CN108942655A - Static pressure slide guiding device and the lathe for having static pressure slide guiding device - Google Patents
Static pressure slide guiding device and the lathe for having static pressure slide guiding device Download PDFInfo
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- CN108942655A CN108942655A CN201810448059.5A CN201810448059A CN108942655A CN 108942655 A CN108942655 A CN 108942655A CN 201810448059 A CN201810448059 A CN 201810448059A CN 108942655 A CN108942655 A CN 108942655A
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- guide surface
- fluid
- pressure
- gap
- static pressure
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Machine Tool Units (AREA)
Abstract
The present invention provides static pressure slide guiding device and has the lathe of static pressure slide guiding device.Static pressure slide guiding device (40) has: fixed body (19), has the first vertical guide surface (16a) and the second vertical guide surface (17a)；Mobile (14) has the first vertical sliding surface (14a1) and the second vertical sliding surface (14a2)；Fluid supply apparatus (33)；Regulator (38)；Hydrostatic support portion (34), fluid is supplied by fluid supply apparatus, by the corresponding Fluid pressure (P1) of the size in the first gap (L1) being applied between the first vertical guide surface and the first vertical sliding surface, support stiffness (G) corresponding with the size in the first gap is formed relative to mobile；And active force generating unit (35) exerts a force to mobile to the direction of the first vertical guide surface by being supplied to the fluid by regulator pressure regulation for regulation Fluid pressure (P2a).Regulator does pressure regulation to the size of regulation Fluid pressure, and the size in the first gap is made to reach setting value.
Description
Technical field
The present invention relates to static pressure slide guiding device and has the lathe of static pressure slide guiding device.
Background technique
In the past, such as there is following static pressure slide guiding device, two components being made of mobile and fixed body are tieed up
Friction when reducing by two components relative movements for contactless state is held, and improves mobile to the support stiffness of fixed body,
Realize stable relative movement.For example, with reference to Japanese Unexamined Patent Publication 2013-221572 bulletin, the real public clear 57-57884 public affairs of Japan
Report, Japanese Unexamined Patent Publication 2014-108503 bulletin, Japanese Unexamined Patent Publication 2006-231483 bulletin.Specifically, static pressure sliding guidance
Device two components of relative movement one of opposed faces, such as in each pair horizontal and vertical sliding surface of mobile
Each sliding surface concave pocket slot (Pocket) is set.
Moreover, to fluids such as air, the oil of pocket slot supply authorized pressure, to the horizontal guide surface and vertical guidance of fixed body
Ejecting fluid between opposed horizontal sliding surface and vertical sliding face is distinguished with same each guide surface of mobile in face, between formation
Gap.Two components are set as contactless state as a result, reduce the friction between two components, improve sliding property, and ensure activity
Support stiffness of the body to fixed body.
In addition, at this point, being formed by the size in gap, the Fluid pressure supplied to pocket slot and existing between support stiffness
Correlativity.Therefore, in order to ensure desired support stiffness, it is especially desirable to vertical (vertical) guide surface and vertical (vertical) sliding
The relationship between gap and Fluid pressure between face is managed.In view of this, Japanese Unexamined Patent Publication 2013-221572 bulletin,
Japanese real public clear 57-57884 bulletin, Japanese Unexamined Patent Publication 2014-108503 bulletin, Japanese Unexamined Patent Publication 2006-231483 bulletin
In, each pocket slot in pocket slot to about on being set to a pair of vertical (vertical) sliding surface, from fluid supply apparatus (oil pump
Deng) fluid for providing Fluid pressure is supplied via defined feed path, to seek to ensure desired support stiffness.
However, in the feed path of Japanese Unexamined Patent Publication 2013-221572 bulletin, all to a pocket slot and another pocket slot
By the fluid via fixed restrictive valve supply fixation pressure.Therefore, if quasi- ensure desired support stiffness, stream can not be utilized
Body pressure is adjusted, it is therefore desirable to which the size in each gap of strict control is coped with.Thus, it is desirable in processing, it is high-precision
Degree ground carries out the size between the pair of sliding face of size and mobile between a pair of of guide surface of fixed body
Management.In addition, when mobile is assembled to fixed body excellently, it is also desirable to which precision is assembled, therefore assembles working hour increase.
There is the anxiety of cost raising as a result,.
In addition, in the feed path of Japanese real public clear 57-57884 bulletin, via fixed restrictive valve to a pocket slot
The fluid for supplying fixation pressure directly feeds the fluid of fixation pressure (discharge pressure) from oil pump to another pocket slot.In addition, in day
In the feed path of this special open 2014-108503 bulletin, via Fluid pressure accordingly changed according to the size in gap can
Flow regulating valve supplies fluid to a pocket slot, and the fluid of fixation pressure (discharge pressure) is directly fed from oil pump to another pocket slot.
In addition, in the feed path of Japanese Unexamined Patent Publication 2006-231483 bulletin, via by adjusting the desired pressure regulation value of acquisition
Adjustment type throttle valve supplies fluid to a pocket slot, and the fluid of fixation pressure is directly fed from oil pump to another pocket slot.
In this way, in Japanese real public clear 57-57884 bulletin, Japanese Unexamined Patent Publication 2014-108503 bulletin, Japanese Unexamined Patent Publication
In 2006-231483 bulletin, the fluid of fixation pressure is directly fed from oil pump to another pocket slot.Therefore, such as Japanese Unexamined Patent Publication
Shown in 2013-221572 bulletin, even if not tight to the size between a pair of of guide surface and the size between each sliding surface
Lattice management also can apply sufficiently large Fluid pressure to the gap of at least one pocket slot side.Thereby, it is possible at least one pocket slot
Side obtains corresponding support stiffness.However, at this point, the management to the gap between guide surface and sliding surface can not be implemented.Cause
This, also can not be optimal value by the support stiffness management with gap with high correlation.Therefore, it is desirable that by support stiffness
It is identical as Japanese Unexamined Patent Publication 2013-221572 bulletin in the case where being set as optimum value, it needs between a pair of of guide surface
Size and each sliding surface between size carry out strict control.
Summary of the invention
It is an object of the present invention to provide can hold machining accuracy and assembly precision not being set as high-precision
Changing places ensures mobile to the static pressure slide guiding device of the low cost of the support stiffness of fixed body and has static pressure sliding and draw
Lead the lathe of device.
Static pressure slide guiding device as one embodiment of the present invention has:
Fixed body has the method for the first vertical guide surface and normal direction and the described first vertical guide surface as datum level
Line direction is the second vertical guide surface of opposite direction；
Mobile, with the first vertical sliding surface opposed with the described first vertical guide surface and with the described second vertical guide surface
The vertical sliding surface of opposed second；
Fluid supply apparatus；
The Fluid pressure pressure regulation of the fluid supplied by the fluid supply apparatus can be desired by regulator
Provide Fluid pressure；
Hydrostatic support portion is set to the described first vertical guide surface or the first vertical sliding surface, is supplied by the fluid
Unit feeding fluid is given, the size in the first gap between the described first vertical guide surface and the first vertical sliding surface is applied
Corresponding Fluid pressure, and support stiffness corresponding with the size in first gap is formed relative to the mobile；
And
Active force generating unit is set to the described second vertical guide surface or the second vertical sliding surface, by being supplied to
It is the fluid of the regulation Fluid pressure by the regulator pressure regulation, and to the mobile to the described first vertical guide surface
Direction force.
Moreover, the regulator carries out pressure regulation to the size of the regulation Fluid pressure, so that first gap
Size reaches setting value.
Using such structure, can in hydrostatic support portion, be readily available the first gap for improving support stiffness with
The assembled state of Fluid pressure.Therefore, adjustment device pair and the fluid pressure that support stiffness is improved in hydrostatic support portion are utilized
The mutually balanced regulation Fluid pressure of power is adjusted, and is supplied to active force generating unit.As a result, easily in hydrostatic support portion
The first gap (setting value) for improving support stiffness is obtained, hydrostatic support portion forms desired support stiffness to mobile.
In this case, without the size for the first gap of strict control and by fixed body, mobile each guide surface between and each cunning
Dimensional accuracy between dynamic face is set as high-precision, therefore machining period is reduced, and cost reduces.
Lathe as other way of the invention is that have above-mentioned side with the lathe for making the tool processed to working substance
The static pressure slide guiding device of formula.One of the working substance and tool are set to the mobile, the working substance and work
The other of tool is set to the fixed body.Same as described above as a result, obtaining having can readily insure that mobile to solid
Determine the lathe of the low cost of the static pressure slide guiding device of the low cost of the support stiffness of body.
Detailed description of the invention
According to the description of example embodiment, aforementioned and aftermentioned features and advantages of the invention will become referring to the drawings
It is clearer, wherein identical appended drawing reference is for indicating identical component.
Fig. 1 is the vertical view being illustrated to an embodiment of the grinding machine with static pressure slide guiding device of the invention
Figure.
Fig. 2 is the II-II cross-sectional view of Fig. 1.
Fig. 3 is the cross-sectional view being illustrated to the construction of adjustable throttling.
Fig. 4 is the chart for showing the relationship between the flow of adjustable throttling and first fluid pressure.
Fig. 5 be show the first gap of the static pressure slide guiding device in the case where feed path has adjustable throttling with
The chart of relationship between first fluid pressure.
Fig. 6 is the first fluid pressure for showing the static pressure slide guiding device in the case where feed path has adjustable throttling
The chart of relationship between power and support stiffness.
Fig. 7 be show the first gap of the static pressure slide guiding device in the case where feed path has adjustable throttling with
The chart of relationship between support stiffness.
Fig. 8 is the figure being illustrated to variation 1.
Specific embodiment
Hereinafter, utilizing Detailed description of the invention embodiments of the present invention.Fig. 1, which is shown, has used static pressure sliding guidance of the invention to fill
Set the embodiment of the grinding machine 1 of 40 (referring to fig. 2).Grinding machine 1 is grinding wheel stand traversing type grinding machine.Fig. 1 shows the top view of grinding machine 1
Example, Fig. 2 shows the II-II cross-sectional views in Fig. 1.In addition, record X-axis, Y-axis, Z axis whole attached drawings in, X-axis, Y-axis with
And Z axis is mutually orthogonal.Y-axis indicates that vertical is upward, and Z axis and X-axis indicate horizontal direction.Z axis indicates workpiece rotation axis direction, X
Axis direction indicates that grinding wheel 15 cuts the direction of workpiece W.
As shown in Figure 1, grinding machine 1 has: pedestal 11 is fixed on ground；And spindle box 12 and Finial device 13, it is main
Axle box 12 and Finial device 13 are fixed on pedestal 11, and support at both ends to workpiece W, and workpiece W can rotate.Also, it grinds
Bed 1 has: grinding wheel stand 14 can be moved along Z-direction and X-direction on the pedestal 11；Grinding wheel 15, with what can be rotated
Mode is supported on grinding wheel stand 14；Static pressure slide guiding device 40 (referring to fig. 2)；And control device 18, make 12 He of spindle box
Grinding wheel 15 drives, and the position to grinding wheel 15 relative to workpiece W controls.
Grinding machine 1 is ground the workpiece W rotated around workpiece rotation axis WZ using grinding wheel 15.Grinding wheel 15 is shaped generally as
Circular plate shape.Grinding wheel 15 is rotated around grinding wheel rotation axis TZ, is configured to relative to workpiece W along Z-direction and X-direction phase
To movement.In addition, workpiece rotation axis WZ and grinding wheel rotation axis TZ are parallel with Z axis.
As depicted in figs. 1 and 2, spindle box 12 has pedestal 12a, main shaft housing 12b and main shaft 12c.Pedestal 12a mounting
In on pedestal 11.Main shaft housing 12b is configured to move back and forth relative to pedestal 12a along Z-direction.Main shaft 12c is in main shaft
It is supported to rotate around workpiece rotation axis WZ in shell 12b.In addition, being provided with centre head in one end of main shaft 12c
(Center) component 12d.Main shaft 12c is provided with drive motor (not shown), control device 18 can make main shaft 12c around passing through
The workpiece rotation axis WZ on the top of top head part 12d rotates to any angle with arbitrary angular speed.
Finial device 13 has pedestal 13a, top set of shells 13b, center sleeve 13c and top head part 13d.Pedestal
13a is placed on pedestal 11.Top set of shells 13b is configured to move relative to pedestal 13a along Z-direction.Center sleeve 13c
It is supported to rotate or cannot revolve around workpiece rotation axis WZ around workpiece rotation axis WZ in top set of shells 13b
Turn, center sleeve 13c and main shaft 12c are set on same axis.Moreover, workpiece W is by having the spindle box 12 of top head part 12d
It is supported near both ends or both ends with the Finial device 13 for having top head part 13d.Also it is top to replace that chuck can be used
Head part.
In addition, loading traversing pedestal 19 on the pedestal 11.Traversing pedestal 19 is controlled as, according to by Z axis drive motor 21
The rotation angle of the ball-screw 22 of control, any position in Z-direction is positioned at along V-type guiding piece 23.Control device
18 on one side detect the signal of the position detection units such as encoder from illustration omitted, on one side to Z axis drive motor 21
Output control signal, implements the positioning of traversing pedestal 19 in the Z-axis direction.
The grinding wheel stand 14 that mounting makes grinding wheel 15 retreat on traversing pedestal 19.Grinding wheel stand 14 is according to by X-axis drive motor 25
The rotation angle of the ball-screw 30 of control, the guiding piece 16,17 being wholely set along the upper surface with traversing pedestal 19 are positioned at X
Any position in axis direction.Control device 18 drives while detecting to the signal from position detection unit to X-axis
The dynamic output of motor 25 control signal, positions the position of grinding wheel stand 14 in the X-axis direction.
In addition, being located in same horizontal plane for example, being set as grinding wheel rotation axis TZ and workpiece rotation axis WZ.In the shape
Under state, keep grinding wheel 15 relatively close relative to workpiece W, workpiece W and grinding wheel 15 are formd and lean on grinding wheel 15 at the position of contact
The point of side is set as processing stand.In this case, grinding machine 1 the cooling of supply cooling medium near processing stand is provided with to be situated between
Matter nozzle, but illustration omitted.In addition, implementing repairing for the finishing to grinding wheel 15 in the grinding machine 1 shown in the example of Fig. 1 and Fig. 2
Whole unit is installed on main shaft housing 12b, but illustration omitted.
As shown in Figure 1 and Figure 2, grinding wheel stand 14 is by sliding table 26, grinding wheel 15, grinding wheel bearing 27, grinding wheel drive motor 28
And X-axis drive motor 25 etc. is constituted.The rotary driving force of grinding wheel drive motor 28 is via driving pulley 29, band 31, driven belt
Wheel 32 is transmitted to grinding wheel 15.In addition, in the present embodiment, showing makes sand using X-axis drive motor 25 and ball-screw 30
The structure example that wheel seat 14 is retreated, but linear motor for example also can be used.The driving device for making grinding wheel stand 14 retreat is not special
It limits.Alternatively, it is also possible to being the structure not via band 31 and directly by drive motor driving grinding wheel 15.
As shown in Fig. 2, static pressure slide guiding device 40 has: traversing pedestal 19 (being equivalent to fixed body), 14 (phase of grinding wheel stand
When in mobile), hydraulic pump 33 (being equivalent to fluid supply apparatus), regulator 38, multiple adjustable throttlings 24, via respectively may be used
Static pressure pocket slot 34 (being equivalent to hydrostatic support portion) and static pressure pocket slot 36 that flow regulating valve 24 is connect with hydraulic pump 33 are filled via pressure regulation
Set the load load pocket slot 35 (being equivalent to active force generating unit) and pressure gauge 39 that 38 connect with hydraulic pump 33.In addition, traversing
Pedestal 19 and grinding wheel stand 14 and grinding machine 1 share.Moreover, fluid bearing is constituted by static pressure pocket slot 34,36, due to adjustable throttling 24
Variable throttle resistance characteristic make the support stiffness of fluid bearing larger.
Hydraulic pump 33 sucks the fluid such as oil from case 37, is discharged with supply pressure Ps from outlet 33a.Hydraulic pump 33 by
Control device 18 controls, that fluid can be discharged from outlet 33a with fixed supply pressure Ps always.Illustration omitted is set
Fluid recovery unit recycles the fluid of discharge in static pressure slide guiding device 40, is finally recycled to case 37.
As shown in Figure 1 and Figure 2, traversing pedestal 19 integrally has a pair for moving grinding wheel stand 14 along the x axis in upper surface
Guiding piece 16,17.That is, a pair of of guiding piece 16,17 is a part of traversing pedestal 19.A pair of of guiding piece 16,17 is in the Z-axis direction
It is arranged with being spaced apart distance in parallel, extends identical distance along the x axis respectively.
As shown in Fig. 2, guiding piece 16 has the first vertical guide surface 16a as datum level.First vertical guide surface 16a is formed
In in plane orthogonal to Z-axis.In addition, guiding piece 17 has the second vertical guide surface 17a, the second vertical guide surface 17a and first
Vertical guide surface 16a is parallel, and the normal direction of the second vertical guide surface 17a and the normal direction of the first vertical guide surface 16a are phase
Opposite direction.That is, in the present embodiment, the first vertical vertical guide surface 17a of guide surface 16a and second is opposed to configure.
On the orthogonal plane of the vertical guide surface 16a of the upper surface of guiding piece 16 i.e. first, first level guide surface is formed
16b.On the orthogonal plane of the vertical guide surface 17a of the upper surface of guiding piece 17 i.e. second, the second horizontal guide surface 17b is formed.The
The one horizontal horizontal guide surface 17b of guide surface 16b and second is equivalent to the horizontal guide surface of a pair of the invention.In present embodiment
In, the horizontal guide surface 17b of pairs of first level guide surface 16b and second is formed with identical height.But, it is not limited to
This, the horizontal guide surface 17b of first level guide surface 16b and second can also be formed with different height.
In addition, as shown in Fig. 2, the respective position of the horizontal guide surface 17b of first level guide surface 16b and second is opposite respectively
It is located at outside in the first vertical vertical guide surface 17a of guide surface 16a and second.That is, from the second vertical guide surface 17a, in Z-direction
On, first level guide surface 16b guide surface 16a more vertical than first is configured far from the second vertical guide surface 17a.In addition, vertical from first
Guide surface 16a observation, in the Z-axis direction, the second horizontal guide surface 17b guide surface 17a more vertical than second is far from the first vertical guide surface
Configure to 16a.
In the lower face side for the sliding table 26 that grinding wheel stand 14 has, the first vertical sliding surface 14a1 for being arranged to couple and
Second vertical sliding surface 14a2.When grinding wheel stand 14 is placed on traversing pedestal 19, the first pairs of vertical sliding surface 14a1 and second
The the first pairs of vertical guide surface 16a for a pair of of guiding piece 16,17 that vertical sliding surface 14a2 has with traversing pedestal 19 respectively and
Second vertical guide surface 17a is opposed.Hereinafter, will at this time be formed between the first vertical vertical sliding surface 14a1 of guide surface 16a and first
Gap is known as the first gap L 1.In addition, hereinafter, will be formed between the second vertical vertical sliding surface 14a2 of guide surface 17a and second
Gap is known as the second gap L 2.
In addition, in the horizontal sliding of first level sliding surface 14b1 and second that the lower surface of sliding table 26 is arranged to pair
Face 14b2 (is equivalent to horizontal sliding surface).Pairs of first level sliding surface 14b1 and the second horizontal sliding surface 14b2 draws with above-mentioned
The horizontal guide surface 17b of pairs of first level guide surface 16b and second that guiding element 16,17 has is opposed to configure.First
Horizontal sliding surface 14b1 and the second horizontal sliding surface 14b2, which is respectively set, is formed as concave each static pressure pocket slot 36.
Each static pressure pocket slot 36 is connect via adjustable throttling 24 with hydraulic pump 33 respectively.In the present embodiment, each adjustable
Throttle valve 24 is the adjustable throttling of the iris type shown as an example in Fig. 3.In addition, what is connect with static pressure pocket slot 36 is adjustable
Stream valve is not limited thereto, and is also possible to the adjustable throttling of side valve type, be can also be the adjustable throttling of other way.Separately
Outside, it may not be adjustable throttling but fixed restrictive valve.It in turn, can also be direct with hydraulic pump 33 without throttle valve
Connection.
As shown in figure 3, each adjustable throttling 24 has upper housing 41, lower case 42 and partition 43 respectively.It is each adjustable
Stream valve 24 make from inflow entrance 24a supply supply pressure Ps fluid via become flow path flow controller lower case 42 with every
The gap R (part annular in shape on the top of the outflux 24b of lower case 42) of annulus between plate 43, from outflux 24b
It is flowed out to each static pressure pocket slot 36.Fluid is directly fed from hydraulic pump 33 to inflow entrance 24a.In addition, inflow entrance 24a also with partition 43
Top space connection.Moreover, the sky of the lower section to the slave inflow entrance 24a functioned as fixed restrictive valve to partition 43
Between sectional area, the length of access etc. in this section of section of entrance be adjusted the flow of fixed restrictive valve (adjust).It generates as a result,
The top of partition 43 and the pressure difference of lower section.
Moreover, if supplying fluid, static pressure pocket slot 36 to each static pressure pocket slot 36 from hydraulic pump 33 via adjustable throttling 24
Interior each Fluid pressure P1 acts on each static pressure pocket slot 36 and first level guide surface 16b, the second horizontal guide surface 17b.By
This, each Fluid pressure P1 draws the first level sliding surface 14b1, the second horizontal sliding surface 14b2 and first level of grinding wheel stand 14
Guide face 16b, the second horizontal guide surface 17b are separated and are floated.
At this point, fluid is from each static pressure pocket slot 36 to first level sliding surface 14b1, the second horizontal sliding while separation
It is sprayed between face 14b2 and first level guide surface 16b, the second horizontal guide surface 17b, forms the fluid outflow layer of specific thickness,
That is gap.By these, first level guide surface 16b, the second horizontal guide surface 17b and first level sliding surface 14b1, second
Horizontal sliding surface 14b2 is on fluid in above-below direction (gravity direction) in not contact condition.In addition, adjustable throttling 24
Detailed working characteristics etc. will be described in more detail below.
As shown in Fig. 2, static pressure pocket slot 34 is set to, first opposed with the first vertical guide surface 16a of datum level is become is vertical to be slided
Dynamic face 14a1, is formed as concavity.Static pressure pocket slot 34 is identical as above-mentioned static pressure pocket slot 36, via adjustable throttling 24 and hydraulic pump 33
Connection.
For ease of description, firstly, aforementioned adjustable throttling 24 is described in detail.In the present embodiment, with static pressure pocket slot
The adjustable throttling 24 of 34 connections is the identical adjustable throttling of adjustable throttling 24 connecting with same static pressure pocket slot 36 shown in Fig. 3
Valve (iris type).In addition, being not limited thereto, adjustable throttling is also possible to the adjustable throttling of side valve type, can also be it
The adjustable throttling of its mode.Alternatively, it is also possible to not being adjustable throttling but fixed restrictive valve.Thus it can also obtain corresponding
Effect.
As described above, adjustable throttling 24 makes the fluid supplied from inflow entrance 24a via the section for becoming flow path shown in Fig. 3
Flow device the annulus between lower case 42 and partition 43 gap R (top of the outflux 24b of lower case 42 it is annular in shape
Part), from outflux 24b to static pressure pocket slot 34 flow out.At this point, if the first vertical vertical sliding surface 14a1 of guide surface 16a and first
Between gap i.e. the first gap L 1 become smaller (referring to fig. 2), then the fluid in static pressure pocket slot 34 can not be good from the first gap L 1
Ground flows out, and the pressure (first fluid pressure P1) in static pressure pocket slot 34 increases.
Therefore, it is filled in the pressure of the fluid of the outflux 24b and fluid-filled chamber 24c that are connected to in static pressure pocket slot 34
It increases.The pressure of the fluid increased above pushes away partition 43, increases the gap R of annulus, and increases the gap R's for passing through annulus
The flow (chart referring to fig. 4) of fluid.But as shown in the graph of fig. 4, if the pressure of the fluid in static pressure pocket slot 34 is excessive
It increases, then the top of partition 43 and the pressure difference of lower section become smaller, and flow is sharply reduced.
In addition, for example, if grinding wheel stand 14 is moved along Z-direction to the direction of the second vertical guide surface 17a from above-mentioned state,
First gap L 1 increases.The amount of the fluid flowed out as a result, from the first gap L 1 increases, and the pressure of the fluid in static pressure pocket slot 34 subtracts
It is small.
Fluid is supplied from hydraulic pump 33 via the adjustable throttling 24 with such discharge characteristic to static pressure pocket slot 34.
At this point, the first fluid pressure P1 in static pressure pocket slot 34 is changed because of the load that fluid bearing is supported, become the chart of Fig. 5
Relationship between first gap L 1 and first fluid pressure P1 shown in Gr1 is based on the relationship, to the pressure in static pressure pocket slot 34
It is adjusted.In addition, horizontal axis is the first gap L 1 (μm) in the chart Gr1 of Fig. 5, the longitudinal axis is first fluid pressure P1
(MPa).In addition, the flow of fluid bearing at this time becomes first fluid pressure P1 and stream in static pressure pocket slot 34 shown in Fig. 4
Relationship between the flow of body bearing.
Next, being illustrated to the relationship between first fluid pressure P1 and support stiffness G.The chart Gr2 of Fig. 6 is shown
To static pressure pocket slot 34 supply fluid feed path on have adjustable throttling 24 in the case where first fluid pressure P1 with
Relationship between support stiffness G.In addition, in Fig. 6, as a reference, record substituted adjustable throttling 24 and by fixed restriction
Valve be configured between hydraulic pump 33 and static pressure pocket slot 34 in the case where characteristic (chart Gr3).
It will be appreciated from fig. 6 that chart Gr2 can obtain bigger support stiffness G relative to chart Gr3.As a result, in this implementation
In mode, adjustable throttling 24 is used.In addition, if observation Fig. 6 it is found that in adjustable throttling 24, in first fluid pressure
In P1 small region I and first fluid pressure P1 big region III, biggish support stiffness G can not be obtained.Therefore, in this reality
It applies in mode, as an example, the support stiffness G1~G2 obtained in the intermediate region II of first fluid pressure P1 is set as institute
Desired support stiffness G.
That is, as shown in fig. 6, in order to obtain desired support stiffness G (G1~G2), and by first in static pressure pocket slot 34
Fluid pressure P1 is set as Fluid pressure P1a~P1b corresponding with desired support stiffness G (G1~G2).In addition, conduct
The value of the range of regulation setting of first fluid pressure P1 can also have amplitude unlike present embodiment, such as can be only
Defined point (pressure regulation point) in Fluid pressure P1a~P1b.Moreover, the Fluid pressure P1a in order to realize first fluid pressure P1
~P1b or pressure regulation point, and the adjustment section of the illustration omitted of regulator 38 is operated.In addition, related regulator 38
It will be described in more detail below.
At this point, if Fluid pressure P1a~P1b (first fluid pressure P1) set is used the chart Gr1 of Fig. 5 it is found that with stream
The width (gap L 1a~L1b) of corresponding first gap L 1 of body pressure P1a~P1b is very small.I.e., it is known that be difficult gap L 1a
~L1b is adjusted the position of grinding wheel stand 14 as management value.
In addition, as a reference, the first gap L 1 and bearing in the case where having used adjustable throttling 24 is shown in FIG. 7
Relationship (chart Gr4) between rigidity G.Chart Gr4 is observed it is found that by using adjustable throttling 24, can be obtained biggish
Support stiffness.But it will also realize that, the range of the first gap L 1 corresponding with desired support stiffness G1~G2 is very small.
However, being to make up to larger range by adjusting first fluid pressure P1 as described above in the present embodiment
Fluid pressure P1a~P1b, to realize gap L 1a~L1b (suitable with setting value), thus be easy implement.As previously mentioned, logical
Cross the adjustment section (illustration omitted) of the regulator 38 of explained later is operated, adjust obtain Fluid pressure P1a~
P1b。
In addition, P1a~P1b etc. is set as by the first fluid pressure P1 that will act as the pressure in static pressure pocket slot 34, by
This exerts a force (referring to fig. 2) to the direction of the second vertical guide surface 17a to grinding wheel stand 14 with the first directed force F 1.First directed force F 1 is
First fluid pressure P1 in static pressure pocket slot 34 acts on static pressure pocket slot 34 and the opposed with static pressure pocket slot 34 first vertical guide surface
16a and the power generated.For the first directed force F 1, it is set as by the area of the static pressure pocket slot 34 by first fluid pressure P1
In the case where S1 (illustration omitted), F1=P1 × S1.
In addition, in the above description, it is set as on the feed path between hydraulic pump 33 and static pressure pocket slot 34 that configuration can
Flow regulating valve 24, is illustrated.But, it is not limited to which.It was illustrating among the above, it can also be in hydraulic pump
On feed path between 33 and static pressure pocket slot 34, using fixed restrictive valve rather than adjustable throttling 24.In this case, as schemed
Shown in 6 chart Gr3, as long as with the Fluid pressure P1c corresponding with the maximum point G3 of support stiffness G of first fluid pressure P1
Centered on, front and back has regulation amplitude, adjusts first fluid pressure P1 by regulator 38, such as be allowed to fall into Fluid pressure
The range of P1d~P1e.Also identical as present embodiment as a result, the model of the big first fluid pressure P1 of amplitude can be utilized
It encloses i.e. Fluid pressure P1d~P1e and easily realizes the maximum region support stiffness G (support stiffness G3~G4).
Next, being illustrated to load load pocket slot 35.As shown in Fig. 2, (active force generates load load pocket slot 35
Portion) it is set to the second vertical sliding surface 14a2 opposed with the second vertical guide surface 17a, be formed as concavity.As previously mentioned, load load
Pocket slot 35 is connect via regulator 38 with hydraulic pump 33.Regulator 38 is the stream that can will be supplied to load load pocket slot 35
(second fluid pressure P2 (the illustration omitted)) pressure regulation of body pressure is the so-called of desired regulation Fluid pressure P2a (illustration omitted)
Pressure regulator.As long as the operation of pressure regulation is implemented while confirming the value of pressure gauge 39 shown in Fig. 2.
At this point, in the present embodiment, as previously mentioned, the regulation Fluid pressure P2a of load load pocket slot 35 is by static pressure
Pressure, that is, first fluid pressure P1 in pocket slot 34 is set as the Fluid pressure of Fluid pressure P1a~P1b.In addition, in other words, " rule
Determining Fluid pressure P2a " is to set the size of the first gap L 1 between the first vertical vertical sliding surface 14a1 of guide surface 16a and first
For the Fluid pressure of setting value (gap L 1a~L1b).
In addition, regulator 38 is also possible to any kind of pressure regulator.In regulator 38, as pressure regulator, as long as
It is the fluid pressure regulation for the supply pressure Ps that the primary side (suction side) from hydraulic pump 33 to regulator 38 can be supplied to be wished
The regulation Fluid pressure P2a (illustration omitted) of prestige, and the fluid after pressure regulation can be supplied to primary side (35 side of load load pocket slot)
It gives, so that it may be any regulator.
In addition, regulation Fluid pressure P2a is set as to make the fluid of preset regulation flow from regulator 38
Primary side flows to the Fluid pressure of obtained primary side when primary side.At this point, preset regulation flow is said reference
First gap L 1 of surface side becomes the stream corresponding with the second gap L 2 when preset gap L 1a~L1b (setting value)
Amount.
At this point, second fluid pressure P2 (regulation Fluid pressure P2a) is supplied to load load pocket slot 35, thus with second
Directed force F 2 exerts a force to grinding wheel stand 14 (mobile) to the direction of the first vertical guide surface 16a.Second directed force F 2 is supplied with to load
The second fluid pressure P2 (regulation Fluid pressure P2a) of bear lotus pocket slot 35 act on load load pocket slot 35 and with load load
The second opposed vertical guide surface 17a of pocket slot 35 and the power generated.
For the second directed force F 2, in the face for the load load pocket slot 35 that will be set as second fluid pressure P2 (P2a)
In the case that product is set as S2 (illustration omitted), F2=P2 (P2a) × S2.The area S1 and S2 of static pressure pocket slot 34 are preferably identical
Area (S1=S2), as long as but can be realized F1=F2, either S1 > S2, is also possible to S1 < S2.
In this way, the fluid pressure regulation for the supply pressure Ps that hydraulic pump 33 is discharged by regulator 38 is regulation Fluid pressure
P2a (second fluid pressure P2), and it is supplied to load load pocket slot 35.That is, regulator 38 is by second fluid pressure P2
Size pressure regulation be " regulation Fluid pressure P2a " so that the size of the first gap L 1 of benchmark surface side be, for example, gap L 1a~
L1b (setting value), the first directed force F 1 and the second directed force F 2 are in the horizontal direction and mutually balanced in the Z-axis direction." regulation
Size and with the size of first gap L 1 corresponding first fluid pressure P1 of the Fluid pressure P2a " based on the first gap L 1 it
Between relationship (referring to Fig. 5) setting.
Next, being illustrated to movement.In explanation, the setting value of the first gap L 1 of benchmark surface side is for example set as
Gap L 1a~L1b.In addition, being operated in advance to the adjustment section of the illustration omitted of regulator 38, implement to a certain extent
Adjustment, so that the first fluid pressure P1 in the static pressure pocket slot 34 of benchmark surface side reaches between Fluid pressure P1a~P1b and first
In the state that gap L1 reaches setting value (gap L 1a~L1b), the first directed force F 1 and the second directed force F 2 phase in the horizontal direction
It is mutually balanced.
In addition, premise when as assembling grinding machine 1, it is (living to be placed with grinding wheel stand 14 on traversing pedestal 19 (fixed body)
Kinetoplast) when, the first gap L 1 of benchmark surface side is the big gap L 1c of gap L 1a~L1b i.e. than setting value (referring to the chart of Fig. 5
In point P).In addition, at this point, the second gap L 2 is set as gap L 2c (illustration omitted).In addition, " the first gap L 1 "+" second
Gap L 2 " is always fixed value.As a result, size of the gap L 2c always based on gap L 1c and determine.Therefore, gap L 2c is than
Gap L 2a~L2b when the first gap L 1 is set as gap L 1a~L1b (setting value) of two gap Ls 2 is small.
If in such a state, starting grinding machine 1, start hydraulic pump 33, then fluid is by with supply pressure Ps discharge.It is arranged
Fluid out is supplied to static pressure pocket slot 34 and load load pocket slot 35.Fluid is via adjustable throttling 24 by benchmark surface side
Static pressure pocket slot 34 supplies.Moreover, the pressure (first fluid pressure P1) under the action of adjustable throttling 24, in static pressure pocket slot 34
Reach Fluid pressure P1c corresponding with the size of gap L 1c (gap > (L1a~L1b)) (referring to the point P in Fig. 5).By
This, Fluid pressure P1c exerts a force to grinding wheel stand 14 to the direction of the second vertical guide surface 17a with the first directed force F 1c (=P1c × S1)
(referring to fig. 2).At this point, S1 is the area of static pressure pocket slot 34.First directed force F 1c is setting value (gap L 1a than the first gap L 1
~L1b) in the case where active force i.e. the first directed force F 1 it is small.
In addition, at this point, gap L 2c is than the second gap L 2 when the first gap L 1 reaches setting value (gap L 1a~L1b)
Gap L 2a~L2b small (L2c < (L2a~L2b)).As a result, at this time from 38 pressure regulation of regulator and to load load pocket slot 35
The preset regulation flow of the flow-rate ratio of the fluid of supply is small.
Therefore, regulation Fluid pressure P2a (P2c > is greater than by the Fluid pressure P2c that regulator 38 implements pressure regulation
P2a).Therefore, the second directed force F 2c (=P2c × S2) is greater than the value of the first directed force F 1a, with active force (F2c-F1c)
The power of size exerts a force to grinding wheel stand 14 (mobile) to the direction of the first vertical guide surface 16a (datum level), is allowed to mobile.
As a result, as shown in the arrow Ar1 of Fig. 5, the gap L 1c (point P) of the first gap L 1 gently becomes smaller.Moreover, with can
Flow regulating valve 24 connect static pressure pocket slot 34 in Fluid pressure P1c slowly increase therewith, eventually fall into Fluid pressure P1a~
The range of P1b, and the first gap L 1 reaches setting value (gap L 1a~L1b).
At this point, gap L 2c expands with the diminution of the gap L 1c of the first gap L 1 in the second gap L 2.Second
Body pressure P2 reduces therewith and slowly, and the pressure in the static pressure pocket slot 34 of benchmark surface side has reached Fluid pressure P1a~P1b
When (setting value), second fluid pressure P2 becomes regulation Fluid pressure P2a.But at this point, in view of there are Fluid pressure P1a
Situation~P1b (setting value) not corresponding with regulation Fluid pressure P2a.When this, the illustration omitted of regulator 38 is operated
Pressure-regulating portion, make Fluid pressure P1a~P1b (setting value) with regulation Fluid pressure P2a it is corresponding.
As a result, as described above, being flowed by first directed force F 1 of Fluid pressure P1a~P1b (setting value) force with by regulation
Second directed force F 2 (=P2c × S2) of body pressure P2a force is mutually balanced in (Z-direction) in the horizontal direction, especially exists
Benchmark surface side obtains biggish support stiffness G (G1~G2).
In this way, can will implement the traversing pedestal 19 slightly assembled by starting grinding machine 1 and grinding wheel stand 14 is adjusted to wish
The support stiffness G of the guidance of benchmark surface side is set as preset size by the assembled state of prestige.
In addition, in the above-described embodiment, it is set as when starting grinding machine 1 in having preset tune to a certain extent
The state of the pressure regulation value of pressure device 38, is illustrated.But be not limited to which.It is also possible in starting grinding machine 1
When, pressure regulation is not carried out to the pressure regulation value of regulator 38 completely.In this case, as long as in starting static pressure slide guiding device
40, after fluid is supplied to static pressure pocket slot 34 and load load pocket slot 35, start the pressure regulation to regulator 38.Pressure regulation
How much can take time, but the effects identical with above embodiment such as machining accuracy improves and assembling working hour is reduced can be able to achieve the phase
Fruit.
In addition, in the above-described embodiment, the pairs of first level sliding surface 14b1 and possessed by the grinding wheel stand 14
Two horizontal sliding surface 14b2 (horizontal sliding surface) have each static pressure pocket slot 36.But it is also possible to cancel each static pressure pocket slot 36, and adopt
With making first level sliding surface 14b1, the second horizontal sliding surface 14b2 and first level guide surface 16b, the second horizontal guide surface
17b (horizontal guide surface) abuts the sliding-type guidance mode of ground sliding.Thus it can also obtain and the effect in above embodiment
Identical effect.
In addition, in the above-described embodiment, static pressure pocket slot 34 is set to the first vertical sliding surface 14a1, by load load pocket
Slot 35 is set to the second vertical sliding surface 14a2.But, it is not limited to which.Be also possible to static pressure pocket slot 34 be set to
The first first vertical sliding surface 14a1 opposed vertical guide surface 16a, load load pocket slot 35 are set to and the second vertical sliding surface 14a2
The vertical guide surface 17a of opposed second.Thus effect identical with above embodiment can also be obtained.
In addition, as shown in figure 8, can be set as the variation 1 for being directed to above embodiment by static pressure pocket slot
46, it 47 also supports the structure of guiding piece 16,17 from below.Thus it can also obtain identical with the effect in above embodiment
Effect.
Using above embodiment, in static pressure pocket slot 34, can be readily available between improve support stiffness G first
Assembled state between gap L1 and the Fluid pressure (first fluid pressure P1) of the fluid supplied to static pressure pocket slot 34.Therefore, by adjusting
Pressure device 38 is to mutual with the Fluid pressure (first fluid pressure P1a~P1b) that improves support stiffness G in static pressure pocket slot 34
Balanced regulation Fluid pressure P2a is adjusted, and it is supplied to load load pocket slot 35 (active force generating unit).As a result,
In static pressure pocket slot 34, it is easy to get the first gap L 1 (gap L 1a~L1b) for improving support stiffness G, 34 phase of static pressure pocket slot
Desired support stiffness G (G1~G2) is formed for grinding wheel stand 14.In this case, due to the first gap L of strict control 1
The size of (gap L 1a~L1b), because without will be between traversing pedestal 19 and each guide surface 16a, 17a of grinding wheel stand 14 and each
Dimensional accuracy between sliding surface 14a1,14a2 is set as high-precision, therefore machining period is reduced, and cost reduces.In addition, upper and lower
Gap in (Y-axis) is adjusted by the balance with gravity.But in left and right directions in (Z-direction), not by with
The balance of gravity can also suitably adjust the gap of static pressure pocket slot 34 Yu load load pocket slot 35, can keep support stiffness
It obtains greatly.
In addition, the fluid supplied to static pressure pocket slot 34 is supplied via adjustable throttling 24 using above embodiment, it should
Adjustable throttling 24 is set on from hydraulic pump 33 to the feed path of static pressure pocket slot 34, makes Fluid pressure according to the first gap L 1
Size change.In general, adjustable throttling 24 for fixed restrictive valve, has the spy that can obtain larger support stiffness
Property.Therefore, grinding wheel stand 14 can be obtained to the biggish support stiffness of traversing pedestal 19.
In addition, the setting value (gap L 1a~L1b) of the first gap L 1 is set as using above embodiment, can be based on
Relationship (referring to Fig. 5) between the size of first gap L 1 and Fluid pressure P1 corresponding with the size of the first gap L 1, is obtained
Obtain desired support stiffness G (G1~G2).Thereby, it is possible to reliably obtain desired support stiffness G (G1~G2).
In addition, traversing pedestal 19 is the first vertical vertical guide surface 17a's of guide surface 16a and second using above embodiment
There is a pair of horizontal guide surface 16b, 17b on each orthogonal plane.In addition, grinding wheel stand 14 have respectively with a pair of horizontal guide surface
16b, 17b opposed pairs horizontal sliding surface 14b1,14b2.Thereby, it is possible to obtain bearing of the grinding wheel stand 14 to traversing pedestal 19
Rigidity improves and to the movement of X-direction smoothly static pressure slide guiding device 40.
In addition, in the above-described embodiment, static pressure slide guiding device 40 is used for grinding machine.But is not limited thereto,
The lathe that static pressure slide guiding device 40 can also be used for other than grinding machine.For example, can be used for lathe, milling machine, drilling machine and
Machining center etc. will support the tool of these lathes or each mobile of working substance (one) via static pressure slide guiding device
40 are supported on the fixed body supported to tool or working substance (another one).
Claims (5)
1. a kind of static pressure slide guiding device, has:
Fixed body has the normal side of the first vertical guide surface and normal direction and the described first vertical guide surface as datum level
To the second vertical guide surface for opposite direction；
Mobile, with the first vertical sliding surface opposed with the described first vertical guide surface and opposed with the described second vertical guide surface
The second vertical sliding surface；
Fluid supply apparatus；
The Fluid pressure pressure regulation of the fluid supplied by the fluid supply apparatus can be desired regulation by regulator
Fluid pressure；
Hydrostatic support portion is set to the described first vertical guide surface or the first vertical sliding surface, is supplied and fills by the fluid
Supply fluid is set, the size in the first gap being applied between the described first vertical guide surface and the first vertical sliding surface is opposite
The Fluid pressure answered, and support stiffness corresponding with the size in first gap is formed relative to the mobile；And
Active force generating unit is set to the described second vertical guide surface or the second vertical sliding surface, by being supplied to by institute
The fluid that regulator pressure regulation is the regulation Fluid pressure is stated, and to the mobile to the direction of the described first vertical guide surface
Force, wherein
The regulator carries out pressure regulation to the size of the regulation Fluid pressure, sets so that the size in first gap reaches
Definite value.
2. static pressure slide guiding device according to claim 1, wherein
The fluid supplied to the hydrostatic support portion is supplied via adjustable throttling, and the adjustable throttling is set to from institute
It states on fluid supply apparatus to the feed path in the hydrostatic support portion, makes the Fluid pressure according to the big of first gap
Small formation changes.
3. static pressure slide guiding device according to claim 1 or 2, wherein
Size of the setting value in first gap based on first gap and opposite with the size in first gap
Relationship setting between the Fluid pressure answered, to obtain the desired support stiffness.
4. according to claim 1 or static pressure slide guiding device described in 2, wherein
The fixed body has a pair of horizontal in the described first vertical guide surface and the second vertical guide surface respectively orthogonal plane
Guide surface,
The mobile have respectively with the pair of horizontal guide surface opposed pairs horizontal sliding surface.
5. a kind of lathe has the tool processed to working substance, including static pressure described in claims 1 or 2 sliding is drawn
Lead device, wherein
One of the working substance and tool are set to the mobile,
The other of the working substance and tool are set to the fixed body.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017099770A JP7062885B2 (en) | 2017-05-19 | 2017-05-19 | Machine tool equipped with static pressure slide guide device and static pressure slide guide device |
| JP2017-099770 | 2017-05-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108942655A true CN108942655A (en) | 2018-12-07 |
| CN108942655B CN108942655B (en) | 2021-10-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810448059.5A Active CN108942655B (en) | 2017-05-19 | 2018-05-11 | Static pressure slide guide device and machine tool provided with same |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7062885B2 (en) |
| CN (1) | CN108942655B (en) |
| DE (1) | DE102018111597A1 (en) |
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|---|---|---|---|---|
| KR102178760B1 (en) * | 2018-12-18 | 2020-11-13 | 주식회사 포스코 | Roll grinder |
| JP7276048B2 (en) * | 2019-09-26 | 2023-05-18 | 株式会社ジェイテクト | Cylindrical grinder |
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|---|---|---|---|---|
| CN1884861A (en) * | 2006-07-10 | 2006-12-27 | 潘旭华 | Static pressure guide rail employing multi-head constant displacement pump |
| CN101275605A (en) * | 2008-05-09 | 2008-10-01 | 潘旭华 | Film thickness adjustable static pressure bearing and regulating method thereof |
| CN101280804A (en) * | 2008-05-09 | 2008-10-08 | 潘旭华 | Static pressure guiding rail with adjustable film thickness and regulating method thereof |
| CN103846751A (en) * | 2012-12-04 | 2014-06-11 | 株式会社捷太格特 | Hydrostatic guide device and machine tool using the hydrostatic guide device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5757884Y2 (en) | 1978-08-22 | 1982-12-11 | ||
| JPS5757884A (en) | 1980-09-25 | 1982-04-07 | Nippon Mining Co Ltd | Production of black or blue rhodium plated articles and plating bath for this |
| JP2868126B2 (en) * | 1989-07-28 | 1999-03-10 | オ−クマ株式会社 | Straightness correction mechanism for static pressure guide |
| JP3290087B2 (en) * | 1997-01-30 | 2002-06-10 | キヤノン株式会社 | Positioning device using hydrostatic bearing |
| JP2006231483A (en) | 2005-02-25 | 2006-09-07 | Mitsubishi Heavy Ind Ltd | Static pressure guiding device and machining center with static pressure guiding device |
| JP4769011B2 (en) * | 2005-04-18 | 2011-09-07 | コマツＮｔｃ株式会社 | Aerostatic balancer for machine tools |
| JP4047889B2 (en) * | 2006-01-04 | 2008-02-13 | ファナック株式会社 | Method for assembling linear drive device with air bearing |
| JP2013221572A (en) | 2012-04-17 | 2013-10-28 | Jtekt Corp | Hydrostatic bearing |
-
2017
- 2017-05-19 JP JP2017099770A patent/JP7062885B2/en active Active
-
2018
- 2018-05-11 CN CN201810448059.5A patent/CN108942655B/en active Active
- 2018-05-15 DE DE102018111597.0A patent/DE102018111597A1/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1884861A (en) * | 2006-07-10 | 2006-12-27 | 潘旭华 | Static pressure guide rail employing multi-head constant displacement pump |
| CN101275605A (en) * | 2008-05-09 | 2008-10-01 | 潘旭华 | Film thickness adjustable static pressure bearing and regulating method thereof |
| CN101280804A (en) * | 2008-05-09 | 2008-10-08 | 潘旭华 | Static pressure guiding rail with adjustable film thickness and regulating method thereof |
| CN103846751A (en) * | 2012-12-04 | 2014-06-11 | 株式会社捷太格特 | Hydrostatic guide device and machine tool using the hydrostatic guide device |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102018111597A1 (en) | 2018-11-22 |
| CN108942655B (en) | 2021-10-19 |
| JP7062885B2 (en) | 2022-05-09 |
| JP2018194123A (en) | 2018-12-06 |
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