CN108821264A - A kind of nanoscale sonic generator - Google Patents
A kind of nanoscale sonic generator Download PDFInfo
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- CN108821264A CN108821264A CN201810753802.8A CN201810753802A CN108821264A CN 108821264 A CN108821264 A CN 108821264A CN 201810753802 A CN201810753802 A CN 201810753802A CN 108821264 A CN108821264 A CN 108821264A
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/182—Graphene
- C01B32/194—After-treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
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- C01B32/182—Graphene
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Abstract
The invention discloses a kind of nanoscale sonic generators, it is lower than the substrate of 200W/mK, the sound generating membranes being laid in substrate including thermal conductivity, and two tone currents input elargol electrode and electrical signal input units, two elargol electrodes are separately positioned on the both ends of sound generating membranes, sound generating membranes, two elargol electrodes and electrical signal input unit series connection forming circuit；The sound generating membranes are graphene film, with a thickness of 60nm, 2.0~2.2g/cm of density is not more than3Between, it is crosslinked between graphene layer, the degree of cross linking has excellent electric heating property and thermal conductivity, can effectively cause the temperature vibration of air at film in 1-5%, the graphene film.The microphone device sound quality is good, and sound articulation is high.
Description
Technical field
The present invention relates to high-performance nano material and preparation method thereof more particularly to a kind of nanoscale sonic generators.
Background technique
2010, two professor Andre GeiM and Konstantin Novoselov of Univ Manchester UK because
It is successfully separated out stable graphene for the first time and obtains Nobel Prize in physics, has started the upsurge that graphene is studied in the whole world.
Graphene has excellent electric property (electron mobility is up to 2 × 105cM2/Vs at room temperature), performance (5000W/ outstanding
(MK), extraordinary specific surface area (2630M2/g), Young's modulus (1100GPa) and breaking strength (125GPa).Graphene is excellent
Different electrical and thermal conductivity performance is well beyond metal, while graphene has the advantages that corrosion-and high-temp-resistant, and its good machinery
Performance and lower density more allow it to have the potentiality in thermo electric material field substituted metal.Macroscopic view assembling graphene oxide or
The graphene film of person's graphene nanometer sheet is the main application form of nanoscale graphite alkene, common preparation method be suction method,
Scrape embrane method, spin-coating method, spray coating method and dip coating etc..By further high-temperature process, the defect of graphene can be repaired, it can
The effective electric conductivity and thermal conductance for improving graphene film, can be widely applied to sounding, acoustic detection, smart phone, intelligence
In the accompanied electronics equipment such as carry-on hardware, tablet computer, laptop.
But because of the presence of edge defect, in addition active force is weak between graphene layer, the graphene film one that high temperature sintering is crossed
As intensity it is all less high, be less than 100MPa, be unfavorable for its practical application.In addition, cross-linked structure and diamond knot between graphene layer
Structure is similar, does not damage to thermally conductive, will not seriously affect the heating conduction of graphene film.
So far, graphene film has begun PI base graphene film, the change applied to microphone device, such as laser preparation
Learn the graphene film of reduction.But both of the above film has inevitable defect, first, fault of construction is big, heating rate
Slowly；Second, thickness is very high, cooling rate is slow, and the clarity of sounding is poor thus；Third, film temperature tolerance is poor, sound equipment is adjusted
It is poor to spend.In view of the above problems, this patent devises nanometer thickness cross-linked graphene film.This film is applied to acoustic detection, has following
Advantage：First, membrane structure is perfect, structure and accumulation defect are few, and conductivity is high, and heating rate is fast；Second, at film thickness
In 60nm hereinafter, thermal conductivity is high, rapid heat dissipation；The above graphene film temperature rate is fast, determines that this film has fabulous sound quality,
Sound articulation is high.Third, graphene film defect is few, internal crosslinking, thermal stability is good, can be resistant to 520 degree in air of height
Temperature, sonority controllability are good；Fourth, graphene film thermal conductivity is high, sounding voltage is lower.
Summary of the invention
The purpose of the present invention is overcome the deficiencies of the prior art and provide a kind of nanoscale sonic generator.
The purpose of the present invention is what is be achieved through the following technical solutions：A kind of nanoscale sonic generator, which is characterized in that
It is lower than substrate, the sound generating membranes being laid in substrate and the electrical signal input unit and two of 200W/mK including thermal conductivity
A tone currents input elargol electrode, two elargol electrodes are separately positioned on the both ends of sound generating membranes, and sound wave occurs thin
Film, two elargol electrodes and electrical signal input unit series connection forming circuit；The sound generating membranes are graphene film, with a thickness of
No more than 60nm, between 2.0~2.2g/cm3 of density, be crosslinked between graphene layer, the degree of cross linking in 1-5%, graphene film by with
Lower section method is prepared：
(1) graphene oxide is configured to concentration is 0.5-10ug/mL graphene oxide water solution, filters film forming；
(2) graphene oxide membrane filtered in substrate will be attached to be placed in closed container, 80-100 degree HI high temperature is the bottom of from
Up fumigate 0.1-1h in portion；
(3) by the solid transfer agent even application of thawing in redox graphene film surface, and it is slowly cold at room temperature
But, until film and substrate separate；
(4) to step 3, treated that redox graphene film heats so that the distillation of solid transfer agent or
Volatilization；
(5) graphene membrane surface with the mode of magnetron sputtering in electronation sprays one layer of Titanium, molybdenum or cobalt etc.
Metal, 30% of mole no more than carbon atom mole in graphene film of the metal nanoparticle of sputtering；
(6) there is the graphene film of metal to carry out chlorination processing sputtering under 800-1200 degrees Celsius, metal nanoparticle with
Chloride form loss；
(7) graphene film after chlorination is placed in high temperature furnace, is warming up to 1500 degrees Celsius with 5-20 centigrade per minute, so
2000 degree of high temperature are warming up to 2-5 centigrade per minute afterwards, obtain the graphene film of interlayer crosslinking.
Further, substrate of the thermal conductivity lower than 200W/mK is selected from polymeric substrates, silicon base.
Further, solid transfer agent is selected from following substance, such as paraffin, naphthalene, arsenic trioxide, camphor, sulphur, drop ice
The small molecule solid matter not soluble in water that piece alkene, rosin etc. can distil or volatilize under certain conditions.
Further, the sublimation temperature of solid transfer agent will be controlled at 320 degree or less.
Further, chlorination processing refers to：The graphene film that sputtering has metal nanoparticle, which is placed in chlorine content, is
Heated in the environment of 0.5-10%, time 0.1-4h.
The beneficial effects of the present invention are：The mode of present invention solid transfer first, obtains ultra-thin graphene film, is device
The high resistance of part lays the foundation；Further by (1 DEG C/min) processing that slowly heats up, increase graphene membrane surface fold, extension
The area of graphene film in unit space；Then 2000 DEG C are set with 10 DEG C/min heating, to remove the overwhelming majority inside graphene
Atom defect, but do not restore stacked structure inside graphene.Further by ultra-thin graphene membrane surface splash-proofing sputtering metal particle,
Under high temperature, metallic and graphite alkene reaction form metal carbides；Then metal carbides are formed under the action of chlorine
Metal chloride and loss, meanwhile, carbon structure changes to diamond lattic structure, greatly improves film strength (reaching 7-20GPa)
And thermal stability, 2000 degree of high-temperature process so that graphene film structure obtains the recovery of high degree, but will not influence interlayer
Cross-linked structure and it not will form AB packed structures.The present invention sacrifices the partially electronically conductive heating conduction of graphene film, and interlayer is handed over
It is coupled structure and introduces graphene film interlayer, graphene film strength is greatly improved, by 80 times of its strength enhancing or more.This film is answered
For acoustic detection, there is following advantage：First, membrane structure is perfect, structure and accumulation defect are few, and conductivity is high, heating speed
Degree is fast；Second, film thickness is in 60nm hereinafter, thermal conductivity is high, rapid heat dissipation；The above graphene film temperature rate is fast, determines
This film has fabulous sound quality, and sound articulation is high.Third, graphene film defect is few, internal crosslinking, thermal stability is good, can
To be resistant to 520 degree in air of high temperature, sonority controllability is good；Fourth, graphene film thermal conductivity is high, sounding voltage is lower.
Detailed description of the invention
Fig. 1 is 2000 degrees Celsius of no cross-linked graphene film treated Raman map.
Fig. 2 is 2000 degrees Celsius of cross-linked graphene film treated Raman map.
The transmission map that Fig. 3 is handled for 2000 degrees Celsius of no cross-linked graphene film.
Fig. 4 is the transmission map of 2000 degrees Celsius of cross-linked graphene film processing.
Fig. 5 is that the tensile strength of 2000 degrees Celsius of cross-linked graphene film processing tests map.
Fig. 6 is the heating temperature lowering curve of the obtained graphene film of embodiment 1.
Fig. 7 is the T=1s moment, graphene film along two electrodes temperature curve in the straight direction.
Specific embodiment
Embodiment 1：
(1) graphene oxide is configured to concentration is 0.5ug/mL graphene oxide water solution, with hydrophilic polytetrafluoroethylmicroporous
Film is that substrate filters film forming.
(2) graphene oxide membrane for being attached at hydrophilic polytetrafluoroethylmicroporous film is placed in closed container, 80 degree of HI high temperature from
Up fumigate 1h in bottom.
(3) use the methods of vapor deposition, curtain coating by the solid transfer agent camphor even application of thawing in redox graphene film
Surface, and Slow cooling at room temperature, film and substrate separation.
(4) graphene film that solid transfer agent obtained above supports slowly is vapored away into solid transfer agent under 40 degree,
Obtain the graphene film of independent self-supporting.
(5) graphene membrane surface with the mode of magnetron sputtering in electronation sprays one layer of Titanium.It is splashed by control
Parameter is penetrated, the mole of the metal nanoparticle finally sputtered is 28.6% of carbon atom mole in graphene film.
There is the graphene film of metal to carry out chlorination processing sputtering under (6) 1200 degrees Celsius, so that titanium nanoparticle is with chlorine
Compound form loss.Specially：The graphene film that sputtering has metal nanoparticle is placed in the environment that chlorine content is 0.5%
Heated, time 4h.
(7) 2000 degree of high-temperature process of the graphene film after chlorination, 2000 degree of pyroprocess temperature-rise periods are as follows：1500 is Celsius
Degree is hereinafter, 20 centigrade per minutes；1500 degrees Celsius or more, 5 centigrade per minutes；Obtain the graphene film with a thickness of 59nm.
Comparison diagram 1,2 has the graphene film of numerous cross-linked structures to have stronger sp3Bonded peak (the 1360cm of carbon-1), pass through
ID/IG area ratio measures, and (degree of cross linking is sp to the degree of cross linking3Content-mass percent of carbon) it is 4.8%；Fig. 3,4, have
The graphene film electronic diffraction striped interlamellar spacing of cross-linked structure is smaller than normal graphene film electronic diffraction interlamellar spacing.Prepared
Graphene film intensity is 7GPa (Fig. 5), it is ensured that its thermal stability.The density of graphene film is 2.0g/cm3。
Two electrodes are connected in the left and right sides of graphene film, and measure the temperature of graphene Electric radiant Heating Film with temperature-control senser
Variation, this graphene film is under atmospheric environment, under the DC voltage of 10V, it is only necessary to just reach equilibrium temperature within 0.5 second
519 DEG C, and after powering off, due to the heat conductivity that graphene film is excellent, the temperature of film is just dropped in 0.5 second close to room temperature, such as
Shown in Fig. 6.To the T=1s moment, film surface temperature distribution map is obtained using infrared detecting set, the graphene film is along two electrodes
In the straight direction, temperature is stablized, at 519 DEG C or so for institute.
By above-mentioned 2 × 2cm of graphene film2It is laid on polyimide substrate (thermal conductivity 0.35W/mK), it is thin in graphene
Film both ends coat elargol electrode, and two elargol electrodes are connected with the positive and negative anodes of electrical signal input unit respectively, constitute the present invention
The nanoscale sonic generator.Due to film conductivity height, in applied voltage, the heating of meeting very exothermic, is withdrawn
Applied voltage, film is because of the reason of thermal conductivity is good and thinner thickness, heat dissipation very high speed, the two collective effect, so that
Film can quick heating and cooling, so as to cause the temperature vibration of air at film, thus sounding.Therefore, pass through the direct current of 10V
The secondary load of pressure, additionally by the specified audio signal of electrical signal input unit input, with adjust the voltage integrally inputted and
Change frequency can obtain determining air temperature vibration amplitude, i.e. pitch；Air can be adjusted by adjusting frequency input signal
Thermal shock dynamic frequency, and then the frequency shift of sounding, issue different sound.
Embodiment 2：
(1) by graphene oxide be configured to concentration be 10ug/mL graphene oxide water solution, using PC film be substrate suction filtration at
Film.
(2) graphene oxide membrane for being attached at PC film is placed in closed container, 100 degree of HI high temperature are up fumigated from bottom
0.1h。
(3) use the methods of vapor deposition, curtain coating by the solid transfer agent naphthalene even application of thawing in redox graphene film table
Face, and Slow cooling at room temperature.
(4) the slowly volatilization under 80 by the graphene film of solid transfer agent obtained above support, obtains independent self-supporting
Graphene film.
(5) graphene membrane surface with the mode of magnetron sputtering in electronation sprays one layer of Titanium.It is splashed by control
Parameter is penetrated, the mole of the metal nanoparticle finally sputtered is 18.4% of carbon atom mole in graphene film.
There is the graphene film of metal to carry out chlorination processing sputtering under (6) 800 degrees Celsius, so that titanium nanoparticle is with chlorination
Object form loss.Specially：Will sputtering have metal nanoparticle graphene film be placed in chlorine content be 10% environment in into
Row heat treatment, time 0.1h.
(7) 2000 degree of high-temperature process of the graphene film after chlorination, specially：1500 degrees Celsius hereinafter, 5 degrees Celsius every point
Clock；1500 degrees Celsius or more, 2 centigrade per minutes；2000 degree of heat preservation 1h；Obtain the graphene film with a thickness of 48nm.
It is tested through Raman, which has the graphene film of numerous cross-linked structures to have stronger sp3The bonded peak of carbon
(1360cm-1), it is measured by ID/IG area ratio, (degree of cross linking is sp to the degree of cross linking3Content-mass percent of carbon) be
1.1%；The graphene film electronic diffraction striped interlamellar spacing of crosslinking structure is smaller than normal graphene film electronic diffraction interlamellar spacing.
Prepared graphene film intensity is 7.6GPa, density 2.0g/cm3。
Two electrodes are connected in the left and right sides of graphene film, and measure the temperature of graphene Electric radiant Heating Film with temperature-control senser
Variation, this graphene film is under atmospheric environment, under the DC voltage of 10V, it is only necessary to just reach equilibrium temperature within 0.5 second
514 DEG C, and after powering off, due to the heat conductivity that graphene film is excellent, the temperature of film is just dropped in 0.5 second close to room temperature.It should
Graphene film in the straight direction along two electrode institutes, stablize, at 514 DEG C or so by temperature.
By above-mentioned 2 × 2cm of graphene film2It is laid on polyimide substrate (thermal conductivity 0.35W/mK), it is thin in graphene
Film both ends coat elargol electrode, and two elargol electrodes are connected with the positive and negative anodes of electrical signal input unit respectively, constitute the present invention
The nanoscale sonic generator.
Embodiment 3：
(1) graphene oxide is configured to concentration is 1ug/mL graphene oxide water solution, with hydrophilic polytetrafluoroethylmicroporous film
It filters and forms a film for substrate.
(2) hydrophilic polytetrafluoroethylmicroporous graphene oxide membrane will be attached to be placed in closed container, 90 degree of HI high temperature are the bottom of from
Up fumigate 0.5h in portion.
(3) use the methods of vapor deposition, curtain coating by the solid transfer agent sulphur even application of thawing in redox graphene film table
Face, and Slow cooling at room temperature.
(4) graphene film that solid transfer agent obtained above supports slowly is volatilized under 120 degree, is obtained independent from branch
The graphene film of support.
(5) graphene membrane surface with the mode of magnetron sputtering in electronation sprays one layer of metallic cobalt, is splashed by control
Parameter is penetrated, the mole of the metal nanoparticle finally sputtered is 15.9% of carbon atom mole in graphene film.
There is the graphene film of metal to carry out chlorination processing sputtering under (6) 1000 degrees Celsius, so that cobalt nanometer particle is with chlorine
Compound form loss.Specially：Will sputtering have metal nanoparticle graphene film be placed in chlorine content be 5% environment in into
Row heat treatment, time 1h.
(7) 2000 degree of high-temperature process of the graphene film after chlorination, specially：1500 degrees Celsius hereinafter, 10 degrees Celsius every point
Clock；1500 degrees Celsius or more, 3 centigrade per minutes；2000 degrees Celsius of heat preservation 0.5h；Obtain the graphene film with a thickness of 28nm.
It is tested through Raman, which has the graphene film of numerous cross-linked structures to have stronger sp3The bonded peak of carbon
(1360cm-1), it is measured by ID/IG area ratio, (degree of cross linking is sp to the degree of cross linking3Content-mass percent of carbon) be
1.9%；The graphene film electronic diffraction striped interlamellar spacing of crosslinking structure is smaller than normal graphene film electronic diffraction interlamellar spacing.
Prepared graphene film intensity is 11GPa, density 2.1g/cm3。
Two electrodes are connected in the left and right sides of graphene film, and measure the temperature of graphene Electric radiant Heating Film with temperature-control senser
Variation, this graphene film is under atmospheric environment, under the DC voltage of 10V, it is only necessary to just reach equilibrium temperature within 0.5 second
518 DEG C, and after powering off, due to the heat conductivity that graphene film is excellent, the temperature of film is just dropped in 0.5 second close to room temperature.It should
Graphene film in the straight direction along two electrode institutes, stablize by temperature.
By above-mentioned 2 × 2cm of graphene film2It is laid on polyimide substrate (thermal conductivity 0.35W/mK), it is thin in graphene
Film both ends coat elargol electrode, and two elargol electrodes are connected with the positive and negative anodes of electrical signal input unit respectively, constitute the present invention
The nanoscale sonic generator.
Embodiment 4：
(1) by graphene oxide be configured to concentration be 3ug/mL graphene oxide water solution, using AAO film be substrate suction filtration at
Film.
(2) graphene oxide membrane for being attached at AAO film is placed in closed container, 100 degree of HI high temperature are up smoked from bottom
Steam 0.2h.
(3) use the methods of vapor deposition, curtain coating by the solid transfer agent paraffin even application of thawing in redox graphene film
Surface, and Slow cooling at room temperature.
(4) graphene film that solid transfer agent obtained above supports slowly is volatilized under 200 degree, is obtained independent from branch
The graphene film of support.
(5) graphene membrane surface with the mode of magnetron sputtering in electronation sprays one layer of Titanium, is splashed by control
Parameter is penetrated, the mole of the metal nanoparticle finally sputtered is 25.4% of carbon atom mole in graphene film.
There is the graphene film of metal to carry out chlorination processing sputtering under (5) 1100 degrees Celsius, so that titanium nanoparticle is with chlorine
Compound form loss.Specially：Will sputtering have metal nanoparticle graphene film be placed in chlorine content be 2% environment in into
Row heat treatment, time 2h.
(6) 2000 degree of high-temperature process of the graphene film after chlorination, specially：1500 degrees Celsius hereinafter, 12 degrees Celsius every point
Clock；1500 degrees Celsius or more, 4 centigrade per minutes；2000 degrees Celsius of heat preservation 1h, obtain the graphene film with a thickness of 33nm.
It is tested through Raman, which has the graphene film of numerous cross-linked structures to have stronger sp3The bonded peak of carbon
(1360cm-1), it is measured by ID/IG area ratio, (degree of cross linking is sp to the degree of cross linking3Content-mass percent of carbon) be
2.2%；The graphene film electronic diffraction striped interlamellar spacing of crosslinking structure is smaller than normal graphene film electronic diffraction interlamellar spacing.
Prepared graphene film intensity is 9.6GPa, density 2.0g/cm3。
Two electrodes are connected in the left and right sides of graphene film, and measure the temperature of graphene Electric radiant Heating Film with temperature-control senser
Variation, this graphene film is under atmospheric environment, under the DC voltage of 10V, it is only necessary to just reach equilibrium temperature within 0.5 second
506 DEG C, and after powering off, due to the heat conductivity that graphene film is excellent, the temperature of film is just dropped in 0.5 second close to room temperature.It should
Graphene film in the straight direction along two electrode institutes, stablize by temperature.
By above-mentioned 2 × 2cm of graphene film2It is laid on polyimide substrate (thermal conductivity 0.35W/mK), it is thin in graphene
Film both ends coat elargol electrode, and two elargol electrodes are connected with the positive and negative anodes of electrical signal input unit respectively, constitute the present invention
The nanoscale sonic generator.
Embodiment 5：
(1) graphene oxide is configured to concentration is 10ug/mL graphene oxide water solution, with hydrophilic polytetrafluoroethylmicroporous film
It filters and forms a film for substrate.
(2) graphene oxide membrane for being attached at hydrophilic polytetrafluoroethylmicroporous film is placed in closed container, 80 degree of HI high temperature from
Up fumigate 0.8h in bottom.
(3) use the methods of vapor deposition, curtain coating by the solid transfer agent norbornene even application of thawing in reduction-oxidation graphite
Alkene film surface, and Slow cooling at room temperature.
(4) graphene film that solid transfer agent obtained above supports slowly is waved under 60 degree, 2 atmospheric pressure, is obtained
The graphene film of independent self-supporting.
(4) graphene membrane surface with the mode of magnetron sputtering in electronation sprays one layer of metal molybdenum.It is splashed by control
Parameter is penetrated, the mole of the metal nanoparticle finally sputtered is 22.8% of carbon atom mole in graphene film.
There is the graphene film of metal to carry out chlorination processing sputtering under (5) 800 degrees Celsius, so that molybdenum nanoparticle is with chlorination
Object form loss.Specially：The graphene film that sputtering has metal nanoparticle is placed in the environment that chlorine content is 6% and is carried out
Heat treatment, time 3h.
(6) 2000 degree of high-temperature process of the graphene film after chlorination, specially：1500 degrees Celsius hereinafter, 7 degrees Celsius every point
Clock；1500 degrees Celsius or more, 2 centigrade per minutes, 2000 degrees Celsius of heat preservation 1h obtain the graphene film with a thickness of 36nm.
It is tested through Raman, which has the graphene film of numerous cross-linked structures to have stronger sp3The bonded peak of carbon
(1360cm-1), it is measured by ID/IG area ratio, (degree of cross linking is sp to the degree of cross linking3Content-mass percent of carbon) be
3.7%；The graphene film electronic diffraction striped interlamellar spacing of crosslinking structure is smaller than normal graphene film electronic diffraction interlamellar spacing.
Prepared graphene film intensity is 9.8GPa, density 2.2g/cm3。
Two electrodes are connected in the left and right sides of graphene film, and measure the temperature of graphene Electric radiant Heating Film with temperature-control senser
Variation, this graphene film is under atmospheric environment, under the DC voltage of 10V, it is only necessary to just reach equilibrium temperature within 0.5 second
503 DEG C, and after powering off, due to the heat conductivity that graphene film is excellent, the temperature of film is just dropped in 0.5 second close to room temperature.It should
Graphene film in the straight direction along two electrode institutes, stablize by temperature.
By above-mentioned 2 × 2cm of graphene film2It is laid on polyimide substrate (thermal conductivity 0.35W/mK), it is thin in graphene
Film both ends coat elargol electrode, and two elargol electrodes are connected with the positive and negative anodes of electrical signal input unit respectively, constitute the present invention
The nanoscale sonic generator.
Claims (5)
1. a kind of nanoscale sonic generator, which is characterized in that be lower than the substrate of 200W/mK including thermal conductivity, be laid in substrate
On sound generating membranes and electrical signal input unit and two tone currents input elargol electrodes, two elargol electrodes
It is separately positioned on the both ends of sound generating membranes, sound generating membranes, two elargol electrodes and electrical signal input unit series connection shape
At circuit；The sound generating membranes are graphene film, with a thickness of 60nm, 2.0~2.2g/cm of density is not more than3Between, graphite
The crosslinking of alkene interlayer, the degree of cross linking are prepared by the following method to obtain in 1-5%, the graphene film：
(1) graphene oxide is configured to concentration is 0.5-10ug/mL graphene oxide water solution, filters film forming；
(2) graphene oxide membrane that will be attached in suction filtration substrate is placed in closed container, and 80-100 degree HI high temperature is past from bottom
Upper stifling 0.1-1h；
(3) by the solid transfer agent even application of thawing in redox graphene film surface, and Slow cooling at room temperature, directly
It is separated to film and substrate；
(4) to step 3, treated that redox graphene film heats, so that the distillation of solid transfer agent or waving
Hair；
(5) graphene membrane surface one layer of Titanium of spraying with the mode of magnetron sputtering in electronation, the metals such as molybdenum or cobalt,
30% of the mole of the metal nanoparticle of sputtering no more than carbon atom mole in graphene film；
(6) graphene film of metal carries out chlorination processing sputtering under 800-1200 degrees Celsius, metal nanoparticle is with chlorination
Object form loss；
(7) graphene film after chlorination is placed in high temperature furnace, is warming up to 1500 degrees Celsius with 5-20 centigrade per minute, then with
2-5 centigrade per minute is warming up to 2000 degree of high temperature, obtains the graphene film of interlayer crosslinking.
2. nanoscale sonic generator as described in claim 1, which is characterized in that substrate of the thermal conductivity lower than 200W/mK is selected
Autohemagglutination polymer substrates, silicon base.
3. nanoscale sonic generator as described in claim 1, which is characterized in that the solid transfer agent, selected from as follows
Substance, such as paraffin, naphthalene, arsenic trioxide, camphor, sulphur, norbornene, rosin etc. can distil or volatilize under certain conditions
Small molecule solid matter not soluble in water.
4. nanoscale sonic generator as described in claim 1, which is characterized in that the sublimation temperature of the solid transfer agent
It controls at 320 degree or less.
5. nanoscale sonic generator as described in claim 1, which is characterized in that the chlorination processing refers to：Sputtering is had
The graphene film of metal nanoparticle, which is placed in the environment that chlorine content is 0.5-10%, to be heated, time 0.1-
4h。
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109451406A (en) * | 2018-12-05 | 2019-03-08 | 浙江大学 | The hanging graphene thermal acoustic device rung with flat and wideband |
| CN109928385A (en) * | 2019-03-17 | 2019-06-25 | 杭州高烯科技有限公司 | A kind of preparation method and application of zero defect closs packing graphene submicron film |
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