CN108957627A - A kind of chip of light waveguide - Google Patents
A kind of chip of light waveguide Download PDFInfo
- Publication number
- CN108957627A CN108957627A CN201810636680.4A CN201810636680A CN108957627A CN 108957627 A CN108957627 A CN 108957627A CN 201810636680 A CN201810636680 A CN 201810636680A CN 108957627 A CN108957627 A CN 108957627A
- Authority
- CN
- China
- Prior art keywords
- waveguide segment
- wave guide
- arc
- center line
- waveguide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims description 13
- 238000005452 bending Methods 0.000 abstract description 10
- 230000005540 biological transmission Effects 0.000 abstract description 6
- 239000013307 optical fiber Substances 0.000 description 10
- 238000003780 insertion Methods 0.000 description 8
- 230000037431 insertion Effects 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 4
- 239000000835 fiber Substances 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 238000013473 artificial intelligence Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 230000035772 mutation Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12004—Combinations of two or more optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Integrated Circuits (AREA)
Abstract
The embodiment of the present invention provides a kind of chip of light waveguide, including incoming wave guide arm, the first output wave guide arm and the second output wave guide arm；First output wave guide arm includes sequentially connected first arc waveguide segment, the second arc waveguide segment, third arc waveguide segment and the first straight wave guide section；Second output wave guide arm includes sequentially connected 4th arc waveguide segment, the 5th arc waveguide segment, the 6th arc waveguide segment and the second straight wave guide section；First arc waveguide segment and the 4th arc waveguide segment respectively include the subarc waveguide segment of the first quantity, third arc waveguide segment and the 6th arc waveguide segment respectively include the subarc waveguide segment of the second quantity, the radius of the corresponding circular arc of center line of each subarc waveguide segment is the first radius, and the radius of the corresponding circular arc of center line of the corresponding circular arc of center line and the 5th arc waveguide segment of the second arc waveguide segment is the second radius.The bending part of the y-branch of the chip of light waveguide is made of multistage arc, it is easy to accomplish curvature it is gradual, to reduce bending loss, to reduce transmission loss.
Description
Technical field
The present embodiments relate to optical waveguide technique fields, more particularly, to a kind of chip of light waveguide.
Background technique
With big data, cloud storage, cloud computing, next-generation mobile communications, Internet of Things, virtual reality and artificial intelligence etc.
The optical fiber telecommunications system of the fast development of technology, the basis as information transmission is still the bottle of generation information technology development
Neck, and the optic communication device as optical fiber telecommunications system basis, development level are then in generation information technology development bottleneck
Bottleneck, especially fiber waveguide device, be constitute high speed, large capacity, intelligent optical fiber communication system it is necessary.
The core of array optical waveguide device is chip of light waveguide, chip of light waveguide is coupled with input/output optical fiber align,
Affixed, then housing seal is the Primary Component for constituting optical fiber telecommunications system and optical fiber sensing system to constitute fiber waveguide device
One of, to realize beam splitting, conjunction beam, multiplexing, demultiplexing, filtering or the decaying etc. to lightwave signal.
Fiber waveguide device requires input port and output port to be parallel to each other, and this requires the Y types of chip of light waveguide
Branch some must be it is curved, the structural mutation of the bending part of the y-branch of existing chip of light waveguide is larger, nothing
Method realizes the gradual of curvature, causes bending loss larger, eventually leads to biggish transmission loss.
Summary of the invention
In order to overcome the above problem or at least be partially solved the above problem, the embodiment of the present invention provides a kind of optical waveguide
Chip.
The embodiment of the present invention provides a kind of chip of light waveguide, comprising: incoming wave guide arm, the first output wave guide arm and second are defeated
Waveguide arm out；The cross section of incoming wave guide arm, the first output wave guide arm and the second output wave guide arm is in rectangle, incoming wave guide arm
Center line is linear；First output wave guide arm includes sequentially connected first arc waveguide segment, the second arc waveguide segment, third arc waveguide
Section and the first straight wave guide section；Second output wave guide arm includes sequentially connected 4th arc waveguide segment, the 5th arc waveguide segment, the 6th arc
Waveguide segment and the second straight wave guide section；First arc waveguide segment and the 4th arc waveguide segment are connect with incoming wave guide arm respectively, and form Y type
Bifurcation structure, the first straight wave guide section and the second straight wave guide section are parallel with incoming wave guide arm respectively, the first output wave guide arm and second
Output wave guide arm is symmetric using the center line of incoming wave guide arm as symmetry axis；First arc waveguide segment and the 4th arc waveguide segment point
Not Bao Kuo the first quantity subarc waveguide segment, third arc waveguide segment and the 6th arc waveguide segment respectively include the subarc wave of the second quantity
Section is led, the radius of the corresponding circular arc of center line of each subarc waveguide segment is the first radius, the center line pair of the second arc waveguide segment
The radius of the corresponding circular arc of center line of the circular arc and the 5th arc waveguide segment answered is the second radius.
The embodiment of the present invention also provides a kind of array optical waveguide chip, and the array optical waveguide chip is by multiple above-mentioned light waves
It leads chip cascade and is formed.
A kind of chip of light waveguide provided in an embodiment of the present invention, including incoming wave guide arm, the first output wave guide arm and second
Output wave guide arm；Wherein, the first output wave guide arm includes sequentially connected first arc waveguide segment, the second arc waveguide segment, third arc
Waveguide segment and the first straight wave guide section；Second output wave guide arm includes sequentially connected 4th arc waveguide segment, the 5th arc waveguide segment,
Six arc waveguide segments and the second straight wave guide section；First arc waveguide segment and the 4th arc waveguide segment respectively include the subarc waveguide of the first quantity
Section, third arc waveguide segment and the 6th arc waveguide segment respectively include the subarc waveguide segment of the second quantity, in each subarc waveguide segment
The radius of the corresponding circular arc of heart line is the first radius, the corresponding circular arc of center line of the second arc waveguide segment and the 5th arc waveguide segment
The radius of the corresponding circular arc of center line is the second radius.The bending part of the y-branch of the chip of light waveguide by multistage arc
Constitute, it is easy to accomplish curvature it is gradual, to reduce bending loss, to reduce transmission loss.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is this hair
Bright some embodiments for those of ordinary skill in the art without creative efforts, can be with root
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the schematic diagram according to the chip of light waveguide of the embodiment of the present invention；
Fig. 2 is the curve according to the Insertion Loss of the embodiment of the present invention with the first radius change；
Fig. 3 is the curve according to the Insertion Loss of the embodiment of the present invention with the first radius change；
Fig. 4 is the curve according to the Insertion Loss of the embodiment of the present invention with the first radius change；
Fig. 5 is the curve according to the Insertion Loss of the embodiment of the present invention with the first radius change；
Fig. 6 is the schematic diagram according to the array optical waveguide chip of the embodiment of the present invention.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
A kind of chip of light waveguide of the offer of the embodiment of the present invention, with reference to Fig. 1, comprising: incoming wave guide arm, the first output waveguide
Arm and the second output wave guide arm；The cross section of incoming wave guide arm, the first output wave guide arm and the second output wave guide arm is in rectangle, defeated
The center line for entering waveguide arm is linear；First output wave guide arm includes sequentially connected first arc waveguide segment 6, the second arc waveguide segment
7, third arc waveguide segment 8 and the first straight wave guide section 9；Second output wave guide arm includes sequentially connected 4th arc waveguide segment 10,
Five arc waveguide segments 11, the 6th arc waveguide segment 12 and the second straight wave guide section 13；First arc waveguide segment 6 and the 4th arc waveguide segment 10 difference
Connect with incoming wave guide arm, and form Y type bifurcation structure, the first straight wave guide section 9 and the second straight wave guide section 13 respectively with incoming wave
Guide arm is parallel, and the first output wave guide arm and the second output wave guide arm are symmetry axis in symmetrical point using the center line of incoming wave guide arm
Cloth；First arc waveguide segment 6 and the 4th arc waveguide segment 10 respectively include the subarc waveguide segment of the first quantity, 8 He of third arc waveguide segment
6th arc waveguide segment 12 respectively includes the subarc waveguide segment of the second quantity, the corresponding circular arc of center line of each subarc waveguide segment
Radius is the first radius, and the corresponding circular arc of center line of the second arc waveguide segment 7 and the center line of the 5th arc waveguide segment 11 are corresponding
The radius of circular arc is the second radius.
Wherein, the corresponding circular arc of center line of the subarc waveguide segment for the first quantity that the first arc waveguide segment 6 includes
The center of circle is overlapped, the center of circle of the corresponding circular arc of center line of the subarc waveguide segment for the second quantity that third arc waveguide segment 8 includes
It is overlapped, the center of circle of the corresponding circular arc of subarc waveguide segment for the first quantity that the 4th arc waveguide segment 10 includes is overlapped, the 6th arc
The center of circle of the corresponding circular arc of subarc waveguide segment for the second quantity that waveguide segment 12 includes is overlapped.
Wherein, the center line institute of tangent line of the center line of the first arc waveguide segment 6 at first nodal point and incoming wave guide arm
Straight line parallel, the tangent line of the center line of the center line of the first arc waveguide segment 6 and the second arc waveguide segment 7 in the second center
It being overlapped, the center line of the second arc waveguide segment 7 and the center line of third arc waveguide segment 8 are overlapped in the tangent line of third center, the
The center line of three arc waveguide segments 8 is in the straight line parallel where the tangent line of the 4th center and incoming wave guide arm；4th arc waveguide
The center line of section 10 is in the straight line parallel where the tangent line of the 5th center and incoming wave guide arm, the 4th arc waveguide segment 10
The center line of heart line and the 5th arc waveguide segment 11 the 6th center tangent line be overlapped, the center line of the 5th arc waveguide segment 11 and
The center line of 6th arc waveguide segment 12 is overlapped in the tangent line of the 7th center, and the center line of the 6th arc waveguide segment 12 is in the 8th
The straight line parallel where tangent line and incoming wave guide arm at heart point；First nodal point, the second central point, third central point, the 4th
Central point, the 5th central point, the 6th central point, the 7th central point and the 8th central point respectively correspond as incoming wave guide arm and first
Between arc waveguide segment 6, between the first arc waveguide segment 6 and the second arc waveguide segment 7, the second arc waveguide segment 7 and third arc waveguide segment 8 it
Between, between third arc waveguide segment 8 between the first straight wave guide section 9, between incoming wave guide arm and the 4th arc waveguide segment 10, the 4th arc
Between waveguide segment 10 and the 5th arc waveguide segment 11, between the 5th arc waveguide segment 11 and the 6th arc waveguide segment 12 and the 6th arc waveguide
The central point of faying face between section 12 between the second straight wave guide section 13.
Specifically, chip of light waveguide provided in this embodiment includes that incoming wave guide arm, the first output wave guide arm and second are defeated
Waveguide arm out, incoming wave guide arm are connect with the first output wave guide arm and the second output wave guide arm respectively, and whole is in y-type structure,
In, the first output wave guide arm and the second output wave guide arm are symmetric using the center line of incoming wave guide arm as symmetry axis.Light wave
The cross section of any position in chip is led in rectangle, then the center line of any waveguide segment passes through any position in any waveguide segment
Cross section center.
First output wave guide arm includes sequentially connected first arc waveguide segment 6, the second arc waveguide segment 7, third arc waveguide segment 8
With the first straight wave guide section 9；Second output wave guide arm includes sequentially connected 4th arc waveguide segment 10, the 5th arc waveguide segment 11,
Six arc waveguide segments 12 and the second straight wave guide section 13；Wherein, the first output wave guide arm and the second output wave guide arm and incoming wave guide arm
The waveguide segment being attached is respectively the first arc waveguide segment 6 and the 4th arc waveguide segment 10, and the first straight wave guide section 9 and the second straight wave
It is parallel with incoming wave guide arm respectively to lead section 13.
First arc waveguide segment 6 and the 4th arc waveguide segment 10 respectively include the subarc waveguide segment of the first quantity, third arc waveguide
Section 8 and the 6th arc waveguide segment 12 respectively include the subarc waveguide segment of the second quantity, and the center line of each subarc waveguide segment is corresponding
The radius of circular arc is the first radius, the center line of the center line corresponding circular arc and the 5th arc waveguide segment 11 of the second arc waveguide segment 7
The radius of corresponding circular arc is the second radius；, the subarc waveguide segment for the first quantity for including by the first arc waveguide segment 6,
The subarc waveguide segment for the second quantity that three arc waveguide segments 8 include and the second arc waveguide segment 7 can realize the first output wave guide arm
Gradual bending, likewise, subarc waveguide segment, the 6th arc waveguide segment 12 packet of the first quantity for including by the 4th arc waveguide segment 10
The subarc waveguide segment and the 5th arc waveguide segment 11 of the second quantity included can realize the gradual bending of the second output wave guide arm.
Preferably, the corresponding circular arc of center line of the subarc waveguide segment for the first quantity that the first arc waveguide segment 6 includes
The center of circle be overlapped, the circle of the corresponding circular arc of center line of the subarc waveguide segment for the second quantity that third arc waveguide segment 8 includes
The heart is overlapped, and the center of circle of the corresponding circular arc of subarc waveguide segment for the first quantity that the 4th arc waveguide segment 10 includes is overlapped, and the 6th
The center of circle of the corresponding circular arc of subarc waveguide segment for the second quantity that arc waveguide segment 12 includes is overlapped；I.e. the first arc waveguide segment 6,
The corresponding camber line of center line of third arc waveguide segment 8, the 4th arc waveguide segment 10 and the 6th arc waveguide segment 12 is circular arc.
By between incoming wave guide arm and the first arc waveguide segment 6, between the first arc waveguide segment 6 and the second arc waveguide segment 7, second
Between arc waveguide segment 7 and third arc waveguide segment 8, between third arc waveguide segment 8 between the first straight wave guide section 9, incoming wave guide arm
Between the 4th arc waveguide segment 10, between the 4th arc waveguide segment 10 and the 5th arc waveguide segment 11, the 5th arc waveguide segment 11 and the 6th
The central point of faying face between arc waveguide segment 12 and between the 6th arc waveguide segment 12 between the second straight wave guide section 13 is distinguished
Referred to as first nodal point, the second central point, third central point, the 4th central point, the 5th central point, the 6th central point, the 7th
Central point and the 8th central point, in the present embodiment, tangent line and input of the center line of the first arc waveguide segment 6 at first nodal point
The center line of straight line parallel where the center line of waveguide arm, the center line of the first arc waveguide segment 6 and the second arc waveguide segment 7 is
The tangent line of two centers is overlapped, and the center line of the second arc waveguide segment 7 and the center line of third arc waveguide segment 8 are in third central point
The tangent line at place is overlapped, and the center line of third arc waveguide segment 8 is in the straight line where the tangent line of the 4th center and incoming wave guide arm
In parallel；Tangent line of the center line of 4th arc waveguide segment 10 in the 5th center and the straight line parallel where incoming wave guide arm, the
The center line of four arc waveguide segments 10 and the center line of the 5th arc waveguide segment 11 are overlapped in the tangent line of the 6th center, the 5th arc wave
The center line of the center line and the 6th arc waveguide segment 12 of leading section 11 is overlapped in the tangent line of the 7th center, the 6th arc waveguide segment 12
Center line the 8th center tangent line and incoming wave guide arm where straight line parallel.It, can by above-mentioned connection type
Make to be attached between waveguide segment by the more gradual mode of curvature.
Chip of light waveguide provided in this embodiment is made of the bending part of y-branch multistage arc, it is easy to accomplish curved
Curvature it is gradual, to reduce bending loss, to reduce transmission loss.
Based on above embodiments, with reference to Fig. 1, incoming wave guide arm includes sequentially connected third straight wave guide section 1, cone waveguide segment
2, the 4th straight wave guide section 3, broadening waveguide segment 4 and the 5th straight wave guide section 5, the 5th straight wave guide section 5 respectively with the first output wave guide arm
It is connected with the second output wave guide arm；The width of third straight wave guide section 1 is the first width, and the width of the 4th straight wave guide section 3 is second
Width, the width of the 5th straight wave guide section 5 are third width, and the first width is greater than the second width, and the second width is less than third width；
The width of the end face of one end that cone waveguide segment 2 is connected with third straight wave guide section 1 is the first width, bores waveguide segment 2 and the 4th directly
The width of the end face of one end that waveguide segment 3 is connected is the second width, and broadening waveguide segment 4 is connected with the 4th straight wave guide section 3
The width of the end face of one end is the second width, the width of the end face of one end that broadening waveguide segment 4 is connected with the 5th straight wave guide section 5
For third width.
Wherein, the length range for boring waveguide segment 2 is 300~500 μm, the length range of the 4th straight wave guide section 3 is 100~
150 μm, to broaden the length range of waveguide segment 4 be 200~400 μm, the length range of the 5th straight wave guide section 5 is 100~200 μm.
Specifically, incoming wave guide arm include sequentially connected third straight wave guide section 1, cone waveguide segment 2, the 4th straight wave guide section 3,
Broadening waveguide segment 4 and the 5th straight wave guide section 5, incoming wave guide arm are attached with the first output wave guide arm and the second output wave guide arm
Waveguide segment be the 5th straight wave guide section 5.The effect of cone waveguide segment 2 is to improve Y points when input waveguide and optical fiber are there are when deviation
The uniformity of branch, length are determined according to input waveguide and optical fiber deviation, general, input waveguide and optical fiber deviation
Line deviation is less than 0.2 μm, and less than 0.1 °, the length range of cone waveguide segment 2 is 300~500 μm for angular displacement, bores 2 end of waveguide segment
Width is less than 0.5 μm of width of third straight wave guide section 1.The effect of 4th straight wave guide section 3 is linking cone waveguide segment 2, while also can
Improve the uniformity and Wavelength Dependent Loss of Y-branch, length range is 100~150 μm, and width is equal to cone 2 end of waveguide segment
Width.Broadening waveguide segment 4 and the 5th straight wave guide section 5 effect be will input single-mode field slowly broaden be two peak values mould
Formula is allowed to respectively enter the first output wave guide arm and the second output wave guide arm, to reduce mode mismatch loss, reduces the damage of chip
Consumption, broadens width of the narrow place's width with the 4th straight wave guide section 3 of waveguide segment 4, and the wide place of broadening waveguide segment 4 is equal to the 5th straight wave guide
Section 5；The length range for broadening waveguide segment 4 is 200~400 μm；The length range of 5th straight wave guide section 5 is 100~200 μm.
Based on above embodiments, central angle, the second arc waveguide segment of the corresponding circular arc of center line of each subarc waveguide segment
Center line to correspond to the central angle of circular arc and the central angle of the corresponding circular arc of center line of the 5th arc waveguide segment be default arc
Angle value, the value range for presetting radian value is 0.3 °~0.8 °.
Wherein, the value range of the first quantity is 4~6, and the value range of the second quantity is 4~6.
Specifically, the central angle of the corresponding circular arc of center line of each subarc waveguide segment of the present embodiment, the second arc waveguide
It is default that the center line of section, which corresponds to the central angle of circular arc and the central angle of the corresponding circular arc of center line of the 5th arc waveguide segment,
Radian value, the value range for presetting radian value is 0.3 °~0.8 °；And for ease of gradual, the first quantity for realizing curvature
Value range be 4~6, the value range of the second quantity is 4~6.
Based on above embodiments, the incoming wave guide arm faying face with the first output wave guide arm and the second output wave guide arm respectively
Between have the first spacing；There is the second spacing between the center line of first straight wave guide section and the center line of the second straight wave guide section.
Specifically, incoming wave guide arm has between the first output wave guide arm and the faying face of the second output wave guide arm respectively
Minimum gap between first spacing, i.e. the first output wave guide arm and the second output wave guide arm, the first spacing is according to array light wave
It leads manufacturing process to determine, generally 1~2 μm；Have between the center line of first straight wave guide section and the center line of the second straight wave guide section
There is the second spacing, the second spacing is determined by professional standard, generally 127 μm or 250 μm.
Based on above embodiments, the first spacing, the second spacing preset radian value, the first quantity, the second quantity, and the first half
Meet following relational expression between diameter and the second radius:
In above formula, GAP is the first spacing, and L is the second spacing, and θ is default radian value, and m is the first quantity, and n is the second number
Amount, R1For the first radius, R2For the second radius.
Specifically, according to geometrical relationship, the first spacing, the second spacing preset radian value, the first quantity, the second quantity, the
Meet following relational expression between Radius and the second radius:
In above formula, GAP is the first spacing, and L is the second spacing, and θ is default radian value, and m is the first quantity, and n is the second number
Amount, R1For the first radius, R2For the second radius.
First radius R1With the second radius R2It is determined according to waveguide core cladding index difference, if selection array light wave
Leading core covering refringence is 0.36%, is equal to single mode optical fiber core covering refringence, at this time third straight wave guide section section ruler
Very little is 8 × 8 μm, to guarantee good transmission performance, the first radius R1With the second radius R2Minimum 25mm；Select array light wave
Lead core covering refringence be 0.45%, when third straight wave guide section sectional dimension be 6 × 6 μm~7 × 7 μm, the first radius R1With
Second radius R2Minimum 15mm；Selecting array optical waveguide core covering refringence is 1.5%, when third straight wave guide section section ruler
Very little is 3.5 × 3.5 μm~4.5 × 4.5 μm, the first radius R1With the second radius R2Minimum 5mm.
Fig. 2-Fig. 5 is respectively illustrated under conditions of default radian value takes 0.4 ° and 0.6 ° respectively, passes through the first output respectively
Waveguide arm (CH1) and the second output wave guide arm (CH2) measure the Insertion Loss of acquisition with the curve of the first radius change, wherein every width
Different lines respectively correspond the first different spacing (i.e. minimum between the first output wave guide arm and the second output wave guide arm in figure
Gap)；By Fig. 2-Fig. 5 it is found that under conditions of different default radian values, there are a first radius R1, may make light wave
The Insertion Loss of the first output wave guide arm and the second output wave guide arm of leading chip is small in 1250~1650 μm (fiber optic communication wave bands)
In 3.06dB (theoretical Insertion Loss, namely light splitting Insertion Loss are -10lg (0.5)=3.01dB), polarized dependent loss PDL is less than at this time
0.02dB, Wavelength Dependent Loss WDL are less than 0.05dB.
The embodiment of the present invention also provides a kind of array optical waveguide chip, and with reference to Fig. 6, the array optical waveguide chip is by multiple
The chip of light waveguide stated is cascaded and is formed.
Specifically, the array optical waveguide chip that Fig. 6 is 1 × 4 can also form 1 × N (N=by the cascade mode of multilayer
8,16,32,64,128,258 ...) array optical waveguide chip.
Finally, it is stated that: the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although ginseng
According to previous embodiment, invention is explained in detail, those skilled in the art should understand that: it still can be with
It modifies the technical solutions described in the foregoing embodiments or equivalent replacement of some of the technical features；And
These are modified or replaceed, the spirit and model of technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution
It encloses.
Claims (10)
1. a kind of chip of light waveguide characterized by comprising incoming wave guide arm, the first output wave guide arm and the second output waveguide
Arm；
The cross section of the incoming wave guide arm, the first output wave guide arm and the second output wave guide arm is in rectangle, described
The center line of incoming wave guide arm is linear；The first output wave guide arm includes sequentially connected first arc waveguide segment, the second arc
Waveguide segment, third arc waveguide segment and the first straight wave guide section；The second output wave guide arm includes sequentially connected 4th arc waveguide
Section, the 5th arc waveguide segment, the 6th arc waveguide segment and the second straight wave guide section；
The first arc waveguide segment and the 4th arc waveguide segment are connect with the incoming wave guide arm respectively, and form Y type bifurcated
Structure, the first straight wave guide section and the second straight wave guide section are parallel with the incoming wave guide arm respectively, first output
Waveguide arm and the second output wave guide arm are symmetric using the center line of the incoming wave guide arm as symmetry axis；
The first arc waveguide segment and the 4th arc waveguide segment respectively include the subarc waveguide segment of the first quantity, the third arc
Waveguide segment and the 6th arc waveguide segment respectively include the subarc waveguide segment of the second quantity, the center line pair of each subarc waveguide segment
The radius for the circular arc answered is the first radius, the corresponding circular arc of center line and the 5th arc waveguide segment of the second arc waveguide segment
The radius of the corresponding circular arc of center line be the second radius.
2. chip of light waveguide according to claim 1, which is characterized in that the first arc waveguide segment include described first
The center of circle of the corresponding circular arc of center line of the subarc waveguide segment of quantity is overlapped, the third arc waveguide segment include described the
The center of circle of the corresponding circular arc of center line of the subarc waveguide segment of two quantity is overlapped, and the 4th arc waveguide segment includes described
The center of circle of the corresponding circular arc of subarc waveguide segment of first quantity is overlapped, second number that the 6th arc waveguide segment includes
The center of circle of the corresponding circular arc of subarc waveguide segment of amount is overlapped.
3. chip of light waveguide according to claim 1, which is characterized in that the center line of the first arc waveguide segment is first
Straight line parallel where the tangent line of center and the center line of the incoming wave guide arm, the center line of the first arc waveguide segment
Tangent line with the center line of the second arc waveguide segment in the second center is overlapped, the center line of the second arc waveguide segment and
The center line of the third arc waveguide segment is overlapped in the tangent line of third center, and the center line of the third arc waveguide segment is the
Straight line parallel where the tangent line of four centers and the incoming wave guide arm；
The center line of the 4th arc waveguide segment is flat in the straight line where the tangent line of the 5th center and the incoming wave guide arm
Tangent line weight of the center line of row, the center line of the 4th arc waveguide segment and the 5th arc waveguide segment in the 6th center
It closes, the tangent line weight of the center line of the center line of the 5th arc waveguide segment and the 6th arc waveguide segment in the 7th center
It closes, the center line of the 6th arc waveguide segment is flat in the straight line where the tangent line of the 8th center and the incoming wave guide arm
Row；
The first nodal point, second central point, the third central point, the 4th central point, the 5th center
Point, the 6th central point, the 7th central point and the 8th central point respectively correspond as the incoming wave guide arm and institute
State between the first arc waveguide segment, between the first arc waveguide segment and the second arc waveguide segment, the second arc waveguide segment with
Between the third arc waveguide segment, between the third arc waveguide segment between the first straight wave guide section, the input waveguide
Between arm and the 4th arc waveguide segment, between the 4th arc waveguide segment and the 5th arc waveguide segment, the 5th arc wave
Lead the knot between section and the 6th arc waveguide segment and between the 6th arc waveguide segment between the second straight wave guide section
The central point in conjunction face.
4. chip of light waveguide according to claim 1, which is characterized in that the incoming wave guide arm includes sequentially connected
Three straight wave guide sections, cone waveguide segment, the 4th straight wave guide section, broadening waveguide segment and the 5th straight wave guide section, the 5th straight wave guide section point
It is not connect with the first output wave guide arm and the second output wave guide arm；
The width of the third straight wave guide section is the first width, and the width of the 4th straight wave guide section is the second width, described the
The width of five straight wave guide sections is third width, and first width is greater than second width, and second width is less than described
Third width；
The width of the end face of one end that the cone waveguide segment is connected with the third straight wave guide section is first width, described
The width of the end face of one end that cone waveguide segment is connected with the 4th straight wave guide section is second width, the broadening waveguide
The width of the end face of one end that section is connected with the 4th straight wave guide section is second width, the broadening waveguide segment and institute
The width for stating the end face of one end that the 5th straight wave guide section is connected is the third width.
5. chip of light waveguide according to claim 1, which is characterized in that it is described cone waveguide segment length range be 300~
500 μm, the length range of the 4th straight wave guide section is 100~150 μm, the length range of the broadening waveguide segment be 200~
400 μm, the length range of the 5th straight wave guide section is 100~200 μm.
6. chip of light waveguide according to claim 1, which is characterized in that the corresponding circle of center line of each subarc waveguide segment
The central angle of arc, the second arc waveguide segment center line correspond to the central angle of circular arc and the center of the 5th arc waveguide segment
The central angle of the corresponding circular arc of line is default radian value, and the value range of the default radian value is 0.3 °~0.8 °.
7. chip of light waveguide according to claim 6, which is characterized in that the value range of first quantity is 4~6,
The value range of second quantity is 4~6.
8. chip of light waveguide according to claim 7, which is characterized in that the incoming wave guide arm is defeated with described first respectively
There is between waveguide arm and the faying face of the second output wave guide arm the first spacing out；The center line of the first straight wave guide section
There is the second spacing between the center line of the second straight wave guide section.
9. chip of light waveguide according to claim 8, which is characterized in that first spacing, second spacing, it is described
Default radian value, first quantity, second quantity meet such as ShiShimonoseki between first radius and second radius
It is formula:
Wherein, GAP is the first spacing, and L is the second spacing, and θ is default radian value, and m is the first quantity, and n is the second quantity, R1For
First radius, R2For the second radius.
10. a kind of array optical waveguide chip, which is characterized in that the array optical waveguide chip is by multiple as claim 1-9 appoints
Chip of light waveguide described in one is cascaded and is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810636680.4A CN108957627B (en) | 2018-06-20 | 2018-06-20 | A kind of chip of light waveguide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810636680.4A CN108957627B (en) | 2018-06-20 | 2018-06-20 | A kind of chip of light waveguide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108957627A true CN108957627A (en) | 2018-12-07 |
| CN108957627B CN108957627B (en) | 2019-09-03 |
Family
ID=64489639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810636680.4A Active CN108957627B (en) | 2018-06-20 | 2018-06-20 | A kind of chip of light waveguide |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108957627B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110598327A (en) * | 2019-09-16 | 2019-12-20 | 中兴光电子技术有限公司 | Waveguide drawing method, system, storage medium and terminal |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030016914A1 (en) * | 2001-07-23 | 2003-01-23 | Heu-Gon Kim | Y-branched optical waveguide and multi-stage optical power splitter using the same |
| KR20040042228A (en) * | 2002-11-13 | 2004-05-20 | 삼성전자주식회사 | Y-branch waveguide using offset |
| CN201000498Y (en) * | 2007-02-08 | 2008-01-02 | 东南大学 | T-tree shaped structure optical power shunt |
| US20090185774A1 (en) * | 2008-01-17 | 2009-07-23 | The Furukawa Electric Co., Ltd. | Optical integrated device and method of manufacturing the same |
| CN202512264U (en) * | 2012-03-31 | 2012-10-31 | 上海光芯集成光学股份有限公司 | Optical waveguide structure in glass base integrated optical device |
| CN102928920A (en) * | 2012-11-12 | 2013-02-13 | 中国计量学院 | Double-right-angle corner waveguide-shaped terahertz wave polarization beam splitter |
| CN102928998A (en) * | 2012-11-12 | 2013-02-13 | 中国计量学院 | Square spiral-type terahertz wave switch |
| CN206178309U (en) * | 2016-11-25 | 2017-05-17 | 北京森馥科技股份有限公司 | Light modulator and light modulating system |
| CN106873074A (en) * | 2017-04-25 | 2017-06-20 | 吉林大学 | A kind of interval adjustable asymmetric M Z optical waveguide sensors based on photobleaching and preparation method thereof |
-
2018
- 2018-06-20 CN CN201810636680.4A patent/CN108957627B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030016914A1 (en) * | 2001-07-23 | 2003-01-23 | Heu-Gon Kim | Y-branched optical waveguide and multi-stage optical power splitter using the same |
| KR20040042228A (en) * | 2002-11-13 | 2004-05-20 | 삼성전자주식회사 | Y-branch waveguide using offset |
| CN201000498Y (en) * | 2007-02-08 | 2008-01-02 | 东南大学 | T-tree shaped structure optical power shunt |
| US20090185774A1 (en) * | 2008-01-17 | 2009-07-23 | The Furukawa Electric Co., Ltd. | Optical integrated device and method of manufacturing the same |
| CN202512264U (en) * | 2012-03-31 | 2012-10-31 | 上海光芯集成光学股份有限公司 | Optical waveguide structure in glass base integrated optical device |
| CN102928920A (en) * | 2012-11-12 | 2013-02-13 | 中国计量学院 | Double-right-angle corner waveguide-shaped terahertz wave polarization beam splitter |
| CN102928998A (en) * | 2012-11-12 | 2013-02-13 | 中国计量学院 | Square spiral-type terahertz wave switch |
| CN206178309U (en) * | 2016-11-25 | 2017-05-17 | 北京森馥科技股份有限公司 | Light modulator and light modulating system |
| CN106873074A (en) * | 2017-04-25 | 2017-06-20 | 吉林大学 | A kind of interval adjustable asymmetric M Z optical waveguide sensors based on photobleaching and preparation method thereof |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110598327A (en) * | 2019-09-16 | 2019-12-20 | 中兴光电子技术有限公司 | Waveguide drawing method, system, storage medium and terminal |
| CN110598327B (en) * | 2019-09-16 | 2023-06-02 | 中兴光电子技术有限公司 | Waveguide drawing method, system, storage medium and terminal |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108957627B (en) | 2019-09-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB2059093A (en) | Optical directional couplers | |
| CN107329209B (en) | M × N multicast photoswitch | |
| JPH03138606A (en) | Light branching device | |
| US3917383A (en) | Optical waveguide bundle connector | |
| EP2162771A2 (en) | Hole arranged photonic crystal fiber for low loss, tight fiber bending applications | |
| CN204925448U (en) | 2 2 polarization maintaining fiber beam splitter | |
| CN2869895Y (en) | Double-Y-type integrated optical wave-guide chip | |
| CN110208907A (en) | Orbital angular momentum photon lantern production method and device | |
| JP2012530936A (en) | Optical interconnection for high-speed data rate transmission systems. | |
| CN102213790B (en) | Be convenient to panda type polarization-preserving fiber and the manufacture method thereof of coiling | |
| CN103339540A (en) | Waveguide-type polarization beam splitter | |
| CN108957627B (en) | A kind of chip of light waveguide | |
| CN110568548A (en) | multi-core optical fiber with controllable multi-layer fiber core | |
| US5343545A (en) | Interconnectable multi-terminal star coupler | |
| CN113687473B (en) | Six-mode division multiplexer based on multi-core optical fiber | |
| CN103837934B (en) | A kind of optical fiber circulator | |
| US20230305233A1 (en) | Apparatus for Guiding Light from an Input Side to an Output Side | |
| CN202221483U (en) | Four-fiber optical fiber collimator | |
| CN211454022U (en) | PPLN waveguide coupling structure based on gyro optical fiber | |
| CN111025474B (en) | Silicon waveguide mode coupler covering SU-8 cladding based on refractive index regulation | |
| Abe et al. | 84-fiber MPO connector employing solid refractive index matching material formed on perpendicular polished MT ferrule end | |
| CN208367258U (en) | A kind of low crosstalk big mode field area multi-core optical fiber | |
| CN107436462A (en) | The energy conversion device that a kind of selectable modes being used in mode multiplexing excite | |
| CN113031148A (en) | Photonic crystal fiber based on photon lead and preparation method thereof | |
| CN102866455B (en) | Large mode field optical fiber transmission system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211126 Address after: Room 1701, floor 17, building 6, smart Valley Park, Taihu Software Industrial Park, No. 1421, Wuzhong Avenue, Yuexi street, Wuzhong District, Suzhou, Jiangsu 215000 Patentee after: Suzhou yiboda Optoelectronic Technology Co.,Ltd. Address before: Yuelu District City, Hunan province 410083 Changsha Lushan Road No. 932 Patentee before: CENTRAL SOUTH University |
|
| TR01 | Transfer of patent right | ||
| CP01 | Change in the name or title of a patent holder |
Address after: Room 1701, floor 17, building 6, smart Valley Park, Taihu Software Industrial Park, No. 1421, Wuzhong Avenue, Yuexi street, Wuzhong District, Suzhou, Jiangsu 215000 Patentee after: Suzhou Eboda Microsystem Technology Co.,Ltd. Address before: Room 1701, floor 17, building 6, smart Valley Park, Taihu Software Industrial Park, No. 1421, Wuzhong Avenue, Yuexi street, Wuzhong District, Suzhou, Jiangsu 215000 Patentee before: Suzhou yiboda Optoelectronic Technology Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |