CN108970379A - A kind of phosphine exhaust gas processing device and processing method - Google Patents
A kind of phosphine exhaust gas processing device and processing method Download PDFInfo
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- CN108970379A CN108970379A CN201810902450.8A CN201810902450A CN108970379A CN 108970379 A CN108970379 A CN 108970379A CN 201810902450 A CN201810902450 A CN 201810902450A CN 108970379 A CN108970379 A CN 108970379A
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- Prior art keywords
- exhaust gas
- phosphine
- eluting column
- absorbent
- concentration
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/346—Controlling the process
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/55—Compounds of silicon, phosphorus, germanium or arsenic
- B01D2257/553—Compounds comprising hydrogen, e.g. silanes
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Gas Separation By Absorption (AREA)
- Treating Waste Gases (AREA)
Abstract
The invention discloses a kind of phosphine exhaust gas processing devices, it includes along the sequentially connected draught cupboard in exhaust gas flow direction, multistage elution circuit, centrifugal blower and chimney, the multistage elution circuit includes at least two sequentially connected eluting columns, spray-absorption agent from top to down in each eluting column, along exhaust gas flow direction, the concentration of the absorbent in each eluting column is successively reduced；The centrifugal blower extracts tail gas, makes in draught cupboard in negative pressure state；Safety monitoring assembly is provided on the chimney；It further include fluid reservoir, each eluting column passes through water circulating pump respectively and connect with the fluid reservoir, and each water circulating pump is connect with safety monitoring assembly respectively.The invention also discloses a kind of phosphine exhaust gas treating methods, based on above-mentioned exhaust gas processing device.It is an advantage of the current invention that realizing maximum phosphine tail gas absorption, it is ensured that reach safety dumping standard by the concentration for regulating and controlling suitable absorbent and gradient elution absorbent.
Description
Technical field
The invention belongs to tail gas disposal technique fields, and in particular to a kind of phosphine exhaust gas processing device and processing method.
Background technique
Phosphine belongs to inflammable and explosive hypertoxicity gas, and TLV standard is 300ppb, in process of production inevitable that
Phosphine discharge.The safe handling of phosphine tail gas is divided into incineration method, dry adsorption and wet type absorption method.
For large-scale phosphine manufacturing enterprise, average daily discharge amount is 50-1000g, and moment concentration can reach 2-300ppm, line
Rate is 1-10m/s, thus is needed in the case where phosphine quickly passes through, and is efficiently and rapidly absorbed to reach safety dumping standard
It is the key that enterprise's production, support personnel's safety.In addition, the phosphine of emergency situations such as kilogram rank is leaked, it is instantaneous dense
Degree is up to 1500ppm, to reach safety dumping concentration at this time, the requirement for processing equipment is more harsh.
Summary of the invention
Technical problem to be solved by the present invention lies in: the existing phosphine tail gas treatment device tail gas that is difficult to ensure that treated
Concentration reaches safety dumping standard.
The present invention solves above-mentioned technical problem using following technical scheme:
A kind of phosphine exhaust gas processing device, including along the sequentially connected draught cupboard in exhaust gas flow direction, multistage elution circuit,
Centrifugal blower and chimney, the multistage elution circuit includes at least two sequentially connected eluting columns, and each eluting column is interior from upper
And the spray-absorption agent of lower ground, along exhaust gas flow direction, the concentration of the absorbent in each eluting column is successively reduced；The centrifugal blower
Tail gas is extracted, is made in draught cupboard in negative pressure state；Safety monitoring assembly is provided on the chimney；It further include fluid reservoir, respectively
Eluting column passes through water circulating pump respectively and connect with the fluid reservoir, and each water circulating pump is connect with safety monitoring assembly respectively.
Preferably, a kind of phosphine exhaust gas processing device of the present invention, the quantity of the eluting column are three.
Preferably, a kind of phosphine exhaust gas processing device of the present invention, the chimney middle part is provided with sample tap, described
Safety monitoring assembly is set at the sample tap.
Preferably, a kind of phosphine exhaust gas processing device of the present invention, the blower are frequency conversion centrifugal blower.
Preferably, a kind of phosphine exhaust gas processing device of the present invention, the eluting column is interior to be filled with Pall ring.
The present invention also provides a kind of phosphine exhaust gas treating methods, use above-mentioned phosphine exhaust gas processing device, centrifugation
Blower extracts tail gas to be processed, so that draught cupboard is in negative pressure state, tail gas to be processed enters elution circuit by draught cupboard, and is drenching
It washes in tower and is discharged after absorbent gradient elution absorption reaches safe concentration from chimney, wherein safety monitoring assembly is to the row of monitoring
Out in gas phosphine concentration, and control loop water pump is to supplying absorbing liquid at the top of each eluting column.
Preferably, a kind of phosphine exhaust gas treating method of the present invention, the quantity of the eluting column are three, and along tail
The concentration in flow of air direction, three eluting column internal oxidition absorbents is respectively 2-9wt%, 1-5wt%, 0.5-2wt%.
Preferably, a kind of phosphine exhaust gas treating method of the present invention, the oxidisability absorbent be selected from hydrogen peroxide,
Potassium permanganate or sodium hypochlorite.
Preferably, a kind of phosphine exhaust gas treating method of the present invention, the oxidisability absorbent are sodium hypochlorite.
Preferably, a kind of phosphine exhaust gas treating method of the present invention, the wind pressure of the draught cupboard are 500-1000pa.
The technology of the present invention the utility model has the advantages that
Technical solution of the present invention extracts tail gas by centrifugal blower, and the state of tiny structure is remained in draught cupboard, is avoided
Tail gas leakage, by gradient elution, each eluting column selects suitable absorbent and concentration, absorbs tail gas to the maximum extent, subtracts
Few drug out loss, so that the feasibility of gradient spray process phosphine tail gas method obtains practical approval；Safety monitoring assembly with follow
Ring water pump connection, when the discharge gas concentration that it is monitored it is not up to standard can control loop water pump to eluting column supplement absorbent,
Maintain concentration of absorbing, it is ensured that assimilation effect.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of phosphine exhaust gas processing device described in the embodiment of the present invention.
Specific embodiment
For convenient for those skilled in the art understand that technical solution of the present invention, now in conjunction with Figure of description to the technology of the present invention side
Case is described further.
It is as shown in Figure 1 a kind of structural schematic diagram of phosphine exhaust gas processing device described in the present embodiment comprising ventilation
Cupboard 1, elution circuit 2, centrifugal blower 3, chimney 4, fluid reservoir (not shown), water circulating pump (not shown), safety prison
Device 5 is surveyed, wherein the draught cupboard 1, elution circuit 2, centrifugal blower 3 and chimney 4 are sequentially connected along exhaust gas flow direction.
The elution circuit 2 includes sequentially connected at least two eluting column 21, in the present embodiment the number of eluting column 21
Amount is three, i.e. level-one eluting column, two-step washing tower and three-level eluting column.Pall ring is filled in each eluting column 21, respectively
To absorb phosphine tail gas, and along the flow direction of tail gas, three are eluted for spray-absorption agent from top to down in eluting column
The concentration of absorbent in tower 21 successively reduces.Generally, absorbent selects oxidizing solution, such as hydrogenperoxide steam generator, Gao Meng
Sour potassium solution, liquor natrii hypochloritis etc., the concentration of level-one eluting column inner absorbent are 2-9wt%, two-step washing tower inner absorbent
Concentration be 1-5wt%, the concentration of three-level eluting column inner absorbent is 0.5-2wt%, which can ensure the peace of tail gas
Entirely, effectively absorb, and can effectively save absorbent, reduce unnecessary loss.Preferably, the absorbent in the present embodiment selects
With sodium hypochlorite, the concentration of liquor natrii hypochloritis is 5wt% in level-one eluting column, and liquor natrii hypochloritis's is dense in two-step washing tower
Degree is 2wt%, and the concentration of sodium hypochlorite is 1wt% in three-level eluting column.
The centrifugation extension set 3 is preferably frequency conversion centrifugal blower, is set between elution circuit 2 and chimney 4, centrifugal blower
3 setting purpose is the uninterrupted operating in round-the-clock ground, guarantees that the wind pressure in draught cupboard 1 maintains the tiny structure of 500-1000pa
State, i.e. tail gas are flowed from higher-pressure region to low-pressure area, and when in order to avoid leak source occurring in device, tail gas reflux causes to leak.
The chimney 4 is provided with sample tap (being not marked in figure) to empty tail gas in the middle part of chimney 4, the safety prison
Device 5 is surveyed to be set at the sample tap.The detection threshold value of safety monitoring assembly 5 is set as 50ppm in the present embodiment.
The fluid reservoir is connected by water circulating pump and the fluid reservoir respectively to store high-concentration absorbent agent, each eluting column 21
It connects, and each water circulating pump is electrically connected with safety monitoring assembly 5.
The outlet of phosphine exhaust emissions is connect with the draught cupboard 1, and under the action of centrifugal blower 3, tail gas to be processed is along logical
Wind cupboard 1 enter level-one eluting column, two-step washing tower, three-level eluting column, and in each eluting column by the absorbing liquid of various concentration according to
Secondary progress gradient elution absorption is most excluded through centrifugal blower 3 from chimney 4 afterwards.During processing, different absorbents may go out
Phenomena such as now decomposing leads to the reduction of its concentration, and then influences assimilation effect, thus, when the discharge that safety monitoring assembly 5 monitors
Gas concentration exceeds threshold value, and meeting feedback signal supplements absorbent to water circulating pump, from each eluting column 21 of trend, to ensure to absorb
Effect.
Technical solution of the present invention is exemplarily described invention above in conjunction with attached drawing, it is clear that present invention specific implementation
It is not subject to the restrictions described above, changes as long as using the various unsubstantialities that the inventive concept and technical scheme of the present invention carry out
Into, or it is not improved the conception and technical scheme of invention are directly applied into other occasions, in protection scope of the present invention
Within.
Claims (10)
1. a kind of phosphine exhaust gas processing device, which is characterized in that including along the sequentially connected draught cupboard in exhaust gas flow direction, multistage
Elution circuit, centrifugal blower and chimney, the multistage elution circuit includes at least two sequentially connected eluting columns, each elution
Spray-absorption agent from top to down in tower, along exhaust gas flow direction, the concentration of the absorbent in each eluting column is successively reduced；It is described
Centrifugal blower extracts tail gas, makes in draught cupboard in negative pressure state；Safety monitoring assembly is provided on the chimney；It further include storage
Flow container, each eluting column pass through water circulating pump respectively and connect with the fluid reservoir, and each water circulating pump is connect with safety monitoring assembly respectively.
2. a kind of phosphine exhaust gas processing device according to claim 1, which is characterized in that the quantity of the eluting column is three
It is a.
3. a kind of phosphine exhaust gas processing device according to claim 1, which is characterized in that be provided with and take in the middle part of the chimney
Sample mouth, the safety monitoring assembly are set at the sample tap.
4. a kind of phosphine exhaust gas processing device according to claim 1, which is characterized in that the blower is that frequency conversion is centrifuged wind
Machine.
5. a kind of phosphine exhaust gas processing device according to claim 1, which is characterized in that filling in the eluting column
There is Pall ring.
6. a kind of phosphine exhaust gas treating method uses a kind of phosphine vent gas treatment dress as described in any one in claim 1-5
It sets, which is characterized in that centrifugal blower extracts tail gas to be processed, so that draught cupboard is in negative pressure state, tail gas to be processed is by draught cupboard
It is discharged after absorbent gradient elution absorption reaches safe concentration from chimney into elution circuit, and in eluting column, wherein pacifying
Concentration of the full monitoring device to monitor phosphine in discharge gas, and control loop water pump is absorbed to supply at the top of each eluting column
Liquid.
7. a kind of phosphine exhaust gas treating method according to claim 6, which is characterized in that the quantity of the eluting column is three
It is a, and along exhaust gas flow direction, the concentration of three eluting column internal oxidition absorbents is respectively 2-9wt%, 1-5wt%, 0.5-
2wt%.
8. a kind of phosphine exhaust gas treating method according to claim 7, which is characterized in that the oxidisability absorbent is selected from
Hydrogen peroxide, potassium permanganate or sodium hypochlorite.
9. a kind of phosphine exhaust gas treating method according to claim 8, which is characterized in that the oxidisability absorbent is secondary
Sodium chlorate.
10. a kind of phosphine exhaust gas treating method according to claim 6, which is characterized in that the wind pressure of the draught cupboard is
500-1000pa。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810902450.8A CN108970379A (en) | 2018-08-09 | 2018-08-09 | A kind of phosphine exhaust gas processing device and processing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810902450.8A CN108970379A (en) | 2018-08-09 | 2018-08-09 | A kind of phosphine exhaust gas processing device and processing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108970379A true CN108970379A (en) | 2018-12-11 |
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ID=64555776
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810902450.8A Pending CN108970379A (en) | 2018-08-09 | 2018-08-09 | A kind of phosphine exhaust gas processing device and processing method |
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| Country | Link |
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| CN (1) | CN108970379A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110339673A (en) * | 2019-07-25 | 2019-10-18 | 江苏宜兴德融科技有限公司 | The exhaust gas processing device of equipment of metal organic chemical vapor deposition and application |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2456822Y (en) * | 2000-11-02 | 2001-10-31 | 都江堰科环新技术灭虫服务中心 | Phosphine gas colleciton processor |
| CN201300033Y (en) * | 2008-11-27 | 2009-09-02 | 湖南华望熏蒸消毒有限公司 | Phosphine processing device |
| CN202921157U (en) * | 2012-11-16 | 2013-05-08 | 四川金叶生物防治有限公司 | Mobile phosphine gas purification treatment device |
| CN204768231U (en) * | 2015-07-13 | 2015-11-18 | 河南工大设计研究院 | Hydrogen phosphate circulating fumigation tail gas processing apparatus |
| CN205965430U (en) * | 2016-08-25 | 2017-02-22 | 福建博纯材料有限公司 | Phosphine vent gas treatment system in |
-
2018
- 2018-08-09 CN CN201810902450.8A patent/CN108970379A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2456822Y (en) * | 2000-11-02 | 2001-10-31 | 都江堰科环新技术灭虫服务中心 | Phosphine gas colleciton processor |
| CN201300033Y (en) * | 2008-11-27 | 2009-09-02 | 湖南华望熏蒸消毒有限公司 | Phosphine processing device |
| CN202921157U (en) * | 2012-11-16 | 2013-05-08 | 四川金叶生物防治有限公司 | Mobile phosphine gas purification treatment device |
| CN204768231U (en) * | 2015-07-13 | 2015-11-18 | 河南工大设计研究院 | Hydrogen phosphate circulating fumigation tail gas processing apparatus |
| CN205965430U (en) * | 2016-08-25 | 2017-02-22 | 福建博纯材料有限公司 | Phosphine vent gas treatment system in |
Non-Patent Citations (1)
| Title |
|---|
| 宋瑞等: "《基础制药设备》", 30 June 2015, 河北科学技术出版社 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110339673A (en) * | 2019-07-25 | 2019-10-18 | 江苏宜兴德融科技有限公司 | The exhaust gas processing device of equipment of metal organic chemical vapor deposition and application |
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Application publication date: 20181211 |
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