CN109026709A - Multiple compression vacuum pump - Google Patents

Multiple compression vacuum pump Download PDF

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Publication number
CN109026709A
CN109026709A CN201811085669.XA CN201811085669A CN109026709A CN 109026709 A CN109026709 A CN 109026709A CN 201811085669 A CN201811085669 A CN 201811085669A CN 109026709 A CN109026709 A CN 109026709A
Authority
CN
China
Prior art keywords
driving claw
driving
shell
claw
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201811085669.XA
Other languages
Chinese (zh)
Inventor
周文菊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Worldcom Hi-Tech Pump (tianjin) Ltd By Share Ltd
Original Assignee
Worldcom Hi-Tech Pump (tianjin) Ltd By Share Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Worldcom Hi-Tech Pump (tianjin) Ltd By Share Ltd filed Critical Worldcom Hi-Tech Pump (tianjin) Ltd By Share Ltd
Priority to CN201811085669.XA priority Critical patent/CN109026709A/en
Publication of CN109026709A publication Critical patent/CN109026709A/en
Withdrawn legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/02Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008Hermetic pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F04C27/009Shaft sealings specially adapted for pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/50Bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

The invention discloses multiple compression vacuum pumps, belong to delivery pump field, including shell, the upper end of shell is equipped with air inlet, the side of lower end is equipped with gas outlet, the lower end of shell is connect by shaft coupling with driving motor, the inside of shell is equipped with and vacuumizes drive shaft assembly, driving assembly is vacuumized to connect by fixed shaft assembly with shell, the side of shell is equipped with heat exchanger, liquid cooling cooling loop is equipped between the inner ring and outer ring of shell, cooling loop is connect with heat exchanger, cooling loop with can with inner ring be not connected to, the outlet section of heat exchanger is equipped with flowmeter, inlet port and outlet port are equipped with fire insulation valve.Particle sundries can be discharged in the present invention in time, and performance is stablized.

Description

Multiple compression vacuum pump
Technical field
The invention belongs to delivery pump fields, are related to multiple compression vacuum pump.
Background technique
With the development that vacuum is applied, the type of vacuum pump has been developed that many kinds, pumping speed are raised to from zero point per second is several Hundreds of thousands per second, millions of liters, as vacuum technique is applied to the requirement of pressure range in the field of production and scientific research It is more and more wider, it needs just to be able to satisfy production and scientific research after being evacuated jointly by several vacuum pump groups at vacuum-pumping system mostly The requirement of process, many equipment need to carry out simulation test under vacuum conditions.
Vacuum pump, which refers to, to be obtained using machinery, physics, chemically or physically chemical method to being evacuated by pumping container The device or equipment of vacuum, for popular, vacuum pump is to improve, generate and maintain true in a certain enclosure space with various methods Empty device.
In common vacuum pump vacuum, piston motion is mostly used to carry out air-breathing and exhaust event, is turned by belt Motivation structure drives piston rod movement, this structure is easy to appear temperature rise, radiates bad.
Summary of the invention
The purpose of this part is to be to summarize some aspects of the embodiment of the present invention and briefly introduce some preferable realities Apply example.It may do a little simplified or be omitted to avoid this is made in this section and the description of the application and the title of the invention Partially, the purpose of abstract of description and denomination of invention is fuzzy, and this simplification or omission cannot be used for limiting the scope of the invention.
The problem of describing in view of the aforementioned technical background proposes the present invention, therefore, the one of purpose of the present invention It is to provide a kind of multiple compression vacuum pump, vacuumize process is carried out using claw structure, is shortened between air inlet and exhaust outlet Distance, reduce the temperature difference, performance is more stable, and fire insulation valve and relief valve is arranged, and promotes security performance.
In order to solve the above technical problems, the technical solution adopted by the present invention is that: multiple compression vacuum pump, including shell, The upper end of the shell is equipped with air inlet, and the side of lower end is equipped with gas outlet, and the lower end of the shell passes through shaft coupling and driving Motor connection, the inside of the shell, which is equipped with, vacuumizes drive shaft assembly, and the driving assembly that vacuumizes passes through fixed shaft assembly It is connect with shell;
The side of the shell is equipped with heat exchanger, and liquid cooling cooling ring is equipped between the inner ring and outer ring of the shell Road, the cooling loop are connect with heat exchanger, the cooling loop with it is described can with inner ring be not connected to, the heat exchanger Outlet end be equipped with flowmeter;
The inlet port and outlet port are equipped with fire insulation valve.
Further, the driving assembly that vacuumizes includes being located at the enclosure interior and first turn disposed in parallel of axis Moving axis and the second rotation axis, the lower end of first rotation axis are equipped with transmission gear, the lower end of second rotation axis be equipped with from Moving gear, the transmission gear are engaged with driven gear;
The first driving claw and third driving claw, first rotation axis are successively arranged in second rotation axis from top to bottom Be equipped with the second driving claw and the 4th driving claw, first driving claw includes rotating part and claw, the rotating part with it is described The coaxial arrangement of second rotation axis, the claw are located at the outer ring of the rotating part and extend outwardly and contact with the inner ring of the shell Setting, the inner ring of the shell include the first cavity and the second cavity, and first driving claw and third driving claw are located at described In first cavity, second driving claw and the 4th driving claw are located in second cavity, first cavity and second Cavity forms the shape that end face is 8, and the structure of second driving claw, third driving claw and the 4th driving claw and described first drive The structure of pawl is identical, and second driving claw is equipped with first driving claw and the tangent setting of the driving portion of the two, The peace of setting angle the second rotation axis opposite with first driving claw of relatively described first rotation axis of second driving claw Fill that angle is identical, the matching relationship of the third driving claw and the 4th driving claw and first driving claw and the second driving claw Matching relationship is identical, and the third driving claw and the first driving claw difference 180 degree are installed.
Further, the lower end of the third driving claw is equipped with identical 5th driving claw of structure, the 5th driving claw It being located in second shaft, the thickness of the 5th driving claw is less than or equal to the thickness of the third driving claw, and described first Shaft is equipped with the 6th driving claw cooperated with the 5th driving claw, the setting angle and described first of the 5th driving claw The setting angle of driving claw is identical.
Further, first driving claw and the second driving claw correspond to the level-one cavity of the shell, and the third is driven Pawl and the 4th driving claw correspond to the secondary cavity of the shell, and the 5th driving claw and the 6th driving claw correspond to the shell Three-level cavity, the level-one cavity, secondary cavity and three-level cavity be connected and fixed using assembly type, the level-one cavity and two Grade cavity passes through pipeline and is connected to external nitrogen purging charging-tank, and the secondary cavity is equipped with and is connected with inside pressure release Valve.
Further, the outer surface of the 5th driving claw and the 6th driving claw is equipped with wearing layer.
Further, the thickness of the third driving claw is identical as the thickness of first driving claw.
Further, the outer surface of first driving claw, the second driving claw, third driving claw and the 4th driving claw is equipped with The inner ring of wearing layer, the shell is equipped with wearing layer.
Further, the axis fixation kit includes that the outer ring of fixing axle and coaxial with fixing axle is arranged in from top to down Bearing fixation kit, transmission gear, seal receptacle, rotating axle bushing and stop washer, the bearing fixation kit include bearing block, axis Lid and bearing are held, the bearing block is fixedly connected with the fixation device outside fixing axle, and the bearing is arranged in the bearing block And inner ring is equipped with fixing axle, the bearing cap solid lock carries out axial limiting on the bearing block and to the bearing, The seal receptacle solid lock is equipped with first on the fixation device outside fixing axle, between the seal receptacle and the transmission gear O-shaped Ring, the inner ring of the seal receptacle are coaxially provided with inner seal sleeve, and inner ring and the fixing axle of the inner seal sleeve are equipped with, described to stop Stop washer is equipped between washer and rotating axle bushing.
Further, the inner seal sleeve includes ring body, is embedded sealing ring and third o-ring in the ring body inner ring, The quantity of the third o-ring is two and two third o-rings are arranged in the both ends of the setting ring body, the sealing ring And middle and upper part close to described transmission gear one end, the outer ring of the ring body be equipped with wear-resisting line, the ring body and seal receptacle are tight It is equipped with.
Further, the transmission gear is spur gear, and the transmission gear is nibbled with the transmission gear in other fixing axles Setting is closed, the toothed surface of the transmission gear is equipped with nitriding layer.
Compared with prior art, the present invention has the advantage that as follows with good effect.
1, present invention setting and internal disconnected cooling loop in shell, and external setting heat exchanger, are realized Lasting liquid cooling mode, cooling effect is obvious, and can avoid causing humidity excessive inside, impacts to components, if Fire insulation valve is set, safety is promoted;
2, the first driving claw and third driving claw, and the second driving claw of mating setting and the 4th driving claw are set, are arranged to Two groups, the efficiency vacuumized is promoted, this structure substantially reduces the distance between air inlet and exhaust outlet, reduces the temperature difference, performance It is more stable, and every grade of compression ratio is uniform, and pressure change is gentle, and temperature rises steadily, and this structure is set using vertical It sets, is conducive to solid particle and purges out, promote internal degree of purity;
3, the 5th driving claw and the 6th driving claw are set, the efficiency vacuumized is further promoted;
4, the outer ring of each driving claw is respectively provided with wearing layer, is also provided with wearing layer in the inner ring of shell, extending structure makes Use the service life;
5, the outer ring of the first rotation axis is equipped with bearing fixation kit, realizes turning for the relatively fixed device of the first rotation axis It is dynamic, the second o-ring is set in the upper end of bearing fixation kit, realizes the preliminary sealing of the first rotation axis, the first rotation axis Seal receptacle is arranged in middle part, and the first o-ring is arranged between seal receptacle and transmission gear, realizes to the secondary close of the first rotation axis Envelope, seal receptacle is interior to be arranged inner seal sleeve, realizes the further sealing to the first rotation axis, and multi-sealed, performance is stablized, and Transmission gear is set in the first rotation axis, drives other to engage zero with transmission gear while realizing the rotation of the first rotation axis The rotation of part, the same driving source realize the rotation of multiple parts, energy-conservation energy consumption;
6, bearing is tapered roller bearing, can bear radial load and single direction axial load, promotes the first rotation The strength and stability of axis, and the model multiplicity of tapered roller bearing, are divided into single-row, biserial and four-row tapered roller bearing, It is set according to the case where endurance;
7, two third o-rings and sealing ring are set in inner seal sleeve, it is real on the basis of the first o-ring and the second o-ring Sealing three times and four sealings are showed, the realization of whole device is multi-sealed, greatly promotes sealing performance.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment Attached drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this For the those of ordinary skill of field, without any creative labor, it can also be obtained according to these attached drawings other Attached drawing.
Fig. 1 is the structural schematic diagram of multiple compression vacuum pump of the present invention;
Fig. 2 is the structural schematic diagram that the present invention vacuumizes drive shaft assembly;
Fig. 3 is that the present invention vacuumizes structural schematic diagram of the drive shaft assembly under motion state;
Fig. 4 is the structural schematic diagram of the first driving claw of the invention;
Fig. 5 is the schematic diagram of movements of air inlet of the present invention;
Fig. 6 is the schematic diagram of movements of outlet of the present invention;
Fig. 7 is the structural schematic diagram of the fixed shaft assembly of the present invention;
Fig. 8 is the cross-sectional view of inner seal sleeve of the present invention.
Appended drawing reference:
The second rotation axis of 20-;The first driving claw of 21-;211- driving portion;212- claw;21 '-the second driving claws;22- Three driving claws;22 '-the four driving claws;The 5th driving claw of 23-;23 '-the six driving claws;24- driven gear;30- first is rotated Axis;311- bearing block;312- bearing;313- bearing cap;32- transmission gear;321- key;33- seal receptacle;The first o-ring of 34-; 35- inner seal sleeve;351- ring body;352- third o-ring;353- sealing ring;36- rotating axle bushing;37- stop washer;38- stop Nut;The second o-ring of 39-;40- shell;The first cavity of 41-;The second cavity of 42-;401- air inlet;The gas outlet 402-;403- Shaft coupling;404- level-one cavity;405- secondary cavity;406- relief valve;407 nitrogen purge charging-tank;408- back-fire relief tank;50- Driving motor;60- cooling loop;70- heat exchanger;71- flowmeter.
Specific embodiment
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing to the present invention Specific embodiment be described in detail.
In the following description, numerous specific details are set forth in order to facilitate a full understanding of the present invention, but the present invention can be with Implemented using other than the one described here other way, those skilled in the art can be without prejudice to intension of the present invention In the case of do similar popularization, therefore the present invention is not limited by the specific embodiments disclosed below.
Secondly, combination schematic diagram of the present invention is described in detail, when describing the embodiments of the present invention, for purposes of illustration only, table Show that the sectional view of device architecture can disobey general proportion and make partial enlargement, and the schematic diagram is example, is not answered herein Limit the scope of protection of the invention.In addition, the three-dimensional space of length, width and depth should be included in actual fabrication
Again, it should be noted that in the absence of conflict, the feature in embodiment and embodiment in the present invention can To be combined with each other.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", "upper", "lower", The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of description of the present invention and simplification of the description, rather than instruction or dark Show that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as pair Limitation of the invention.In addition, term " first ", " second " etc. are used for description purposes only, it is not understood to indicate or imply phase To importance or implicitly indicate the quantity of indicated technical characteristic.The feature for defining " first ", " second " etc. as a result, can To explicitly or implicitly include one or more of the features.In the description of the present invention, unless otherwise indicated, " multiple " It is meant that two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected;It can To be mechanical connection, it is also possible to be electrically connected;It can be directly connected, can also can be indirectly connected through an intermediary Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood by concrete condition Concrete meaning in the present invention.
To make the object, technical solutions and advantages of the present invention clearer, with reference to the accompanying drawing to specific reality of the invention Example is applied to elaborate.
As shown in Figure 1, multiple compression vacuum pump, including shell 40, the upper end of shell 40 are equipped with air inlet 401, lower end Side be equipped with gas outlet 402, the lower end of shell 40 is connect by shaft coupling 403 with driving motor 50, and the inside of shell 40 is set Drive shaft assembly is vacuumized, driving assembly is vacuumized and is connect by fixed shaft assembly with shell 40;
The side of shell 40 is equipped with heat exchanger 70, and liquid cooling cooling loop is equipped between the inner ring and outer ring of shell 40 60, cooling loop 60 is connect with heat exchanger 70, cooling loop 60 with can with inner ring be not connected to, the outlet end of heat exchanger 70 Equipped with flowmeter 701;
401 end of air inlet and 402 end of gas outlet are equipped with fire insulation valve 408.
Include shell 40 as Fig. 2 and Fig. 3 vacuumize driving assembly, is located at 40 inside of shell and axis disposed in parallel first The lower end of rotation axis 30 and the second rotation axis 20, the first rotation axis 30 is equipped with transmission gear 32, and the lower end of the second rotation axis 20 is set There is driven gear 24, transmission gear 32 is engaged with driven gear 24, and transmission gear 32 passes through key 321 and the first rotation axis 30 It is fixedly connected;
The first driving claw 21 and third driving claw 22, the first rotation axis 30 are successively arranged in second rotation axis 20 from top to bottom It is equipped with the second driving claw 21 ' and the 4th driving claw 22 ', as shown in figure 4, the first driving claw 21 includes rotating part and claw 212, Rotating part and the second rotation axis 20 are coaxially disposed, the inner ring that claw 212 is located at the outer ring of rotating part and extends outwardly with shell 40 The inner ring of contact setting, shell 40 includes the first cavity 41 and the second cavity 42, and the first driving claw 21 and third driving claw 22 are set In the first cavity 41, the second driving claw 21 ' and the 4th driving claw 22 ' are located in the second cavity 42, the first cavity 41 and second Cavity 42 forms the shape that end face is 8, the structure and first of the second driving claw 21 ', third driving claw 22 and the 4th driving claw 22 ' The structure of driving claw 21 is identical, and the second driving claw 21 ' is equipped with the first driving claw 21 and the driving portion 211 of the two is tangent sets It sets, the setting angle of opposite first rotation axis 30 of the second driving claw 21 ' and the peace of opposite second rotation axis 20 of the first driving claw 21 It is identical to fill angle, the matching relationship and the first driving claw 21 and the second driving claw 21 ' of third driving claw 22 and the 4th driving claw 22 ' Matching relationship it is identical;
Third driving claw 22 and the first driving claw 21 difference 180 degree are installed, and are avoided air flow blind angle, are promoted and taken out very Empty efficiency.
Preferably, the lower end of third driving claw 22 is equipped with identical 5th driving claw 23 of structure, and the 5th driving claw 23 is located at In second shaft, the thickness of the 5th driving claw 23 is less than or equal to the thickness of third driving claw 22, and first rotating shaft is equipped with and the 5th The 6th driving claw 23 ' that driving claw 23 cooperates, the setting angle phase of the setting angle of the 5th driving claw 23 and the first driving claw 21 Together, the efficiency vacuumized can be further promoted after the 5th driving claw 23 is set, from top to bottom inlet port arranged in a crossed manner and gas outlet, Air dead angle is avoided, the efficiency vacuumized is promoted.
Preferably, the outer surface of the 5th driving claw 23 and the 6th driving claw 23 ' is equipped with wearing layer, prolongs the service life.
Preferably, the level-one cavity 404 of 21 ' corresponding housing of the first driving claw 21 and the second driving claw, third driving claw 22 With the secondary cavity 405 of 22 ' corresponding housing 40 of the 4th driving claw, 23 ' corresponding housing 40 of the 5th driving claw 23 and the 6th driving claw Three-level cavity 409, level-one cavity 404, secondary cavity 405 and three-level cavity 409 be connected and fixed using assembly type, level-one cavity 404 and secondary cavity 405 charging-tank 407 is purged with external nitrogen by pipeline and is connected to, secondary cavity 405 equipped with it is interior The relief valve 406 of portion's connection.
Preferably, the thickness of third driving claw 22 is identical as the thickness of the first driving claw 21, facilitates blanking, and reduction is fabricated to This, and can guarantee the compression ratio between two-stage up and down, guarantee the slowly varying of pressure and temperature, the stability of lift structure.
Preferably, the outer surface of the first driving claw 21, the second driving claw 21 ', third driving claw 22 and the 4th driving claw 22 ' Equipped with wearing layer, the inner ring of shell 40 is equipped with wearing layer, promotes the wearability of total, guarantees to make under long-term rotation contact Use the service life.
As shown in Figure 7 and Figure 8, fixed shaft assembly include be arranged in from top to down fixing axle outer ring and with the first rotation axis 30 coaxial bearing fixation kits, transmission gear 32, seal receptacle 33, rotating axle bushing 36 and stop washer 37, bearing fixation kit Including bearing block 311, bearing cap 313 and bearing 312, bearing block 311 is fixedly connected with the fixation device outside the first rotation axis 30, Bearing 312 is arranged in bearing block 311 and inner ring is equipped with the first rotation axis 30, and 313 solid lock of bearing cap is in bearing block 311 It is upper and axial limiting is carried out to bearing 312,33 solid lock of seal receptacle on the fixation device outside the first rotation axis 30, seal receptacle 33 with The first o-ring 34 is equipped between transmission gear 32, the inner ring of seal receptacle 33 is coaxially provided with inner seal sleeve 35, inner seal sleeve 35 it is interior Circle is equipped with the first rotation axis 30, and stop washer 37 is equipped between stop washer 37 and rotating axle bushing 36.
Preferably, bearing 312 is tapered roller bearing 312, can bear radial load and single direction axial load, mention The strength and stability of the first rotation axis 30, and the model multiplicity of tapered roller bearing 312 are risen, single-row, biserial and four are divided into Row tapered roller bearing 312 is set according to the case where endurance.
Preferably, the upper end of bearing block 311 is equipped with the second o-ring 39, plays the role of tentatively sealing, avoids the liquid on axis Body enters in bearing fixation kit along the first rotation axis 30, while also protecting bearing 312, and bearing 312 is avoided to receive liquid It overlooks, generates oxidation, the service life of lift structure.
Preferably, rotating axle bushing 36 is integrally formed by copper material, and the wearability of copper is good.
Preferably, transmission gear 32 is spur gear, and transmission gear 32 is connect by key 321 with the first rotation axis 30, is processed Convenient, manufacturing cost is low, and transmission gear 32 is engaged with the transmission gear 32 in other first rotation axis 30, is driven using one Dynamic source can realize the rotation of multiple first rotation axis 30, and the toothed surface of energy saving, transmission gear 32 is equipped with nitriding layer, is promoted The wearability of tooth form, prolongs the service life.
Preferably, inner seal sleeve 35 includes ring body 351, is embedded the sealing ring 353 and third o-ring in 351 inner ring of ring body 352, the quantity of third o-ring 352 is two and the both ends of ring body 351 is arranged, and two third o-rings 352 are arranged in sealing ring 353 And close to 32 one end of transmission gear middle and upper part, multi-sealed protection, lift-off seal performance can be played the role of;More preferably Ground, the outer ring of ring body 351 are equipped with wear-resisting line, and ring body 351 and 33 tight fit of seal receptacle are arranged, and wear-resisting line increases coefficient of friction, During actual installation use, ring body 351 is directly assembled to the inner ring of seal receptacle 33, fastness is strong.
During practical operation, the installation of 40 inner body of shell is carried out first, the first transmission shaft 30 is consolidated Fixed, bearing fixation kit, transmission gear 32, seal receptacle 33, rotating axle bushing 36 and stop washer 37 are sequentially arranged at the first rotation On axis 30, the second o-ring 39 of bearing fixation kit upper end setting plays the role of tentatively sealing, avoids the liquid edge on axis First rotation axis 30 enters in bearing fixation kit, while also protecting bearing 312, using locked spacer and only after being installed Dynamic nut 38 is fixed, and effectively prevent loosening, and after the completion of above, the basis of 34 second o-ring 39 of the first o-ring goes out to play double The effect of resealing, third o-ring 352 and sealing ring 353 in inner seal sleeve 35 each serve as sealing three times and four sealings Effect, total is multi-sealed, effectively prevent revealing, promoted the first rotation axis 30 stability.
First rotation axis 30 connect realization rotation with driving motor 50, sets because transmission gear 32 is engaged with driven gear 24 It sets, and then realizes the synchronous rotation of the second rotation axis 20, in rotation process, the first driving claw 21 and the second driving claw 21 ' are matched Setting is closed, realizes and relatively rotates, the claw 212 contacted with shell 40 is arranged in the first driving claw 21, such as (a) Dao (e) institute in Fig. 5 Show, be the process that admission space is gradually increased, by the variation of claw 212 and 40 contact area of shell, realizes the first driving claw 21 and second the opposite shell 40 of driving claw 21 ' volume variation, f is the state after the completion of air inlet, complete the process of air inlet, into During gas completes final vacuum, as shown in fig. 6, the first driving claw 21 and the second driving claw 21 ' are in air inlet (g) to shown in (l) Continuing to move after the completion, volume is gradually reduced, and realizes the process of exhaust, and k is the state after the completion of exhaust, and l is emptying of delaying, Vacuuming action after air inlet and exhaust can be realized after continuously running, is arranged to three groups from top to bottom, promotes the effect vacuumized Rate, this structure substantially reduce the distance between air inlet and exhaust outlet, reduce the temperature difference, and performance is more stable, and every grade Compression ratio is uniform, and pressure change is gentle, and temperature rises steadily, and this structure uses vertical setting, is conducive to solid particle and blows It scans out and, promote internal degree of purity.
In whole process, if the hypertonia inside shell 40, relief valve starting generates pressure release, guarantees internal pressure If constancy opens nitrogen and purges charging-tank 407, to level-one chamber need to be serviced maintenance using overlong time Body and secondary cavity carry out nitrogen purging, guarantee internal degree of purity, and whole device can monitor pressure, can also be purged, surely Qualitative height.
It should be noted that the above examples are only used to illustrate the technical scheme of the present invention and are not limiting, although referring to preferable Embodiment describes the invention in detail, those skilled in the art should understand that, it can be to technology of the invention Scheme is modified or replaced equivalently, and without departing from the spirit and scope of the technical solution of the present invention, should all be covered in this hair In bright scope of the claims.

Claims (10)

1. multiple compression vacuum pump, it is characterised in that: including shell, the upper end of the shell is equipped with air inlet, the side of lower end Face is equipped with gas outlet, and the lower end of the shell is connect by shaft coupling with driving motor, and the inside of the shell, which is equipped with, to be vacuumized Drive shaft assembly, the driving assembly that vacuumizes are connect by fixed shaft assembly with shell;
The side of the shell is equipped with heat exchanger, and liquid cooling cooling loop, institute are equipped between the inner ring and outer ring of the shell Cooling loop is stated to connect with heat exchanger, the cooling loop with it is described can with inner ring be not connected to, the heat exchanger go out Mouth end is equipped with flowmeter;
The inlet port and outlet port are equipped with fire insulation valve.
2. multiple compression vacuum pump according to claim 1, it is characterised in that: the driving assembly that vacuumizes includes setting It is equipped in the enclosure interior and axis the first rotation axis disposed in parallel and the second rotation axis, the lower end of first rotation axis The lower end of transmission gear, second rotation axis is equipped with driven gear, and the transmission gear is engaged with driven gear;
The first driving claw and third driving claw are successively arranged in second rotation axis from top to bottom, is set in first rotation axis There are the second driving claw and the 4th driving claw, first driving claw includes rotating part and claw, the rotating part and described second Rotation axis coaxial arrangement, the claw are located at the outer ring of the rotating part and extend outwardly to contact with the inner ring of the shell and set It sets, the inner ring of the shell includes the first cavity and the second cavity, and first driving claw and third driving claw are located at described the In one cavity, second driving claw and the 4th driving claw are located in second cavity, first cavity and the second sky Chamber forms the shape that end face is 8, the structure of second driving claw, third driving claw and the 4th driving claw and first driving The structure of pawl is identical, and second driving claw is equipped with first driving claw and the tangent setting of the driving portion of the two, institute State the installation of setting angle the second rotation axis opposite with first driving claw of relatively described first rotation axis of the second driving claw Angle is identical, and the matching relationship of the third driving claw and the 4th driving claw and first driving claw and the second driving claw are matched Conjunction relationship is identical, and the third driving claw and the first driving claw difference 180 degree are installed.
3. multiple compression vacuum pump according to claim 2, it is characterised in that: the lower end of the third driving claw is equipped with Identical 5th driving claw of structure, the 5th driving claw are located in second shaft, and the thickness of the 5th driving claw is small In the thickness for being equal to the third driving claw, the first rotating shaft is equipped with the 6th driving cooperated with the 5th driving claw The setting angle of pawl, the 5th driving claw is identical as the setting angle of first driving claw.
4. multiple compression vacuum pump according to claim 3, it is characterised in that: first driving claw and the second driving Pawl corresponds to the level-one cavity of the shell, and the third driving claw and the 4th driving claw correspond to the secondary cavity of the shell, institute It states the 5th driving claw and the 6th driving claw corresponds to the three-level cavity of the shell, the level-one cavity, secondary cavity and three-level chamber Body is connected and fixed using assembly type, and the level-one cavity and secondary cavity pass through pipeline and external nitrogen purging charging-tank company Logical, the secondary cavity is equipped with and is connected with inside relief valve.
5. multiple compression vacuum pump according to claim 3, it is characterised in that: the 5th driving claw and the 6th driving The outer surface of pawl is equipped with wearing layer.
6. multiple compression vacuum pump according to claim 2, it is characterised in that: the thickness of the third driving claw and institute The thickness for stating the first driving claw is identical.
7. multiple compression vacuum pump according to claim 2, it is characterised in that: first driving claw, the second driving The outer surface of pawl, third driving claw and the 4th driving claw is equipped with wearing layer, and the inner ring of the shell is equipped with wearing layer.
8. multiple compression vacuum pump according to claim 1, it is characterised in that: the axis fixation kit include from upper and The lower outer ring that fixing axle is set and the bearing fixation kit coaxial with fixing axle, transmission gear, seal receptacle, rotating axle bushing and only Washer, the bearing fixation kit include bearing block, bearing cap and bearing, the fixation device outside the bearing block and fixing axle It is fixedly connected, the bearing is arranged in the bearing block and inner ring is equipped with fixing axle, and the bearing cap solid lock is in institute It states on bearing block and axial limiting is carried out to the bearing, the seal receptacle solid lock is described on the fixation device outside fixing axle The first o-ring is equipped between seal receptacle and the transmission gear, the inner ring of the seal receptacle is coaxially provided with inner seal sleeve, described interior The inner ring of sealing shroud is equipped with fixing axle, and stop washer is equipped between the stop washer and rotating axle bushing.
9. multiple compression vacuum pump according to claim 8, it is characterised in that: the inner seal sleeve includes ring body, embedding It is located at the sealing ring and third o-ring of the ring body inner ring, the quantity of the third o-ring is two and the setting ring body Middle and upper part two third o-rings and close to described transmission gear one end, the ring body is arranged in both ends, the sealing ring Outer ring be equipped with wear-resisting line, the ring body and seal receptacle tight fit are arranged.
10. multiple compression vacuum pump according to claim 8, it is characterised in that: the transmission gear is spur gear, institute It states transmission gear to be engaged with the transmission gear in other fixing axles, the toothed surface of the transmission gear is equipped with nitriding layer.
CN201811085669.XA 2018-09-18 2018-09-18 Multiple compression vacuum pump Withdrawn CN109026709A (en)

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Application Number Priority Date Filing Date Title
CN201811085669.XA CN109026709A (en) 2018-09-18 2018-09-18 Multiple compression vacuum pump

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111980919A (en) * 2020-09-24 2020-11-24 洛阳普瑞曼环保科技有限公司 Vacuum pump with multistage roots structure for oil gas recovery

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Publication number Priority date Publication date Assignee Title
JPH05312173A (en) * 1992-05-06 1993-11-22 Shimadzu Corp Dry vacuum pump
CN2503232Y (en) * 2001-07-13 2002-07-31 王连智 High-pressure-resistant multi-stage claw-type rotor vacuum pump
JP2002332963A (en) * 2001-05-08 2002-11-22 Toyota Industries Corp Oil leakage preventive structure in vacuum pump
WO2009063820A1 (en) * 2007-11-14 2009-05-22 Ulvac, Inc. Dry pump
CN205937118U (en) * 2016-07-01 2017-02-08 南京真空泵厂有限公司 Multistage claw formula vacuum pump
CN208966590U (en) * 2018-09-18 2019-06-11 世通海泰泵业(天津)股份有限公司 Vertical type vacuum pump

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05312173A (en) * 1992-05-06 1993-11-22 Shimadzu Corp Dry vacuum pump
JP2002332963A (en) * 2001-05-08 2002-11-22 Toyota Industries Corp Oil leakage preventive structure in vacuum pump
CN2503232Y (en) * 2001-07-13 2002-07-31 王连智 High-pressure-resistant multi-stage claw-type rotor vacuum pump
WO2009063820A1 (en) * 2007-11-14 2009-05-22 Ulvac, Inc. Dry pump
CN205937118U (en) * 2016-07-01 2017-02-08 南京真空泵厂有限公司 Multistage claw formula vacuum pump
CN208966590U (en) * 2018-09-18 2019-06-11 世通海泰泵业(天津)股份有限公司 Vertical type vacuum pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111980919A (en) * 2020-09-24 2020-11-24 洛阳普瑞曼环保科技有限公司 Vacuum pump with multistage roots structure for oil gas recovery

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Application publication date: 20181218