CN108982922A - A kind of electrostatic testing apparatus for wafer production environment - Google Patents
A kind of electrostatic testing apparatus for wafer production environment Download PDFInfo
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- CN108982922A CN108982922A CN201811166536.5A CN201811166536A CN108982922A CN 108982922 A CN108982922 A CN 108982922A CN 201811166536 A CN201811166536 A CN 201811166536A CN 108982922 A CN108982922 A CN 108982922A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 37
- 239000000523 sample Substances 0.000 claims abstract description 11
- 230000001681 protective effect Effects 0.000 claims description 21
- 239000007787 solid Substances 0.000 claims description 2
- 238000001514 detection method Methods 0.000 abstract description 7
- 239000011257 shell material Substances 0.000 description 17
- 238000004804 winding Methods 0.000 description 7
- 230000009471 action Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/24—Arrangements for measuring quantities of charge
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention relates to the technical fields of electrostatic detection auxiliary equipment, more particularly to a kind of electrostatic testing apparatus for wafer production environment；Including electrostatic detector ontology, connecting wire and rifle is visited, electrostatic detector ontology front side wall is provided with display screen, control key group and port set, visits and is provided with probe on rifle；It further include preceding connecting column, handle, connection frame, preceding Rotational Cylindrical, connecting spring and rear Rotational Cylindrical；Further include two groups of fixed blocks, two groups of pulling plates, two groups of connecting rods, two groups of set springs and two groups of connecting plates, is provided with port on two groups of fixed blocks；It further include four groups of bolts, four groups of nuts, four groups of supporting legs and four groups of rotating bars, four groups of rotating bar one end are rotatably provided with universal wheel, four groups of rotating bar other ends are provided with sucker, first through hole is provided on four groups of supporting legs, it is provided with the second through-hole in four groups of rotating bars, is provided with lock pad between four groups of nuts and four groups of rotating bars.
Description
Technical field
The present invention relates to the technical field of electrostatic detection auxiliary equipment, more particularly to a kind of for wafer production environment
Electrostatic testing apparatus.
Background technique
It is well known that the electrostatic testing apparatus for wafer production environment is that one kind is used in wafer production process, to life
It produces environment and carries out electrostatic detection, make the safer auxiliary device produced of wafer, obtained in the field of electrostatic detection
It is extensive to use；The existing electrostatic testing apparatus for wafer production environment include electrostatic detector ontology, connecting wire and
Rifle is visited, electrostatic detector ontology front side wall is provided with display screen, control key group and port set, visits rifle and passes through connecting wire and electrostatic
The connection of detector ontology is visited and is provided with probe on rifle；The existing electrostatic testing apparatus for wafer production environment is in use, logical
It crosses probe and carries out electrostatic detection, displayed data by display screen, and electrostatic detector ontology is carried out by control key group
Operation control connects other all kinds of conducting wires by port set, and electrostatic detector ontology, connecting wire visit rifle and pop one's head in as market
Common electrical part need to only be electrically connected to each other according to the operation instructions bought back together when buying back use and be electrically connected with alternating current
It carries out using therefore details are not described herein；It is found in the existing electrostatic testing apparatus use for wafer production environment, works as connection
When conducting wire is too long, it cannot be conveniently wound arrangement, it is made to be easier to cause the practicality poor from mutually winding；And it cannot be square
Just spy rifle is carried out stablizing placement, causes its use more inconvenient；And its entirety cannot facilitate and be moved, so as to cause it
Adaptability is poor.
Summary of the invention
In order to solve the above technical problems, the present invention provide it is a kind of its when connecting wire is too long, can be convenient and be wound
It arranges, it is made to be not easy to improve the practicality from mutually winding；And can facilitate to visit rifle carry out stablizing placement, make its use compared with
For convenience；And its entirety can be convenient and be moved, to improve the electrostatic for wafer production environment of its adaptability
Detection device.
A kind of electrostatic testing apparatus for wafer production environment of the invention, including electrostatic detector ontology, connection are led
Line and visit rifle, electrostatic detector ontology front side wall is provided with display screen, control key group and port set, visit rifle by connecting wire with
The connection of electrostatic detector ontology is visited and is provided with probe on rifle；It further include preceding connecting column, handle, connection frame, preceding Rotational Cylindrical, connection
Spring and rear Rotational Cylindrical, preceding connecting column are mounted in front of electrostatic detector ontology top, and handle is mounted on connection frame, preceding rotation
The front end of column is connect with connection frame, connecting column rear side and connecting spring before the rear end of preceding Rotational Cylindrical passes through preceding connecting column and extend out to
Front end connection, connecting spring rear end is connect with rear Rotational Cylindrical front end；Further include two groups of fixed blocks, two groups of pulling plates, two groups of connecting rods,
Two groups of set springs and two groups of connecting plates, two groups of fixed blocks are installed on front side of electrostatic detector ontology left side wall and rear side, and two groups solid
Determine to be provided with port on block, two groups of connecting rod one end are connect with two groups of pulling plates respectively, and two groups of connecting rod other ends are each passed through
Two groups of ports and being respectively protruding into the inside of two groups of fixed blocks are connect with two groups of connecting plates, and two groups of set springs are set in two groups of companies
On the outside of extension bar, one end of two groups of set springs is connect with fixed block inner sidewall respectively, the other end of two groups of set springs respectively with two groups of connections
Connection on the outside of plate；It further include four groups of bolts, four groups of nuts, four groups of supporting legs and four groups of rotating bars, four groups of supporting legs are separately mounted to quiet
Electro-detection instrument ontology bottom end front left side, forward right side, left rear side and right lateral side, four groups of rotating bar one end are rotatably provided with universal
Wheel, four groups of rotating bar other ends are provided with sucker, first through hole are provided on four groups of supporting legs, is respectively provided in four groups of rotating bars
There is the second through-hole, four groups of bolts are each passed through four groups of first through hole and four group of second through-hole and respectively insertion and spiral shell is filled to four groups of spiral shells
It is female internal, lock pad is provided between four groups of nuts and four groups of rotating bars, four groups of lock pads are set in outside four groups of bolts
Side.
A kind of electrostatic testing apparatus for wafer production environment of the invention, further includes protective shell, sets inside protective shell
It is equipped with protection chamber, protection mouth is provided with and communicated on the right side of protective shell, for protection cap mounted in visiting on rifle, probe, which is located at, protects intracavitary portion,
It visits rifle top and bottom end is provided with limited post, protective shell top and bottom end are provided with elastic string, and two groups of elastic strings cover respectively
On the outside of two groups of limited posts.
A kind of electrostatic testing apparatus for wafer production environment of the invention, further includes rear connecting column, rear connecting column peace
Mounted in electrostatic detector ontology top rear, placing groove is provided on rear connecting column front side wall, and be internally provided in placing groove
Ball bearing and limit film, placing groove front side are provided with baffle, further include rotation pipe, pass through baffle on rear side of rotation pipe and be inserted into rolling
Pearl Bearing inner is simultaneously connect with limit film.
A kind of electrostatic testing apparatus for wafer production environment of the invention, rotation pipe front side are provided with and communicated with connection
Mouthful, further include adjustment spring group and fixed ring, connect on the inside of adjustment spring group one end and rotation pipe, the adjustment spring group other end and
Fixed ring connection, is arranged in fixed ring jagged, is installed on inside fixed ring on rear side of rear Rotational Cylindrical.
A kind of electrostatic testing apparatus for wafer production environment of the invention further includes fixed column and protection cap, fixes
Column is mounted on front side of electrostatic detector ontology, and fixed column is located at the top of control key group and port set, protection cap top with consolidate
Fixed column is hinged, and control key group and port set are respectively positioned on inside protection cap.
A kind of electrostatic testing apparatus for wafer production environment of the invention, further includes torque spring and fixing clamp, Gu
Clamp is mounted on rear Rotational Cylindrical side wall by torque spring.
A kind of electrostatic testing apparatus for wafer production environment of the invention further includes two groups of shadoofs and shadoof, shadoof
Left and right side is connect with above two groups of shadoofs respectively, is installed in electrostatic detector ontology top below two groups of shadoofs.
A kind of electrostatic testing apparatus for wafer production environment of the invention, two groups of elastic strings are set in two groups of limits
When on the outside of the column of position, two groups of elastic strings are in tensional state.
Compared with prior art the invention has the benefit that it can make it drive connection by manual swing handle
Rear Rotational Cylindrical on frame is rotated, and connecting wire one end is fixed in rear Rotational Cylindrical, and connecting wire is made to can be convenient progress
Winding arranges, and when connecting wire is too long, can be convenient and is wound arrangement, it is made to be not easy to improve the practicality from mutually winding；
And two groups of pulling plates can be pulled outward, two groups of pulling plates drive two groups of connecting plates front and backs to place to movement and visit rifle respectively, and pine
Two groups of pulling plates are opened, two groups of connecting plates carry out clamping fixation under the action of two groups of set springs to spy rifle, can facilitate to spy rifle
Carry out stablizing placement, make it using more convenient, and when disassembled, pull open two groups of pulling plates, take out and visit rifle, can facilitate into
Row, which is stablized, to be placed or dismantles, and is reduced it and is used limitation；And it can be such that entirety is moved easily by four groups of universal wheels, and lead to
It crosses four groups of suckers and improves stability, when integrally needing mobile, unscrew four groups of nuts, rotate rotating bar, universal wheel end is gone to
Four groups of nuts are tightened in lower section, when integrally needing to stablize, unscrew four groups of nuts, rotate rotating bar, and sucker end is gone to lower section,
Four groups of nuts are tightened, its entirety is can be convenient and is moved, to improve its adaptability, lock pad facilitates nut and rotation
It is locked between bar, improves use reliability.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is the structural schematic diagram that preceding connecting column is connected with rear connecting column；
Fig. 3 is the schematic diagram of internal structure of rotation pipe；
Fig. 4 is the structural schematic diagram that fixed block is connected with connecting plate；
Fig. 5 is the portion the A partial enlarged view of Fig. 1；
It is attached marked in the figure: 1, electrostatic detector ontology；2, connecting wire；3, rifle is visited；4, it pops one's head in；5, preceding connecting column；6, handle；7,
Connection frame；8, preceding Rotational Cylindrical；9, rear Rotational Cylindrical；10, fixed block；11, pulling plate；12, connecting rod；13, spring is covered；14, connecting plate；
15, bolt；16, nut；17, supporting leg；18, rotating bar；19, lock pad；20, protective shell；21, limited post；22, elastic string；23,
Connecting column afterwards；24, baffle；25, rotation pipe；26, fixed ring；27, fixed column；28, protection cap；29, fixing clamp；30, shadoof；
31, handle；32, display screen；33, control key group；34, port set.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiments of the present invention will be described in further detail.Implement below
Example is not intended to limit the scope of the invention for illustrating the present invention.
As shown in Figures 1 to 5, a kind of electrostatic testing apparatus for wafer production environment of the invention, including electrostatic inspection
It surveys instrument ontology 1, connecting wire 2 and visits rifle 3,1 front side wall of electrostatic detector ontology is provided with display screen 32, control key group 33 and end
Mouth group 34 is visited rifle 3 and is connect by connecting wire 2 with electrostatic detector ontology 1, visits and is provided with probe 4 on rifle 3；Connect before further including
Column 5, handle 6, connection frame 7, preceding Rotational Cylindrical 8, connecting spring and rear Rotational Cylindrical 9 are connect, preceding connecting column 5 is mounted on electrostatic detector sheet
In front of 1 top of body, handle 6 is mounted on connection frame 7, and the front end of preceding Rotational Cylindrical 8 is connect with connection frame 7, the rear end of preceding Rotational Cylindrical 8
Across preceding connecting column 5 and before extending out to, 5 rear side of connecting column is connect with connecting spring front end, connecting spring rear end and rear Rotational Cylindrical 9
Front end connection；It further include 10, two groups of two groups of fixed blocks, 11, two groups of pulling plate connecting rod, 12, two groups of set springs 13 and two groups of connecting plates 14,
Two groups of fixed blocks 10 are installed on front side of 1 left side wall of electrostatic detector ontology and rear side, are provided on two groups of fixed blocks 10 logical
Mouthful, two groups of 12 one end of connecting rod are connect with two groups of pulling plates 11 respectively, and two groups of 12 other ends of connecting rod are each passed through two groups of ports simultaneously
It is respectively protruding into the inside of two groups of fixed blocks 10 and is connect with two groups of connecting plates 14, two groups of set springs 13 are set in two groups of connecting rods
12 outsides, one end of two groups of set springs 13 connect with 10 inner sidewall of fixed block respectively, the other end of two groups of set springs 13 respectively with two groups
It is connected on the outside of connecting plate 14；It further include 15, four groups of four groups of bolts, 16, four groups of nut supporting leg 17 and four groups of rotating bars 18, four groups of branch
Leg 17 is separately mounted to 1 bottom end front left side of electrostatic detector ontology, forward right side, left rear side and right lateral side, four groups of rotating bars 18 1
End is rotatably provided with universal wheel, and four groups of 18 other ends of rotating bar are provided with sucker, and the is provided on four groups of supporting legs 17
One through-hole is provided with the second through-hole in four groups of rotating bars 18, and four groups of bolts 15 are each passed through four groups of first through hole and four group
Two through-holes and respectively insertion and spiral shell be filled to inside four groups of nuts 16, be provided with lock between four groups of nuts 16 and four groups of rotating bars 18
Tight pad 19, four groups of lock pads 19 are set in four groups of bolts, 15 outside；It can make its company of drive by manual swing handle
The rear Rotational Cylindrical connect on frame is rotated, and connecting wire one end is fixed in rear Rotational Cylindrical, make connecting wire can be convenient into
Row winding arranges, and when connecting wire is too long, can be convenient and is wound arrangement, it is made to be not easy that it is practical to improve its from mutually winding
Property；And two groups of pulling plates can be pulled outward, two groups of pulling plates drive two groups of connecting plates front and backs to movement respectively, and it places and visits rifle,
And unclamp two groups of pulling plates, two groups of connecting plates under the action of two groups of set springs to visit rifle carry out clamping fixation, can conveniently pair
It visits rifle to carry out stablizing placement, uses it more convenient, and when disassembled, two groups of pulling plates are pulled open, takes out and visits rifle, Neng Goufang
Just it carries out stablizing placement or disassembly, reduces it and use limitation；And it can be such that entirety is moved easily by four groups of universal wheels,
And stability is improved by four groups of suckers, when integrally needing mobile, unscrew four groups of nuts, rotating bar is rotated, by universal wheel end
Lower section is gone to, four groups of nuts are tightened, when integrally needing to stablize, unscrews four groups of nuts, rotates rotating bar, sucker end is gone to down
Side, tightens four groups of nuts, can be convenient its entirety and moved, to improve its adaptability, lock pad facilitate nut with
It is locked between rotating bar, improves use reliability.
A kind of electrostatic testing apparatus for wafer production environment of the invention, further includes protective shell 20, in protective shell 20
Portion is provided with protection chamber, and protection mouth is provided with and communicated on the right side of protective shell 20, and mounted in visiting on rifle 3, probe 4 is located to be protected the lid of protective shell 20
Intracavitary portion to be protected, 3 top of rifle is visited and bottom end is provided with limited post 21,20 top of protective shell and bottom end are provided with elastic string 22,
Two groups of elastic strings 22 are set in two groups of limited posts, 21 outside；It carries out material guarantor when can be idle to probe by protective shell
Shield improves use reliability.
A kind of electrostatic testing apparatus for wafer production environment of the invention further includes rear connecting column 23, rear connecting column
23 are mounted on 1 top rear of electrostatic detector ontology, are provided with placing groove on rear 23 front side wall of connecting column, and inside placing groove
It is provided with ball bearing and limit film, baffle 24 is provided on front side of placing groove, further includes rotation pipe 25, passed through on rear side of rotation pipe 25
Baffle 24 is inserted into inside ball bearing and connect with limit film；It can facilitate Rotational Cylindrical after auxiliary to turn by ball bearing
Dynamic, limit film limits rotation pipe, prevents its placing groove of leaping up out, and limit film and rotation pipe rigid connection, and rotation pipe turns
When dynamic, limit film is rotated therewith, and ball bearing is installed between baffle and limit film, places to will not leap up out
Slot, can be with mechanical interlocking, so that limit film further progress be facilitated to fix between limit film and placing groove.
A kind of electrostatic testing apparatus for wafer production environment of the invention is provided with and communicated with connection on front side of rotation pipe 25
Mouthful, further include adjustment spring group and fixed ring 26, is connected on the inside of adjustment spring group one end and rotation pipe 25, adjustment spring group is another
End is connect with fixed ring 26, is arranged jagged in fixed ring 26, is installed on inside fixed ring 26 on rear side of rear Rotational Cylindrical 9；It can be with
By rotation pipe to blocking on rear side of rear Rotational Cylindrical, keep connecting wire not easily to fall off, fixed ring is driven by adjustment spring group
Clamping fixation is carried out to rear Rotational Cylindrical, Rotational Cylindrical carries out disassembly disengaging after convenience, so that connecting wire be facilitated to be dismounted.
A kind of electrostatic testing apparatus for wafer production environment of the invention, further includes fixed column 27 and protection cap 28,
Fixed column 27 is mounted on 1 front side of electrostatic detector ontology, and fixed column 27 is located at the top of control key group 33 and port set 34, protects
28 top of protecting cover and fixed column 27 are hinged, and control key group 33 and port set 34 are respectively positioned on inside protection cap 28；It can pass through
Protection cap protects control key group, prevents from accidentally touching.
A kind of electrostatic testing apparatus for wafer production environment of the invention, further includes torque spring and fixing clamp 29,
Fixing clamp 29 is mounted on rear 9 side wall of Rotational Cylindrical by torque spring；It can pass through the cooperation side of fixing clamp and rear connecting column
Just connecting wire one end is fixed on rear connecting column, when fixed, breaks fixing clamp into two with one's hands, and connecting wire one end is placed in fixing clamp with after
Between connecting column, it is fixed under the action of torque spring.
A kind of electrostatic testing apparatus for wafer production environment of the invention, further includes two groups of shadoofs 30 and handle 31,
31 left and right side of handle is connected with above two groups of shadoofs 30 respectively, is installed in electrostatic detector ontology below two groups of shadoofs 30
1 top；It can carry handle by hand and its entirety is facilitated carried, more portable.
A kind of electrostatic testing apparatus for wafer production environment of the invention, two groups of elastic strings 22 are set in two groups
When 21 outside of limited post, two groups of elastic strings 22 are in tensional state；It can be by two groups of elastic strings of tensional state to guarantor
Protective case is limited, it is made to facilitate fixation, and when protective shell is won, cover two groups of elastic strings no longer two
At group limited post, can conveniently it take.
A kind of electrostatic testing apparatus for wafer production environment of the invention at work can be by turning manually
Dynamic handle, makes it that the rear Rotational Cylindrical on connection frame be driven to be rotated, connecting wire one end is fixed in rear Rotational Cylindrical, makes to connect
It connects conducting wire and can be convenient and be wound arrangement, when connecting wire is too long, can be convenient and be wound arrangement, be not easy it from phase
Winding improves the practicality；And two groups of pulling plates can be pulled outward, two groups of pulling plates drive respectively before and after two groups of connecting plates to
It is mobile, it places and visits rifle, and unclamp two groups of pulling plates, two groups of connecting plates carry out clamping fixation under the action of two groups of set springs to spy rifle,
It can facilitate and spy rifle is carried out stablizing placement, use it more convenient, and when disassembled, two groups of pulling plates are pulled open, are taken out
Rifle is visited, can facilitate and carry out stablizing placement or disassembly, it is reduced and uses limitation；And it can pass through four groups of universal wheels
It is moved easily entirety, and improves stability by four groups of suckers, when integrally needing mobile, unscrews four groups of nuts, rotates and turn
Universal wheel end is gone to lower section, tightens four groups of nuts by lever, when integrally needing to stablize, unscrews four groups of nuts, rotation rotation
Sucker end is gone to lower section, tightens four groups of nuts, can be convenient its entirety and moved by bar, so that its adaptability is improved,
Lock pad facilitates is locked between nut and rotating bar, improves use reliability；When can be idle to probe by protective shell
Material protection is carried out, use reliability is improved；Rotational Cylindrical after auxiliary can be facilitated to rotate by ball bearing, limit film is to rotation
Pipe is limited, and prevents its placing groove of leaping up out, and limit film and rotation pipe rigid connection, when rotation pipe rotates, limit film is with it
It rotates together, and ball bearing is installed between baffle and limit film, thus the placing groove that will not leap up out, limit film and placing groove
Between can be with mechanical interlocking, so that limit film further progress be facilitated to fix；Can by rotation pipe on rear side of rear Rotational Cylindrical into
Row is blocked, and keeps connecting wire not easily to fall off, drives fixed ring to carry out clamping fixation to rear Rotational Cylindrical by adjustment spring group, convenient
Rotational Cylindrical carries out disassembly disengaging afterwards, so that connecting wire be facilitated to be dismounted；Control key group can be protected by protection cap
Shield, prevents from accidentally touching；Connecting wire one end can be facilitated to be fixed on rear connecting column by the cooperation of fixing clamp and rear connecting column, Gu
Periodically, it breaks fixing clamp into two with one's hands, connecting wire one end is placed between fixing clamp and rear connecting column, to it under the action of torque spring
It fixes；Handle can be carried by hand facilitates its entirety carried, more portable；Tensional state can be passed through
Two groups of elastic strings protective shell is limited, so that it is facilitated fixation, and when protective shell is won, two groups made under elastic reaction
Elastic string no longer covers at two groups of limited posts, can conveniently take.
A kind of electrostatic testing apparatus for wafer production environment of the invention, the installation side of all components described above
Formula, connection type or set-up mode are common mechanical mode, and the specific structure of its all component, model and coefficient index
It is its included technology, is implemented as long as the equal of its advantages can be reached, therefore do not adding to repeat.
A kind of electrostatic testing apparatus for wafer production environment of the invention, in the absence of explanation to the contrary, " on
Inside and outside lower left and right, front and back and vertical-horizontal " etc. the noun of locality that is included in the term only represent the term in normal service condition
Under orientation, or be those skilled in the art understand that be commonly called as, should not be seen as a limitation of this term, at the same time, "
One ", the ordered series of numbers such as " second " and " third " noun does not represent specific quantity and sequence, is only used for the differentiation of title.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, without departing from the technical principles of the invention, several improvements and modifications, these improvements and modifications can also be made
Also it should be regarded as protection scope of the present invention.
Claims (8)
1. a kind of electrostatic testing apparatus for wafer production environment, including electrostatic detector ontology (1), connecting wire (2) and
It visits rifle (3), electrostatic detector ontology (1) front side wall is provided with display screen (32), control key group (33) and port set (34), visits rifle
(3) it is connect by connecting wire (2) with electrostatic detector ontology (1), visits and be provided with probe (4) on rifle (3)；It is characterized in that,
It further include preceding connecting column (5), handle (6), connection frame (7), preceding Rotational Cylindrical (8), connecting spring and rear Rotational Cylindrical (9), preceding connection
Column (5) is mounted in front of electrostatic detector ontology (1) top, and handle (6) is mounted on connection frame (7), before preceding Rotational Cylindrical (8)
End is connect with connection frame (7), and the rear end of preceding Rotational Cylindrical (8) passes through preceding connecting column (5) and extend out on rear side of preceding connecting column (5) and connect
Spring at front end connection is connect, connecting spring rear end is connect with rear Rotational Cylindrical (9) front end；It further include two groups of fixed blocks (10), two groups of drawings
Plate (11), two groups of connecting rods (12), two groups of set springs (13) and two groups of connecting plates (14), two groups of fixed blocks (10) are installed in electrostatic
On front side of detector ontology (1) left side wall and rear side, port, two groups of connecting rod (12) one end are provided on two groups of fixed blocks (10)
It is connect respectively with two groups of pulling plates (11), two groups of connecting rod (12) other ends, which are each passed through two groups of ports and are respectively protruding into two groups, to be consolidated
The inside for determining block (10) is connect with two groups of connecting plates (14), and two groups of set springs (13) are set on the outside of two groups of connecting rods (12),
One end of two groups of set springs (13) is connect with fixed block (10) inner sidewall respectively, the other end of two groups of set springs (13) respectively with two groups of companies
Connection on the outside of fishplate bar (14)；It further include four groups of bolts (15), four groups of nuts (16), four groups of supporting legs (17) and four groups of rotating bars
(18), four groups of supporting legs (17) are separately mounted to electrostatic detector ontology (1) bottom end front left side, forward right side, left rear side and right lateral side,
Four groups of rotating bar (18) one end are rotatably provided with universal wheel, and four groups of rotating bar (18) other ends are provided with sucker, and four groups
It is provided with first through hole on supporting leg (17), the second through-hole is provided on four groups of rotating bars (18), four groups of bolts (15) are respectively
It is inserted into across four groups of first through hole and four group of second through-hole and respectively and spiral shell is filled to four groups of nuts (16) inside, four groups of nuts (16)
It is provided with lock pad (19) between four groups of rotating bars (18), four groups of lock pads (19) are set in four groups of bolts (15) outside
Side.
2. a kind of electrostatic testing apparatus for wafer production environment as described in claim 1, which is characterized in that further include protecting
Protective case (20), protective shell (20) are internally provided with protection chamber, are provided with and communicated with protection mouth, protective shell (20) on the right side of protective shell (20)
For lid mounted in visiting on rifle (3), probe (4), which is located at, protects intracavitary portion, visits rifle (3) top and bottom end is provided with limited post (21), protect
Protective case (20) top and bottom end are provided with elastic string (22), and two groups of elastic strings (22) are set in two groups of limited posts (21) outside
Side.
3. a kind of electrostatic testing apparatus for wafer production environment as claimed in claim 2, which is characterized in that after further including
Connecting column (23), rear connecting column (23) are mounted on electrostatic detector ontology (1) top rear, set on rear connecting column (23) front side wall
It is equipped with placing groove, and is internally provided with ball bearing and limit film in placing groove, baffle (24) is provided on front side of placing groove, also wraps
It includes rotation pipe (25), baffle (24) is passed through on rear side of rotation pipe (25) and is inserted into inside ball bearing and is connect with limit film.
4. a kind of electrostatic testing apparatus for wafer production environment as claimed in claim 3, which is characterized in that rotation pipe
(25) front side is provided with and communicated with communication port, further includes adjustment spring group and fixed ring (26), adjustment spring group one end and rotation pipe
(25) inside connection, the adjustment spring group other end are connect with fixed ring (26), and jagged, rear Rotational Cylindrical is arranged in fixed ring (26)
(9) it is internal to be installed on fixed ring (26) for rear side.
5. a kind of electrostatic testing apparatus for wafer production environment as claimed in claim 4, which is characterized in that further include solid
Fixed column (27) and protection cap (28), fixed column (27) are mounted on front side of electrostatic detector ontology (1), and fixed column (27) is located at control
The top of key group (33) and port set (34) processed, protection cap (28) top and fixed column (27) hingedly, and control key group (33) and
It is internal that port set (34) is respectively positioned on protection cap (28).
6. a kind of electrostatic testing apparatus for wafer production environment as claimed in claim 5, which is characterized in that further include turning round
Power spring and fixing clamp (29), fixing clamp (29) are mounted on rear Rotational Cylindrical (9) side wall by torque spring.
7. a kind of electrostatic testing apparatus for wafer production environment as claimed in claim 6, which is characterized in that further include two
Group shadoof (30) and handle (31), handle (31) left and right side are connect with above two groups of shadoofs (30) respectively, two groups of shadoofs
(30) lower section is installed in electrostatic detector ontology (1) top.
8. a kind of electrostatic testing apparatus for wafer production environment as claimed in claim 7, which is characterized in that two groups of elasticity
When rope (22) is set on the outside of two groups of limited posts (21), two groups of elastic strings (22) are in tensional state.
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| CN110646695A (en) * | 2019-09-29 | 2020-01-03 | 歌尔股份有限公司 | Static test tool |
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| CN108982922B (en) | 2024-04-30 |
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