CN108975380A - A kind of fast preparation method of nano ceric oxide dispersion liquid - Google Patents

A kind of fast preparation method of nano ceric oxide dispersion liquid Download PDF

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Publication number
CN108975380A
CN108975380A CN201811146764.6A CN201811146764A CN108975380A CN 108975380 A CN108975380 A CN 108975380A CN 201811146764 A CN201811146764 A CN 201811146764A CN 108975380 A CN108975380 A CN 108975380A
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preparation
dispersion liquid
ceric oxide
cerium
nano ceric
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汪嘉恒
王贤成
李映欣
吴喆
吴玉程
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Hefei University of Technology
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Hefei University of Technology
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    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01FCOMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F17/00Compounds of rare earth metals
    • C01F17/20Compounds containing only rare earth metals as the metal element
    • C01F17/206Compounds containing only rare earth metals as the metal element oxide or hydroxide being the only anion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00Crystal-structural characteristics
    • C01P2002/70Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
    • C01P2002/72Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/01Particle morphology depicted by an image
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/01Particle morphology depicted by an image
    • C01P2004/03Particle morphology depicted by an image obtained by SEM
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/60Particles characterised by their size
    • C01P2004/62Submicrometer sized, i.e. from 0.1-1 micrometer
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00Particle morphology
    • C01P2004/60Particles characterised by their size
    • C01P2004/64Nanometer sized, i.e. from 1-100 nanometer

Abstract

The invention discloses a kind of fast preparation methods of nano ceric oxide dispersion liquid, the oxidation of air is combined quickly to prepare the nano ceric oxide dispersion liquid of high quality using the pyrolysis of atmospheric low-temperature water phase, by adjusting preparation process, the average grain diameter of ceria crystal grain can be adjusted within the scope of 50-1000nm, and the stabilization time of dispersion liquid is up to 30 days up to the several months.Ceria dispersion liquid of the present invention can be widely applied to the fields such as polishing, catalysis, luminous, UV absorption.

Description

A kind of fast preparation method of nano ceric oxide dispersion liquid
Technical field
The present invention relates to a kind of fast preparation methods of nano ceric oxide dispersion liquid, belong to field of nanometer material technology.
Background technique
Rare earth oxide is a kind of mainstream abrasive particulate material used in chemically mechanical polishing, is electrical at present, optics, communication Indispensable mill in the manufactures such as precision optics glass, semiconductor crystal wafer and integrated circuit media material needed for equal fields upstream link Material, and promote the important means of accurate device surface smoothness.Ceria (CeO2) as the typical case with fluorite structure Light rare earth oxide, because its lattice is easily formed oxygen vacancies, it is easier to it is chemically reacted with the surface of polished material, thus Form effective chemistry and reinforcing effect that mechanical polishing combines, polishing efficiency, quality of finish, service life, clearance rate and Environmental protection is superior to the abrasive grains such as traditional zirconium oxide, silica, aluminium oxide, diamond.With semiconductor, photoelectricity, new energy product The continuous expansion of series, increasingly increases for the best bright finish wafer demand of high-accuracy micro/nano film and device, high quality Precise polished liquid has become industry focus of attention, and ceria polishing fluid has very big in CMP art Potentiality.
With going deep into for nanotechnology and nano materials research, the smaller abrasive size of nanometer burnishing liquid and higher compare table Area is greatly improved the precision and efficiency of chemically mechanical polishing, therefore, stable nano ceric oxide aqueous liquid dispersion without Doubt more research and application value.Currently, ceria dispersion liquid mainly passes through grain surface modification or hydrothermal/solvent heat etc. one Preparation approach is walked to obtain.The former nanocrystal multi-pass crosses the methods of co-precipitation, sol-gel preparation, and heat treatment process is Grain surface functional group is destroyed, subsequent hydrophilic coupling and modification are more difficult, and are easily destroyed Surface Oxygen void structure, high table Serious agglomeration caused by the energy of face and sedimentation can also leave a blemish on to polishing product;The latter forms pair during crystalline growth The modification of grain surface is directed to scale of mass production, the production cycle is longer and technique is multiple though dispersion and stablizing effect are ideal Miscellaneous, high pressure liquid phase reactor equipment is there are still significant security risks such as explosions, and there is also environmental issues for devil liquor recovery.Therefore, quickly The preparation low cost of environmental protection, high quality, high stability nano ceric oxide dispersion liquid have become high-accuracy device and polish and lead The hot spot direction of domain application.
Summary of the invention
In place of above-mentioned the deficiencies in the prior art, the present invention is intended to provide a kind of nano ceric oxide dispersion liquid Fast preparation method.This method is low in cost, simple and quick, stability and high efficiency.
The present invention combines the oxidation of air quickly to prepare the nano-silica of high quality using the pyrolysis of atmospheric low-temperature water phase Change cerium dispersion liquid, by adjusting preparation process, the average grain diameter of ceria crystal grain can be adjusted within the scope of 50-1000nm, The stabilization time of dispersion liquid is up to 30 days up to the several months.Ceria dispersion liquid of the present invention can be widely applied to polish, urge The fields such as change, luminous, UV absorption.
The fast preparation method of nano ceric oxide dispersion liquid of the present invention, includes the following steps:
Step 1: cerium salt being dissolved in deionized water, cerium ion (Ce is configured to3+) concentration 0.01-1mol/L cerium salt it is water-soluble Liquid;
Step 2: complexing agent and/or surfactant is added in the cerium salt solution obtained to step 1, is warming up to 50-95 DEG C, it is stirred to react to fully reacting, obtains forerunner's aqueous solution;The purpose of complexing agent and/or surfactant is added in this step It is to adjust granular size, dispersibility and pattern.
Step 3: keeping the temperature and stirring rate of forerunner's aqueous solution, precipitating reagent, 0.5-1h is added in expelling water solution forward Precipitating completely, adjusts stirring rate to 100-500rpm afterwards, cooled to room temperature after the reaction was continued 1-10h;Centrifugation or filtering Separation, the ceria nano-crystalline being cleaned by ultrasonic in aqueous solution, and be redissolved in deionized water, form nanometer titanium dioxide Cerium aqueous solution;
Step 4: complexing agent and/or surfactant being added into nano ceric oxide aqueous solution, be uniformly dispersed (ultrasound point Dissipate or homogenizer disperse 5-30min) stable nano ceric oxide dispersion liquid is obtained afterwards.In this step be added complexing agent and/or The purpose of surfactant is the stability in order to improve nanoparticulate dispersion.
In step 1, the cerium salt is cerous chlorate, cerous sulfate, cerous nitrate or acetic acid Asia cerium etc..
In step 2, the molar ratio of the complexing agent of addition and/or the integral molar quantity of surfactant and cerium ion is 1: (0.1-10)。
In step 2, the heating rate for being warming up to 50-95 DEG C is 1-10 DEG C/min.
In step 2, the stirring rate being stirred to react is 500-1000rpm.
In step 3, the precipitating reagent is sodium hydroxide, potassium hydroxide, ammonium hydroxide, sodium metasilicate, sodium carbonate or sodium bicarbonate etc.. The molar ratio of cerium ion and precipitating reagent is 1:(3-5).
In step 4, the concentration of complexing agent is 0.01-0.1mol/L in nano ceric oxide dispersion liquid, surfactant Concentration is 0.01-0.1mol/L.
The complexing agent is selected from one in polyvinylpyrrolidone (PVP), polyethylene glycol (PEG), polyvinyl alcohol (PVA) etc. Kind is several.
The surfactant is cetyl trimethylammonium bromide (CTAB), neopelex (SDBS), double (2- ethylhexyl) Disodium sulfosuccinate (AOT), lauryl sodium sulfate (SDS), hexadecyltrimethylammonium chloride (CTAC), Qula is logical, one or more of Tween 80, oleic acid or sodium citrate etc..
The beneficial effects of the present invention are embodied in:
1, the present invention, which takes water as a solvent, carries out that quick preparation can be completed less than 100 DEG C of low temperature pyrogenation, and temperature is easy to control System, equipment is simple, low power consuming, and process is pollution-free;
2, the particle size uniformity of the present invention uses low temperature pyrogenation growth and the preparation of air autoxidation, partial size is in nanometer Rank is controllable;
3, raw material according to the present invention is environment friendly and pollution-free, under the premise of guaranteeing dispersion quality, ratio adjustable extent compared with Greatly, it is suitble to scale of mass production.
4, stabilization of the nano particle in water phase is improved using the crosslinked action of a variety of interfacial activity groups in the present invention Property, dispersion stability obtained is high, can keep low sedimentation rate for a long time, can be applied to polishing, catalysis, shines, ultraviolet suction The fields such as receipts.
Detailed description of the invention
Fig. 1 is the XRD spectrum of the nano ceric oxide prepared in embodiment 1.
The photo of dispersion liquid after Fig. 2 is the SEM image of the nano ceric oxide prepared in embodiment 1 and stands 1 month.
Fig. 3 is the XRD spectrum of the nano ceric oxide prepared in embodiment 2.
The photo of dispersion liquid after Fig. 4 is the SEM image of the nano ceric oxide prepared in embodiment 2 and stands 1 month.
Fig. 5 is the XRD spectrum of the nano ceric oxide prepared in embodiment 3.
The photo of dispersion liquid after Fig. 6 is the SEM image of the nano ceric oxide prepared in embodiment 3 and stands 1 month.
Fig. 7 is the XRD spectrum of the nano ceric oxide prepared in embodiment 4.
The photo of dispersion liquid after Fig. 8 is the SEM image of the nano ceric oxide prepared in embodiment 4 and stands 1 month.
Specific embodiment
Embodiment 1:
By seven chloride hydrate Asia cerium (CeCl of 0.8mmol3·7H2O it) is dissolved in 40ml deionized water, is configured to cerium ion (Ce3+) concentration be 0.02mol/L aqueous solution;It is that 5 DEG C/min is warming up to 70 DEG C, and is persistently stirred with the rate of 800rpm with rate It mixes;70 DEG C of aqueous solution of temperature is kept, the NaOH of 2.4mmol is added thereto, and keeps 800rpm stirring rate sustained response 0.5h reduces the reaction was continued 3h after stirring rate to 300rpm to precipitating completely;Aqueous solution is centrifugated with the revolving speed of 3000rpm In it is nanocrystalline, and using deionized water be cleaned by ultrasonic 4 times, obtain partial size be about 100nm cerium oxide nanoparticles;It will be upper The cerium oxide nanoparticles for stating preparation weigh 0.8g and are redissolved in 40ml deionized water, and the PVA of 0.04g is added thereto With the SDBS of 0.04g, 30min is ultrasonically treated to evenly dispersed, i.e. acquisition nano ceric oxide dispersion.
Fig. 1 is the XRD spectrum for the nano ceric oxide that the present embodiment obtains.Fig. 1 is as it can be seen that this example prepares the XRD of product Peak position is consistent with the diffraction peak of standard ceria (JCPDS 81-0792), does not observe other diffraction maximums, illustrates product For the ceria of pure fluorite structure.The wider half-peak breadth explanation of diffraction maximum, the crystallite dimension of ceria are smaller.
Fig. 2 (a) is nano ceric oxide SEM image manufactured in the present embodiment, it is seen that nano ceric oxide is by numerous sizes The nano particle of about 100nm is constituted, and size distribution is more uniform;Fig. 2 (b) is that the nano ceric oxide dispersion liquid stands 1 Photo after month, dispersion liquid is still translucent, and stably dispersing is uniform, has no apparent sedimentation.
Embodiment 2:
By seven chloride hydrate Asia cerium (CeCl of 0.8mmol3·7H2O it) is dissolved in 40ml deionized water, matches with 0.05g SDBS It is set to cerium ion (Ce3+) concentration be 0.02mol/L aqueous solution;70 DEG C are warming up to for 5 DEG C/min with rate, and with 800rpm's Rate persistently stirs;70 DEG C of aqueous solution of temperature is kept, the NaOH of 2.4mmol is added thereto, and keeps 800rpm stirring speed Rate sustained response 0.5h reduces the reaction was continued 3h after stirring rate to 300rpm to precipitating completely;It is centrifuged with the revolving speed of 3000rpm It is nanocrystalline in separation aqueous solution, and be cleaned by ultrasonic 4 times using deionized water, obtain the ceria that partial size is about 800nm Grain;The cerium oxide particles of above-mentioned preparation are weighed 0.8g to be redissolved in 40ml deionized water, and are added thereto 0.04gPVA and 0.3ml oleic acid, 30min is to evenly dispersed for ultrasonic treatment, i.e. acquisition ceria dispersion liquid.
Fig. 3 is the XRD spectrum for the ceria that the present embodiment obtains.Fig. 3 is as it can be seen that this example prepares the XRD peak position of product It is consistent with the diffraction peak of standard ceria (JCPDS 81-0792), it does not observe other diffraction maximums, illustrates that product is pure The ceria of net fluorite structure.
Fig. 4 (a) is ceria SEM image manufactured in the present embodiment, it is seen that nano ceric oxide particle agglomeration is many Diameter~800nm microballoon.It is compared with embodiment 1, the non-polar group inducing action of the SDBS modification and oleic acid of particle surface, Cause uniformly to agglomerate into regular spherical shape between particle;Fig. 4 (b) is the photo after the ceria dispersion liquid is stood 1 month, can Although seeing that particle size increases, prepared dispersion liquid is still translucent shape, and stably dispersing is uniform, has no obvious sedimentation.
Embodiment 3:
By seven chloride hydrate Asia cerium (CeCl of 0.8mmol3·7H2O it) is dissolved in 40ml deionized water, is configured to cerium ion (Ce3+) concentration be 0.02mol/L aqueous solution;It is that 5 DEG C/min is warming up to 90 DEG C, and is persistently stirred with the rate of 800rpm with rate It mixes;90 DEG C of aqueous solution of temperature is kept, the NaOH of 2.4mmol is added thereto, and keeps 800rpm stirring rate sustained response 0.5h reduces the reaction was continued 3h after stirring rate to 300rpm to precipitating completely;Aqueous solution is centrifugated with the revolving speed of 3000rpm In it is nanocrystalline, and using deionized water be cleaned by ultrasonic 4 times, obtain partial size be about 50nm cerium oxide nanoparticles;It will be upper The cerium oxide nanoparticles for stating preparation weigh 0.8g and are redissolved in 40ml deionized water, and 0.04g PVP is added thereto With 0.3ml Tween 80, it is ultrasonically treated 30min to evenly dispersed, i.e. acquisition nano ceric oxide dispersion liquid.
Fig. 5 is the XRD spectrum for the nano ceric oxide that the present embodiment obtains.Fig. 5 is as it can be seen that this example prepares the XRD of product Peak position is consistent with the diffraction peak of standard ceria (JCPDS 81-0792), does not observe other diffraction maximums, illustrates product For the ceria of pure fluorite structure.The wider half-peak breadth explanation of diffraction maximum, the crystallite dimension of ceria are smaller.
Fig. 6 (a) is nano ceric oxide SEM image manufactured in the present embodiment, it is seen that nano ceric oxide is by numerous sizes The nano particle of about 50nm is constituted, and size distribution is more uniform.It is compared with embodiment 1, higher reaction temperature provides more Add sufficient nucleating condition, be nucleated ceria nano-crystalline rapidly, particle size obviously becomes smaller;Fig. 6 (b) is the nano-silica Change the photo after cerium dispersion liquid is stood 1 month, dispersion liquid is still translucent, and stably dispersing is uniform, has no apparent sedimentation.
Embodiment 4:
By seven chloride hydrate Asia cerium (CeCl of 0.8mmol3·7H2O) 40ml is dissolved in 0.025gPEG and 0.025gCTAB In ionized water, it is configured to cerium ion (Ce3+) concentration be 0.02mol/L aqueous solution;It is that 5 DEG C/min is warming up to 70 DEG C with rate, And it is persistently stirred with the rate of 800rpm;70 DEG C of aqueous solution of temperature is kept, the NaOH of 2.4mmol is added thereto, and is kept 800rpm stirring rate sustained response 0.5h reduces the reaction was continued 3h after stirring rate to 300rpm to precipitating completely;With It is nanocrystalline in the revolving speed centrifuge separation aqueous solution of 3000rpm, and be cleaned by ultrasonic 4 times using deionized water, obtaining partial size is about The cerium oxide particles of 600nm;The cerium oxide particles of above-mentioned preparation are weighed 0.8g to be redissolved in 40ml deionized water, and 0.05gPEG and 0.05g SDBS is added thereto, 30min is to evenly dispersed for ultrasonic treatment, i.e. acquisition ceria dispersion liquid.
Fig. 7 is the XRD spectrum for the ceria that the present embodiment obtains.Fig. 7 is as it can be seen that the present embodiment prepares the peak XRD of product Position is consistent with the diffraction peak of standard ceria (JCPDS 81-0792), does not observe other diffraction maximums, illustrates that product is The ceria of pure fluorite structure.
Fig. 8 (a) is ceria SEM image manufactured in the present embodiment, it is seen that it is many diameters that cerium oxide particles, which are reunited, The microballoon of~600nm.It is compared with embodiment 3, the ceria surface hydrophilic radical that hydroxy functional group and CTAB are modified in PEG Interaction, causes the reunion of nano particle and forms regular microballoon of uniform size.Fig. 8 (b) is the ceria dispersion liquid Photo after standing 1 month, dispersion liquid is still translucent, and stably dispersing is uniform, has no apparent sedimentation.
From Examples 1 to 4 as it can be seen that the cerium dioxide nano dispersion liquid that preparation method through the invention obtains, solute Grain diameter uniformity, and the dispersity of particle can be changed by factors such as reaction temperature, complexing agent, surfactants And size.Temperature is higher, and reaction speed is faster, and grain diameter is smaller;Different types of complexing agent and surfactant are matched It closes and uses, the agglomerate size of adjustable nano particle, to control polishing performance.

Claims (9)

1. a kind of fast preparation method of nano ceric oxide dispersion liquid, it is characterised in that include the following steps:
Step 1: cerium salt being dissolved in deionized water, the cerium salt solution of cerium ion concentration 0.01-1mol/L is configured to;
Step 2: complexing agent and/or surfactant is added in the cerium salt solution obtained to step 1, is warming up to 50-95 DEG C, stirs Reaction is mixed to fully reacting, obtains forerunner's aqueous solution;
Step 3: keeping the temperature and stirring rate of forerunner's aqueous solution, precipitating reagent is added in expelling water solution forward, sinks after 0.5-1h It forms sediment completely, adjusts stirring rate to 100-500rpm, cooled to room temperature after the reaction was continued 1-10h;It is centrifuged or is separated by filtration, The ceria nano-crystalline being cleaned by ultrasonic in aqueous solution, and be redissolved in deionized water, form nano ceric oxide water Solution;
Step 4: complexing agent and/or surfactant being added into nano ceric oxide aqueous solution, is stablized after being uniformly dispersed Nano ceric oxide dispersion liquid.
2. preparation method according to claim 1, it is characterised in that:
In step 1, the cerium salt is cerous chlorate, cerous sulfate, cerous nitrate or acetic acid Asia cerium etc..
3. preparation method according to claim 1, it is characterised in that:
In step 2, the molar ratio of the complexing agent of addition and/or the integral molar quantity of surfactant and cerium ion is 1:(0.1- 10)。
4. preparation method according to claim 1, it is characterised in that:
In step 2, the heating rate for being warming up to 50-95 DEG C is 1-10 DEG C/min.
5. preparation method according to claim 1, it is characterised in that:
In step 2, the stirring rate being stirred to react is 500-1000rpm.
6. preparation method according to claim 1, it is characterised in that:
In step 3, the precipitating reagent is sodium hydroxide, potassium hydroxide, ammonium hydroxide, sodium metasilicate, sodium carbonate or sodium bicarbonate etc..Cerium from The molar ratio of son and precipitating reagent is 1:(3-5).
7. preparation method according to claim 1, it is characterised in that:
In step 4, the concentration of complexing agent is 0.01-0.1mol/L, the concentration of surfactant in nano ceric oxide dispersion liquid For 0.01-0.1mol/L.
8. according to claim 1, preparation method described in 3 or 7, it is characterised in that:
The complexing agent is selected from one or more of polyvinylpyrrolidone, polyethylene glycol, polyvinyl alcohol etc..
9. according to claim 1, preparation method described in 3 or 7, it is characterised in that:
The surfactant is cetyl trimethylammonium bromide, neopelex, bis- (2- ethylhexyl) ambers Acid esters sodium sulfonate, lauryl sodium sulfate, hexadecyltrimethylammonium chloride, Qula be logical, Tween 80, oleic acid or sodium citrate etc. One or more of.
CN201811146764.6A 2018-09-29 2018-09-29 A kind of fast preparation method of nano ceric oxide dispersion liquid Pending CN108975380A (en)

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CN110240903A (en) * 2019-06-11 2019-09-17 北京化工大学 A kind of preparation method of small size red light fluorescent powder
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Cited By (12)

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Publication number Priority date Publication date Assignee Title
CN109806278A (en) * 2019-02-01 2019-05-28 浙江大学 The application of the polyethyleneglycol modified microminiature cerium oxide nanocrystal of phosphatide
CN109806278B (en) * 2019-02-01 2021-08-10 浙江大学 Application of phospholipid polyethylene glycol modified subminiature cerium oxide nanocrystal
CN109761258A (en) * 2019-03-03 2019-05-17 东北石油大学 Amphipathic rod-like nano cerium oxide and amphipathic rodlike CeO2/Ce3+The preparation method of reactive nanoparticles
CN109761258B (en) * 2019-03-03 2021-09-07 东北石油大学 Amphiphilic rod-shaped nano cerium oxide and amphiphilic rod-shaped CeO2/Ce3+Method for preparing active nano-particles
CN110240903A (en) * 2019-06-11 2019-09-17 北京化工大学 A kind of preparation method of small size red light fluorescent powder
CN110615461A (en) * 2019-10-29 2019-12-27 常州市卓群纳米新材料有限公司 A BET: ammonia-free environment-friendly preparation method of 20-30 uniformly dispersed nano samarium oxide
CN110615461B (en) * 2019-10-29 2022-05-03 常州市卓群纳米新材料有限公司 A BET: ammonia-free environment-friendly preparation method of 20-30 uniformly dispersed nano samarium oxide
CN113428888A (en) * 2020-03-23 2021-09-24 厦门稀土材料研究所 High-dispersion cerium oxide nano sol and preparation method and application thereof
CN112067607A (en) * 2020-09-09 2020-12-11 深圳九星印刷包装集团有限公司 Carbon monoxide indicating device
CN112067607B (en) * 2020-09-09 2022-04-15 深圳九星印刷包装集团有限公司 Carbon monoxide indicating device
CN115895595A (en) * 2021-08-30 2023-04-04 凯斯科技股份有限公司 Cerium oxide polishing particles and polishing slurry composition
CN114605921A (en) * 2022-03-11 2022-06-10 江苏葛西光学科技有限公司 Optical fiber end face polishing solution and preparation method thereof

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Application publication date: 20181211