CN108843171B - Transmission assembly of vacuum chamber door plate propelling device - Google Patents
Transmission assembly of vacuum chamber door plate propelling device Download PDFInfo
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- CN108843171B CN108843171B CN201810951454.5A CN201810951454A CN108843171B CN 108843171 B CN108843171 B CN 108843171B CN 201810951454 A CN201810951454 A CN 201810951454A CN 108843171 B CN108843171 B CN 108843171B
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- cylinder
- spherical bearing
- nut
- door plate
- mounting plate
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- E—FIXED CONSTRUCTIONS
- E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
- E05F—DEVICES FOR MOVING WINGS INTO OPEN OR CLOSED POSITION; CHECKS FOR WINGS; WING FITTINGS NOT OTHERWISE PROVIDED FOR, CONCERNED WITH THE FUNCTIONING OF THE WING
- E05F15/00—Power-operated mechanisms for wings
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Abstract
The driving assembly of the vacuum chamber door plate propelling device comprises a door plate, a driving device, a first cylinder, a second cylinder, a pin rod, a spherical bearing and a first nut, wherein the driving device is provided with a mounting plate; the first nut and the spherical bearing are arranged left and right, the first cylinder passes through the spherical bearing inner ring from right to left to be in rotary joint with the first nut, the spherical bearing is sleeved on the circumferential outer side of the second cylinder, the left side of the spherical bearing inner ring is propped against the right side of the first nut, the right side of the spherical bearing inner ring is propped against the left side of the third cylinder, the spherical bearing outer ring is arranged in the first recess, and a certain distance is reserved between the left side of the first cylinder and the left side of the first cylinder; the left side of the first cylinder is connected with the door plate, the right side of the second cylinder is connected with the mounting plate, the right part of the third cylinder is arranged in the inner cavity of the second cylinder, and a distance is reserved between the right side of the third cylinder and the right side of the inner cavity of the second cylinder. The angle of the door plate can be automatically adjusted when the pushing door plate is closed, so that the pushing door plate is tightly attached to the crossing flange.
Description
Technical Field
The invention relates to a transmission assembly of a vacuum chamber door plate propelling device.
Background
The LPCVD silicon wafer of the furnace tube is placed on a quartz boat, the quartz boat is conveyed into a vacuum chamber furnace body through a transmission device, then the subsequent process is carried out by vacuumizing, because the initial precision and long-term use deformation lead to the door plate to have larger gaps with a furnace mouth flange when being closed, the existing door plate propelling device and the door plate are fixedly connected, and when the door plate and the furnace mouth flange have larger gaps, the existing device cannot complete vacuumizing under the automatic condition, the subsequent process is influenced, and the production efficiency is seriously influenced by the existing means through manual adjustment.
Disclosure of Invention
The invention aims to solve the technical problem of providing a transmission assembly of a vacuum chamber door plate propelling device, which can automatically adjust the angle of a door plate to be tightly attached to an intersection flange when the propelling door plate is closed.
The invention provides a transmission assembly of a vacuum chamber door plate propelling device, which comprises a door plate and a driving device which are vertically arranged, wherein the driving device is provided with a vertically arranged mounting plate, the door plate and the mounting plate are arranged at intervals left and right, and the normal directions of the door plate and the mounting plate are all left and right, and the transmission assembly also comprises a first cylinder, a second cylinder, a pin rod, a spherical bearing and a first nut;
the first cylinder, the second cylinder, the pin rod, the spherical bearing and the first nut are coaxial, and the axial direction is left and right;
the right side of the first cylinder is open, an annular first concave is circumferentially arranged on the right side of the inner cavity of the first cylinder, a check ring is also arranged on the right side of the first cylinder, the check ring and the first cylinder are coaxial, and the inner diameter of the check ring is smaller than the diameter of the first concave;
the left side of the second cylinder is open, and the inner diameter of the second cylinder is smaller than the inner diameter of the check ring;
the pin rod is formed by coaxially connecting a first cylinder, a second cylinder and a third cylinder which are sequentially increased in diameter from left to right, an external thread matched with the first nut is arranged on the circumferential outer side of the first cylinder, the diameter of the third cylinder is the same as the inner diameter of the second cylinder, and the axial length of the third cylinder is greater than the axial depth of the second cylinder;
the spherical bearing comprises a coaxial outer ring and an inner ring, the axial two ends of the inner ring exceed the axial two ends of the outer ring by a certain distance, the diameter and the axial length of the outer ring of the spherical bearing are correspondingly equal to those of the first recess, and the inner diameter and the axial length of the inner ring of the spherical bearing are correspondingly equal to those of the second cylinder;
the first nut and the spherical bearing are arranged left and right, the first cylinder passes through the spherical bearing inner ring from right to left to be in rotary joint with the first nut, the spherical bearing is sleeved on the circumferential outer side of the second cylinder, the left side of the spherical bearing inner ring is propped against the right side of the first nut, the right side of the spherical bearing inner ring is propped against the left side of the third cylinder, the spherical bearing outer ring is arranged in the first recess, and a certain distance is reserved between the left side of the first cylinder and the left side of the first cylinder;
the left side of the first cylinder is connected with the door plate, the right side of the second cylinder is connected with the mounting plate, the right part of the third cylinder is arranged in the inner cavity of the second cylinder, and a distance is reserved between the right side of the third cylinder and the right side of the inner cavity of the second cylinder.
For the sake of simplicity, the transmission assembly of the vacuum chamber door panel propulsion device according to the present invention is hereinafter simply referred to as the present assembly.
The working principle of the component is as follows: the driving device drives the mounting plate to drive the second cylinder to move leftwards, the right side of the inner cavity of the second cylinder is contacted with the left side of the third cylinder, then the door plate is pushed by the first cylinder to move leftwards to be contacted with the furnace mouth flange, then the driving device continues to push the mounting plate leftwards, and the first cylinder drives the door plate to deflect relative to the pin rod under the action of the spherical bearing, so that the door plate is tightly attached to the furnace mouth flange.
The advantage of this subassembly: when the pushing door plate is closed, the angle of the door plate is automatically adjusted through the spherical bearing, so that the pushing door plate is tightly attached to the intersection flange, the vacuumizing operation can be performed without manual adjustment, and the production efficiency is effectively improved.
In order to achieve better use effect of the assembly, the preferred scheme is as follows:
preferably, a plurality of threaded blind holes extending horizontally and leftwards are uniformly distributed on the right side of the first cylinder in the circumferential direction, a countersunk hole matched with the threaded blind holes is formed in the position, corresponding to each threaded blind hole, of the check ring, and the check ring is fixed on the right side of the first cylinder through countersunk bolts matched with the threaded blind holes and the countersunk holes.
The check ring is connected with the first cylinder through the countersunk head bolt, so that the spherical bearing and the pin shaft can be conveniently detached and replaced.
Preferably, a flange plate is arranged on the left side of the first cylinder, and the first cylinder is fixedly connected with the door plate through the flange plate.
The left side of the first cylinder is connected with the door plate through the flange, so that the connection is tighter, and the assembly and disassembly processes are convenient and easy to maintain in the later period.
Preferably, a second annular recess is formed in the circumferential outer side of the left portion of the first cylinder, and the right side of the second annular recess and the right portion of the first cylinder are in transition through an annular inclined plane.
The flange connected with the door plate is provided with the corresponding bolt and nut, and the second recess plays a role in yielding to facilitate the installation and the disassembly of the bolt and the nut.
Preferably, the outer side of the first cylinder is also sleeved with a spring washer matched with the first cylinder, and the spring washer is clamped between the right side of the first nut and the left side of the spherical bearing inner ring.
The spring washer acts as a stop for the first nut.
Preferably, the right side of the second cylinder is provided with a screw rod coaxial with the second cylinder, a through hole matched with the screw rod is formed in the position of the mounting plate, which corresponds to the screw rod, a second nut matched with the screw rod is arranged in the position of the right side of the mounting plate, the right part of the screw rod passes through the through hole from left to right and is screwed with the second nut, so that the right side of the second cylinder is tightly attached to the left side of the mounting plate, and the left side of the second nut is tightly attached to the right side of the mounting plate.
The second cylinder is connected with the mounting plate through the screw rod and the second nut, and is convenient to detach and replace.
Preferably, the right side of the third cylinder is provided with a blind hole which horizontally extends leftwards and is coaxial with the third cylinder, a left-right moving spring is arranged in the blind hole, the diameter of the spring is matched with that of the blind hole, the left side of the spring is contacted with the bottom of the blind hole, and the right side of the spring exceeds the third cylinder and is abutted against the right side of the inner cavity of the second cylinder.
The spring plays a role in buffering in the process of pushing the door plate, so that the impact force generated when the second cylinder is contacted with the third cylinder is reduced.
Drawings
Fig. 1 is a schematic diagram of the structure of the present assembly.
Detailed Description
Referring to fig. 1, a transmission assembly of a vacuum chamber door plate 1 propulsion device comprises a door plate 1 and a driving device which are vertically arranged, wherein the driving device is provided with a mounting plate 2 which is vertically arranged, the door plate 1 and the mounting plate 2 are arranged at intervals left and right, and the normal directions of the door plate 1 and the mounting plate 2 are all left and right, and the transmission assembly is characterized in that: also comprises a first cylinder 3, a second cylinder 4, a pin 5, a spherical bearing 6, and a first nut 54.
The first cylinder 3, the second cylinder 4, the pin 5, the spherical bearing 6 and the first nut 54 are coaxial and the axial direction is left and right.
The right side of the first cylinder 3 is open, the left side of the first cylinder 3 is provided with a flange 7 plate, the right side of the inner cavity of the first cylinder 3 is circumferentially provided with an annular first concave recess 31, the right side of the first cylinder 3 is also provided with a check ring 33, the check ring 33 is coaxial with the first cylinder 3, the outer diameter of the check ring 33 is identical to that of the first cylinder 3, the inner diameter of the check ring 33 is smaller than that of the first concave recess 31, six horizontally left-extending threaded blind holes 34 are uniformly distributed on the right side of the first cylinder 3 in the circumferential direction, the check ring 33 is provided with a countersunk hole 35 matched with the threaded blind holes 34 at positions corresponding to the threaded blind holes 34, and the check ring 33 is fixed on the right side of the first cylinder 3 through countersunk bolts 36 matched with the threaded blind holes 34 and the countersunk holes 35. The circumferential outer side of the left part of the first cylinder 3 is provided with an annular second concave recess 32, and the right side of the second annular concave recess is in transition with the right part of the first cylinder 3 through an annular inclined plane.
The left side of the second cylinder 4 is open, and the inner diameter of the second cylinder 4 is smaller than the inner diameter of the retainer ring 33; the right side of the second cylinder 4 is provided with a screw 41 coaxial with the second cylinder 4, the position of the mounting plate 2 corresponding to the screw 41 is provided with a through hole 21 matched with the screw 41, and the position of the right side of the mounting plate 2 corresponding to the through hole 21 is provided with a second nut 42 matched with the screw 41.
The pin rod 5 is formed by coaxially connecting a first cylinder 51, a second cylinder 52 and a third cylinder 53 which are sequentially increased in diameter from left to right, an external thread matched with a first nut 54 is arranged on the circumferential outer side of the first cylinder 51, the diameter of the third cylinder 53 is the same as the inner diameter of the second cylinder 4, and the axial length of the third cylinder 53 is larger than the axial depth of the second cylinder 4.
The spherical bearing 6 comprises a coaxial outer ring 62 and an inner ring 61, the two axial ends of the inner ring 61 exceed the two axial ends of the outer ring 62 by a certain distance, the diameter and the axial length of the outer ring 62 of the spherical bearing 6 are correspondingly equal to those of the first concave recess 31, and the inner diameter and the axial length of the inner ring 61 of the spherical bearing 6 are correspondingly equal to those of the second cylinder 52.
The first nut 54 and the spherical bearing 6 are arranged left and right, the first cylinder 51 passes through the inner ring 61 of the spherical bearing 6 from right to left to be screwed with the first nut 54, the spring washer 55 matched with the first cylinder 51 is sleeved outside the first cylinder 51, and the spring washer 55 is clamped between the right side of the first nut 54 and the left side of the inner ring 61 of the spherical bearing 6. The spherical bearing 6 is sleeved on the circumferential outer side of the second cylinder 52, the left side of the inner ring 61 of the spherical bearing 6 abuts against the right side of the first nut 54, the right side of the inner ring 61 of the spherical bearing 6 abuts against the left side of the third cylinder 53, the outer ring 62 of the spherical bearing 6 is arranged in the first recess 31, and a certain distance is reserved between the left side of the first cylinder 51 and the left side of the first cylinder 3.
The left side of the first cylinder 3 is fixedly connected with the door plate 1 through a flange 7 plate. The right part of the screw 41 is screwed with the second nut 42 through the through hole 21 from left to right so that the right side of the second cylinder 4 is closely abutted against the left side of the mounting plate 2, and the left side of the second nut 42 is closely abutted against the right side of the mounting plate 2. The right part of the third cylinder 53 is arranged in the inner cavity of the second cylinder 4, a blind hole 531 which horizontally extends leftwards and is coaxial with the third cylinder 53 is arranged on the right side of the third cylinder 53, a left-right running spring 532 is arranged in the blind hole 531, the diameter of the spring 532 is matched with that of the blind hole 531, the left side of the spring 532 is contacted with the bottom of the blind hole 531, and the right side of the spring 532 exceeds the third cylinder 53 to be abutted against the right side of the inner cavity of the second cylinder 4. A distance is left between the right side of the third cylinder 53 and the right side of the inner cavity of the second cylinder 4.
The working principle of the component is as follows: the driving device drives the mounting plate 2 to drive the second cylinder 4 to move leftwards, after the right side of the inner cavity of the second cylinder 4 contacts with the left side of the third cylinder 53, the door plate 1 is pushed by the first cylinder 3 to move leftwards to contact with the furnace mouth flange 7, then the driving device continues to push the mounting plate 2 leftwards, and under the action of the spherical bearing 6, the first cylinder 3 drives the door plate 1 to deflect relative to the pin 5, and then the door plate is tightly attached to the furnace mouth flange 7.
The advantage of this subassembly: this subassembly makes its and the inseparable laminating of crossing flange 7 through spherical bearing 6 automatically regulated door plant 1 angle when impelling door plant 1 to close, need not manual regulation and can carry out the evacuation operation, has effectively improved production efficiency.
The retainer ring 33 is connected with the first cylinder 3 through a countersunk bolt 36, so that the spherical bearing 6 and the pin shaft can be conveniently detached and replaced.
The left side of the first cylinder 3 is connected with the door plate 1 through the flange 7, so that the connection is more compact, and the assembly and disassembly processes are convenient and easy to maintain in the later period.
The flange 7 connected with the door plate 1 is provided with the corresponding bolts 71 and nuts 72, and the second concave 32 plays a role of giving way, so that the bolts 71 and the nuts 71 are convenient to install and detach.
The spring washer 55 serves to stop the first nut 54.
The second cylinder 4 is connected with the mounting plate 2 through the screw 41 and the second nut 42, so that the disassembly and the replacement are convenient.
The spring plays a role of buffering during the pushing of the door panel 1, and reduces the impact force when the second cylinder 4 contacts the third cylinder 53.
Claims (4)
1. The transmission assembly of the vacuum chamber door plate propelling device comprises a door plate and a driving device which are vertically arranged, wherein the driving device is provided with a vertically arranged mounting plate, the door plate and the mounting plate are arranged at intervals left and right, and the normal directions of the door plate and the mounting plate are left and right, and the transmission assembly is characterized in that: the device also comprises a first cylinder, a second cylinder, a pin rod, a spherical bearing and a first nut;
the first cylinder, the second cylinder, the pin rod, the spherical bearing and the first nut are coaxial, and the axial direction is left and right;
the right side of the first cylinder is open, an annular first concave is circumferentially arranged on the right side of the inner cavity of the first cylinder, a check ring is also arranged on the right side of the first cylinder, the check ring and the first cylinder are coaxial, and the inner diameter of the check ring is smaller than the diameter of the first concave;
the left side of the second cylinder is open, and the inner diameter of the second cylinder is smaller than the inner diameter of the check ring;
the pin rod is formed by coaxially connecting a first cylinder, a second cylinder and a third cylinder which are sequentially increased in diameter from left to right, an external thread matched with the first nut is arranged on the circumferential outer side of the first cylinder, the diameter of the third cylinder is the same as the inner diameter of the second cylinder, and the axial length of the third cylinder is greater than the axial depth of the second cylinder;
the spherical bearing comprises a coaxial outer ring and an inner ring, the axial two ends of the inner ring exceed the axial two ends of the outer ring by a certain distance, the diameter and the axial length of the outer ring of the spherical bearing are correspondingly equal to those of the first recess, and the inner diameter and the axial length of the inner ring of the spherical bearing are correspondingly equal to those of the second cylinder;
the first nut and the spherical bearing are arranged left and right, the first cylinder passes through the spherical bearing inner ring from right to left to be in rotary joint with the first nut, the spherical bearing is sleeved on the circumferential outer side of the second cylinder, the left side of the spherical bearing inner ring is propped against the right side of the first nut, the right side of the spherical bearing inner ring is propped against the left side of the third cylinder, the spherical bearing outer ring is arranged in the first recess, and a certain distance is reserved between the left side of the first cylinder and the left side of the first cylinder;
the left side of the first cylinder is connected with the door plate, the right side of the second cylinder is connected with the mounting plate, the right part of the third cylinder is arranged in the inner cavity of the second cylinder, and a distance is reserved between the right side of the third cylinder and the right side of the inner cavity of the second cylinder;
the left side of the first cylinder is provided with a flange plate, and the first cylinder is fixedly connected with the door plate through the flange plate;
the right side of the second cylinder is provided with a screw rod coaxial with the second cylinder, a through hole matched with the screw rod is formed in the position of the mounting plate, which corresponds to the screw rod, a second nut matched with the screw rod is arranged in the position, which corresponds to the through hole, of the right side of the mounting plate, the right part of the screw rod passes through the through hole from left to right and is screwed with the second nut, so that the right side of the second cylinder is tightly attached to the left side of the mounting plate, and the left side of the second nut is tightly attached to the right side of the mounting plate;
the right side of the third cylinder is provided with a blind hole which horizontally extends leftwards and is coaxial with the third cylinder, a left-right moving spring is arranged in the blind hole, the diameter of the spring is matched with that of the blind hole, the left side of the spring is contacted with the bottom of the blind hole, and the right side of the spring exceeds the third cylinder and is abutted against the right side of the inner cavity of the second cylinder.
2. The transmission assembly of a vacuum chamber door panel propulsion apparatus of claim 1, wherein: the right side of the first cylinder is circumferentially and uniformly provided with a plurality of threaded blind holes extending horizontally and leftwards, a countersunk head hole matched with the threaded blind holes is formed in the position of the check ring corresponding to each threaded blind hole, and the check ring is fixed on the right side of the first cylinder through countersunk head bolts matched with the threaded blind holes and the countersunk head holes.
3. The transmission assembly of a vacuum chamber door panel propulsion apparatus of claim 1, wherein: the circumference outside of first drum left part be equipped with annular second concave yield, the right side of second annular concave yield passes through annular inclined plane transition with first drum right part.
4. The transmission assembly of a vacuum chamber door panel propulsion apparatus of claim 1, wherein: the outer side of the first cylinder is also sleeved with a spring washer matched with the first cylinder, and the spring washer is clamped between the right side of the first nut and the left side of the spherical bearing inner ring.
Priority Applications (1)
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CN201810951454.5A CN108843171B (en) | 2018-08-21 | 2018-08-21 | Transmission assembly of vacuum chamber door plate propelling device |
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CN201810951454.5A CN108843171B (en) | 2018-08-21 | 2018-08-21 | Transmission assembly of vacuum chamber door plate propelling device |
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CN108843171A CN108843171A (en) | 2018-11-20 |
CN108843171B true CN108843171B (en) | 2023-10-20 |
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CN201810951454.5A Active CN108843171B (en) | 2018-08-21 | 2018-08-21 | Transmission assembly of vacuum chamber door plate propelling device |
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2005337383A (en) * | 2004-05-27 | 2005-12-08 | Koyo Seiko Co Ltd | Bearing device for pulley |
CN102146758A (en) * | 2009-11-12 | 2011-08-10 | 博梅尔特个人简易股份有限公司 | Lift-off hinge device with oscillating mounting intended for a very heavy door and very heavy door provided with such a device |
CN103628768A (en) * | 2013-11-29 | 2014-03-12 | 北京卫星环境工程研究所 | Axial opening mechanism applied to space environment simulator |
CN104696389A (en) * | 2015-02-09 | 2015-06-10 | 镇江维斯特船用设备有限公司(外商独资) | Speed limiting clutch device for lifeboat rotary hanging bracket |
CN106704682A (en) * | 2015-08-13 | 2017-05-24 | 中核新能核工业工程有限责任公司 | Manual vacuum valve operation mechanism used for nuclear |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102108686B (en) * | 2010-12-17 | 2012-05-02 | 上海华铭智能终端设备股份有限公司 | Shear type door arresting gear capable of regulating arresting width of fan doors |
-
2018
- 2018-08-21 CN CN201810951454.5A patent/CN108843171B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005337383A (en) * | 2004-05-27 | 2005-12-08 | Koyo Seiko Co Ltd | Bearing device for pulley |
CN102146758A (en) * | 2009-11-12 | 2011-08-10 | 博梅尔特个人简易股份有限公司 | Lift-off hinge device with oscillating mounting intended for a very heavy door and very heavy door provided with such a device |
CN103628768A (en) * | 2013-11-29 | 2014-03-12 | 北京卫星环境工程研究所 | Axial opening mechanism applied to space environment simulator |
CN104696389A (en) * | 2015-02-09 | 2015-06-10 | 镇江维斯特船用设备有限公司(外商独资) | Speed limiting clutch device for lifeboat rotary hanging bracket |
CN106704682A (en) * | 2015-08-13 | 2017-05-24 | 中核新能核工业工程有限责任公司 | Manual vacuum valve operation mechanism used for nuclear |
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