CN108878556A - A method of preparation copper and iron selenium conductive film is assisted with selenium powder - Google Patents

A method of preparation copper and iron selenium conductive film is assisted with selenium powder Download PDF

Info

Publication number
CN108878556A
CN108878556A CN201810703712.8A CN201810703712A CN108878556A CN 108878556 A CN108878556 A CN 108878556A CN 201810703712 A CN201810703712 A CN 201810703712A CN 108878556 A CN108878556 A CN 108878556A
Authority
CN
China
Prior art keywords
film
selenium
conductive film
copper
iron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201810703712.8A
Other languages
Chinese (zh)
Inventor
刘科高
孙齐磊
荆明星
姬明
石磊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shandong Jianzhu University
Original Assignee
Shandong Jianzhu University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shandong Jianzhu University filed Critical Shandong Jianzhu University
Priority to CN201810703712.8A priority Critical patent/CN108878556A/en
Publication of CN108878556A publication Critical patent/CN108878556A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/0256Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
    • H01L31/0264Inorganic materials
    • H01L31/032Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/0248Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
    • H01L31/036Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
    • H01L31/0392Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Photovoltaic Devices (AREA)
  • Chemically Coating (AREA)

Abstract

A kind of preparation method assisting preparation copper and iron selenium conductive film with selenium powder, first cleaning glass substrate, then by CuCl2.2H2O、FeCl3.6H2O and Na2Se2O3.5H2O is sequentially placed into aqueous solvent, prepare clear transparent solutions, precursor thin-film is obtained on the glass sheet with spin-coating method, naturally dry is put into the middle layer of reaction kettle liner, while being put into selenium powder beside the sheet glass for being coated with precursor solution, the lower layer of reaction kettle liner is put into hydrazine hydrate solution, sample is taken out after closed container equipped with precursor thin-film sample is heated to be dried, and can be improved film quality by increasing reaction times and heat treatment process, be obtained copper and iron selenium conductive film.Uniformity of film made from selenium powder and crystallization, which is relatively not added, in gained copper and iron selenium conductive film to get well, and this new process provides a kind of industrialized production method at low cost, achievable to prepare high performance copper and iron selenium conductive film.

Description

A method of preparation copper and iron selenium conductive film is assisted with selenium powder
Technical field
The invention belongs to optoelectronic film preparation technical field used for solar batteries more particularly to a kind of selenium powder auxiliary preparations The preparation method of copper and iron selenium conductive film.
Background technique
Copper and iron selenium is a kind of ternary I-III-VI as photoelectric material2Compound semiconductor has chalcopyrite and dodges zinc The crystal structure of mine, at the same have the high absorption coefficient of light, for direct gap semiconductor, thermal stability is good, imitates without light-induced degradation The advantages that answering, and because the cheap of copper and iron selenium material, rich reserves and the advantages such as nontoxic receive the extensive concern of scientist.
The preparation method of copper and iron selenium film has much at present, mainly there is electrochemical deposition method, sputtering method, thermal evaporation, heat Spray coating method etc..It is a kind of very promising due to raw material rich reserves on earth, cheap and nontoxic Optoelectronic thin film material, but prior art route is complicated, preparation cost is high, thus need to explore the preparation process of low cost.
Method as previously described is the same, and other methods also have different defects.It is related to the present invention that there are also following documents:
[1] Wen H, Li H, He S, et al. Constructing two-dimensional CuFeSe2@Au heterostructured nanosheets with an amorphous core and a crystalline shell for enhanced near-infrared light water oxidation. Nanoscale, 2018.
Mainly have studied CuFeSe2@Au heterogeneous structural nano piece, analyzes CuFeSe2The structure feature of@Au nanometer sheet, and Their photocatalytic activity and high stability to water oxygen.
[2] Zhang B, Liu Y, Zuo Y, et al. Colloidal Synthesis and Thermoelectric Properties of CuFeSe2 Nanocrystals. Nanomaterials-Basel, 2018.
It mainly has studied and is prepared for CuFeSe using expansible colloid synthetic method2Nano microcrystalline, while having studied CuFeSe2Material Ingredient, valence state, size and shape and its photoelectric properties.
[3] Dutkova E, Skorvanek I, Sayagues MJ, Zorkovska A, Kovac J, Balaz P. Mechanochemically Synthesized CuFeSe2 Nanoparticles and Their Properties. Acta Phys Pol A, 2017.
It mainly has studied and prepares CuFeSe using mechanochemical reaction2Nano particle has studied CuFeSe2The crystal knot of nano particle Structure, size, magnetism and photoelectric properties.
[4] Carr WD, Morelli DT. The Thermoelectric Properties and Solubility Limit of CuFeS2(1-x)Se2x. J Electron Mater, 2016.
Mainly have studied CuFeS2(1-x)Se2xThermoelectric property and solubility limit, with selenium replace CuFeS2Middle sulphur position, has studied The variation of thermoelectricity capability.
[5] Wang W, Jiang J, Ding T, Wang C, Zuo J, Yang Q. Alternative Synthesis of CuFeSe2 Nanocrystals with Magnetic and Photoelectric Properties. Acs Appl Mater Inter, 2015.
It mainly has studied and prepares monodispersed CuFeSe using hot solution injection method2Nanocrystal, and analyze the crystalline substance of sample Body structure and size, magnetism and photoelectric properties.
[6]Lee PC, Ou MN, Zhong ZW, et al. Nonlinear Thickness and Grain Size Effects on the Thermal Conductivity of CuFeSe2 Thin Films. Chinese J Phys, 2013.
Mainly film thickness and crystallite dimension are had studied to CuFeSe2The influence of thermal conductivity of thin film.
Summary of the invention
The present invention has invented a kind of with the entirely different copper of existing preparation method to solve the deficiency of existing technology of preparing The preparation process of iron selenium film.
The present invention prepares copper and iron selenium thin-film material using spin coating-chemistry co-reducing process, uses sheet glass or silicon wafer for substrate, With CuCl2.2H2O、FeCl3.6H2O、Na2Se2O3.5H2O is raw material, is taken water as a solvent, and CuCl is sequentially added2.2H2O、 FeCl3.6H2O、Na2Se2O3.5H2O reacts it sufficiently.Certain thickness copper and iron selenium precursor thin-film is first prepared with spin-coating method, It is put into the middle layer of reaction kettle liner, while being put into selenium powder beside the sheet glass for being coated with precursor solution, reaction kettle liner Lower layer be put into hydrazine hydrate solution, contact precursor thin-film sample directly with hydrazine, using hydrazine hydrate as reducing agent, It is heated at a lower temperature in closed container, precursor thin-film is made to restore concurrent GCMS computer reaction, it can be by increasing reaction times Improve prepared film quality with heat treatment after reaction, obtains target product.
Specific preparation method of the invention includes following steps in sequence:
A. the cleaning of substrate is carried out, sheet glass or silicon wafer are switched to by this experimental selection sheet glass or silicon wafer first as substrate Then 20mm × 20mm × 2mm size is cleaned 2 ~ 3 times as film substrate with deionized water, then pass through dilute sulfuric acid boil 30 ~ 40min, 40 ~ 50min of heating water bath, deionized water are cleaned by ultrasonic 20min, after these three important cleaning steps, with dioxygen water logging Bubble saves backup.
B. by CuCl2.2H2O、FeCl3.6H2O and Na2Se2O3.5H2O is sequentially placed into solvent, keeps the substance in solution equal Even mixing.Specifically, by the CuCl of 0.1705g2.2H2The water that 1mL is added in O in vial dissolves it sufficiently, then successively The FeCl of 0.2702g is added in vial3.6H2The Na of O and 0.2481g2Se2O3.5H2O makes its full and uniform mixed dissolution, The CuCl being wherein added2.2H2O、FeCl3.6H2O、Na2Se2O3.5H2The amount of O and aqueous solvent can be proportional according to the number of film Variation.
C. the substrate of the external uniform solution as described in step b of production, and dry, obtain precursor thin-film sample.It can incite somebody to action Above-mentioned solution drips on the substrate being placed on sol evenning machine, restarts sol evenning machine with 200 ~ 3500 revs/min of rotation certain times, makes After solution coating in drop is uniform, and substrate is carried out after natural drying, repeat to drip again after upper previous solu and spin coating again from It so dries, so repeatedly 2 ~ 8 times, certain thickness precursor thin-film sample has then been obtained on substrate.
D. precursor thin-film sample obtained by step c is placed in the middle layer of reaction kettle liner, and is put beside film sample Enter the selenium powder of 0.078g, the lower layer of reaction kettle liner is put into hydrazine hydrate solution, make precursor thin-film sample not with hydrazine hydrate Contact;The hydrazine hydrate amount of being put into is 0.5mL.The above-mentioned closed container equipped with precursor thin-film sample is put into baking oven, is heated To between 160 ~ 220 DEG C, soaking time 2 ~ 40 hours, it is then cooled to room temperature taking-up.
E. it takes out after spontaneously drying, repeats b, c and Step d 2 ~ 6 times, to increase the thickness of prepared film, reduce film Defect.
F. by step e gains, after spontaneously drying its room temperature, increase heat treatment process, heated in tubular heater To 200 ~ 400 DEG C, 5 ~ 15 hours are kept the temperature to get copper and iron selenium conductive film is arrived.
The present invention does not need high vacuum condition, low to instrument and equipment requirement, and production cost is low, high production efficiency, is easy to grasp Make.Uniformity of film made from selenium powder and crystallization, which is relatively not added, in gained copper and iron selenium conductive film to get well, main phase CuFeSe2Phase, Inexpensive large-scale industrial production may be implemented.
Specific embodiment
Embodiment 1
A. the cleaning of glass substrate or silicon chip:Cleaning substrate is carried out as previously described, and size is 20mm × 20mm × 2mm.
It b. can be first by the CuCl of 0.1705g2.2H2The water that 1mL is added in O in vial dissolves it sufficiently, then successively The FeCl of 0.2702g is added in vial3.6H2The Na of O and 0.321g2Se2O3.5H2O makes its full and uniform mixed dissolution.
C. above-mentioned solution is dripped in the glass substrate being placed on sol evenning machine, restarts sol evenning machine, sol evenning machine is with 200 Rev/min rotation 5 seconds, with 3000 revs/min rotate 15 seconds, make drop on solution coating it is uniform after, after being dried to substrate, again It repeats to dry again after dripping upper previous solu and spin coating, is so repeated 6 times, certain thickness presoma has then been obtained on substrate Film sample.
D. precursor thin-film sample obtained by step c is placed in the middle layer of reaction kettle liner, and is put beside film sample Enter the selenium powder of 0.078g, the lower layer of reaction kettle liner is put into hydrazine hydrate solution, make precursor thin-film sample not with hydrazine hydrate Contact;The hydrazine hydrate amount of being put into is 0.5mL.The above-mentioned closed container equipped with precursor thin-film sample is put into baking oven, is heated To 180 DEG C, soaking time 10 hours, it is then cooled to room temperature taking-up.
E. it takes out after spontaneously drying, repeats b, c and Step d 4 times, to increase the thickness of prepared film, reduce film and lack It falls into.
F. by step e gains, after spontaneously drying its room temperature, increase heat treatment process, heated in tubular heater To 300 DEG C, 10 hours are kept the temperature to get copper and iron selenium conductive film is arrived.

Claims (5)

1. a kind of method for assisting preparation copper and iron selenium conductive film with selenium powder, including it is following steps in sequence:
A. the cleaning of glass substrate or silicon chip;
B. by the CuCl of 0.1705g2.2H2The water that 1mL is added in O in vial dissolves it sufficiently, then successively in vial The FeCl of 0.2702g is added3.6H2The Na of O and 0.321g2Se2O3.5H2O makes its full and uniform mixed dissolution;
C. the substrate of solution described in surface even spread step b is made, naturally dry obtains precursor thin-film sample;
D. precursor thin-film sample obtained by step c is placed in the middle layer of reaction kettle liner, and is put into beside film sample The selenium powder of 0.078g, the lower layer of reaction kettle liner are put into hydrazine hydrate solution, connect precursor thin-film sample with hydrazine hydrate Touching;The hydrazine hydrate amount of being put into is 0.5mL;The above-mentioned closed container equipped with precursor thin-film sample is put into baking oven, is heated to Between 160 ~ 220 DEG C, soaking time 2 ~ 40 hours, it is then cooled to room temperature taking-up;
E. it takes out after spontaneously drying, repeats the above steps 2 ~ 6 times, to increase the thickness of prepared film;
F. by step e gains, after spontaneously drying its room temperature, increase heat treatment process, 200 are heated in tubular heater ~ 400 DEG C, 5 ~ 15 hours are kept the temperature to get copper and iron selenium conductive film is arrived.
2. a kind of method for assisting preparation copper and iron selenium conductive film with selenium powder as described in claim 1, which is characterized in that step It is cleaned described in a, sheet glass or silicon wafer is switched to 20mm × 20mm × 2mm size as film substrate, it is then clear with deionized water It washes 2 ~ 3 times, then passes through dilute sulfuric acid and boil 30 ~ 40min, 40 ~ 50min of heating water bath, deionized water ultrasonic cleaning 20min, this After three important cleaning steps, saved backup with hydrogen peroxide dipping.
3. a kind of preparation method for assisting preparation copper and iron selenium conductive film with selenium powder as described in claim 1, which is characterized in that Solvent described in step b is aqueous solution, and the CuCl being wherein added2.2H2O、FeCl3.6H2O、Na2Se2O3.5H2O and aqueous solvent Amount can be according to how much proportional variations of film.
4. a kind of preparation method for assisting preparation copper and iron selenium conductive film with selenium powder as described in claim 1, which is characterized in that The substrate uniformly smeared described in step c is by sol evenning machine spin coating, and sol evenning machine is rotated with 200 ~ 3500 revs/min, then to substrate After being dried, so repeats 2 ~ 8 times again, obtained certain thickness precursor thin-film sample.
5. a kind of preparation method for assisting preparation copper and iron selenium conductive film with selenium powder as described in claim 1, which is characterized in that The selenium powder of 0.078g is put into described in step d beside film sample, the lower layer of reaction kettle liner is put into hydrazine hydrate solution, makes Precursor thin-film sample is not contacted with hydrazine hydrate;The hydrazine hydrate amount of being put into is 0.5mL.
CN201810703712.8A 2018-07-01 2018-07-01 A method of preparation copper and iron selenium conductive film is assisted with selenium powder Withdrawn CN108878556A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810703712.8A CN108878556A (en) 2018-07-01 2018-07-01 A method of preparation copper and iron selenium conductive film is assisted with selenium powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810703712.8A CN108878556A (en) 2018-07-01 2018-07-01 A method of preparation copper and iron selenium conductive film is assisted with selenium powder

Publications (1)

Publication Number Publication Date
CN108878556A true CN108878556A (en) 2018-11-23

Family

ID=64297783

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810703712.8A Withdrawn CN108878556A (en) 2018-07-01 2018-07-01 A method of preparation copper and iron selenium conductive film is assisted with selenium powder

Country Status (1)

Country Link
CN (1) CN108878556A (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103396009A (en) * 2013-07-09 2013-11-20 山东建筑大学 Method for preparing copper-aluminum-tellurium film
WO2015004666A1 (en) * 2013-07-11 2015-01-15 Yissum Research Development Company Of The Hebrew University Of Jerusalem Ltd. Thermal doping by vacancy formation in nanocrystals
CN105489672A (en) * 2015-12-17 2016-04-13 山东建筑大学 Method for preparing copper indium diselenide photoelectric thin film by chloride system through two-step method
CN105552166A (en) * 2015-12-16 2016-05-04 山东建筑大学 Method for preparing copper-indium-diselenide photoelectric film by two-step method of nitrate system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103396009A (en) * 2013-07-09 2013-11-20 山东建筑大学 Method for preparing copper-aluminum-tellurium film
WO2015004666A1 (en) * 2013-07-11 2015-01-15 Yissum Research Development Company Of The Hebrew University Of Jerusalem Ltd. Thermal doping by vacancy formation in nanocrystals
CN105552166A (en) * 2015-12-16 2016-05-04 山东建筑大学 Method for preparing copper-indium-diselenide photoelectric film by two-step method of nitrate system
CN105489672A (en) * 2015-12-17 2016-04-13 山东建筑大学 Method for preparing copper indium diselenide photoelectric thin film by chloride system through two-step method

Similar Documents

Publication Publication Date Title
Dehghan et al. Deposition of zinc oxide as an electron transport layer in planar perovskite solar cells by spray and SILAR methods comparable with spin coating
CN105552236B (en) A kind of perovskite solar cell and preparation method thereof
CN108598268B (en) Method for preparing planar heterojunction perovskite solar cell by printing under environmental condition
Abd-Ellah et al. Enhancement of solar cell performance of p-Cu2O/n-ZnO-nanotube and nanorod heterojunction devices
CN107240643B (en) Bromo element adulterates methylamine lead iodine perovskite solar battery and preparation method thereof
CN102603201A (en) Method for preparing cuprous selenide thin film
CN103833416B (en) A kind of chemical solution deposition preparation method of the sour lanthanum conductive film of nickel
CN104393177B (en) Solar cell based on Perovskite Phase organic metal halide and preparation method thereof
CN102603202A (en) Method for preparing tin selenide photoelectric thin film
Peng et al. Fully Doctor-bladed efficient perovskite solar cells in ambient condition via composition engineering
CN102709351A (en) Cuprous sulfide film with preferred orientation growth
Zheng et al. Enhancing the performance and stability of carbon-based CsPbI2Br perovskite solar cells via tetrabutylammonium iodide surface passivation
CN102153288A (en) Method for preparing copper disulfide thin film with preferred orientation
Liu et al. Upscaling perovskite solar cells via the ambient deposition of perovskite thin films
CN108511607A (en) TiO2The preparation method of cookies shape microballoon and the method for preparing perovskite solar cell
CN105731518B (en) Normal-temperature crystallization preparation method of octahedron cuprous oxide crystal
CN113054045B (en) Bi (Fe, Zn) O for high-speed photoelectric detection3NiO full oxide film heterojunction
CN108878556A (en) A method of preparation copper and iron selenium conductive film is assisted with selenium powder
Kim et al. Low-temperature thermally evaporated SnO2 based electron transporting layer for perovskite solar cells with annealing process
CN108878557A (en) A method of copper and iron selenium conductive film is prepared with chloride
CN108831965A (en) A method of copper and iron selenium conductive film is prepared with nitrate
CN108831963A (en) A method of copper and iron selenium conductive film is prepared with sulfate
Muniandy et al. An investigation on NiO for hole transport material in perovskite solar cells
CN108807560A (en) A method of it is assisted preparing copper and iron sulphur optoelectronic film with sulphur powder
CN108123045A (en) A kind of unleaded perovskite solar cell and preparation method thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WW01 Invention patent application withdrawn after publication
WW01 Invention patent application withdrawn after publication

Application publication date: 20181123