to rotate, and screw rod 2 15 drives 2 24 edge of movable plate
2 15 length direction of screw rod it is mobile, 2 14 pairs of movable plates 2 24 of sliding rail play the guiding role, 2 24 band motion detection device of movable plate
29 move along workbench short side direction, and control decelerating motor 1 rotates, and decelerating motor 1 drives screw rod 1 to rotate, silk
Bar 1 drives movable plate 1 to move along one 8 length direction of screw rod, and mobile edition one and movable plate 2 24 are moved respectively to most
Close to one end of decelerating motor 1 and decelerating motor 2 11, the push rod of control push-rod electric machine 20 is released downwards, makes 23 edge of supporting plate
19 falls downward of guide rod, supporting plate 23 decline dial gauge 22, when 23 lower end of supporting plate and limited block 18 contact, dial gauge 22
Stop decline, limited block 18 is socketed in blending bolt 2 17 on guide rod 19 and compresses, adjusts the height of limited block 18, make dial gauge
After 22 whereabouts stop, pointer is contacted with work top and dial gauge 22 shows certain registration, and 22 registration of dial gauge is preferably 10-15
Lattice, control decelerating motor 1 rotate, and move movable plate 1 along one 8 length direction of screw rod, detection device 29
22 pointer of dial gauge is moved along workbench length direction, is recorded dial gauge 22 from workbench one end and is moved to the other end
Registration bounce, when detection device 29 is moved to the workbench other end, the push rod of control push-rod electric machine 20 is withdrawn, and makes dial gauge 22
Pointer lifted from table surface, control decelerating motor 2 11 rotate, move detection device 29 along workbench short side
It stops after certain distance, the push rod for controlling push-rod electric machine 20 again stretches out, and makes dial gauge 22 and table face contact and shows
Certain registration, for dial gauge 22 during close to table surface, supporting plate 23 elongates spring 25, the pulling force that supporting plate 23 receives
It incrementally increases, for dial gauge 22 closer to work top, the pulling force that supporting plate 23 receives is bigger, and the pulling force of spring 25 makes under dial gauge 22
Reduction of speed degree slows down, and makes the pointer of dial gauge 22 smoothly with table face contact, the push rod of push-rod electric machine 20 is avoided to stretch out speed
Fast, the pointer of damage dial gauge 22 is spent, after dial gauge 22 contacts again with work top, control decelerating motor 1 is inverted,
Decelerating motor 1 controls movable plate 1 and moves along one 8 length direction of screw rod, records 22 registration of dial gauge in moving process
Jitter values, according to the above method control detection device 29 table surface is detected by zigzag path, according to hundred after detection
Divide the bounce of 22 registration of table to judge the flatness of workbench, after the present apparatus levels plate 1, utilizes decelerating motor 1
The horizontal direction for controlling detection device 29 with decelerating motor 2 11 is mobile, detects workbench by the registration bounce of dial gauge 22
Flatness, operating method is simple, and detection accuracy is high.
The present invention is exemplarily described above, it is clear that present invention specific implementation is not subject to the restrictions described above,
As long as using the improvement for the various unsubstantialities that the inventive concept and technical scheme of the present invention carry out, or not improved this is sent out
Bright conception and technical scheme directly apply to other occasions, within the scope of the present invention.Protection of the invention
Range should be determined by the scope of protection defined in the claims.
Claims (8)
1. a kind of workbench flatness detecting device, which is characterized in that including plate (1), plate (1) upper center is equipped with
Mutually perpendicular horizontal tube one (5) and horizontal tube two (6), four corners of plate (1) lower end and the midpoint of long side
Screw rod (27) equipped with threaded connection, screw rod (27) lower end are equipped with supporting pad (10), and the two sides lower end of the plate (1) is solid
Surely there are decelerating motor one (13) and bearing block one (7), the output end of the decelerating motor one (13) is equipped with screw rod one (8), described
Screw rod one (8) one end is fixed in the inner ring of bearing block one (7), the symmetry axis of the screw rod one (8) and plate (1) length direction
Line is overlapped, and screw rod one (8) two sides are equipped with sliding rail one (9) in parallel, and sliding rail one (9) upper end is equipped with pillar (28), described
Pillar (28) is fixed on the lower end surface of plate (1), and the screw rod one (8), which is equipped with, is threadedly coupled movable plate one (12), the shifting
The both ends of movable plate one (12) are slidably connected with sliding rail one (9), and the both ends of the movable plate one (12) are respectively fixed with decelerating motor
The output end of two (11) and bearing block two (16), the decelerating motor two (11) is equipped with screw rod two (15), the screw rod two (15)
Vertical with screw rod one (8) direction, described screw rod two (15) one end is fixed in the inner ring of bearing block two (16), the screw rod two
(15) two sides are equipped with sliding rail two (14) in parallel, and the sliding rail two (14) is fixed on the lower end surface of movable plate two (24), the screw rod
Two (15) are equipped with the movable plate two (24) being threadedly coupled, and the movable plate two (24) is slidably connected with sliding rail two (14), described
Movable plate two (24) lower end is equipped with detection device (29).
2. workbench flatness detecting device according to claim 1, which is characterized in that the detection device (29) includes
Push-rod electric machine (20), guide rod (19), supporting plate (23), limited block (18), clamp arm (21), bolt two (17), bolt three (26) and
Dial gauge (22), the push-rod electric machine (20) and guide rod (19) are fixed on movable plate two (24) lower end surface, the supporting plate side by side
(23) it is fixed on the push rod front end of push-rod electric machine (20), the supporting plate (23) is slidably connected with guide rod (19), the limited block
(18) it is located at supporting plate (23) lower end and is socketed on guide rod (19), the limited block (18) is fixed on by bolt two (17) and is led
To on bar (19), the clamp arm (21) is fixed on supporting plate (23) lower end surface, and the head of the dial gauge (22) passes through bolt three
(26) it is fixed at clamp arm (21) lower ending opening.
3. workbench flatness detecting device according to claim 1, which is characterized in that sliding rail one (9) upper end
Pillar (28) quantity is at least 4 and is equally spaced along sliding rail one (9) length direction.
4. workbench flatness detecting device according to claim 1, which is characterized in that plate (1) upper end is equipped with
Multiple reinforcing ribs (3), the reinforcing rib (3) are fixed on plate (1) upper surface by bolt one (4), the reinforcing rib (3) and flat
Plate (1) length direction is parallel, and the length of the reinforcing rib (3) is greater than the half length of plate (1), and the reinforcing rib (3) passes through
The central axes of plate (1) length direction are crossed, the reinforcing rib (3) is alternately distributed in plate (1) upper surface.
5. workbench flatness detecting device according to claim 1, which is characterized in that the screw rod (27) is equipped with spiral shell
The bolt four (30) of line connection.
6. workbench flatness detecting device according to claim 1 or 2, which is characterized in that the movable plate two (24)
Lower end be fixed with spring (25), the other end of the spring (25) and supporting plate (23) are fixed.
7. workbench flatness detecting device according to claim 1, which is characterized in that plate (1) the upper end two sides
Equipped with hanging ring (2).
8. workbench flatness detecting device according to claim 1, which is characterized in that the supporting pad (10) is rubber
Material is made.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201811225309.5A CN109059743A (en) | 2018-10-20 | 2018-10-20 | A kind of workbench flatness detecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201811225309.5A CN109059743A (en) | 2018-10-20 | 2018-10-20 | A kind of workbench flatness detecting device |
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CN109059743A true CN109059743A (en) | 2018-12-21 |
Family
ID=64765090
Family Applications (1)
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CN201811225309.5A Pending CN109059743A (en) | 2018-10-20 | 2018-10-20 | A kind of workbench flatness detecting device |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109894613A (en) * | 2019-03-21 | 2019-06-18 | 大族激光科技产业集团股份有限公司 | A kind of 3D printer bottom plate levelling device and method |
CN110207580A (en) * | 2019-07-09 | 2019-09-06 | 东阳罗素电子科技有限公司 | A kind of degree of plainness for wall surface detection device |
CN110375627A (en) * | 2019-08-26 | 2019-10-25 | 付国军 | A kind of flatness detection device |
CN111424509A (en) * | 2020-04-27 | 2020-07-17 | 张宏伟 | Asphalt pavement flatness detection device |
CN113483637A (en) * | 2021-08-06 | 2021-10-08 | 上海菲利华石创科技有限公司 | Temporary rapid detection device and method for thick quartz plate groove for semiconductor |
Citations (2)
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CN107389023A (en) * | 2017-07-18 | 2017-11-24 | 中国计量大学 | A kind of computer host box roughness detection equipments |
CN207351962U (en) * | 2017-09-07 | 2018-05-11 | 嘉兴小出钢管有限公司 | A kind of steel pipe automatic detection device |
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2018
- 2018-10-20 CN CN201811225309.5A patent/CN109059743A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107389023A (en) * | 2017-07-18 | 2017-11-24 | 中国计量大学 | A kind of computer host box roughness detection equipments |
CN207351962U (en) * | 2017-09-07 | 2018-05-11 | 嘉兴小出钢管有限公司 | A kind of steel pipe automatic detection device |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109894613A (en) * | 2019-03-21 | 2019-06-18 | 大族激光科技产业集团股份有限公司 | A kind of 3D printer bottom plate levelling device and method |
CN110207580A (en) * | 2019-07-09 | 2019-09-06 | 东阳罗素电子科技有限公司 | A kind of degree of plainness for wall surface detection device |
CN110375627A (en) * | 2019-08-26 | 2019-10-25 | 付国军 | A kind of flatness detection device |
CN110375627B (en) * | 2019-08-26 | 2020-12-11 | 无锡杰尔维科技有限公司 | Flatness detection equipment |
CN111424509A (en) * | 2020-04-27 | 2020-07-17 | 张宏伟 | Asphalt pavement flatness detection device |
CN111424509B (en) * | 2020-04-27 | 2021-08-10 | 张宏伟 | Asphalt pavement flatness detection device |
CN113483637A (en) * | 2021-08-06 | 2021-10-08 | 上海菲利华石创科技有限公司 | Temporary rapid detection device and method for thick quartz plate groove for semiconductor |
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