CN108964520A - Energy collector - Google Patents
Energy collector Download PDFInfo
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- CN108964520A CN108964520A CN201810804138.5A CN201810804138A CN108964520A CN 108964520 A CN108964520 A CN 108964520A CN 201810804138 A CN201810804138 A CN 201810804138A CN 108964520 A CN108964520 A CN 108964520A
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- 230000005611 electricity Effects 0.000 claims description 7
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- 238000007599 discharging Methods 0.000 abstract 1
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- 239000000463 material Substances 0.000 description 16
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 11
- 229910052802 copper Inorganic materials 0.000 description 11
- 239000010949 copper Substances 0.000 description 11
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- 229910017083 AlN Inorganic materials 0.000 description 5
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000011031 large-scale manufacturing process Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 238000001039 wet etching Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
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- 230000010355 oscillation Effects 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 241001124569 Lycaenidae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
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- 238000012512 characterization method Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/186—Vibration harvesters
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses an energy collector which comprises a cantilever beam, a plurality of piezoelectric blocks, a first electrode and a second electrode. The cantilever beam includes a fixed end for fixed disposition and a free end opposite the fixed end. The piezoelectric blocks are arranged in sequence from the fixed end to the free end. The piezoelectric block has a polarization direction substantially the same as the direction from the fixed end to the free end. The length of the piezoelectric blocks increases from block to block in the direction from the fixed end to the free end. Each piezoelectric block includes a first pole near the fixed end and a second pole near the free end. The first electrode and the second electrode are disposed on the cantilever beam. The first electrode is connected with the plurality of first poles, and the second electrode is connected with the plurality of second poles. In the vibration process of the cantilever beam, the stress intensity of different sections of the cantilever beam from the fixed end to the free end is gradually reduced. Therefore, by increasing the length of the piezoelectric blocks block by block, the difference of the potential difference generated at two ends of different piezoelectric blocks can be reduced, thereby improving or even eliminating the self-charging and self-discharging loss generated by the piezoelectric blocks.
Description
Technical field
The present invention relates to energy collection technology more particularly to a kind of energy harvesters.
Background technique
Energy harvester includes cantilever beam and setting multiple piezoelectric blocks on a cantilever beam, by the free end of cantilever beam come
It receives the vibrational energy (such as wind energy) in environment and generates vibration so that piezoelectric blocks generate piezoelectric effect, then pass through piezoelectric blocks
The electric energy that piezoelectric blocks generate during vibration is collected and is utilized by the electrode at both ends.However, the setting of piezoelectric blocks does not conform to
There is very big difference in the potential difference that the both ends that reason may cause the piezoelectric blocks of different location on cantilever beam generate, when piezoelectric blocks
It when charged in parallel stores, may will appear between different piezoelectric blocks from charge and discharge phenomena, cause internal loss, reduce energy and receive
The efficiency of storage.
Summary of the invention
In view of this, the present invention provides a kind of energy harvester.
The energy harvester of embodiment of the present invention includes cantilever beam, multiple piezoelectric blocks, first electrode and second electrode.
The cantilever beam includes the fixing end and the free end opposite with the fixing end for fixed setting.Multiple piezoelectric blocks from
It is set gradually in the fixing end to the direction of the free end.The polarization direction of the piezoelectric blocks and the fixing end are described in
The direction of free end is essentially identical.On the direction along the fixing end to the free end, the length block-by-block of the piezoelectric blocks
Increase.Each piezoelectric blocks include the first pole close to fixing end and the second pole close to the free end.First electricity
Pole and the second electrode are arranged on the cantilever beam.The first electrode is connect with multiple first poles, and described second
Electrode is connect with multiple second poles.
When the energy harvester work of embodiment of the present invention, the free end can experience the hair of the vibrational energy in environment
Raw vibration, so that multiple piezoelectric blocks generate piezoelectric effect output services voltage.In general, the potential difference that piezoelectric effect generates
It is directly proportional to the distance between the internal stress of the piezoelectric blocks and the piezoelectric blocks two end electrodes.Due to shaking in the cantilever beam
During dynamic, the cantilever beam is gradually reduced from the different cross section stress intensity in the fixing end to the free extreme direction.
Therefore, by increasing the length of the piezoelectric blocks to the direction block-by-block of the free end along the fixing end, difference can be reduced
The difference for the potential difference that the piezoelectric blocks both ends generate, even more so that the potential difference that the different piezoelectric blocks both ends generate is identical,
It is produced from charge and discharge electrical loss so as to improve the piezoelectric blocks even are eliminated, improves efficiency.
In some embodiments, the cantilever beam includes basal layer and the insulating layer that is arranged on the basal layer, institute
It states first electrode and the second electrode is arranged on the insulating layer.
In some embodiments, the energy harvester includes hold-down support, and the fixing end is fixed on the fixation
On support, the hold-down support and the fixing end are integrally formed.
In some embodiments, the hold-down support rectangular-blocklike, the width of the hold-down support and the substrate
The width of layer is essentially identical, the substantially vertical connection in side of the side of the hold-down support and the basal layer, the fixed branch
The top surface of seat and the bottom surface of the basal layer are substantially flush.
In some embodiments, the energy harvester includes mass block, and the mass block is fixed in the free end
On, the mass block and the free end are integrally formed.
In some embodiments, the mass block rectangular-blocklike, the width of the mass block and the basal layer
Width is essentially identical, the substantially vertical connection in side of the side of the mass block and the basal layer, the top of the hold-down support
Face and the bottom surface of the basal layer are substantially flush.
In some embodiments, the cantilever beam is in rectangular patch substantially, and including rectangular top, the piezoelectric blocks base
This rectangular-blocklike, the polarization direction of the piezoelectric blocks and the direction of the fixing end to the free end are essentially identical.
In some embodiments, the adjacent first electrode and the second electrode interval are arranged, and adjacent is described
Spacing distance between first electrode and the second electrode is identical.
In some embodiments, the energy harvester further include the first link block for being arranged on the insulating layer and
Second link block, first link block are connected with the first electrode, and second link block is connected with the second electrode.
In some embodiments, the thickness of the piezoelectric blocks is essentially identical.
Additional aspect and advantage of the invention will be set forth in part in the description, and will partially become from the following description
Obviously, or practice through the invention is recognized.
Detailed description of the invention
Above-mentioned and/or additional aspect and advantage of the invention is from combining in description of the following accompanying drawings to embodiment by change
It obtains obviously and is readily appreciated that, in which:
Fig. 1 is the schematic top plan view of the energy harvester of embodiment of the present invention；
Fig. 2 is the schematic cross-sectional view to obtain later in Fig. 1 according to A-A cutting.
Main element symbol description: energy harvester 10；Cantilever beam 11；Fixing end 111；Free end 112；Basal layer 113；
Insulating layer 114；Piezoelectric blocks 12；First pole 121；Second pole 122；First electrode 13；Second electrode 14；Hold-down support 15；Quality
Block 16；First link block 17；Second link block 18.
Specific embodiment
Embodiments of the present invention are described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein from beginning
Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng
The embodiment for examining attached drawing description is exemplary, and for explaining only the invention, and is not considered as limiting the invention.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside", " up time
The orientation or positional relationship of the instructions such as needle ", " counterclockwise " is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of
The description present invention and simplified description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with spy
Fixed orientation construction and operation, therefore be not considered as limiting the invention.In addition, term " first ", " second " are only used for
Purpose is described, relative importance is not understood to indicate or imply or implicitly indicates the quantity of indicated technical characteristic.
" first " is defined as a result, the feature of " second " can explicitly or implicitly include one or more feature.?
In description of the invention, the meaning of " plurality " is two or more, unless otherwise specifically defined.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected or can mutually communicate；It can be directly connected, it can also be by between intermediary
It connects connected, can be the connection inside two elements or the interaction relationship of two elements.For the ordinary skill of this field
For personnel, the specific meanings of the above terms in the present invention can be understood according to specific conditions.
In the present invention unless specifically defined or limited otherwise, fisrt feature second feature "upper" or "lower"
It may include that the first and second features directly contact, also may include that the first and second features are not direct contacts but pass through it
Between other characterisation contact.Moreover, fisrt feature includes the first spy above the second feature " above ", " above " and " above "
Sign is right above second feature and oblique upper, or is merely representative of first feature horizontal height higher than second feature.Fisrt feature exists
Second feature " under ", " lower section " and " following " include that fisrt feature is directly below and diagonally below the second feature, or is merely representative of
First feature horizontal height is less than second feature.
Following disclosure provides many different embodiments or example is used to realize different structure of the invention.In order to
Simplify disclosure of the invention, hereinafter the component of specific examples and setting are described.Certainly, they are merely examples, and
And it is not intended to limit the present invention.In addition, the present invention can in different examples repeat reference numerals and/or reference letter,
This repetition is for purposes of simplicity and clarity, itself not indicate between discussed various embodiments and/or setting
Relationship.In addition, the present invention provides various specific techniques and material example, but those of ordinary skill in the art can be with
Recognize the application of other techniques and/or the use of other materials.
Please refer to Fig. 1 and Fig. 2, the energy harvester 10 of embodiment of the present invention include cantilever beam 11, multiple piezoelectric blocks 12,
First electrode 13 and second electrode 14.Cantilever beam 11 includes for the fixing end 111 of fixed setting and opposite with fixing end 111
Free end 112.Multiple piezoelectric blocks 12 are from fixing end 111 to setting gradually on the direction of free end 112.The polarization of piezoelectric blocks 12
Direction and the direction of fixing end 111 to free end 112 are essentially identical.On the direction along fixing end 111 to free end 112, pressure
The length block-by-block of electric block 12 increases, and each piezoelectric blocks 12 include close to the first pole 121 of fixing end 111 and close to free end 112
The second pole 122.First electrode 13 and second electrode 14 are arranged on cantilever beam 11.First electrode 13 and multiple first poles 121
Connection, second electrode 14 are connect with multiple second poles 122.
When the energy harvester 10 of embodiment of the present invention works, free end 112 can experience the vibrational energy in environment
It vibrates, so that multiple piezoelectric blocks 12 generate piezoelectric effect output services voltage.In general, the potential difference that piezoelectric effect generates
The distance between 12 two end electrodes of the internal stress of piezoelectric blocks 12 and piezoelectric blocks are directly proportional.Due in 11 vibration processes of cantilever beam
In, the different cross section stress intensity on cantilever beam 11 self-retaining end 111 to 112 direction of free end is gradually reduced.Therefore, pass through edge
Fixing end 111 increases the length of piezoelectric blocks 12 to the direction block-by-block of free end 112, can reduce different 12 both ends of piezoelectric blocks and generate
Potential difference difference, even more so that the potential difference that different 12 both ends of piezoelectric blocks generate is identical, so as to improve piezoelectricity even is eliminated
Block 12 is produced from charge and discharge electrical loss, improves efficiency.
Specifically, L is the total length of cantilever beam 11, is 1300 μm.A, b is respectively first electrode 13 and second electrode 14
Width, width are 50 μm.D is the distance of two piezoelectric blocks of arbitrary neighborhood, 12 midfeather, and spacing distance is 50 μm.x1、xn-1、xn
The distance of respectively the 1st, the (n-1)th and n-th fixed point O on cantilever beam 11 of piezoelectric blocks 12, l1、ln-1、lnRespectively
The length of 1st, (n-1)th and n-th piezoelectric blocks 12, wherein x1And l1It is 50 μm.
When cantilever beam 11 is bent by external force, be on the section of x apart from 11 fixed point O distance of cantilever beam, moment of flexure with
Distance (L-x) of the section away from 11 free end 112 of cantilever beam is directly proportional, therefore the internal stress σ of piezoelectric blocks 12 meets:
σ=K (L-x) (1)
In formula, K is proportionality coefficient related with material and external force.
The potential difference V at n-th of 12 both ends of piezoelectric blocksnMeet,
In formula, d33For the piezoelectric modulus of piezoelectric material, ε is the dielectric constant of piezoelectric material.
Guarantee that all 12 both ends potential differences of piezoelectric blocks are identical, that is, V1=V2=...=Vn-1=Vn.For not
For the piezoelectric blocks 12 at section, under any specific stress, K, d33It is constant with ε, when known (n-1)th piezoelectricity
The position x of block 12n-1With length ln-1When, the position x of n-th of piezoelectric blocks 12 can be solvednWith length lnRecurrence formula:
xn=xn-1+ln-1+b+d+a (3)
In this way, passing through above-mentioned formula, it is only necessary to give the length of the 1st piezoelectric blocks 12 and apart from 11 fixed point O of cantilever beam
Distance, the length of all piezoelectric blocks 12 and distance apart from 11 fixed point O of cantilever beam can be acquired using above-mentioned recurrence formula.
In this way, the distance of the length and piezoelectric blocks 12 of different piezoelectric blocks 12 apart from fixed point O, root can be obtained accurately
The position that setting piezoelectric blocks 12 are removed according to corresponding data can further improve the electricity that 12 both ends of piezoelectric blocks of different location generate
The difference problem of potential difference is produced from charge and discharge electrical loss so as to improve piezoelectric blocks 12 even are eliminated.
In some embodiments, cantilever beam 11 includes basal layer 113 and the insulating layer 114 being arranged on basal layer 113,
First electrode 13 and second electrode 14 are arranged on insulating layer 114.
In this way, the manufacturing process of cantilever beam 11 can be with semiconductor technology compatibility, and and it can be integrated, improve production capacity.
The case where setting of insulating layer 114 can also protect cantilever beam 11, be not in electric leakage etc is so that influence energy harvester
10 work.
In some embodiments, insulating layer 114 is made of silicon nitride.
Using insulating layer 114 made of silicon nitride, thermal expansion coefficient is small, and electrical insulation capability is good, shoulders breakdown voltage height.Such as
This, in 10 course of work of energy harvester, heat and electric current that inside generates do not interfere with the performance of insulating layer 114, from
And promote the efficiency of energy harvester 10.
In some embodiments, basal layer 113 is made of SOI silicon.
Simple using 113 manufacturing process of basal layer made of SOI silicon, convenient for large-scale production, and performance is better than single
Body silicon.Therefore, SIO silicon is the optimal material of basal layer.
In some embodiments, the thickness of first electrode 13 and second electrode 14 is identical as the thickness of piezoelectric blocks 12.
So setting enables to 10 manufacturing process of energy harvester simple, multiple first electrodes 13 and multiple second electricity
Pole 14 can be made of a kind of mode or a mold, facilitate manufacture.
In some embodiments, cantilever beam 11, basal layer 113 and insulating layer 114 are in rectangular patch substantially.
The setting of rectangular patch enables to the vibration of cantilever beam 11 more abundant.If 11 thickness of cantilever beam is excessive, outstanding
In 11 vibration processes of arm beam, thickness is excessively high to may cause 11 vibration intensity of cantilever beam and amplitude is not high.Therefore it is pressed on cantilever beam 11
The stress that electric block 12 is subject to is small, and the stress that piezoelectric blocks 12 are subject to is small to cause 12 deformation of piezoelectric blocks small.At this point, what piezoelectric blocks 12 generated
Electric energy is small, can be substantially reduced the efficiency of energy harvester 10 in this way.
In some embodiments, energy harvester 10 includes hold-down support 15, and fixing end 111 is fixed on hold-down support 15
On, hold-down support 15 and fixing end 111 are integrally formed.
In this way, integrally formed technique makes the production of hold-down support 15 become simpler, it is suitble to a large amount of manufacture productions
And it is even closer that integrated molding enables to hold-down support 15 to connect with fixing end 111, is not in because of hold-down support 15
Loosening leads to the non-serviceable situation of energy harvester 10.
In some embodiments, 15 rectangular-blocklike of hold-down support, the width of hold-down support 15 and the width of basal layer 113
Spend essentially identical, the side of hold-down support 15 and the substantially vertical connection in side of basal layer 113, the top surface of hold-down support 15 and base
The bottom surface of bottom 113 is substantially flush.
Specifically, the structure of rectangle is simple, so that the manufacturing process of hold-down support 15 is simple, convenient for large-scale raw
Produce manufacture.
In some embodiments, energy harvester 10 includes mass block 16, and free end 112 is fixed on mass block 16,
Mass block 16 and free end 112 are integrally formed.
In this way, integrally formed technique makes the production of mass block 16 become simpler, it is suitble to a large amount of manufacture productions simultaneously
And it is integrally formed that enable to mass block 16 to connect with free end 112 even closer, it is not in be led because mass block 16 loosens
Cause the non-serviceable situation of energy harvester 10.
More, during the work time due to energy harvester 10, cantilever beam 11 is ceaselessly to be vibrated, mass block
16 setting is able to ascend the gravity on free end 112, and then increases the amplitude of cantilever beam 11, and still, constantly vibration is easy
The loosening of mass block 16 is caused even to fall.Therefore, by mass block 16 and the integrally formed setting in free end 112, no matter outstanding
How arm beam 11 vibrates, and mass block 16 and free end 112 are all an entirety, will not loosen or fall.Therefore it improves
The service efficiency and the time limit of energy harvester 10.
In some embodiments, 16 rectangular-blocklike of mass block, the width of mass block 16 and the width base of basal layer 113
This is identical, the side of mass block 16 and the substantially vertical connection in side of basal layer 113, the bottom surface of hold-down support 15 and basal layer
113 top surface is substantially flush.
Specifically, the structure of rectangle is simple, so that the manufacturing process of mass block 16 is simple, convenient for large-scale production
Manufacture.Also, the setting of mass block 16 is able to ascend 11 vibration intensity of cantilever beam, and then promotes the efficiency of energy harvester 10.
In some embodiments, hold-down support 15 and mass block 16 are made of silicon, but are not limited to a kind of this material.
In some embodiments, the length of hold-down support 15 be greater than mass block 16 length and the thickness of mass block 16 with
The thickness of hold-down support 15 is identical.
The quality of fixing end 111 is greater than the quality of free end 112, therefore being capable of preferably fixed energies collector 10.Example
Such as, 10 operation of energy harvester, free end 112, which vibrates up and down, drives entire cantilever beam 11 to vibrate up and down, when fixing end 111
When weight deficiency, it may result in cantilever beam 11 and fixing end 111 driven to generate vibration, so influence whether entire cantilever beam 11
Vibration, and then influence the work of energy harvester 10.Therefore, when the weight of fixing end 111 is bigger, cantilever beam 11 vibrates
It not will drive free end 112 and generate unusual fluctuation, and then do not interfere with the work of energy harvester 10.
In some embodiments, cantilever beam 11 is in substantially rectangular patch, and including rectangular top, piezoelectric blocks 12 are in substantially
The direction of rectangular block shape, the polarization direction and fixing end 111 to free end 112 of piezoelectric blocks 12 is essentially identical.
In this way, the setting of 11 rectangular patch of cantilever beam enables to 11 deformation of cantilever beam more abundant, if cantilever beam 11
It is blocky setting, it is relatively difficult may result in deformation.Because the vibration of cantilever beam 11 is the up-down vibration by free end 112
To realize.Therefore, thickness will have a direct impact on the Oscillation Amplitude of cantilever beam 11, and the power of Oscillation Amplitude directly influences piezoelectric blocks
12 piezoelectric effect and then the generation for influencing electric energy.The polarization direction and fixing end 111 of piezoelectric blocks 12 arrive the side of free end 112
Piezoelectric blocks 12 could be enabled to generate piezoelectric effect and then produce electricl energy to essentially identical.
Rectangular top surface is smooth, can with piezoelectric blocks 12, first electrode 13, second electrode 14, the first link block 17 and
Second link block 18 contacts even closer.
In some embodiments, piezoelectric blocks 12 are made of aluminium nitride.
Specifically, aluminium nitride material is easy acquisition, aluminium nitride various electrical properties (dielectric constant, dielectric loss, bulk resistor
Rate, dielectric strength) excellent and aluminium nitride therein structure from polarity, do not need high temperature and pressure polarization after molding.Therefore, it contracts
The short preparation process of energy harvester 10.And silicon nitride stable chemical performance, therefore aluminium nitride is that piezoelectric blocks 12 are ideal
Material.
In some embodiments, adjacent first electrode 13 and the interval of second electrode 14 are arranged, adjacent first electrode
Spacing distance between 13 and second electrode 14 is identical.
The setting of 14 same intervals of first electrode 13 and second electrode can improve the piezoelectric blocks for even being eliminated different location
12 because caused by the potential difference that generates of left and right ends is excessive from charge and discharge phenomena the problem of.
In some embodiments, first electrode 13 and second electrode 14 are made of copper.
Copper is easily obtained, and with respect to the relative low price of copper for other conductive materials, can reduce energy harvester
10 production cost.Copper conducts electricity very well, and resistivity is low, not will cause the loss of energy in conveying energy process.Therefore
Copper is the ideal material of first electrode 13 and second electrode 14.
In some embodiments, energy harvester 10 further includes 17 He of the first link block being arranged on insulating layer 114
Second link block 18, the first link block 17 and first electrode 13 connect, and the second link block 18 and second electrode 14 connect.
In this way, external electrical equipment is connect with the first link block 17 and the second link block 18, and external electrical equipment
A closed circuit is formed with the first link block 17, the second link block 18 and cantilever beam 11.As long as cantilever beam 11 receives outer
The vibrational energy on boundary is vibrated, and electric current will flow to outside and electricity is needed to set by the first link block 17 and the second link block 18
It is standby.
In some embodiments, the top of hold-down support 15 is arranged in the first link block 17 and the second link block 18.
In 10 course of work of energy harvester, free end 112 receives outside energy and is vibrated, and cantilever beam 11 is driven to shake
It is dynamic.At this point, fixing end 111 is fixed.If the first link block 17 and the second link block 18 are set on free end 112, that
First link block 17 and the second link block 18 are constantly vibrating, the first link block 17 and the second link block 18 it is possible that
It loosens so that influencing the output of electric energy.
Specifically, the first link block 17 and the second link block 18 are made of copper.Copper is easily obtained, and other opposite conductions
The relative low price of copper for material, can reduce the production cost of energy harvester 10.Copper conducts electricity very well, resistivity
It is low, it not will cause the loss of energy in conveying energy process.The ductility of copper is preferable, and then is able to ascend the first link block 17
With the design accuracy of the size of the second link block 18.Therefore copper is the ideal material of the first link block 17 and the second link block 18.
In some embodiments, the thickness of piezoelectric blocks 12 is essentially identical.
Specifically, based on the Design of length of piezoelectric blocks 12 is the piezoelectric blocks 12 based on same thickness, by according to cantilever
The difference of 11 position of beam, the stress difference being subject to carry out design length.Such setting is exactly in order to enable above cantilever beam 11
The potential difference at the both ends of the piezoelectric blocks 12 of different location can be essentially identical.But when 12 thickness of piezoelectric blocks is different, even if
Be the piezoelectric blocks 12 of same position deformed condition it is also different.Therefore when using the identical piezoelectric blocks 12 of different-thickness but position
The piezoelectric effect of generation is also different.Also, the piezoelectric blocks 12 of same thickness are more easily manufactured, the piezoelectric blocks of different-thickness
12 manufacturing process are complicated, and the manufacturing cost of ability collector 10 is caused to increase.
In some embodiments, the manufacturing process of energy harvester 10 includes:
Prepare basal layer 113；
In the side of basal layer 113 by r. f. magnetron sputtering insulating layer 114, insulating layer 114 covers basal layer 113
Surface；
In the side of insulating layer 114 by r. f. magnetron sputtering piezoelectric layer, and wet etching is carried out to piezoelectric layer and is obtained
The piezoelectric blocks 12 changed to length block-by-block；
Side is obtained by Deposited By Dc Magnetron Sputtering electrode layer towards piezoelectric blocks 12 in insulating layer 114, and electrode layer covering is exhausted
The surface of edge layer 114 and piezoelectric blocks 12；
Wet etching is carried out to electrode layer and obtains being distributed in the first electrode 13 at 12 both ends of piezoelectric blocks, second electrode 14, the
One link block 17 and the second link block 18；
It etches to form fixation inward through inductively coupled plasma in the side away from insulating layer 114 of basal layer 113
Support 15 and mass block 16.
The purity is high of the insulating layer 114, piezoelectric layer and the electrode layer that are obtained in the way of magnetron sputtering, consistency is high, and
Surface uniformity is good and small to material damage, enables to contact between insulating layer 114, piezoelectric layer and electrode layer close.This side
Formula is suitable for almost all metals, glass and plastic or other material.First electrode 13, the second electrode formed by wet etching
14, the first link block 17 and the second link block 18, dimensional accuracy is high, is not in first electrode 13, the company of second electrode 14, first
Connect block 17 and the too long or too short situation of 18 size of the second link block.Inductively coupled plasma etching has the spy of high-speed
Point, is able to carry out fast-etching, is suitable for large-scale production.
In the description of this specification, reference term " embodiment ", " certain embodiments ", " schematically implementation
What the description of mode ", " example ", " specific example " or " some examples " etc. meant to describe in conjunction with the embodiment or example
Particular features, structures, materials, or characteristics are contained at least one embodiment or example of the invention.In this specification
In, schematic expression of the above terms are not necessarily referring to identical embodiment or example.Moreover, the specific spy of description
Sign, structure, material or feature can be combined in any suitable manner in any one or more embodiments or example.
While embodiments of the present invention have been illustrated and described, it will be understood by those skilled in the art that:
These embodiments can be carried out with a variety of variations, modification, replacement in the case where not departing from the principle of the present invention and objective and become
Type, the scope of the present invention are defined by the claims and their equivalents.
Claims (10)
1. a kind of energy harvester, which is characterized in that the energy harvester includes:
Cantilever beam, the cantilever beam include the fixing end and the free end opposite with the fixing end for fixed setting；
The multiple piezoelectric blocks being successively set on from the fixing end to the free end on the cantilever beam；The pole of the piezoelectric blocks
The direction for changing direction and the fixing end to the free end is essentially identical；In the direction along the fixing end to the free end
On, the length block-by-block of the piezoelectric blocks increases；Each piezoelectric blocks include close to fixing end the first pole and close to it is described from
By the second pole held；With
First electrode and second electrode on the cantilever beam are set, the first electrode is connect with multiple first poles,
The second electrode is connect with multiple second poles.
2. energy harvester according to claim 1, which is characterized in that the cantilever beam includes basal layer and is arranged in institute
The insulating layer on basal layer is stated, the first electrode and the second electrode are arranged on the insulating layer.
3. energy harvester according to claim 1, which is characterized in that the energy harvester includes hold-down support, institute
It states fixing end to be fixed on the hold-down support, the hold-down support and the fixing end are integrally formed.
4. energy harvester according to claim 3, which is characterized in that the hold-down support rectangular-blocklike, it is described solid
The width for determining the width and the basal layer of support is essentially identical, the side base of the side of the hold-down support and the basal layer
This vertical connection, the top surface of the hold-down support and the bottom surface of the basal layer are substantially flush.
5. energy harvester according to claim 1, which is characterized in that the energy harvester includes mass block, described
Free end is fixed on the mass block, and the mass block and the free end are integrally formed.
6. energy harvester according to claim 5, which is characterized in that the mass block rectangular-blocklike, the quality
The width of block and the width of the basal layer are essentially identical, and the side of the mass block and the side of the basal layer are substantially vertical
Connection, the top surface of the hold-down support and the bottom surface of the basal layer are substantially flush.
7. energy harvester according to claim 1, which is characterized in that the cantilever beam is in rectangular patch substantially, and is wrapped
Include rectangular top, the basic rectangular-blocklike of piezoelectric blocks, the polarization direction of the piezoelectric blocks and the fixing end to it is described oneself
It is essentially identical by the direction held.
8. energy harvester according to claim 1, which is characterized in that the adjacent first electrode and second electricity
For interpolar every setting, the adjacent first electrode is identical as the spacing distance between the second electrode.
9. energy harvester according to claim 2, which is characterized in that the energy harvester further includes being arranged described
The first link block and the second link block on insulating layer, first link block are connected with the first electrode, and described second connects
Block is connect to connect with the second electrode.
10. energy harvester according to claim 1, which is characterized in that the thickness of the piezoelectric blocks is essentially identical.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111064387A (en) * | 2020-01-06 | 2020-04-24 | 南方科技大学 | Adaptive energy harvester |
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| CN103199736A (en) * | 2012-01-09 | 2013-07-10 | 中国科学院上海硅酸盐研究所 | Composite structure piezoelectric energy collector driven by cantilever |
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| CN103199736A (en) * | 2012-01-09 | 2013-07-10 | 中国科学院上海硅酸盐研究所 | Composite structure piezoelectric energy collector driven by cantilever |
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