CN108911343A - Polysilicon zero emission method of wastewater and system - Google Patents
Polysilicon zero emission method of wastewater and system Download PDFInfo
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- CN108911343A CN108911343A CN201811019411.XA CN201811019411A CN108911343A CN 108911343 A CN108911343 A CN 108911343A CN 201811019411 A CN201811019411 A CN 201811019411A CN 108911343 A CN108911343 A CN 108911343A
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F9/00—Multistage treatment of water, waste water or sewage
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/001—Processes for the treatment of water whereby the filtration technique is of importance
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/02—Treatment of water, waste water, or sewage by heating
- C02F1/04—Treatment of water, waste water, or sewage by heating by distillation or evaporation
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/24—Treatment of water, waste water, or sewage by flotation
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/441—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by reverse osmosis
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/44—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis
- C02F1/444—Treatment of water, waste water, or sewage by dialysis, osmosis or reverse osmosis by ultrafiltration or microfiltration
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/52—Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/66—Treatment of water, waste water, or sewage by neutralisation; pH adjustment
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F2001/007—Processes including a sedimentation step
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2301/00—General aspects of water treatment
- C02F2301/08—Multistage treatments, e.g. repetition of the same process step under different conditions
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- Hydrology & Water Resources (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
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- Organic Chemistry (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The invention discloses a kind of polysilicon zero emission method of wastewater and systems.This approach includes the following steps:A. the acid waste water from cooling tower and the not chloride ion-containing of after-treatment system neutralized, settled, clarified and obtain clarified wastewater;B. clarified wastewater is filtered, it is reverse osmosis after obtain product water;C. product water sends cooling tower back to as supplement water;D. the acid waste water of the chloride ion-containing from production system neutralized, settled, clarify obtain clarification recycle-water;E. clarification recycle-water is sent to production system recycling, and carries out evaporating, concentrating and crystallizing after it absorbs chloride ion saturation and obtain solid calcium chloride;Evaporation condensed water is sent to cooling tower as supplement water;F. the concentrated water for obtaining reverse osmosis generation in step C is sent to production system and is used to dissolve waste residue, absorption exhaust gas.Realize waste water closed-loop process, zero-emission.Entire processing system to surrounding enviroment pollute small, water usage relative to greatly reduce before, processing cost is greatly reduced.
Description
Technical field
The present invention relates to a kind of processing systems of waste water in polysilicon production process.
Background technique
Polysilicon is a kind of form of elemental silicon.When the elemental silicon of melting solidifies under the conditions of supercooling, silicon atom is with Buddha's warrior attendant
Stone lattice morphologic arrangement grows up to the different crystal grain of high preferred orientation at many nucleus, such as these nucleus, then these crystal grain combine,
Just crystallize into polysilicon.
The waste water generated in polysilicon production process can be divided into two parts:The acid waste water of chloride ion-containing and not chloride ion-containing
Acid waste water.
The acid waste water of chloride ion-containing is not mainly derived from:(recirculated water cycles of concentration is 5 to closed cooling tower system sewerage
Again), the nitric acid waste water of post-processing cleaning product.The wastewater source of chloride ion-containing in:The chloride ion-containing generated in production process
Waste residue absorbs the acid for the chloride ion-containing to be formed by the hydrogen chloride, the chlorosilane exhaust gas that generate in water dissolution and production process by water
Property waste water.
Existing chloride ion-containing wastewater treatment mode has three ways, such as following:
1, evaporation process (seriously polluted to surrounding enviroment) by way of evaporating brine.
2, it is diluted with a large amount of industry waters, reaches direct outlet after national emission standard.(waste great lot of water resources)
3, it send to professional sewage treatment plant and carries out purified treatment (cost is excessively high)
Without chlorine ion wastewater processing mode:Reach direct emission after national emission standard after neutralizing, purifying.
It can be seen that either the excessively high either secondary pollution of cost is serious or serious waste for the mode of above-mentioned processing waste water
Water resource.Therefore it is badly in need of a kind of wastewater treatment mode low in cost, environmental pollution is small.
Summary of the invention
In view of this, the present invention provides a kind of polysilicon zero emission method of wastewater and system, it will be in polysilicon production process
The acid waste water of the chloride ion-containing of generation and not chloride ion-containing is recycled after handling respectively, so that wastewater zero discharge.
In order to solve the above technical problems, the technical scheme is that:A kind of polysilicon zero emission method of wastewater, including not
The acid waste water processing of chloride ion-containing and the acid waste water of chloride ion-containing are handled;
The acid waste water processing of the not chloride ion-containing includes the following steps:
Step A. neutralizes the acid waste water from cooling tower and the not chloride ion-containing of after-treatment system, is settled, clear
Clarified wastewater is obtained clearly;
Step B. is filtered clarified wastewater, it is reverse osmosis after obtain product water;
Step C. product water sends cooling tower back to as supplement water;
The acid waste water processing of chloride ion-containing includes the following steps:
Step D. neutralizes the acid waste water of the chloride ion-containing from production system, settled, clarifies and obtains clarifying back
Use water;
Step E. clarification recycle-water be sent to production system recycling, and its absorb chloride ion saturation after be evaporated it is dense
Sheepshank crystalline substance obtains solid calcium chloride;Evaporation condensed water is sent to cooling tower as supplement water;
The concentrated water that reverse osmosis generation is obtained in step C is sent to production system and is used to dissolve waste residue, absorption exhaust gas by step F..
As an improvement being neutralized in step A using highly basic, the highly basic is sodium hydroxide, potassium hydroxide, lime
One or more of cream;Flocculant is added after neutralization to be settled.
As an improvement carrying out multi-filtering using more medium filter and ultrafiltration apparatus in step B.
As a preference, being neutralized in step D using highly basic, the highly basic is sodium hydroxide, potassium hydroxide, lime
One or more of cream;Flocculant is added after neutralization to be settled.
The present invention also provides a kind of polysilicon wastewater zero discharge system, the acid waste water processing system including not chloride ion-containing
With the acid waste water processing system of chloride ion-containing;
The acid waste water processing system of the not chloride ion-containing includes sequentially connected sewage disposal system I, Treated sewage reusing
System;The sewage disposal system I includes sequentially connected neutralization reactor, sedimentation device, air-floating apparatus;The Treated sewage reusing
System includes sequentially connected more medium filter, ultrafiltration apparatus, reverse osmosis unit;The intermediate water reuse system and cooling tower it
Between be provided with return pipe I;
The acid waste water processing system of the chloride ion-containing includes that sequentially connected sewage disposal system II, high-salt wastewater are dense
Compression system;The sewage disposal system II includes sequentially connected neutralization reactor, sedimentation device, air-floating apparatus;It is described with high salt
Waste water concentrating system includes sequentially connected MVR enrichment facility, triple effect concentration and crystallization device;The sewage disposal system II processing
Return pipe II is provided between production system;Return pipe III is provided between the high-salt wastewater concentration systems and cooling tower;
Concentrated water delivery pipe is provided in the intermediate water reuse system between reverse osmosis unit and production system.
As an improvement further including adding highly basic and be that sedimentation device adds for reactor in the sewage disposal system I
Add the chemicals dosing plant of flocculant.
As an improvement further including adding highly basic and be that sedimentation device adds for reactor in the sewage disposal system II
Add the chemicals dosing plant of flocculant.
As an improvement the return pipe I is connected with return pipe II.Since return pipe I is sensible cold with return pipe II
But tower, therefore return pipe I can be connected with return pipe II to save pipe arrangement.
As an improvement be provided with pretreatment unit before the MVR enrichment facility, the pretreatment unit include according to
Highly effective reaction clarifying basin, decarbonizer, the filter of secondary connection.
The invention has the beneficial effects that:The method of polysilicon wastewater zero discharge with above-mentioned steps and above structure and
System is recycled again after by chloride ion-containing and the acid waste water of chloride ion-containing is not handled respectively, especially not chloride ion-containing acid
Property waste water treatment system in concentrated water be sent to again production system for dissolve waste residue, absorb exhaust gas, be greatly saved dissolution waste residue,
The raw material of exhaust gas is absorbed, while solving the problems, such as the processing of concentrated water, so that the waste water that each system generates can be recycled, very
Just accomplishing waste water closed-loop process, zero-emission.Entire processing system pollutes small, water usage relative to before to surrounding enviroment
Greatly reduce, processing cost is greatly reduced.
Detailed description of the invention
Fig. 1 is flow chart of the invention.
Fig. 2 is structural schematic diagram of the invention.
Specific embodiment
In order to make those skilled in the art more fully understand technical solution of the present invention, With reference to embodiment
The present invention is described in further detail.
As shown in Figure 1, the present invention provides a kind of polysilicon zero emission method of wastewater, the acid waste water including not chloride ion-containing
The acid waste water of processing and chloride ion-containing is handled;
The acid waste water processing of the not chloride ion-containing includes the following steps:
Step A. neutralizes the acid waste water from cooling tower and the not chloride ion-containing of after-treatment system, is settled, clear
Clarified wastewater is obtained clearly;Neutralized using highly basic, the highly basic be one of sodium hydroxide, potassium hydroxide, milk of lime or
It is several;Flocculant is added after neutralization to be settled, flocculant PAC, PAM.
Step B. is filtered clarified wastewater, it is reverse osmosis after obtain product water;It preferably utilizes more medium filter and surpasses
It filters device and carries out multi-filtering.
Step C. product water sends cooling tower back to as supplement water;
The acid waste water processing of chloride ion-containing includes the following steps:
Step D. neutralizes the acid waste water of the chloride ion-containing from production system, settled, clarifies and obtains clarifying back
Use water;It is neutralized using highly basic, the highly basic is one or more of sodium hydroxide, potassium hydroxide, milk of lime;After neutralization
Flocculant is added to be settled, flocculant PAC, PAM.
Step E. clarification recycle-water be sent to production system recycling, and its absorb chloride ion saturation after be evaporated it is dense
Sheepshank crystalline substance obtains solid calcium chloride;Evaporation condensed water is sent to cooling tower as supplement water;
The concentrated water that reverse osmosis generation is obtained in step C is sent to production system and is used to dissolve waste residue, absorption exhaust gas by step F..
As shown in Fig. 2, the present invention also provides a kind of polysilicon wastewater zero discharge system, the spent acidic including not chloride ion-containing
The acid waste water processing system of water treatment system and chloride ion-containing;
The acid waste water processing system of the not chloride ion-containing includes sequentially connected sewage disposal system I, Treated sewage reusing
System;The sewage disposal system I includes sequentially connected neutralization reactor, sedimentation device, air-floating apparatus;The sewage treatment
It further include the chemicals dosing plant for adding highly basic for reactor and being sedimentation device addition flocculant in system I.The Treated sewage reusing system
System includes sequentially connected more medium filter, ultrafiltration apparatus, reverse osmosis unit;Between the intermediate water reuse system and cooling tower
It is provided with return pipe I;
The acid waste water processing system of the chloride ion-containing includes that sequentially connected sewage disposal system II, high-salt wastewater are dense
Compression system;The sewage disposal system II includes sequentially connected neutralization reactor, sedimentation device, air-floating apparatus;The sewage
It further include the chemicals dosing plant for adding highly basic for reactor and being sedimentation device addition flocculant in processing system I.It is described with high salt useless
Water concentration systems include sequentially connected MVR enrichment facility, triple effect concentration and crystallization device;It is arranged before the MVR enrichment facility
There is pretreatment unit, the pretreatment unit includes sequentially connected highly effective reaction clarifying basin, decarbonizer, filter.The dirt
Return pipe II is provided between water treatment system II processing and production system;Between the high-salt wastewater concentration systems and cooling tower
It is provided with return pipe III;Return pipe I is connected with return pipe II.
Concentrated water delivery pipe is provided in the intermediate water reuse system between reverse osmosis unit and production system.
Neutralization reactor is a kind of device for carrying out acid-base neutralization reaction, and in the present invention, chemicals dosing plant is neutralization reaction
The acid that device is added in highly basic, with acid waste water carries out neutralization reaction.
Sedimentation device is a kind of device for carrying out flocculation sedimentation.Flocculation sedimentation is the mistake that particulate matter makees flocculation sedimentation in water
Journey.After adding flocculant in waste water water, wherein the colloid of suspended matter and discrete particles generate under the interaction of molecular force
Flock and they collide with each other cohesion in infall process, size and quality constantly become larger, and settling velocity is continuously increased.
Air-floating apparatus is to be passed through air in water in the form of micro-bubble, keeps the particle to suspend in micro-bubble and water viscous
It is attached, water-gas-particle three-phase mixed system is formed, after particle adheres to bubble, density is less than the i.e. upper floatation surface of water, forms dross
Layer, is separated from the water away.
More medium filter is that the higher water of turbidity is passed through under pressure using one or more of filter mediums
Certain thickness granular or non-grain material, so that effectively removing suspended impurity makes the process of clarification of water, common filtrate has stone
Sand, anthracite, manganese sand etc. are mainly used for water process turbidity removal, and softened water, prime pretreatment of pure water etc., delivery turbidity is up to 3
Below degree.
Ultrafiltration apparatus is that is, under pressure a kind of pressurization membrane separation technique passes through small molecule solute and solvent
The special film of certain pore size, and macromolecular solute is prevented one side of film to be stayed in, so that macromolecular substances be made to obtain from penetrating
The purifying of part.
Reverse osmosis unit is that raw water is passed through to fine filter, seed activity carbon filter, compression charcoal filter etc.,
It is 1/10000 μm (be equivalent to the 1/6000 of Escherichia coli size, viral 1/300) anti-using aperture again by pump pressurization
Permeable membrane (RO film) makes the water of higher concentration become low concentration of water, while industrial pollutants, heavy metal, bacterium, virus etc. is big
The impurity being mixed into water is measured all to be isolated.
MVR evaporator is a kind of novel high-efficiency and energy-saving evaporation equipment for being mainly used in pharmaceutical industry, and the equipment is using low
Temperature is that the energy generates steam with low-pressure steam steaming technique and clean energy resource, and the water in medium is separated, and is current international advanced
Evaporation technique, be substitute conventional evaporator upgraded product.
Triple effect concentration and crystallization device is a kind of extraction concentrator, using the hot working principle of shell and tube circulation, external, physics
Heated time is short, evaporation rate is fast, cocnentration factor is great, effectively keeps material original effect, energy-saving effect is significant, is suitable for making extensively
The evaporating and concentrating process process of the liquid material of medicine, chemical industry, food, light industry etc..
Industrial water station is cooling tower, after-treatment system, production system provide industrial water.Industrial water meets National Industrial
Water quality standard is produced, rate of water make-up respectively may be about:360m3/h、40m3/h、60m3/h.Cooling tower provides cooling capacity for whole system, is transporting
A large amount of water can be evaporated in capable process, while can continuously generate out waste water.Cooling tower blowdown water turbidity about 1500NTU, conductance:
6000μs/cm;PH=9, flow 90m3/h.After-treatment system contains nitric acid, solid silicon in sewerage for cleaning product
Equal substances.After-treatment system sewerage PH=1, flow 40m3/h.Production system generates waste residue, exhaust gas containing chlorine, passes through water
It dissolves and absorbs, generates waste water PH ≈ 1 of the acidity containing chlorine.
Cooling tower sewerage and after-treatment system sewerage converge rear PH=3~4, flow 130m3/ h, by sewage treatment system
System I is neutralized, is obtained PH=6~9, suspended matter < 70 μ g/L, flow 130m after flocculating setting, air float3The clarification of/h
Waste water.
Clarified wastewater carries out multi-filtering through more medium filter, ultrafiltration apparatus, most afterwards after reverse osmosis unit refilters
It obtains PH ≈ 7, water quality and produces water quality standard, flow 85m better than National Industrial3The product water of/h.Product water passes through return pipe I loopback
Moisturizing is carried out to cooling tower.
Production system waste water PH < 1, chlorine ion concentration are 10000mg/L to 50000mg/L.Flow is 120m3/ h, by dirt
Water treatment system II is neutralized, is obtained PH=6~9, suspended matter < 70 μ g/L, flow 60m after flocculating setting, air float3/
The clarification recycle-water of h.Clarification recycle-water is transmitted back to production system for dissolving waste residue, absorbing exhaust gas by return pipe II.When in water
Chlorine ion concentration reach a certain height after (30000ppm), and the ability for absorbing chlorine ion concentration reduces, then requires supplementation with fresh water.
At this point, the flow 45m that reverse osmosis unit is generated3/ h, PH ≈ 8~9 add to production system for dissolving waste residue, absorbing and give up
Gas.Feeding high-salt wastewater concentration systems are evaporated condensing crystallizing after clarification recycle-water absorbs chloride ion saturation, obtain solid four
Water calcium chloride.The evaporative condenser water flow 55m that evaporative crystallization generates3/ L, impurity content is very low, produces water gauge better than National Industrial
Standard is recycled to cooling tower moisturizing using return pipe III.
The above is only the preferred embodiment of the present invention, it is noted that above-mentioned preferred embodiment is not construed as pair
Limitation of the invention, protection scope of the present invention should be defined by the scope defined by the claims..For the art
For those of ordinary skill, without departing from the spirit and scope of the present invention, several improvements and modifications can also be made, these change
It also should be regarded as protection scope of the present invention into retouching.
Claims (9)
1. a kind of polysilicon zero emission method of wastewater, the spent acidic of acid waste water processing and chloride ion-containing including not chloride ion-containing
Water process;It is characterized in that, the acid waste water processing of the not chloride ion-containing includes the following steps:
Step A. neutralizes the acid waste water from cooling tower and the not chloride ion-containing of after-treatment system, is settled, is clarified
To clarified wastewater;
Step B. is filtered clarified wastewater, it is reverse osmosis after obtain product water;
Step C. product water sends cooling tower back to as supplement water;
The acid waste water processing of chloride ion-containing includes the following steps:
Step D. neutralizes the acid waste water of the chloride ion-containing from production system, settled, clarifies and obtains clarification recycle-water;
Step E. clarification recycle-water is sent to production system recycling, and carries out evaporation and concentration knot after it absorbs chloride ion saturation
Crystalline substance obtains solid calcium chloride;Evaporation condensed water is sent to cooling tower as supplement water;
The concentrated water that reverse osmosis generation is obtained in step C is sent to production system and is used to dissolve waste residue, absorption exhaust gas by step F..
2. a kind of polysilicon zero emission method of wastewater according to claim 1, it is characterised in that in step A using highly basic into
Row neutralizes, and the highly basic is one or more of sodium hydroxide, potassium hydroxide, milk of lime;Flocculant is added after neutralization to carry out
Sedimentation.
3. a kind of polysilicon zero emission method of wastewater according to claim 1, it is characterised in that utilize multimedium in step B
Filter and ultrafiltration apparatus carry out multi-filtering.
4. a kind of polysilicon zero emission method of wastewater according to claim 1, it is characterised in that in step D using highly basic into
Row neutralizes, and the highly basic is one or more of sodium hydroxide, potassium hydroxide, milk of lime;Flocculant is added after neutralization to carry out
Sedimentation.
5. a kind of polysilicon wastewater zero discharge system, including the acid waste water processing system of not chloride ion-containing and the acid of chloride ion-containing
Property waste water treatment system;It is characterized in that:
The acid waste water processing system of the not chloride ion-containing includes sequentially connected sewage disposal system I, intermediate water reuse system;
The sewage disposal system I includes sequentially connected neutralization reactor, sedimentation device, air-floating apparatus;The intermediate water reuse system
Including sequentially connected more medium filter, ultrafiltration apparatus, reverse osmosis unit;It is set between the intermediate water reuse system and cooling tower
It is equipped with return pipe I;
The acid waste water processing system of the chloride ion-containing includes sequentially connected sewage disposal system II, high-salt wastewater concentration system
System;The sewage disposal system II includes sequentially connected neutralization reactor, sedimentation device, air-floating apparatus;The high-salt wastewater
Concentration systems include sequentially connected MVR enrichment facility, triple effect concentration and crystallization device;The sewage disposal system II processing and life
Return pipe II is provided between production system;Return pipe III is provided between the high-salt wastewater concentration systems and cooling tower;
Concentrated water delivery pipe is provided in the intermediate water reuse system between reverse osmosis unit and production system.
6. a kind of polysilicon wastewater zero discharge system according to claim 5, it is characterised in that:The sewage disposal system
It further include the chemicals dosing plant for adding highly basic for reactor and being sedimentation device addition flocculant in I.
7. a kind of polysilicon wastewater zero discharge system according to claim 5, it is characterised in that:The sewage disposal system
It further include the chemicals dosing plant for adding highly basic for reactor and being sedimentation device addition flocculant in II.
8. a kind of polysilicon wastewater zero discharge system according to claim 5, it is characterised in that:The return pipe I and return
Water pipe II is connected.
9. a kind of polysilicon wastewater zero discharge system according to claim 5, it is characterised in that:The MVR enrichment facility
It is provided with pretreatment unit before, the pretreatment unit includes sequentially connected highly effective reaction clarifying basin, decarbonizer, filtering
Device.
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CN109647164A (en) * | 2018-12-28 | 2019-04-19 | 浙江天蓝环保技术股份有限公司 | A kind of sulfur removal technology and device of zero discharge waste-water |
CN110776162A (en) * | 2019-12-12 | 2020-02-11 | 石家庄良村热电有限公司 | Energy-saving flue gas condensate water recovery processing system |
CN112811721A (en) * | 2020-12-31 | 2021-05-18 | 新疆协鑫新能源材料科技有限公司 | Comprehensive water-saving production system and method for whole process of polycrystalline silicon production by GCL method |
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