CN108962712B - Vacuum control system - Google Patents

Abstract

The invention discloses a vacuum control system for controlling the movement of a driven object under vacuum condition, comprising: the vacuum sealing device is provided with a vacuum cavity and a plurality of driving holes; the driving platform is positioned in the vacuum cavity; the driving part is penetrated through the driving hole, one end of the driving part is connected with the driving platform, and the other end of the driving part is positioned outside the vacuum sealing device; a bellows for sealing a gap between the driving part and the driving hole; the joint part is positioned in the vacuum cavity, one end of the joint part is connected with the driven object, and the other end of the joint part is connected with the driving platform; the driving part drives the driving platform and the driving platform drives the joint part, and the joint part drives the driven animal to move under the vacuum condition. The invention realizes the movement of the driven object in two different directions in the vacuum cavity, and simultaneously has simple structure and cost saving.

Description

Vacuum control system

Technical Field

The present invention relates to a vacuum control system, and more particularly, to a vacuum control system for an extraction electrode.

Background

In an atmospheric environment, there are many implementations to linearly move an object in two directions at the same time if desired. But this linear movement is difficult when the object to be moved is located in a vacuum chamber. Generally, for the sake of simplicity of equipment and convenience of wiring, the driver (e.g., motor) is located in the atmosphere outside the vacuum chamber, and the driven object (e.g., the extraction electrode of the ion implanter) is placed in the vacuum chamber. This requires the transmission of driving forces in the atmosphere to the vacuum, which leads to problems of vacuum sealing and force transmission, which must be accomplished while ensuring the vacuum level of the vacuum chamber.

In general, linear movement can be achieved using bellows, but only one-dimensional linear movement can be achieved by movement of the bellows, and it is difficult to simultaneously move the driven object in two directions, particularly in two directions perpendicular to each other. Because the bending degree of the corrugated pipe is limited, it is difficult to realize bending at 90 degrees; if two corrugated pipes connected at mutually perpendicular angles are adopted to realize movement in two-dimensional directions, the accuracy of movement travel is not said, and the stability of movement is difficult to ensure.

Disclosure of Invention

The invention aims to overcome the defect that in the prior art, a driven object in a vacuum cavity is difficult to move in two directions at the same time, and provides a vacuum control system.

The invention solves the technical problems by the following technical proposal:

a vacuum handling system for handling movement of a driven object under vacuum, the vacuum handling system comprising:

the vacuum sealing device is provided with a vacuum cavity and a plurality of driving holes, and the driving holes are communicated with the vacuum cavity;

The driving platform is positioned in the vacuum cavity;

the driving part penetrates through the driving hole, one end of the driving part is positioned in the vacuum cavity and connected with the driving platform, and the other end of the driving part is positioned outside the vacuum sealing device;

a bellows for sealing a gap between the driving member and the driving hole;

the joint part is positioned in the vacuum cavity, one end of the joint part is connected with the driven object, and the other end of the joint part is connected with the driving platform;

the driving part drives the driving platform and the driving platform drives the joint part, and the joint part drives the driven animal to move under the vacuum condition.

In the technical scheme, the driving part, the corrugated pipe and the vacuum sealing device are combined, so that the integral structure of the vacuum control system is simplified; meanwhile, the vacuum control system of the invention realizes the vacuum sealing of the vacuum cavity, realizes the combination structure of the driving component and the vacuum cavity, and optimizes the integral function of the vacuum control system; in the technical scheme, the driving part drives the driving platform and the driving platform to drive the joint part, and the joint part drives the driven object to move under the vacuum condition, so that the driven object can move in different directions.

Preferably, the vacuum sealing apparatus comprises:

the main body frame is provided with a first vacuum cavity and an opening, and the opening is communicated with the first vacuum cavity;

the manipulator trunk is arranged corresponding to the opening and is connected with the main body frame in a sealing way, and the manipulator trunk is provided with a second vacuum cavity;

the second vacuum cavity is communicated with the first vacuum cavity and forms the vacuum cavity, and the driving hole is formed in the manipulator trunk.

In the technical scheme, the whole volume of the vacuum control system is reduced and the structure of the vacuum control system is simplified by arranging the manipulator trunk.

Preferably, the manipulator torso is detachably connected to the body frame.

Preferably, the bellows is arranged corresponding to the driving part, one end of the bellows is connected to the outer wall of the vacuum sealing device in a sealing manner, the other end of the bellows is connected with the driving part, and the driving part penetrates through the bellows.

Preferably, the driving component comprises a first driving component and a second driving component, the first driving component and the second driving component are both connected with the driving platform, and an included angle is formed between the moving direction of the first driving component and the moving direction of the second driving component.

In the technical scheme, the driven object moves in different directions in the vacuum cavity by arranging the first driving part and the second driving part in different moving directions.

Preferably, the included angle is 90 degrees.

Preferably, the first driving part comprises a driving arm, and the driving arm is L-shaped;

the driving arm comprises a driving rod and a driving connecting rod, one end of the driving rod is connected with the corrugated pipe, the central axis of the driving rod is parallel to the moving direction of the first driving component, the central axis of the driving connecting rod is perpendicular to the central axis of the driving rod, and one end of the driving connecting rod is sleeved at the other end of the driving rod;

the driving rod sleeve is provided with a first universal joint, and the first universal joint is used for keeping the moving direction of the driving rod.

In the technical scheme, the structure of the driving arm reduces the whole occupied space of the first driving part and simplifies the whole structure of the vacuum control system. In the technical scheme, the first universal joint is sleeved on the driving rod, so that the stability of the driving rod moving along the moving direction and the accuracy of the moving direction are ensured.

Preferably, the driving platform includes:

the first body platform is provided with a first sliding block at one end, the first sliding block is arranged on a first guide rail in a sliding manner, a second guide rail is arranged at the other end, and the second driving part is connected with the first body platform;

the middle trunk platform is provided with a second sliding block at one end corresponding to the first trunk platform, the second sliding block is arranged on the second guide rail in a sliding manner, and the middle trunk platform is also provided with a third sliding block;

the second trunk platform is in linkage with the middle trunk platform, a third guide rail is arranged on the second trunk platform, the third sliding block is arranged on the third guide rail in a sliding mode, and the first driving part is connected with the second trunk platform;

the first sliding block is parallel to the moving direction of the third sliding block, and the included angle is formed between the moving direction of the second sliding block and the moving direction of the third sliding block.

In this technical scheme, through setting up the structure of driving platform has realized the removal of driven thing in two different directions in the vacuum chamber, simultaneously, realizes that the removal of first truck platform drive middle truck platform does not influence the removal of second truck platform to and the removal of second truck platform drive middle truck platform does not influence the removal of first truck platform. In the technical scheme, the first driving part is arranged to drive the second trunk platform to move along the moving direction of the first driving part; the second driving part is arranged to drive the first trunk platform to move along the moving direction of the second driving part.

Preferably, the second trunk platform is penetrated through the middle trunk platform, and the second trunk platform is propped against the middle trunk platform.

In the technical scheme, by arranging the structure that the second trunk platform penetrates through the middle trunk platform, the second trunk platform can drive the middle trunk platform to move along the moving direction of the second trunk platform without influencing the movement of the first trunk platform; meanwhile, when the first trunk platform drives the middle trunk platform to move along the moving direction of the first trunk platform, the movement of the second trunk platform is not influenced.

Preferably, the second trunk platform is provided with a shaft sleeve and a second universal joint, one end of the first driving part penetrates through the shaft sleeve, and the second universal joint is sleeved outside the shaft sleeve.

In this technical scheme, through setting up the second universal joint for compensate because of the condition that the direction of movement of first drive component and the direction of movement of second truck platform are nonparallel, make even both nonparallel, also can not cause the card to die.

Preferably, the driving platform comprises a first driving platform and a second driving platform, and the first driving platform and the second driving platform are oppositely arranged;

The joint part comprises a main joint part and a secondary joint part, one end of the main joint part is connected with one end of the driven object, the other end of the main joint part is connected with the first driving platform, one end of the secondary joint part is connected with the other end of the driven object, and the other end of the secondary joint part is connected with the second driving platform.

Preferably, the main joint part includes:

a main joint torso;

one end of the first bearing is connected with the main joint trunk, and the central axis of the first bearing is perpendicular to the plane where the main joint trunk is located;

the plane of the main joint support is parallel to the plane of the main joint trunk, and a first mounting hole is formed in the position, corresponding to the first bearing, of the main joint support;

the third universal joint is clamped in the first mounting hole, and is sleeved outside the first bearing;

and one end of the second bearing is connected with the main joint support, and the central axis of the second bearing is perpendicular to the plane where the main joint support is located.

According to the technical scheme, the transmission of the main joint part is more stable and accurate through the arrangement of the third universal joint, so that the stability of the driven object moving and the accuracy of the moving stroke are guaranteed.

Preferably, the main joint component further comprises a pre-tightening device, one end of the pre-tightening device is connected with the main joint trunk, and the other end of the pre-tightening device abuts against the main joint support.

Preferably, the pre-tightening device includes:

the pre-tightening spring bracket is connected with the main joint trunk;

and one end of the spring plunger is fixed on the pre-tightening spring bracket, and the other end of the spring plunger abuts against the main joint bracket.

Preferably, the number of the pre-tightening devices is two, one ends of the two pre-tightening devices are connected with the main joint trunk, and the other ends of the two pre-tightening devices respectively lean against two ends of the main joint support, which are oppositely arranged on one surface facing the main joint trunk.

In the technical scheme, the pre-tightening device is arranged, so that the position of the outer ring of the third universal joint clamped on the main joint support is limited, the outer ring and the inner ring of the third universal joint are positioned at relatively fixed positions, the transmission is more stable and accurate, and the stability of the movement of a driven object and the accuracy of the movement stroke are ensured.

Preferably, the main joint part further comprises:

the first bearing fixing support is detachably connected to one surface, far away from the main joint trunk, of the main joint support, and a second mounting hole is formed in a position, corresponding to the first bearing, of the first bearing fixing support;

the outer wall of the first bearing fastener is clamped in the second mounting hole, and one end of the first bearing fastener is clamped at one end of the first bearing, which is far away from the main joint trunk.

In the technical scheme, the first bearing fixing support and the first bearing fastener are arranged, so that the position of the inner ring of the third universal joint is limited, the inner ring and the outer ring of the third universal joint are positioned at relatively fixed positions, transmission is more stable and accurate, and the moving stability of a driven object and the moving stroke accuracy are ensured.

Preferably, the main joint unit further comprises a guard plate, the guard plate being connected to the main joint trunk; the number of the protection plates is two, and the two protection plates are respectively connected with two side walls which are oppositely arranged on the trunk of the main joint.

Preferably, the slave joint component includes:

From the joint trunk;

one end of the third bearing is connected with the slave joint trunk, and the central axis of the third bearing is perpendicular to the plane where the slave joint trunk is located;

the secondary joint support is sleeved outside the third bearing in a joint mode and is provided with a rotating device;

the connecting support is provided with a telescopic device, the telescopic device is connected with the rotating device, and the telescopic device is used for adjusting the distance between the connecting support and the secondary joint support;

and one end of the fourth bearing is connected with the connecting bracket, and the central axis of the fourth bearing is perpendicular to the plane where the connecting bracket is located and is parallel to the central axis of the third bearing.

In the technical scheme, the slave joint trunk is connected with the driver, and the fourth bearing is connected with a driven object. The secondary joint support sleeved outside the third bearing can rotate around the central axis of the third bearing by arranging the third bearing so as to compensate the motion interference when the driven object moves back and forth along the direction vertical to the central axis of the third bearing; by arranging the rotating device and the telescopic device, the motion interference when the driven object moves back and forth along the central axis direction of the third bearing is compensated, and the stability of the motion of the driven object is ensured.

Preferably, the rotating device comprises a master rotating device and a slave rotating device, the number of the telescopic devices is two, and the two telescopic devices are arranged in parallel and are respectively connected with the master rotating device and the slave rotating device.

In the technical scheme, by arranging two parallel telescopic devices, the stability of the driven object in moving away from the joint support or approaching to the joint support is ensured.

Preferably, the secondary joint support is provided with a sliding shaft, the central axis of the sliding shaft is perpendicular to the central axis of the third bearing, the sliding shaft comprises a main sliding shaft and a secondary sliding shaft, the main sliding shaft and the secondary sliding shaft are respectively connected to two corresponding sides of the secondary joint support, and the main sliding shaft and the secondary sliding shaft are respectively arranged in the main rotating device and the secondary rotating device in a penetrating mode.

Preferably, the main rotation device includes: the main sliding shaft limiter, the main sliding shaft bearing, the main elastic piece and the main fastening piece are sequentially arranged along one end, close to the slave joint support, of the main sliding shaft to one end, far away from the slave joint support, of the main sliding shaft in a penetrating manner, one end of the main sliding shaft joint support is clamped outside the main sliding shaft bearing, and the other end of the main sliding shaft joint support is connected with the telescopic device;

The slave rotation device includes: the first slave elastic piece, the slave sliding shaft joint support, the slave sliding shaft bearing, the second slave elastic piece and the slave fastening piece are sequentially arranged on the slave sliding shaft in a penetrating mode along one end, close to the slave sliding shaft, of the slave sliding shaft joint support to one end, far away from the slave sliding shaft joint support, of the slave sliding shaft, the slave sliding shaft joint support is clamped outside the slave sliding shaft bearing, and the other end of the slave sliding shaft joint support is connected with the telescopic device.

In the technical scheme, the main sliding shaft joint support is arranged to rotate along the main sliding shaft, and the auxiliary sliding shaft joint support is arranged to rotate along the auxiliary sliding shaft, so that the motion interference of a driven object when the driven object moves back and forth along the central axis direction of the third bearing is compensated, and the motion stability of the driven object is ensured.

Preferably, the telescopic device comprises:

the central axis of the telescopic bearing is perpendicular to the central axis of the fourth bearing, and the telescopic bearing is clamped on the connecting bracket;

the telescopic shaft penetrates through the telescopic bearing, and one end of the telescopic shaft is connected with the rotating device;

The central axis of the telescopic shaft coincides with the central axis of the telescopic bearing, and the telescopic shaft moves along the central axis direction of the telescopic shaft relative to the telescopic bearing.

In the technical scheme, by arranging the telescopic bearing and the telescopic shaft, the motion interference when the driven object moves back and forth along the central axis direction of the third bearing is compensated, and the stability of the motion of the driven object is ensured.

Preferably, the slave joint trunk includes:

a torso body;

the base is arranged on the trunk body through a connecting shaft sleeve, and the third bearing is connected with the base.

Therefore, the structure of the slave joint trunk is more compact, and the production cost is saved.

Preferably, the vacuum handling system further comprises a driver located outside the vacuum sealing apparatus and connected to the driving part.

The invention has the positive progress effects that:

1. the invention realizes the movement of the driven object in two different directions in the vacuum cavity, and simultaneously has simple structure and cost saving;

2. the invention simplifies the whole structure of the vacuum control system by combining the driving part, the corrugated pipe and the vacuum sealing device; meanwhile, the invention realizes the vacuum sealing of the vacuum cavity, the combination structure of the driving component and the vacuum cavity, and the integral function of the vacuum control system is optimized;

3. The main joint part and the auxiliary joint part ensure the stability of the movement of the driven object and the accuracy of the movement stroke, and furthermore, when the driven object moves in two different directions by the structure of the auxiliary joint part, the two different directions do not interfere with each other.

Drawings

Fig. 1 is a schematic diagram of a vacuum handling system according to a preferred embodiment of the invention.

Fig. 2 is a partial structural assembly view of a vacuum handling system according to a preferred embodiment of the present invention.

Fig. 3 is an assembly schematic diagram of a driving platform according to a preferred embodiment of the invention.

Fig. 4 is a schematic perspective view of a driving platform according to a preferred embodiment of the invention.

Fig. 5 is a front view of a driving platform according to a preferred embodiment of the present invention.

Fig. 6 is a schematic perspective view of a main joint component according to a preferred embodiment of the present invention.

Fig. 7 is a schematic view of the assembly of the main joint components of the preferred embodiment of the present invention.

Fig. 8 is a schematic perspective view of a slave joint component according to a preferred embodiment of the present invention.

Fig. 9 is a schematic view of the assembly of the secondary joint member according to the preferred embodiment of the present invention.

Description of the reference numerals

Vacuum sealing apparatus 100

Drive hole 111

Body frame 112

Manipulator trunk 113

First vacuum chamber 114

Second vacuum chamber 115

Opening 116

Driving platform 200

First torso platform 210

First slider 211

Second guide rail 212

Through hole 214

Fourth universal joint 215

Intermediate torso platform 220

Second slider 222

Third slider 223

Upper intermediate torso platform 224

Lower intermediate torso platform 225

Accommodating chamber 226

Second torso platform 230

Third guide rail 233

Shaft sleeve 234

Second universal joint 235

First guide rail 241

Second drive platform 260

First driving part 330

Drive arm 331

Drive rod 332

Drive connection rod 333

First universal joint 334

The second driving part 340

Bellows 400

Main joint component 500

Main joint torso 510

First bearing 520

Main joint support 530

First mounting hole 531

Third universal joint 540

Outer ring 541

Inner race 542

Pretensioning device 550

Pretension spring bracket 551

Spring plunger 552

First bearing fixing support 560

Second mounting hole 561

First bearing fastener 570

Second bearing 580

Protective plate 590

Slave joint component 600

From joint trunk 610

Torso body 611

Base 612

Third bearing 620

From the joint support 630

Main sliding shaft 631

From sliding axle 632

Main rotating device 640

Sliding shaft limiter 641

Main sliding shaft joint support 642

Main sliding shaft bearing 643

Main elastic member 644

Main fastener 645

From the rotating means 650

First slave elastic member 651

From sliding axle joint support 652

From sliding shaft bearing 653

Second slave elastic member 654

From fastener 655

Connecting bracket 660

Telescoping device 670

Telescopic bearing 671

Telescopic shaft 672

Fourth bearing 680

Driver 700

Driven object 800

Direction of movement A

Direction of movement B

Detailed Description

The invention is further illustrated by means of the following examples, which are not intended to limit the scope of the invention.

As will be appreciated with reference to fig. 1-9, the present embodiment provides a vacuum handling system for handling movement of a driven object 800 under vacuum conditions, comprising: vacuum sealing apparatus 100, drive platform 200, drive components, bellows 400, articulation components, and driver 700. The driver 700 is located outside the vacuum sealing apparatus 100, and the driver 700 is connected to the driving part.

As shown in fig. 1 and 2, the vacuum sealing apparatus 100 is provided with a vacuum chamber and a plurality of driving holes 111, the driving holes 111 being in communication with the vacuum chamber. A drive platform 200 is located within the vacuum chamber. The driving component is disposed through the driving hole 111, one end of the driving component is disposed in the vacuum cavity and connected to the driving platform 200, and the other end of the driving component is disposed outside the vacuum sealing apparatus 100. Bellows 400 is used to seal the gap between the drive member and drive bore 111. The bellows 400 is disposed corresponding to the driving part, one end of the bellows 400 is connected to the outer wall of the vacuum sealing apparatus 100 in a sealing manner, the other end of the bellows 400 is connected to the driving part, and the driving part is disposed through the bellows 400. The joint part is positioned in the vacuum cavity, one end of the joint part is connected with the driven object 800, and the other end of the joint part is connected with the driving platform 200. The driving part drives the driving platform 200, and the driving platform 200 drives the joint part, and the joint part drives the driven animal 800 to move under the vacuum condition. Thus, by combining the driving part, the bellows 400, and the vacuum sealing apparatus 100, the overall structure of the vacuum manipulation system is simplified; meanwhile, the vacuum control system of the invention realizes the vacuum sealing of the vacuum cavity, realizes the combination structure of the driving component and the vacuum cavity, and optimizes the integral function of the vacuum control system; in this way, the driving platform 200 is driven by the driving component, and the joint component is driven by the driving platform 200, so that the driven object 800 is driven to move under the vacuum condition by the joint component, and the driven object 800 is moved in different directions.

The vacuum sealing apparatus 100 includes: a main body frame 112 and a manipulator trunk 113. The main body frame 112 is provided with a first vacuum chamber 114 and an opening 116, and the opening 116 communicates with the first vacuum chamber 114. The manipulator trunk 113 is provided corresponding to the opening 116, and the manipulator trunk 113 is hermetically connected to the main body frame 112, and the manipulator trunk 113 is provided with a second vacuum chamber 115. The second vacuum chamber 115 communicates with the first vacuum chamber 114 and forms the vacuum chamber, and the drive hole 111 is provided in the manipulator body 113. Thus, by providing manipulator trunk 113, the overall volume of the vacuum handling system is reduced, and the structure of the vacuum handling system is simplified. In the present embodiment, the manipulator trunk 113 is detachably attached to the main body frame 112.

The driving parts comprise a first driving part 330 and a second driving part 340, the first driving part 330 and the second driving part 340 are connected with the driving platform 200, and an included angle is formed between the moving direction A of the first driving part 330 and the moving direction B of the second driving part 340. Thus, by providing the first driving part 330 and the second driving part 340 in different moving directions, the movement of the driven object 800 in different directions in the vacuum chamber is realized. In this embodiment, the included angle is 90 degrees.

The first driving member 330 includes a driving arm 331, and the driving arm 331 has an L-shape. The driving arm 331 includes a driving rod 332 and a driving connection rod 333, one end of the driving rod 332 is connected with the bellows 400, the central axis of the driving rod 332 is parallel to the moving direction a of the first driving component 330, the central axis of the driving connection rod 333 is perpendicular to the central axis of the driving rod 332, and one end of the driving connection rod 333 is sleeved at the other end of the driving rod 332. Thus, by providing the structure of the driving arm 331, the overall occupied space of the first driving member 330 is reduced, and at the same time, the overall structure of the vacuum manipulation system is simplified. The driving lever 332 is sleeved with a first universal joint 334, and the first universal joint 334 is used for maintaining the moving direction of the driving lever 332. In this way, by sleeving the first universal joint 334 on the driving rod 332, the stability of the movement of the driving rod 332 along the movement direction and the accuracy of the movement direction are ensured.

As shown in fig. 3 to 5, the driving platform 200 includes: a first torso platform 210, a middle torso platform 220, and a second torso platform 230. One end of the first trunk platform 210 is provided with a first sliding block 211, the first sliding block 211 is arranged on a first guide rail 241 in a sliding way, and the first guide rail 241 is connected with a vacuum sealing device; the other end of the first torso platform 210 is provided with a second rail 212, and a second drive member 340 is coupled to the first torso platform 210. The end of the middle trunk platform 220 corresponding to the first trunk platform 210 is provided with a second sliding block 222, the second sliding block 222 is slidably arranged on the second guide rail 212, and the middle trunk platform 220 is also provided with a third sliding block 223. The second trunk platform 230 is linked with the middle trunk platform 220, the second trunk platform 230 is provided with a third guide rail 233, the third slider 223 is slidably arranged on the third guide rail 233, and the first driving part 330 is connected with the second trunk platform 230. The first slider 211 is parallel to the moving direction of the third slider 223, and the moving direction of the second slider 222 forms the angle with the moving direction of the third slider 223. In this way, the structure of the driving platform 200 is provided to realize the movement of the driven object 800 in two different directions in the vacuum cavity, and meanwhile, the movement of the first trunk platform 210 driving the middle trunk platform 220 does not affect the movement of the second trunk platform 230, and the movement of the second trunk platform 230 driving the middle trunk platform 220 does not affect the movement of the first trunk platform 210. Thus, by providing the first driving part 330, the second torso platform 230 is moved along the moving direction a of the first driving part 330; the second driving part 340 is provided to drive the first torso platform 210 to move along the moving direction B of the second driving part 340.

The second torso platform 230 is disposed through the middle torso platform 220, and the second torso platform 230 abuts against the middle torso platform 220. In this way, by arranging the structure that the second torso platform 230 passes through the middle torso platform 220, the second torso platform 230 realizes that the movement of the first torso platform 210 is not affected when the middle torso platform 220 is driven to move along the movement direction of the second torso platform 230; meanwhile, when the first torso platform 210 drives the middle torso platform 220 to move along the moving direction of the first torso platform 210, the movement of the second torso platform 230 is not affected. That is, when the second torso platform 230 moves the intermediate torso platform 220 in the moving direction of the second torso platform 230, the intermediate torso platform 220 simultaneously moves with respect to the vacuum chamber and the first torso platform 210 by the arrangement of the first slider 211 and the first rail 241, and the arrangement of the third slider 223 and the third rail 233.

Specifically, the middle torso platform 220 includes an upper middle torso platform 224 and a lower middle torso platform 225, the upper middle torso platform 224 and the lower middle torso platform 225 encircle to form a accommodating cavity 226, the second torso platform 230 is disposed through the accommodating cavity 226, and the second torso platform 230 abuts against a wall of the accommodating cavity 226; the second slider 222 is fixed to a side of the upper intermediate torso platform 224 facing the first torso platform 210, and the third slider 223 is fixed to a side of the lower intermediate torso platform 225 facing the receiving chamber 226. The direction of the second torso platform 230 penetrating through the accommodating cavity 226 is parallel to the moving direction of the first torso platform 210. In this way, when the middle torso platform 220 moves along the moving direction of the first torso platform 210 under the driving of the first torso platform 210, the movement of the second torso platform 230 is not affected.

The first trunk platform 210 is provided with a through hole 214, and the second driving part 340 is penetrated through and fixed to the through hole 214.

The second trunk platform 230 is provided with a shaft sleeve 234 and a second universal joint 235, one end of the first driving part 330 penetrates through the shaft sleeve 234, and the second universal joint 235 is sleeved outside the shaft sleeve 234. Preferably, the second universal joint 235 is a universal ball joint. In this way, by providing the second universal joint 235, the situation that the moving direction of the first driving part 330 and the moving direction of the second trunk platform 230 are not parallel is compensated, so that even if the moving directions are not parallel, the locking is not caused.

In this embodiment, the driving platform 200 includes a first driving platform (not labeled in the figure) and a second driving platform 260, where the first driving platform and the second driving platform 260 are disposed opposite to each other. The joint member includes a main joint member 500 and a sub joint member 600, one end of the main joint member 500 is connected to one end of the driven object 800, the other end of the main joint member 500 is connected to the first driving platform, one end of the sub joint member 600 is connected to the other end of the driven object 800, and the other end of the sub joint member 600 is connected to the second driving platform 260.

As shown in fig. 6 and 7, the main joint unit 500 includes: the main joint body 510, the first bearing 520, the main joint support 530, the third universal joint 540, the second bearing 580, and the pretensioning device 550.

One end of the first bearing 520 is connected to the main joint body 510, and a central axis of the first bearing 520 is perpendicular to a plane in which the main joint body 510 is located. The plane of the main joint support 530 is parallel to the plane of the main joint trunk 510, and a first mounting hole 531 is provided at a position of the main joint support 530 corresponding to the first bearing 520. The third universal joint 540 is clamped in the first mounting hole 531, and the third universal joint 540 is sleeved outside the first bearing 520. One end of the second bearing 580 is connected to the main joint support 530, and the central axis of the second bearing 580 is perpendicular to the plane of the main joint support 530. In this way, by providing the third universal joint 540, the transmission of the main joint member 500 is more stable and precise, thereby ensuring the stability of the movement of the driven animal 800 and the accuracy of the movement stroke.

One end of the pretensioning device 550 is connected to the main joint body 510, and the other end of the pretensioning device 550 abuts against the main joint bracket 530. The pretensioning device 550 includes: a pre-tensioned spring mount 551 and a spring plunger 552. The pre-tightening spring bracket 551 is connected with the main joint trunk 510. One end of the spring plunger 552 is secured to the pre-tensioned spring bracket 551 and the other end of the spring plunger 552 abuts the main knuckle bracket 530. The number of the pre-tightening devices 550 is two, one end of each pre-tightening device 550 is connected with the main joint trunk 510, and the other ends of the pre-tightening devices 550 respectively lean against two opposite ends of one surface of the main joint bracket 530 facing the main joint trunk 510. In this way, by arranging the pre-tightening device 550, the outer ring 541 of the third universal joint 540 clamped on the main joint support 530 is limited, so that the outer ring 541 and the inner ring 542 of the third universal joint 540 are positioned at relatively fixed positions, and the transmission is more stable and accurate, thereby ensuring the stability of the movement of the driven animal 800 and the accuracy of the movement stroke.

The main joint component 500 further comprises: a first bearing fixing support 560, a first bearing fastener 570, and a shielding plate 590.

The first bearing fixing support 560 is detachably connected to a surface of the main joint support 530 away from the main joint trunk 510, and a second mounting hole 561 is provided at a position of the first bearing fixing support 560 corresponding to the first bearing 520. The outer wall of the first bearing fastener 570 is clamped in the second mounting hole 561, and one end of the first bearing fastener 570 is clamped at one end of the first bearing 520 far away from the main joint trunk 510. According to the technical scheme, the first bearing fixing support 560 and the first bearing fastener 570 are arranged, so that the position of the inner ring 542 of the third universal joint 540 is limited, the inner ring 542 and the outer ring 541 of the third universal joint 540 are located at relatively fixed positions, and transmission is more stable and accurate, and the moving stability and the moving stroke accuracy of the driven animal 800 are guaranteed.

The guard plate 590 is connected with the main joint trunk 510; the number of the protection plates 590 is two, and the two protection plates 590 are respectively connected with two side walls of the main joint trunk 510 which are oppositely arranged.

As shown in fig. 8 and 9, the slave joint member 600 includes: a slave joint torso 610, a third bearing 620, a slave joint mount 630, a connection mount 660, and a fourth bearing 680.

The slave joint trunk 610 includes: a torso body 611, and a chassis 612. The base 612 is disposed on the body 611 through the connecting sleeve 234, and the third bearing 620 is connected to the base 612. In this way, the structure of the slave joint trunk 610 is more compact, and the production cost is saved.

One end of the third bearing 620 is connected to the slave joint trunk 610, and the center axis of the third bearing 620 is perpendicular to the plane of the slave joint trunk 610. The slave joint support 630 is sleeved outside the third bearing 620, and the slave joint support 630 is provided with a rotating device. The connecting bracket 660 is provided with a telescopic device 670, the telescopic device 670 is connected with the rotating device, and the telescopic device 670 is used for adjusting the distance between the connecting bracket 660 and the secondary joint bracket 630. One end of the fourth bearing 680 is connected to the connection bracket 660, and a central axis of the fourth bearing 680 is perpendicular to a plane in which the connection bracket 660 is located and parallel to a central axis of the third bearing 620. In this way, the joint body 610 is connected to the driver 700, and the fourth bearing 680 is connected to the driven object 800. By arranging the third bearing 620, the slave joint support 630 sleeved outside the third bearing 620 can rotate around the central axis of the third bearing 620, so as to compensate the motion interference when the driven object 800 moves back and forth along the direction perpendicular to the central axis of the third bearing 620; by providing the rotation means and the telescopic means 670, the movement interference of the driven object 800 when moving back and forth along the central axis direction of the third bearing 620 is compensated, and the stability of the movement of the driven object 800 is ensured.

The rotating device comprises a master rotating device 640 and a slave rotating device 650, the number of the telescopic devices 670 is two, and the two telescopic devices 670 are arranged in parallel and are respectively connected with the master rotating device 640 and the slave rotating device 650. Thus, by providing two parallel telescopic devices 670, stability of the driven object 800 when moving away from the slave joint support 630 or approaching the slave joint support 630 is ensured.

The slave joint bracket 630 is provided with a sliding shaft, the central axis of which is perpendicular to the central axis of the third bearing 620, the sliding shaft comprises a master sliding shaft 631 and a slave sliding shaft 632, the master sliding shaft 631 and the slave sliding shaft 632 are respectively connected to two corresponding sides of the slave joint bracket 630, and the master sliding shaft 631 and the slave sliding shaft 632 respectively penetrate through the master rotating device 640 and the slave rotating device 650.

The main rotating device 640 includes: the main sliding shaft 631 is penetrated from one end of the joint support 630 to one end of the main sliding shaft 631 far away from the joint support 630 along the main sliding shaft 631 in sequence, and one end of the main sliding shaft joint support 642 is clamped outside the main sliding shaft bearing 643, while the other end of the main sliding shaft joint support 642 is connected with the telescopic device 670. The slave rotation device 650 includes: the first slave elastic member 651, the slave sliding shaft joint holder 652, the slave sliding shaft bearing 653, the second slave elastic member 654 and the slave fastener 655 are sequentially provided along the slave sliding shaft 632 from one end of the slave sliding shaft 632 near the slave sliding joint holder 630 to one end of the slave sliding shaft 632 far from the slave sliding joint holder 630, and the slave sliding shaft joint holder 652 is provided outside the slave sliding shaft bearing 653 in a clamped manner, and the other end of the slave sliding shaft joint holder 652 is connected to the telescopic device 670. Thus, by providing the main sliding shaft joint holder 642 to rotate along the main sliding shaft 631 and the sub-sliding shaft joint holder 652 to rotate along the sub-sliding shaft 632, the movement interference when the driven object 800 moves back and forth in the center axis direction of the third bearing 620 is compensated, and the stability of the movement of the driven object 800 is ensured.

Telescoping device 670 includes: a telescopic bearing 671 and a telescopic shaft 672. The central axis of the telescopic bearing 671 is perpendicular to the central axis of the fourth bearing 680, and the telescopic bearing 671 is clamped to the connection bracket 660. The telescopic shaft 672 is inserted into the telescopic bearing 671, and one end of the telescopic shaft 672 is connected with the rotating device. Wherein the central axis of the telescopic shaft 672 coincides with the central axis of the telescopic bearing 671, and the telescopic shaft 672 moves relative to the telescopic bearing 671 in the central axis direction of the telescopic shaft 672. Thus, by providing the telescopic bearing 671 and the telescopic shaft 672, the movement interference when the driven object 800 moves back and forth in the center axis direction of the third bearing 620 is compensated, and the stability of the movement of the driven object 800 is ensured.

In practical application, the upper end of the driven object 800 is used as a driving end, and the driving end is connected with the main joint component 500; the lower end of the driven animal 800 serves as a driven end, and the driven end is connected to the slave joint part 600. For example, when the driven object 800 translates along the moving direction a, the distance between the driving end and the driven end is larger than the length of the driven object 800 when the driving end has moved but the driven end has just started, however, the driven object 800 is rigid and is not damaged, and the compensation is performed by adopting the structure arrangement of the joint component 600 (the central axis direction of the third bearing 620 is the moving direction a, and the central axis direction perpendicular to the third bearing 620 is the moving direction B), so as to avoid damage to the driven object 800 possibly caused by the asynchronous movement of the upper end and the lower end of the driven object 800.

In the operation of the vacuum handling system of this embodiment, in addition to the above-mentioned movement conflicts in the moving direction a and the moving direction B caused by the asynchronous movement of the upper and lower ends of the driven object 800, since the first driving part 330 and the second driving part 340 cannot be completely synchronized, there is a need to be sequential, and the movement conflicts in the moving direction a and the moving direction B of the driven object 800 are generated.

In this case, the overall motion compensation has the following aspects:

1. the first driving part 330 and the first driving platform are not parallel in the moving direction a, and the second driving part 340 and the second driving platform 260 are not parallel in the moving direction a, and the compensation is mainly realized by rotating the driving connecting rod 333 around the moving direction a and the second universal joint 235;

2. the first driving part 330 and the first driving platform are not parallel in the moving direction B, and the second driving part 340 and the second driving platform 260 are not parallel in the moving direction B, and compensation is mainly realized by the fourth universal joint 215 and the first universal joint 334 arranged on the first trunk platform 210;

3. the first driving platform and the second driving platform 260 are not parallel in the moving direction a, and the first driving platform and the second driving platform 260 are not parallel in the moving direction B, and compensation is mainly achieved by the third universal joint 540 in the main joint part 500, the main sliding shaft joint support 642 and the auxiliary sliding shaft joint support 652 which can rotate around the moving direction B in the auxiliary joint part 600, and the auxiliary joint support 630 which can rotate around the moving direction a.

While specific embodiments of the invention have been described above, it will be appreciated by those skilled in the art that these are by way of example only, and the scope of the invention is defined by the appended claims. Various changes and modifications to these embodiments may be made by those skilled in the art without departing from the principles and spirit of the invention, but such changes and modifications fall within the scope of the invention.

Claims (22)

1. A vacuum handling system for handling movement of a driven object under vacuum conditions, the vacuum handling system comprising:

the vacuum sealing device is provided with a vacuum cavity and a plurality of driving holes, and the driving holes are communicated with the vacuum cavity;

the driving platform is positioned in the vacuum cavity;

the driving part penetrates through the driving hole, one end of the driving part is positioned in the vacuum cavity and connected with the driving platform, and the other end of the driving part is positioned outside the vacuum sealing device;

a bellows for sealing a gap between the driving member and the driving hole;

the joint part is positioned in the vacuum cavity, one end of the joint part is connected with the driven object, and the other end of the joint part is connected with the driving platform;

The driving part drives the driving platform and the driving platform drives the joint part, the joint part drives the driven object to move under the vacuum condition, the driving part comprises a first driving part and a second driving part, the first driving part and the second driving part are both connected with the driving platform, and an included angle is formed between the moving direction of the first driving part and the moving direction of the second driving part;

the drive platform includes:

the second driving part is connected with the first trunk platform;

a middle torso platform;

the first driving part is connected with the second trunk platform;

the first driving platform and the second driving platform are oppositely arranged;

the joint part comprises a main joint part and a secondary joint part, one end of the main joint part is connected with one end of the driven object, the other end of the main joint part is connected with the first driving platform, one end of the secondary joint part is connected with the other end of the driven object, and the other end of the secondary joint part is connected with the second driving platform.

2. The vacuum handling system of claim 1, wherein the vacuum sealing apparatus comprises:

the main body frame is provided with a first vacuum cavity and an opening, and the opening is communicated with the first vacuum cavity;

the manipulator trunk is arranged corresponding to the opening and is connected with the main body frame in a sealing way, and the manipulator trunk is provided with a second vacuum cavity;

the second vacuum cavity is communicated with the first vacuum cavity and forms the vacuum cavity, and the driving hole is formed in the manipulator trunk.

3. The vacuum handling system of claim 2, wherein the manipulator torso is detachably connected to the body frame.

4. The vacuum handling system of claim 1, wherein the bellows is disposed in correspondence with the driving member, and one end of the bellows is sealingly connected to an outer wall of the vacuum sealing apparatus, and the other end of the bellows is connected to the driving member, and the driving member is disposed through the bellows.

5. The vacuum handling system of claim 1, wherein the included angle is 90 degrees.

6. The vacuum handling system of claim 1, wherein the first drive member comprises a drive arm, the drive arm being L-shaped;

the driving arm comprises a driving rod and a driving connecting rod, one end of the driving rod is connected with the corrugated pipe, the central axis of the driving rod is parallel to the moving direction of the first driving component, the central axis of the driving connecting rod is perpendicular to the central axis of the driving rod, and one end of the driving connecting rod is sleeved at the other end of the driving rod;

the driving rod sleeve is provided with a first universal joint, and the first universal joint is used for keeping the moving direction of the driving rod.

7. The vacuum handling system of claim 1, wherein a first slider is disposed at one end of the first torso platform, the first slider being slidably disposed on a first rail, and a second rail is disposed at the other end of the first torso platform;

a second sliding block is arranged at one end of the middle trunk platform corresponding to the first trunk platform, the second sliding block is arranged on the second guide rail in a sliding manner, and a third sliding block is further arranged on the middle trunk platform;

the second trunk platform is in linkage with the middle trunk platform, a third guide rail is arranged on the second trunk platform, and the third sliding block is arranged on the third guide rail in a sliding manner;

The first sliding block is parallel to the moving direction of the third sliding block, and the included angle is formed between the moving direction of the second sliding block and the moving direction of the third sliding block.

8. The vacuum handling system of claim 7, wherein the second torso platform is disposed through the intermediate torso platform and the second torso platform rests against the intermediate torso platform.

9. The vacuum steering system of claim 7, wherein the second torso platform is provided with a sleeve and a second universal joint, one end of the first drive member is disposed through the sleeve, and the second universal joint is disposed outside the sleeve.

10. The vacuum-operated system of claim 1, wherein the primary joint member comprises:

a main joint torso;

one end of the first bearing is connected with the main joint trunk, and the central axis of the first bearing is perpendicular to the plane where the main joint trunk is located;

the plane of the main joint support is parallel to the plane of the main joint trunk, and a first mounting hole is formed in the position, corresponding to the first bearing, of the main joint support;

The third universal joint is clamped in the first mounting hole, and is sleeved outside the first bearing;

and one end of the second bearing is connected with the main joint support, and the central axis of the second bearing is perpendicular to the plane where the main joint support is located.

11. The vacuum steering system of claim 10, wherein the primary joint member further comprises a pretensioning device having one end connected to the primary joint torso and the other end abutting the primary joint bracket.

12. The vacuum handling system of claim 11, wherein the pretensioning device comprises:

the pre-tightening spring bracket is connected with the main joint trunk;

and one end of the spring plunger is fixed on the pre-tightening spring bracket, and the other end of the spring plunger abuts against the main joint bracket.

13. The vacuum steering system of claim 12, wherein the number of said pretensioning devices is two, one end of each of said pretensioning devices being connected to said main joint trunk, and the other ends of each of said pretensioning devices being respectively abutted against opposite ends of a face of said main joint bracket facing said main joint trunk.

14. The vacuum-operated system of claim 10, wherein the primary joint member further comprises:

the first bearing fixing support is detachably connected to one surface, far away from the main joint trunk, of the main joint support, and a second mounting hole is formed in a position, corresponding to the first bearing, of the first bearing fixing support;

the outer wall of the first bearing fastener is clamped in the second mounting hole, and one end of the first bearing fastener is clamped at one end of the first bearing, which is far away from the main joint trunk.

15. The vacuum handling system of claim 10, wherein the primary joint member further comprises a shield plate coupled to the primary joint torso; the number of the protection plates is two, and the two protection plates are respectively connected with two side walls which are oppositely arranged on the trunk of the main joint.

16. The vacuum handling system of claim 1, wherein the slave joint component comprises:

from the joint trunk;

one end of the third bearing is connected with the slave joint trunk, and the central axis of the third bearing is perpendicular to the plane where the slave joint trunk is located;

The secondary joint support is sleeved outside the third bearing in a joint mode and is provided with a rotating device;

the connecting support is provided with a telescopic device, the telescopic device is connected with the rotating device, and the telescopic device is used for adjusting the distance between the connecting support and the secondary joint support;

and one end of the fourth bearing is connected with the connecting bracket, and the central axis of the fourth bearing is perpendicular to the plane where the connecting bracket is located and is parallel to the central axis of the third bearing.

17. The vacuum handling system of claim 16, wherein the rotating means comprises a master rotating means and a slave rotating means, the number of telescoping means being two, the two telescoping means being disposed in parallel and connected to the master rotating means and the slave rotating means, respectively.

18. The vacuum handling system of claim 17, wherein the slave joint support is provided with a sliding shaft, a central axis of the sliding shaft is perpendicular to a central axis of the third bearing, the sliding shaft comprises a master sliding shaft and a slave sliding shaft, the master sliding shaft and the slave sliding shaft are respectively connected to two corresponding sides of the slave joint support, and the master sliding shaft and the slave sliding shaft are respectively arranged in the master rotating device and the slave rotating device in a penetrating manner.

19. The vacuum handling system of claim 18, wherein the primary rotating means comprises: the main sliding shaft limiter, the main sliding shaft bearing, the main elastic piece and the main fastening piece are sequentially arranged along one end, close to the slave joint support, of the main sliding shaft to one end, far away from the slave joint support, of the main sliding shaft in a penetrating manner, one end of the main sliding shaft joint support is clamped outside the main sliding shaft bearing, and the other end of the main sliding shaft joint support is connected with the telescopic device;

the slave rotation device includes: the first slave elastic piece, the slave sliding shaft joint support, the slave sliding shaft bearing, the second slave elastic piece and the slave fastening piece are sequentially arranged on the slave sliding shaft in a penetrating mode along one end, close to the slave sliding shaft, of the slave sliding shaft joint support to one end, far away from the slave sliding shaft joint support, of the slave sliding shaft, the slave sliding shaft joint support is clamped outside the slave sliding shaft bearing, and the other end of the slave sliding shaft joint support is connected with the telescopic device.

20. The vacuum handling system of claim 16, wherein the telescoping device comprises:

the central axis of the telescopic bearing is perpendicular to the central axis of the fourth bearing, and the telescopic bearing is clamped on the connecting bracket;

the telescopic shaft penetrates through the telescopic bearing, and one end of the telescopic shaft is connected with the rotating device;

the central axis of the telescopic shaft coincides with the central axis of the telescopic bearing, and the telescopic shaft moves along the central axis direction of the telescopic shaft relative to the telescopic bearing.

21. The vacuum-operated system of claim 16, wherein the slave joint torso comprises:

a torso body;

the base is arranged on the trunk body through a connecting shaft sleeve, and the third bearing is connected with the base.

22. The vacuum handling system of any of claims 1-21, further comprising a driver located outside of the vacuum seal and coupled to the drive member.