CN109000693A - 一种折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法 - Google Patents
一种折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法 Download PDFInfo
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Abstract
本发明提出一种折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法。将折射率匹配液和载玻片包裹待加工光纤,利用飞秒激光在光纤纤芯上刻写两个折射率改变区域,形成本征型法布里—珀罗器件的两个反射镜。该方法减小了由光纤圆波导结构引起的球面色散和光纤与外界折射率的差异引起的飞秒激光聚焦位置偏移,同时也减小了折射率改变区域的大小,从而提高了反射光谱的平均对比度和均匀性。
Description
技术领域
本发明属于光纤器件领域,具体涉及一种折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法。
背景技术
光纤传感器具有制备简单、尺寸微小、灵敏度高、响应速度快、抗电磁干扰能力强和对环境适应能力强等优点。作为全光纤干涉型传感器,光纤本征型法布里—珀罗传感器是基于单根光纤光束干涉来实现测量,当外界环境如温度、折射率、拉力、应变和磁场等因素发生变化时,光束的相位也发生变化。相比其他类型的光纤传感器件,光纤本征型法布里—珀罗传感器具有分辨率高、易检测、复用能力强、抗干扰能力强等优点。随着飞秒激光技术的出现和发展,其具有超短脉冲和高峰值强度的优势,在微加工领域得到了广泛地应用。飞秒激光光束聚焦在光纤纤芯上进行微加工时,可以精准控制加工位置和区域,并且加工区域很小,可大大简化本征型法布里—珀罗传感器的制备。
而飞秒激光自身的自聚焦效应和光纤圆波导的特殊波导结构会引起球面色散,加上光纤与周围介质的折射率差,会导致飞秒激光聚焦在光纤纤芯时,引起聚焦位置的偏移。为了减小误差,提高光纤本征型法布里—珀罗传感器件的性能,本发明提出折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法,减小飞秒激光的聚焦偏移误差和折射率改变区域,并且提高了反射光谱的平均对比度和谱型均匀性。
发明内容
本发明的目的在于克服飞秒激光自身的自聚焦效应、光纤的特殊波导结构和光纤与周围介质的折射率差引起聚焦位置的偏移,提供一种折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法,减小飞秒激光的聚焦偏移误差和折射率改变区域,并且提高了反射光谱的平均对比度和谱型均匀性。
为达到上述目的,本发明采用下述技术方案:
一种折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法,其制备系统包括飞秒激光、聚焦物镜、折射率匹配液、载玻片、单模光纤、底部载玻片;具体步骤包括:
在底部载玻片两侧分别放置一根单模光纤,将待加工单模光纤放在两根单模光纤中间,然后在待加工单模光纤周围加入折射率匹配液,盖上载玻片;利用飞秒激光通过聚焦物镜在待加工单模光纤的纤芯上刻写两个折射率改变区域形成第一反射镜和第二反射镜,减小由光纤圆波导结构引起的球面色散和光纤与外界折射率的差异引起的飞秒激光聚焦位置偏移。
所述飞秒激光的输出波长为800nm,脉冲持续时间为120fs,输出频率为1KHz。
所述的聚焦物镜为50倍的聚焦物镜。
所述第一反射镜和第二反射镜之间的距离为100~500μm。
本发明与现有技术相比较,具有如下优点和有益效果:
本发明采用折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法,该方法减小因光纤圆波导结构引起的球面色散和因光纤与外界折射率的差异引起的飞秒激光聚焦位置偏移,同时减小了折射率改变区域的大小,提高了反射光谱的平均对比度和均匀性,提高了器件的复用能力。
1)结合了光纤本征型法布里—珀罗器件的高分辨率传感特性和飞秒激光精准微加工的优点,制备简单,可实现小尺寸、高灵敏度和快响应速度的微量检测;
2)折射率匹配液和载玻片包裹的制备优化法减少了由光纤圆波导结构引起的球面色散和因光纤与外界折射率的差异引起的飞秒激光聚焦位置偏移,提高了反射光谱的平均对比度和均匀性;
3)飞秒激光微加工技术简化了器件制备过程,并且重复性高,易于实现器件的批量加工。
附图说明
图1是本发明中光纤本征型法布里—珀罗器件传感器件的结构框图。
图2是本发明中折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法图。
图3是本发明飞秒激光刻写轨迹示意图。
图4是本发明中反射谱测试系统装置示意图。
图5和图6分别是采用飞秒激光直接刻写法制备的腔长为200μm和400μm本征型法布里—珀罗器件的反射谱。
图7和图8分别是采用折射率匹配液和载玻片包裹制备的腔长为200μm和400μm的本征型法布里—珀罗器件的反射谱。
具体实施方式
下面结合附图和实施例对本发明内容作进一步的阐述。
如图1和图2所示,一种折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法,其制备系统包括飞秒激光4、50倍的聚焦物镜5、折射率匹配液6、载玻片7、单模光纤8、待加工单模光纤9、底部载玻片10;本实施例选用输出波长为800nm,脉冲持续时间为120fs,输出频率为1KHz的飞秒激光器,并结合折射率匹配液6和载玻片7在光纤纤芯1上刻写两个折射率改变区域形成反射镜,两个反射镜之间的距离为100~500μm。该方法减小了因飞秒激光自身的自聚焦效应,减小由光纤圆波导结构引起的球面色散和光纤与外界折射率的差异引起的飞秒激光聚焦位置偏移。
具体步骤包括:
1)光纤样品的制备:取一段适度长的待加工单模光纤9,在光纤中间剥去3cm左右的涂覆层,并用酒精将裸纤部分擦拭干净,接着将待加工单模光纤9固定在载玻片7上。
2)折射率匹配液的加入:在待加工单模光纤9两边分别放置两根单模光纤8用来支撑步骤1)所用到的载玻片7。用滴管吸取事先配制好的折射率匹配液6,滴到待加工单模光纤9上面,接着在折射率匹配液6上面覆盖一片干净的载玻片7,使得折射率匹配液6均匀分布在待加工单模光纤9的周围,而两边的单模光纤8可以很好地防止加工时折射率匹配液6的流动引起加工单模光纤9的晃动。
3)光纤法布里-珀罗干涉仪反射镜的制备:如图3所示,把上述样品固定在三维微加工平台上,将飞秒激光4聚焦到待加工单模光纤9的纤芯1中心,通过CCD监控确定飞秒激光4所在位置,采用自上而下的纵向加工方式进行刻写,即光纤的移动方向平行于飞秒激光4光束的传输方向。加工时,采用25mw的刻写功率,选取50倍率的聚焦物镜5,将飞秒激光4聚焦于待加工单模光纤9的纤芯1,让微加工平台先沿着z轴方向向上移动,其平台移动速度和距离分别为:1μm/s和8μm,此时飞秒激光4聚焦于纤芯1的下方;接着沿着z轴方向向下移动并点击电子快门,使飞秒激光4穿过纤芯1,其平台移动速度和距离分别为1μm/s和16μm,从而在纤芯1上形成内部反射镜。
参见图4,本器件测试本征型法布里—珀罗传感器的反射谱的系统框图。采用的主要测量设备为光纤传感分析仪si725。si725由扫描式光源、环形器和光谱分析仪组成,其中扫描式光源的扫描范围为1510nm~1590nm,光谱分析仪的分辨率为0.005nm。为了减小另一端的光纤端面反射,将光纤的尾端浸入到折射率匹配液中,减小外界光对反射信号的影响。
图5和图6为采用飞秒激光直接刻写法,腔长为200和400μm的本征型法布里—珀罗器件的反射信号,其方差分别为6.58dB2和6.55dB2。
图7和图8为采用折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法,腔长为200和400μm的本征型法布里—珀罗器件的反射信号,其优化后的方差分别为1.10dB2和0.42dB2,因此反射谱的均匀性分别提高了5.48dB2和6.13dB2。
Claims (4)
1.一种折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法,其制备系统包括飞秒激光(4)、聚焦物镜(5)、折射率匹配液(6)、载玻片(7)、单模光纤(8)、待加工单模光纤(9)、底部载玻片(10);其特征在于,具体步骤包括:
在底部载玻片(10)两侧分别放置一根单模光纤(8),将待加工单模光纤(9)放在两根单模光纤(8)中间,然后在待加工单模光纤(9)周围加入折射率匹配液(6),盖上载玻片(7);利用飞秒激光(4)通过聚焦物镜(5)在待加工单模光纤(9)的纤芯(1)上刻写两个折射率改变区域形成第一反射镜(2)和第二反射镜(3),减小由光纤圆波导结构引起的球面色散和光纤与外界折射率的差异引起的飞秒激光聚焦位置偏移。
2.根据权利要求1所述的折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法,其特征在于,所述飞秒激光(4)的输出波长为800nm,脉冲持续时间为120fs,输出频率为1KHz。
3.根据权利要求1所述的折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法,其特征在于,所述的聚焦物镜(5)为50倍的聚焦物镜。
4.根据权利要求1所述的折射率匹配液和载玻片包裹的本征型法布里—珀罗器件制备方法,其特征在于,所述第一反射镜(2)和第二反射镜(3)之间的距离为100~500μm。
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109974759A (zh) * | 2019-04-23 | 2019-07-05 | 中国计量大学 | 用飞秒激光诱导基于游标效应的光纤线内级联法布里-珀罗腔传感器 |
CN111220188A (zh) * | 2020-01-17 | 2020-06-02 | 广州大学 | 基于级联光纤错位移对增强游标效应超灵敏折射率传感器 |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004279957A (ja) * | 2003-03-18 | 2004-10-07 | Japan Science & Technology Agency | 光減衰性光導波材料及びその製造方法 |
CN101028670A (zh) * | 2007-04-09 | 2007-09-05 | 中国科学院西安光学精密机械研究所 | 超短脉冲激光微加工制作光纤f-p传感器的方法及设备 |
CN102221422A (zh) * | 2011-04-01 | 2011-10-19 | 上海大学 | 飞秒脉冲激光制备的本征型光纤法珀温度传感器及其制作方法 |
CN106291802A (zh) * | 2016-09-18 | 2017-01-04 | 西安交通大学 | 一种基于飞秒激光直写制备相移光纤布拉格光栅的方法 |
CN108225386A (zh) * | 2017-12-26 | 2018-06-29 | 北京信息科技大学 | 一种基于800nm飞秒激光器制作光纤F-P传感器的方法 |
-
2018
- 2018-08-06 CN CN201810882271.2A patent/CN109000693A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004279957A (ja) * | 2003-03-18 | 2004-10-07 | Japan Science & Technology Agency | 光減衰性光導波材料及びその製造方法 |
CN101028670A (zh) * | 2007-04-09 | 2007-09-05 | 中国科学院西安光学精密机械研究所 | 超短脉冲激光微加工制作光纤f-p传感器的方法及设备 |
CN102221422A (zh) * | 2011-04-01 | 2011-10-19 | 上海大学 | 飞秒脉冲激光制备的本征型光纤法珀温度传感器及其制作方法 |
CN106291802A (zh) * | 2016-09-18 | 2017-01-04 | 西安交通大学 | 一种基于飞秒激光直写制备相移光纤布拉格光栅的方法 |
CN108225386A (zh) * | 2017-12-26 | 2018-06-29 | 北京信息科技大学 | 一种基于800nm飞秒激光器制作光纤F-P传感器的方法 |
Non-Patent Citations (1)
Title |
---|
JIABAO XIONG ET AL.: "Intrinsic Fabry-Perot Interferometer Fabricated by Femtosecond Laser Micromachining with Index Matching Oil", 《IEEE 2015 OPTO-ELECTRONICS AND COMMUNICATIONS CONFERENCE (OECC)》 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109974759A (zh) * | 2019-04-23 | 2019-07-05 | 中国计量大学 | 用飞秒激光诱导基于游标效应的光纤线内级联法布里-珀罗腔传感器 |
CN111220188A (zh) * | 2020-01-17 | 2020-06-02 | 广州大学 | 基于级联光纤错位移对增强游标效应超灵敏折射率传感器 |
CN114660705A (zh) * | 2022-03-24 | 2022-06-24 | 西北大学 | 基于高折射率匹配液逐面刻写光纤布拉格光栅的方法 |
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