CN108923235A - A kind of intracavity unsteady cavity of optical coupled mirror and its composition - Google Patents
A kind of intracavity unsteady cavity of optical coupled mirror and its composition Download PDFInfo
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- CN108923235A CN108923235A CN201810663084.5A CN201810663084A CN108923235A CN 108923235 A CN108923235 A CN 108923235A CN 201810663084 A CN201810663084 A CN 201810663084A CN 108923235 A CN108923235 A CN 108923235A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/08059—Constructional details of the reflector, e.g. shape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/0813—Configuration of resonator
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/0818—Unstable resonators
Abstract
It include curved cylinder and light-transmissive substrate the invention discloses a kind of optical coupled mirror and its intracavity unsteady cavity of composition, optical coupled mirror；One end of curved cylinder is the concave spherical surface or convex spherical for being coated with total reflection film, and the other end of curved cylinder is inclined-plane；The two sides of light-transmissive substrate are parallel plane；The one end on light-transmissive substrate and curved cylinder inclined-plane is glued.Intracavity unsteady cavity of the invention, laser discharge chamber one end is arranged concave mirror and installs window, the other end of laser discharge chamber is provided with optical coupled mirror installation window, concave mirror and optical coupled mirror are located at concave mirror installation window and optical coupled mirror installation window, and overall structure is fixedly connected to form with laser discharge chamber, the stability of resonant cavity and the compactedness of overall laser structure are improved, existing unsteady cavity is solved and adjusts the technical issues of inconvenient, structure is not compact, laser output energy susceptible.
Description
Technical field
The present invention relates to laser technology fields, and in particular to a kind of optical coupled mirror and its structure for superpower laser
At intracavity unsteady cavity.
Background technique
With the development of laser technology, laser use scope is also more and more extensive, and the requirement to laser beam quality is also got over
Come higher, the structure of laser resonator plays key effect to laser beam quality is improved.Common laser resonant cavity can be with
It is divided into stable cavity, metastable resonators and unsteady cavity three classes, for superpower laser, in order to increase model volume and improve beam quality,
Usually use unsteady cavity.
Existing unsteady cavity generallys use three mirror structures and two mirror structures.
Typical two mirrors structure is as shown in Figure 1, unsteady cavity includes laser discharge chamber 203, primary mirror 201 and secondary mirror 204.
It is sharp that 203 both ends of laser discharge chamber have window mirror 202, primary mirror 201 and secondary mirror 204 to be set to by respective support member
The outside of light device electric discharge chamber 203, primary mirror 201 are used as reflecting mirror, and secondary mirror 204 makes as reflecting mirror and output coupling mirror
With laser beam is exported from secondary mirror edge.
The unsteady cavity of structure shown in Fig. 1 has the following problems：
1, primary mirror 201 and secondary mirror 204 are respectively positioned on the outside of laser discharge chamber 203, and structural stability is bad, are carrying
In the case where movement, need to readjust the position of primary mirror and secondary mirror.
2, secondary mirror 204 is supported using bracket, and the bracket in figure is " people " font bracket, and bracket can generate diffraction, and to defeated
Laser generation out is blocked, and is reduced laser and is exported energy.
Typical three mirrors structure as shown in Fig. 2, unsteady cavity include laser discharge chamber 303, primary mirror 301, secondary mirror 305 with
And output coupling mirror 304.There are window mirror 302, primary mirror 301, secondary mirror 305 and output coupling in 303 both ends of laser discharge chamber
Mirror 304 is set to the outside of laser discharge chamber 303, primary mirror 301 and secondary mirror 305 by respective support member as reflection
Mirror uses, and output coupling mirror 304 is for exporting laser reflection.
The unsteady cavity of structure shown in Fig. 2 has the following problems：
1, primary mirror 301, secondary mirror 305 and output coupling mirror 304 are respectively positioned on the outside of laser discharge chamber 303, and structure is steady
It is qualitative bad, in the case where carrying mobile, need to readjust the position of primary mirror and secondary mirror and output coupling mirror.
2, since mirror is more, regulating step is more complex, and disturbing factor increases, and interference free performance reduces.
Summary of the invention
In order to solve, existing unsteady cavity adjusting is inconvenient, structure is not compact, the laser output susceptible technology of energy is asked
Topic, the present invention provide the intracavity unsteady cavity of a kind of optical coupled mirror and its composition.
Technical scheme is as follows：
A kind of optical coupled mirror, is characterized in that：Including curved cylinder 11 and light-transmissive substrate 12；
One end of the curved cylinder 11 is the convex spherical 111 for being coated with the concave spherical surface of total reflection film or being coated with total reflection film,
The other end of the curved cylinder 11 is inclined-plane 112；
The two sides of the light-transmissive substrate 12 are parallel plane；
One end of the light-transmissive substrate 12 and curved cylinder inclined-plane is glued.
Further, be enhancing light-transmissive substrate to the transmission capacity of light, the selection of substrate 12 to laser weak absorbing or
The material with good light permeability energy of no absorption, and two sides are coated with anti-reflection film.
Further, to be located at curved cylinder central axis 114 convenient for the center of production, installation and adjusting, the concave spherical surface
On, the center on the inclined-plane 112 is overlapped with the center of light-transmissive substrate 12.
The center of the convex spherical 111 is located on curved cylinder central axis 114, the center on the inclined-plane 112 and light transmission base
The center of piece 12 is overlapped.
Based on optical coupled mirror of the invention, the present invention also provides a kind of intracavity unsteady cavity that void is confocal, unsteady cavities
Including laser discharge chamber 3, primary mirror and optical coupled mirror 1, primary mirror is concave mirror 2, is characterized in that：
The optical coupled mirror 1 includes curved cylinder 11 and light-transmissive substrate 12；
One end of the curved cylinder 11 is the convex spherical 111 for being coated with total reflection film, the other end of the curved cylinder 11
For inclined-plane 112；
The two sides of the light-transmissive substrate 12 are parallel plane；
One end of the light-transmissive substrate 12 and 11 inclined-plane of curved cylinder is glued；
One end fixed setting concave mirror of the laser discharge chamber 3 installs window 8, and the concave mirror is installed window 8 and swashed
Light device electric discharge chamber 3 is fixedly connected, and the concave mirror 2 is fixed at concave mirror installation window 8；
Alternatively, one end coaxial arrangement window mirror installation window 9 and concave mirror of the laser discharge chamber 3 install window 8, institute
It states and window mirror 10 is set at window mirror installation window 9；The window mirror installation window 9 is fixedly connected with laser discharge chamber；It is described
For the setting of concave mirror 2 at concave mirror installation window 8, the axis and laser discharge chamber central axis 7 of the concave mirror 2 are coaxial；
The other end of the laser discharge chamber 3 is provided with optical coupled mirror installation window 4, the optical coupled mirror installation
Window 4 has installation inclined-plane, and the optical coupled mirror 1 is set at the installation inclined-plane of optical coupled mirror installation window 4, curved surface therein
Cylindrical mirror 11 is towards laser discharge chamber 3, and curved cylinder central axis 114 and laser discharge chamber central axis 7 are coaxial, curved surface column
The virtual focus of mirror 11 is overlapped with 2 real focus of concave mirror；Sealing structure, light transmission base are provided between light-transmissive substrate 12 and installation inclined-plane
Piece 12 is fixedly connected with optical coupled mirror installation window 4.
Further, material with good light permeability energy of the selection of substrate 12 to laser weak absorbing or without absorption
Material, such as glass substrate, and two sides are coated with anti-reflection film.
Further, the center on the inclined-plane 112 is overlapped with the center of light-transmissive substrate 12.
It is non-the present invention also provides a kind of intracavity unsteady cavity that reality is confocal meanwhile based on optical coupled mirror of the invention
Steady chamber includes laser discharge chamber 3, concave mirror 2 and optical coupled mirror 1, is characterized in that：
The optical coupled mirror 1 includes curved cylinder 11 and light-transmissive substrate 12；
One end of the curved cylinder 11 is the concave spherical surface for being coated with total reflection film, and the other end of the curved cylinder 11 is oblique
Face 112；
The two sides of the light-transmissive substrate 12 are parallel plane；
One end of the light-transmissive substrate 12 and 11 inclined-plane of curved cylinder is glued；
One end fixed setting concave mirror of the laser discharge chamber 3 installs window 8, and the concave mirror is installed window 8 and swashed
Light device electric discharge chamber 3 is fixedly connected, and the concave mirror 2 is fixed at concave mirror installation window 8；
Alternatively, one end coaxial arrangement window mirror installation window 9 and concave mirror of the laser discharge chamber 3 install window 8, institute
It states and window mirror 10 is set at window mirror installation window 9；The window mirror installation window 9 is fixedly connected with laser discharge chamber；It is described
For the setting of concave mirror 2 at concave mirror installation window 8, the axis and laser discharge chamber central axis 7 of the concave mirror 2 are coaxial；
The other end of the laser discharge chamber 3 is provided with optical coupled mirror installation window 4, the optical coupled mirror installation
Window 4 has installation inclined-plane, and the optical coupled mirror 1 is set at the installation inclined-plane of optical coupled mirror installation window 4, curved surface therein
Cylindrical mirror 11 is towards laser discharge chamber 3, curved cylinder central axis 114 and laser discharge chamber central axis, curved surface column
The real focus of mirror 11 is overlapped with 2 real focus of concave mirror；Sealing structure, light transmission base are provided between light-transmissive substrate 12 and installation inclined-plane
Piece 12 is fixedly connected with optical coupled mirror installation window 4.
Further, material with good light permeability energy of the selection of substrate 12 to laser weak absorbing or without absorption
Material, such as glass substrate, and two sides are coated with anti-reflection film.
Further, the center on the inclined-plane 112 is overlapped with the center of light-transmissive substrate 12.
Compared with prior art, the present invention beneficial effect is：
1, optical coupled mirror of the invention includes curved cylinder and light-transmissive substrate；Curved cylinder role therein
Reflection, light-transmissive substrate as curved cylinder support member and have optics output coupling function concurrently, solve bracket and block and make
At output couple efficiency influence problem to laser beam quality of reduction and bracket diffraction.
2, laser discharge chamber, primary mirror and optical coupled mirror are integrally designed by intracavity unsteady cavity of the invention, primary mirror
And optical coupled mirror is located at the both ends of laser discharge chamber, and is fixedly connected to form whole knot with laser discharge chamber
Structure improves the stability of resonant cavity and the compactedness of overall laser structure, meets laser high light beam quality and ring
Border adaptability demand.
3, the both ends of laser discharge chamber are arranged in optical coupled mirror and primary mirror by intracavity unsteady cavity of the invention, section
The front and back window lens of laser chamber are saved, optical coupled mirror and primary mirror can play the role of sealed chamber and light
Learn the effect of feedback and output.
4, the light-transmissive substrate of optical coupled mirror used by intracavity unsteady cavity of the invention is designed using tilting, is overcome
Adjoint unwanted oscillation in high gain lasers.
5, intracavity unsteady cavity of the present invention reduces resonant cavity eyeglass number compared with the unsteady cavity of existing three mirrors structure,
It can also realize the compact assembly of the intracavity of laser resonant cavity, improve resonant cavity stability and anti-interference.
Detailed description of the invention
Fig. 1 is the unsteady cavity schematic diagram of existing two mirrors structure；
Fig. 2 is the unsteady cavity schematic diagram of existing three mirrors structure；
Fig. 3 is the optical coupled mirror structural schematic diagram of the embodiment of the present invention；
Fig. 4 is the explosive view of Fig. 3；
Fig. 5 is the empty confocal intracavity unsteady cavity structural schematic diagram of the embodiment of the present invention；
Fig. 6 is the structural schematic diagram of optical coupled mirror mean camber cylindrical mirror in Fig. 5；
Fig. 7 is the light path schematic diagram of the empty confocal intracavity unsteady cavity of the present invention；
Fig. 8 is the empty confocal intracavity unsteady cavity structural schematic diagram of another embodiment of the present invention；
Fig. 9 is the light path schematic diagram of the real confocal intracavity unsteady cavity of the present invention；
Wherein appended drawing reference is：
201- primary mirror；202- window mirror；203- laser discharge chamber；204- secondary mirror；301- primary mirror；302- window mirror；
303- laser discharge chamber；304- output coupling mirror；305- secondary mirror；The optical coupled mirror of 1-；11- curved cylinder；12- light transmission base
Piece；111- convex spherical；The inclined-plane 112-；The center on the inclined-plane 113-；114- curved cylinder central axis；115- curved cylinder corner cut；
121- light-transmissive substrate cemented surface；2- concave mirror；3- laser discharge chamber；The optical coupled mirror of 4- installs window；The inclination angle 41-；5-
First pressing plate；The second pressing plate of 6-；7- laser discharge chamber central axis, 8- concave mirror install window, and 9- window mirror installs window, 10-
Window mirror.
Specific embodiment
Laser resonant cavity is the important component of laser, is the key that form laser output.Unsteady cavity is laser
One of device resonant cavity can provide the laser output of high light beam quality using the good mirror mould performance of unsteady cavity.
Optical coupled mirror 1 of the invention uses in unsteady cavity as a hysteroscope, and optical coupled mirror 1 is both an optics
Feedback element and an optical output components.The design principle of optical coupled mirror 1 of the invention be by the secondary mirror of unsteady cavity and
The window mirror of laser is combined into one, so that new coupling mirror has bulk of optical feedback performance, secondary mirror support function and window
Sealing function, while light-transmissive substrate inclined design, avoid the generation of unwanted oscillation.
Below in conjunction with attached drawing, the present invention is described in detail.
As shown in Figure 3-4, for empty confocal design, one end of the curved cylinder 11 of the optical coupled mirror 1 of the present invention is to be coated with
The center of the convex spherical 111 of total reflection film, convex spherical 111 is located on curved cylinder central axis 114, and convex spherical 111 is curved surface column
The reflecting surface of mirror 11；The other end of curved cylinder 11 is inclined-plane 112, which is curved cylinder 11 and light-transmissive substrate 12
Cemented surface；The two sides of light-transmissive substrate 12 are parallel plane, and wherein side is light-transmissive substrate cemented surface 121；Light-transmissive substrate 12 and tiltedly
Face 112 is glued, and the center 113 on inclined-plane is overlapped with 121 center of light-transmissive substrate cemented surface.Light-transmissive substrate 12 is round transparent glass base
Piece, round transparent glass piece have certain thickness h, it is poor with ambient pressure can to bear laser discharge chamber 3, and have one
Determine mechanical strength, the temporary impact of gas chamber air pressure change in electric discharge can be born, be not susceptible to deformation.
Fig. 5 show one embodiment of empty confocal intracavity unsteady cavity of the invention, which includes laser discharge
Chamber 3, primary mirror and optical coupled mirror 1, primary mirror are concave mirror 2, and optical coupled mirror 1 includes curved cylinder 11 and light-transmissive substrate 12；
One end of curved cylinder 11 is the convex spherical 111 for being coated with total reflection film, and the other end of curved cylinder 11 is inclined-plane 112 and and light transmission
Substrate 12 is glued；There is concave mirror to install window 8 for one end of laser discharge chamber 3, and the setting of concave mirror 2 installs window 8 in concave mirror
Place, the axis and laser discharge chamber central axis of concave mirror 2；The other end of laser discharge chamber 3 is provided with optics
Coupling mirror installs window 4, and optical coupled mirror installation window 4 has installation inclined-plane, and optical coupled mirror 1 is set to optical coupled mirror installation window
At 4 installation inclined-plane, curved cylinder 11 therein is towards laser discharge chamber 3.
As shown in fig. 6, the optical coupled mirror 1 in the present embodiment is φ by diameter, length is that the cylinder of L is process.Circle
Column one end optical polish is processed as a convex spherical, and sphere centre is in cylindrical center axis l1On, 111 surface of convex spherical, which is coated with, is all-trans
Penetrate film.The cylinder other end is cut into an inclined-plane, 112 normal of inclined-plane and cylindrical axis of symmetry degree into θ angle, i.e. curved cylinder corner cut
115。
Diameter phi Primary Reference laser gain area cross-sectional sizes, are determined by unsteady cavity design parameter.Curved cylinder corner cut
115 need the requirement of assembly, the sealing in view of optical coupled mirror 1 and optical coupled mirror installation window 4 and curved cylinder center
Axis 114 and the coaxial requirement of laser discharge chamber central axis 7.L mainly considers processing request, needs to provide cylindrical mirror long
Degree, by L, can to adjust to a certain extent optical resonator chamber long after assembly.
θ angle installs 41 phase of inclination angle of window 4 mainly for optical coupled 1 light-transmissive substrate of mirror, 12 inclination angle and optical coupled mirror
Matching, so that curved cylinder central axis 114 and laser discharge chamber central axis 7 are overlapped.
Optical coupled mirror 1 forms empty confocal intracavity with concave mirror 2 and designs, the center of curvature and concave mirror of curved cylinder 11
2 center of curvature is overlapped, and forms pseudo confocal unsteady resonator.Dress compared with when, concave mirror install window 8 normal direction and laser discharge cavity
Room central axis 7 is parallel, and the normal and laser discharge chamber central axis 7 of optical coupled mirror installation window 4 guarantee bent at the angle (90- θ)
Face cylindrical mirror axis l1It is overlapped with laser discharge chamber central axis 7.
As shown in figure 5, concave mirror 2 and optical coupled mirror 1 are fixed on concave surface by the first pressing plate 5 and the second pressing plate 6 respectively
Mirror is installed on window 8 and optical coupled mirror installation window 4, is sealed to laser discharge chamber 3.
As shown in fig. 7, the light path principle of pseudo confocal unsteady resonator of the present invention is：By by 2 real focus of concave mirror and curved surface column
The virtual focus of 11 reflecting surface of mirror is overlapped, and reflection of the light that laser discharge chamber 3 generates Jing Guo curved cylinder 11 reaches concave mirror
2,2 pairs of light of concave mirror reflect again, and the light for being reflected into light-transmissive substrate 12 directly exports, and are reflected into the light warp of curved cylinder 11
Curved cylinder 11 is reflected back concave mirror 2 again, to realize the good mirror mould ability of resonant cavity, and guarantees the good standard of output beam
Straightforward energy.
As depicted in figure 8, if the gas of laser discharge chamber 3 is corrosive gas, to avoid corrosive gas to concave surface
The corrosion of mirror 2 can increase window mirror in one end of laser discharge chamber 3 and install window 9, and window mirror, which is installed, is arranged window at window 9
Mouth mirror 10, window mirror 10 is for being sealed laser discharge chamber 3 and playing the role of light transmission.
In order to overcome unwanted oscillation adjoint in high gain lasers, the mounting surface of window mirror installation window 9 of the invention is
Inclined-plane, window mirror 10 are obliquely installed relative to laser discharge chamber central axis 7.
For real confocal unstable resonator, the difference of real confocal unstable resonator and pseudo confocal unsteady resonator is by the reflection of curved cylinder 11
Face becomes concave spherical surface, and curved cylinder 11 and concave mirror 2 form real focus in gas chamber.
As shown in figure 9, the light path principle of reality confocal unstable resonator of the present invention is：By by 2 real focus of concave mirror and curved surface column
The real focus of the reflecting surface of mirror 11 is overlapped, and reflection of the light that laser discharge chamber 3 generates Jing Guo curved cylinder 11 reaches concave surface
Mirror 2,2 pairs of light of concave mirror reflect again, and the light for being reflected into light-transmissive substrate 12 directly exports, and is reflected into the light of curved cylinder 11
It is reflected back concave mirror 2 again through curved cylinder 11, to realize the good mirror mould ability of resonant cavity, and guarantees that output beam is good
Collimate performance.
Claims (10)
1. a kind of optical coupled mirror, it is characterised in that：Including curved cylinder (11) and light-transmissive substrate (12)；
One end of the curved cylinder (11) is the convex spherical (111) for being coated with the concave spherical surface of total reflection film or being coated with total reflection film,
The other end of the curved cylinder (11) is inclined-plane (112)；
The two sides of the light-transmissive substrate (12) are parallel plane；
The one end on the light-transmissive substrate (12) and curved cylinder inclined-plane is glued.
2. optical coupled mirror according to claim 1, it is characterised in that：
The light-transmissive substrate (12) is glass substrate, and two sides are coated with anti-reflection film.
3. optical coupled mirror according to claim 1 or 2, it is characterised in that：
The center of the concave spherical surface is located on curved cylinder central axis (114), the center of the inclined-plane (112) and light-transmissive substrate
(12) center is overlapped.
4. optical coupled mirror according to claim 1 or 2, it is characterised in that：
The center of the convex spherical (111) is located on curved cylinder central axis (114), the center of the inclined-plane (112) and light transmission
The center of substrate (12) is overlapped.
5. a kind of intracavity unsteady cavity, including laser discharge chamber (3), concave mirror (2) and optical coupled mirror (1), feature
It is：
The optical coupled mirror (1) includes curved cylinder (11) and light-transmissive substrate (12)；
One end of the curved cylinder (11) is the convex spherical (111) for being coated with total reflection film, the curved cylinder (11) it is another
End is inclined-plane (112)；
The two sides of the light-transmissive substrate (12) are parallel plane；
The one end on the light-transmissive substrate (12) and curved cylinder (11) inclined-plane is glued；
One end setting concave mirror of the laser discharge chamber (3) installs window (8), concave mirror installation window (8) and laser
Device electric discharge chamber (3) is fixedly connected, and the concave mirror (2) is fixed at concave mirror installation window (8)；
Alternatively, one end coaxial arrangement window mirror installation window (9) of the laser discharge chamber (3) and concave mirror installation window (8),
Window mirror (10) are set at window mirror installation window (9)；Window mirror installation window (9) and laser discharge chamber (3) is solid
Fixed connection；Concave mirror installation window (8) is fixedly connected with window mirror installation window (9)；The concave mirror (2) is arranged in concave mirror
It installs at window (8), the axis and laser discharge chamber central axis (7) of the concave mirror (2) are coaxial；
The other end of the laser discharge chamber (3) is only provided with optical coupled mirror installation window (4), the optical coupled mirror peace
Filling window (4) has installation inclined-plane, and the optical coupled mirror (1) is set at the installation inclined-plane of optical coupled mirror installation window (4),
In curved cylinder (11) towards laser discharge chamber (3), curved cylinder central axis (114) and laser discharge chamber center
Coaxially, the virtual focus of curved cylinder (11) is overlapped axis (7) with concave mirror (2) real focus；Light-transmissive substrate (12) and installation inclined-plane it
Between be provided with sealing structure, light-transmissive substrate (12) is fixedly connected with optical coupled mirror installation window (4).
6. intracavity unsteady cavity according to claim 5, it is characterised in that：
The substrate (12) is glass substrate, and two sides are coated with anti-reflection film.
7. intracavity unsteady cavity according to claim 5 or 6, it is characterised in that：
The center of the inclined-plane (112) is overlapped with the center of light-transmissive substrate (12).
8. a kind of intracavity unsteady cavity, including laser discharge chamber (3), concave mirror (2) and optical coupled mirror (1), feature
It is：
The optical coupled mirror (1) includes curved cylinder (11) and light-transmissive substrate (12)；
One end of the curved cylinder (11) is the concave spherical surface for being coated with total reflection film, and the other end of the curved cylinder (11) is oblique
Face (112)；
The two sides of the light-transmissive substrate (12) are parallel plane；
The one end on the light-transmissive substrate (12) and curved cylinder (11) inclined-plane is glued；
One end setting concave mirror of the laser discharge chamber (3) installs window (8), concave mirror installation window (8) and laser
Device electric discharge chamber (3) is fixedly connected, and the concave mirror (2) is fixed at concave mirror installation window (8)；
Alternatively, one end coaxial arrangement window mirror installation window (9) of the laser discharge chamber (3) and concave mirror installation window (8),
Window mirror (10) are set at window mirror installation window (9), window mirror installation window (9) and laser discharge chamber are fixed and connected
It connects；Concave mirror installation window (8) is fixedly connected with window mirror installation window (9)；Concave mirror (2) setting is installed in concave mirror
At window (8), the axis and laser discharge chamber central axis (7) of the concave mirror (2) are coaxial；
The other end of the laser discharge chamber (3) is provided with optical coupled mirror installation window (4), the optical coupled mirror installation
Window (4) has installation inclined-plane, and the optical coupled mirror (1) is set at the installation inclined-plane of optical coupled mirror installation window (4), wherein
Curved cylinder (11) towards laser discharge chamber (3), curved cylinder central axis (114) and laser discharge chamber central axis
(7) coaxially, the real focus of curved cylinder (11) is overlapped with concave mirror (2) real focus；Between light-transmissive substrate (12) and installation inclined-plane
It is provided with sealing structure, light-transmissive substrate (12) is fixedly connected with optical coupled mirror installation window (4).
9. intracavity unsteady cavity according to claim 8, it is characterised in that：The light-transmissive substrate (12) is glass substrate,
And two sides are coated with anti-reflection film.
10. intracavity unsteady cavity according to claim 8 or claim 9, it is characterised in that：
The center of the inclined-plane (112) is overlapped with the center of light-transmissive substrate (12).
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112130395A (en) * | 2020-09-25 | 2020-12-25 | 山西大学 | Integral optical resonant cavity for frequency conversion |
| CN113872025A (en) * | 2020-06-30 | 2021-12-31 | 北京科益虹源光电技术有限公司 | Window sheet structure of excimer laser discharge cavity and excimer laser |
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| CN112130395A (en) * | 2020-09-25 | 2020-12-25 | 山西大学 | Integral optical resonant cavity for frequency conversion |
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