CN108897086B - Enhanced aluminum film gradient neutral density filter and manufacturing method thereof - Google Patents
Enhanced aluminum film gradient neutral density filter and manufacturing method thereof Download PDFInfo
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- CN108897086B CN108897086B CN201810913568.0A CN201810913568A CN108897086B CN 108897086 B CN108897086 B CN 108897086B CN 201810913568 A CN201810913568 A CN 201810913568A CN 108897086 B CN108897086 B CN 108897086B
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- aluminum film
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/205—Neutral density filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
Abstract
The invention belongs to the field of stage lighting accessories, and particularly relates to an enhanced aluminum film gradient neutral density optical filter and a manufacturing method thereof, wherein the enhanced aluminum film gradient neutral density optical filter comprises a substrate (1); one side of the substrate (1) is plated with a reinforced aluminum film (2); etching a hollow pattern which enables the luminous flux to continuously change along with the position on the reinforced aluminum film (2); the film system structure of the reinforced aluminum film (2) is as follows: al (Al)2O3‑Al‑SiO2‑Ta2O5‑SiO2‑Ta2O5(ii) a The substrate (1) is made of quartz glass or high borosilicate glass. The film is firm and firm, can resist high temperature and strong light, has continuously changed luminous flux and uniform and fine emergent light.
Description
Technical Field
The invention belongs to the field of stage lighting accessories, and particularly relates to an enhanced aluminum film gradient neutral density optical filter and a manufacturing method thereof.
Background
The stage lighting is also called as 'stage lighting', and is one of the means of stage art modeling. The stage lighting is a photoelectric integrated lighting device, and can realize various lighting effects such as brightness, light color, lighting patterns, dynamic swinging, flickering and the like.
The stage lighting generally adopts high-power xenon lamps, metal halide lamps, fluorescent lamps, halogen tungsten lamps (halogen lamps), aluminum vapor bulbs, incandescent lamps and the like as light sources. The light source is generally always lighted in the using process and is not frequently switched on and off, on one hand, the light source needs a long time from lighting to reaching the target lighting effect, and if the light source is frequently switched on and off, the lighting effect is influenced; another aspect is that frequent switching of the light source reduces the lifetime of the light source.
The stage lighting can realize various lighting effects, one lighting effect is gradual change of brightness, and the other lighting effect is flickering irradiation. For high-power stage lighting, because the light source is normally bright, dimming is generally performed by a mechanical method, which requires the use of a gradual attenuation sheet. The white part of the gradual attenuation piece is light-transmitting, the black part of the gradual attenuation piece is light-proof, and the light-transmitting area can be changed by changing the position of the gradual attenuation piece, so that the luminous flux is changed.
The neutral density filter can be used for realizing the continuous change of the luminous flux, but the neutral density filter has strong absorption effect on light, and the light damage threshold value is low. Stage lighting belongs to a strong light source, and the light damage threshold far exceeding the light damage threshold of the neutral density filter can cause permanent damage to the film layer, so the neutral density filter is not suitable for the stage lighting.
The gradual attenuation sheet is usually manufactured by processing a metal plate in the industry, and the metal plate is thick enough and can resist high temperature and strong light irradiation. However, the gradual attenuation sheet manufactured by the method has two disadvantages: firstly, the resolution is low and the emergent light source is not uniform due to the limitation of the machining capacity; and secondly, the attenuation sheet is generally manufactured in a mode of punching or slot hollowing, and the intensity is gradually reduced along with the increase of the light transmission amount, so that the attenuation sheet is easy to damage.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides the enhanced aluminum film gradient neutral density optical filter which has a simple structure, is firm and firm in film, can resist high-temperature and strong light, has continuously-changed film luminous flux and uniform and fine emergent light and the manufacturing method thereof.
In order to solve the technical problem, the invention is realized as follows:
an enhanced aluminum thin film gradient neutral density filter comprises a substrate; one side of the substrate is plated with an enhanced aluminum film; and etching a hollow pattern which enables the light transmission quantity to continuously change along with the position on the reinforced aluminum film.
As a preferable scheme, the film system structure of the reinforced aluminum film of the present invention is: al (Al)2O3-Al-SiO2-Ta2O5-SiO2-Ta2O5。
Further, the substrate of the present invention may be made of quartz glass or high borosilicate glass.
The manufacturing method of the enhanced aluminum film gradient neutral density filter can be carried out according to the following steps:
(1) quartz glass or high borosilicate glass is selected as a substrate;
(2) plating an enhanced aluminum film on the substrate; the film system structure of the reinforced aluminum film is as follows: al (Al)2O3-Al-SiO2-Ta2O5-SiO2-Ta2O5；
(3) The light flux of the film is continuously changed by adopting a nonlinear ultra-dense photoetching process.
The film is firm and firm, can resist high temperature and strong light, has continuously changed luminous flux and uniform and fine emergent light. The gradually-changed neutral density sheet of the enhanced aluminum film is plated with the enhanced aluminum film with enough thickness on the glass substrate, and then the pattern with continuously-changed luminous flux is etched by adopting the photoetching process, thereby realizing the adjustment of light. Because the aluminum film has high reflectivity to all wave bands (200-12000 nm), the film layer has small absorption and can resist the irradiation of high-temperature strong light.
The average reflectivity of one side of the enhanced aluminum film is more than or equal to 93% between 400 and 700nm, and the absolute reflectivity is more than or equal to 70% between 300 and 380 nm; the absolute reflectivity of one side of the substrate is more than or equal to 80% between 360 nm and 700 nm; the optical density of the reinforced aluminum film is more than or equal to OD6 within 350-700 nm. The optical density of the optical filter changes linearly with the angle after photoetching.
Drawings
The invention is further described with reference to the following figures and detailed description. The scope of the invention is not limited to the following expressions.
Fig. 1 is a schematic view of the overall structure of the present invention.
FIG. 2 is a photograph of a sample of the present invention.
FIG. 3 is a schematic view of the reflectivity of one side of an enhanced aluminum film according to the present invention.
FIG. 4 is a schematic diagram of the reflectivity of one side of the substrate according to the present invention.
FIG. 5 is a schematic diagram of optical density of an enhanced aluminum film according to the present invention.
In the figure: 1. a substrate; 2. reinforcing the aluminum film; 201. al (Al)2O3A film layer; 202. an Al film layer; 203. SiO 22A film layer; 204. ta2O5A film layer; 205. SiO 22A film layer; 206. ta2O5And (5) film layer.
Detailed Description
As shown in fig. 1, the enhanced aluminum thin film graded neutral density filter comprises a substrate 1; one side of the substrate 1 is plated with an enhanced aluminum film 2; and etching a hollow pattern which enables the luminous flux to continuously change along with the position on the reinforced aluminum film 2.
The film system structure of the reinforced aluminum film 2 is as follows. Al (Al)2O3-Al-SiO2-Ta2O5-SiO2-Ta2O5。
The substrate 1 of the enhanced aluminum film gradient neutral density filter adopts quartz glass or high borosilicate glass.
The manufacturing method of the enhanced aluminum film gradient neutral density filter comprises the following steps:
(1) quartz glass or high borosilicate glass is selected as a substrate;
(2) plating an enhanced aluminum film on the substrate; the film system structure of the reinforced aluminum film is as follows: al (Al)2O3-Al-SiO2-Ta2O5-SiO2-Ta2O5；
(3) The light flux of the film is continuously changed by adopting a nonlinear ultra-dense photoetching process.
Example 1
Plated reinforced aluminium film
Substrate: quartz glass or high borosilicate glass
A medium material: ta2O5、Al2O3、SiO2
Metal material: al (Al)
The following film systems were plated on one side of the substrate.
The invention plates the reinforced aluminum film on the quartz glass or high borosilicate glass substrate. The invention adopts the nonlinear ultra-dense attenuation film photoetching process and the duty pattern design method with continuously changed luminous flux, so that the luminous flux of the film is continuously changed, the emergent light is uniform and fine, the film is firm and firm, and the film can resist high temperature and strong light.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (1)
1. The manufacturing method of the enhanced aluminum film gradient neutral density optical filter is characterized by comprising the following steps of:
(1) quartz glass or high borosilicate glass is selected as a substrate;
(2) plating an enhanced aluminum film on the substrate; etching a hollow pattern which enables the light transmission quantity to continuously change along with the position on the reinforced aluminum film (2); the film system structure of the reinforced aluminum film is as follows:
physical thickness of layer material
1 Al2O2 40.0nm；
2 Al 120.0nm；
3 SiO2 81.0nm；
4 Ta2O5 64.0nm；
5 SiO2 253.0nm；
6 Ta2O5 12.0nm；
(3) Adopting a nonlinear ultra-dense photoetching process to enable the luminous flux of the film to continuously change;
the average reflectivity of one side of the reinforced aluminum film (2) is more than or equal to 93% between 400 and 700nm, and the absolute reflectivity is more than or equal to 70% between 300 and 380 nm; the absolute reflectivity of one side of the substrate is more than or equal to 80% between 360 nm and 700 nm; the optical density of the enhanced aluminum film is more than or equal to OD6 within 350-700 nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810913568.0A CN108897086B (en) | 2018-08-13 | 2018-08-13 | Enhanced aluminum film gradient neutral density filter and manufacturing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810913568.0A CN108897086B (en) | 2018-08-13 | 2018-08-13 | Enhanced aluminum film gradient neutral density filter and manufacturing method thereof |
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| Publication Number | Publication Date |
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| CN108897086A CN108897086A (en) | 2018-11-27 |
| CN108897086B true CN108897086B (en) | 2022-01-04 |
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| CN201810913568.0A Active CN108897086B (en) | 2018-08-13 | 2018-08-13 | Enhanced aluminum film gradient neutral density filter and manufacturing method thereof |
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Families Citing this family (1)
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| CN109500500B (en) * | 2019-01-22 | 2020-11-20 | 沈阳仪表科学研究院有限公司 | Method for manufacturing gradually-changed neutral density optical filter |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202383316U (en) * | 2011-11-21 | 2012-08-15 | 沈阳仪表科学研究院 | Neutral density optical filter with transmissivity presenting gradual linear changes |
| CN203455504U (en) * | 2013-09-26 | 2014-02-26 | 沈阳仪表科学研究院有限公司 | Neutral density filter capable of synchronously adjusting multiple beams of energy |
| CN104297833A (en) * | 2014-11-06 | 2015-01-21 | 沈阳仪表科学研究院有限公司 | Low-reflection and neutral-density filter |
| CN105607173A (en) * | 2016-01-07 | 2016-05-25 | 西安工业大学 | Circular radial-gradient neutral density filter and preparation method and apparatus for the same |
-
2018
- 2018-08-13 CN CN201810913568.0A patent/CN108897086B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202383316U (en) * | 2011-11-21 | 2012-08-15 | 沈阳仪表科学研究院 | Neutral density optical filter with transmissivity presenting gradual linear changes |
| CN203455504U (en) * | 2013-09-26 | 2014-02-26 | 沈阳仪表科学研究院有限公司 | Neutral density filter capable of synchronously adjusting multiple beams of energy |
| CN104297833A (en) * | 2014-11-06 | 2015-01-21 | 沈阳仪表科学研究院有限公司 | Low-reflection and neutral-density filter |
| CN105607173A (en) * | 2016-01-07 | 2016-05-25 | 西安工业大学 | Circular radial-gradient neutral density filter and preparation method and apparatus for the same |
Non-Patent Citations (1)
| Title |
|---|
| 反射型可调式中性滤光片（铝膜型）;西格玛光机;《http://www.opticscn.cn/opticalelement/cn2481.html》;20170510;第1页 * |
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| CN108897086A (en) | 2018-11-27 |
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