CN108982428A - Ellipsoidal reflector illuminates adaptive harmonic wave confocal micro-measurement method - Google Patents
Ellipsoidal reflector illuminates adaptive harmonic wave confocal micro-measurement method Download PDFInfo
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- CN108982428A CN108982428A CN201810498567.4A CN201810498567A CN108982428A CN 108982428 A CN108982428 A CN 108982428A CN 201810498567 A CN201810498567 A CN 201810498567A CN 108982428 A CN108982428 A CN 108982428A
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
Abstract
Ellipsoidal reflector illuminates adaptive harmonic wave confocal micro-measurement method and belongs to nonlinear optics fields of measurement；The reflective lighting system of ellipsoid, confocal micro-measurement method, adaptive aberration correcting method and harmonic wave microscopic method are organically combined, harmonic wave micrometering resolving power can be promoted.Femto-second laser pulse enters adaptive optics aberration compensation unit after beam shaping, scanning galvanometer reflection, illuminating bundle is formed after phase modulated and aberration correction and enters ellipsoidal mirror system, and is focused at excitation focal beam spot needed for sample interior forms harmonic signal generation.Sample can generate secondary and harmonic signal simultaneously after excitation, collected and parsed by the compound confocal micro-measurement system of right side two-way.After harmonic signal is collected by large-numerical aperture object lens, through two to two different wave length signals are separated into after dichronic mirror, focused through narrow band filter, image-forming objective lens, by being received respectively by photomultiplier tube (PMT) after pin hole.Harmonic wave collection module used uses confocal collection mode.The apodization of confocal pinhole acts on the interference that can effectively inhibit aliasing signal noise to parse harmonic signal, greatly improves the measurement resolution of microscopic system.
Description
Technical field
The invention belongs to optical microphotograph fields of measurement, relate generally to a kind of for three-dimensional micro- in nano-device and biological sample
The ultraprecise non-contact measurement method of fine texture measurement.
Background technique
It is generated using the nonlinear optical effect of sample itself, such as second harmonic, triple-frequency harmonics generates, and can carry out biology
The micro-imaging of sample unstressed configuration label, the micro-structure detection of nano-device, the diagnosis etc. of pathogenic mechanism.Radial polarisation light is poly-
There is strong axial polarized component at burnt focal plane, is a kind of ideal illumination optical mode of harmonic generation.But in harmonic wave micro-imaging
In the process, aliasing signal noise can generate interference to the parsing of harmonic signal, to reduce the measurement resolution of microscopic system.Light
The aberration for learning microscopic system can also reduce the launching efficiency of harmonic signal and reduce the resolution ratio of harmonic wave micro-imaging.
Harmonic wave micro-imaging is based on collected harmonic wave scattered signal, and the scale of characteristic information is under diffraction limit.It passes
The optical information that system microscopic method is collected into is comprising being more scattering properties, and non-sample self-characteristic.Using confocal collection side
Formula, is influenced smaller by scattering properties, and the harmonic signal being collected into can more reflect the architectural characteristic of sample itself.Based on SLM&DM's
The spatially decoupled of time laser pulse and phase signal may be implemented in light beam self-adapting compensation method, be pulse signal shaping with
Quality control provides a new technological approaches.
Summary of the invention
The present invention devises a kind of adaptive harmonic wave confocal micro-measurement method of ellipsoidal reflector illumination, and confocal pinhole is cut
Toe acts on the interference that can effectively inhibit aliasing signal noise to parse harmonic signal, greatly improves the measurement point of microscopic system
It distinguishes power, while it is smaller to influence the harmonic signal being collected by scattering properties, preferably reflects the architectural characteristic of sample itself.It adopts
The benefit in space, temporal four-dimensional regulation and aberration is carried out to excitation beam with the adaptive aberration compensation system based on SLM&DM
It repays, deeper sample message and clearer image can be obtained.
The object of the present invention is achieved like this:
Ellipsoidal reflector illuminates adaptive harmonic wave confocal micro-measurement method, by the reflective lighting system of ellipsoid, confocal aobvious
Micro-measuring method, adaptive aberration correcting method and harmonic wave microscopic method organically combine.Femto-second laser pulse through beam shaping, sweep
Enter adaptive optics aberration compensation unit after retouching vibration mirror reflected, forms illuminating bundle after phase modulated and aberration correction and enter
Ellipsoidal mirror system, and it is focused at excitation focal beam spot needed for sample interior forms harmonic signal generation.Sample is through swashing
Secondary and harmonic signal can be generated after exciting simultaneously by shining, and be collected simultaneously by the compound confocal micro-measurement system of right side two-way
Parsing.After harmonic signal is collected by large-numerical aperture object lens, through two to two different wave length signals are separated into after dichronic mirror, through narrow
Band optical filter, image-forming objective lens focus, by being received respectively by photomultiplier tube (PMT) after pin hole.The ellipsoidal reflector shines
Bright adaptive harmonic wave confocal micro-measurement method it is characterized in that by the reflective lighting system of ellipsoid, confocal micro-measurement method,
Adaptive aberration correcting method and harmonic wave microscopic method organically combine.
Above-mentioned ellipsoidal reflector illuminates adaptive harmonic wave confocal micro-measurement method, it is characterised in that is reflected using ellipsoid
Formula lighting system carries out harmonic wave excitation.The reflective lighting system of ellipsoid includes high-NA objective and ellipsoidal mirror, is somebody's turn to do
Object focal point is overlapped with ellipsoidal mirror over focus.
Above-mentioned ellipsoidal reflector illuminates adaptive harmonic wave confocal micro-measurement method, it is characterised in that using based on SLM&
The adaptive aberration compensation system of DM carries out the compensation in space, temporal four-dimensional regulation and aberration to excitation beam.
Above-mentioned ellipsoidal reflector illuminates adaptive harmonic wave confocal micro-measurement method, it is characterised in that uses confocal pinhole
Apodization is carried out to harmonic signal
Due to being collected in harmonic wave micro imaging method of the invention using confocal pinhole, the apodization effect of confocal pinhole can
With the interference for effectively inhibiting aliasing signal noise to parse harmonic signal, the measurement resolution of microscopic system is greatly improved.It adopts
The benefit in space, temporal four-dimensional regulation and aberration is carried out to excitation beam with the adaptive aberration compensation system based on SLM&DM
It repays, deeper sample message and clearer image can be obtained.
Detailed description of the invention
Fig. 1 is that ellipsoidal reflector illuminates adaptive harmonic wave confocal micro-measurement method schematic diagram.
Specific embodiment
Embodiment of the invention is described in detail below in conjunction with attached drawing.
It is as shown in Figure 1 that the ellipsoidal reflector of the present embodiment illuminates adaptive harmonic wave confocal micro-measurement method schematic diagram.Fly
Second laser pulse enters adaptive optics aberration compensation unit, phase modulated and picture after beam shaping, scanning galvanometer reflection
Illuminating bundle is formed after difference correction and enters ellipsoidal mirror system, and is focused at sample interior and is formed needed for harmonic signal generation
Excitation focal beam spot.Sample can generate secondary and harmonic signal simultaneously after excitation, compound by right side two-way
Confocal micro-measurement system collect and parse.After harmonic signal is collected by large-numerical aperture object lens, through two to after dichronic mirror points
From for two different wave length signals, focused through narrow band filter, image-forming objective lens, by after pin hole respectively by photomultiplier tube
(PMT) it receives.
Claims (4)
1. ellipsoidal reflector illuminates adaptive harmonic wave confocal micro-measurement method, by the reflective lighting system of ellipsoid, confocal microscopy
Measurement method, adaptive aberration correcting method and harmonic wave microscopic method organically combine；Its implementation are as follows: femto-second laser pulse warp
Enter adaptive optics aberration compensation unit after beam shaping, scanning galvanometer reflection, is formed after phase modulated and aberration correction
Illuminating bundle enters ellipsoidal mirror system, and is focused at the excitation that sample interior is formed needed for harmonic signal occurs and focuses light
Spot；Sample can generate secondary and harmonic signal simultaneously after excitation, be surveyed by the compound confocal microscopy of right side two-way
Amount system is collected and is parsed；After harmonic signal is collected by large-numerical aperture object lens, through two to being separated into two differences after dichronic mirror
Wavelength signals are focused through narrow band filter, image-forming objective lens, by being received respectively by photomultiplier tube (PMT) after pin hole；Its feature
It is there is the reflective lighting system of ellipsoid, confocal micro-measurement method, adaptive aberration correcting method and harmonic wave microscopic method
Machine combines.
2. ellipsoidal reflector according to claim 1 illuminates adaptive harmonic wave confocal micro-measurement method, feature exists
In using the reflective lighting system progress harmonic wave excitation of ellipsoid；The reflective lighting system of ellipsoid includes high-NA objective and ellipse
Spherical reflector, the object focal point are overlapped with ellipsoidal mirror over focus.
3. ellipsoidal reflector according to claim 1 illuminates adaptive harmonic wave confocal micro-measurement method, feature exists
In being carried out using the adaptive aberration compensation system based on SLM&DM to excitation beam, space, the temporal four-dimension regulates and controls and aberration
Compensation.
4. ellipsoidal reflector according to claim 1 illuminates adaptive harmonic wave confocal micro-measurement method, feature exists
Apodization is carried out to harmonic signal in use confocal pinhole.
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| CN109884052A (en) * | 2019-01-17 | 2019-06-14 | 哈尔滨工业大学 | Subtraction formula harmonic wave micro imaging method based on CCD detection |
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| CN109884051A (en) * | 2019-01-17 | 2019-06-14 | 哈尔滨工业大学 | Harmonic wave confocal micro-measurement method based on image scanning |
| CN110623641A (en) * | 2019-09-19 | 2019-12-31 | 哈尔滨工业大学 | Self-adaptive second and third harmonic joint detection microscopic imaging method and device |
| CN110638424A (en) * | 2019-09-19 | 2020-01-03 | 哈尔滨工业大学 | Scanning light sheet harmonic wave microscopic imaging method and device |
| CN110664369A (en) * | 2019-09-19 | 2020-01-10 | 哈尔滨工业大学 | Self-adaptive confocal line scanning harmonic microscopic imaging method and device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109884052A (en) * | 2019-01-17 | 2019-06-14 | 哈尔滨工业大学 | Subtraction formula harmonic wave micro imaging method based on CCD detection |
| CN109884053A (en) * | 2019-01-17 | 2019-06-14 | 哈尔滨工业大学 | Harmonic wave microscopic measuring method based on the micro- and confocal slit detection of piece light |
| CN109884051A (en) * | 2019-01-17 | 2019-06-14 | 哈尔滨工业大学 | Harmonic wave confocal micro-measurement method based on image scanning |
| CN109884052B (en) * | 2019-01-17 | 2022-02-01 | 哈尔滨工业大学 | Subtraction type harmonic microscopic imaging method based on CCD detection |
| CN110623641A (en) * | 2019-09-19 | 2019-12-31 | 哈尔滨工业大学 | Self-adaptive second and third harmonic joint detection microscopic imaging method and device |
| CN110638424A (en) * | 2019-09-19 | 2020-01-03 | 哈尔滨工业大学 | Scanning light sheet harmonic wave microscopic imaging method and device |
| CN110664369A (en) * | 2019-09-19 | 2020-01-10 | 哈尔滨工业大学 | Self-adaptive confocal line scanning harmonic microscopic imaging method and device |
| CN110638424B (en) * | 2019-09-19 | 2022-05-13 | 哈尔滨工业大学 | Scanning light sheet harmonic wave microscopic imaging method and device |
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Application publication date: 20181211 |