CN108977774A - Crucible, evaporation coating device and evaporation coating method - Google Patents
Crucible, evaporation coating device and evaporation coating method Download PDFInfo
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- CN108977774A CN108977774A CN201811000756.0A CN201811000756A CN108977774A CN 108977774 A CN108977774 A CN 108977774A CN 201811000756 A CN201811000756 A CN 201811000756A CN 108977774 A CN108977774 A CN 108977774A
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- Prior art keywords
- crucible
- sub
- lid
- opening
- evaporation coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of crucible, evaporation coating device and evaporation coating methods, belong to coating technique field.The crucible includes: the crucible body and crucible cap assemblies of releasable connection, and the crucible body and crucible cap assemblies constitute crucible chamber；The crucible cap assemblies include at least two sub- crucible lids being laminated, the adjacent sub- crucible lid releasable connection of any two in the described at least two sub- crucible lids being laminated；Each sub- crucible lid is provided with opening, and the opening of each sub- crucible lid is provided with the extension extended to the crucible chamber interior, and the extension of the adjacent sub- crucible lid of any two is mutually nested.The evaporation coating device includes above-mentioned crucible, vapor deposition chamber and disassembly component.By the present invention in that include crucible, vapor deposition chamber and the evaporation coating method for dismantling component with one kind, when solving opening on crucible in the related technology and being blocked, it is more difficult to which the problem of handling has reached simplified operating procedure, improves the effect of the evaporation rate of evaporation coating device.
Description
Technical field
The present invention relates to coating technique field, in particular to a kind of crucible, evaporation coating device and evaporation coating method.
Background technique
Evaporation coating device generally includes vapor deposition chamber and setting in the vapor deposition indoor crucible of chamber.Wherein, vapor deposition chamber is for putting
Membrane element to be plated is set, crucible is for placing Coating Materials.Coating Materials can be made to evaporate by heating crucible, and in vapor deposition chamber
In parts surface to be coated formed film layer.
One of the relevant technologies crucible, is internally provided with the crucible chamber for placing Coating Materials, on the crucible
It is additionally provided with the opening for being connected to the crucible chamber with outside.After Coating Materials evaporation, crucible can be overflowed from the opening.Logical
It crosses during evaporation coating device is deposited, if the opening is blocked by Coating Materials, vapor deposition chamber can be opened, take out the earthenware
Crucible.New crucible is put into vapor deposition chamber to continue to be deposited later.
In the implementation of the present invention, discovery aforesaid way at least has following defects that on above-mentioned crucible inventor
When opening is blocked, it is more difficult to handle, and then seriously affect the evaporation rate of evaporation coating device.
Summary of the invention
The embodiment of the invention provides a kind of crucible, evaporation coating device and evaporation coating method, it is able to solve crucible in the related technology
On opening be blocked when, it is more difficult to the problem of handling.The technical solution is as follows:
According to the first aspect of the invention, a kind of crucible is provided, the crucible includes:
The crucible body and crucible cap assemblies of releasable connection, the crucible body and crucible cap assemblies constitute crucible chamber；
The crucible cap assemblies include at least two sub- crucible lids being laminated, the described at least two sub- crucible Gai Zhongren being laminated
It anticipates two adjacent sub- crucible lid releasable connections；
Each sub- crucible lid is provided with opening, and the opening of each sub- crucible lid is provided with to the crucible chamber
The extension that chamber interior extends, the extension of the adjacent sub- crucible lid of any two are mutually nested.
Optionally, the opening of each sub- crucible lid is circular open.
Optionally, the extension of the opening of each sub- crucible lid is in a tubular form.
Optionally, in the extension of the adjacent sub- crucible lid of the mutually nested any two, the extension positioned inside
Length >=be located at outside extension length.
Optionally, the adjacent sub- crucible lid of any two is threadedly coupled.
Optionally, the adjacent sub- crucible cover latch connection of any two.
According to the second aspect of the invention, a kind of evaporation coating device is provided, the evaporation coating device includes vapor deposition chamber and appoints
Crucible described in one.
Optionally, the evaporation coating device further includes the disassembly component in the vapor deposition chamber, and the disassembly component is used
Sub- crucible lid in the dismounting crucible.
According to the third aspect of the invention we, a kind of evaporation coating method is provided, which comprises
When being deposited by the evaporation coating device, judged according to evaporation rate be in the crucible cap assemblies of the crucible
It is no to there is the blocked sub- crucible lid of opening；
When there are the opening blocked sub- crucible lid, the blocked sub- crucible lid of the opening is removed.
Optionally, the evaporation coating device further includes the disassembly component in the vapor deposition chamber,
It is described when the opening is blocked, will the sub- crucible lid dismounting on the outermost side, comprising:
It is described when the opening is blocked, by the disassembly component by the sub- crucible lid dismounting on the outermost side.
Technical solution bring beneficial effect provided in an embodiment of the present invention includes at least:
By the crucible of a kind of the crucible body including releasable connection and crucible cap assemblies, wherein crucible cap assemblies include at least two layers
The sub- crucible lid that stacked, the adjacent sub- crucible lid releasable connection of any two in at least two sub- crucible lid being laminated, every sub- crucible
Lid is provided with opening, which is provided with the extension extended to crucible chamber interior, the adjacent sub- crucible of any two
The extension of lid is mutually nested.When the opening that vapor deposition process neutron crucible covers is blocked, by the sub- crucible lid that the opening is blocked
It removes, can then continue through the crucible and be deposited.When solving opening on crucible in the related technology and being blocked, it is more difficult to
The problem of processing, has reached simplified operating procedure, improves the effect of the evaporation rate of evaporation coating device.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing.
Fig. 1 is a kind of structural schematic diagram of crucible provided in an embodiment of the present invention；
Fig. 2 is the structural schematic diagram of another crucible provided in an embodiment of the present invention；
Fig. 3 is the bottom view of crucible assembly in Fig. 2；
Fig. 4 is the threaded connection schematic diagram of crucible cap assemblies 2 shown in Fig. 2；
Fig. 5 snaps connection schematic diagram for crucible cap assemblies 2 shown in Fig. 2；
Fig. 6 is a kind of structural schematic diagram of evaporation coating device provided in an embodiment of the present invention；
Fig. 7 is the plug crucible lid disassembly process schematic diagram that is blocked；
Fig. 8 is that Fig. 7 removes the long crucible structure schematic diagram after the plug crucible lid that is blocked；
Fig. 9 is a kind of flow chart of evaporation coating method provided in an embodiment of the present invention.
Through the above attached drawings, it has been shown that the specific embodiment of the present invention will be hereinafter described in more detail.These attached drawings
It is not intended to limit the scope of the inventive concept in any manner with verbal description, but is by referring to specific embodiments
Those skilled in the art illustrate idea of the invention.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with attached drawing to embodiment party of the present invention
Formula is described in further detail.
Vacuum evaporation refers to the heating film-coated material in vacuum environment, make its evaporate after parts surface to be coated be precipitated at
Film.And when carrying out vacuum evaporation, accordingly it will usually be desirable to the Coating Materials of heating is put into crucible, then is vacuumized to vapor deposition chamber,
Later by the Coating Materials in heating component heating crucible, plated film is carried out to component to be coated.
Vapor deposition chamber and setting are generally included on the vapor deposition indoor crucible of chamber, crucible using evaporation coating device in the related technology
It is provided with opening, for placing Coating Materials inside crucible, the Coating Materials can be made to evaporate by heating crucible and from crucible
On opening overflow, and vapor deposition chamber in membrane element to be plated surface formed film layer.
In the implementation of the present invention, discovery aforesaid way at least has following defects that in above-mentioned crucible inventor
Coating Materials easily generates condensation in the opening of crucible cover during evaporation, so that hole blocks, and then leads to vapor deposition
Thicknesses of layers or homogeneity are deteriorated.The process for carrying out cleaning treatment to crucible at this time may include: to abolish the vacuum of vapor deposition chamber
The temperature → chamber → taking-up crucible is deposited in opening → of state → reduction vapor deposition chamber placed into new crucible Coating Materials → general
New crucible is mounted in vapor deposition chamber → closes vapor deposition chamber → vacuumize to vapor deposition chamber → and promotes vapor deposition chamber temp.
Above-mentioned scale removal process is complicated for operation, takes a long time (up to 6 hours or more), is affected to production capacity, plating is wasted in operating process
Membrane material, and be readily incorporated impurity and pollute.
The embodiment of the invention provides a kind of crucible, evaporation coating device and evaporation coating method, can solve it is above-mentioned in the related technology
The problem of.
Fig. 1 is a kind of structural schematic diagram of crucible shown in the embodiment of the present invention, which may include:
The crucible body 1 and crucible cap assemblies 2 of releasable connection, crucible body 1 and crucible cap assemblies 2 constitute crucible chamber a.
Crucible cap assemblies 2 include that at least two sub- crucible lids being laminated (include sub- crucible lid 21 and 22 in Fig. 1 with crucible cap assemblies 2
For be illustrated, but the quantity of sub- crucible lid is not defined), it is any in at least two sub- crucible lids 21 and 22 being laminated
Two adjacent sub- releasable connections of crucible lid 21 and 22.
Every sub- crucible lid 21 or 22 is provided with opening b, is provided at the opening b of every sub- crucible lid 21 or 22 to crucible
The extension 211 of chamber a internal stretch, the adjacent extension 211 of sub- crucible lid 21 and 22 of any two are mutually nested.Due to appointing
The extension 211 of two adjacent sub- crucible lids 21 and 22 of anticipating is mutually nested, thus the extension 211 of so structure can make plated film
The gas of material, which can be attached in multiple extensions 211, to be located on innermost extension 211, without being attached to other sub- crucibles
On the extension 211 of lid 22, the opening that Coating Materials blocks sub- crucible lid 22 is avoided, is blocked in this way in dismounting extension 211
Sub- crucible lid 21 after, which can also normal operation.
Crucible provided in an embodiment of the present invention can be point source crucible.
In conclusion a kind of crucible provided in an embodiment of the present invention, passes through a kind of crucible body and crucible lid including releasable connection
The crucible of component, wherein crucible cap assemblies include at least two sub- crucible lids being laminated, in at least two sub- crucible lid being laminated
The adjacent sub- crucible lid releasable connection of any two, every sub- crucible lid are provided with opening, which is provided with to crucible chamber
The extension that chamber interior extends, the extension of the adjacent sub- crucible lid of any two are mutually nested.When vapor deposition process neutron crucible covers
Opening be blocked when, by the opening be blocked sub- crucible lid remove, can then continue through the crucible and be deposited.It solves
When the opening on crucible is blocked in the related technology, it is more difficult to which the problem of handling has reached simplified operating procedure, improves vapor deposition dress
The effect for the evaporation rate set.
Referring to FIG. 2, it illustrates the structural schematic diagram of another crucible provided in an embodiment of the present invention, which exists
Some adjustment have been carried out on the basis of crucible shown in FIG. 1.
Optionally, every sub- crucible lid (be illustrated so that crucible cap assemblies 2 include sub- crucible lid 21,22 and 23 as an example in Fig. 2, but
The quantity of sub- crucible lid is not defined) opening b be circular open.At the opening b of every sub- crucible lid 21,22 and 23
Extension 211 is in a tubular form.The opening of sub- crucible lid is provided in round opening, can convenient for release adjacent two sub- crucible lids it
Between releasable connection.Fig. 3 is the bottom view of crucible assembly 2 in crucible shown in Fig. 2, as shown in figure 3, the opening that sub- crucible covers is circle
Shape opening.
Optionally, in the extension 211 of the adjacent sub- crucible lid (21,22 and 23) of mutually nested any two, it is located at interior
The length of the extension 211 of side >=be located at outside extension 211 length.Due to the adjacent sub- crucible lid (21,22 of any two
It is mutually nested with extension 211 23), thus the extension 211 of so structure can make the gas of Coating Materials that can be attached to
On innermost extension 211, without being attached on the extension 211 of other sub- crucible lids, it is stifled to avoid Coating Materials
Fill in the opening of other sub- crucible lids.In the multiple sub- crucible lids (21,22 and 23) being laminated, the tubulose of the sub- crucible lid 21 of top layer extends
Portion 211 is to be located at innermost extension 211 in multiple extensions, is also the longest extension 211 of length.Illustratively,
As shown in Fig. 2, the extension 211 of sub- crucible lid 21,22 and 23 is mutually nested, positioned at the extension 211 of the sub- crucible lid 21 of top layer
It is also the longest extension 211 of length positioned at most inner side.When the gas of Coating Materials is attached to positioned at innermost sub- crucible lid
When on 21 extension 211, the extension 211 of sub- crucible lid 22 and 23 is unaffected.
In embodiments of the present invention, removable company can be constituted by various modes between the adjacent sub- crucible lid of any two
Connect, the embodiment of the present invention in the way of following two releasable connection for be illustrated.
The first, the adjacent sub- crucible lid of any two is threadedly coupled.Fig. 4 is that a kind of structure of crucible cap assemblies 2 shown in Fig. 2 is shown
It is intended to.As shown in figure 4, any sub- crucible lid (21,22 and 23) may include tubular structure g, the adjacent sub- crucible lid of any two
Tubular structure g is mutually nested, and two mutually nested tubular structure g are provided with matched screw thread 212, so that any two phase
Adjacent sub- crucible lid, which is constituted, to be threadedly coupled.
It is threadedly coupled convenient disassembly.May be otherwise is other connection types, and the embodiment of the present invention is not limited thereto.
Second, the adjacent sub- crucible cover latch connection of any two, snapping connection can be made of buckle and buckle slot, be blocked
Button can be a protrusion, as shown in figure 5, it is the structural schematic diagram of a seed crucible lid in crucible shown in Fig. 2, the sub- crucible lid
On be provided with buckle slot c, the protrusion that adjacent sub- crucible covers can be stuck in buckle slot c.
In addition, can also constitute releasable connection between the adjacent sub- crucible lid of any two by other means, the present invention is real
Example is applied to be not limited thereto.
Optionally, crucible cap assemblies 2 can also by way of above two releasable connection (or other means) with crucible body structure
At releasable connection.
In conclusion a kind of crucible provided in an embodiment of the present invention, passes through a kind of crucible body and crucible lid including releasable connection
The crucible of component, wherein crucible cap assemblies include at least two sub- crucible lids being laminated, in at least two sub- crucible lid being laminated
The adjacent sub- crucible lid releasable connection of any two, every sub- crucible lid are provided with opening, which is provided with to crucible chamber
The extension that chamber interior extends, the extension of the adjacent sub- crucible lid of any two are mutually nested.When vapor deposition process neutron crucible covers
Opening be blocked when, by the opening be blocked sub- crucible lid remove, can then continue through the crucible and be deposited.It solves
When the opening on crucible is blocked in the related technology, it is more difficult to which the problem of handling has reached simplified operating procedure, improves vapor deposition dress
The effect for the evaporation rate set.
Referring to FIG. 6, it illustrates a kind of structural schematic diagrams of evaporation coating device 20 provided in an embodiment of the present invention.
Optionally, evaporation coating device 20 includes vapor deposition chamber 5 and crucible.Crucible is located in vapor deposition chamber 5.Wherein 1 He of pot body
Crucible cap assemblies 2 form crucible, are configured as placing Coating Materials in crucible.It is configured as placing portion to be coated in vapor deposition chamber 5
Part.After membrane element to be plated is sent into vapor deposition chamber 5, vapor deposition chamber 5 can be vacuumized, then crucible is heated, make crucible
Crucible is overflowed after interior Coating Materials evaporation, and is deposited on plating membrane element.Wherein coagulation 4 is to overflow after Coating Materials evaporates
The coagulation being deposited on during crucible at sub- crucible cover gab out.Optionally, evaporation coating device 20 further includes being located at vapor deposition chamber 5
In disassembly component 3, disassembly component 3 is used to remove sub- crucible lid in crucible.Wherein disassembly component can be mechanical arm, can also be with
It is other structures, the embodiment of the present invention is it is not limited here.
As shown in fig. 6, when the opening of the sub- crucible lid in crucible cap assemblies 2 is blocked by the coagulation 4 of Coating Materials, the condensation
Object 4 will affect the plated film rate on membrane element to be plated, and evaporation coating device 20 can be by detecting the plated film rate (in evaporation coating device 20
The component for measuring plated film rate can be set) determine whether there is the blocked sub- crucible lid of opening.
When the opening of group crucible lid is blocked, evaporation coating device 20, which can suspend, makes subsequent membrane element to be plated enter vapor deposition chamber
Room 5, and release by the disassembly component 3 releasable connection between the opening blocked sub- crucible lid and other sub- crucible lids.
As shown in fig. 7, it is the plug crucible lid disassembly process schematic diagram that is blocked.Releasable connection between group crucible lid is screw thread
When connection, disassembly component 3 can be torn the blocked sub- crucible lid 21 of opening open by gyrator crucible lid 21 from crucible cap assemblies
Under.Coagulation 4 can leave crucible with sub- crucible lid 21 in this way.
Fig. 8 is that Fig. 7 removes the long crucible structure schematic diagram after the plug crucible lid that is blocked.Due to the length of outermost straton crucible lid extension
The length of the >=the second straton crucible lid extension is spent, the extension of the second straton crucible lid is completely without coagulation at this time.It can be after
Continue and be sent into membrane element to be plated into chamber and be deposited, evaporation process can be normally carried out.
In conclusion a kind of evaporation coating device provided in an embodiment of the present invention, including chamber is deposited and is located at the vapor deposition chamber
In the crucible body and crucible cap assemblies including releasable connection crucible, wherein crucible cap assemblies include at least two sub- crucibles being laminated
It covers, the adjacent sub- crucible lid releasable connection of any two in at least two sub- crucible lid being laminated, every sub- crucible lid is provided with
Opening, the opening are provided with the extension extended to crucible chamber interior, the extension of the adjacent sub- crucible lid of any two
It is mutually nested.When the opening that vapor deposition process neutron crucible covers is blocked, the sub- crucible that disassembly component is blocked by the opening is used
Lid is removed, and can then be continued through the crucible and is deposited.When solving opening on crucible in the related technology and being blocked, compared with
Intractable problem has reached simplified operating procedure, improves the effect of the evaporation rate of evaporation coating device.
Fig. 9 is a kind of flow chart of evaporation coating method provided in an embodiment of the present invention, and this method can be using shown in above-mentioned Fig. 6
Evaporation coating device in.This method may include following several steps:
In step 901, when being deposited by evaporation coating device, the crucible cap assemblies of crucible are judged according to evaporation rate
In, if there is the blocked sub- crucible lid of opening.
Coating Materials is put in crucible, membrane element to be plated is sent into vapor deposition chamber, vacuumizes, add to crucible
Heat starts to carry out evaporation process to component to be coated, at this time with quartz crystal oscillation monitoring method to the thickness of component plated film to be coated
Degree is monitored.Wherein quartz crystal oscillation monitoring method is the piezoelectric effect and mass loading effect using quartz crystal, is passed through
Its natural resonance frequency or parameter related with natural resonance frequency variation are measured to monitor the thickness of deposit film.When discovery is steamed
When plating rate exception, judges whether there is coagulation and block sub- crucible lid.
In step 902, when there is the sub- crucible lid that opening is blocked, the blocked sub- crucible lid of opening is removed.Sub- crucible
Lid is mutually nested for two layers or two layers or more of sub- crucible lid, and sub- crucible lid center is circular hole, is provided on circular hole to earthenware
The extension extended in crucible chamber, the extension longest of outermost sub- crucible lid.Adjacent sub- crucible lid is threadedly coupled or buckle
Connection.When the extension that coagulation is attached to outermost straton crucible lid results in blockage, outermost sub- crucible lid is removed, Bian Keji
Continuous production.
When using evaporation coating method provided in an embodiment of the present invention, whenever there is the sub- crucible lid that opening is blocked
Will be open, blocked sub- crucible lid is removed, according to the difference of the quantity of crucible cap assemblies neutron crucible lid, the opening quilt that can be removed
The quantity of the sub- crucible lid of blocking also can be different.If the quantity of sub- crucible lid is n, the quantity for the sub- crucible lid that can be removed is n-1,
Middle n is the integer greater than 0.
As shown in fig. 7, the coagulation 4 that Coating Materials generates is attached on the extension of sub- crucible lid 21, sub- crucible lid 21 is open
Blocking, evaporation coating device judges that evaporation rate exception, operating robotic arm 3 remove blocked outermost straton crucible lid 21, sub at this time
The unattached coagulation of the extension of crucible lid 22, evaporation process can continue to be normally carried out.Similarly, when the coagulation of Coating Materials is stifled
After plug crucible lid 22, mechanical arm 3 can be removed sub- crucible lid 22, and an also surplus straton crucible lid can continue that work is deposited at this time
Skill.Sub- crucible lid is removed using mechanical arm, extending evaporation coating device can continue to carry out the time of evaporation process.Crucible cap assemblies neutron
The quantity of crucible lid is more, and the time that can continue to carry out evaporation process also can be longer.
The above method during realization can not destroy vacuum environment, do not open vapor deposition chamber in the case where realize solution
Certainly the problem of the blocking of crucible opening, evaporation process is influenced small, it is not easy to introduce impurity and Coating Materials is caused to pollute.And the invention
Implementation method is simple, only need to change crucible cover structure, increase automatic clamping and placing crucible cover mechanical arm can be realized, with open be deposited
The Coating Materials that chamber carries out cleaning waste is very cheap compared to cost.
Evaporation coating method provided in an embodiment of the present invention can be applied to uniformly, accurately deposit to luminous organic material
It is provided with thin film transistor (English: Thin Film Transistor；Referred to as: TFT) structure or anode construction
On substrate.
In conclusion a kind of evaporation coating method provided in an embodiment of the present invention, includes crucible by using one kind, chamber is deposited
With the evaporation coating method of disassembly component, wherein crucible includes pot body and crucible cap assemblies, and wherein crucible cap assemblies include at least two stackings
Sub- crucible lid, the adjacent sub- crucible lid releasable connection of any two in at least two sub- crucible lid being laminated, every sub- crucible lid
It is provided with opening, which is provided with the extension extended to crucible chamber interior, the adjacent sub- crucible lid of any two
Extension it is mutually nested.When the opening that vapor deposition process neutron crucible covers is blocked, which is blocked by disassembly component
Sub- crucible lid is removed, and can then be continued through the crucible and is deposited.The opening solved on crucible in the related technology is blocked
When, it is more difficult to the problem of handling has reached simplified operating procedure, improves the effect of the evaporation rate of evaporation coating device.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all in spirit of the invention and
Within principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of crucible, which is characterized in that the crucible includes:
The crucible body and crucible cap assemblies of releasable connection, the crucible body and crucible cap assemblies constitute crucible chamber；
The crucible cap assemblies include at least two sub- crucible lids being laminated, any two in the described at least two sub- crucible lids being laminated
A adjacent sub- crucible lid releasable connection；
Each sub- crucible lid is provided with opening, and the opening of each sub- crucible lid is provided with into the crucible chamber
The extension that portion extends, the extension of the adjacent sub- crucible lid of any two are mutually nested.
2. crucible according to claim 1, which is characterized in that the opening of each sub- crucible lid is circular open.
3. crucible according to claim 2, which is characterized in that the extension of the opening of each sub- crucible lid is in pipe
Shape.
4. crucible according to claim 3, which is characterized in that the adjacent sub- crucible lid of the mutually nested any two
In extension, positioned at the extension of inside length >=be located at outside extension length.
5. crucible according to claim 1, which is characterized in that the adjacent sub- crucible lid of any two is threadedly coupled.
6. crucible according to claim 1, which is characterized in that the adjacent sub- crucible cover latch connection of any two.
7. a kind of evaporation coating device, which is characterized in that the evaporation coating device includes that vapor deposition chamber and claim 1 to 6 are any described
Crucible.
8. evaporation coating device according to claim 7, which is characterized in that the evaporation coating device further includes being located at the vapor deposition chamber
Disassembly component in room, the disassembly component are used to remove the sub- crucible lid in the crucible.
9. a kind of evaporation coating method, which is characterized in that for evaporation coating device described in claim 7 or 8, the evaporation coating device includes
Crucible, which comprises
When being deposited by the evaporation coating device, judged in the crucible cap assemblies of the crucible according to evaporation rate, if deposit
In the sub- crucible lid that opening is blocked；
When there are the opening blocked sub- crucible lid, the blocked sub- crucible lid of the opening is removed.
10. according to the method described in claim 9, it is characterized in that, the evaporation coating device further includes being located at the vapor deposition chamber
In disassembly component,
It is described when the opening is blocked, will the sub- crucible lid dismounting on the outermost side, comprising:
It is described when the opening is blocked, by the disassembly component by the sub- crucible lid dismounting on the outermost side.
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| CN201811000756.0A CN108977774B (en) | 2018-08-29 | 2018-08-29 | Crucible, vapor deposition apparatus, and vapor deposition method |
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| CN201811000756.0A CN108977774B (en) | 2018-08-29 | 2018-08-29 | Crucible, vapor deposition apparatus, and vapor deposition method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110098144A (en) * | 2019-04-11 | 2019-08-06 | 深圳市华星光电半导体显示技术有限公司 | A kind of crucible fetching device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN205616946U (en) * | 2016-05-16 | 2016-10-05 | 鄂尔多斯市源盛光电有限责任公司 | Linear evaporation source and coating by vaporization device |
| CN108048800A (en) * | 2018-01-26 | 2018-05-18 | 武汉华星光电半导体显示技术有限公司 | Crucible and evaporated device is deposited |
| CN207552430U (en) * | 2017-11-07 | 2018-06-29 | 信利（惠州）智能显示有限公司 | Crucible and its nozzle |
-
2018
- 2018-08-29 CN CN201811000756.0A patent/CN108977774B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN205616946U (en) * | 2016-05-16 | 2016-10-05 | 鄂尔多斯市源盛光电有限责任公司 | Linear evaporation source and coating by vaporization device |
| CN207552430U (en) * | 2017-11-07 | 2018-06-29 | 信利（惠州）智能显示有限公司 | Crucible and its nozzle |
| CN108048800A (en) * | 2018-01-26 | 2018-05-18 | 武汉华星光电半导体显示技术有限公司 | Crucible and evaporated device is deposited |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110098144A (en) * | 2019-04-11 | 2019-08-06 | 深圳市华星光电半导体显示技术有限公司 | A kind of crucible fetching device |
| CN110098144B (en) * | 2019-04-11 | 2021-07-23 | 深圳市华星光电半导体显示技术有限公司 | Crucible taking and placing device |
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| CN108977774B (en) | 2020-06-09 |
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