CN108832837A - A kind of ultrasonic step wave electric motor and controller method - Google Patents
A kind of ultrasonic step wave electric motor and controller method Download PDFInfo
- Publication number
- CN108832837A CN108832837A CN201810885848.5A CN201810885848A CN108832837A CN 108832837 A CN108832837 A CN 108832837A CN 201810885848 A CN201810885848 A CN 201810885848A CN 108832837 A CN108832837 A CN 108832837A
- Authority
- CN
- China
- Prior art keywords
- motor
- electrode
- electrodes
- ultrasonic step
- step wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 15
- 229920001971 elastomer Polymers 0.000 claims abstract description 43
- 239000000806 elastomer Substances 0.000 claims abstract description 43
- 239000000919 ceramic Substances 0.000 claims abstract description 33
- 230000005611 electricity Effects 0.000 claims description 26
- 210000000515 tooth Anatomy 0.000 description 39
- 238000006073 displacement reaction Methods 0.000 description 6
- 230000005284 excitation Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
- H02N2/046—Mechanical transmission means, e.g. for stroke amplification for conversion into rotary motion
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a kind of ultrasonic step wave electric motor and controller method, the ultrasonic step wave motor includes：Motor shaft, the motor cabinet being sequentially sleeved on the motor shaft, stator, rotor and the prepressing device for applying precompression to the rotor；The motor shaft is rotatablely connected with the motor cabinet and is fixedly connected with the prepressing device；The stator includes elastomer and the elastomer lower surface and the piezoelectric ceramic piece for motivating stationary wave vibration is arranged in, and the piezoelectric ceramic piece lower surface is provided at least two electrodes；It is provided at least one Contact Tooth on the rotor, and is contacted by the Contact Tooth with the upper surface of the elastomer.Due to being powered in different ways by coordination electrode, the step angle of reduced rotor, again since the motor shaft sequentially passes through motor cabinet, stator, rotor, prepressing device, the ultrasonic step wave motor not only stepping accuracy with higher, and there is big torque output performance.
Description
Technical field
The present invention relates to supersonic motor field more particularly to a kind of ultrasonic step wave electric motor and controller methods.
Background technique
In recent years, domestic and foreign scholars attempt to realize in such a way that the design of special machine mechanism is matched with energisation mode
Ultrasonic step wave motor.Theoretically, ultrasound electric machine pulse dynamic respond is at even nm grades of μm grade, and in the prior art, stepping is super
Sound wave motor is unable to give full play the advantage that the high stepping accuracy of ultrasound electric machine is, and its stability is difficult to solve, especially needle
The application of supersonic motor is usually applied in more small structure, such as the camera lens of mobile phone, stability
It is more difficult to control.Make supersonic motor while having both big torque output performance, realizes that high stepping accuracy is this field one
Straight unsolved problem.
Therefore, the existing technology needs to be improved and developed.
Summary of the invention
The technical problem to be solved in the present invention is that in view of the above drawbacks of the prior art, providing a kind of ultrasonic step wave
Electric motor and controller method, it is intended to which ultrasonic step wave motor stepping torque output performance and precision cannot be simultaneous in the prior art for solution
The problem of tool.
The technical proposal for solving the technical problem of the invention is as follows：
A kind of ultrasonic step wave motor, wherein including：Motor shaft, the motor cabinet being sequentially sleeved on the motor shaft, stator,
Rotor and the prepressing device for applying precompression to the rotor；The motor shaft be rotatablely connected with the motor cabinet and with it is described
Prepressing device is fixedly connected；The stator includes elastomer and setting in the elastomer lower surface and for motivating standing wave
The piezoelectric ceramic piece of vibration, the piezoelectric ceramic piece lower surface are provided at least two electrodes；It is provided at least on the rotor
One Contact Tooth, and contacted by the Contact Tooth with the upper surface of the elastomer.
The ultrasonic step wave motor, wherein the rotor include side plate and with the top that is connect at the top of the side plate
Plate, the side plate are in central column, and the Contact Tooth is set to the bottom of the side plate, and the top plate connects with the prepressing device
Touching.
The ultrasonic step wave motor, wherein the prepressing device includes the precompressed nut with the motor axis connection
And elastic component, the elastic component both ends are contacted with the top plate and the precompressed nut respectively.
The ultrasonic step wave motor, wherein the motor cabinet, which has, passes through first through hole, institute for the motor shaft
Motor shaft is stated to be rotatablely connected by bearing and the motor cabinet.
The ultrasonic step wave motor, wherein the motor cabinet bottom is provided with first for placing the bearing
Groove, first bottom portion of groove and first through hole inner wall junction are provided with chamfering.
The ultrasonic step wave motor, wherein the motor shaft side forms cutting plane along axial cutting；The top
There is the second through-hole for passing through for the motor shaft on plate, be provided on second through-hole and contacted with the cutting plane
Confined planes.
The ultrasonic step wave motor, wherein it further includes connecting with the motor cabinet and being used to fix the stator
Fixing piece, the fixing piece is threadedly coupled with the motor cabinet.
A kind of ultrasonic step wave motor control method based on the ultrasonic step wave motor, wherein including step：
Any one electrode at least two electrodes is controlled to be powered, with by any one electrode at least two electrodes to the stepping
Supersonic motor is driven；
When the rotation step number of the ultrasonic step wave motor reaches first predetermined value, any two at least two electrodes are controlled
Electrode is powered, to be driven by any two electrode at least two electrodes to the ultrasonic step wave motor.
The ultrasonic step wave motor control method, wherein any one electrode is logical at least two electrodes of the control
Electricity, to further include to ultrasonic step wave motor progress actuation step by any one electrode at least two electrodes：
After electrode energization any one at least two electrodes of control drives the ultrasonic step wave motor, control adjacent
Electrode energization drives the ultrasonic step wave motor.
The ultrasonic step wave motor control method, wherein the rotation step number in the ultrasonic step wave motor
When reaching first predetermined value, controls any two electrode at least two electrodes and be powered, by any at least two electrodes
Two electrodes carry out driving to the ultrasonic step wave motor and specifically include：
When the rotation step number of the ultrasonic step wave motor reaches first predetermined value, any two at least two electrodes are controlled
Electrode leads to the electricity of identical voltage, to be driven by any two electrode at least two electrodes to the ultrasonic step wave motor
It is dynamic；
When the rotation step number of the ultrasonic step wave motor reaches second predetermined value, any two at least two electrodes are controlled
Electrode leads to the electricity of different voltages, to be driven by any two electrode at least two electrodes to the ultrasonic step wave motor
It is dynamic.
Beneficial effect：Since the piezoelectric ceramic piece lower surface is provided at least two electrodes, control at least two can be passed through
Ultrasonic step wave motor described in a electrode drive improves the stepping accuracy of the ultrasonic step wave motor.Again due to the electricity
Arbor sequentially passes through motor cabinet, stator, rotor, prepressing device, has big torque output performance when motor shaft rotates.The stepping
Supersonic motor not only stepping accuracy with higher, and there is big torque output performance.
Detailed description of the invention
Fig. 1 is the schematic diagram of the first standing wave in the present invention, the second standing wave and the first superposition standing wave.
Fig. 2 is the schematic diagram of the first standing wave in the present invention, third standing wave, the first superposition standing wave and the second superposition standing wave.
Fig. 3 is the explosive view of the preferred embodiment of ultrasonic step wave motor in the present invention.
Fig. 4 is the bottom view of the preferred embodiment of ultrasonic step wave motor in the present invention.
Fig. 5 is F-F in Fig. 4 to cross-sectional view.
Fig. 6 is the cross-sectional view of the preferred embodiment of motor cabinet in the present invention.
Fig. 7 is the structural schematic diagram of the preferred embodiment of rotor in the present invention.
Fig. 8 is the side view of the preferred embodiment of rotor in the present invention.
Fig. 9 is the cross-sectional view of the preferred embodiment of rotor in the present invention.
Figure 10 is the structural schematic diagram of motor shaft in the present invention.
Figure 11 is the side view of stator in the present invention.
Figure 12 is G-G in Figure 11 to cross-sectional view.
Figure 13 is the structural schematic diagram of piezoelectric ceramic piece in the present invention.
Figure 14 is the computer analog figure that stator excitation goes out 5 rank standing waves in the present invention.
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer and more explicit, right as follows in conjunction with drawings and embodiments
The present invention is further described.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and do not have to
It is of the invention in limiting.
As shown in figure 3, the present invention provides a kind of ultrasonic step wave motors, including：Motor shaft 70 is sequentially sleeved at described
Motor cabinet 10, stator, rotor 30 on motor shaft 70 and the prepressing device 40 to the rotor 30 application precompression；The electricity
Arbor 70 is rotatablely connected with the motor cabinet 10 and is fixedly connected with the prepressing device 40；The stator include elastomer 20 with
And 20 lower surface of elastomer and the piezoelectric ceramic piece 50 for motivating stationary wave vibration, the piezoelectric ceramic piece 50 are set
Lower surface is provided at least two electrodes 60；It is provided at least one Contact Tooth 31 on the rotor 30, and passes through the contact
Tooth 31 is contacted with the upper surface of the elastomer 20.
Specifically, a kind of corresponding stationary wave vibration can be motivated by generalling use an electrode, naturally it is also possible to use one
Group electrode common activation goes out a kind of corresponding stationary wave vibration.Therefore, there are two types of modes for the division of electrode, one is：It is provided with more
A electrode, multiple electrodes are arranged successively, for example, electrode1, electrode2, electrode3, electrode4, electrode5, electrode6, electrode7, electrode8, electricity
Pole9It is successively set on piezoelectric ceramics on piece；The second is：It is provided with multi-group electrode, every group of electrode is all to be evenly arranged in piezoelectricity pottery
On tile, for example, electrode11, electrode21, electrode31, electrode12, electrode22, electrode32, electrode13, electrode23, electrode33, electrode14, electricity
Pole24, electrode34It is successively set on piezoelectric ceramics on piece, wherein electrode11, electrode12, electrode13, electrode14For first group of electrode, electricity
Pole21, electrode22, electrode23, electrode24For second group of electrode, electrode31, electrode32, electrode33, electrode34For second group of electrode.These
Electrode is divided into one group of group, and the electrode between each group and another group is spaced setting according to this, and according to the drive characteristic of electrode（This
It is the characteristic that electrode itself has, therefore needs to be designed use according to actual needs in design）, form stepper motor
Stepping accuracy.Certainly it by after multiple electrodes division group, can also be powered in such a way that single electrode motivates stationary wave vibration.
Specifically, the ultrasonic step wave motor carries out step-by-step operation using following steps：
The multi-group electrode on the piezoelectric ceramic piece 50 is controlled, at least each electrode is powered wherein at least in two arrays of electrodes, and one
As for, be to this group of electrode while to be powered, for realize stepping, need to be powered between each group electrode according to this, to pass through electrode
Any one electrode drives the ultrasonic step wave motor in 60.
When the rotation step number of the ultrasonic step wave motor reaches first predetermined value, control any two in the electrode 60
A adjacent electrode is powered, and can according to actual needs or pre-set scheme, and the voltage for controlling adjacent electrode is different, thus
The step-length of control driving stepping, is driven by ultrasonic step wave motor described in any two adjacent electrode pair in electrode 60.
The accuracy of the stepper motor can understand in this way, it is assumed that it is special that all electrodes all use same specification excitation
The electrode of property（The electrode of different size can certainly be used, but controlling and design calculating can be more complicated）, then according to electrode
Drive characteristic can give adjacent electrode with scheduled identical driving voltage, and to motivate standing wave, which is in the adjacent electricity
Position between pole, and if cancelling the driving voltage of one of electrode at this time, motor can be by stepper drive to energization
Above electrode, in this way, the driving voltage by unit drives, so that it may realize the accurate step-wise displacement of half way between electrode.Together
Sample, in drive control, provided that the driving voltage of two lateral electrodes is different, such as side 20%, the other side 80%, then stepping is electric
Chance be driven to two electrodes spacing, close to 80% electrode side about spacing 1/5th position, stepping at this time
The spacing control no half way of meeting and a complete electrode spacing are more accurate, however still can be used as the control mode of stepper motor
It is achieved.
It is worth noting that be powered using single-phase alternating current coordination electrode 60, after the energization of electrode 60, piezoelectric ceramic piece 50
Vibration is generated, and motivates standing wave on elastomer 20, specifically motivates standing wave in the drive surface of elastomer 20.Standing wave one
A vibration period is known as single order, and a vibration period includes a wave crest and a trough, this two positions amplitude is maximum, vibration side
To opposite；One vibration period also includes the node that two amplitudes are zero, and several vibration weeks are distributed in the drive surface of elastomer 20
Phase had both been a few rank standing waves, and total standing wave node number in 20 drive surface of elastomer is twice of standing wave order.The frequency of single-phase alternating current
Rate is consistent with the frequency of standing wave, then passes through the adjustable standing wave order of frequency of change single-phase alternating current.The electricity of single-phase alternating current
The height of pressure determines the size of the amplitude of standing wave, and voltage is higher, and the amplitude of standing wave is bigger, and voltage is lower, and the amplitude of standing wave is smaller.
Standing wave order has difference to the electrode of different size, is a kind of characteristic of electrode itself, as the same vibration
Elastic bar, length, thickness, the density difference of rod piece can have a different vibration order characteristics, but select a few rank standing waves to be
It is related with the voltage of excitation.Although several ranks being finally capable of forming are stayed that is, electrode can have the characteristic of different rank
Wave is related with the frequency and amplitude of excitation.It, can be by taking mentioned-above elastic bar as an example, when using not for convenience of understanding
When the vibration of same frequency motivates it, the standing wave of single order, second order, three ranks ... etc. different rank may eventually form, but
For the elastic bar determining for one, formed the single order, second order, three rank ... different ranks standing wave Optimum Excitation vibration
Dynamic frequency（Namely resonant frequency）It is determining.Stepper motor of the invention is exactly the different rank standing wave institute that electrode is utilized
The driving voltage needed realizes step function to control.
Below in the way of being provided with multiple electrodes for be illustrated, the mode for being provided with multi-group electrode is referred to set
It is equipped with the mode of multiple electrodes.
Firstly, Contact Tooth 31 is in initial position, and initial position here can be the step before the energization of electrode 60
The initial position rotated into supersonic motor, is also possible to any position.As shown in Figure 1, when at least two electrodes 60 of control
Any one electrode 60（It is denoted as first electrode）When energization, piezoelectric ceramic piece 50 generates vibration, to motivate on elastomer 20
The first standing wave 1（For the convenience of description, Fig. 1 and Fig. 2 only show the vibrational waveform at standing wave moment）.Contact Tooth 31 can not be stablized
The position for being parked in 1 amplitude of the first standing wave and being not zero, the node location A for being located in the first standing wave that can only be stable, thus contact
Node location A displacement namely rotor 30 of the tooth 31 from initial position to the first standing wave rotate, and are then ready for step-by-step operation.
The angle that rotor 30 rotates at this time is related with the initial position of Contact Tooth 31, not necessarily has rotated one " step angle ".When
So, the initial position of Contact Tooth 31 is just the node location A of the first standing wave, then Contact Tooth 31 is not subjected to displacement namely rotor
30 do not rotate.
Secondly, when another electrode 60 at least two electrodes 60 of control（It is denoted as second electrode）When energization, piezoelectric ceramic piece
50 generate vibration, so that the second standing wave 2 motivated on elastomer 20, the node location B of the second standing wave are stayed relative to first
The node location A of wave is changed on spatial position, thus Contact Tooth 31 is stayed from the node location A of the first standing wave to second
The node location B of wave is displaced namely the rotation of rotor 30 continues step-by-step operation.When being successively powered to each electrode, for example, according to
It is secondary when being powered to first electrode and second electrode, the ultrasonic step wave electrode stepping may be implemented.The vibration of usual first standing wave 1
The amplitude of width and the second standing wave 2 is consistent, node location B of the Contact Tooth 31 from the node location A of the first standing wave to the second standing wave, this
When rotor 30 rotate angle be one " step angle ".The amplitude of the amplitude of certain first standing wave 1 and the second standing wave 2 can not also
It is identical.
More specifically, it controls any two electrode 60 at least two electrodes 60 to be powered, for example, controlling first electrode simultaneously
It is powered with second electrode, has spatial position poor in the stepper motor rotation direction between each electrode, at this time the first standing wave 1
It is overlapped to form the first superposition standing wave with the second standing wave 2, the node location C of the first superposition standing wave is located at the node of the first standing wave
Between position A and the node location B of the second standing wave, Contact Tooth 31 is displaced is stayed by the superposition of node location A to first of the first standing wave
The node location C of wave, less than one step angle of angle that rotor 30 rotates at this time, therefore the stepping of the ultrasonic step wave motor
Precision is improved.If the amplitude of the amplitude of the first standing wave 1 and the second standing wave 2 is consistent, node location C of the first superposition standing wave
Middle position between the node location A of the first standing wave and the node location B of the second standing wave, the then angle that rotor 30 rotates are
Half of step angle.
Ultrasonic step wave motor provided by the invention, since 50 lower surface of piezoelectric ceramic piece is provided at least two electricity
Pole 60 can drive the ultrasonic step wave motor by controlling at least two electrodes 60, improve the ultrasonic step wave motor
Stepping accuracy.Again since the motor shaft 70 sequentially passes through motor cabinet 10, stator, rotor 30, prepressing device 40, pass through motor
Seat 10, the limitation of stator, rotor 30, prepressing device 40 to motor shaft radially, more stable, prepressing device pair when motor shaft rotates
The precompression of rotor is more stable, thus rotor has big torque output performance.
In a specific embodiment of the present invention, please referring also to Fig. 5, Fig. 7-Fig. 9, the rotor 30 include side plate 33 and
The top plate 32 connecting with the top of the side plate 33, the side plate 33 are in central column, and the Contact Tooth 31 is set to the side plate
33 bottom, the top plate 32 are contacted with the prepressing device 40.The prepressing device 40 includes connecting with the motor shaft 70
Precompressed nut 41 and elastic component 42,42 both ends of elastic component are contacted with the top plate 32 and the precompressed nut 41 respectively.
Specifically, as shown in Figure 3-Figure 5, the motor shaft 70 passes through the motor cabinet 10, the stator, the rotor
30, and connect with the prepressing device 40.The outer diameter of top plate 32 and the outer diameter of side plate 33 are consistent with the outer diameter of elastomer 20.It connects
Touching tooth 31 is contacted with the upper surface of elastomer 20, and contact point is distributed in the outer rim of 20 upper surface of elastomer.Contact Tooth 31 is arranged
In the lower surface of side plate 33, the number of Contact Tooth 31 can be one or more, if Contact Tooth 31 is multiple（Usual Contact Tooth 31
Number be number of nodes approximate number, for example, when number of nodes be 10 when, Contact Tooth 31 can be set to 1,2,5 or 10
It is a）, multiple Contact Tooths 31 are evenly distributed in the outer rim of 20 upper surface of elastomer, preferably, the number and electrode of Contact Tooth 31
The number of nodes of the standing wave of 60 excitations is consistent, can obtain biggish driving force at this time.In order to make ultrasonic step wave electrode 60 more
Step up to gather, the second groove 34 for placing elastic component 42 is provided on top plate 32,34 bottom of the second groove is located at top plate 32 and elasticity
Between body 20, the height of ultrasonic step wave motor can reduce in this way, keep ultrasonic step wave motor lightening.Second groove 34
The size of opening upwards, the second groove 34 is adapted to the size of elastic component 42.
More specifically, Contact Tooth 31 is provided with the bottom surface 311 contacted with elastomer 20 and along the two of 20 radial direction of elastomer
A first side 312,312 rounding off of bottom surface 311 and first side.Certain Contact Tooth 31 is along elastomer 20 circumferential two the
Two side faces 313 and bottom surface 311 may be set to be rounding off.
Specifically, when the rotor 30 carries out stepping rotation, the motor shaft 70 is driven to rotate.The motor shaft 70 is in
Both ends open is cylindric.The elastic component 42 can be spring, elastic piece.Preferably, the elastic component 42 uses spring, spring
Across the motor shaft 70, and both ends of the spring is contacted with rotor 30 and precompressed nut 41 respectively.The motor shaft 70 with it is described pre-
Pressure device 40 connects, and specifically, for precompressed nut 41 with motor shaft 70 using being threadedly coupled, rotation precompressed nut 41 can make elasticity
Deformation occurs for part 42, and imposes precompression to rotor 30, so that rotor 30 be made to have precompression to stator.Rotate precompressed nut 41
Rotor 30 be can change to the size of stator precompression, precompression is too small, then causes output torque insufficient, precompression is too big, then
The amplitude of the standing wave of stator is substantially reduced, output torque is still insufficient.In different ultrasonic step wave motor and different make
With there is best precompressed force value under scene.Motor shaft 70 can pass through precompressed nut 41, can also be not passed through precompressed nut 41.Motor
Axis 70 is with precompressed nut 41 using being threadedly coupled, and specifically, 70 lateral surface of motor shaft is provided with external screw thread, 41 inside of precompressed nut
Face is provided with internal screw thread corresponding with external screw thread.
In a specific embodiment of the present invention, please referring also to Fig. 5-Fig. 6, being provided in the motor cabinet 10 makes the electricity
Arbor 70 passes through first through hole 11, and the motor shaft 70 is rotatablely connected by bearing 80 and the motor cabinet 10.
Specifically, the outer diameter of the internal diameter with motor shaft 70 of first through hole 11 is adapted to, and allows motor shaft 70 logical first
Rotation in hole 11.10 bottom of motor cabinet is provided with the first groove 12 for placing bearing 80, the size of the first groove 12 and institute
The size adaptation for stating the outer ring of bearing 80, forms that shape is sealed or friction lock.For example, the internal diameter of the first groove 12 and the axis
The outer diameter for holding 80 outer ring is consistent, so that the outer ring of bearing 80 is not produced relative sliding with the motor cabinet 10, motor shaft 70
Outer diameter is consistent with the internal diameter of inner ring of the bearing 80, slides relatively so that the inner ring of bearing 80 and the motor shaft 70 do not generate
Dynamic, when rotor 30 drives motor shaft 70 to rotate, the inner ring of bearing 80 can be rotated with the motor shaft 70, and the outer ring of bearing 80
It is remained stationary with motor cabinet 10.First groove, 12 bottom and 11 inner wall junction of first through hole are provided with chamfering 13, so that first
12 bottom of groove is not contacted with the inner ring of bearing 80, does not hinder the rotation of 80 inner ring of bearing.
In a specific embodiment of the present invention, please referring also to Fig. 3, Fig. 5, Fig. 7, Fig. 9 and Figure 10,70 side of motor shaft
Face forms cutting plane 71 along axial cutting；The second through-hole for passing through the motor shaft 70 is provided on the top plate 32
35, the confined planes contacted with the cutting plane 71 are provided on second through-hole 35.
Specifically, cutting plane 71 is limited due to confined planes, motor shaft 70 can be rotated with the rotor 30.It cuts
The face of scabbling 71 can be set to one or more, preferably, there are two cutting planes 71, and it is symmetricly set on the side of motor shaft 70
Face, then the cross section of motor shaft 70 is in playground shape.Accordingly, the second through-hole 35 on the top plate 32 is also in playground shape, cutting
Plane 71 is corresponding with confined planes, so that motor shaft 70 can not can only slide axially in the second through-hole 35 along rotation.Specifically
The bottom of the second groove 34 is arranged in ground, through-hole.It is of course also possible to which limit plate 36 is arranged under the second groove 34, pass through limit
Plate 36 and cutting plane 71 cooperate, the freedom degree that limiting motor axis 70 rotates in the second through-hole 35.
In a specific embodiment of the present invention, as shown in Figure 3 and Figure 6, the ultrasonic step wave motor further include with it is described
Motor cabinet 10 connects and the fixing piece 24 for fixing the stator.
Specifically, fixing piece 24 be arranged on motor cabinet 10, fixing piece 24 is threadedly coupled with motor cabinet 10, and by stator,
Piezoelectric ceramic piece 50 and electrode 60 are clamped on the motor cabinet 10.It is soft that the lower surface of the electrode 60 is provided with motor
Property circuit board 90（As shown in Figure 3 and Figure 4）, each electrode 60 pass through motor flexible circuit board 90 and power supply（It is not shown in the figure）Even
It connects.More specifically, the motor cabinet 10 includes：Pedestal 14, is arranged in first boss the first boss 15 being arranged on pedestal 14
Second boss 16 on 15 and the third boss 17 being arranged in second boss 16, first boss 15 are used for piezoelectric ceramic piece
50, electrode 60 and motor flexible circuit board 90 keep away position, and second boss 16 is for installing elastomer 20, third boss 17 and solid
Determine the threaded connection of part 24.After installing, 50 upper surface of piezoelectric ceramic piece is concordant with 16 upper surface of second boss.Please referring also to scheme
11- Figure 14, elastomer 20 include：End 21, base portion 23 and the interconnecting piece 22 for connecting end 21 and base portion 23；End 21 is in circle
Ring-type is located at the outer rim of elastomer 20, and also the inner edge annular in shape positioned at elastomer 20, interconnecting piece 22 are also in annulus to base portion 23
Shape.The lower surface of end 21 forms the mounting surface for installing piezoelectric ceramic piece 50, the settable piezoelectric ceramic piece 50 of mounting surface.Base
Portion 23 is mounted on motor cabinet 10, is specifically mounted in second boss 16.The thickness of interconnecting piece 22 is less than end 21, can be advantageous
Deformation is generated under drive of the end 21 in piezoelectric ceramic piece 50, and base portion 23 will not generate deformation.As shown in figure 14, elastomer
20 end 21 generates deformation and forms 5 rank standing waves, and the Oscillation Amplitude of 20 outer rim of elastomer is larger, and inner edge vibrates smaller, base portion
23 do not vibrate.
Specifically, elastomer 20 is usually in circular ring shape, and piezoelectric ceramic piece 50 also in circular ring shape and is fixed at elastomer
The end 21 of elastomer 20 is specifically arranged in 20 lower surface.The outer diameter of piezoelectric ceramic piece 50 and the outer diameter one of elastomer 20
It causes, the internal diameter of piezoelectric ceramic piece 50 is greater than the internal diameter of elastomer 20 namely piezoelectric ceramic piece 50 is distributed in 20 outer rim of elastomer, has
Body, piezoelectric ceramic piece 50 is distributed in the outer rim of end 21.Each electrode 60 is fan-shaped, and the size and shape of each electrode 60
Shape can be identical, can not also be identical, and the size and shape of each electrode 60 in the present embodiment is identical.Certainly, each electrode
60 can also be in other shapes, such as annular.Each electrode 60 is evenly distributed on 50 lower surface of piezoelectric ceramic piece.
The present invention also provides a kind of ultrasonic step wave motor control method based on the ultrasonic step wave motor compared with
Good embodiment：
A kind of ultrasonic step wave motor control method based on the ultrasonic step wave motor described in the embodiment of the present invention, including with
Lower step：
Step S100, it controls any one electrode 60 at least two electrodes 60 to be powered, by any at least two electrodes 60
One electrode 60 drives the ultrasonic step wave motor.
Specifically, before the energization of electrode 60, Contact Tooth 31 is in initial position, and initial position here can be described
The initial position of ultrasonic step wave motor rotation, is also possible to any position.When any one electricity at least two electrodes 60 of control
Pole 60（It is denoted as first electrode）When energization, piezoelectric ceramic piece 50 generates vibration, so that motivate on elastomer 20 first stays
Wave 1.Contact Tooth 31 can not be stable the position for being parked in 1 amplitude of the first standing wave and being not zero, can only be stable be located in the first standing wave
Node location A, thus Contact Tooth 31 from node location A from initial position to the first standing wave displacement namely rotor 30 rotate, after
And it is ready for step-by-step operation.The angle that rotor 30 rotates at this time is related with the initial position of Contact Tooth 31, not necessarily revolves
One " step angle " is turned.Certainly, the initial position of Contact Tooth 31 is just the node location A of the first standing wave, then Contact Tooth 31
It is not subjected to displacement namely rotor 30 does not rotate.
Step S100 further includes：
After the energization of electrode 60 any one at least two electrodes 60 of control drives the ultrasonic step wave motor, control
The energization of adjacent electrode 60 drives the ultrasonic step wave motor.
Specifically, it is powered using single-phase alternating current coordination electrode 60, naturally it is also possible to be handed over using two-phase alternating current or multiphase
Galvanic electricity.When using two electrodes 60, two electrodes 60 are successively powered according to distributing position namely two electrodes 60 are alternately logical
Electricity makes the ultrasonic step wave motor continue stepping rotation.When using multiple electrodes 60（More than two electrodes 60）When, Duo Ge electricity
Pole 60 is successively powered according to distributing position, and the ultrasonic step wave motor is made to continue stepping rotation.For example, 5 rank standing waves have 10
A node can be divided into 36 ° for 360 °, and each electrode 60 can produce corresponding 5 rank standing wave, and have corresponding 10 sections
Point, since 9 electrodes 60 have spatial position poor on elastomer 20, this 9 electrodes 60 can continue to be divided into 4 ° for 36 °, because
This, when being successively powered to 9 electrodes 60, the minimum rotation angle that can be obtained is 4 °.Certainly it can not also successively be powered here,
In electrode1After energization, to electrode6It is powered, then the angle that rotor 30 rotates is 20 °, and the purpose of this programme is to reduce rotor 30
The angle of rotation, therefore, by the way of being successively powered.
When another electrode 60 at least two electrodes 60 of control（It is denoted as second electrode）When energization, piezoelectric ceramic piece 50 is generated
Vibration, thus the second standing wave 2 motivated on elastomer 20, section of the node location B of the second standing wave relative to the first standing wave
Point position A is changed, thus node location B displacement of the Contact Tooth 31 from the node location A of the first standing wave to the second standing wave,
Namely the rotation of rotor 30 continues step-by-step operation.When being successively powered to first electrode and second electrode, the step may be implemented
Into 60 stepping of ultrasonic electrode.Node location B of the Contact Tooth 31 from the node location A of the first standing wave to the second standing wave, turns at this time
The angle of 30 rotation of son is one " step angle ".The amplitude of the amplitude of certain first standing wave 1 and the second standing wave 2 can also be incomplete
Identical, then the angle that Contact Tooth 31 rotates every time is different.
Step S200, when the rotation step number of the ultrasonic step wave motor reaches first predetermined value, control at least two
Any two electrode 60 is powered in electrode 60, with by any two electrode 60 at least two electrodes 60 to the ultrasonic step
Wave motor is driven.
Specifically, step S200 is specifically included：
Step S210, when the rotation step number of the ultrasonic step wave motor reaches first predetermined value, at least two electrodes are controlled
Any two electrode 60 leads to the electricity of identical voltage in 60, with by any two electrode 60 at least two electrodes 60 to the step
It is driven into supersonic motor.
Specifically, first predetermined value can be preset, and can be 0,1,2 to n integer.Here first predetermined value is
0, refer to and do not carry out step S100, directly progress step 200.When controlling, any two electrode 60 at least two electrodes 60 is logical
When the electricity of identical voltage, for example, be powered as shown in Fig. 2, controlling first electrode and second electrode simultaneously, 1 He of the first standing wave at this time
Second standing wave 2 is overlapped to form the first superposition standing wave, and the node location C of the first superposition standing wave is located at the node position of the first standing wave
Set the midpoint between A and the node location B of the second standing wave（As shown in Figure 1）, Contact Tooth 31 be displaced by the first standing wave section
Point position A to first is superimposed the node location C of standing wave, less than one step angle of angle of the rotation of rotor 30 at this time, therefore described
The stepping accuracy of ultrasonic step wave motor is improved.When two electrodes 60 lead to the electricity of identical voltage, the amplitude of the first standing wave 1 and
The amplitude of second standing wave 2 is consistent, and since first electrode is different with the spatial position of second electrode, the standing wave that the two is formed has sky
Between alternate position spike, the node location A of certain first standing wave and the node location B of the second standing wave are not overlapped.Due to the vibration of the first standing wave 1
The amplitude of width and the second standing wave 2 is consistent, and the node location C of the first superposition standing wave is located at the node location A and second of the first standing wave
Middle position between the node location B of standing wave.Here, in order to reduce the angle that rotor 30 rotates, in carrying out step S100
After control first electrode makes Contact Tooth 31 be located in the node location A of the first standing wave, then first electrode is controlled simultaneously and with the
The adjacent electrode of one electrode, at this time relative to the node location A of the first standing wave, the angle that rotor 30 rotates is half of step angle
（It is calculated with 5 rank standing waves and 9 electrodes, half of step angle is 2 °）.Non-conterminous two electrodes can certainly be controlled, for example,
First coordination electrode 1 rests on rotor after corresponding node location, while coordination electrode 1, electrode 4（It is equivalent to while controlling
Adjacent electrode 2, electrode 3）, at this point, the angle that rotor 30 rotates is 1.5 step angles（It is calculated with 5 rank standing waves and 9 electrodes,
1.5 step angles are 6 °）.
Step S220, when the rotation step number of the ultrasonic step wave motor reaches second predetermined value, control at least two
Any two electrode 60 leads to the electricity of different voltages in electrode 60, to pass through 60 pairs of institutes of any two electrode at least two electrodes 60
Ultrasonic step wave motor is stated to be driven.
Specifically, second predetermined value can be preset, and can be 0,1,2 to n integer.Here second predetermined value is
0, refer to and do not carry out step S210, directly progress step 220.When any two electrode 60 leads to not identical electricity in coordination electrode 60
Pressure（Here the amplitude that different voltage simply means to voltage is different, and frequency is identical）Electricity when, such as control simultaneously
First electrode and second electrode are powered, at this point, first electrode motivates the first standing wave 1, second electrode motivates third standing wave 3.
First standing wave 1 and third standing wave 3 are overlapped to form the second superposition standing wave, and the amplitude of third standing wave 3 is less than the first standing wave 1
The node location E of amplitude, the second superposition standing wave is located between the node location A of the first standing wave and the node location D of third standing wave,
Contact Tooth 31 is displaced the node location E that standing wave is superimposed by the node location A to second of the first standing wave, the angle that rotor 30 rotates at this time
Less than half step angle is spent, therefore the stepping accuracy of the ultrasonic step wave motor is further improved.Two electrodes 60
When the electricity of logical not identical voltage, the amplitude of the first standing wave 1 and the amplitude of third standing wave 3 are inconsistent, for example, the vibration of third standing wave 3
Width is the half of the amplitude of the first standing wave 1.Since first electrode is different with the spatial position of second electrode, the standing wave that the two is formed
Poor with spatial position, the node location A of certain first standing wave and the node location D of third standing wave are not overlapped.It stays due to first
The amplitude of wave 1 and the amplitude of third standing wave 3 are inconsistent, and the amplitude of third standing wave 3 is folded less than the amplitude of the first standing wave 1, second
The node location E of standing wave is added to be located between the node location A of the first standing wave and the node location D of third standing wave（As shown in Figure 2）,
Specifically, the node location E of the second superposition standing wave is located at the node location of the superposition standing wave of node location A and first of the first standing wave
Between C, then rotor 30 rotate less than half step angle of angle.Certainly, if the amplitude of the first standing wave 1 is less than third standing wave 3
Amplitude, the node location E of the second superposition standing wave are located at the node location C of the first superposition standing wave and the node location D of third standing wave
Between, then the angle that rotor 30 rotates is greater than half of step angle and less than one step angle, can according to need setting standing wave
Amplitude, the angle that control rotor 30 rotates.It is two adjacent using controlling simultaneously of course for the rotational angle for reducing rotor 30
Electrode, the amplitude of third standing wave 3 less than the first standing wave 1 amplitude when, the angle that rotor 30 rotates be 0 ° to half step angle it
Between degree（It is calculated with 5 rank standing waves and 9 electrodes, the angle that rotor 30 rotates at this time is a certain angle between 0 ° -2 °）.When
Two non-conterminous electrodes can also be so controlled simultaneously.
In order to further reduce the angle of the rotation of rotor 30, piezoelectric ceramic piece 50 can be increased and motivate staying for stationary wave vibration
The order of wave increases number of poles.
In conclusion the present invention realizes a kind of ultrasonic step wave electric motor and controller method, the ultrasonic step wave motor
Including：Motor shaft, the motor cabinet being sequentially sleeved on the motor shaft, stator, rotor and to the rotor apply precompression
Prepressing device；The motor shaft is rotatablely connected with the motor cabinet and is fixedly connected with the prepressing device；The stator packet
It includes elastomer and the elastomer lower surface and the piezoelectric ceramic piece for motivating stationary wave vibration is set, the piezoelectricity pottery
Tile lower surface is provided at least two electrodes；It is provided at least one Contact Tooth on the rotor, and passes through the Contact Tooth
It is contacted with the upper surface of the elastomer.Due to being powered in different ways by coordination electrode, the superimposed node of standing wave is utilized
The principle between two nodes before standing wave superposition, is precisely controlled the position of node, the step angle of reduced rotor improves
The stepping accuracy of the ultrasonic step wave motor.Again since the motor shaft sequentially passes through motor cabinet, stator, rotor, precompressed
Device, the ultrasonic step wave motor not only stepping accuracy with higher, and there is big torque output performance.
It should be understood that the application of the present invention is not limited to the above for those of ordinary skills can
With improvement or transformation based on the above description, all these modifications and variations all should belong to the guarantor of appended claims of the present invention
Protect range.
Claims (10)
1. a kind of ultrasonic step wave motor, which is characterized in that including：Motor shaft, the motor being sequentially sleeved on the motor shaft
Seat, stator, rotor and the prepressing device for applying precompression to the rotor；The motor shaft and the motor cabinet are rotatablely connected
And it is fixedly connected with the prepressing device；The stator includes elastomer and setting in the elastomer lower surface and for swashing
The piezoelectric ceramic piece of stationary wave vibration is encouraged out, the piezoelectric ceramic piece lower surface is provided at least two electrodes；It is set on the rotor
It is equipped at least one Contact Tooth, and is contacted by the Contact Tooth with the upper surface of the elastomer.
2. ultrasonic step wave motor according to claim 1, which is characterized in that the rotor include side plate and with it is described
The top plate connected at the top of side plate, the side plate are in central column, and the Contact Tooth is set to the bottom of the side plate, the top plate with
The prepressing device contact.
3. ultrasonic step wave motor according to claim 2, which is characterized in that the prepressing device includes and the motor
The precompressed nut and elastic component of axis connection, the elastic component both ends are contacted with the top plate and the precompressed nut respectively.
4. ultrasonic step wave motor according to claim 3, which is characterized in that the motor cabinet has for the motor
Axis passes through first through hole, and the motor shaft is rotatablely connected by bearing and the motor cabinet.
5. ultrasonic step wave motor according to claim 4, which is characterized in that the motor cabinet bottom is provided with for putting
The first groove of the bearing is set, first bottom portion of groove and first through hole inner wall junction are provided with chamfering.
6. ultrasonic step wave motor according to claim 3, which is characterized in that cut shape along axial in the motor shaft side
At cutting plane；There is the second through-hole for passing through for the motor shaft on the top plate, be provided on second through-hole with
The confined planes of the cutting plane contact.
7. ultrasonic step wave motor according to claim 1, which is characterized in that it further includes connecting simultaneously with the motor cabinet
For fixing the fixing piece of the stator, the fixing piece is threadedly coupled with the motor cabinet.
8. a kind of ultrasonic step wave motor control method based on ultrasonic step wave motor described in claim 1, which is characterized in that
Including step：
Any one electrode at least two electrodes is controlled to be powered, with by any one electrode at least two electrodes to the stepping
Supersonic motor is driven；
When the rotation step number of the ultrasonic step wave motor reaches first predetermined value, any two at least two electrodes are controlled
Electrode is powered, to be driven by any two electrode at least two electrodes to the ultrasonic step wave motor.
9. ultrasonic step wave motor control method according to claim 8, which is characterized in that at least two electricity of control
Any one electrode is powered in extremely, to be driven by any one electrode at least two electrodes to the ultrasonic step wave motor
Step further includes：
After electrode energization any one at least two electrodes of control drives the ultrasonic step wave motor, control is at least
Other electrode energizations drive the ultrasonic step wave motor in two electrodes.
10. ultrasonic step wave motor control method according to claim 8, which is characterized in that described super in the stepping
When the rotation step number of sound wave motor reaches first predetermined value, controls any two electrode at least two electrodes and be powered, to pass through
Any two electrode drive to the ultrasonic step wave motor and be specifically included at least two electrodes：
When the rotation step number of the ultrasonic step wave motor reaches first predetermined value, any two at least two electrodes are controlled
Electrode leads to the electricity of identical voltage, to be driven by any two electrode at least two electrodes to the ultrasonic step wave motor
It is dynamic；
When the rotation step number of the ultrasonic step wave motor reaches second predetermined value, any two at least two electrodes are controlled
Electrode leads to the electricity of different voltages, to be driven by any two electrode at least two electrodes to the ultrasonic step wave motor
It is dynamic.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810885848.5A CN108832837B (en) | 2018-08-06 | 2018-08-06 | Stepping ultrasonic motor and control method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810885848.5A CN108832837B (en) | 2018-08-06 | 2018-08-06 | Stepping ultrasonic motor and control method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108832837A true CN108832837A (en) | 2018-11-16 |
| CN108832837B CN108832837B (en) | 2024-03-19 |
Family
ID=64152683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810885848.5A Active CN108832837B (en) | 2018-08-06 | 2018-08-06 | Stepping ultrasonic motor and control method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108832837B (en) |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0495665A1 (en) * | 1991-01-17 | 1992-07-22 | Seiko Epson Corporation | Ultrasonic stepping motor |
| CN1140925A (en) * | 1995-05-15 | 1997-01-22 | 松下电器产业株式会社 | Ultrasonic wave electric motor |
| JPH1080161A (en) * | 1996-09-04 | 1998-03-24 | Matsushita Electric Ind Co Ltd | Ultrasonic motor and method for controlling ultrasonic motor |
| CN1299180A (en) * | 2000-12-08 | 2001-06-13 | 南京航空航天大学 | Multi-phase ultrasonic step motor |
| WO2004107554A2 (en) * | 2003-05-27 | 2004-12-09 | The Penn State Research Foundation | Piezoelectric motor and method of exciting an ultrasonic traveling wave to drive the motor |
| CN101707444A (en) * | 2009-11-12 | 2010-05-12 | 南京航空航天大学 | In-plane traveling wave rotary ultrasonic motor and control method |
| CN101707445A (en) * | 2009-11-12 | 2010-05-12 | 南京航空航天大学 | Sheet and dual traveling wave type rotary ultrasonic motor and control method thereof |
| JP2016013018A (en) * | 2014-06-30 | 2016-01-21 | キヤノン株式会社 | Control device and control method for vibration-type actuator and imaging apparatus |
| CN108011540A (en) * | 2017-12-04 | 2018-05-08 | 东南大学 | A kind of standing wave type ultrasonic step ripple motor |
| CN108681031A (en) * | 2018-08-06 | 2018-10-19 | 深圳市三阶微控实业有限公司 | A kind of micro-camera and its control method using ultrasonic step wave motor |
| CN109004861A (en) * | 2018-08-06 | 2018-12-14 | 深圳市三阶微控实业有限公司 | A kind of ultrasonic step wave electric motor and controller method |
| CN208461716U (en) * | 2018-08-06 | 2019-02-01 | 深圳市三阶微控实业有限公司 | A kind of ultrasonic step wave motor |
-
2018
- 2018-08-06 CN CN201810885848.5A patent/CN108832837B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0495665A1 (en) * | 1991-01-17 | 1992-07-22 | Seiko Epson Corporation | Ultrasonic stepping motor |
| CN1140925A (en) * | 1995-05-15 | 1997-01-22 | 松下电器产业株式会社 | Ultrasonic wave electric motor |
| JPH1080161A (en) * | 1996-09-04 | 1998-03-24 | Matsushita Electric Ind Co Ltd | Ultrasonic motor and method for controlling ultrasonic motor |
| CN1299180A (en) * | 2000-12-08 | 2001-06-13 | 南京航空航天大学 | Multi-phase ultrasonic step motor |
| WO2004107554A2 (en) * | 2003-05-27 | 2004-12-09 | The Penn State Research Foundation | Piezoelectric motor and method of exciting an ultrasonic traveling wave to drive the motor |
| CN101707444A (en) * | 2009-11-12 | 2010-05-12 | 南京航空航天大学 | In-plane traveling wave rotary ultrasonic motor and control method |
| CN101707445A (en) * | 2009-11-12 | 2010-05-12 | 南京航空航天大学 | Sheet and dual traveling wave type rotary ultrasonic motor and control method thereof |
| JP2016013018A (en) * | 2014-06-30 | 2016-01-21 | キヤノン株式会社 | Control device and control method for vibration-type actuator and imaging apparatus |
| CN108011540A (en) * | 2017-12-04 | 2018-05-08 | 东南大学 | A kind of standing wave type ultrasonic step ripple motor |
| CN108681031A (en) * | 2018-08-06 | 2018-10-19 | 深圳市三阶微控实业有限公司 | A kind of micro-camera and its control method using ultrasonic step wave motor |
| CN109004861A (en) * | 2018-08-06 | 2018-12-14 | 深圳市三阶微控实业有限公司 | A kind of ultrasonic step wave electric motor and controller method |
| CN208461716U (en) * | 2018-08-06 | 2019-02-01 | 深圳市三阶微控实业有限公司 | A kind of ultrasonic step wave motor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108832837B (en) | 2024-03-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5079470A (en) | Standing-wave type ultrasonic motor and timepiece | |
| US9419507B2 (en) | Actuator and electric beauty appliance | |
| KR101040474B1 (en) | Piezo actuator having electrode structure for the torsional vibration mode and ultrasonic motor containing the same | |
| US4812697A (en) | Ultrasonic vibrator and a method of controllingly driving same | |
| JPH05137355A (en) | Vibrating wave motor | |
| CN208461716U (en) | A kind of ultrasonic step wave motor | |
| CN1029344C (en) | Piezo-electric motor intended for timepiece | |
| CN208795910U (en) | A kind of micro-camera using ultrasonic step wave motor | |
| CN108832837A (en) | A kind of ultrasonic step wave electric motor and controller method | |
| CN109004861A (en) | A kind of ultrasonic step wave electric motor and controller method | |
| CN108681031B (en) | Miniature camera applying stepping ultrasonic motor and control method thereof | |
| CN108847783A (en) | A kind of ultrasonic step wave motor control method and system | |
| CN1133265C (en) | Standing wave type self-correcting ultrasonic motor | |
| TWI713560B (en) | Actuator and electric beauty treatment appliance | |
| JPS62126874A (en) | Ultrasonic vibrator and drive controlling method thereof | |
| JPS63181676A (en) | Ultrasonic rotary vibrator | |
| Wu et al. | A dual ring rotary traveling wave ultrasonic motor | |
| EP1519426B1 (en) | High-efficiency piezoelectric single-phase uni-polar ultrasonic actuators with a notched PZT back disc | |
| JP2001298969A (en) | Ultrasonic motor | |
| JPH01286784A (en) | Standing wave type ultrasonic motor | |
| JPS6013480A (en) | Piezoelectric motor | |
| JPH0475476A (en) | Ultrasonic motor | |
| JPH03190575A (en) | Ultrasonic motor | |
| JP2016027790A (en) | Actuator and electric hairdressing apparatus | |
| JPH03124281A (en) | Vibrator type actuator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |