CN108920773B

CN108920773B - Design method and system for detailed scheme of dynamics-driven ultra-precise motion system

Info

Publication number: CN108920773B
Application number: CN201810588028.XA
Authority: CN
Inventors: 罗欣; 梁承元; 袁方; 李雪平; 姜伟; 曾理湛; 陈学东
Original assignee: Huazhong University of Science and Technology
Current assignee: Wuhan Gelanruo Precision Technology Co.,Ltd.
Priority date: 2018-06-08
Filing date: 2018-06-08
Publication date: 2020-06-02
Anticipated expiration: 2038-06-08
Also published as: CN108920773A

Abstract

The invention discloses a method and a system for designing a detailed scheme of a dynamics-driven ultra-precise motion system. The method of the invention provides that in any specific design stage, from the system overall situation, aiming at the design and modification of the system scheme and/or key components, the dynamic modeling, simulation and analysis are carried out on the system scheme, and the design process is driven by taking the analysis result as the basis; modeling, simulating and analyzing operation of key components, subsystems and/or system schemes is controlled and guided by corresponding processes, and design data and tool support can be obtained; and (4) utilizing the model template to complete the dynamic characteristic analysis and equivalent modeling of the key components and/or subsystems. The system of the present invention provides tool support for the above method, comprising: the system comprises a flow control and data manager, a system model assembling platform, a system model simulator, a post-processing analysis tool set, an example data management center, a template creator, a model generator, a simulation test management center and a solver.

Description

Design method and system for detailed scheme of dynamics-driven ultra-precise motion system

Technical Field

The invention belongs to the field of design of ultra-precise motion systems, and particularly relates to a complete machine electromechanical model modeling analysis method and system implementation of an ultra-precise motion system scheme.

Background

In manufacturing equipment, precision finishing machine tools and biomedical instruments, an ultra-precision motion system needs to meet the requirements of extreme motion performance such as large stroke, high speed, high acceleration, submicron and even nano-scale positioning accuracy and the like at the same time, and has large design difficulty and high manufacturing cost.

As shown in fig. 1, the conventional design method of the ultra-precision kinematic system includes three stages of solution approximation, component design, and system design. Firstly, a designer carries out static estimation on a conceptual scheme according to the motion range and the precision; then, completing the design and model selection of the main assembly according to a design manual or a reference example, and checking the mechanical property of the assembly; and finally, designing the system, and obtaining a detailed scheme of the system meeting the performance requirement through trial production, testing and improved design.

Because the traditional design method has insufficient consideration on the dynamic characteristics of the components and the influence of the components on the system in the component design stage and lacks comprehensive and accurate evaluation on the comprehensive performance of a detailed scheme of the system, the system design often fails to reach the standard, the components or the system need to be repeatedly designed and modified, even the physical prototype needs to be modified or remade for many times, the research and development period is too long, and the research and development cost is high.

However, the ultra-precise motion system applies the key components and subsystems such as flexible structural members, floating bearings, direct driving devices, high-performance vibration isolators, high-precision displacement measuring devices and the like and corresponding driving and vibration damping control strategies. The design features of these components and subsystems are very different, and their working principles and behavior characteristics relate to different disciplinary fields. How to accurately model and analyze the dynamic characteristics of each key component and subsystem aiming at the working characteristics of each key component and subsystem in an ultra-precise motion system during component characteristic design is a complex modeling and analyzing problem relating to multiple disciplines.

In addition, in the motion process of the ultra-precise system, the dynamic behaviors of the components and the subsystems are coupled with each other through structural connection, so that the dynamic characteristic of the ultra-precise motion system is complicated, structural vibration presents irregular and complex transmission, and the dynamic motion precision of the ultra-precise motion system is fatally influenced. How to express the dynamic characteristics of each component and subsystem and the coupling effect among the components and subsystems in an electromechanical system model of a complete machine detailed scheme, and evaluating and controlling the influence of the coupling effect on the dynamic error of the system is also an important problem in the detailed scheme design of the ultra-precise motion system.

At present, regarding the problem of modeling and analyzing the dynamic characteristics of key components and subsystems, a common method is to construct a simulation model of a corresponding subject under professional CAE software for a specific component and subsystem design example, and analyze the behavior characteristics of the design example, however, this method has some problems:

firstly, the operation process of building and analyzing a subject simulation model is very complex and tedious;

secondly, in order to create a correct instance model under professional CAE software and perform accurate characteristic analysis and equivalent modeling, a designer not only needs to be skilled in mastering professional modeling and analysis methods of related subjects, but also needs to have rich professional CAE software operation experience; the problems of high difficulty and long time consumption of modeling and analyzing the dynamic characteristics of key components and subsystems are caused;

moreover, a modeling analysis method and operation experience are often specific to a specific design example type of a certain component, and when the structure, topology and performance design features of the design example are slightly changed, the modeling analysis method or operation experience may not be completely applicable any more, and a unified organization means of key component modeling analysis knowledge is lacked to support modeling analysis operations of different types of design examples.

With respect to creating and analyzing a multidisciplinary coupled model of a system detailed scheme, two methods are generally adopted:

firstly, creating simulation models of each component and subsystem under professional CAE software, defining data interaction and necessary calculation and analysis sequence among the simulation models by utilizing multidisciplinary analysis business software, and building a system coupling model based on data flow, thereby simultaneously driving a plurality of professional CAE software to realize combined simulation calculation of the system. However, in this method, the creation process is very complicated for both the component model under the professional discipline CAE software and the system coupling model under the multidiscipline analysis software; the system model created by the method pulls the whole body: when a component design is changed, the component simulation model connected with the component design is often required to be modified, and even the system coupling model may be required to be redefined; the system model created by the method is too complex, and when simulation is wrong or the error is large, the reason of the error is difficult to judge.

Secondly, based on the modeling simulation platform business software capable of realizing multi-field unified modeling, the key components and subsystems are required to be accurately and equivalently simplified according to the modeling specification and the system model form of the platform, so that a multi-disciplinary unified model of the detailed scheme of the system is constructed. The method has the advantages that the process of constructing the system model is simple, and the model is convenient to modify; however, designers must be skilled in mastering model equivalent methods and skills of different types of components and subsystems to ensure the correctness and accuracy of the constructed system model, and the requirements on the designers are too high to facilitate popularization and application.

Disclosure of Invention

In view of the above drawbacks and needs of the prior art, the present invention provides a method and system for designing a detailed solution of a dynamically-driven ultra-precise motion system, which aims to provide three levels of support for the dynamic modeling and analysis of components and systems at various stages of the design process: the method has the advantages that the existing similar design examples are provided, the automatic modeling simulation analysis operation is realized, the targeted flow guidance and design data are provided, the design difficulty is reduced, the design efficiency is improved, and the detailed scheme of the ultra-precise motion system is effectively ensured to have excellent dynamic performance from the component level.

In order to achieve the above object, according to one aspect of the present invention, a detailed scheme design method for a dynamically-driven ultra-precise motion system is provided, which includes a concept design stage and a component and system design stage, and in any specific stage, the dynamic characteristics of the ultra-precise motion system need to meet corresponding design requirements, wherein:

in the concept design stage, the dynamic characteristic analysis is carried out on the structural scheme of the ultra-precise motion system, the analysis result is judged, and the component and system design can be carried out only when the analysis result meets the design requirement of the ultra-precise motion system;

in the component and system design stage, aiming at the design and modification of each or each group of key components and/or system schemes in the ultra-precise motion system, corresponding dynamic modeling, simulation and analysis are required to be carried out on the key components and the system schemes in time, the analysis result is judged, and if the analysis result does not meet the design requirement of the ultra-precise motion system, the design of the key components and/or the system schemes is modified and the judgment is carried out again; and if and only if the judgment results of the current key component and the system scheme meet the requirements at the same time, entering the design stage of the next key component until the whole system scheme and the design of all the key components are finished, and finally obtaining a detailed scheme.

Further, the above design method includes the steps of:

(1) according to the design task target of the ultra-precise motion system, referring to the existing detailed scheme design example of the system, completing concept design, calling a corresponding model template, inputting design parameters, obtaining a structural scheme model of the ultra-precise motion system, and carrying out dynamic characteristic analysis;

if the analysis result does not meet the design requirement of the ultra-precise motion system, correspondingly modifying the structural scheme model of the ultra-precise motion system;

(2) selecting one or a group of key components or subsystems from the structural scheme of the ultra-precise motion system, referring to or reusing the existing key component or subsystem design examples to complete the feature design of the key components or subsystems, selecting corresponding model templates, inputting the types, working condition parameters, structural feature parameters and performance characteristic data of the key components or subsystems, and generating equivalent models of the key components or subsystems;

if the performance characteristic data can not be directly determined, a flow guide can be provided to guide a user to call a corresponding parametric analysis function according to the input working condition parameters and structural characteristic parameters of the key component or the subsystem according to specific steps to perform dynamic characteristic analysis so as to obtain the performance characteristic data;

(3) introducing all key components and/or subsystem equivalent models generated in the step (2) into the structural scheme model of the ultra-precise motion system generated in the step (1), replacing, modifying and refining corresponding parts in the structural scheme model, and supplementing and creating a required basic component model; defining the relation among the key component equivalent models, the subsystem equivalent models and/or the basic component models, and assembling to obtain a system scheme model;

(4) according to the design working condition and performance requirement of the ultra-precise motion system and the current ultra-precise motion system design flow stage, selecting a corresponding simulation flow of the ultra-precise motion system performance test, carrying out simulation test on a detailed scheme model of the system, and outputting a simulation calculation original result;

(5) based on the original result of simulation calculation, analyzing the dynamic characteristics and dynamic performance characteristics of the corresponding detailed scheme of the system according to the selected simulation flow of the performance test of the ultra-precise motion system;

(6) if the analysis result in the step (5) does not meet the design requirement of the ultra-precise motion system, returning to the step (1) to modify the conceptual design of the ultra-precise motion system, and/or returning to the step (2) to correspondingly modify the characteristic design of key components and/or subsystems of the ultra-precise motion system;

if the analysis result of the step (5) meets the design requirement of the ultra-precise motion system, repeating the steps (2) to (5) until the characteristic design of all key components and/or subsystems is completed, and obtaining a complete detailed system scheme;

(7) and (5) repeating the steps (2) to (6), and further refining, supplementing and perfecting working condition parameters and structural characteristic parameters of the ultra-precise motion system and key components and/or subsystems thereof until a detailed system scheme capable of being used for detailed design of parts is obtained.

Further, a control guidance scheme of the whole process, related design data and corresponding tools are designed in advance, and in the steps (1) to (6), according to the current ultra-precise motion system design process stage, a designer can obtain the control guidance of the corresponding process and the support of the related design data and the corresponding tools when performing modeling, simulation and analysis operations of key components, subsystems and/or system schemes.

Further, the key components comprise an air floatation support, a motion guide rail, a driving motor, a vibration damping device, a flexible mechanism, a measuring device and a motion control module; the subsystem comprises a system with specific functions and a space architecture of hardware thereof, wherein the system is formed by combining all key components according to a preset combination relation;

the model template takes the design characteristics and performance characteristics of the key components, subsystems and/or system detailed schemes of the ultra-precise motion system as input and is used for automatically generating equivalent models of the key components, subsystems and/or system detailed schemes;

the model templates of the key components and the subsystems also provide flow guide aiming at the condition that the performance characteristics can not be directly determined, and call corresponding parametric analysis functions according to the working condition parameters and the structural characteristic parameters for automatically analyzing the performance characteristics of the key components and the subsystem design examples.

In order to achieve the above object, the present invention provides a design system of a detailed solution of a kinematically-driven ultra-precise motion system, which is used for providing tool support for any one of the design methods of the detailed solution of the kinematically-driven ultra-precise motion system, and comprises: a control layer and a tool layer;

the control layer comprises a flow control and data manager;

the tool layer comprises a system model assembling platform, a system model simulator, a post-processing analysis tool set, an example data management center, a template creator, a model generator, a simulation test management center and a solver;

the flow control and data manager is used for providing an executable flow model of a corresponding sub-flow according to the current ultra-precision motion system design flow stage, guiding a user to gradually complete modeling, simulation and analysis work of components and/or subsystems according to operation steps and execution logic defined in the executable flow model, providing corresponding design data in each step of work, and calling a corresponding function module in a tool layer for the user; the executable process model of the sub-process comprises the execution logic and data input and output relation among all operation steps in the sub-process, design data required to be called in each operation step and a functional module in a tool layer;

the system model assembling platform is used for acquiring an equivalent model of the key component and/or the subsystem from the model generator according to a control instruction of the flow control and data manager, and carrying out system dynamics modeling;

the system model simulator is used for organizing a management solver and a simulation test management center according to a control instruction of the flow control and data manager, and carrying out system model simulation on a system dynamics modeling result;

and the post-processing analysis tool set is used for performing post-processing analysis on the original simulation result of the system model according to the control instruction of the flow control and data manager.

Further, an example data management center, a template creator, a model generator and a system model assembling platform in the tool layer are used for providing tool support for constructing the detailed scheme model of the ultra-precise motion system;

the instance data management center is used for storing and calling design instances and/or product data of the ultra-precise motion system and key components and/or subsystem detailed schemes thereof;

the template management center is used for organizing and managing model templates of the ultra-precise motion system and key components and/or subsystems thereof;

the template builder is used for manufacturing and packaging a model template of the ultra-precise motion system and key components and/or subsystems thereof;

the model generator calls a model template of the key component, the subsystem and/or the detailed system scheme from the template management center, extracts corresponding design examples and/or product data of the existing key component, subsystem and/or the detailed system scheme from the example data management center, inputs design characteristic parameters and performance characteristic data in the design examples and/or the product data into the model template, and generates an equivalent model of the key component, the subsystem and/or the detailed system scheme;

the model generator can also input the data of the new design examples of the key components and the subsystems designed by the user into corresponding model templates, guide the user to call corresponding parameterized analysis functions to analyze the performance characteristics according to specific steps, and generate equivalent models of the key components and/or the subsystems by combining the performance characteristic analysis results and the design characteristic parameters in the design example data;

the model generator is also used for extracting and loading the design characteristics and performance characteristic data of the key components and/or subsystems from the outside as input data of the model template so as to generate an equivalent model;

the model generator outputs the generated equivalent model to a system model assembling platform;

further, the system model assembly platform comprises a basic component model of a subject related to the ultra-precise motion system, and is used for combining the equivalent model of the ultra-precise motion system and key components and/or subsystems thereof with a required basic component model, constructing a unified model of the design scheme of the ultra-precise motion system, and realizing modeling of the ultra-precise motion system;

the multidisciplinary unified model comprises design characteristics, performance characteristics and mutual relations of all key components and/or subsystems in a system design scheme of the ultra-precise motion system.

Further, a simulation test management center, a solver and a system model simulator in the tool layer are used for providing tool support for carrying out the detailed scheme model simulation test of the ultra-precise motion system;

the simulation test management center is used for organizing a management system performance simulation test module; the system performance simulation test module corresponds to one or a group of simulation processes of the ultra-precision motion system performance test and is used for sequentially calling one or more solvers to complete the simulation calculation of the ultra-precision motion system model;

the system model simulator comprises a script calling module, a model conversion module and a simulation driving module; the system model simulator takes an ultra-precise motion system model under a system model assembling platform as input, selects a corresponding system performance simulation test module from a simulation test management center through a script calling module according to the design requirement of the ultra-precise motion system, and sets simulation setting and input and output conditions;

the model conversion module is used for converting the ultraprecise motion system model and the input and output conditions into input data required by a corresponding solver and inputting the input data to the corresponding solver;

and the simulation driving module is used for driving a solver to complete calculation according to the input data according to the simulation setting and extracting an original result of the simulation calculation.

And furthermore, the post-processing analysis tool set is used for taking a simulation result output by the system model simulator as input, calling a corresponding post-processing analysis tool according to the selected system performance simulation test module, analyzing the dynamic characteristics and the dynamic performance characteristics of the corresponding ultra-precise motion system, outputting an analysis result and providing tool support for analyzing the dynamic characteristics and the dynamic performance characteristics of the detailed scheme of the ultra-precise motion system.

If the analysis result meets the design requirement, the dynamic characteristic and dynamic performance characteristic analysis result of the ultra-precise motion system and the design characteristic and performance characteristic data of the detailed scheme of the system are combined to form a complete detailed scheme design example of the system, and the detailed scheme design example is stored in an example data management center and can be reused in the subsequent design process.

Further, the example data management center, the template management center, the simulation test management center, the post-processing analysis tool set and the process control and data manager can realize the expansion of functions, and the specific method comprises the following steps:

the instance data management center can add design instance data of new key components, subsystems and detailed schemes of the system; the template management center can add new key components and model templates of subsystems; a new system performance simulation test module can be added in the simulation test management center; the post-processing analysis toolset can add new post-processing analysis scripts, algorithm modules and tools; the process control and data manager may add and edit new executable process models and design data.

Generally, compared with the prior art, the above technical solution conceived by the present invention mainly has the following technical advantages:

(1) according to the invention, the components and the system are subjected to dynamic modeling analysis at each stage of the design process, so that the detailed scheme of the ultra-precise motion system is effectively ensured to have excellent dynamic performance from the component level.

(2) The invention reduces the difficulty of designing and analyzing key components and subsystems in the ultra-precise motion system. Firstly, the design example and product data stored in the example data management center can be directly used for key components and subsystem design or provide references; secondly, in the design method of the invention, the key components and subsystems only need to complete the design of the structure and performance characteristics related to the working characteristics, and the geometric design of details is not needed; moreover, by applying the model generator and the template management center, the modeling analysis knowledge of key components and subsystems can be effectively managed and organized, and the automation of modeling analysis is realized; and the model generator and the model template in the template management center are formed by summarizing, extracting and materializing various key components and subsystem design characteristics and common characteristics of a modeling analysis method, have strong adaptability and can support modeling analysis and equivalent model generation of different key components and subsystem design examples.

(3) The method reduces the difficulty of modeling the detailed scheme of the ultra-precise motion system, and realizes the comprehensive evaluation of the performance of the scheme of the system. Firstly, a key component and subsystem equivalent model generation process is automated by applying a model generator; secondly, the system model assembly platform is designed based on a unified model expression method, and a system scheme model is expressed as the design characteristics of components and subsystems and the installation and action relations among the components and the subsystems according to strict modeling specifications, so that the system model assembly platform has stronger adaptability and is convenient to modify and maintain; moreover, because the simulation test management center does not directly calculate the system scheme model under the system model assembly platform, but automatically converts the system scheme model into input data/models required by various solvers, the simulation test management center not only can effectively support various solvers, but also ensures that the system scheme model only needs to have complete feature description data required by conversion into different solvers for input, and does not need to have algorithm information such as disciplinary equations and the like, thereby reducing the modeling difficulty of the system scheme model; moreover, the simulation test management center and the post-processing analysis tool integrate simulation test modules and analysis methods oriented to different performance index requirements and typical working conditions, and can comprehensively simulate the performance characteristics of a system scheme model.

(4) The flow control and data manager can provide flow guidance in the detailed scheme design process of the ultra-precise motion system, and call various tools in the invention to realize automation of the modeling analysis process of some key components and subsystems.

(5) The invention has strong function expandability. In the using process of the invention, design example data, a model template, a system performance simulation test module, a post-processing analysis script, an algorithm module and a tool, an executable flow model and design guidance data in the modeling analysis system can be added and edited.

Drawings

FIG. 1 is a simplified diagram of a conventional design method for an ultra-precision kinematic system;

FIG. 2 is a schematic diagram of a design method and system for a kinematically driven ultra-precision motion system;

FIG. 3 is a diagram of the program architecture of the simulation test management center, solver, and system model simulator;

FIG. 4 is a schematic diagram of a scheme of an H-shaped ultra-precision motion system

Fig. 5 is a flowchart of an example of designing and analyzing the H-type ultra-precision motion system scheme of fig. 4.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

As shown in fig. 2, the present invention emphasizes the importance of dynamics modeling, simulation and analysis in the detailed scheme design process of ultra-precise motion system:

in the conceptual design stage, the structure scheme of the ultra-precise motion system must be subjected to dynamic modeling, simulation and analysis, and the design of components and the system can be carried out only if the analysis result of the overall dynamic characteristic of the structure scheme meets the design requirement of the ultra-precise motion system;

in the stage of component and system design, the component design and the system design of the ultra-precise motion system are fused: for the design and modification of each or each group of key components, a corresponding key component equivalent model needs to be created or modified in time, a dynamic model of an ultra-precise motion system scheme is constructed or modified, dynamic simulation and analysis of the system scheme are carried out, and if the analysis result does not meet the design requirement of the ultra-precise motion system, the design of the key component and/or the system scheme needs to be modified.

In the detailed scheme design process of the ultra-precise motion system, the specific operation processes of modeling, simulation and analysis of key components, subsystems and the system can be controlled or driven by corresponding processes and can be supported by corresponding design data and tools.

The design system of the dynamics-driven ultra-precision motion system detailed scheme comprises a control layer and a tool layer. Wherein, a flow control and data manager is arranged in the control layer and used for controlling the modeling, simulation and analysis operation processes of the ultra-precise motion system; and the tool layer comprises: the system comprises a system model assembling platform, a system model simulator, a post-processing analysis tool set, an example data management center, a template creator, a model generator, a simulation test management center, a solver and the like, and is used for providing tool support for modeling, simulation and analysis operation processes of the ultra-precise motion system.

The system model assembly platform can be realized by self-development of programs and can also be realized by secondary development based on commercial modeling simulation software. The platform can completely and accurately record the design characteristics and performance characteristics of components of various ultra-precise motion systems and system design examples. And other parts in the tool layer can be integrated by taking the system model assembling platform as a center: the instance data management center, the template management center, the model generator, the template creator, the simulation test management center, the system model simulator and the post-processing analysis toolset can be tool programs or software functional modules, and a designer can call the tool programs or the software functional modules under the system model assembling platform.

The example data management center can be designed into a database program for storing design examples of detailed schemes of the ultra-precise motion system in a classified mode, and design examples of key components, subsystems and product data of the key components, the subsystems and the product data such as structural configurations, air floatation supports, motion guide rails, driving motors, vibration damping devices, flexible mechanisms, measuring devices and motion control modules. Each design instance includes design features and performance characteristic data for the structure, materials, physical characteristics, control, etc. of the component or system solution. Taking an air floatation support database program as an example, a plurality of air floatation support design examples are stored, and each air floatation support design example comprises data such as characteristic structure parameters, working condition parameters, dynamic performance parameters and the like, and performance characteristic analysis pictures such as a pressure distribution curve, a pressure cloud chart, a speed streamline and the like of a key area in an air floatation support flow field.

The template management center can also be designed as a database program for organizing and managing system-level model templates of detailed schemes of various ultra-precise motion systems and component-level model templates of various key components and subsystems. The model template is a parameterized knowledge entity formed by comprehensively analyzing design characteristics and performance characteristic parameters, model structures and information, operation objects, flow steps, algorithms and tools of a modeling analysis method and summarizing and abstracting common characteristics of key components and subsystems which are common in an ultra-precise motion system, and has strong adaptability.

The model template takes the design characteristics and performance characteristics of key components and subsystems as input and is used for automatically generating equivalent models of the key components and the subsystems, and according to the implementation mode of a system model assembly platform, the model template can adopt the forms of a modeling script of a commercial CAE software platform, a modifiable model file, an editable parameterized model (such as a Simulink parameterized model) and the like. For some key components and subsystems with performance characteristics difficult to be directly determined, a model template of the key components and subsystems needs to provide a flow guide for guiding a user to call a corresponding parametric analysis function according to specific steps and working condition parameters and structural characteristic parameters of the key components or subsystems so as to analyze the dynamic performance characteristics of the key components and subsystem characteristic design examples; the parameterized analysis function can be realized in the form of modeling and analysis scripts of a commercial CAE software platform (such as grid creation scripts under an ICEM CFD), a small parameterized analysis computer program, and the like.

As a preferred solution of this embodiment, the template categories stored in the template management center mainly include: the system comprises a detailed scheme, and key components and subsystems such as a structural configuration, an air floatation support, a motion guide rail, a driving motor, a vibration damper, a flexible mechanism, a measuring device and a motion control module.

The template builder program may be designed as: a designer introduces a pre-prepared main body of a model template (such as a modeling script of a commercial CAE software platform, a modifiable model file, an editable parameterized model and the like) on a use interface of a template builder, defines the calling/starting mode of the main body of the model template, and names and types of design characteristic parameters and dynamic characteristic parameters input as the model template, and automatically packages a program into the model template; for the parameterized analysis function to be called by the model template, a designer introduces a main body of a prepared analysis function (such as a modeling and analysis script of a commercial CAE software platform, a small parameterized analysis and calculation program and the like) on a use interface of the template creator, defines a starting mode, the name, the type and the value range of the design characteristic parameter as input, and the name and the type of the performance characteristic parameter as output, and automatically packages the analysis function by the program and associates the analysis function with the model template;

the model generator program can be designed to: a designer selects a corresponding model template on a model generator use interface according to a characteristic design example of a key component or a subsystem, and inputs design characteristic parameters such as a structure, working conditions, materials and the like; the model generator program automatically calls a parameterized analysis function through a model template in the background, calculates and analyzes the dynamic characteristics of the characteristic design examples of the key components or subsystems, automatically calls the model template by combining the dynamic characteristic analysis result and the design characteristic parameters, generates an equivalent model of the key components or subsystems and outputs the equivalent model to the system model assembly platform. The model generator program should also support extracting, loading, and/or manually inputting the necessary design features and performance characteristic data (such as product structure and performance feature data in a key component product manual) for key components, subsystems from outside the system as input data for a model template to generate an equivalent model.

Outputting the component equivalent model generated in the model generator to a system model assembling platform; and establishing a unified model of the detailed scheme of the system by defining the relation among equivalent models of all the components in a system model assembling platform.

As a preferred solution of this embodiment, the system model assembly platform requires a strict and uniform model expression specification, and can correctly, completely and accurately record the design characteristics and performance characteristics of components, subsystems and system design examples for various applications or components, subsystems and system design examples existing in and possibly appearing in the design process of the ultra-precise motion system. For key components and subsystem models, a system model assembly platform is required to be capable of completely recording design characteristic parameters and performance characteristic parameters of the system model and connection interfaces of the system model and other components in interaction, but characteristic equations or working mechanisms of the components and subsystems are not required to be detailed; for a system model, a system model assembly platform requires that mutual installation and action relations among different components can be correctly defined based on connection interfaces of the components and subsystems, mechanical structure topology, control flow, signal transmission, pneumatic/hydraulic circuits, circuits and the like in the system can be accurately described, but calculation processing or simultaneous equations are not required to be constructed on the mutual relations.

The relationship between the simulation test management center, the solver and the system model simulator is shown in fig. 3. In the system of the invention, the solver can be a self-developed computer program, module and script, and can also be commercial simulation analysis software. The simulation test management center is similar to the template management center and is used for organizing and managing typical system performance simulation test modules, including a system modal characteristic simulation test, a motion precision test under a typical working condition, an initial displacement deviation test under a system static balance state, a system mechanical transfer function simulation test and the like. The system performance simulation test module is oriented to the performance analysis and evaluation requirements of one or a group of ultra-precise motion systems, and can sequentially call one or more related solvers to complete the simulation calculation and performance analysis of the detailed scheme of the system.

The system model simulator takes a system detailed scheme model under a system model assembling platform as input, a designer selects a system performance simulation test module when the system model simulator is used, and necessary simulation setting and input and output conditions are input. The system model simulator program finds a corresponding system performance simulation test module from the simulation test management center through the script calling module; converting the detailed scheme model and the input/output conditions of the system into input data required by a corresponding solver through a model conversion module; and driving a solver to complete calculation according to the simulation setting through a simulation driving module, and extracting a simulation result.

The program for the post-processing analysis toolset may be designed to: the simulation test result output by the system model simulator is used as an operation object, the modal frequency and the vibration mode characteristic of a detailed scheme of the system, the mean value and the mean square error of the motion error in each direction under a typical working condition, the control stable time of stepping or following motion, the mechanical transfer function, the open loop transfer function and other characteristic performances of the system are analyzed and solved, and an analysis result curve or a cloud picture can be displayed.

As a preferred scheme of the embodiment, for the system detailed scheme design result meeting the design requirement, the post-processing analysis tool set can extract and arrange the design characteristics and performance characteristic data thereof to form a complete system detailed scheme design case, and store the complete system detailed scheme design case in the instance data management center.

The process control and data manager can call other parts in the tool layer of the invention, provide operation guidance for designers in the process of key component or system modeling, simulation and analysis, and realize operation automation, and the specific implementation mode is as follows:

the flow control and data manager can be programmed with references to modelcentre and iSight. The designer can build an executable flow model in a manner similar to drawing a flow chart in a block diagram type editing interface; the executable process model is composed of a plurality of design, modeling and analysis activities by defining the logic relationship among each other; in each activity in which a flow model can be executed, a designer needs to specify a tool or program to be used (including not only parts of the system of the present invention but also business modeling analysis software, third-party tool programs, and the like), declare input and output data and start conditions of the activity, and needs to add design data corresponding to the activity, and the like.

The flow control and data manager provides a design guidance interface, can store and display a large amount of related design data of the ultra-precise motion system in the modes of web pages, documents and the like, and comprises the following steps: the method comprises the following steps of conceptual design processes of different types of ultra-precise motion systems, estimation and verification algorithms of system dynamics characteristics and important indexes in a conceptual design stage, component design processes of various ultra-precise motion system typical configurations in a system design stage, a construction method of a system detailed scheme integral electromechanical model, use and setting key points of a simulation test script, a comprehensive evaluation method of a system detailed scheme and the like.

When the designer uses the executable process model, the process control and data manager can sequentially open corresponding tools or programs according to the execution sequence of the activities defined in the process model, open the design data corresponding to the activity operation on the design guidance interface, and guide the designer to manually complete the activity work or automatically load input data and execute the activity operation.

As a preferred scheme of this embodiment, in the design process of the detailed scheme of the ultra-precision motion system, the process control and data manager in the control layer may instruct the designer to complete specific components at different design stages, system dynamics modeling analysis work, and manage models and data generated in the design process, and may also invoke various tools in the tool layer to provide efficient tool support for the designer.

As a preferred solution of this embodiment, the example data management center, the template management center, the simulation test management center, the post-processing analysis tool set, and the process control and data manager may implement function expansion, and the specific method includes:

the instance data management center can add and edit the design instance data of the key components and the system scheme; the template management center can add a new model template through the template creator; the simulation test management center has a system simulation test module maintenance function and supports designers to add and edit new system simulation test modules; the post-processing analysis toolset can add new post-processing analysis scripts, algorithm modules and tools; the new key components, modeling or analysis processes of the system can be defined in the form of executable process models, encapsulated in the process control and data manager.

The specific implementation process of the design method of the detailed scheme of the dynamics-driven ultra-precision motion system of the present invention is described by taking the design and analysis process of a certain H-shaped ultra-precision motion system scheme as an example, as shown in fig. 4.

Fig. 5 shows a flow chart of the H-type ultra-precision motion system scheme design and analysis process: a designer completes the design of the structural scheme of the H-shaped ultra-precision motion system and builds a structural scheme model; on the basis of the structural scheme model, a designer designs key components and subsystems, creates corresponding equivalent models and completes the assembly of a detailed scheme model of the system; and (3) carrying out a simulation test of dynamic characteristic test and a simulation test of plane motion under a typical working condition on the detailed scheme model of the system by a designer, and analyzing the dynamic characteristic and the precision performance of the detailed scheme of the system according to a test result.

Step (1): a designer opens a concept design guidance interface in the process control and data manager, selects a proper type of concept design process of the ultra-precise motion system according to the design requirement and the use working condition of the H-shaped ultra-precise motion system, refers to related concept design data, and designs a mechanical structure scheme.

As a preferred scheme of the embodiment, a concept design guidance interface in the process control and data manager records and displays related data of concept design in a mode of web pages, documents and the like. These data highlight the dynamics of ultra-precision kinematic systems considered in the conceptual design, including: the method comprises the following steps of conceptual design processes of different types of ultra-precise motion systems, a system architecture design method considering motion working conditions and stress loads, a model selection method of main parts considering dynamic characteristics, a verification algorithm and an evaluation criterion of system dynamic characteristics and the like.

In the process, a designer can open an example data management center through a process control and data manager and refer to a suitable H-shaped ultra-precision motion system design example. After the mechanical structure scheme design and the structural characteristics are determined, a designer opens a model generator through a process control and data manager and selects 'generation of a mechanical structure configuration scheme model of an ultra-precise motion system'; and entering a template management center through a model generator, finding an H-shaped configuration scheme model template which is consistent with the design result of the mechanical structure scheme, inputting structural characteristic parameters, and generating an H-shaped ultra-precise motion system mechanical structure scheme model.

For the generated H-shaped ultra-precise motion system mechanical structure scheme model, a designer needs to analyze the dynamic characteristics of the model, including the system vibration mode, the response characteristics of the structure key parts to driving excitation and typical disturbance, the mechanical transfer function of main motion parts and the like. And if the analysis result does not meet the design requirement of the H-shaped ultra-precision motion system, the structural scheme design needs to be modified.

Step (2.1): a designer opens a guidance interface for designing the air floatation support assembly in the flow control and data manager, and refers to the air floatation support design flow, the use condition characteristics of different types of air floatation supports, structural characteristic design points and other data; and opening an instance data management center through a process control and data manager, searching and referring to a proper supporting air bearing design instance, completing the characteristic design of the supporting air bearing of the H-shaped ultra-precise motion system, and defining the partial structural characteristics and the working condition characteristics of a flow field of the air bearing. Then, the designer opens the model generator, selects 'generating the air floatation support model', and the model generator calls out the template management center; a designer searches and selects a corresponding air bearing model template in a template management center according to the structural feature type and the layout form of the design result of the supporting air bearing; under the guidance of the flow guide, a designer calls a corresponding parametric analysis function, inputs specific structural and working condition characteristic parameters, and performs calculation and analysis on the dynamic characteristics of the air floatation support to obtain an analysis result of the dynamic performance characteristics of the air floatation support; a designer loads a dynamic performance characteristic analysis result, a structure and working condition characteristic parameters in a model template; the model generator automatically generates an equivalent model of the customized supporting air bearing set.

Step (2.2): and (3) in the design guidance interface of the air floatation support assembly opened in the step (2.1), the designer refers to the data of the use condition characteristics, the type selection cautionary items and the like of different types of air floatation support products and selects a proper guiding air floatation support product outside the system. A designer makes a picture file of the dynamic performance curve of the selected air-bearing product from an air-bearing product sample manual by means of photographing or screenshot and the like. Then, the designer opens the model generator through the process control and data manager, and extracts the dynamic performance data from the dynamic performance curve picture file by using the external data extraction function in the model generator. Then, the designer loads the dynamic performance data of the selected air-floating supporting product in the model generator, and inputs the structure and working condition characteristic parameters of the air-floating supporting product to form a complete air-floating supporting product example. Finally, the designer selects 'generating an air floatation support model' in the model generator, selects a corresponding air floatation support model template, loads an air floatation support product example, and generates a corresponding guiding air floatation support group equivalent model. And for the formed air supporting product example, a designer can call an example data management center through the model generator and store the air supporting product example into an example database so as to reuse the air supporting product example in the future design process.

And (3): according to the specific stage of the detailed scheme design of the ultra-precise motion system, a designer opens a guidance interface of the system scheme design in a flow control and data manager and refers to relevant data constructed by a system detailed scheme model; opening a mechanical structure scheme model of the H-shaped ultra-precise motion system in a system model assembly platform; importing equivalent models of the air bearing groups for guiding and supporting generated in the previous step, replacing corresponding parts in the scheme model of the mechanical structure of the system, and creating a necessary basic component model of the mechanical structure in a system model assembly platform; and defining the equivalent models of the basic component model, the guiding air bearing group and the supporting air bearing group and the mutual relations among other parts of the system mechanical structure scheme model, and assembling to obtain the system scheme unified model at the current stage.

And the basic model checking and time domain and frequency domain analysis functions of the system model assembly platform are utilized to check and perform basic time domain and frequency domain analysis on the unified model of the system scheme, so that the model is ensured to be correct.

And (4): and (4) opening a system model simulator by a designer through a flow control and data manager, and loading the system scheme model assembled in the step (3). A designer enters a simulation test management center through a system model simulator, finds a corresponding system performance simulation test module for dynamic characteristic test according to the structural type of the H-shaped ultra-precision motion system, and selects the system performance simulation test module, so that the system model simulator can generate a corresponding simulation test setting interface. A designer refers to design data about system scheme dynamic performance tests of corresponding structure types in a guidance interface of a process control and data manager, and simulation test settings such as excitation and disturbance input channels, structural vibration observation output channels, excitation signals, disturbance signals and the like are defined in a simulation test setting interface.

After the simulation test setting is completed, a designer starts simulation, a system model simulator can automatically select and configure a solver, the system scheme model and the simulation test setting are converted into input data required by the solver together, the solver is driven to complete the simulation test of the dynamic characteristic test of the system scheme model, and an original result of simulation calculation is output.

And (5): a designer opens a post-processing analysis guidance interface in the process control and data manager, and searches and refers to post-processing analysis related data such as dynamic characteristic analysis key points, evaluation criteria and the like according to the structural type, design requirements and use working conditions of the H-shaped ultra-precision motion system.

And (4) loading the system simulation calculation original result of the dynamic characteristic test output in the step (4) into the post-processing analysis tool set by a designer, selecting a system dynamic characteristic test analysis type, and automatically switching the post-processing analysis tool set to a corresponding analysis interface. Then, under the analysis interface of the post-processing analyzer, a designer analyzes the structural modal characteristics of the system scheme, the mechanical transfer function of the main moving part, the sensitivity of the key part to typical disturbance and other dynamic characteristics, and displays analysis result data and curves.

If the analysis result of the system dynamics characteristic is not acceptable, a designer can search and refer to the design guidance interface of the flow control and data manager to diagnose and modify the related design data of the detailed scheme design of the ultra-precise motion system (such as failure cases of the detailed design scheme design of the system, diagnosis experience and method of the reason of the design failure, design feature sensitivity analysis key points of system schemes with different structural configurations, modification key points of a typical system scheme design failure mode and the like), modify the feature design of the support and guide air bearing set, or modify the system structural scheme again.

And (6): according to the steps (2.1) - (5), completing the characteristic design of other key components and subsystems such as a driving motor, a flexible connection, a measuring system, a control strategy, a vibration damping device and the like, generating corresponding equivalent models, assembling to obtain a complete system scheme model, and thus completing the primary scheme design of the system.

And (7): and (4) opening a system model simulator by the designer, and loading the system detailed scheme model obtained in the step (6). According to the design requirements and the use working conditions of the H-shaped ultra-precision motion system, a designer refers to relevant data of a motion precision performance simulation test under corresponding typical working conditions in a process control and data manager; entering a simulation test management center through a system model simulator, and selecting a corresponding system performance simulation test module of the planar motion of the typical working condition of the H-shaped ultra-precision motion system according to design requirements and use working conditions; and defining displacement input signals and typical disturbance input signals of different directions of input and output channels and plane motion of a simulation test in a simulation test setting interface of the system model simulator, and setting a solver and simulation test configuration.

A designer starts simulation, a system model simulator can automatically select and drive a solver to complete a typical working condition plane motion simulation test of a system scheme model, and an original result of simulation calculation is output.

And (8): a designer opens a post-processing analysis guidance interface in the process control and data manager, searches relevant data of post-processing analysis according to the design requirement and the use working condition of the H-shaped ultra-precision motion system, and determines main performance indexes and analysis methods to be analyzed.

And (4) loading the system simulation calculation original result of the typical working condition plane motion output in the step (7) into a post-processing analysis tool set by a designer, and selecting a motion control time domain simulation analysis type. Then, under an analysis interface of a post-processing analysis tool set, a designer analyzes motion precision performance indexes such as motion error mean values of all directions, motion control stabilization time, control error windows and the like of a detailed scheme of the system, displays analysis result data and curves, and displays a motion trail diagram of the detailed scheme of the system under a typical plane motion working condition.

And (9): if the analysis result of the step (8) does not meet the design requirement of the ultra-precise motion system, referring to design data related to the detailed scheme design diagnosis and modification of the ultra-precise motion system in a guidance interface of a process control and data manager, and determining a modification scheme of the component and the subsystem; and (3) returning to the step (1) or (2), and modifying the characteristic design of components and subsystems such as an air floatation support, a driving motor, a flexible connection device, a damping device and the like or the structural scheme design of an ultra-precise motion system.

Step (10): and (5) if the component and system schemes need to be further improved, returning to the steps (2) to (8), adding or refining components such as an air floatation support, a driving motor, a flexible connection device and a damping device and analyzing whether the characteristic design of the whole system meets the improvement requirement.

It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims

1. A design method for a detailed scheme of a dynamically driven ultra-precise motion system is characterized by comprising a concept design stage and an assembly and system design stage, wherein in any specific stage, the dynamic characteristics of the ultra-precise motion system must meet corresponding design requirements, wherein:

in the concept design stage, the dynamic characteristic analysis is carried out on the structural scheme of the ultra-precise motion system, the analysis result is judged, and the component and system design can be carried out only when the analysis result meets the design requirement of the ultra-precise motion system; in the component and system design stage, aiming at the design and modification of each or each group of key components and/or system schemes in the ultra-precise motion system, corresponding dynamic modeling, simulation and analysis are required to be carried out on the key components and the system schemes in time, the analysis result is judged, and if the analysis result does not meet the design requirement of the ultra-precise motion system, the design of the key components and/or the system schemes is modified and the judgment is carried out again; and if and only if the judgment results of the current key component and the system scheme meet the requirements at the same time, entering the design stage of the next key component until the whole system scheme and the design of all the key components are finished, and finally obtaining a detailed scheme.

2. A method of designing a detailed layout of a kinematically driven ultra-precision kinematic system according to claim 1, comprising the steps of:

(1) according to the design task target of the ultra-precise motion system, referring to the existing detailed scheme design example of the system, completing concept design, calling a corresponding model template, inputting design parameters, obtaining a structural scheme model of the ultra-precise motion system, and carrying out dynamic characteristic analysis; if the analysis result does not meet the design requirement of the ultra-precise motion system, correspondingly modifying the structural scheme model of the ultra-precise motion system;

(2) selecting one or a group of key components or subsystems from the structural scheme of the ultra-precise motion system, referring to or reusing the existing key component or subsystem design examples to complete the characteristic design of the key components or subsystems, selecting corresponding model templates, inputting the types, working condition parameters, structural characteristic parameters and performance characteristic data of the key components or subsystems, and generating equivalent models of the key components or subsystems; if the performance characteristic data can not be directly determined, a flow guide can be provided to guide a user to call a corresponding parametric analysis function according to the input working condition parameters and structural characteristic parameters of the key component or the subsystem according to specific steps to perform dynamic characteristic analysis so as to obtain the performance characteristic data;

3. The design method of a detailed scheme of a kinematically driven ultra-precision motion system as claimed in claim 2, wherein the control guidance scheme of the whole process and the related design data and corresponding tools are designed in advance, and in steps (1) - (6), according to the current ultra-precision motion system design process stage, the designer can obtain the control guidance of the corresponding process and the support of the related design data and corresponding tools when performing modeling, simulation and analysis operations of key components, subsystems and/or system schemes.

4. A detailed scheme design method of a dynamically driven ultra-precise motion system as claimed in any one of claims 1 to 3, wherein the key components comprise an air bearing, a motion guide rail, a driving motor, a vibration damping device, a flexible mechanism, a measuring device and a motion control module; the subsystem comprises a system with specific functions and a space architecture of hardware thereof, wherein the system is formed by combining all key components according to a preset combination relation;

the model template takes the design characteristics and performance characteristics of the ultra-precise motion system and key components, subsystems and/or detailed system schemes thereof as input and is used for automatically generating equivalent models of the key components, subsystems and/or detailed system schemes;

the model templates of the key components and the subsystems also provide flow guidance aiming at the condition that the performance characteristics can not be directly determined, and call corresponding parametric analysis functions according to the working condition parameters and the structural characteristic parameters for automatically analyzing the performance characteristics of the key components and the subsystem design examples.

5. A design system of a detailed scheme of a kinematically-driven ultra-precise motion system, which is used for providing tool support for the design method of the detailed scheme of the kinematically-driven ultra-precise motion system as claimed in any one of claims 1 to 4, and is characterized by comprising: a control layer and a tool layer;

the control layer comprises a flow control and data manager;

6. A kinematically driven ultra-precision kinematic system design detailed system as claimed in claim 5,

an example data management center, a template creator, a model generator and a system model assembling platform in the tool layer are used for providing tool support for constructing a detailed scheme model of the ultra-precise motion system;

the model generator calls a model template of the key component, the subsystem and/or the detailed system scheme from the template management center, extracts design examples and/or product data of the corresponding key component, subsystem and/or the detailed system scheme from the example data management center, inputs design characteristic parameters and performance characteristic data in the design examples and/or product data into the model template, generates an equivalent model of the key component, the subsystem and/or the detailed system scheme, and outputs the equivalent model to the system model assembly platform;

the model generator is also used for extracting and loading the design characteristics and performance characteristic data of the key components and/or subsystems from the outside as input data of the model template so as to generate an equivalent model.

7. The design system of a dynamics-driven ultra-precise motion system detailed scheme as claimed in claim 5, wherein the system model assembly platform comprises a basic component model of a subject involved in the ultra-precise motion system, and is used for combining an equivalent model of the ultra-precise motion system and its key components and/or subsystems, and a required basic component model, so as to construct a unified model of the design scheme of the ultra-precise motion system, and realize modeling of the ultra-precise motion system;

the unified model of the design scheme of the ultra-precise motion system comprises the design characteristics, performance characteristics and mutual relations of all key components and/or subsystems in the system design scheme of the ultra-precise motion system.

8. A kinematically driven ultra-precision kinematic system design detailed scheme according to any one of claims 5 to 7,

the simulation test management center, the solver and the system model simulator in the tool layer are used for providing tool support for carrying out the detailed scheme model simulation test of the ultra-precise motion system;

9. A kinematically driven ultra-precision kinematic system design detailed scheme according to any one of claims 5 to 7,

the post-processing analysis tool set is used for taking a simulation result output by the system model simulator as input, calling a corresponding post-processing analysis tool according to the selected system performance simulation test module, analyzing the dynamic characteristics and the dynamic performance characteristics of the corresponding ultra-precision motion system, outputting an analysis result and providing tool support for analyzing the dynamic characteristics and the dynamic performance characteristics of the detailed scheme of the ultra-precision motion system.