CN109030404A - A kind of scattering formula Terahertz near-field microscope based on radio-frequency electronics method - Google Patents
A kind of scattering formula Terahertz near-field microscope based on radio-frequency electronics method Download PDFInfo
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Abstract
A kind of scattering formula Terahertz near-field microscope based on radio-frequency electronics method, which includes first part: the first radio frequency seed source, the first power splitter, the first frequency multiplier, directional coupler；Second part: the second radio frequency seed source, the second power splitter, the second frequency multiplier, frequency mixer；And paraboloidal mirror, piezoelectric ceramics, nanoscale curvature probe, sample, RF mixer, third frequency multiplier, intermediate frequency mixer, lock-in amplifier, signal generator, computer, guide laser and reflex reflector lens.The present invention provides local oscillation signal by radio frequency frequency mixing technique, then noise reduction is filtered to the intermediate-freuqncy signal of frequency mixer output, then will extract near field wave using Phase Lock Technique, to effectively obtain the information of sample to be tested.Simultaneously the present invention also have the characteristics that it is compact-sized it is simple, easy to operate, detection efficient is high, stability is high, strong operability, the extraction work of the amplitude and phase of near field THz weak scattering signal can be completed.
Description
Technical field
The present invention relates to Terahertz (THz) detection and applied technical fields, in particular to a kind of to be based on radio-frequency electronics side
The Terahertz near-field microscope of method.
Background technique
THz wave is a kind of wavelength between 30 μm -3000 μm of electromagnetic radiation, and due to its Low emissivity, penetrability is strong, Yi Yusheng
Object or semiconductor material generate the special optical properties such as resonance, have been widely used in solid state physics and biologic material
Research in.Since its wavelength is in micron dimension, according to classical optics Rayleigh criterion, spectrometer institute in far field is attainable
Optimum resolution will not be better than half wavelength.So studying Nanosemiconductor Device or biomolecule in nanoscale to reach
Purpose, need to research and develop a kind of near-field microscope and get around Rayleigh diffraction limit, spatial resolution is expanded into nanometer scale.
Scattering formula THz near-field scan microscope (THz-SNOM) is the master that THz spectral investigation is carried out under current nanoscale
Want tool, and the research hotspot in international forward position.The huge technical problem that THz-SNOM faces at present is exactly to need to borrow
Help the radiation source of powerful to be pumped, to reach enhancing near field electric filed enhanced effect.In general, being based on optics side
The power of the THz radiation source of method is difficult to meet needs, and the THz source power of electronics frequency multiplication is able to satisfy this generally in milliwatt
The needs of item equipment.It is the THz how effectively to emit source that THz-SNOM based on electronics, which needs the main problem solved,
Wave focuses near field range, is then received back again to be handled.To solve this problem, this invention pointedly devises one
Scattering formula Terahertz near-field microscope of the kind based on radio-frequency electronics method, the structure designed through the invention can be effective
Effectiveness is also improved while transmitting and reception signal, there is very big application potential.
Summary of the invention
In order to overcome the bottleneck problem of existing near-field microscope technology encountered, the present invention provides one kind to be based on radio frequency electrical
The scattering formula Terahertz near-field microscope of sub- method, pointedly solves the problems, such as underpower in optics THz system, together
When experiment in signal transmission largely realize waveguide transmission, to solve, pump power is not high and transmission loss mistake
Big problem provides new approach for the technology realization of THz near-field microscope.
To realize the above-mentioned technical purpose, the specific technical solution that the present invention uses are as follows: one kind is based on radio-frequency electronics side
The scattering formula Terahertz near-field microscope of method, including first part: the first radio frequency seed source 1, the first power splitter 3, the first frequency multiplication
Device 5, directional coupler 7；Second part: the second radio frequency seed source 2, the second power splitter 4, the second frequency multiplier 6, frequency mixer 8；And
Paraboloidal mirror 9, piezoelectric ceramics 10, nanoscale curvature probe 11, sample 12, RF mixer 13, third frequency multiplier 14, intermediate frequency are mixed
Frequency device 15, lock-in amplifier 16, signal generator 17, computer 18, guide laser 19, reflex reflector lens 20.In first part
First radio frequency seed source 1 is connected with the end a of the first power splitter 3, the end b of the first power splitter 3 and the end a phase of RF mixer 13
Even, the end c of the first power splitter 3 is connected with the first frequency multiplier 5, and the first frequency multiplier 5 is connected with directional coupler 7；In second part
Second radio frequency seed source 2 is connected with the end a of the second power splitter 4, the end b of the second power splitter 4 and the end the b phase of RF mixer 13
Even, the end c of the second power splitter 4 is connected with the second frequency multiplier 6, and the second frequency multiplier 6 is connected with the end a of frequency mixer 8, the b of frequency mixer 8
End is connected with directional coupler 7, and the end c of frequency mixer 8 is connected with intermediate frequency mixer 15.The end c of RF mixer 13 and third times
Frequency device 14 is connected, and third frequency multiplier 14 is connected with intermediate frequency mixer 15, and intermediate frequency mixer 15 is connected with lock-in amplifier 16, locking phase
Amplifier 16 is connected with signal generator 17, and signal generator 17 is connected with the piezoelectric ceramics 10 on probe, and nanoscale curvature is visited
Needle 11 actuates lower carry out high-frequency vibration in piezoelectric ceramics 10, and computer 18 receives and processes the letter that lock-in amplifier 16 is disposed
Number.
The exportable frequency of radio frequency seed source is the signal of ghz band, is carried out using frequency multiplier to its output signal
One or many frequencys multiplication, to obtain the signal of desired THz frequency range.
The power splitter is power splitter, the output signal of radio frequency seed source can be divided into two-way.
The frequency of input signal can be carried out frequency multiplication by the frequency multiplier, then export frequency-doubled signal.
Signal after frequency multiplication can be coupled and be emitted to free space by wave guide outlet by the directional coupler, then
And thus output port receive emitted by free space or be scattered back Lai signal, and the signal fed back is transferred to third
Output end.
The signal of two input terminals can be mixed by the frequency mixer, then by the upper change after three-polar output mixing
Frequency or down-conversion signal.
The paraboloidal mirror is gold-plated large scale paraboloidal mirror, completes convergence and the near field of the THz light beam of coupler transmitting
Scatter the reception of THz wave.
The piezoelectric ceramics can actuate probe and carry out high-frequency vibration with nanoscale amplitude.
The nanoscale needle point can be accurately performed the nanoscale operation to probe by controller, pass through the vibration of probe
It is dynamic the near field wave for carrying sample message is scattered into far field to receive.
The RF mixer is high-frequency mixer, the signal of two radio frequency seed sources can be mixed.
Two intermediate-freuqncy signals of input can be mixed by the intermediate frequency mixer.
The lock-in amplifier can be calculated by locking phase extract from the scattered signal that intermediate frequency mixer exports containing
Sample message.
The guide laser can issue macroscopic laser, by adjusting its optical path and THz light propagation optical path is made
It coincides, can indicate building for THz optical path well.
The reflex reflector lens are special eyeglasses, can be transmitted through most THz light of eyeglass, while being reflected by it
The visible guide laser on surface.
The scattering formula Terahertz near-field microscope working principle of radio-frequency electronics method is described as follows: in first part
The signal that one radio frequency seed source 1 issues is divided by the first power splitter 3 for two-way, the first frequency multiplier 5 is connected to all the way, by its frequency multiplication
After be transferred to directional coupler 7 and launch by its waveguide mouth, another way signal is transferred in RF mixer 13；Second
The signal that the second radio frequency seed source 2 issues in part is divided by the second power splitter 4 for two-way, and signal is transferred to RF mixer all the way
In 13, another way is connected to the second frequency multiplier 6, is transferred in frequency mixer 8 after its frequency multiplication.The waveguide mouth of directional coupler 7
The THz wave of sending is irradiated to the nano-probe 11 of the high-frequency vibration driven by piezoelectric ceramics 10 after the convergence of off axis paraboloidal mirror 9
On, the very weak THz light of the back scattering of the probe tip containing sample message is then received by off axis paraboloidal mirror 9 again
Beam, and by its retroeflection into directional coupler 7, received retroreflective signs are transferred to second part by subsequent directional coupler 7
In frequency mixer 8；The output signal of another aspect RF mixer 13 is transferred to third frequency multiplier 14, and is sent to after its frequency multiplication
In intermediate frequency mixer 15, the subsequent signal is mixed with the input of the other end of intermediate frequency mixer 15, and the signal after being then mixed is sent
It handles and is transmitted in computer 18 into lock-in amplifier 16, the amplitude and phase letter of tested sample finally just can be obtained
Breath, the i.e. electromagnetic information in THz wave band.In the present invention, the eyeglass 20 that shines can be anti-while the THz wave of the transmission overwhelming majority
Penetrate the light of the sending of guide laser 19.The light that guide laser 19 issues is macroscopic light, passes through the work for the eyeglass 20 that shines
With can will be seen that optical path is adjusted to be overlapped optical path with THz optical path, play the role of good guide, provided very for optical path adjusting
Big convenience.
The present invention controls nanoscopic tips 11 and lock-in amplifier by the two-way synchronism output of signal generator 17 simultaneously
The input of 16 reference signals realizes the synchronous of signal and extracts, can accurately obtain the electromagnetic wave that probe near-field region inspires
Entrained sample message has thus achieved the purpose that high efficiency, high quality, low the operation difficulty detection of THz near-field signals.
Beneficial effects of the present invention:
1, compact-sized, it is easy vanning encapsulation, also greatly optimizes the detection road of near-field scattering signal, improves system spy
Survey efficiency；
2, using the source THz of radio-frequency electronics, while substantially increasing transmitting source power, system dress is also simplified
It sets, provides convenience condition for its commercialization；
3, system stability is improved, relative to the free space optical path in optics THz-SNOM, the present invention, which has used for reference, to be penetrated
The closed waveguide of frequency circuit has effectively completely cut off the interference of external environment, has substantially increased system stability as communication media.
4, the present invention is combined using multiple technologies, including the amplification of radio-frequency technique, intermediate frequency filtering technology, modulation technique, locking phase
Technology etc. has sufficiently merged the advantage of various technologies.Local oscillation signal is provided by radio frequency frequency mixing technique, then frequency mixer is exported
Intermediate-freuqncy signal be filtered noise reduction, then near field wave will be extracted using Phase Lock Technique, to effectively obtain to test sample
The information of product.
To sum up, the present invention be have it is compact-sized it is simple, easy to operate, detection efficient is high, stability is high, strong operability
The features such as, the extraction work of the amplitude and phase of near field THz weak scattering signal can be completed.
Detailed description of the invention
A kind of scattering formula Terahertz near-field microscope system diagram based on radio-frequency electronics method Fig. 1 of the invention.
1. the first radio frequency seed source；2. the second radio frequency seed source；3. the first power splitter；4. the second power splitter；5. first times
Frequency device；6. the second frequency multiplier；7. directional coupler；8. frequency mixer；9. paraboloidal mirror；10. piezoelectric ceramics；11. nanoscale curvature
Probe；12. sample；13. RF mixer；14. third frequency multiplier；15. intermediate frequency mixer；16. lock-in amplifier；17. signal
Generator；18. computer；19. guide laser；20. reflex reflector lens.
The work signal of the terahertz wave band dielectric constant detection device of the microprobe scattering formula of Fig. 2 embodiment of the present invention 1
Figure.
21.27.5GHz radio frequency seed source；22.27.475GHz radio frequency seed source；23. the first power splitter；24. the second function point
Device；25. the first frequency multiplier；26. the second frequency multiplier；27. third frequency multiplier；28. th harmonic mixer；29. directional coupler；
30. paraboloidal mirror；31. piezoelectric ceramics；32. nanoscale curvature probe；33. sample；34. RF mixer；35.25MHz frequency multiplication
Device；36.50MHz frequency multiplier；37.100MHz intermediate frequency mixer；38. lock-in amplifier；39. signal generator；40. directional couple
The THz wave and be scattered back the THz wave come that device emits；41. THz wave and receive the THz wave for being scattered back and that paraboloidal mirror focuses；
42. computer；43. guide laser；44. film reflective mirror；45. guide laser.
Specific embodiment
The present invention is illustrated with specific embodiment below, but not limited to this.
Embodiment 1
A kind of scattering formula Terahertz near-field microscope based on radio-frequency electronics method, including 27.5GHz radio frequency seed source
21,27.475GHz radio frequency seed source 22, the first power splitter 23, the second power splitter 24, the first frequency multiplier 25, the second frequency multiplier 26,
Third frequency multiplier 27, th harmonic mixer 28, directional coupler 29, paraboloidal mirror 30, piezoelectric ceramics 31, nanoscale curvature probe
32, sample 33, RF mixer 34,25MHz frequency multiplier 35,50MHz frequency multiplier 36,100MHz intermediate frequency mixer 37, locking phase are put
Big device 38, signal generator 39, computer 42, guide laser 43, film reflecting mirror 44.40 represent directional coupler transmitting
THz wave be scattered back come THz wave, 41 represent paraboloidal mirror focusing THz wave and receive is scattered back come THz wave, 45 represent
The visible laser that guide laser issues.Wherein 27.5GHz radio frequency seed source 21 is connected with the end a of the first power splitter 23, and first
The end b of power splitter 23 is connected with the end a of RF mixer 24, and the end c of the first power splitter 23 is connected with the first frequency multiplier 25, and first
Frequency multiplier 25 is connected with third frequency multiplier 27, and third frequency multiplier 27 is connected with directional coupler 29；27.475GHz radio frequency seed source
22 are connected with the end a of the second power splitter 24, and the end b of the second power splitter 24 is connected with the end b of RF mixer 34, the second power splitter
24 end c is connected with the second frequency multiplier 26, and the second frequency multiplier 26 is connected with the end a of th harmonic mixer 28, th harmonic mixer
28 end b is connected with directional coupler 29, and the end c of th harmonic mixer 28 is connected with 100MHz intermediate frequency mixer 37.Radio frequency is mixed
The end c of frequency device 34 is connected with 25MHz frequency multiplier 35, and 25MHz frequency multiplier 35 is connected with 50MHz frequency multiplier 36,50MHz frequency multiplier 36
It is connected with 100MHz intermediate frequency mixer 37, intermediate frequency mixer 37 is connected with lock-in amplifier 38, lock-in amplifier 38 and computer
42 are connected, and are connected with signal generator 39, and signal generator 39 is connected with the piezoelectric ceramics 31 on probe, and nanoscale curvature is visited
Needle 32 actuates lower carry out high-frequency vibration in piezoelectric ceramics 31.
1 working principle of scattering formula Terahertz near-field microscope embodiment of radio-frequency electronics method is described as follows:
The signal that 27.5GHz radio frequency seed source 21 issues is divided by the first power splitter 23 for two-way, is connected to the first frequency multiplier 25 all the way, is passed through
Directional coupler 29 is transferred to after crossing its frequency multiplication and is launched by its waveguide mouth, and another way signal is transferred to RF mixer
In 34；The signal that 27.475GHz radio frequency seed source 22 issues is divided by the second power splitter 24 for two-way, and signal is transferred to radio frequency all the way
In frequency mixer 34, another way is connected to the second frequency multiplier 26, is transferred in th harmonic mixer 28 after its frequency multiplication.Orient coupling
The THz wave 40 that the waveguide mouth of clutch 29 issues is irradiated to the high frequency driven by piezoelectric ceramics 31 after the convergence of off axis paraboloidal mirror 30
On the nano-probe 32 of vibration, the back scattering of the probe tip containing sample message is then received by off axis paraboloidal mirror 30 again
Very weak THz light beam 31, and by its retroeflection into directional coupler 29, subsequent directional coupler 29 believes received retroeflection
It number is transferred in th harmonic mixer 28；The output signal of another aspect RF mixer 34 is transferred to 25MHz frequency multiplier 35, with
After be transmitted further to 50MHz frequency multiplier 36, and by being sent in intermediate frequency mixer 37 after its frequency multiplication, the subsequent signal and intermediate frequency mixer
37 other end input (output signal from th harmonic mixer 28) is mixed, and the signal after being then mixed is sent to locking phase and puts
It is handled in big device 38, then is transmitted in computer 42 and is analyzed, the amplitude and phase of tested sample finally just can be obtained
Information, the i.e. electromagnetic information in THz wave band.Nanometer is controlled by the two-way synchronism output of signal generator 39 simultaneously in embodiment
Grade probe 32 and the input of 38 reference signal of lock-in amplifier realize the synchronous of signal and extract.
Claims (3)
1. a kind of scattering formula Terahertz near-field microscope based on radio-frequency electronics method, it is characterised in that: first part and
Two parts；
First part includes the first radio frequency seed source (1), the first power splitter (3), the first frequency multiplier (5) and directional coupler (7)；
Second part includes the second radio frequency seed source (2), the second power splitter (4), the second frequency multiplier (6), frequency mixer (8)；And
Paraboloidal mirror (9), piezoelectric ceramics (10), nanoscale curvature probe (11), sample (12), RF mixer (13), third frequency multiplication
Device (14), intermediate frequency mixer (15), lock-in amplifier (16), signal generator (17), computer (18), guide laser
(19), reflex reflector lens (20)；
The first radio frequency seed source (1) is connected with the end a of the first power splitter (3) in first part, the end b of the first power splitter (3) with
The end a of RF mixer (13) is connected, and the end c of the first power splitter (3) is connected with the first frequency multiplier (5), the first frequency multiplier (5) and
Directional coupler (7) is connected；The second radio frequency seed source (2) is connected with the end a of the second power splitter (4) in second part, the second function
The end b of device (4) is divided to be connected with the end b of RF mixer (13), the end c of the second power splitter (4) is connected with the second frequency multiplier (6),
Second frequency multiplier (6) is connected with the end a of frequency mixer (8), and the end b of frequency mixer (8) is connected with directional coupler (7), frequency mixer (8)
The end c be connected with intermediate frequency mixer (15)；The end c of RF mixer (13) is connected with third frequency multiplier (14), third frequency multiplier
(14) be connected with intermediate frequency mixer (15), intermediate frequency mixer (15) is connected with lock-in amplifier (16), lock-in amplifier (16) with
Signal generator (17) is connected, and signal generator (17) is connected with the piezoelectric ceramics (10) on probe, nanoscale curvature probe
(11) lower carry out high-frequency vibration is actuated in piezoelectric ceramics (10), computer (18) receives and processes lock-in amplifier (16) and handled
Complete signal；
The signal that the first radio frequency seed source (1) issues in first part is divided into two-way by the first power splitter (3), is connected to all the way
One frequency multiplier (5) is transferred to directional coupler (7) after its frequency multiplication and launches by its waveguide mouth, another way signal
It is transferred in RF mixer (13)；The signal that the second radio frequency seed source (2) issues in second part is by the second power splitter (4) point
For two-way, signal is transferred in RF mixer (13) all the way, and another way is connected to the second frequency multiplier (6), after its frequency multiplication
It is transferred in frequency mixer (8)；The THz wave that the waveguide mouth of directional coupler (7) issues irradiates after off axis paraboloidal mirror (9) convergence
Onto the nano-probe (11) of the high-frequency vibration driven by piezoelectric ceramics (10), is then received and contained by off axis paraboloidal mirror (9) again
There is a very weak THz light beam of the back scattering of the probe tip of sample message, and by its retroeflection to directional coupler (7),
Received retroreflective signs are transferred in the frequency mixer (8) of second part by subsequent directional coupler (7)；The mixing of another aspect radio frequency
The output signal of device (13) is transferred to third frequency multiplier (14), and is sent in intermediate frequency mixer (15) after its frequency multiplication, then
The signal is mixed with the input of the other end of intermediate frequency mixer (15), and the signal after being then mixed is sent in lock-in amplifier (16)
It handles and is transmitted in computer (18), the amplitude and phase information of tested sample finally just can be obtained, i.e., in THz wave band
Electromagnetic information；In the present invention, luminous eyeglass (20) can reflect guide laser while the THz waves of the transmission overwhelming majority
(19) light issued；The light that guide laser (19) issues is macroscopic light, can be with by the effect of eyeglass (20) of shining
It will be seen that optical path is adjusted to be overlapped optical path with THz optical path, play the role of good guide, very big side is provided for optical path adjusting
Just；
Nanoscopic tips (11) and lock-in amplifier (16) ginseng are controlled simultaneously by the two-way synchronism output of signal generator (17)
Signal input is examined, the synchronous of signal is realized and extracts, can accurately obtain the electromagnetic wave that probe near-field region inspires and be taken
The sample message of band has thus achieved the purpose that high efficiency, high quality, low the operation difficulty detection of THz near-field signals.
2. a kind of scattering formula Terahertz near-field microscope based on radio-frequency electronics method according to claim 1, special
Sign is:
The exportable frequency of radio frequency seed source is the signal of ghz band, is carried out using frequency multiplier to its output signal primary
Or many times frequency multiplication, to obtain the signal of desired THz frequency range；
The power splitter is power splitter, the output signal of radio frequency seed source can be divided into two-way；
The frequency of input signal can be carried out frequency multiplication by the frequency multiplier, then export frequency-doubled signal；
The directional coupler can by the signal after frequency multiplication couple and free space is emitted to by wave guide outlet, then and by
This output port receive by free space emit or be scattered back come signal, and by the signal fed back be transferred to third export
End；
The signal of two input terminals can be mixed by the frequency mixer, then by three-polar output mixing after up-conversion or
Down-conversion signal；
The paraboloidal mirror is gold-plated large scale paraboloidal mirror, completes convergence and the near-field scattering of the THz light beam of coupler transmitting
The reception of THz wave；
The piezoelectric ceramics can actuate probe and carry out high-frequency vibration with nanoscale amplitude；
The nanoscale needle point can be accurately performed the nanoscale operation to probe by controller, will by the vibration of probe
The near field wave for carrying sample message scatters to far field and is received；
The RF mixer is high-frequency mixer, the signal of two radio frequency seed sources can be mixed；
Two intermediate-freuqncy signals of input can be mixed by the intermediate frequency mixer；
The lock-in amplifier can be calculated by locking phase extract from the scattered signal that intermediate frequency mixer exports containing sample
Product information；
The guide laser can issue macroscopic laser, by adjusting keeping its optical path mutually be overlapped with THz light propagation optical path
It closes, can indicate building for THz optical path well；
The reflex reflector lens are special eyeglasses, can be transmitted through most THz light of eyeglass, while being reflected by its surface
Visible guide laser.
3. a kind of scattering formula Terahertz near-field microscope based on radio-frequency electronics method according to claim 1, special
Sign is: extracting down-conversion signals that intermediate frequency mixer exports, containing near field harmonic components using lock-in amplifier, reaches same
When extract the purposes of multistage near-field signals.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN113252598A (en) * | 2021-05-19 | 2021-08-13 | 中国电子科技集团公司第四十一研究所 | Full-electronics terahertz near-field spectrum comprehensive test device and method |
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| CN114945238A (en) * | 2022-03-30 | 2022-08-26 | 核工业西南物理研究院 | Multifunctional terahertz integrated diagnostic system |
| CN114945238B (en) * | 2022-03-30 | 2023-06-16 | 核工业西南物理研究院 | Multifunctional terahertz integrated diagnosis system |
| WO2023212860A1 (en) * | 2022-05-05 | 2023-11-09 | 中国科学院深圳先进技术研究院 | Terahertz near-field audio modulation and demodulation nano-probe array system and method, and storage medium |
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